WO2011049567A1

WO2011049567A1 - High-throughput roll to roll sputtering assembly

Info

Publication number: WO2011049567A1
Application number: PCT/US2009/061566
Authority: WO
Inventors: Rafi Litmanovitz
Original assignee: Rafi Litmanovitz
Priority date: 2009-10-21
Filing date: 2009-10-21
Publication date: 2011-04-28

Abstract

Methods and devices are provided for improved sputtering systems. In one embodiment of the present invention, a sputtering system for use with a substrate is provided having a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the tension mechanism has a configuration such that the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate.

Description

HIGH-THROUGHPUT ROLL TO ROLL SPUTTERING ASSEMBLY

FIELD OF THE INVENTION

[0001] This invention relates generally to deposition systems, and more specifically, sputtering systems for use with temperature sensitive or handling sensitive substrates.

BACKGROUND OF THE INVENTION

[0002] Physical vapor deposition (PVD) or sputtering is one method suitable for depositing material on a metal or metallized substrate. Some types of sputtering systems use a magnetron behind the sputtering target to enhance sputtering efficiency. Unfortunately, heating of the magnetron and/or the target above a designated processing temperature may adversely affect performance of the process by changing the sputtering rate or reducing sputtering uniformity of the target. Additionally, excess heat may cause mechanical features of the magnetron to wear out prematurely and otherwise shorten the lifetime of the sputtering system component. Furthermore, excess heat may cause undesirable thermal expansion of components within the chamber, which may interfere with tool performance.

[0003] To alleviate this problem, magnetrons are typically housed in a cooling cavity. A coolant, such as deionized water or ethylene glycol, is flowed through the cooling cavity to cool the backside of the target and to cool the magnetron. Although such cooling may help reduce the temperature of the magnetron and the target, traditional magnetron sputtering systems do not address thermal build-up that may occur in the substrate being coated. This is of particular concern for wide foil substrates of metal materials. In an in-line, roll-to-roll sputtering machine, the metal foil may exhibit certain undesirable qualities such as buckling, warping, or other undesirable release of stress. Furthermore, certain specific types of processes in solar or other device industries requires sputtering of material over partially completed cells or semiconductor devices. These partially completed devices may have much lower temperature thresholds than 600°C, above which the partially completed devices begin to deteriorate. The ability for the transport of the substrate through such devices in a non-damaging manner is nontrivial.

[0004] Although some known sputtering systems may include substrate transport mechanisms and/or cooling systems for the magnetron or the target, the potential for using such sputtering on temperature sensitive substrates remains limited. Therefore, a need exists in the art for an improved, high-throughput roll to roll magnetron sputtering system.

SUMMARY OF THE INVENTION

[0005] Embodiments of the present invention address at least some of the drawbacks set forth above. The present invention provides for the improved sputtering systems that may be used for substrate that may degrade at normal sputtering temperatures. Although not limited to the following, these improved module designs are well suited for roll-to-roll, in-line processing equipment. It should be understood that at least some embodiments of the present invention may be applicable to any type of solar cell, whether they are rigid or flexible in nature or the type of material used in the absorber layer. Embodiments of the present invention may be adaptable for roll-to-roll and/or batch manufacturing processes. At least some of these and other objectives described herein will be met by various embodiments of the present invention.

[0006] In one embodiment of the present invention, a sputtering system for use with a substrate is provided. The system comprises of a sputtering chamber; at least one magnetron disposed in the chamber; and at least one, non-convection based cooling system in the sputtering chamber. This system may optionally use at least one chilled roller positioned along the path of the substrate. By way of example and not limitation, these thermally controlled roller are not in the sputtering chamber in the present embodiment. In one embodiment, only the emissivity plate or sink is used in the sputtering chamber(s) for cooling. This chilled roller may be in the sputtering chamber or optionally, outside the sputtering chamber. This system may optionally include at least one emissivity based cooling apparatus located within the chamber for drawing heat away from the substrate. In one embodiment, the sputtering is not occurring on a substrate being cooled by direct contact/conduction.

[0007] In another embodiment the present invention, the sputtering system may use a non-convection, non-conduction system for cooling the substrate. The system may use a non- contact cooling system that is spaced apart from the substrate. This system may optionally include at least one emissivity based cooling apparatus located within the chamber for drawing heat away from the substrate. Optionally, outside the sputtering chamber, at least one chilled roller positioned along the path of the substrate to further cool the substrate. [0008] In one embodiment of the present invention, a vacuum deposition system is provided with a processing chamber; at least one deposition unit in the chamber; at least one emissivity unit located within the chamber for drawing heat away from the substrate. In a specific implementation, the system includes a sputtering chamber; at least one magnetron disposed in the chamber; at least one cooling device positioned along the path of the substrate to come into physical contact with the substrate; and at least one emissivity-based heat sink located within the chamber for drawing heat away from the substrate.

[0009] Optionally, the following may adapted for any of the embodiments herein. In one embodiment, the cooling device is located outside the sputtering chamber. Optionally, the cooling device is located inside the sputtering chamber. Optionally, the cooling device comprises of a chilled roller. Optionally, the cooling device comprises of a chilled roller with a pliable coating on the roller. Optionally, the cooling device comprises of a chilled roller.

Optionally, the cooling device cools by way of conduction. Optionally, a tensioner is positioned to pull the substrate against the cooling device for improved surface contact. Optionally, a tensioner is positioned to push the substrate against the cooling device for improved surface contact. Optionally, a plurality of cooling devices are positioned along the path of the substrate. Optionally, the cooling devices are positioned along the path of the substrate in an arrangement that increases normal force of the substrate against at least one surface of at least one of the cooling devices. Optionally, the cooling devices are positioned along the path of the substrate in an arrangement wherein the devices only contact a backside surface of the substrate. Optionally, the cooling devices are positioned along the path of the substrate in an arrangement wherein at least one of the devices contacts a backside surface of the substrate and at least one of the devices contacts a frontside surface of the substrate at the same or different location along the path. Optionally, at least a second sputtering chamber arranged to receive the substrate.

Optionally, the second sputtering chamber includes at least one cooling device positioned along the path of the substrate to come into physical contact with the substrate; and at least one emissivity-based heat sink located within the chamber for drawing heat away from the substrate. Optionally, at least one cooling section between the sputtering chamber and the second sputtering chamber.

[0010] In one embodiment, the present invention provides a roll-handling apparatus for unwinding rolls of web material, the apparatus comprising: a) a roll-unwinding station capable of accepting web material unwound from a roll, the roll having an initial radius of about R, wherein the unwinder minimizes contact with the top side surface of the substrate, except with protective coated roller having a coating such as but not limited to a neoprene coating with the qualities of 80 durometer, shore A.

[0011] In yet another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate.

[0012] In another embodiment, a high throughput, roll-to-roll sputtering system is provided for use with a coated substrate, the system comprising a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate.

[0013] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll.

[0014] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal.

[0015] It should be understood that for any of the embodiment herein, one or more of the following features may be incorporated therein. For example, one embodiment may have a capstan roll that serves as a master line speed setter for all other drive rollers along the path of the substrate. Optionally, drive rollers are included wherein all other drives slave to this master drive. Optionally, the system wherein the unwind spindle, the exit capstan roll, and the product winder spindles are tension drives. Optionally, all the chill roll and idler roll drives are torque assist drives following line speed and monitoring torque output. Optionally, the cooling device is located outside the sputtering chamber. Optionally, the cooling device is located inside the sputtering chamber. Optionally, the cooling device comprises of a chilled roller. Optionally, the cooling device comprises of a chilled roller with a pliable coating on the roller. Optionally, the cooling device comprises of a chilled roller. Optionally, the cooling device cools by way of conduction. Optionally, the system includes a tensioner positioned to pull the substrate against the cooling device for improved surface contact. Optionally, the system includes a tensioner positioned to push the substrate against the cooling device for improved surface contact.

Optionally, the system includes a plurality of cooling devices positioned along the path of the substrate. Optionally, the cooling devices are positioned along the path of the substrate in an arrangement that increases normal force of the substrate against at least one surface of at least one of the cooling devices. Optionally, the cooling devices are positioned along the path of the substrate in an arrangement wherein the devices only contact a backside surface of the substrate. Optionally, the cooling devices are positioned along the path of the substrate in an arrangement wherein at least one of the devices contacts a backside surface of the substrate and at least one of the devices contacts a frontside surface of the substrate at the same or different location along the path. Optionally, the system includes at least a second sputtering chamber arranged to receive the substrate. Optionally, the second sputtering chamber includes at least one cooling device positioned along the path of the substrate to come into physical contact with the substrate; and at least one emissivity-based heat sink located within the chamber for drawing heat away from the substrate. Optionally, the system includes at least one cooling section between the sputtering chamber and the second sputtering chamber.

[0016] In yet another embodiment of the present invention, a winder arrangement is provided comprising: a winding roll arranged to support a moving web; a cutting arrangement arranged upstream of the winding roll in a free running path region of the moving web; wherein at least one initial cutting piece connects a new web start to the new core and thereafter allows the moving web to be wound onto the new core; and a capstan roll downstream from the winding roll along a path of the moving web which serves as a master line speed setter for all other drive rollers along the path of the substrate; a plurality of other drive rollers along the web path wherein all other drives slave to this drive, wherein a unwind spindle, an exit capstan roll, and a product winder spindles along the path are tension drives. Optionally, the arrangement includes at least one emissivity mass positioned at least partially inside a processing chamber along the path of the web. Optionally, the system comprises of at least one emissivity plate positioned at least partially inside a processing chamber.

[0017] In yet another embodiment, an unwinding station for use with a web is provided, the station comprising: a primary roll carried by a primary carriage frame; a capstan roll carried by the primary carriage frame; a load cell positioned along the path of the web; and a diameter sensor spaced apart from the primary roll, wherein tension in the web is continually adjusted based on sensor signals from the load cell and the diameter sensor.

[0018] In yet another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate.

[0019] In another embodiment, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising a path defined by the substrate, wherein the path extends through one or more sputtering chambers; a substrate unwind unit for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; wherein the substrate unwind unit includes a roller configuration configured to isolate variations of an unwind roll diameter from impacting tension control imparted by a tension control roller in the unwind unit.

[0020] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll.

[0021] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal.

[0022] In yet another embodiment of the present invention, an in-line sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising one or more sputtering chambers for processing the substrate; a substrate unwinding unit; a substrate rewinding unit; a path defined by the substrate between the unwinding unit and the rewinding, wherein the path extends through the sputtering chambers; and at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections. The system may use a roll-to-roll handling of the web through the system.

[0023] In another embodiment, a high throughput, roll-to-roll sputtering system is provided for use with a coated substrate, the system comprising a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, and at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections.

[0024] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll; and using at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections.

[0025] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal; and using at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections.

[0026] In yet another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; and a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path.

[0027] In another embodiment, a high throughput, roll-to-roll sputtering system is provided for use with a coated substrate, the system comprising a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate; and a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path, wherein the steering mechanism is positioned more than halfway along the path of the substrate through the system to maximize correction of the substrate on to a rewind roller. [0028] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll; and using a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path, wherein the steering mechanism is positioned more than halfway along the path of the substrate through the system to maximize correction of the substrate on to a rewind roller.

[0029] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal; and using a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path, wherein the steering mechanism is positioned more than halfway along the path of the substrate through the system to maximize correction of the substrate on to a rewind roller.

[0030] In yet another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; and at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

[0031] In another embodiment of the present invention, an in-line sputtering system with steering for use with a substrate (coated or uncoated) is provided, the system comprising a substrate unwinding unit; a substrate rewinding unit; one or more sputtering chambers; a path defined by the substrate between the unwinding unit and the rewinding, wherein the path extends through the sputtering chambers; and at least substrate cleaning unit configured to provide vibratory motion to the substrate after deposition is completed, the vibratory motion being sufficient in deflection to remove loose particles resting on a sputtered surface of the substrate.

[0032] In another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a coated substrate, the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate; at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

[0033] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll; and using at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

[0034] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal; and using at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

[0035] In yet another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; and a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller.

[0036] In another embodiment, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising a path defined by the substrate, wherein the path extends through one or more sputtering chambers; a substrate unwind unit for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller; wherein the temperature control chambers includes a roller configuration configured to guide the substrate through a serpentine path before the temperature control roller and after the temperature control roller.

[0037] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll; and using a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller.

[0038] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal; and using a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller.

[0039] In yet another embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a metal substrate (coated or uncoated), the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; and a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; and at least one or more in-line diagnostic elements positioned in a zone that allows for inspection of the post-processed substrate.

[0040] In one embodiment of the present invention, an in-line sputtering system with steering for use with a substrate (coated or uncoated) is provided, the system comprising: a substrate unwinding unit; a substrate rewinding unit; one or more sputtering chambers; a path defined by the substrate between the unwinding unit and the rewinding, wherein the path extends through the sputtering chambers; and at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of the post-processed substrate.

[0041] In one embodiment of the present invention, a high throughput, roll-to-roll sputtering system is provided for use with a coated substrate, the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers; at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate; at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of the post-processed substrate.

[0042] In another embodiment of the present invention, a method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of determining the initial diameter of the feed roll, setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll; and using at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of a moving, post-processed substrate.

[0043] In another embodiment of the present invention, a method of web tension control is provided in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor; processing the web tension signal, and combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal; and using at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of a moving, post-processed substrate.

[0044] A further understanding of the nature and advantages of the invention will become apparent by reference to the remaining portions of the specification and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 is a side view of a chamber according to one embodiment of the present invention.

[0046] Figures 2 through 5 show side views of different system configurations according to various embodiments of the present invention.

[0047] Figure 6 shows a side cross-sectional view of the web path according to one embodiment of the present invention.

[0048] Figure 7 shows top down plan view of the web path according to embodiments of the present invention.

[0049] Figure 8 shows a view of an unwind unit according to embodiments of the present invention.

[0050] Figure 9 shows a web path through an unwind unit according to one embodiment of the present invention

[0051] Figure 10 shows a view of temperature control chambers according to

embodiments of the present invention.

[0052] Figure 11 shows a web path according to embodiments of the present invention.

[0053] Figure 12 shows an embodiment of the present invention with an edge sensor.

[0054] Figure 13 shows an embodiment of the present invention with an edge guide. [0055] Figure 14 shows a side cross-sectional view of the web path according to one embodiment of the present invention.

[0056] Figure 15 shows a view of an unwind unit according to embodiments of the present invention.

[0057] Figure 16 shows a view of temperature control chambers according to

embodiments of the present invention.

[0058] Figure 17 shows a view of winder module according to embodiments of the present invention.

[0059] Figure 18 shows one embodiment of roller arrangement according to one embodiment of the present invention.

[0060] Figures 19 and 20 show components for use in a particle removal system according to one embodiment of the present invention.

DESCRIPTION OF THE SPECIFIC EMBODIMENTS

[0061] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed. It may be noted that, as used in the specification and the appended claims, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to "a material" may include mixtures of materials, reference to "a compound" may include multiple compounds, and the like. References cited herein are hereby incorporated by reference in their entirety, except to the extent that they conflict with teachings explicitly set forth in this specification.

[0062] In this specification and in the claims which follow, reference will be made to a number of terms which shall be defined to have the following meanings:

[0063] "Optional" or "optionally" means that the subsequently described circumstance may or may not occur, so that the description includes instances where the circumstance occurs and instances where it does not. For example, if a roller optionally contains a feature for a thermally conductive film, this means that the conductive film feature may or may not be present, and, thus, the description includes both structures wherein a roller possesses the conductive film feature and structures wherein the film feature is not present. Processing Chamber

[0064] Referring now to Figure 1, one embodiment of a processing chamber 10 such as but not limited to a sputtering chamber according to the present invention will now be described. Although the size and shape of the chamber may vary, the sputtering chamber 10 should include at least one magnetron 12 and at least one target 14. Some embodiments may include multiple targets and/or multiple magnetrons. Figure 1 shows that the target 14 has already been in use and has areas 16 where material has been used in the sputtering process. This embodiment shows that the substrate 18 may be positioned in the chamber with at least one surface facing the target 14. It should be understood that in one embodiment, the substrate may be a metal foil such as but not limited to stainless steel, titanium, aluminum, steel, iron, copper, molybdenum, a Mo coated stainless steel or aluminum foil, or alloys of the aforementioned. In some embodiments, the substrate may be a polymer or metallized polymer. In other embodiments, the substrate is coated with material(s) such as but not limited to an absorber precursor, a photovoltaic absorber layer (with or without junction partner), barrier layer, conductive barrier layer, insulating backside layer, anti-reflective layer, other layers of a photovoltaic stack, or other materials. In some embodiments, these coated layers may significantly reduce the maximum temperature that the substrate can withstand without damaging the materials. In one embodiment such as for material with junction partner thereon, the maximum processing temperature is about 200°C or less. Optionally, the maximum processing temperature is about 190°C or less. Optionally, the maximum processing temperature is about 180°C or less. Optionally, the maximum processing temperature is about 170°C or less. Optionally, the maximum processing temperature is about 160°C or less. Optionally, the maximum processing temperature is about 150°C or less.

Optionally, the maximum processing temperature is about 140°C or less. Optionally, the maximum processing temperature is about 130°C or less. Optionally, the maximum processing temperature is about 120°C or less. Optionally, the maximum processing temperature is about 110°C or less. Optionally, the maximum processing temperature is about 100°C or less.

[0065] By way of example and not limitation, the metal foil may be in a roll-to-roll configuration, individual pieces or coupons, or coupons coupled together to form an elongate roll. Various valving mechanisms such as but not limited to a pinch valve or the like may be used to maintain a vacuum, low vacuum, or similar atmosphere. These elements may be on the inlet, outlet, or other portion of the chamber. [0066] As seen in Figure 1, the present embodiment of the sputtering chamber 10 includes at least one emissivity based cooling element 20. As previously discussed, some substrates are particularly sensitive to excessive heat build-up that may deteriorate the quality of the sputtered layer, warp the underlying substrate, and/or damage the resulting device. As the magnetron is swept over the target, considerable energy is dissipated in the form of heat by the ions striking the surface of the target. The target is heated by this process. The substrate being processed is also heated in a similar fashion as material is deposited on it. It should understood that during sputtering, the atmosphere inside the chamber 10 may be at vacuum, at low vacuum, at very low vacuum, or at lower than atmospheric pressures. Thus, the ability to cool the substrate by way of convention techniques such as gas flow, gas convection, or the like is limited. Accordingly, it is desirable to use other thermal transfer techniques to reduce the heat of the substrate while it is inside the chamber. The embodiments herein may be cooling by molecular flow without viscous flow such as convection, conduction or the like.

