CN111519161A - Vacuum coating process chamber and vacuum suspension coating machine with same - Google Patents
Vacuum coating process chamber and vacuum suspension coating machine with same Download PDFInfo
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- CN111519161A CN111519161A CN202010400910.4A CN202010400910A CN111519161A CN 111519161 A CN111519161 A CN 111519161A CN 202010400910 A CN202010400910 A CN 202010400910A CN 111519161 A CN111519161 A CN 111519161A
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- 238000000034 method Methods 0.000 title claims abstract description 92
- 230000008569 process Effects 0.000 title claims abstract description 91
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 39
- 238000000576 coating method Methods 0.000 title claims abstract description 21
- 239000000725 suspension Substances 0.000 title claims abstract description 16
- 239000011248 coating agent Substances 0.000 title claims abstract description 15
- 238000005507 spraying Methods 0.000 claims abstract description 72
- 238000010438 heat treatment Methods 0.000 claims abstract description 35
- 238000007664 blowing Methods 0.000 claims abstract description 31
- 230000007704 transition Effects 0.000 claims abstract description 30
- 239000011261 inert gas Substances 0.000 claims abstract description 9
- 239000007921 spray Substances 0.000 claims description 24
- 238000004804 winding Methods 0.000 claims description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 7
- 239000000498 cooling water Substances 0.000 claims description 7
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 35
- 239000007789 gas Substances 0.000 description 13
- 238000005192 partition Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 239000007888 film coating Substances 0.000 description 6
- 238000009501 film coating Methods 0.000 description 6
- 238000007667 floating Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Abstract
The invention provides a vacuum coating process cavity, which comprises a cavity cover, a cavity wall and a cavity bottom plate, and also comprises a spraying system and a heating and blowing-supporting system; the spraying system comprises a component inlet channel, a guide plate and a spraying plate, wherein the guide plate is arranged at the upper part of the spraying plate, a guide groove is arranged in the guide plate, and the component inlet channel is fixed at the left end and the right end of the guide plate; the heating blowing support system comprises a heating plate and a blowing plate, the heating plate improves the temperature of the environment in the process cavity, and the blowing plate blows inert gas to the bottom of the film base band to support the film base band. The invention also provides a vacuum suspension coating machine which comprises the vacuum coating process chamber, an unreeling transition chamber, a reeling transition chamber and a reeling chamber. The invention adopts a vacuum suspension technology, reduces the requirements on precision of processing, mounting and adjusting of the carrier roller in the original vacuum coating process cavity, and ensures the stability of the film operation and the coating process.
Description
Technical Field
The invention mainly relates to the field of reel-to-reel vacuum equipment, in particular to a vacuum coating process chamber and a vacuum suspension coating machine with the same.
Background
In a roll-to-roll flexible strip vacuum coating production line, the length of the strip reaches thousands of meters, and the production line reaches dozens of meters due to the requirement of a film layer structure. In long-distance processing and conveying of the flexible strip material, the phenomena of unstable tension, wrinkling, sagging and the like of the film often occur due to unstable operation of equipment or change of the material per se due to external environment. These unstable factors that occur during the operation of the film substrate may cause damage to the film, instability of the coating process, impact on the normal operation of the coating process, and impact on the overall performance of the apparatus.
The existing film base band of the vacuum coating process cavity is basically supported in a carrier roller mode, namely people adjust the direction and the number of carrier rollers according to specific adverse characteristic phenomena generated by a conveying belt in actual use, then the running condition is observed until the conveying belt can normally guide the film to normally run and coat, the adjusting mode mostly depends on the use experience, the adjusting period is long, the cost is high, and the adjusting mode does not meet the requirements of modern production.
Disclosure of Invention
In order to solve the technical problem, the invention is realized by the following technical scheme:
a vacuum coating process chamber comprises a chamber cover, a chamber wall and a chamber bottom plate, and also comprises a spraying system and a heating and blowing system; the spraying system comprises a component inlet channel, a guide plate and a spraying plate, wherein the guide plate is arranged at the upper part of the spraying plate, a guide groove is arranged in the guide plate, and the component inlet channel is fixed at the left end and the right end of the guide plate; the heating blowing support system comprises a heating plate and a blowing plate, the heating plate improves the temperature of the environment in the process cavity, and the blowing plate blows inert gas to the bottom of the film base band to support the film base band.