[0067] By way of nonlimiting example, it should be understood that in one embodiment the combined size of the emissivity unit is at least 100% of the area of the substrate inside the sputter chamber. Optionally, the size of the emissivity unit is at least 90% of the area of the substrate inside the sputter chamber. Optionally, the size of the emissivity unit is at least 80% of the area of the substrate inside the sputter chamber. Optionally, the size of the emissivity unit is at least 70% of the area of the substrate inside the sputter chamber. Optionally, the size of the emissivity unit is at least 110% of the area of the substrate inside the sputter chamber. This is possible if a larger unit is used or if multiple units are used such as but not limited to those in other orientations relative to the substrate. Some may be above, below, and/or to the side of the substrate pass through the chamber.

[0068] By way of example and not limitation, one such technique involves using emissivity thermal energy transfer from the substrate to another body in or near the chamber. Emissivity or heat transfer through radiation takes place in the form of electromagnetic waves mainly in the infrared region. The radiation emitted by a body is the consequence of thermal agitation of its composing molecules. The emissivity of a material (usually written ε) is the ratio of energy radiated by the material to energy radiated by a black body at the same temperature. It is a measure of a material's ability to absorb and radiate energy. A true black body would have an ε = 1 while any real object would have ε < 1. Emissivity is a numerical value and does not have units. It may be defined as the ratio of the radiation emitted by a surface to the radiation emitted by a black body at the same temperature.

[0069] This emissivity depends on factors such as temperature, emission angle, and wavelength. However, a typical engineering assumption is to assume that a surface's spectral emissivity and absorptivity do not depend on wavelength, so that the emissivity is a constant. This is known as the grey body assumption. When dealing with non-black surfaces, the deviations from ideal black body behavior are determined by both the geometrical structure and the chemical composition, and follow Kirchhoff s law of thermal radiation: emissivity equals absorptivity (for an object in thermal equilibrium), so that an object that does not absorb all incident light will also emit less radiation than an ideal black body.

[0070] Referring now to Figure 2, one embodiment of the sputtering system

incorporating some of the aforementioned cooling devices will now be described. This embodiment shows a magnetron sputtering system 30 with a plurality of sputtering chambers 32, 34, 36, 38, 40, and 42. Although this embodiment is shown with a plurality of chambers, it should also be understood that the present application is also applicable to those embodiments using a single chamber. It should also be understood that the system may be adapted for use with a roll-to-roll substrate handling system, a conveyor type system, or as a batch system with the substrate as a plurality of discrete, individual objects.

[0071] As seen in the embodiment of Figure 2, a substrate unwind unit 50 is positioned upstream from the sputtering chambers. The substrate 52 in the present embodiment comprises of an elongate flexible material that will wind its way through the various sputtering chambers. It should be understood that the sputtering chambers may be depositing the same or different materials. For roll-to-roll manufacturing, the unwind unit 50 will provide the substrate that pass through the chambers. In some embodiments, the substrate 52 may have a width of at least about 20 cm in width. In some embodiments, the substrate 52 may have a width of more than about 1 meter in width. Optionally, the substrate 52 may have a width of more than about 2 meters in width. Optionally, the substrate 52 may have a width of more than about 3 meters in width. The unwind unit 50 may be under vacuum, low vacuum, and/or sub-atmospheric pressure by way of a vacuum unit. Optionally, the unwind unit 50 is not under vacuum, only under low vacuum, or at some sub-atmospheric pressure. The unwind unit 50 may be designed to include a plurality of rollers to guide the substrate and place it under the proper tension. The chambers may incorporate leak-free or low leakage entrance gates valves to maintain the appropriate atmosphere inside the chamber. Optionally, some embodiments may include the entire supply roll (i.e. the substrate unwind unit 50 inside a vacuum chamber or area coupled to the first chamber).

[0072] As seen in Figure 2, the substrate 52 passes through a first sputtering chamber 30. In the present embodiment, the chamber 30 includes a plurality of magnetrons with sputtering targets 60. In one embodiment, these may be planar magnetrons. Optionally, other

embodiments may use magnetrons such as but not limited to rotatable magnetrons, rotary magnetrons or magnetrons of other configurations. Some embodiments may only have one sputtering target 60, while other may have multiple targets. The chamber 30 also includes at least one emissivity unit 70 (see Figure 3). By way of nonlimiting example, this embodiment of the invention shows the unit 70 as a planar plate. It should be understood of course, that other shaped devices such as but not limited to curved plates, non-rectangular plates, oval plates, discs, curved shells, curved dishes, rectangles, concave surfaces, convex surface, or other shaped masses may also be used. The unit 70 may be surface treated to be dimpled, bumped, or otherwise textured. In one embodiment, the emissivity unit 70 is black in color to maximize it absorption of emitted thermal radiation. Although the unit may be other colored, the unit 70 is preferably black, but is not limited to any particular color and may also be grey, dark colored, or otherwise colored. Optionally some embodiments may provide combinations of colors and/or shapes. If the unit 70 is black, this will more closely approximate the hypothetical black body which maximizes absorption. The black color may be formed via anodization, oxidation, paint, or other process. The entire unit 70 may be black, only a portion is black, or optionally only the surface facing or in line of sight of the substrate is black or other dark colored. The unit 70 may itself be coupled to a cooling unit to keep the unit 70 from overheating and at a temperature sufficient to absorb thermal radiation from the substrate. In one embodiment, the unit 70 may be maintained at a temperature less than the temperature of the substrate 52. In some embodiments, the

[0073] In one embodiment, the distance of the unit 70 from the substrate is about 10 mm or less. Optionally, the distance is about 15 mm or less. Optionally, the distance is about 20 mm or less. Optionally, the distance is about 25 mm or less. Optionally, the distance is about 30 mm or less. In other embodiments, the distance may be greater than those listed above. Some embodiments may have one portion of unit 70 closer to the substrate than another portion of the unit 70.

[0074] Optionally, the substrate may be free-spanned over the unit 70. Optionally, the substrate may be in contact with a bottom wall or other support surface in the chamber.

Optionally, the substrate may be passed horizontally, vertically, or at some angle through the chamber. The unit 70 may be oriented as such to parallel and/or match the path of the substrate. Some embodiments may maintain the same gap or distance between them.

[0075] In one embodiment, it is desirable to maintain the substrate 52 below the substrate melting temperature. Optionally, it is desirable to keep the substrate 52 at a temperature at least about 10% away from the substrate melting temperature to prevent undesirable warping that may occur. Optionally, it is desirable to keep the substrate 52 at a temperature at least about 15% away from the substrate melting temperature to prevent undesirable warping that may occur. Optionally, it is desirable to keep the substrate 52 at a temperature at least about 20% away from the substrate melting temperature to prevent undesirable warping that may occur. Optionally, it is desirable to keep the substrate 52 at a temperature at least about 30% away from the substrate melting temperature to prevent undesirable warping that may occur. Optionally, it is desirable to keep the substrate 52 at a temperature at least about 40% away from the substrate melting temperature to prevent undesirable warping that may occur. Optionally, it is desirable to keep the substrate 52 at a temperature at least about 50% away from the substrate melting temperature to prevent undesirable warping that may occur. In some embodiments, this may be accomplished by use of unit 70 alone, in combination with one or other unit 70, or with other cooling device in or outside the chamber. Also, conduction baffles 72 may also be included at the entrance and/or exit of each of the sputtering chambers. These baffles 72 help to minimize the mixture of gas species that may be in the various chambers. The baffles 72 may also provide another source for a heat sink.

[0076] Referring still to Figure 2, after the substrate 52 passes through the chamber 30, the substrate 52 may optionally be temperature regulated by other techniques such as but not limited to contact with thermal masses 80. In the present embodiment, the thermal masses 80 may be at lower temperatures than the substrate 52 to bring the substrate 52 to a more manageable temperature prior to going into another sputtering section of the system. In the present embodiment, some of these thermal masses 80 may comprise of thermally controlled rollers such as but not limited to chilled rollers. These thermally controlled rollers are not limited to chilling but may also be used to regulate temperature and may be used as heaters, coolers, or the like. Some embodiment may have thermally controlled rollers at different temperatures along the path of the substrate through the chamber(s). In one nonlimiting example, a first roller is configured to be at the same temperature as the next thermally controlled roller. Optionally, the first roller may be at a lower temperature than the next thermally controller roller.

Optionally, the first roller may be at a higher temperature than the next thermally controller roller but still chill or lower the temperature of the substrate. Optionally, the first roller may be at a higher temperature than the next thermally controller roller but may warm the temperature of the substrate.

[0077] Figure 2 shows that the present embodiment comprises of using at least two chilled rollers as thermal masses 80 in the area outside the sputter chamber 32 to reduce the temperature of the substrate 52 before it enters another sputtering chamber 34. The substrate 52 continues through a plurality of sputtering chambers (with or without emissivity units 70) preceded by and/or followed by thermal masses 80 to maintain the substrate 52 in a temperature range that minimizes warping or other undesirable effects from the heat absorbed during sputtering. Pinch valves, baffles, or other types of valving may be used to maintain the vacuum, low vacuum atmosphere, or sub-atmospheric pressure environment inside the sputtering chamber. After completing a pass through the chamber, a substrate rewind unit 90 is used to gather together the processed substrate back into a roll for ease of transport.

[0078] Figure 2 also shows an embodiment wherein the horizontal web path minimizes the height of the equipment and may facilitate servicing. There is only one isolation section 210. In this embodiment, the surface that will be sputtered on is contacted by rollers prior to the deposition of the first sputtered layer. Figure 2 also shows dividers 220 used to keep each magnetron under vacuum or sub-atmospheric pressure by way of its own vacuum pump. This embodiment also shows that some systems may be configured without an emissivity plate but uses only thermally controller rollers 80 to regulate temperature.

[0079] Referring now to Figure 3, another embodiment of the present invention will now be described. This embodiment includes a linearly configured sputtering system wherein the web path is minimized due to the fewer number of directional changes and the few number of sputtering chambers. This embodiment shows that the target surface of the substrate to be sputtered is not contacted by a roller of the unwind section 250 prior to deposition of the first layer of sputtered material. This is obtained in part by inverting the orientation of some components of the unwind section used in system 200. This embodiment also shows the use of emissivity unit 70, and optionally, along with the thermally controlled rollers. These elements may be contained in the housings 260 and 270. In this embodiment, there is, however, no isolation section between the housings.

[0080] Figures 4 and 5 show enlarged views of the embodiments of the sputter chambers described in Figures 2 and 3 respectively. More specifically, Figure 4 shows how one embodiment of the system of Figure 2 may also have an emissivity panel 70 in the processing chamber. Figure 5 A more clearly shows how an unwind unit 250 may include a roller configuration wherein the supply roll 92 is positioned so that at no point does any roller such as the tension control roller 94 and/or idler 96 contact the front of the surface that will be processed in chamber 32. In this manner, the surface to be processed is untouched while the required tension control is maintained. More specifically, Figure 5A shows that that in the present embodiment, there is no roller contacting the side of the substrate to be processed between the supply roll 92 and the tension control roller 94. An interleaf roller 98 may also optionally be included to provide an interleaf layer into the system. Figure 5 A also shows that when the first sputter zone is reached, the side being processed is facing downward, instead of upward. The sputter targets in this embodiment in the sputtering chamber 32 are facing upward instead of downward.

[0081] Figure 5B shows a still further embodiment wherein there is no roller contacting the side of the substrate to be processed between the supply roll 92 and the tension control roller 94. However, Figure 5B shows that when the first sputter zone is reached, the side being processed is facing upward, instead of downward. The sputter targets in this embodiment in the sputtering chamber 32 are facing downward instead of upward. The next sputter or processing chamber may have targets oriented in the same manner as that of chamber 32 or optionally, in an opposite orientation depending on the path through the temperature control chamber.

WEB HANDLING OVERVIEW

[0082] Referring now to Figure 6, another embodiment of a web handling system suitable for use with a processing system as previously mentioned will now be described. Figure 6 is a side cross-sectional view of select portions of a web handling system having chambers along the path of the substrate through the processing system. Specifically, Figure 6 shows an in-line processing system having a substrate unwind unit 150 which feeds into an optional splicing station 154. A plurality of temperature control chambers 160, 162, and 164 are shown along the web path. These chambers may be positioned at predetermined locations along the substrate path to keep the substrate temperature within or below a desired processing temperature and may simultaneously provide web handling feedback data to a web system controller. It should be understood that some embodiments may have fewer or greater numbers of temperature control chambers. Optionally, some embodiment may have no temperature control chambers along the web or substrate path. Optionally, some embodiments may have a temperature control chamber after each processing chamber. After processing, the substrate feeds into a substrate rewind unit 170. For ease of illustration in Figure 6, only the above chambers or units are shown and none of the processing chambers, sputtering chambers, or other processing units are shown.

[0083] As seen in Figure 6, the plurality of temperature control chambers 160, 162, and 164 may include cooling elements to cool the substrate passing therethrough while

simultaneously providing a configuration which, in one nonlimiting example, provides tension control of the substrate or web so as to allow one or more different tension zones to be defined before the temperature control chamber 160, in the temperature control chambers 160, and/or after the temperature control chamber 160 (which may lead to another sputter chamber, another temperature control chamber, and/or to a rewind unit). Some temperature control chambers may use contact cooling methods, non-contact cooling methods, or a combination of both.

Optionally, some embodiments may use heating elements to regulate the temperature to follow a desired temperature profile or optionally to maintain temperature within a desire temperature range.

[0084] Also seen in Figure 6, it should be understood that in one embodiment, the web path is selected in the temperature control chamber 160 to provide an out-of-plane path relative to the plane of the substrate path through the other processing or sputter chamber(s). In many embodiments, the substrate path is in a horizontal plane and the out-of-plane path may be a vertical or other angled path outward from the horizontal plane. This out-of-plane path may be a serpentine or multi-serpentine path that allows for a more tortuous path to provide sufficient surface area contact with temperature control rollers while minimizing the amount of lateral or horizontal space occupied by the temperature control chamber. This helps create a compact design while still providing substantial path length through the temperature control chamber. In one embodiment, the length of the web path through the cooling chamber is at a ratio of at least 2: 1 relative to the horizontal "downweb" length of the temperature control chamber. Optionally, the ratio is at least 3: 1. Optionally, the ratio is at least 1.5: 1. Some systems may have at least two sections with out-of-plane paths to allow for increased surface area contact.

[0085] In one embodiment of the present invention, all the proposed modules are designed to be self contained units, ready to be mounted in their appropriate vacuum chamber with the maximum vacuum level in the present example selected to be 1χ10^Λ-6 Torr. Each unit of the present embodiment may be equipped with mounting and/or leveling provisions. These provisions are coordinated to match inside the vacuum chambers to adjust and secure the modules.

[0086] Optionally, any penetrations through the chamber walls of the temperature control chamber 160 or other chambers that are used in the design of the present system may include seals such as but not limited to ferro-fluidic feed-throughs around the hardware penetrating into the chamber to maintain a controlled pressure environment in the chamber.

[0087] Optionally, all the module structures are fabricated out of aluminum without any surface coating on them except components with coating that are noted. In general, metric hardware is used where ever possible and where standard hardware is used, they will be marked on the drawings and possible on the hardware.

[0088] Optionally, all idlers are coated, lightweight aluminum, specialty extruded idlers with low friction, dry bearings. The process area idlers are designed to be tendency driven and include alignment adjustments for level and tram.

[0089] Additional skew rolls assembly may be used as an option in the process area for side to side adjustment of the substrate. Optionally, this system incorporates a skewing mechanism by a servo motor with a web position feedback to the controller. The adjustment is accomplished automatically until the desired position of the substrate is accomplished.

[0090] Referring now to Figure 7 A, a top down view of the sputtering system is shown. As seen in Figure 7 A, there may be multiple tension zones Tl through T9. Some embodiments may have fewer tension zones. Some may have more than one tension zone per chamber. In some embodiments, the tension in T2-T8 may be substantially the same as the tension in the capstan drive rollers of the unwind unit and the rewind unit will control tension therebetween. For ease of illustration, the system is not shown with the sputtering chambers to more clearly show the web path. The tension in each zone Tl - T9 may be varied by controlling drive motors coupled to rollers in those zones. It should be understood that in some embodiments, each of the zones Tl - T9 have a different tension. Optionally, the tension in the processing zones are the same, but the tension in the temperature control chambers, the unwind unit, and the rewind unit are all different. Optionally, the tension in the zone Tl is about 1000 to 200 lbf Optionally, the tension processing zones are about 50 - 300 lbf. Optionally, tension in the temperature control chambers is in the range from 60 to 750 lbf. Optionally, tension in the unwind zone is between 10 to 300 lbf. Optionally, tension in the rewind zone is between 10 to 300 lbf. Tension in the interleaf zone may be between 5 to 20 lbf. For the predetermined processing temperature in the processing chambers, the various tensions T1-T9 are selected to maintaining a predefined tension in the substrate to prevent undesired curling of the substrate as the substrate undergoes processing. It is the combination that allows for the web to be processed while minimizing curling that may occur during processing or occur as the substrate cools after processing. Some embodiments may use higher tension in the non-heated zones to minimize curling in those zones as the substrate cools. Optionally, some embodiments may use higher tension in the heated zones.

[0091] It should be understood that the processing chambers are not shown for ease of illustration. However, in the current embodiment, the tension zones T2, T4, and T6 represent the same or different tension in the various processing zones in the processing chambers. The predefined tension in the substrate to prevent undesired curling of the substrate during processing while not over tensioning the substrate which may cause permanent elongation of the foil.

UNWIND MODULE

[0092] The unwind unit in one nonlimiting embodiment of the present invention may be configured as a single position, shafted driven unwind with locking safety chucks 227 and shaft that preferably matches the standard cores used with the substrate supply rolls. This embodiment is purely exemplary and is a nonlimiting example. Other embodiments of the unwind unit may have a different drive configuration. [0093] The frame 200 may be fabricated of structural aluminum tube, shapes and plate to form a rigid frame structure in which rollers may be mounted. There may be a plurality of vertically oriented motors 202 and 204 to drive the unwind roller 220 and the capstan roller 239, with associated orthogonal gearing in rotational relation to a shaft to turn the aforementioned horizontally oriented roller(s). A horizontally oriented motor 206 may be used to drive an optional interleaf roller, although vertically oriented motors are not excluded. As seen in Figures 8 and 9, the unwind support plates 210 and 212 may be fabricated of 1.5-inch thick MIC 6 aluminum plates. The plate 210 is sized with an opening 216 that is configured to allow alignment access to the rollers and supply material in the unwind unit.

[0094] For web handling and tension control, a diameter sensor 214 may be positioned in a spaced apart or other orientation such as but not limited to being on a chamber wall to measure the diameter of one or more the rollers. In one embodiment, the sensor 214 uses ultrasonic measurement techniques to determine diameter. Optionally, optical techniques such as laser based or light based sensors may be used. Optionally, others use a radar based technique.

Optionally, one or more other sensors may be used to detect tension in the web based on the distance or droop of the substrate from a pre-determined position. A single sensor 214 or optionally in conjunction with another sensor such as sensor 216 may be used to measure substrate "droop" as a proxy for tension in the web. This may be particularly useful in low tension systems in the processing area. Another diameter sensor 218 maybe oriented at the bottom of the chamber to determine the diameter of the payout roll. It should be understood that in other embodiments, the sensor 214, 216, and/or 218 may located on the sides the chamber or in other orientation so long as they can still visualize the rollers they are monitoring, which may occur by way of intermediate optics such as but not limited to mirrors, beam splitters, etc...

[0095] In another embodiment, the present invention provides a roll-handling apparatus for unwinding rolls of web material, the apparatus comprising: a) a roll-unwinding station capable of accepting web material unwound from a roll, the roll having an initial radius of about R, wherein the unwinder minimizes contact with the top side surface of the substrate, except with protective coated roller 224 having a coating such as but not limited to neoprene cover with 80 durometer, shore A. Optionally, the coated roller 224 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 6 or smoother. Optionally, the coated roller 224 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 4 or smoother. Optionally, the roller 224 may coated with a non-damaging, compliant surface which will not roughen, contaminate, or otherwise harm the top surface of the substrate prior to a processing step such as but not limited to sputtering.

[0096] All the shafts are sized so that they penetrate through the chamber walls 219 are designed such that the module can be installed and secured in the chamber and the penetrating shafts are installed through the chamber seal and re-attached to their appropriate rolls. In this manner, the motors 202, 204, and/or 206 all remain outside of the vacuum, low-vacuum, sub- atmospheric, atmospheric, or over atmospheric pressure inside the chamber walls 219.

[0097] In the present embodiment of the unwind unit 150, the motor, gearbox, and drive train are mounted on the outside of the vacuum chamber walls 219 on a support structure (not shown).

[0098] Figure 8 provides a bottom-up view of the unwind unit. As seen more clearly here, the diameter sensor 218 is more clearly visualized. A mounting platform 221 for the payout roller drive motor 202 is also more clearly visualized.

[0099] Atop the base frame may be mounted precision linear bearings for side to side movement. An electromechanical line guide system is included for properly guiding the web out of the process. The edge guide system provides ±1.5 inches of travel. The controller includes a carriage centering function.

[00100] As seen in Figure 9, the web path through the unwind unit will be described in more detail. The substrate leaving the payout or unwind roller 220 will be contacting by non- damaging idler roller 224. As previously described, roller 224 has a circumferential surface that will contact the side of the substrate that will be processed. In the present embodiment, it is the only roller that will contact the surface to be processed. The position of the non-damaging roller 224 is predetermined to provide a desired wrap angle around the capstan roller 230. The substrate or web will run in the direction of the arrow 225 onto the circumferential surface of the capstan roll 230. Thereafter, it wraps around the circumferential surface of the capstan roll by a pre-determined angle ("wrap angle") 232. This wrap angle 232 is selected to provide sufficient surface contact of the web with the roll 230 to provide tension isolation between tension zones Tl and T2. The capstan roll 230 is also the drive roll which is used to control web transport through the entire system. [00101] As seen in Figure 9, tension may be monitored using a) load cell(s) with individual side to side feedback to monitor actual tension to the drive controller and b) a diameter sensor 214 or 218 (such as that from Keyence LK-G series) to establish the initial torque requirements for the unwind tension. The controller may modulate speed of the drive to maintain a constant tension throughout the roll unwinding, based in part on inputs from the diameter sensors and the load cells.

[00102] In one nonlimiting example, the drive motor 202 is linked to the unwind roller 220 through a high quality gear reducer in rotational relation to a shaft and safety chucks 227. In one embodiment, the safety chucks support the nominal 6-in. diameter core. Optionally, the safety chucks 227 are air chucks such as those available from Tidland of Camas, Washington.

[00103] As seen in Figure 9, a load cell or idler 224 is nominally six inch diameter, hard black anodized aluminum. Load cells may also be located on an idler down stream from the driven unwind spindle. This will provide feedback for the automatic tension control system. The unwind unit can operate in the over and under feed positions. Optionally, it should be understood that the load cell or idler 224 may be coated to be nondamaging to the web surface.

[00104] Figure 9 also shows that a cleaning roll may be in contact with the idler to remove contaminants. Optionally, a single sided contact cleaning roll system is incorporated in the unwind module. This system includes a transfer roll 250 against the substrate with a tape roll against the transfer roll. The contamination is picked up by the transfer roll from the web and transferred to the tape roll. Once the tape roll is loaded up with the contamination, a layer of tape is peeled off to expose a fresh sheet.

[00105] As seen in Figure 9, the unwind module includes an isolation capstan roll section 230. In one nonlimiting example, this roll 230 is the master speed setter and isolates the tension from the unwind spindle to the process section. This roll in the present embodiment is a large diameter, nominal 12-16 inch, 0.25" thick rubber coated with 60 shore A durometer Neoprene driven roll. Other embodiments may use other coated rollers or uncoated rollers. Optionally, other embodiments may have roller coating hardness within 50% of that described above.

Optionally, other embodiments may have roller coating hardness within 25% of that described above. Optionally, other embodiments may have roller coating hardness within 10% of that described above. Some embodiments may have different hardnesses at the center versus the edges of the rollers. [00106] As seen in the current embodiment of Figure 9, there are at least two tension zones in the unwind unit. A first section of tension Tl is from the supply roll 220 to the capstan roll 230. A second zone of tension T2 is from the capstan to the slitter. In one embodiment, the tension in the Tl zone is at least in the ratio of 2: 1 relative to the tension in T2. Optionally, the tension in the T 1 zone is at least in the ratio of 3 : 1 relative to the tension in T2. Optionally, the tension in the zone Tl is about 1000 to 200 lbf. Optionally, the tension in zone T2 is about 50 - 300 lbf.

[00107] In one embodiment, the wrap of the foil around the capstan roll 230 is such that at least 75% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 60% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 50% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 40% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 30% of the roll is in contact with foil.

[00108] Optionally, the wrap of the foil or substrate around the capstan roller 230 is based on wrap angle 232. In one embodiment, the wrap angle 232 around the capstan roller 230 is at least 260°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 250°.

Optionally, the wrap angle 232 around the capstan roller 230 is at least 240°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 230°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 220°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 210°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 200°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 190°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 180°. A large surface wrap is desired to achieve a large tension isolation ratio. The web may leave the substrate at an angle relative to horizontal.

[00109] In one embodiment, it is desirable that the top side of the web or substrate is not touched. In such an embodiment, the idler 224 is removed so that the front side of the substrate that will be processed is not touched by any type of roller prior to reaching the first processing chamber.

INTERLEAF WINDER IN THE UNWIND MODULE [00110] Referring still to Figure 9, an interleaf winder 260 according to one embodiment of the present invention will be described. The interleaf winder 260 is an optional item and may be configured as a single position, shafted driven winder with locking safety chucks and shaft that matches the standard cores used on various supply rolls. The interleaf provided by the interleaf winder 260 herein may be a protective layer to the underside of the substrate so that during the rewind, the interleaf will act as a protective material preventing damage to the newly sputter or deposited material. It should be understood of course, that the interleaf may also be positioned at the rewind unit where it can be fed into the rewind roller so that there is a protective layer between layers or the processed substrate.

[00111] In one embodiment, the frame is fabricated of structural metal tube, metal shapes and metal plate to form a rigid structure. The unwind support plates are fabricated of 1.5 -inch thick MIC 6 aluminum plates.

[00112] In one nonlimiting example, the interleaf winder 260 is a direct coupled torque regulated winder. The controller modulates the motor torque to maintain a constant tension throughout the roll winding.

[00113] The drive motor 206 is linked to the winder through the safety chucks. The safety chucks support the nominal 6-in. diameter core shaft. The motor and drive train are mounted on the outside of the vacuum chamber on a support structure. Optionally, the winder can operate in the over wind position.

[00114] There may be a plurality of interleaf idlers 270 and 272 that may be positioned along the path of the interleaf. These may optionally by chrome surfaced with a 6 Ra surface roughness. The path of the interleaf is selected so that the idlers position the interleaf on the side of the substrate that will not be sputtered or processed. Some embodiments may also use the interleaf comprised of a material to improve heat transfer between the substrate and any temperature control roller. Such a material may be a compliant material to improve surface contact and/or a material with an improved thermal transfer property.

TEMPERATURE CONTROL CHAMBER

[00115] Referring now to Figures 10, embodiments of temperature control chambers according to the present invention will now be described. One or more of these units may be positioned along the path of the substrate to keep the substrate within a temperature zone that prevents damage to the substrate and/or any coatings thereon.

[00116] Referring now to the embodiment of Figure 10, a side cross-sectional view of a temperature control chamber according to the present invention is shown. Figure 10 shows that the substrate passes over a first temperature control roller 300 and a second temperature control roller 310 before reaching a load cell roller 320 that provides tension measurement data to a system controller.

[00117] In one embodiment, the temperature control chamber is a cooling unit. The chill roll frame is fabricated of structural aluminum tube, shapes and plate to form a rigid structure. The support plates are fabricated of 1.5-2.0 inch thick MIC 6 aluminum plates. The layout is designed to maximize wrap on the two chill rollers.

[00118] All the shafts that penetrate through the chamber walls are designed such that the module can be installed and secured in the chamber and the penetrating shafts are installed through the chamber seal and re-attached to their appropriate rolls. The motor, gearbox, and drive train are mounted on the outside of the vacuum chamber on a support structure.

[00119] In the present embodiment, the path through the temperature control chamber 160 contacts at least two cooling rollers that may be positioned to sequentially follow one another along the substrate path. Optionally, there may be three or more temperature control rollers. Optionally, some rollers may be cooling rollers while others are heated or unheated/uncooled rollers. Optionally, a first roller contacts a back side of the substrate, a second roller contacts a front side of the substrate that contains a sputtered layer thereon, and somewhere along that path is a cleaning element to clean a front side surface of the substrate either before and/or after contact with the roll that touches a front side surface of the substrate.

[00120] In one embodiment, a cleaning apparatus such as but not limited to a cleaning roller may be in contact with the substrate along a web path through the temperature control chamber 160. Optionally, a single sided contact cleaning roll system is incorporated in the unwind module. This system includes a transfer roll against the substrate with a tape roll against the transfer roll. The contamination is picked up by the transfer roll from the web and transferred to the tape roll. Once the tape roll is loaded up with the contamination, a layer of tape is peeled off to expose a fresh sheet. [00121] In one embodiment, temperature control rollers are sized to have a diameter that is at least 10% of the web path through the cooling chamber so as to provide the desired thermal transfer surface contact. Optionally, the temperature control rollers are sized to have a diameter that is at least 15% of the web path through the cooling chamber so as to provide the thermal transfer surface contact. Optionally, the temperature control rollers are sized to have a diameter that is at least 20% of the web path through the cooling chamber so as to provide the thermal transfer surface contact.

[00122] Optionally, in another embodiment, the temperature control chambers are at a different pressure than the vacuum atmospheres found in most sputter chambers. The different pressure may allow for greater conduction or cooling to occur due to the additional convection that may occur in such a temperature control chamber. In one embodiment, the atmosphere in the temperature control chamber 160 is at least 0.1 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.25 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.5 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.75 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.9 atm.

[00123] In one nonlimiting example, the chill rollers are fabricated out of 304 stainless steel tubing with 304 stainless steel welded headers and pressure tested. The rollers are double shelled progressive spiral design, hard chromed and ground to 4 RMS finish. All the chill rollers are cp400 mm while the routing idler rolls around the chill rolls are six inches. Double pass rotary unions may be provided for connection to a chilled water temperature control system.

[00124] In the present embodiment, each chill roller is mounted in oversized piloted bearings and driven by a torque assist drive system. The torque assist motor and drive over speeds the roll and sets a torque value to overcome the friction forces of the bearings and rotary union without exerting any forces on the substrate. The drive can monitor the output torque and speed to the motor and compensate as necessary.

[00125] Part of the chill roll frame module is a load cell idler roll. The load cell idler is nominally six (6) inch diameter, hard black anodized aluminum. Optionally, in some

embodiment, the load cell idler is rubber coated. It will be located just prior to the first chill roll. Optionally, it may be located downstream from the last chill roll. This will provide the individual side to side feedback for the automatic tension control system for the exit capstan roll, located at the winder module. In one nonlimiting example, all the chill roll drives are torque assist drives, there is only one tension zone through all the deposition process and the cooling chamber. This zone is isolated between the entry and exit capstan rolls.

[00126] In one embodiment, the load cell in the last cooling chamber will provide feedback for the automatic tension control system for the exit capstan roll, located at the winder module.

[00127] In the temperature control chamber 160, just prior to the chill rolls, a single roll steering guide may be incorporated. This edge guide system assures to convey the substrate back toward the center line of the equipment. An edge sensor picks up the location of the web and steers automatically toward the direction of the center line.

[00128] Two single sided contact cleaning roll system is incorporated in the unwind module. This system includes a transfer roll against an idler roll with a tape roll against the transfer roll. The contamination is picked up by the transfer roll from the idler roll and transferred to the tape roll. Once the tape roll is loaded up with the contamination, a layer of tape is peeled off to expose a fresh sheet.

WINDER MODULE

[00129] One embodiment of a winder unit 400 will now be described. In one nonlimiting example, the winder 400 is configured as a single position, shafted driven winder with locking safety chucks and shaft that matches the customer's standard cores.

[00130] In one embodiment, the frame 410 is fabricated of structural aluminum tube, shapes and plate to form a rigid structure. The unwind support plates 414 may be fabricated of 1.5-inch thick MIC 6 aluminum plates. The plates 414 are configured to have access areas to allow unobstructed access to the rollers therein. The system may include a capstan roller 420, an idler 422, another idler 424, and a take-up roll 426.

[00131] All the shafts that penetrate through the chamber walls are designed such that the module can be installed and secured in the chamber and the penetrating shafts are installed through the chamber seal and re-attached to their appropriate rolls. The motor, gearbox, and drive train are mounted on the outside of the vacuum chamber on a support structure.

[00132] Optionally, the load cell idler is nominally six inch diameter, hard black anodized aluminum. Load cells may be located on an idler 422 down stream from the exit capstan roll. This will provide feedback for the automatic tension control system. The winder can operate in the over and over feed position.

[00133] Part of the winder module is an isolation capstan roll 420. This roll speed is modulated according to the load cell feedback signal and the desired tension setting. This isolates the tension from the winder spindle to the process. In one embodiment, the roll 420 is a large diameter, nominal 16 inch, rubber coated with 0.25 -inch thick 60 shore A durometer Neoprene driven heat transfer roll. In one embodiment, it is desirable that the top side of the substrate is not touched, a large surface wrap is desired to achieve a large tension isolation ratio.

[00134] It is a double shelled progressive spiral design fabricated out of 304 stainless steel tubing with 304 stainless steel welded headers and pressure tested.

[00135] Referring now to Figure 11 , another aspect of the present invention will now be described. To minimize web misalignment or wandering that may occur as the web is processed, a variety of sensor(s) and adjusters may be included along the path of the web. This embodiment of the present invention shows that an edge sensor 500 may be position along the path of the web through the unwind unit. This edge sensor 500 may be used to detect misalignment prior to the web leaving the unwind unit and entering the processing units.

[00136] Figure 12 shows that a similar edge sensor 520 may be mounted in the rewind unit to allow for monitoring of web alignment at that location. A system may use web alignment data from one or both of the sensors 500 and 520. Some embodiments may have substrate edge sensors on only one edge of the substrate, some may alternate, or some may have matching sensors along both edges of the substrate.

[00137] Figure 13 shows a perspective view of one embodiment of an edge guide 550. This shows a sensor adjuster shaft 1, an edge guide sensor mount bar 2, a sensor mount block 3, a sensor mount bracket 4. These are coupled to a precision shaft 100, a shaft support 101 , a handle 102, a know 103, a down point 103, and a screw 105. The sensor may be a U-shaped item mounted as seen in Figure 13. The substrate passes through the opening and its position is tracked using an IR or other sensor. The feedback from the sensors is input to a steering roller positioned along the substrates path. Some embodiments may input sensor reading from more than one location along the substrate path to best determine where the errors are occurring.

Some embodiments may have more than one steering guide along the path of the substrate (in equally or non-equally spaced configurations along the path). [00138] By way of nonlimiting example, the steering roller may be located outside of the processing chambers. In one example, the steerable roller may be one or more of the

temperature control rollers, or optionally, one of the rollers in the temperature control chamber. Optionally, it should be understood that the steering roller may be in one or more of the chambers located more than halfway through the process path of the substrate. Optionally, the steerable roller is located in the chamber just before the rewind unit so that the substrate may be properly aligned before being re-rolled or re-wound. Optionally, a web steering device, such as an edge guiding air bar, concave steerable roller or vented roller, is mounted upstream of the rewind roller, possibly in the rewind unit, to accurately guide the web onto the rewind roller or drum.

[00139] By way of introduction, a steering guide includes a support platform that moves between two tracks. The steering guide may couple to a material guide frame. For example, the material guide frame may be coupled to the support platform and move with the support platform.

[00140] A steering guide consistent with this invention may include a curved inner track, a curved outer track, and a support platform disposed between the tracks. The tracks guide the movement of the support platform. In addition, the steering guide may include an actuator coupling coupled to the support platform. The actuator coupling may impart an angular displacement to the support platform. Furthermore, a material guide frame may be coupled to the support platform. When the support platform moves, the material guide may then move to steer a web.

[00141] In one implementation, the curved inner and outer tracks each include a guide groove facing the support platform. The guide grooves may include an upper groove track and a lower groove track. One or more rotational couplings may be disposed between the guide grooves and the support platform. In one implementation, the rotational couplings are wheels. The wheels may be oriented in opposition to one another and may roll along either the upper groove track or the lower groove track of the guide grooves.