Further, the guiding gutter includes guiding gutter, guiding hole and lower guiding gutter, it includes the main channel that sets up along composition approach direction and a plurality of time channel that links to each other with the main channel to go up the guiding gutter, a plurality of the mutual parallel arrangement of main channel, the crisscross setting each other of time channel, be provided with the guiding hole on the time channel, the lower extreme intercommunication in guiding hole has lower guiding gutter.
Furthermore, the spraying plate comprises a first spraying plate and a second spraying plate, the second spraying plate is fixed at the bottom of the first spraying plate, and the first spraying plate is sequentially provided with a first spraying hole and a first spraying groove from top to bottom; the second spraying plate is provided with a second spraying hole and a second spraying groove in sequence from top to bottom; the lower diversion trench is communicated with the first spraying holes, the first spraying trenches are communicated with the second spraying holes, and the second spraying holes are smaller than the first spraying holes and are more than the first spraying holes in number.
Further, the first spraying plate is arranged at the lower part of the cavity cover through a first spraying plate connecting mechanism.
Further, the heating blowing support system further comprises a supporting column, the heating plate is arranged at the top of the supporting column, the blowing plate is fixed on the heating plate, and the bottom end of the supporting column is fixed on the cavity bottom plate.
Further, the heating blowing and supporting system further comprises a reflecting plate, and the reflecting plate is arranged on the middle step of the supporting column.
Further, the heating blowing and supporting system also comprises a gasket, and the gasket is fixed at the bottom of the supporting column and/or the top of the supporting column.
The cooling system is a cooling water pipe system which is fully distributed on the cavity cover, the cavity wall and the cavity bottom, and the cooling water pipe system is arranged on the inner side and/or the outer side of the cavity.
The invention also provides a vacuum suspension coating machine, which comprises the vacuum coating process cavity, an unreeling transition cavity, a reeling transition cavity and a reeling cavity; the unreeling cavity, the unreeling transition cavity, the vacuum coating process cavity, the reeling transition cavity and the reeling cavity are sequentially and continuously arranged.
Furthermore, the device also comprises a nitrogen gas curtain, wherein the nitrogen gas curtain is respectively arranged between the unreeling transition cavity and the vacuum coating process cavity and between the vacuum coating process cavity and the reeling transition cavity.
Furthermore, a plurality of vacuum coating process chambers are arranged, and the nitrogen gas curtain is arranged between the adjacent vacuum coating process chambers.
The invention has the beneficial effects that:
the invention adopts a vacuum suspension technology, reduces the requirements on precision of processing, mounting and adjusting of the carrier roller in the original vacuum coating process cavity, and ensures the stability of the film operation and the coating process. The vacuum suspension coating mechanism adopting the vacuum coating process chamber can be suitable for continuous, low-cost, real-time and flexible vacuum process coating on the film substrate.
Drawings
FIG. 1 is a schematic structural view of a vacuum coating process chamber according to the present invention;
FIG. 2 is a schematic view of an upper baffle slot of the baffle of the present invention;
FIG. 3 is a partial schematic view of the upper baffle slot and baffle holes of the baffle of the present invention;
FIG. 4 is a schematic view of the connection between the baffle, the first shower plate and the second shower plate of the present invention;
FIG. 5 is a schematic structural view of a vacuum suspension coater of the present invention;
wherein: 1. an unwinding cavity; 1-1, unwinding a reel; 2. an unwinding transition cavity; 2-1, unwinding a main drive partition; 3. a first process chamber; 3-1, component entering; 3-2, a first spraying plate connecting mechanism; 3-3, a deflector; 3-4, a first spray plate; 3-5, a second spray plate; 3-6, a support column; 3-7, heating plate; 3-8, a blowing plate; 3-9, heat reflecting plate; 3-10 parts of gasket, 3-11 parts of upper diversion trench; 3-12, flow guide holes; 3-13, lower diversion trenches; 3-14, first spray holes; 3-15, a first spray tank; 3-16, second spraying holes; 3-17, a second spray tank; 4. a second process chamber; 5. a rolling transition cavity; 5-1, winding a main drive partition; 6. a winding cavity; 6-1, winding a shaft; 7. a nitrogen gas curtain; 8. a guide roller; 9. a tension detection roller; 10. a floating roll; 11. flattening rollers; 12. and (3) a film base band.