[00142] In addition, a track adjustment may be provided for the steering guide. The track adjustment may position the inner track with respect to the support platform and outer track, for example. Accordingly, the inner track position may be adjusted to provide, as examples, desired tension, fit, placement, or support for the support platform. [00143] The steering guide eliminates the need for a separate rack that supports the weight of the material guide frame. The steering guide thereby reduces complexity, cost, and spare part inventories, while simplifying assembly, installation, and maintenance. The steering guide also precisely locates the material guide frame with respect to a virtual center, thereby enhancing accurate steering of the web.

[00144] In addition, the support platform may be formed from strong but light aluminum, thereby reducing inertial forces that act when the steering guide moves the support platform. The materials used for the steering guide components may be selected, for example, from several grades of aluminum that although are strong and hard are also machinable. The steering guide may support material guide frames that vary widely in size, shape, and weight, making the steering guide suitable for a wide range of processes for a wide range of materials.

[00145] The rotational couplings disposed between the support platform and the inner and outer tracks may be arranged to secure the support platform in place between the inner and outer tracks. Consequently, the support platform provides a stable base or support for a material guide frame. For example, the rotational couplings may precisely locate the support platform to reduce or eliminate lifting, turning, or twisting of the material guide frame that would detrimentally impact efforts to steer the web.

[00146] In some embodiments, the rollers (steering nor not) are at least as wide as the substrate. Optionally, some embodiments may be even wider. Optionally, some embodiments may use rollers less than the width of the substrate. In some embodiments, the substrate is at least 700 mm wide. Optionally, some are at least 800mm wide. Optionally, others are at least 1000mm wide. The thickness of the substrate may also vary. Some embodiments use a substrate with a thickness in the range of about 100 microns to about 200 microns thickness in the widths described above. Such thin and wide foils contribute to the web handling issues which may occur.

[00147]

[00148] DRIVES AND CONTROLS

[00149] In one embodiment, the total system utility specifications are as follows: a) electrical: 480volts, 3phase, b) Air: None required, and c) Chilled water: 25 degC, lOgpm

[00150] The proposed drive system consists of a Parker SSD AC Vector type Digital Drives featuring Parker SSD fiber optic communication network. [00151] In the current, non-limiting embodiment, the infeed capstan roll serves as the master line speed setter. All other drives slave to this drive. The unwind spindle, the exit capstan roll, and the product winder spindles are tension drives. All the chill roll and idler roll drives are torque assist drives following line speed and monitoring torque output. Optionally, the exit capstan roll and the infeed capstan roll are both used for speed setting. Optionally, different tensions may be in each of the zones are previously described.

[00152] The system may include two local operator interfaces such as but not limited to a color LCD touch screen station which are located on the operator's control enclosures, mounted on articulating arms at the unwind and the winder end. Push buttons are used for the operating parameters such as start, stop and jog. Tension set point, line speed set point, speed ratio, etc. is set through the touch screen. Actual web tension and motor torque demand is displayed on the touch screen.

[00153] Automatic control for the drives and sequencing logic is handled by the LINK processors through LINK digital I/O.

[00154] Additionally, two multi button pendants are supplied at the unwind and the rewind ends of the equipment for easy thread up and roll loading purposes.

[00155] AC Vector Drive Features

[00156] In the present embodiment, the drive system uses advanced microprocessor based SSD Drives AC Vector digital drives. The drives are fully digital controllers. These drives feature one or more of the following:, a digital processing module for all control functions; a self tuning module for motor parameters;, a comprehensive communications to international standards protocol; a software definable controller tunable for application and control flexibility; a direct digital encoder feedback for one or more of the motor driven rollers and/or non-driven idlers; a drive to drive communications link via high speed noise immune fiber optic network; automatic first fault alarm memory; menu driven programming; and/or system security by password protection. The encoders may be used to speed match one or more of the drive rollers along the path of the substrate. Some may be matched exactly while other are match to be between a range of 0.1% to 5% of the rotation between a referenced roller.

[00157]

[00158] Self Tuning [00159] The intelligence of the microprocessor is utilized to automatically optimize the tuning of the drive to the motor.

[00160] Onboard Alphanumeric Display

[00161] The drive system of the present embodiment contains an onboard alphanumeric display for diagnostic information in a clear English language form. The drive has self-checking diagnostics and remembers faults as they occur. The first fault is displayed automatically (for example "MOTOR THERMAL FAILED") and saved until acknowledged by the use of on-board push buttons or restarting the drive. All drive parameters are displayed in this plain language manner. For example current limits, acceleration ramp rates, speed and current loop stability settings are easily read without reference to unfriendly parameter codes.

[00162] Programming

[00163] The drives in this system are programmed with application software with drive parameters that are modifiable using onboard function push buttons and a menu driven display on the drive.

[00164] All calibration and set up parameters are digital and done through the drive software. The complete drive configuration and set up parameters may be stored on a disk using control such as but not limited to an IBM compatible computer and a setup and monitor (SAM) software package. This allows the original program configuration to be loaded into a

replacement drive circuit board, or a complete drive module without going through a repeat set up procedure. The replacement control card or drive reproduces exactly the same program functions, current limit, acceleration rate, speed and current loop response, etc. as the original drive.

[00165] Communications

[00166] Optionally, the drives use a noise immune communications local control network. This network is flexible, high speed and transparent to the user. The network accommodates all of the drives and I/O modules on the machine with ample capacity left for future drive expansion if ever required.

[00167] The winding system controls will be integrated with the deposition system's controls as necessary to yield safe and effective operating machine tool. This encompasses as a small amount of data sharing and some hardwired features such as EMO's. [00168] Referring now to Figure 14, another embodiment of a web handling system suitable for use with a processing system as previously mentioned will now be described. For ease of illustration, all processing chambers are not shown in Figure 14. In some embodiments, all of the processing chambers a located prior to the substrate path reaching the temperature control chamber 160. Optionally, there may be processing and/or buffer chambers all located prior to the substrate reaching the temperature control chamber 160. Optionally, some embodiments may have one or more processing chambers after temperature control chamber 160.

[00169] Figure 14 is a side cross-sectional view of select portions of a web handling system having chambers along the path of the substrate through the processing system.

Specifically, Figure 14 shows an in-line processing system having a substrate unwind unit 150 which feeds into an optional splicing station 154. At least one temperature control chambers 160 is shown along the web path. These chamber(s) may be positioned at predetermined locations along the substrate path to keep the substrate temperature within or below a desired processing temperature and may simultaneously provide web handling feedback data to a web system controller. It should be understood that some embodiments may have fewer or greater numbers of temperature control chambers. Optionally, some embodiment may have no temperature control chambers along the web or substrate path. Optionally, some embodiments may have a temperature control chamber after each processing chamber. After processing, the substrate feeds into a substrate rewind unit 170. For ease of illustration in Figure 6, only the above chambers or units are shown and none of the processing chambers, sputtering chambers, or other processing units are shown.

[00170] As seen in Figure 14, the at least one temperature control chamber 160may include cooling elements to cool the substrate passing therethrough while simultaneously providing a configuration which, in one nonlimiting example, provides tension control of the substrate or web so as to allow one or more different tension zones to be defined before the temperature control chamber 160, in the temperature control chambers 160, and/or after the temperature control chamber 160 (which may lead to another sputter chamber, another temperature control chamber, and/or to a rewind unit). Some temperature control chambers may use contact cooling methods, non-contact cooling methods, or a combination of both. In one embodiment, web temperature before rewinding will be about 30°C or less. Optionally, web temperature before rewinding will be about 40°C or less. Optionally, web temperature before rewinding will be about 50°C or less.

[00171] Also seen in Figure 14, it should be understood that in one embodiment, the web path is selected in the temperature control chamber 160 to provide an out-of-plane path relative to the plane of the substrate path through the other processing or sputter chamber(s). In many embodiments, the substrate path is in a horizontal plane and the out-of-plane path may be a vertical or other angled path outward from the horizontal plane. This out-of-plane path may be a serpentine or multi-serpentine path that allows for a more tortuous path to provide sufficient surface area contact with temperature control rollers while minimizing the amount of lateral or horizontal space occupied by the temperature control chamber. This helps create a compact design while still providing substantial path length through the temperature control chamber. In one embodiment, the length of the web path through the cooling chamber is at a ratio of at least 2: 1 relative to the horizontal "downweb" length of the temperature control chamber. Optionally, the ratio is at least 3: 1. Optionally, the ratio is at least 1.5: 1. Some systems may have at least two sections with out-of-plane paths to allow for increased surface area contact.

[00172] In one embodiment of the present invention, all the proposed modules are designed to be self contained units, ready to be mounted in their appropriate vacuum chamber with the maximum vacuum level in the present example selected to be 1χ10^Λ-6 Torr. Each unit of the present embodiment may be equipped with mounting and/or leveling provisions. These provisions are coordinated to match inside the vacuum chambers to adjust and secure the modules.

[00173] Optionally, any penetrations through the chamber walls of the temperature control chamber 160 or other chambers that are used in the design of the present system may include seals such as but not limited to ferro-fluidic feed-throughs around the hardware penetrating into the chamber to maintain a controlled pressure environment in the chamber.

[00174] Optionally, all the module structures are fabricated out of aluminum without any surface coating on them except components with coating that are noted. In general, metric hardware is used where ever possible and where standard hardware is used, they will be marked on the drawings and possible on the hardware. [00175] Optionally, all idlers are coated, lightweight aluminum, specialty extruded idlers with low friction, dry bearings. The process area idlers are designed to be tendency driven and include alignment adjustments for level and tram.

[00176] Additional skew rolls assembly may be used as an option in the process area for side to side adjustment of the substrate. Optionally, this system incorporates a skewing mechanism by a servo motor with a web position feedback to the controller. The adjustment is accomplished automatically until the desired position of the substrate is accomplished.

[00177] Referring still to Figure 14, there may be multiple tension zones Tl through T5. In some embodiments, the tension in T2-T4 may be substantially the same as the tension in the capstan drive rollers of the unwind unit and the rewind unit will control tension therebetween. For ease of illustration, the system is not shown with the sputtering chambers to more clearly show the web path. The tension in each zone Tl - T5 may be varied by controlling drive motors coupled to rollers in those zones. It should be understood that in some embodiments, each of the zones Tl - T5 have a different tension. Optionally, the tension in the processing zones are the same, but the tension in the temperature control chambers, the unwind unit, and the rewind unit are all different. Optionally, the tension in the zone Tl is about 1000 to 200 Ibf Optionally, the tension in processing zones is between about 50 - 300 Ibf Optionally, tension in the temperature control chambers is between about 60 to 750 Ibf Optionally, tension in the unwind zone is between 10 to 300 Ibf Optionally, tension in the rewind zone is between 10 to 300 Ibf Tension in the interleaf zone may be between 5 to 20 Ibf For the predetermined processing temperature in the processing chambers, the various tensions T1-T5 are selected to maintaining a predefined tension in the substrate to prevent undesired curling of the substrate as the substrate undergoes processing. It is the combination that allows for the web to be processed while minimizing curling that may occur during processing or occur as the substrate cools after processing. Some embodiments may use higher tension in the non-heated zones to minimize curling in those zones as the substrate cools. Optionally, some embodiments may use higher tension in the heated zones.

[00178] However, in the current embodiment, the tension zones T2 and T4 represent the same or different tension in the various processing zones in the processing chambers. The predefined tension in the substrate to prevent undesired curling of the substrate during processing while not over tensioning the substrate which may cause permanent elongation of the foil. UNWIND MODULE

[00179] For web handling and tension control, a diameter sensor 214 may be positioned in a spaced apart or other orientation such as but not limited to being on a chamber wall to measure the diameter of one or more the rollers. In one embodiment, the sensor 214 uses ultrasonic measurement techniques to determine diameter. Optionally, optical techniques such as laser based or light based sensors may be used. Optionally, others use a radar based technique.

[00180] In another embodiment, the present invention provides a roll-handling apparatus for unwinding rolls of web material, the apparatus comprising: a) a roll-unwinding station capable of accepting web material unwound from a roll, the roll having an initial radius of about R, wherein the unwinder minimizes contact with the top side surface of the substrate, except with protective coated roller 224 having a coating such as but not limited to neoprene cover with 80 durometer, shore A. Optionally, the coated roller 224 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 8 or smoother. Optionally, the coated roller 224 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 6 or smoother. Optionally, the coated roller 224 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 4 or smoother. Optionally, the roller 224 may coated with a non-damaging, compliant surface which will not roughen, contaminate, or otherwise harm the top surface of the substrate prior to a processing step such as but not limited to sputtering. [00181] All the shafts are sized so that they penetrate through the chamber walls 219 are designed such that the module can be installed and secured in the chamber and the penetrating shafts are installed through the chamber seal and re-attached to their appropriate rolls. In this manner, the motors 202, 204, and/or 206 all remain outside of the vacuum, low-vacuum, sub- atmospheric, atmospheric, or over atmospheric pressure inside the chamber walls 219.

[00182] In the present embodiment of the unwind unit 150, the motor, gearbox, and drive train are mounted on the outside of the vacuum chamber walls 219 on a support structure (not shown).

[00183] Atop the base frame are mounted precision linear bearings for side to side movement. An electromechanical line guide system is included for properly guiding the web out of the process. The edge guide system provides ±1.5 inches of travel. The controller includes a carriage centering function.

[00184] As seen in Figure 15, the web path through the unwind unit will be described in more detail. The substrate leaving the payout or unwind roller 220 will be contacting by non- damaging idler roller 224. As previously described, roller 224 has a circumferential surface that will contact the side of the substrate that will be processed. In the present embodiment, it is the only roller that will contact the surface to be processed. The position of the non-damaging roller 224 is predetermined to provide a desired wrap angle around the capstan roller 230. The substrate or web will run in the direction of the arrow 225 onto the circumferential surface of the capstan roll 230. Thereafter, it wraps around the circumferential surface of the capstan roll by a pre-determined angle ("wrap angle") 232. This wrap angle 232 is selected to provide sufficient surface contact of the web with the roll 230 to provide tension isolation between tension zones Tl and T2. The capstan roll 230 is also the drive roll which is used to control web transport through the entire system.

[00185] As seen in Figure 15, tension may be monitored using a) load cell(s) with individual side to side feedback to monitor actual tension to the drive controller and b) a diameter sensor 214 or 218 (such as that from Keyence LK-G series) to establish the initial torque requirements for the unwind tension. The controller may modulate speed of the drive to maintain a constant tension throughout the roll unwinding, based in part on inputs from the diameter sensors and the load cells. [00186] In one nonlimiting example, the drive motor 202 is linked to the unwind roller 220 through a high quality gear reducer in rotational relation to a shaft and safety chucks 227. In one embodiment, the safety chucks support the nominal 6-in. diameter core. Optionally, the safety chucks 227 are air chucks such as those available from Tidland of Camas, Washington.

[00187] As seen in Figure 15, a load cell or idler 224 is nominally six inch diameter, hard black anodized aluminum. Load cells may also be located on an idler down stream from the driven unwind spindle. This will provide feedback for the automatic tension control system. The unwind can operate in the over and under feed positions. Optionally, it should be understood that the load cell or idler 224 may be coated to be nondamaging to the web surface.

[00188] Figure 15 also shows that a cleaning roll may be in contact with the idler to remove contaminants. Optionally, a single sided contact cleaning roll system is incorporated in the unwind module. This system includes a transfer roll 250 against the substrate with a tape roll against the transfer roll. The contamination is picked up by the transfer roll from the web and transferred to the tape roll. Once the tape roll is loaded up with the contamination, a layer of tape is peeled off to expose a fresh sheet.

[00189] As seen in Figure 15, the unwind module includes an isolation capstan roll section 230. In one nonlimiting example, this roll 230 is the master speed setter and isolates the tension from the unwind spindle to the process section. This roll in the present embodiment is a large diameter, nominal 12-16 inch, 0.25" thick rubber coated with 60 shore A durometer Neoprene driven roll. Other embodiments may use other coated rollers or uncoated rollers.

[00190] As seen in the current embodiment of Figure 15, there are at least two tension zones in the unwind unit. A first section of tension Tl is from the supply roll 220 to the capstan roll 230. A second zone of tension T2 is from the capstan to the slitter. In one embodiment, the tension in the Tl zone is at least in the ratio of 2: 1 relative to the tension in T2. Optionally, the tension in the T 1 zone is at least in the ratio of 3 : 1 relative to the tension in T2. Optionally, the tension in the zone Tl is about 1000 to 200 lbf. Optionally, the tension in zone T2 is about 50 - 300 lbf.

[00191] In one embodiment, the wrap of the foil around the capstan roll 230 is such that at least 75% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 60% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 50% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 40% of the roll is in contact with foil. Optionally, the wrap of the foil around the capstan roll is such that at least 30% of the roll is in contact with foil.

[00192] Optionally, the wrap of the foil or substrate around the capstan roller 230 is based on wrap angle 232. In one embodiment, the wrap angle 232 around the capstan roller 230 is at least 260°. Optionally, the wrap angle 232 around the capstan roller 230 is at least 250°.

[00193] In one embodiment, it is desirable that the top side of the web or substrate is not touched. In such an embodiment, the idler 224 is removed so that the front side of the substrate that will be processed is not touched by any type of roller prior to reaching the first processing chamber.

[00194] Figure 15 also shows an embodiment wherein a cleaning roller 250 is in direct contact with the main tension control roller 230. This also for more effective cleaning as the main tension control roller 230 will have more impact on the substrate as significant amount of tension is applied to that roller and it is one of the last rollers to contact the substrate before the substrate enters the processing chambers.

[00195] Figure 15 also shows an improved embodiment in that the main supply roll 220 is positioned as far "upstream" from the processing chambers as possible. Locating the supply roll 220 at one end of the entire assembly also for easier user removal of the roll for loading and reloading the system.

[00196] The use of two rollers 224 and 226 is a further improvement. Although it creates two locations where rollers contact the side of the surface to be processed, they also created a longer, more angled separation path between the supply roll 220 and capstan roller 230. As the diameter of the supply roll 220 changes, the angle seen by the capstan roller 230 does not change as the roller 226 isolates the angle changes that may result from the supply roll being deplated. This allows for the desired positioning of the supply roll 220 to allow for easy loading/unloading and for access by one or more diameter sensors 214. It also allows for more consistent tension control due to less variability from the incoming angle 233 of the substrate to the capstan roller 230.

INTERLEAF WINDER IN THE UNWIND MODULE

[00197] Referring still to Figure 15, an interleaf winder 260 according to one embodiment of the present invention will be described. The interleaf winder 260 is an optional item and may be configured as a single position, shafted driven winder with locking safety chucks and shaft that matches the standard cores used on various supply rolls. The interleaf provided by the interleaf winder 260 herein may be a protective layer to the underside of the substrate so that during the rewind, the interleaf will act as a protective material preventing damage to the newly sputter or deposited material. It should be understood of course, that the interleaf may also be positioned at the rewind unit where it can be fed into the rewind roller so that there is a protective layer between layers or the processed substrate.

[00198] In one embodiment, the frame is fabricated of structural metal tube, metal shapes and metal plate to form a rigid structure. The unwind support plates are fabricated of 1.5 -inch thick MIC 6 aluminum plates.

[00199] In one nonlimiting example, the interleaf winder 260 is a direct coupled torque regulated winder. The controller modulates the motor torque to maintain a constant tension throughout the roll winding.

[00200] The drive motor 206 is linked to the winder through the safety chucks. The safety chucks support the nominal 6-in. diameter core shaft. The motor and drive train are mounted on the outside of the vacuum chamber on a support structure. Optionally, the winder can operate in the over wind position.

[00201] There may be a plurality of interleaf idlers 270 and 272 that may be positioned along the path of the interleaf. These may optionally by chrome surfaced with a 6 Ra surface roughness. The path of the interleaf is selected so that the idlers position the interleaf on the side of the substrate that will not be sputtered or processed. Some embodiments may also use the interleaf comprised of a material to improve heat transfer between the substrate and any temperature control roller. Such a material may be a compliant material to improve surface contact and/or a material with an improved thermal transfer property.

TEMPERATURE CONTROL CHAMBER

[00202] Referring now to Figure 16, embodiments of a temperature control chamber according to the present invention will now be described. One or more of these units may be positioned along the path of the substrate to keep the substrate within a temperature zone that prevents damage to the substrate and/or any coatings thereon.

[00203] Referring now to Figure 16, a side cross-sectional view of a temperature control chamber according to one embodiment of the present invention is shown. Figure 16 shows that the substrate passes over a first temperature control roller 300 and a second temperature control roller 310. The substrate path through the temperature control chamber may include passing over a first cleaning roller 320, a second cleaning roller 330, and then to a load cell 340. The load cell 340 is strategically located to increase the wrap around the cooling roll 300. Idlers 350 and 352 are similarly positioned to increase the wrap angle around the cooling rollers 300 and 310.

[00204] In the present embodiment, the path through the temperature control chamber 160 contacts at least two cooling rollers that may be positioned to sequentially follow one another along the substrate path. Optionally, there may be three or more temperature control rollers. Optionally, some rollers may be cooling rollers while others are heated or unheated/uncooled rollers. Optionally, a first roller contacts a back side of the substrate, a second roller contacts a front side of the substrate that contains a sputtered layer thereon, and somewhere along that path is a cleaning element to clean a front side surface of the substrate either before and/or after contact with the roll that touches a front side surface of the substrate.

[00205] In one embodiment, the cleaning apparatus such as but not limited to a cleaning roller 320 and/or 330 may be in contact with the substrate along a web path through the temperature control chamber 160. Optionally, a single sided contact cleaning roll system is incorporated in the unwind module. This system includes a transfer roll against the substrate with a tape roll against the transfer roll. The contamination is picked up by the transfer roll from the web and transferred to the tape roll. Once the tape roll is loaded up with the contamination, a layer of tape is peeled off to expose a fresh sheet. [00206] In one embodiment, temperature control rollers are sized to have a diameter that is at least 10% of the web path through the cooling chamber so as to provide the desired thermal transfer surface contact. Optionally, the temperature control rollers are sized to have a diameter that is at least 15% of the web path through the cooling chamber so as to provide the thermal transfer surface contact. Optionally, the temperature control rollers are sized to have a diameter that is at least 20% of the web path through the cooling chamber so as to provide the thermal transfer surface contact.

[00207] Optionally, in another embodiment, the temperature control chambers are at a different pressure than the vacuum atmospheres found in most sputter chambers. The different pressure may allow for greater conduction or cooling to occur due to the additional convection that may occur in such a temperature control chamber. In one embodiment, the atmosphere in the temperature control chamber 160 is at least 0.1 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.25 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.5 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.75 atm. Optionally, the atmosphere in the temperature control chamber 160 is at least 0.9 atm.

[00208] In one nonlimiting example, the chill rollers are fabricated out of 304 stainless steel tubing with 304 stainless steel welded headers and pressure tested. The rollers are double shelled progressive spiral design, hard chromed and ground to 4 RMS finish. All the chill rollers are cp400 mm while the routing idler rolls around the chill rolls are six inches. Double pass rotary unions may be provided for connection to a chilled water temperature control system.

[00209] In the present embodiment, each chill roller is mounted in oversized piloted bearings and driven by a torque assist drive system. The torque assist motor and drive over speeds the roll and sets a torque value to overcome the friction forces of the bearings and rotary union without exerting any forces on the substrate. The drive can monitor the output torque and speed to the motor and compensate as necessary.

[00210] Part of the chill roll frame module is a load cell idler roll. The load cell idler is nominally six (6) inch diameter, hard black anodized aluminum. Optionally, in some

[00211] In one embodiment, the load cell in the last cooling chamber will provide feedback for the automatic tension control system for the exit capstan roll, located at the winder module.

[00212] In the temperature control chamber 160, just prior to the chill rolls, a single roll steering guide may be incorporated. This edge guide system assures to convey the substrate back toward the center line of the equipment. An edge sensor picks up the location of the web and steers automatically toward the direction of the center line.

[00213] In one embodiment, the wrap angle 302 around the roller 300 is at least 260°. Optionally, the wrap angle 302around the cooling roller 300 is at least 250°. Optionally, the wrap angle 302around the cooling roller 300 is at least 240°. Optionally, the wrap angle

302around the cooling roller 300 is at least 230°. Optionally, the wrap angle 302around the cooling roller 300 is at least 220°. Optionally, the wrap angle 302around the cooling roller 230 is at least 210°. Optionally, the wrap angle 302around the cooling roller 300 is at least 200°.

Optionally, the wrap angle 302around the cooling roller 300 is at least 190°. Optionally, the wrap angle 302around the cooling roller 300 is at least 180°. A large surface wrap is desired to achieve a large tension isolation ratio. The web may leave the substrate at an angle relative to horizontal. The positioning of rollers 340 and 350 will impact the wrap angle 302.

[00214] In one embodiment, the wrap angle 312 around the roller 310 is at least 90°. Optionally, the wrap angle 312 around the roller 310 is at least 100°. Optionally, the wrap angle 312 around the roller 310 is at least 110°. Optionally, the wrap angle 312 around the roller 310 is at least 120°. Optionally, the wrap angle 312 around the roller 310 is at least 130°. Optionally, the wrap angle 312 around the roller 310 is at least 140°. Optionally, the wrap angle 312 around the roller 310 is at least 150°. The positioning of roller 352 will impact the wrap angle 312.

[00215] In one embodiment, the temperature control chamber is a cooling unit. The chill roll frame 314 is fabricated of structural aluminum tube, shapes and plate to form a rigid structure. The support plates 316 are fabricated of 1.5-2.0 inch thick MIC 6 aluminum plates. The layout is designed to maximize wrap on the two chill rollers. [00216] All the shafts that penetrate through the chamber walls are designed such that the module can be installed and secured in the chamber and the penetrating shafts are installed through the chamber seal and re-attached to their appropriate rolls. The motor, gearbox, and drive train are mounted on the outside of the vacuum chamber on a support structure.

WINDER MODULE

[00217] Referring now to Figure 17, one embodiment of a winder unit 170 will now be described. In one nonlimiting example, the winder 170 is configured as a single position, shafted driven winder with locking safety chucks and shaft that matches the standard cores used in industry.

[00218] Figure 17 shows that the incoming substrate is passed over a capstan roller 420, an idler 422, another idler 424, and a take-up roll 426. Tension is controlled in the winder 170. The tension may be in a first zone T4 and a second zone T5 using load cells with individual side to side feedback to monitor actual tension to the drive controller. The controller modulates speed of the drive to maintain a constant tension throughout the roll winding.

[00219] In one embodiment, the wrap angle 430 around the roller 420 is at least 180°. Optionally, the wrap angle 430 around the roller 420 is at least 190°. Optionally, the wrap angle 430 around the roller 420 is at least 200°. Optionally, the wrap angle 430 around the roller 420 is at least 210°. Optionally, the wrap angle 430 around the roller 420 is at least 220°. Optionally, the wrap angle 430 around the roller 420 is at least 230°. Optionally, the wrap angle 430 around the roller 420 is at least 240°. Optionally, the wrap angle 430 around the roller 420 is at least 250°. Optionally, the wrap angle 430 around the roller 420 is at least 260°. Optionally, the wrap angle 430 around the roller 420 is at least 270°. The positioning of roller 422 will impact the wrap angle 430. Similar to that of the embodiment of the unwind unit 150, there are two rollers 422 and 424 between the roller 420 and rewind roller 426. This allows for roller 422 to maintain the desired constant angle and having the second roller 424 improves tension control as the variations due to changes in diameter of the rewind roller 426 is more isolated.

[00220] In one embodiment, the frame supporting the rollers is fabricated of structural aluminum tube, shapes and plate to form a rigid structure. The unwind support plates 414 may be fabricated of 1.5 -inch thick MIC 6 aluminum plates. The plates 414 are configured to have access areas to allow unobstructed access to the rollers therein. [00221] All the shafts that penetrate through the chamber walls are designed such that the module can be installed and secured in the chamber and the penetrating shafts are installed through the chamber seal and re-attached to their appropriate rolls. The motor, gearbox, and drive train are mounted on the outside of the vacuum chamber on a support structure.

[00222] Atop the base frame may be mounted precision linear bearings for side to side movement. An electromechanical linear guide system is included for properly guiding the web out of the process. The edge guide system provides ±1.5 inches of travel. The controller includes a carriage centering function.

[00223] In one embodiment, the drive motor 438 is linked to the winder 170 through a high quality gear reducer and safety chucks 440. In the current embodiment, the safety chucks support the nominal 6-in. diameter core shaft which accommodates the standard 6-in diameter core.

[00224] Optionally, the load cell idler is nominally six inch diameter, hard black anodized aluminum. Load cells may be located on an idler 422 down stream from the exit capstan roll. This will provide feedback for the automatic tension control system. The winder can operate in the over and over feed position.

[00225] Part of the winder module is an isolation capstan roll 420. This roll speed is modulated according to the load cell feedback signal and the desired tension setting. This isolates the tension from the winder spindle to the process. In one embodiment, the roll 420 is a large diameter, nominal 16 inch, rubber coated with 0.25 -inch thick 60 shore A durometer Neoprene driven heat transfer roll. In one embodiment, it is desirable that the top side of the substrate is not touched, a large surface wrap is desired to achieve a large tension isolation ratio.

[00226] It is a double shelled progressive spiral design fabricated out of 304 stainless steel tubing with 304 stainless steel welded headers and pressure tested.

[00227] The motors 442 and 444 for the rollers are positioned outside a pressure controlled atmosphere inside a chamber 446 (shown in phantom).

[00228] DRIVES AND CONTROLS

[00229] In one embodiment, the total system utility specifications are as follows: a) electrical: 480volts, 3phase, b) Air: None required, and c) Chilled water: 25 degC, lOgpm [00230] The proposed drive system consists of a Parker SSD AC Vector type Digital Drives featuring Parker SSD fiber optic communication network.

[00231] In the current, non-limiting embodiment, the infeed capstan roll serves as the master line speed setter. All other drives slave to this drive. The unwind spindle, the exit capstan roll, and the product winder spindles are tension drives. All the chill roll and idler roll drives are torque assist drives following line speed and monitoring torque output. Optionally, the exit capstan roll and the infeed capstan roll are both used for speed setting. Optionally, different tensions may be in each of the zones are previously described.

[00232] The system may include two local operator interfaces such as but not limited to a color LCD touch screen station which are located on the operator's control enclosures, mounted on articulating arms at the unwind and the winder end. Push buttons are used for the operating parameters such as start, stop and jog. Tension set point, line speed set point, speed ratio, etc. is set through the touch screen. Actual web tension and motor torque demand is displayed on the touch screen.

[00233] Automatic control for the drives and sequencing logic is handled by the LINK processors through LINK digital I/O.

[00234] Additionally, two multi button pendants are supplied at the unwind and the rewind ends of the equipment for easy thread up and roll loading purposes.

[00235] AC Vector Drive Features

[00236] In the present embodiment, the drive system uses advanced microprocessor based SSD Drives AC Vector digital drives. The drives are fully digital controllers. These drives feature one or more of the following:, a digital processing module for all control functions; a self tuning module for motor parameters;, a comprehensive communications to international standards protocol; a software definable controller tunable for application and control flexibility; a direct digital encoder feedback for one or more of the motor driven rollers and/or non-driven idlers; a drive to drive communications link via high speed noise immune fiber optic network; automatic first fault alarm memory; menu driven programming; and/or system security by password protection. The encoders may be used to speed match one or more of the drive rollers along the path of the substrate. Some may be matched exactly while other are match to be between a range of 0.1% to 5% of the rotation between a referenced roller.

[00237] [00238] Self Tuning

[00239] The intelligence of the microprocessor is utilized to automatically optimize the tuning of the drive to the motor.

[00240] Onboard Alphanumeric Display

[00241] The drive system of the present embodiment contains an onboard alphanumeric display for diagnostic information in a clear English language form. The drive has self-checking diagnostics and remembers faults as they occur. The first fault is displayed automatically (for example "MOTOR THERMAL FAILED") and saved until acknowledged by the use of on-board push buttons or restarting the drive. All drive parameters are displayed in this plain language manner. For example current limits, acceleration ramp rates, speed and current loop stability settings are easily read without reference to unfriendly parameter codes.

[00242] Programming

[00243] The drives in this system are programmed with application software with drive parameters that are modifiable using onboard function push buttons and a menu driven display on the drive.

[00244] All calibration and set up parameters are digital and done through the drive software. The complete drive configuration and set up parameters may be stored on a disk using control such as but not limited to an IBM compatible computer and a setup and monitor (SAM) software package. This allows the original program configuration to be loaded into a

[00245] Communications

[00246] Optionally, the drives use a noise immune communications local control network. This network is flexible, high speed and transparent to the user. The network accommodates all of the drives and I/O modules on the machine with ample capacity left for future drive expansion if ever required.

[00247] The winding system controls will be integrated with the deposition system's controls as necessary to yield safe and effective operating machine tool. This encompasses as a small amount of data sharing and some hardwired features such as EMO's. [00248] In another aspect, the substrate passing through the various processing chambers may exhibit a tendency to curl and/or deflect out of the plane of travel. These out-of-plane deflections may disrupt processing by scratching the substrate or may scratch or damage the target if the

[00249] Some embodiments may include a processing chamber 650 with a top opening door 654 that contain one or more sputter targets on the door 654. There are rollers 660 and 662 that support the underside of the substrate as it passes through the processing chamber 650. In the present embodiment, the anti-curling assembly comprises of a top side roller 670. There is also an aperture 672 in chamber 650 to allow for pressure control of the chamber to vacuum, sub-atmospheric, atmospheric, or higher pressures.

[00250] In some embodiments, the rollers are at least as wide as the substrate. Optionally, some embodiments may be even wider. Optionally, some embodiments may use rollers less than the width of the substrate. In some embodiments, the substrate is at least 700 mm wide.

Optionally, some are at least 800mm wide. Optionally, others are at least 1000mm wide. The thickness of the substrate may also vary. Some embodiments use a substrate with a thickness in the range of about 100 microns to about 200 microns thickness in the widths described above. Such thin and wide foils contribute to the buckling issues which may occur.

[00251] Optionally, roller 670 may having a non-substrate damaging coating such as but not limited to neoprene cover with 80 durometer, shore A. Optionally, the coated roller 670 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 8 or smoother. Optionally, the coated roller 670 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 6 or smoother. Optionally, the coated roller 670 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 4 or smoother. Optionally, the roller 670 may coated with a non-damaging, compliant surface which will not roughen, contaminate, or otherwise harm the top surface of the substrate prior to a processing step such as but not limited to sputtering. Any of the rollers contacting the coated surface may be configured as described.

[00252] Figure 18 more clearly illustrates the rollers 660, 662, and 670 used in the present embodiment of the invention. The roller 670 is shown mounted on brackets 674 that are taller than brackets supporting the rollers 660 and 662. It can also be seen that the rollers 660 and 662 may be driven by motor 680 while the roller 670 of the anti-curling assembly is a tendency roller and not driven. In one nonlimiting example, the height of the tendency roller 670 from the substrate is selected to be between about 50 to 80 mm from the moving substrate. Optionally, the rollers are selected to be between about 40 to 100 mm from the moving substrate. The height is generally selected so that the rollers are not in contact with the moving substrate unless a predetermined amount of substrate buckling occurs and the out-of-plane deflection occurs. The rollers are designed to operate in a non-damaging manner to the treated substrate. The rollers may be selected to be but are not limited to aluminum, anodized, chrome coated, a sufficiently smooth coating so that particles do not stick to the rollers, and/or otherwise treated so as to be non-damaging to the substrate. Some embodiments may use more than one tendency roller 670 per chamber. Optionally, it should be understood that some embodiments use sputter shields or other devices around or in proximity to the roller 670 to prevent damage to those rollers as these rollers may be located in the processing chamber.

[00253] Referring now to Figure 19, yet another embodiment of the present invention will now be described. Figure 19 shows that in one nonlimiting example, a particle removal assembly may be positioned along the path of the substrate through the processing system.

[00254] Figure 19 shows that in this present embodiment, an agitation generating source 700 may be included to stimulate the roller 710 so that any loose particles on the top side surface of the substrate will be loosened and fall into at least a first receptacle 712. A second larger receptacle 714 may optionally be included to gather other particles as they fall off the surface of the substrate prior to reaching roller 716. This is particularly useful to remove particles which may form on the substrate such as but not limited to the deposition of transparent conductive oxides.

[00255] By way of nonlimiting example, the agitation generating source 700 may be mechanically coupled to impart vibratory motion to the roller 710, directly to the substrate, or to some other component in contact with the substrate. Optionally, an air knife 720 may also be used to remove particles as the substrate turns about 710 and goes to an inverted path that faces the top side surface of the substrate downward as the substrate heads to roller 716.