Detailed Description
The preferred mechanisms and methods of motion realization of the present invention are further described below in conjunction with the figures and the detailed description.
As shown in fig. 1, a vacuum coating process chamber includes a chamber cover, a chamber wall and a chamber bottom plate, which surround to form a vacuum process environment for suspension coating, and a thin film base band 12 penetrates in and out from two end interfaces of the chamber wall respectively.
The vacuum coating process chamber also comprises a spraying system, a heating and blowing system, a vacuumizing system and a cooling system.
The spraying system comprises a component inlet 3-1, a spraying plate connecting mechanism 3-2, a guide plate 3-3, a first spraying plate 3-4 and a second spraying plate 3-5.
The first spraying plate 3-4 is arranged at the lower part of the cavity cover through a spraying plate connecting mechanism 3-2, the guide plate 3-3 is arranged at the upper part of the first spraying plate 3-4, and the second spraying plate 3-5 is fixed at the bottom of the first spraying plate 3-4.
As shown in fig. 2, 3 and 4, the guide plate 3-3 is provided with guide grooves, and the guide grooves comprise upper guide grooves 3-11, guide holes 3-12 and lower guide grooves 3-13 which are arranged from top to bottom in sequence; the upper diversion trench 3-11 comprises a main channel and a plurality of secondary channels, wherein the main channel is arranged along the component inlet direction, the secondary channels are connected with the main channel, the main channels are arranged in parallel, the secondary channels are arranged in a staggered mode, diversion holes 3-12 are formed in the secondary channels, and the lower ends of the diversion holes 3-12 are communicated with lower diversion trenches 3-13.
The first spraying plate 3-4 is provided with first spraying holes 3-14 and first spraying grooves 3-15 in sequence from top to bottom; the second spraying plate 3-5 is provided with second spraying holes 3-16 and second spraying grooves 3-17 in sequence from top to bottom; the lower diversion trenches 3-13 are communicated with the first spraying holes 3-14, and the first spraying trenches 3-15 are communicated with the second spraying holes 3-16.
The component inlet channels 3-1 are fixed at the left and right ends of the guide plate 3-3, and the component inlet channels are equivalent to a confluence plate. After the process component gas enters the component inlet channel from the outside of the vacuum coating process cavity, the process component gas enters the upper diversion trench 3-11 of the diversion plate 3-3 through the round hole channel in the component inlet channel, gradually fills the diversion plate 3-3, but is distributed unevenly, the two sides are more and the middle is thin, then enters the first spraying hole 3-14 and the first spraying trench 3-15 of the first spraying plate 3-4 through the diversion hole 3-12 and the lower diversion trench 3-13 on the diversion plate 3-3, the first spraying plate 3-4 mainly has the function of distributing and proportioning the process component gas according to the process requirements, but the process component gas is in the shape of bell mouth when the process component is sprayed out from the holes or the trenches, the holes of the first spraying hole 3-14 and the first spraying trench 3-15 are large and small in number, so the process component sprayed out from the first spraying plate 3-4 is still unevenly distributed, considering the coating process quality requirement of the vacuum coating process cavity, the second spray plate 3-5 is added, so that the circulation path of the air flow in the second spray holes 3-16 and the second spray grooves 3-17 is prolonged, the air flow is uniformly diffused in the second spray holes 3-16 and the second spray grooves 3-17, the holes of the second spray holes 3-16 and the second spray grooves 3-17 are small, the number of the holes is large, and the process components can be uniformly sprayed on the film base band 12 from the nozzle openings of the second spray plate 3-5 finally.
The heating blowing-supporting system comprises supporting columns 3-6, heating plates 3-7, air blowing plates 3-8, heat reflecting plates 3-9 and gaskets 3-10.
The bottom ends of the support columns 3-6 are fixed on the cavity bottom plate, the top ends support the heating plates 3-7, and the middle steps support the heat reflection plates 3-9; the air blowing plates 3-8 are fixed on the heating plates 3-7, and the gaskets 3-10 are respectively fixed at the bottoms and/or tops of the supporting columns 3-6 and used for adjusting the distance between the air blowing plates 3-8 and the film base bands 12.
The blowing plates 3-8 in the film coating device are used for blowing out inert gas, so that the film base band 12 can be suspended in a film coating area on one hand, the phenomenon that the film sags due to the self weight of the film is avoided, the film coating is uneven on the other hand, and the heated inert gas can heat the film base band 12 on the other hand; the heating plate 3-7 is used for heating the cavity and the air blowing plate 3-8, so that the inert gas blown out by the air blowing plate 3-8 can heat the film base band 12, and the temperature of the film base band 12 and the temperature in the cavity can meet the requirement of the coating environment temperature; the reflecting plate is used for keeping the temperature, and reflecting the heat radiation emitted by the heating plates 3-7 back to avoid heat dissipation after being received by the bottom of the cavity.
The cooling system comprises a cooling water pipe system which is fully distributed on the cavity cover, the cavity wall and the cavity bottom, the cooling water pipe system can be arranged in the cavity or outside the cavity, and the cooling water takes away the redundant heat in the cavity through the flow in the cooling pipeline. As the process component gases are two gases, the mutual reaction is sufficient under a certain temperature environment, and the chemical reaction is accompanied with the heat absorption process, and the continuous heating is carried out through the heating plates 3-7, thereby ensuring that the temperature in the cavity reaches the process requirement; in addition, the inert gas blown by the air blowing plates 3-8 can also heat the film base band 12, which is beneficial to the generation and combination of chemical reaction on the surface of the film base band 12. However, when the heat provided by the heating plates 3-7 in the cavity exceeds the required process temperature precision, the cooling system is opened at the moment to take away the redundant heat in the cavity and cool the cavity, so that the heat in the cavity is in a dynamic balance, and the temperature precision requirement on the process is met.
The vacuum pumping system comprises a pump pipe, a vacuum angle valve, a vacuum pump and a vacuum gauge. Wherein, the vacuum angle valve sets up in the cavity to be connected to the vacuum pump through the pump line, the vacuum gauge dress is used for detecting the vacuum degree in the intracavity on the cavity. When the process cavity is in a working state, the vacuum pump is in a constantly-opened state, and the process component gas sprayed by the spraying system and the inert gas blown by the heating blowing system realize dynamic balance in the process cavity so as to maintain the requirement of a vacuum degree environment required by the process.
The working process of the process cavity comprises the following steps:
the film base band 12 advances from one end of the process cavity to the other end at a constant speed, the second spraying plate 3-5 above the film base band 12 sprays process component gas at the constant speed, the process component gas is uniformly sprayed on the film base band 12 for coating, the gas blowing plate 3-8 below the film base band 12 blows inert gas heated by a heater towards the back of the film base band 12, the self weight of the film base band 12 and the pressure caused by the process gas sprayed by the first spraying plate 3-4 above the film base band 12 are balanced, the film base band 12 is enabled to be suspended and flat, and therefore the surface of the film base band 12 is ensured to be coated uniformly.
As shown in fig. 5, a vacuum suspension coating machine comprises a vacuum coating process chamber, and further comprises an unwinding chamber 1, an unwinding transition chamber 2, a winding transition chamber 5 and a winding chamber 6; unreeling cavity 1, unreeling transition cavity 2, vacuum coating process cavity, rolling transition cavity 5 and rolling cavity 6 are set successively. In this embodiment, the vacuum coating process chamber is set as 2 process chambers, which are respectively set as the first process chamber 3 and the second process chamber 4, but the number of the process chambers may also be designed to be 1 or 3 or even more according to the process requirements of the product.