[00256] Referring now to the embodiment of Figure 20, it is shown that rewind unit may also be configured to include one or more particle removal device(s). Figure 19 shows that in this present embodiment, an agitation generating source 800 may be included to stimulate the roller 810 so that any loose particles on the top side surface of the substrate will be loosened and fall into at least a first receptacle 812. A second larger receptacle 814 may optionally be included to gather other particles as they fall off the surface of the substrate prior to reaching roller 816. This is particularly useful to remove particles which may form on the substrate such as but not limited to the deposition of transparent conductive oxides.

[00257] By way of nonlimiting example, the agitation generating source 800 may be mechanically coupled to impart vibratory motion to the roller 810, directly to the substrate, or to some other component in contact with the substrate. Optionally, an air knife 820 may also be used to remove particles as the substrate turns about 810 and goes to an inverted path that faces the top side surface of the substrate downward as the substrate heads to roller 816. It should be understood of course, that ultrasonic or other agitation techniques may also be used to stimulate particle removal.

[00258] Figure 20 also shows that in addition to or in place of the agitation generating source 800, a second agitation generating source 840 may also be included to stimulate the capstan roller 420. In one nonlimiting example, this vibratory or other stimulation may be in the frequency range of about 0.1 mHz to 2 mHz. Optionally, vibratory or other stimulation may be in the frequency range of about 100 Hz to 5 mHz. The particles removed from the substrate may be collected by receptacle 850 or a second larger receptacle 852. The collection of particles may be assisted by suction sources and/or air knifes to direct particles to the receptacles. It should also be understood that the receptacles are typically located at positions where gravity may assist the removal or "fall" of the particles from the substrate.

[00259] In some embodiments, the rollers are at least as wide as the substrate. Optionally, some embodiments may be even wider. Optionally, some embodiments may use rollers less than the width of the substrate. In some embodiments, the substrate is at least 700 mm wide.

[00260] Optionally, roller 670 may having a non-substrate damaging coating such as but not limited to neoprene cover with 80 durometer, shore A. Optionally, the coated roller 670 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 8 or smoother. Optionally, the coated roller 670 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 6 or smoother. Optionally, the coated roller 670 may be a non-damaging roller with a surface such as a chrome surface, anondized surface, aluminum surface, or metal surface with an Ra of 4 or smoother. Optionally, the roller 670 may coated with a non-damaging, compliant surface which will not roughen, contaminate, or otherwise harm the top surface of the substrate prior to a processing step such as but not limited to sputtering. Any of the rollers contacting the coated surface may be configured as described.

[00261] Web Converting, Manufacturing, and Handling

[00262] Web converting changes the web permanently, through processes such as laminating, printing, sheeting, coating and slitting. Web manufacturing forms a web, through processes such as film extrusion, rolling and material spinning. Web handling permits the transport of a material while preserving its properties. The materials used in web enabled process can include nearly any material, such as metals or natural or manmade polymers or fibers, and can take many forms such as solid sheet or woven strand. Coiled sheet metal can be a web if it is thin enough to be bent over rollers

[00263] Web Cleaning

[00264] Web material can be cleaned using any of several methods including but not limited to chemical baths, pressure, brush assisted vacuum, sonic assisted vacuum, and/or tacky rollers, and combinations of any of these methods. Assessment cleaning efficacy can be carried out by counting particles on an adhesive tape applied to then removed from the web surface, use of a witness placed in a processing area, particle counting using a microscope or other optical apparatus, use of a chemical indicator of contamination, and the like.

[00265] Web may also be cleaned by plasma processes, such as vacuum sputtering. Sputter cleaning can include argon sputter, Ar-02 sputter, or sputtering with fluorine containing gasses such as NF3 (as well as CF4, C2F6). Organic contaminants are often effectively cleaned using 02 plasma etching at fairly high pressures (anywhere between 10 - 200mTorr). In- situ sputter cleaning is particularly effective in web processing because there is no re-rolling of the web between cleaning and processing (film application).

[00266] Web Handling [00267] Optimization of web handling typically entails a focus on throughput: maximizing productivity requires processing a web as fast and as wide as possible, while incurring a minimum waste for the highest yield. Web handling waste can arise from a variety of sources, including but not limited to deformed or baggy webs, curl, registration, web breaks, wrinkling, spreading, and winding defects.

[00268] Web handling is typically managed through the use of a range of components including but not limited to winders and unwinders, rollers, tension control systems, nips, nip control systems, temperature control systems, moisture control systems, and path control through guiding mechanisms.

[00269] Controlling the Web Path

[00270] The use of guides and supports managing the correct web path, in part by keeping the web on rollers, in part by minimizing trim loss, and in part by maintaining register (especially critical for printing, lamination, and winding applications). There are two main types of path disturbances - variable web uniformity and variable web roller traction. To deal with these disturbances, there are two main guide types: passive and active. Passive web guides direct the web towards the center, enabled solely by geometry and not carried out through a control system. In contrast, active web guides brings the web edge or center to a cross-machine direction (CD) using a full control typically consisting of a sensor, an actuator, and a controller.

[00271] Use of Guiding Mechanisms

[00272] Several guiding mechanisms can be used to steer the web path, including but not limited to winding guides, unwinding guides, steering guides, and displacement guides. For winding guides, a sensor moves with the winding stand and the web material core moves with a winding stand. In contrast, for unwinding guides, a sensor is fixed to the ground and a web material core moves to feed web through the stationary sensor. Steering guides are used for guiding the movement and/or position of the web in various places in a machine and typically require a properly sized entry and exit span. For a steering guide the exit span can be perpendicular to the plane of rotation and a sensor is located close to the moving roller. Displacement guides can be used to manage the movement and/or position of the web in the middle of a machine. For a displacement guide, the entry and exit spans are perpendicular to the plane of rotation. [00273] Web processing can also guide the web. In thermal processes uneven addition or removal of heat will create differential thermal expansion / contraction on the web and cause the web to steer towards one side or the other. It may be necessary to adjust thermal process steps to even-out cross-web heating in order to avoid undesirable web steering.

[00274] Winding and Unwinding

[00275] There are several classes of mechanisms which can be used to wind and/or unwind a web, including but not limited to: (a) continuous processes such as range, turret, reel, (b) rewinder-based processes such as duplex, two drum, slipped core, and (c) specialty winders such as gap and differential. In Range winding, the centerwind range is from a minimum to a maximum web tension. A roll nip or Layon roll can add additional tightness. In Turret winding, a continuous production process is used, where one spindle is wound and the web then indexed over to a new spindle. Classes of Turret winders include but are not limited to centerwinds, centerwinds with Layon, and center- surface winds. Alignment and physical rigidity are both issues for Turret winding systems, as the physical size is often greater than for systems enabling other winding processes. In Reel (Pope) winding, the winding starts on a primary arm then moves to a secondary arm. These systems enable continuous production. The primary application for this type of winder is following a continuous web fabrication or processing system. For Duplex winders, every other roll is wound on opposite sides of a drum or machine. Such winding processes are often used for small narrow rolls. The primary application for this type of winder is to serve as a rewinder, which can for example eliminate the requirement for interweaving for some web types. In Two Drum winding, an optional third roller (termed a Rider Roller) can be used in either a shaftless or shafted mode. Two Drum winders are typically very durable. The primary application for this type of winder is to serve in rewinding applications. Two drum systems can also be used without a rider roller. Alternatively, three or four drums can also be employed for continuous winding and to automate set changes. In a Slipped Core winder, a differential core winding process is employed, where an oversped core transmits torque and tension through a slip-clutch to the rolls. The slip-clutch allows each roll to turn at its own speed (revolutions per minute, or rpm). For a Gap winder, the roll and/or roller is moved to maintain a small gap, which can be useful to protect thin-gage materials that may be prone to wrinkling. The lack of a nip limits the web speed on smooth grades. By use of a gap, there is not enough time or space for a wrinkle to develop. [00276] There are several other mechanisms to manage the web. For example, accumulators can be used during winding, unwinding, or other web handling processes to store material temporarily for example for a manual roll change or to allow a sufficient residence time for a web-based process to be fully carried out on the web. Flying splices can be used to allow continuous processing of discrete rolls, by splicing the tail of one roll with the leader of another roll while the web is moving.

[00277] Cores

[00278] Cores serve as the foundations of rolls. They are most often formed from fiber but may also be made from plastic or metal. Cores are supported by chucks and shafts. Expandable core shafts can be used, for example where air inflation of a bladder is used to expand "leaves". In vacuum applications expandable chucks are preferentially mechanically driven to avoid storing compressed gas in the vacuum chamber. Expandable core shafts permit running either one roll or multiple rolls, with the ability to change the widths or positions of rolls. Such shafts may be found in any of several forms including but not limited to buttons, lungs strips, and spiral shapes. Disadvantages of expandable cores can include bladder failure, non-concentric expansion, runout leading to vibration and speed limitation, deflection, and wobbling. Expandable core chucks can be used as well, especially for high speed web processing operations. Forms of expandable core chucks include but are not limited to inflatable structures and concentric, torque-activated structures. Disadvantages of expandable core chucks include a lower torque capacity.

[00279] Rollers

[00280] Rollers are the building blocks of all web manufacturing and converting machinery. Rollers perform vital functions of web routing, path and tension control. Rollers and the spans between rollers are a critical environment for web processes. While most rollers are intended to be in traction, insufficient wrap, low friction surfaces and air entrainment all may lead to sliding. Changes in the traction condition of a roller may lead to errors in web handling. Rollers must be well aligned. Roller misalignment could cause a slack web, web breaks, or wrinkles.

[00281] Rollers perform five functions. First, rollers can change web tension. For example, for driven rollers, braking can be used to increase tension, while motoring (driving forward) can be used for tension reduction. Second, rollers can change the web path. A web normally enters a roller in traction at a right (normal) angle (known as the "normal entry law"). The normal entry law, which is only valid in traction, tells us the path of the web through a machine. A web seeks a right angle entry to a roller in traction. If there is a crooked roller, the web will bend sideways to meet it at a right angle. The management of rollers also includes the use of guides and spreaders. Spreaders can decrease the tendency to wrinkle, but can cause wrinkling if not properly applied. Some rollers are intolerant and increase the tendency to wrinkle. Roller intolerance increases with wrap angle and traction and decreases with diameter. Third, rollers can deform the web, either as part of a process, or unintentionally as a web error especially if imprecisely aligned or (intolerant?). Fourth, rollers can control and/or adjust Temperature, either through heating or cooling. Fifth, rollers can enable a wide range of web processes, including calendaring, coating, laminating, printing, and the like.

[00282] There are two types of rollers. Transport rollers carry the web elastically. Examples of transport rollers include idler rollers, pull rollers, and layon rollers. Process rollers change a characteristic of the web permanently. Examples of processes enabled by such rollers including coating, laminating, and printing.

[00283] There are three modes through which a web and a roller can interact: (i) floating, (ii) sliding, and (iii) tracking. The default mode for web transport is tracking. Traction is where roller velocity is equivalent to web velocity. When roller velocity is not equal to web velocity, then a variety of transport issues can arise due to sliding. Many transport mechanisms require sliding, such as turnbars, slides, types of web flatterners, types of web spreaders, types of passive steering, and many others. Cues such as blueing, patina, and machining marks can indicate different modes of interaction between a web and a roller. Different web/roller modes can be used within the same machine, but not on the same element in a machine, since chancing a mode can cause a tension upset where tracking can lead to sliding and floating modules.

[00284] Web shifts can occur on speed changes, in particular if (i) rollers are misaligned, (ii) tension is not held steady during acceleration and/or deceleration, (iii) changing tension causes changes in traction over a roller. It is very common for the path of the web to shift during a speed change. In most cases, a path shift during a speed change indicates both a mechanical and electrical problem; Tension is not held. Traction changes over a crooked roller. Often the faulty element is an idler roller. [00285] Roller Diameter Taper or Nip Pressure Variation and Web Path can lead to sliding. In traction, the web climbs up the taper. In sliding the behavior is opposite. Nips also move the web path. However, they are almost always in traction and thus move the web to the high nip side.

[00286] A baggy web can form based on the web path. The web can arc away from a baggy side when slack, while a web can arc toward a baddy side under tension. There is more offset in a traction mode than in a sliding mode. Bagginess can also steer the web, even on perfectly performing machinery. The web moves to the baggy side. However, it moves further in traction than in sliding.

[00287] In general it is best to minimize the number of rollers employed in the web handling path. This is because rollers and attachments are (i) relatively expensive, (ii) occupy space in the handling path, (iii) increase the mount of time required for cleanup, maintenance, threading and troubleshooting, (iv) challenge tension and path control, and (v) can increase web defects such as wrinkles.

[00288] Rollers can deflect due to the forces of the roller's own weight, the web's tension, and nip. Rollers should not deflect excessively else they will increase wrinkling, vibration, and nip variability.

[00289] Roller diameter should take into account impact on deflection, critical speed, stress, traction, and heat transfer. The web should not be allowed to slip on the roller or else there is a risk of (i) loss of tension control, (ii) loss of path control, (iii) web marking, and (iv) roller wear.

[00290] Differences in roller tension should also be limited across different rollers or else there is a risk of (i) loss of traction, (ii) floppy web on the low tension side, and (iii) yield or break on the high tension side. Roller tension control systems can be used to minimize (i) idle roller count, (ii) idler roller intertia, (iii) acceleration rate limitations, and (iv) bearing drag as well as maximize drive control. In general it is best to set the tensions in all spans to the same level.

[00291] Rollers should be rigidly mounted or else there is a risk of lost alignment, increased noise, greater vibration, and faster wear.

[00292] Rollers should be mounted with appropriate levels of clearance (looseness of parts) and compliance (flexibility of framework). Roller alignment minimizes registration artifacts, web bagginess, web breaks, and wrinkling. Alignment should be carried out both in- plane (minimizing bending) and out-of-plane (minimizing twisting). The more round the rollers, the less the potential for registration artifacts, web bagginess, web breaks, and wrinkling.

[00293] Roller roundness can be impacted by diameter variation, which increases with roller wear. Radial runout can also impact roller shape.

[00294] Rollers should be balanced to minimize machine vibration, web vibration, bearing wear, and noise.

[00295] Roller surfaces are typically composed of a shell and a cover. Shell materials include but are not limited to aluminum, anodized aluminum, cast steal, DOM steel tubing, composites, and coatings comprised of any of a range of materials including tungsten carbide, chrome, and ceramic. Cover materials include but are not limited to Flourocarbon, Hypalon, Polyurethane, Silicone, Urethane, Acrylic, Buna N (Nitrile), Butyl, EPDM, Neoprene, Natural Rubber, SBR, Thiokol, and the like.

[00296] Fluid Idlers:

[00297] Fluid Idlers function much the same way as standard idler rollers in that they simply assist in guiding the web along various paths. Fluid Idlers use forced fluid escaping from a perforated or porous surface of any desired shape to glide the web over said surface. No solid parts come in contact with the web, and the forced fluid acts as the surface along which the web glides. This allows the web to make turns and conform to surfaces without contacting the surface of, or any coating on, the web, thus avoiding damage or deformation.

[00298] Vacuum Belts and Vacuum rollers:

[00299] Vacuum belts and drive rollers are constructed in such a way that a fluid (usually a gas) can be drawn into a resevoir behind a perforated or porous, free moving or driven surface over which the web travels, thus creating a normal force that presses the web against said surface. This force ensures that the web conforms to this surface and does not slip over that surface. These belts and rollers can be used either to serve as a free moving, conformal surface for the web to travel over, or can be used to actively move the web at the speed of that surface if it is actively driven. These belts and rollers allow for greater control of the web path and shape the foil takes at certain points, and can be used for tension isolation through the friction created by the normal force while avoiding contacting and potentially damaging one surface of the web.

[00300] Web Tension [00301] Tension is critical since the level of web tension impacts web flatness (web bagginess and curl), web geometry (web length, width, and thickness), and web position (web path and registration). Web tension can also impact web breakage rates, roll winding quality, and the extent and distribution of wrinkles.

[00302] Tension control elements include but are not limited to tension sensors (such as a load cell or a dancer), tension actuators (such as a motor, brake, or actuated dancer), tension controllers (such as a drive, PLC or black box), the tension set point, and rollers and other mechanical elements.

[00303] Balancing the amount of web tension is a central goal for optimizing the handling path. Too much tension can result in necking (for ductile or rubbery materials), web breaks (for brittle materials), wound roll defects such as blocking, and wrinkles. Too little tension can result in bagginess, fluttering, web path changes, registration errors, wrinkles, and wound roll defects such as telescoping and the like. Web tension can be measured by determining the amount of (i) web sag, (ii) air backpressure, (iii) brake current, (iv) brake pressure, (v) motor amperage, or (vi) calibrated dancers (a roller on a pivoting arm, where the arm position sensors feed the motor control speed). Load cells can also be used to monitor and control web tension. A load cell is a roller mounted on an electronic force gauge. The roller force feeds back to the motor or brake torque control. To function properly load cells should have mechanical overload protection. One caveat of load cells is that they can resonate at high speeds.

[00304] Web tension can be controlled by drive systems, which include a roller drivers (electrical and/or mechanical), and a drive supplier, a device that delivers controlled electrical power to drive motors, as well as software to manage this hardware, wetware, control cabinets, and power conversion cabinets. Web tension is also impacted by a range of factors including but not limited to the size, type, and distribution of rollers, as well as roller surfaces, roller inertia, bearing drag, process related drag, and substrate material.

[00305] Electrical roller drives include (i) AC scalar types (for non-precision applications such as pumps, trim blowers, and tangential slitters), (ii) DC motors (the most common type used for web transport applications), (iii) AC vector types (with no brushes and relatively low rpm performance), (iv) Servo Drives (for high speed positioning applications, such as electronic line shaft, electronic harmonic gearbox, printer registration, and packaging with cyclic start/stop, and (v) Stepper motors for fraction slow positioning. [00306] Mechanical roller drives include pneumatic brake or clutch systems, electrical brake or clutch systems, or tendency drives, which typically use bearings as slip clutches. Mechanical transmission for these drives includes belts (such as V-belts, flat belts, or timing belts), gearboxes, and shafts. Gearboxes permit a high motor rpm to be transformed into a slower roller rpm, but can add substantial friction to a system. Roller drive speed can be controlled with an open loop where no web tension sensor is employed. This is required for most forms of printing registration. Process control can be complex, and tight tolerances are also required for roller diameters, traction and speed.