And nitrogen gas curtains 7 are arranged between the unreeling transition cavity 2 and the first process cavity 3, between the first process cavity 3 and the second process cavity 4 and between the second process cavity 4 and the reeling transition cavity 5. The nitrogen gas air curtain 7 divides the whole vacuum suspension coating machine into a plurality of mutually independent working intervals, when the first process chamber 3 and the second process chamber 4 are coated with films with different components, the interference of different materials of the two process chambers can be prevented, process component gas is prevented from entering the winding and unwinding chamber 1 and the transition chamber thereof, and hidden dangers such as the blocking of mechanical parts are caused.
In addition, the vacuum suspension coating machine also comprises a driving system, a vacuum pumping system and a control system.
The unwinding cavity 1 is provided with an unwinding shaft 1-1 and a guide roller 8, the winding cavity 6 is provided with a winding shaft 6-1 and a guide roller 8, and the unwinding cavity 1 and the winding cavity 6 are respectively used for unwinding and winding the film base band, namely unwinding and winding.
The unwinding transition cavity 2 is provided with an unwinding main drive partition 2-1, a tension detection roller 9, a floating roller 10, a flattening roller 11 and a guide roller 8, the unwinding main drive partition 2-1 is mainly used for carrying out process tension partition on unwinding, then respectively measuring and calculating the unwinding and winding roll diameters, and the flattening roller 11 is used for flattening a film and detecting tension; the winding transition cavity 5 is provided with a winding main drive partition 5-1, a tension detection roller 9, a floating roller 10 and a guide roller 8, so that the process tension and the winding tension are independent, the winding tension can be subjected to gradient control, the film coating machine is suitable for large-winding-diameter film coating, and the production efficiency is improved.
The first process chamber 3 and the second process chamber 4 have the same structure, are used as coating chambers, and ensure the stable operation of a coating process through the schemes of spraying at the upper part of the chamber and blowing at the lower part of the chamber. The two process chambers are separated from each other through the nitrogen curtain, so that the environments in the two process chambers are independent from each other and do not influence each other.
The process component gases of the two process chambers can adopt the same components or different components, and can be set according to actual production requirements.
The whole machine operation flow is as follows: in the unreeling cavity 1, an unreeling shaft 1-1 unreels, and is guided into an unreeling transition cavity 2 through a guide roller 8; the film base band enters an unreeling transition cavity 2, sequentially passes through a tension detection roller 9, a guide roller 8, an unreeling main drive partition 2-1, the guide roller 8, a floating roller 10, the tension detection roller 9, a flattening roller 11 and the guide roller 8 of the unreeling transition cavity 2, sequentially sends a film base band 12 into a first process cavity 3 and a second process cavity 4, and enters a reeling transition cavity 5 after film coating is finished; the winding transition cavity 5 enters a winding cavity 6 through a tension detection roller 9, a winding main drive partition 5-1, a guide roller 8, a floating roller 10, a tension detection roller 9 and a guide roller 8; the winding shaft 6-1 is guided by a guide roller 8 of the winding cavity, and the winding shaft 6-1 finishes winding finally.
Finally, it should be noted that: although the present invention has been described in detail with reference to the embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (11)
1. A vacuum coating process chamber comprises a chamber cover, a chamber wall and a chamber bottom plate, and is characterized by also comprising a spraying system and a heating and blowing-supporting system; the spraying system comprises a component inlet channel, a guide plate and a spraying plate, wherein the guide plate is arranged at the upper part of the spraying plate, a guide groove is arranged in the guide plate, and the component inlet channel is fixed at the left end and the right end of the guide plate; the heating blowing support system comprises a heating plate and a blowing plate, the heating plate improves the temperature of the environment in the process cavity, and the blowing plate blows inert gas to the bottom of the film base band to support the film base band.
2. The vacuum coating process chamber according to claim 1, wherein the guiding grooves comprise upper guiding grooves, guiding holes and lower guiding grooves, the upper guiding grooves comprise main grooves arranged along the component inlet direction and a plurality of secondary grooves connected with the main grooves, the main grooves are arranged in parallel, the secondary grooves are arranged in a staggered manner, the secondary grooves are provided with the guiding holes, and the lower ends of the guiding holes are communicated with the lower guiding grooves.