[00307] Roller drag can results from (i) bearings (where the diameter, bearing type, and form of lubrication all play key roles), (ii) nip (where the character of the "softest" for each roller pair dominates the influence on drag), and any fluid in the transport system. The total drag should be less than the web tension. Roller inertia depends on direction, applying during speed changes, with increased tension during acceleration and decreased tension during deceleration. The mass moment of inertia for the roller depends primarily on the diameter and weight of the roller, and to a limited extent on the wall thickness and material. The acceleration rate is typically around 10 FPM/sec for continuous machines and about lOOFPM/second for re-winders and start/stop packaging systems.

[00308] Roller drives control speed as well as web tension. Braking increases tension, while motoring decreases tension. Drive control can be delivered through either (i) a speed reference, (ii) a closed loop system which senses and compensates for changes in web tension, or (iii) an open loop system with no web sensor. Drive quality measures include speed references held to 1-2 parts per 1,000, web tension held to < 5% of the set point for a steady run, and web tension held to 10% or so during speed changes.

[00309] Maintaining different tensions at different sections along a single web path is sometimes desired. Typically tension isolation is achieve through the use of nip rollers, driven vacuum belts or drive rollers to maintain different tensions on either side of those mechanisms, but can be achieved by any mechanism that achieves the same end. When extremely low tension is desired in one section while higher tensions are desired in other sections, one technique for achieving this is to allow the web to droop by the force of gravity at some point between tension isolation mechanisms and use a sensor, e.g. an ultrasonic distance sensor, to control the degree of the droop by a feedback loop to one of those tension isolation mechanisms. [00310] Web Traction

[00311] Traction is needed to (i) keep idler rollers turning at web speed, (ii) let driven rollers control tension change, and (iii) Let rollers control the path of the web. Traction depends on tension, web-roller friction, wrap angle, air entrainment, nip, and several other factors. A minimum wrap angle is needed to avoid slip (as shown by the band brake equation).

[00312] Micro-Slip Zones

[00313] A web must transition between the tension in an ingoing span to the tension in an outgoing span. It transitions by micro-sliding to the next tension, draw, speed, or strain on an exiting region.

[00314] If an upstream web tension (T2) increases more than a downstream web tension (Tl), as T2/T1 increases, the slip zone angle increases, and micro-slip zones can form. In the traction zone, where web and roller speeds are identical, strains and tension are unchanging. In a slipping zone, a web microslips from the upstream speed, strain and tension to the downstream values. The larger the tension ratio and the slipperier the surfaces, the larger the sliding zone. If the tension ratio is too extreme, an entire wrap can be in a sliding zone.

[00315] There are many tools to increase traction capacity. Increasing texture (surface roughness) works well if the web's surface is also rough. Adding a rubber cover to a steel shell also increases traction capacity but it does so through chemistry rather than topography. Grooving a roller does not increase traction, rather it maintains it in the presence of air/fluid entrainment. Threads can be helpful to counter hydroplaning (air entrainment) and on rough or compliant deformable surfaces. A well established approach is to increase the wrap angle, which is typically very effective.

[00316] One tool to increase traction capacity that is especially useful on driven rollers is the bridle wrap. Here, two rollers wrapped 180 degrees act precisely like a 360 degree wrap as far as traction is concerned, provided that they are geared together with a close speed match. For the bridle wrap, the surface speed match and alignment are both critical.

[00317] Nips

[00318] A nip is the line of intersection and contact between two rolls, where one roll touches another roll, and these two parallel rollers run against each other. In a nip roller apparatus, a drive roller and an idler roller are arranged for conveying an object. Nip uniformity (across-web, down-web, and over time) is key for uniform web processing. Nip load variation is controlled in part by cylinder friction, control valve hysteresis, and pivots and/or slides. These load variations can be measured by open or closed pressure sensing systems. Nip cylinders can be selected which leverage either pneumatic or hydraulic technologies. Nips can also be programmed to automatically vary nip pressure as a function of current diameter. This is typically carried out using a programmable logic circuit (PLC) and a camera. If nip automation is used, the nips must be carefully calibrated.

[00319] A nip increases traction capacity so much that wrap angle effects can be ignored. The lightest nip is usually capable of pulling any reasonable tension ratio. However, nips make web transport machinery extremely intolerant to imperfect rollers (due to variations in diameter, deflection, crown mismatch, cover variations, and nip load bias) and/or webs (due to bagginess, variable thickness) and should only be used if needed. There is no choice for components such as laminating nips and printing decks. Other nips, however, are elective. For example, rather than overusing nips, tensions can be better balanced on both sides of nearby rolls.

[00320] There are many other tools to increase traction capacity in niche situations, including but not limited to vacuum belts, vacuum rollers, tenter frames, pin feeds, and electrostatic management. Too little traction may disable spreaders, guides and drive systems, and/or cause roller scratching, while too much traction may increase the risk of wrinkling in light weight and/or thin gauge webs. The traction window may be especially narrow for thin materials.

[00321] There are several types of nips, including but not limited to those used for transport (e.g. for function such as pull rollers, winding, unwinding) and for web processing (e.g. for functions such as calendaring, coating, corrugating, embossing, laminating, printing, rolling, and the like.

[00322] Nips can be controlled by adjusting (i) the load control by cylinders (e.g. for functions such as calendaring, pressing, rolling, winding, and the like), (ii) position control by mechanical stops (e.g. for functions such as coaters, printers, and the like).

[00323] Sources of nip variation are potentially wide ranging include but are not limited to (i) roller radial runout, (ii) roller diameter variations, (iii) roller shell wall deflection, (iv) cover hardness variations, (v) loading system variations, (vi) roller misalignment, (vi) roller deflection, and/or (viii) roller crown/load mismatch. Cover hardness variations may arise across the web width due to non-uniform manufacturing, and covers may change hardness in a non-uniform manner due to local hardening. Roller misalignment can be due to (unintentional) positional misalignment or to (intentional) load bias. Roller deflection can occur under nip load, causing a bowing away in the center of the web. A crown/load mismatch can cause nonuniform pressure in the center of the roller.

[00324] Approaches to compensating for nip deflection include but are not limited to (i) roller diameter increase, (ii) roller journal length decrease, (iii) crowning, (iv) skewing, (v) journal bending, (vi) thermal profiling, and/or (vii) 'swimming' rollers, and the like.

[00325] Nips can also be used to increase winding tightness, reduce entrained air, and improve roll edge quality. However, the use of nips for winding can also induce defects such as layer slip, air buckles, and air bubble-based wrinkling. To minimize these potential effects, the nip roller should be wrapped.

[00326] Spreaders

[00327] Spreading can be carried out to (i) prevent wrinkles, (ii) remove wrinkles, (iii) increase web width, or (iv) minimize web bagginess. Spreaders are typically found before nips. Spreaders can be used before slitting, for example to flatten the web and to preserve web width tolerances. Spreaders can also be used post-slitting, for example to maintain gaps between rolls on common axis winders (enabling avoidance of interweaving and reducing dishing). Spreaders should visibly flatten the web. They may or may not pull out soft wrinkles, and will likely not pull out hard wrinkles. Spreaders are more often used to prevent wrinkling rather than remove wrinkles.

[00328] Two types of spreading rollers predominate: concave and bowed. Concave rollers are idler rollers whose ends are larger in diameter than the center. Concave rollers are best to mange the transport of thin, low modulus materials in simple processes. Bowed rollers function with a stationary axle bent on an arc of a circle, typically have several bearings separated by spacers, and often employ a polymer cover. Bowed rollers are often used for wrinkle prevention, slit separation, and web widening. If there is too much bowing, a baggy center can form at the center of the web. Hyper-bowing may also be indicated by spreading or wrinkling along the web or web slippage.

[00329] Calendering

[00330] Calendering is the process of running a web between two nipped rollers. Calendering can be used to decrease the thickness of a web material, increase its smoothness, consolidate and/or bond two or more materials together, and laminate two layers together. Calendaring can be controlled by adjusting any of several parameters including but not limited to (i) nip load or gap, (ii) temperature, and/or (iii) crown.

[00331] Slipping, Sliding and Scratching

[00332] Slide/float applications and floating rollers can serve as a substitute for tracking rollers. However, sliding applications may allow scratching of the web as well as add to web tension. Sliding and/or floating allow the web to be stabilized without adding a roller. Roller Scratching is typically caused by slipping, and smooth rollers are more prone to scratching than rough rollers. Other risk factors for roller scratching include light wrap angles, poor bearing condition, and lost traction.

[00333] Web Redirection

[00334] Given two bars, it is possible to redirect the web in any direction without bending. Simple folding for example requires long spans to avoid overstressing edges and wrinkling. A half or double twist will put a C-fold in the web. Another example is an equal path length geometry such as 2: 1 :1. This special geometry allows controlled folding of the web without stretching or buckling edges. This geometry can be established by integrating a set of (air) bars, rollers and nipped rollers. Turnbars can also be used for web direction. However, the alignment of turnbars are just as critical for artifact-free web handling than rollers. Even slight misalignment can result in wrinkles, web breaks and related issues.

[00335] Flotation and Air Handling

[00336] In passive floatation, the moving surfaces of the web pump air into a gap, forming an air layer. The thickness of this air layer can be calculated by the Knox-Sweeney equation. This thickness, typically much less than a hairsbreadth, can cause a significant reduction in traction. The amount of air increases with (i) the speed of roller and of the web, which may or may not be different, (ii) the diameter of the roller (larger diameters result in greater flotation) , and (iii) viscosity (liquid has a viscosity many order greater than air). The amount of air decreases with tension, whose force tends to collapse the air bearing. Web speed influences air entrainment. At a web speed of 100 feet per minute, the air film emerges. At 1000 fpm, this height of the air film often becomes a major challenge for materials that are thin and smooth. Grade changes such as coating and print pattern can each have major effects on air handling challenges over rollers and into wound rolls. Methods of air handling include but are not limited to grooving, roughening of the roller surface, roughening of the web surface, vacuum rollers, and throttle gap elements. The most common air handling method is for the machine builder to groove the roller. Note that the mechanism is not air flowing through the groove, but rather it is air flowing to the groove. Air handling only requires small grooves, however, micro-grooving is difficult to maintain; the peaks wear off and the valleys fill in. Grooving types for rollers include venta-groove, cross-hatch or diamond, chevron, and shallow spiral. Alternatively, roughening the roller by any sufficient means such as shot peening, tungsten carbide spray, sandblasting and the like can work if it has adequate roughness. The web surface also plays a role. Smooth materials such as bare film and even coated paper are much harder to handle and wind at high speeds than printed film or uncoated paper.

[00337] Air Lubrication Bars

[00338] Air lubrication bars may partially lubricate or fully float the web depending on the requirements of the application and the airflow. The pressure to float is small, but the volume is quite high due to the escape path on all four sides. The amount of air lubrication, whether by passive or active means, has an effect on the tendency to wrinkle. Maximum resistance to wrinkling occurs at modest air float height

[00339] Lamination and Curling

[00340] Lamination is the process of bonding two webs between two nipped rollers, in which a solvent or solventless adhesive or hot melt is used to enable bonding. Curling can occur during lamination, either (i) in the machine direction (MD), where the axis of the "tube" is the MD, (ii) in the cross-machine direction (CD), where the axis of the "tube" is in the CD, or (iii) chiral curling, which is an approximately diagonal curling pattern. Curling can also occur with tunnel wrinkles and/or web cracking.

[00341] Curling arises from a mismatach in strains. Curl is in fact determined before the web leaves the nip, at which point the curl is already established by the material properties of each of two plies. Other defects that can occur during lamination include but are not limited to web bagginess, mismatches in thermal properties, mismatches in hygroscopic properties, and/or a mismatch in shrink and/or cure properties for any adhesive used for lamination. Curl can be minimized by either (a) using alternative materials, (b) reducing the tension of the flexible ply, and/or (c) increasing the tension of the stiff ply. Curl can also be minimized by using dual drives on a nip and/or applying heat and/or moisture on one leg. [00342] Web Defects: Wrinkling, Bagginess, Curling, Telescoping, Telegraphing, Core Crush, Buckling, Starring, Blocking, Tin Canning, Dimples, Pimples

[00343] Wrinkling

[00344] Wrinkling is defined as a small furrow, ridge, or crease on a normally smooth surface, caused by crumpling, folding, or shrinking. Wrinkling is also known as a baggy web, buckling, creasing, fold-over, gathering, puckering, and troughing. The influence of rollers is often central to wrinkling, in that (i) rollers can initiate wrinkles, (ii) rollers can turn a trough into a fold-over or crease, and so (iii) more rollers may lead to more wrinkles. Wrinkles can also be classified based on their location within a web. A trough is a wrinkle in a web span coming to a roller; a bulge is a wrinkle crossing a roller; a crease is a wrinkle folded over on a roller.

[00345] Wrinkling can arise when the web is not flat, due to compression which can result in web buckling. Buckling resistance increases with the cube of caliper or thickness of the web material. Buckling compression can occur through a variety of orientations including but not limited to (i) the Machine Direction (CD compression), (ii) as a Diagonal Shear (Mohr's circle compression), (iii) as a transverse wrinkle (laminate, winding), (iv) as a baggy web (MD tension profile variation), (v) in the form of Corrugation (winding nip), or (vi) in the form of a curl (due to for example a laminating strain mismatch).

[00346] MD Wrinkles

[00347] Wrinkles can be oriented in the MD. Such wrinkles may be evenly spaces at a source (appearing as curtains), or may coalesce irregularly at the roller. Causes of MD wrinkling include but are not limited to (i) too high a tension (e.g. for stretchy materials), (ii) tension drop in span (e.g. for stretchy materials), (iii) Temperature increase (e.g. for substrates such as film and/or foil), (iv) moisture increase (for materials such as nylon or paper), (v) slender roller deflection, (vi) excessive roller grooving width, (vii) roller groove or bump, and/or (viii) improper spreading. MS wrinkles can be improved through any of several means including but not limited to modification of web tension, lowering of temperature, increasing roller size, and/or decreasing coat weight.

[00348] Diagonal (Shear) Wrinkles

[00349] Wrinkles can be oriented at a small angle with respect to MD. The angle of the wrinkle can indicated a crooked web path. This can arise from shear stresses where pushing and pulling occurs in opposite directions, generating compression at an angle. Roller misalignment can arise from any of several causes including but not limited to improper tram alignment or in- plane bending. Modification of web tension and adjustment of roller alignment can reduce diagonal wrinkling. Nip pressure and temperature should be uniform to minimize such wrinkling.

[00350] Baggy Web

[00351] Another form of web defect is a baggy web, where irregular lanes or patches of tight and loose web material are seen either cross web or down web or in both directions. There are several classes of baggy webs, including baggy edges, baggy lanes, tight lanes, and/or baggy patches. Causes of baggy webs include but are not limited to (i) variations in web due to differences in thickness (caliper or basis weight), material density, and/or material modulus, (ii) tension variation across the web width (e.g. due to non-uniform residual stresses), (iii) length variation across the web width, (iv) the effects of moisture and/or temperature, (v) nip pressure variations, and (vi) winding over gage bands. Web tension and/or machine alignment both can mask residual stresses.

[00352] Curling

[00353] Web curling, in which the substrate curls or curves with an axis of curvature forming in either the machine direction, in the cross-machine direction, or at an angle, typically occurs due to forces arising from residual stresses originally incurred during prior web manufacturing or converting processes. CD curl on edges can result in wrinkles when the web is running over a roller. Examples or curl causes include lamination, where there can be a strain mismatch at the lamination point, rollset curl, often caused by winding thick materials, and unbalanced web treatments, such as coating on only one side of the web. Web curling can also be caused by moisture or temperature affects, especially in a non-uniform environment. Curling during lamination can often be minimized by better strain matching so that the web materials more closely match the average modulus of the plies. Other approaches to minimizing curl include but are not limited to reducing the tension of the flexible side, raising the tension of the stiff side, and/or adding heat and/or moisture just before the nip.

[00354] Winding-related Defects

[00355] Winding and/or unwinding a web can also result in defects in the web material, including but not limited to blocking, telescoping, telegraphing, loose cores, crepe wrinkles, core crush, and the like. For example, the cores upon which many web materials are wound can suffer from a range of issues including but not limited to deflection, poor geometry, vibration, handling, core shrinkage, loose cores, and/or core crush. Core crush arises from wound-tension, where the winding process was too tight for the wound material. Cores can be redesigned to have a greater core wall thickness or a stronger core (e.g. built with better core materials). Wound roll tightness can be adjusted by changing the web tension, nip, and/or centerwind torque differentia. Low tightness-related web defects include flat spots, telescoping, and Out-of-Round defects. High tightness-related web defects include blocking, core crush, corrugations, gage bands, and tin canning. Improper roll taper can also result in web defects, including but not limited to starring and telescoping.

[00356] Buckles and Stars

[00357] Buckles and stars are also known as wagon wheels and spokes. These forms of web defects are typically seen as wavy layers and/or spokes on the end(s) of a roll. These patterns are typically caused by layers buckling due to MD compression. Pattern formation mechanisms may include but are not limited to poor roll structure (e.g. where the outer diameter is tighter than the inner diameter), collapse over unsupported layers (e.g. due to core inset or core collapse), gage variation (whether intentional or unintentional), rough handling (typically manifest as an asymmetric pattern), and/or air buckles (where wound-in entrained air escapes from the web, typically in a time frame ranging from one hour to one day).

[00358] Other Winding-Related Defects

[00359] There are many other types of web defects, often due to improper or poorly functioning web winding. These defects are wide-ranging in their patterns of formation and include but are not limited to blocking, tin canning, dimples and pimples, telescoping, air buckles, and rough roll edge(s). Blocking occurs when layers stick together too aggressively, either due to adhesion or winding the web too tightly. Tin cans are a defect that appears like a soupd can top - and where the pattern typically forms either during winding or during storage. Tin canning occurs when the web tries to expand in width due to Poission effects and compression(s), but since the web is locked on the roll, the web bulges out instead. Core support shrinkage is another form of tin canning, where the core may buckle on the top compressive side. Material shrinkage can also cause tin canning. Another form of winding related defects are slip dimples and/or pimples, which often start on a contaminate particle and can be self-exciting, building up in size from one roll wrap to the next.