3. The vacuum coating process chamber according to claim 2, wherein the spray plate comprises a first spray plate and a second spray plate, the second spray plate is fixed at the bottom of the first spray plate, and the first spray plate is provided with a first spray hole and a first spray groove in sequence from top to bottom; the second spraying plate is provided with a second spraying hole and a second spraying groove in sequence from top to bottom; the lower diversion trench is communicated with the first spraying holes, the first spraying trenches are communicated with the second spraying holes, and the second spraying holes are smaller than the first spraying holes and are more than the first spraying holes in number.
4. The vacuum coating process chamber according to claim 3, wherein the first spray plate is arranged at the lower part of the chamber cover through a first spray plate connecting mechanism.
5. The vacuum coating process chamber of claim 1, wherein the heating and blowing system further comprises a support column, the heating plate is arranged on the top of the support column, the blowing plate is fixed on the heating plate, and the bottom end of the support column is fixed on the chamber bottom plate.
6. The vacuum coating process chamber of claim 5, wherein the heating and blowing system further comprises a reflection plate, and the reflection plate is arranged on the middle step of the support column.
7. The vacuum coating process chamber according to claim 6, wherein the heating and blowing system further comprises a gasket fixed at the bottom of the support column and/or the top of the support column.
8. The vacuum coating process chamber according to claim 1, further comprising a cooling system and a vacuum pumping system, wherein the cooling system is a cooling water pipe system which is distributed on the chamber cover, the chamber wall and the chamber bottom, and the cooling water pipe system is arranged inside and/or outside the chamber.
9. A vacuum suspension coating machine is characterized by comprising the vacuum coating process chamber as claimed in any one of claims 1 to 8, and further comprising an unreeling chamber, an unreeling transition chamber, a reeling transition chamber and a reeling chamber; the unreeling cavity, the unreeling transition cavity, the vacuum coating process cavity, the reeling transition cavity and the reeling cavity are sequentially and continuously arranged.
10. The vacuum suspension coater according to claim 9, further comprising a nitrogen curtain, wherein the nitrogen curtain is respectively disposed between the unwinding transition chamber and the vacuum coating process chamber, and between the vacuum coating process chamber and the winding transition chamber.
11. The vacuum suspension coater according to claim 10, wherein a plurality of vacuum coating process chambers are provided, and the nitrogen gas curtain is provided between adjacent vacuum coating process chambers.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910937397.XA CN110484891A (en) | 2019-09-29 | 2019-09-29 | A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it |
| CN201910937397X | 2019-09-29 |
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| CN111519161A true CN111519161A (en) | 2020-08-11 |
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| CN201910937397.XA Pending CN110484891A (en) | 2019-09-29 | 2019-09-29 | A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it |
| CN202010400910.4A Pending CN111519161A (en) | 2019-09-29 | 2020-05-13 | Vacuum coating process chamber and vacuum suspension coating machine with same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116479412A (en) * | 2023-04-24 | 2023-07-25 | 江苏微导纳米科技股份有限公司 | Winding type processing equipment and processing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115125524A (en) * | 2022-07-05 | 2022-09-30 | 常州第六元素半导体有限公司 | Sectional type roll-to-roll CVD graphene continuous growth equipment |
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| CN105779970A (en) * | 2014-12-26 | 2016-07-20 | 中微半导体设备(上海)有限公司 | Gas spraying head and deposition device |
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| CN110172682A (en) * | 2019-04-30 | 2019-08-27 | 中国科学院半导体研究所 | The inlet spray head of vapor deposition apparatus |
| CN212533117U (en) * | 2019-09-29 | 2021-02-12 | 江苏微导纳米科技股份有限公司 | Vacuum coating process chamber and vacuum suspension coating machine with same |
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| CN116479412A (en) * | 2023-04-24 | 2023-07-25 | 江苏微导纳米科技股份有限公司 | Winding type processing equipment and processing method |
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