[00360] Slitting [00361] Slitting systems are used to cut or sever the web completely and cleanly, and cut reliably with a long time between servicing events. Slitting is most commonly carried out using a razor, score, shear, or water-jet-based process. Other forms of slitting processes include but are not limited to die cutting, hot wire, laser, perforating, and ultrasonic systems. There are many challenges to cuttability of web materials, including but not limited to abrasive materials (which tend to short blade life), brittle materials (which tend to promote web breaks), bulky materials (thick or low density materials make clean cutting more difficult), and gummy materials (which tend to foul blades). Measurement of slitting typically involves assessment of the fuzziness of a magnified image of the cut, with no hair- like debris or raised edges. Shear slitting typically involves a circular blade against a circular blade. Waterjet slitting typically involves cutting use a high pressure water jet, often but not always at a pressure ranging from 20,000 to 40,000 psi, which through a (for example) 0.004" nozzle, requires about one gal per minute water flow through the nozzle. After slitting, trim removal is often carried out to eliminate cutting debris.

[00362] Static Discharge

[00363] Static discharge is defined as the electrical discharge between the web and another object, both of which are at a different potential. Static discharge can result in substantive damage to a web during processing. Approaches to minimizing static discharge include but are not limited to (i) grounding rollers, (ii) tinsel (which points just off the surface), (iii) ionizing blowers, (iv) static electrical bars (which can be AC, DC, or Nuclear), (v) controlling

environmental humidity, (vi) using conductive coatings on the web, or (vii) providing a discharging wand for operators.

[00364] While the invention has been described and illustrated with reference to certain particular embodiments thereof, those skilled in the art will appreciate that various adaptations, changes, modifications, substitutions, deletions, or additions of procedures and protocols may be made without departing from the spirit and scope of the invention. For example, with any of the above embodiments, although sputtering is described, other deposition processes may also benefit from the use of the above techniques. The tool designs of this invention may also be used for continuous, in-line processing of substrates which may be in the form of a web or in the form of large sheets such as glass sheets which may be fed into the reactor in a continuous manner. Depending on the material being sputtered in the chamber, the gas may be an inert gas such as nitrogen, argon or helium or a reducing gas such as a mixture of hydrogen (e.g. 2-5% mixture) with any inert gas. The material to be sputtered in the chamber may be a group IB, IIIA, and/or VIA material. The system may be used to sputter Cu-In, In-Ga, Cu-Ga, Cu-In-Ga, Cu-In-Ga-S, Cu-In-Ga-Se, other absorber materials, II-VI materials, IB-VI materials, CuZnTe, CuTe, ZnTe, IB-IIB-IVA-VIA absorbers, or other alloys. The system may be used to sputter transparent oxide material such as AZO, ITO, i-AZO, or other transparent electrode material. It may also be used to sputter molybdenum, chromium, vanadium, tungsten, and glass, or compounds such as nitrides (including but not limited to titanium nitride, tantalum nitride, tungsten nitride, vanadium nitride, silicon nitride, or molybdenum nitride), oxynitrides (including but not limited to oxynitrides of Ti, Ta, V, W, Si, or Mo), oxides, and/or carbides. Again, any of these may be deposited on the substrate or on the coated substrate. Some substrates may have different materials on one side than the other. The thickness of the various layers may be varied based on the time spent inside one chamber or time spent in multiple chambers. The same path may use chambers that sputter the same material, deposit two or more different materials (simultaneously, in a reactive process, or sequentially). There may be a series of hot-followed- by-cold processes where sawtooth action where temperature rises during deposition, is cooled, then rises again during the next deposition process (which may be the same or different), and wherein at no point does the temperature exceed a maximum pre-set temperature. It should be understood that the process chambers, unwind chambers, rewind chambers, or other chamber may be under vacuum and that the walls (vertical or horizontal) are sufficiently stiff so as not to deflect substantially from their normal, unstressed condition so that there is not significant change in position of items attached to those walls when the system is in operation. It should be understood that the process chambers, unwind chambers, rewind chambers, or other chamber may be under vacuum and that the walls (vertical or horizontal) are sufficiently stiff so as not to deflect more than 0.5% of their normal, unstressed condition so that there is not significant change in position of items attached to those walls when the system is in operation. Under low to no tension, the substrate during processing will heat up and may deflect out of plane in the various elevated temperature zones and/or process chambers.

[00365] Furthermore, those of skill in the art will recognize that any of the embodiments of the present invention can be applied to almost any type of solar cell material and/or architecture. For example, the absorber layer in solar cell 10 may be an absorber layer comprised of silicon, amorphous silicon, organic oligomers or polymers (for organic solar cells), bi-layers or interpenetrating layers or inorganic and organic materials (for hybrid

organic/inorganic solar cells), dye-sensitized titania nanoparticles in a liquid or gel-based electrolyte (for Graetzel cells in which an optically transparent film comprised of titanium dioxide particles a few nanometers in size is coated with a monolayer of charge transfer dye to sensitize the film for light harvesting), copper-indium-gallium-selenium (for CIGS solar cells), CdSe, CdTe, II-VI material, Cu(In,Ga)(S,Se)₂, Cu(In,Ga,Al)(S,Se,Te)₂, IB-IIB-IVA-VIA absorbers, and/or combinations of the above, where the active materials are present in any of several forms including but not limited to bulk materials, micro-particles, nano-particles, or quantum dots. The CIGS cells may be formed by vacuum or non-vacuum processes. The processes may be one stage, two stage, or multi-stage CIGS processing techniques. Additionally, other possible absorber layers may be based on amorphous silicon (doped or undoped), a nanostructured layer having an inorganic porous semiconductor template with pores filled by an organic semiconductor material (see e.g., US Patent Application Publication US 2005-0121068 Al, which is incorporated herein by reference), a polymer/blend cell architecture, organic dyes, and/or C₆o molecules, and/or other small molecules, micro-crystalline silicon cell architecture, randomly placed nanorods and/or tetrapods of inorganic materials dispersed in an organic matrix, quantum dot-based cells, or combinations of the above. Many of these types of cells can be fabricated on flexible substrates.

[00366] Additionally, concentrations, amounts, and other numerical data may be presented herein in a range format. It is to be understood that such range format is used merely for convenience and brevity and should be interpreted flexibly to include not only the numerical values explicitly recited as the limits of the range, but also to include all the individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly recited. For example, a thickness range of about 1 nm to about 200 nm should be interpreted to include not only the explicitly recited limits of about 1 nm and about 200 nm, but also to include individual sizes such as but not limited to 2 nm, 3 nm, 4 nm, and sub-ranges such as 10 nm to 50 nm, 20 nm to 100 nm, etc....

[00367] The publications discussed or cited herein are provided solely for their disclosure prior to the filing date of the present application. Nothing herein is to be construed as an admission that the present invention is not entitled to antedate such publication by virtue of prior invention. Further, the dates of publication provided may be different from the actual publication dates which may need to be independently confirmed. All publications mentioned herein are incorporated herein by reference to disclose and describe the structures and/or methods in connection with which the publications are cited.

[00368] While the above is a complete description of the preferred embodiment of the present invention, it is possible to use various alternatives, modifications and equivalents. Therefore, the scope of the present invention should be determined not with reference to the above description but should, instead, be determined with reference to the appended claims, along with their full scope of equivalents. Any feature, whether preferred or not, may be combined with any other feature, whether preferred or not. In the claims that follow, the indefinite article "A", or "An" refers to a quantity of one or more of the item following the article, except where expressly stated otherwise. The appended claims are not to be interpreted as including means-plus-function limitations, unless such a limitation is explicitly recited in a given claim using the phrase "means for."

Claims

WHAT IS CLAIMED IS:

1. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

a path defined by the substrate, wherein the path extends through one or more sputtering chambers;

at least one magnetron disposed in each of the one or more sputtering chambers; a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate.

2. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

3. A high throughput, roll-to-roll sputtering system for use with a coated substrate, the system comprising:

at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate.

4. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll.

5. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

generating a signal based on the effective diameter of the feed roll, generating a second signal from an in-line web tension sensor;

processing the web tension signal,

combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal.

6. A winder arrangement comprising: a winding roll arranged to support a moving web; a cutting arrangement arranged upstream of the winding roll in a free running path region of the moving web; wherein at least one initial cutting piece connects a new web start to the new core and thereafter allows the moving web to be wound onto the new core;

a capstan roll downstream from the winding roll along a path of the moving web which serves as a master line speed setter for all other drive rollers along the path of the substrate; a plurality of other drive rollers along the web path wherein all other drives slave to this drive, wherein a unwind spindle, an exit capstan roll, and a product winder spindles along the path are tension drives.

7. An unwinding station for use with a web, the station comprising:

a primary roll carried by a primary carriage frame;

a capstan roll carried by the primary carriage frame;

a load cell positioned along the path of the web;

a diameter sensor spaced apart from the primary roll, wherein tension in the web is continually adjusted based on sensor signals from the load cell and the diameter sensor.

8. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

9. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

a substrate unwind unit for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate;

wherein the substrate unwind unit includes a roller configuration configured to isolate variations of an unwind roll diameter from impacting tension control imparted by a tension control roller in the unwind unit.

10. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

11. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

12. An in-line sputtering system for use with a substrate, the system

comprising:

one or more sputtering chambers for processing the substrate;

a substrate unwinding unit;

a substrate rewinding unit;

a path defined by the substrate between the unwinding unit and the rewinding, wherein the path extends through the sputtering chambers; and

at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections.

13. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising: a path defined by the substrate, wherein the path extends through one or more sputtering chambers;

at least one magnetron disposed in each of the one or more sputtering chambers; a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate;

at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections..

14. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll;

using at least one anti-curling mechanism located in the sputtering chambers and located above the surface of the substrate to prevent substrate curling beyond a predefined limit, the anti-curling mechanisms optionally configured with shaped sputter shields sized to prevent deposition of sputtered material but still allowing appropriate contact with any out-of-plane substrate deflections..

15. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal;

16. The system of claim 1 wherein the mechanism uses hard anodized aluminum with a 4 Ra finish on surface in contact with the substrate.

17. The system of claim 1 wherein tat least one emissivity unit located within the chamber for drawing heat away from the substrate

18. A winder arrangement comprising: a winding roll arranged to support a moving web; a cutting arrangement arranged upstream of the winding roll in a free running path region of the moving web; wherein at least one initial cutting piece connects a new web start to the new core and thereafter allows the moving web to be wound onto the new core;

19. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

at least one magnetron disposed in each of the one or more sputtering chambers; a tension control mechanism for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; and

a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path.

20. A high throughput, roll-to-roll sputtering system for use with a coated substrate, the system comprising:

at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate; and

a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path, wherein the steering mechanism is positioned more than halfway along the path of the substrate through the system to maximize correction of the substrate on to a rewind roller.

21. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

using a steering mechanism comprised of at least one substrate edge detector and one steerable roller with at least one degree of freedom for adjusting the substrate path, wherein the steering mechanism is positioned more than halfway along the path of the substrate through the system to maximize correction of the substrate on to a rewind roller.

22. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

23. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

24. An in-line sputtering system with steering for use with a substrate, the system comprising: a substrate unwinding unit;

a substrate rewinding unit;

one or more sputtering chambers;

a path defined by the substrate between the unwinding unit and the rewinding, wherein the path extends through the sputtering chambers;

at least substrate cleaning unit configured to provide vibratory motion to the substrate after deposition is completed, the vibratory motion being sufficient in deflection to remove loose particles resting on a sputtered surface of the substrate.

25. A high throughput, roll-to-roll sputtering system for use with a coated substrate, the system comprising:

at least one magnetron disposed in each of the one or more sputtering chambers; a substrate transport assembly for providing controlled transport of the coated substrate through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate, the substrate having a width of at least 20 cm and wherein the processing temperature is below that which would damage to a coating on the substrate;

26. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

setting torque of the capstan roller in accordance with the initial roll diameter pf the supply roll and varying a torque setting of the capstan roller in accordance with variations in the diameter of the roll as the web is fed from the roll; using at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

27. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

using at least substrate cleaning unit configured to provide excitation energy to the substrate after deposition is completed, the excitation energy being sufficient in deflection to remove loose particles resting on a processed surface of the substrate.

28. A winder arrangement comprising: a winding roll arranged to support a moving web; a cutting arrangement arranged upstream of the winding roll in a free running path region of the moving web; wherein at least one initial cutting piece connects a new web start to the new core and thereafter allows the moving web to be wound onto the new core;

29. An unwinding station for use with a web, the station comprising:

a primary roll carried by a primary carriage frame;

a capstan roll carried by the primary carriage frame;

a load cell positioned along the path of the web; a diameter sensor spaced apart from the primary roll, wherein tension in the web is continually adjusted based on sensor signals from the load cell and the diameter sensor;

30. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller.

31. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller;

wherein the temperature control chambers includes a roller configuration configured to guide the substrate through a serpentine path before the temperature control roller and after the temperature control roller.

32. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

using a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller..

33. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

combining the processed web tension signal and the diameter signal to form a drive regulating signal and varying the torque in accordance with the drive regulating signal; using a temperature control chamber wherein the path of the substrate creates a wrap angle of at least 180 degrees about a temperature control roller.

34. An unwinding station for use with a web, the station comprising:

a primary roll carried by a primary carriage frame;

a capstan roll carried by the primary carriage frame;

a load cell positioned along the path of the web;

a diameter sensor spaced apart from the primary roll, wherein tension in the web is continually adjusted based on sensor signals from the load cell and the diameter sensor;

35. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

at least one or more in-line diagnostic elements positioned in a zone that allows for inspection of the post-processed substrate.

36. An in-line sputtering system with steering for use with a substrate, the system comprising:

a substrate unwinding unit;

a substrate rewinding unit;

one or more sputtering chambers;

at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of the post-processed substrate.

37. A high throughput, roll-to-roll sputtering system for use with a coated substrate, the system comprising:

38. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

using at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of a moving, post-processed substrate.

39. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

40. A winder arrangement comprising: a winding roll arranged to support a moving web; a cutting arrangement arranged upstream of the winding roll in a free running path region of the moving web; wherein at least one initial cutting piece connects a new web start to the new core and thereafter allows the moving web to be wound onto the new core; a capstan roll downstream from the winding roll along a path of the moving web which serves as a master line speed setter for all other drive rollers along the path of the substrate; a plurality of other drive rollers along the web path wherein all other drives slave to this drive, wherein a unwind spindle, an exit capstan roll, and a product winder spindles along the path are tension drives;

at least one or more in-line diagnostic elements positioned in a process buffer zone that allows for inspection of a moving, post-processed substrate.

41. An unwinding station for use with a web, the station comprising:

a primary roll carried by a primary carriage frame;

a capstan roll carried by the primary carriage frame;

a load cell positioned along the path of the web;

42. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

an unwind chamber wherein substrate path through the chamber is such that a supply roll is positioned closer to a bottom of the chamber floor than a top and immediately accessible when a front loading door is opening.

43. A high throughput, roll-to-roll sputtering system for use with a metal substrate, the system comprising:

a substrate unwind unit for providing controlled transport through the sputter chambers, wherein the substrate is not damaged due to deformation associated with transport of the substrate through the chambers at a predetermined processing temperature and while maintaining a predefined tension in the substrate to prevent undesired curling of the substrate; wherein the substrate unwind unit includes a roller configuration configured t improves the access to the unwind roll and allows for the roll to be removed laterally from the unwind unit and does not require an operator step inside the unwind unit.

44. A method of web tension control in metal web handling equipment of the type having a core support upon which the core of a web feed roll is rotatably mounted, a capstan roller, and a roller engaging the web and movable thereby in accordance with variations in web tension, the method comprising the steps of

determining the initial diameter of the feed roll,

using with side load doors so long as no top side door is required to be opened to remove a supply roll, and wherein the supply roll be located as close to the chamber wall farthest from the processing area to allow for ease of access and/or for temperature monitoring.

45. A method of web tension control in high speed web handling equipment of the type having a core support upon which the core of a web feed roll is mounted, a variable torque driver associated with the core and a sensor for generating a signal representative of variations in web tension, the method comprising the steps of

processing the web tension signal,

46. A winder arrangement comprising: a winding roll arranged to support a moving web; a cutting arrangement arranged upstream of the winding roll in a free running path region of the moving web; wherein at least one initial cutting piece connects a new web start to the new core and thereafter allows the moving web to be wound onto the new core;

a capstan roll downstream from the winding roll along a path of the moving web which serves as a master line speed setter for all other drive rollers along the path of the substrate; a plurality of other drive rollers along the web path wherein all other drives slave to this drive, wherein a unwind spindle, an exit capstan roll, and a product winder spindles along the path are tension drives;

47. An unwinding station for use with a web, the station comprising:

a primary roll carried by a primary carriage frame;

a capstan roll carried by the primary carriage frame;

a load cell positioned along the path of the web;

48. Any of the above claims wherein a capstan roll serves as a master line speed setter for all other drive rollers along the path of the substrate.

49. Any of the above claims further comprising a plurality wherein all other drives slave to this drive.

50. Any of the above claims wherein a unwind spindle, exit capstan roll, and product winder spindles are tension drives.

51. Any of the above claims wherein the chill roll and idler roll drives are torque assist drives following line speed and monitoring torque output.

52. Any of the above claims wherein the cooling device is located outside the sputtering chamber.

53. Any of the above claims wherein the cooling device is located inside the sputtering chamber.

54. Any of the above claims wherein the cooling device comprises of a chilled roller.

55. Any of the above claims wherein the cooling device comprises of a chilled roller with a pliable coating on the roller.

56. Any of the above claims wherein the cooling device comprises of a chilled roller.

57. Any of the above claims wherein the cooling device cools by way of conduction.

58. Any of the above claims further comprising a tensioner positioned to pull the substrate against the cooling device for improved surface contact.

59. Any of the above claims further comprising a tensioner positioned to push the substrate against the cooling device for improved surface contact.

60. Any of the above claims further comprising a plurality of cooling devices positioned along the path of the substrate.

61. Any of the above claims wherein the cooling devices are positioned along the path of the substrate in an arrangement that increases normal force of the substrate against at least one surface of at least one of the cooling devices.

62. Any of the above claims wherein the cooling devices are positioned along the path of the substrate in an arrangement wherein the devices only contact a backside surface of the substrate.

63. Any of the above claims wherein the cooling devices are positioned along the path of the substrate in an arrangement wherein at least one of the devices contacts a backside surface of the substrate and at least one of the devices contacts a frontside surface of the substrate at the same or different location along the path.

64. Any of the above claims further comprising at least a second sputtering chamber arranged to receive the substrate.

65. Any of the above claims wherein the second sputtering chamber includes at least one cooling device positioned along the path of the substrate to come into physical contact with the substrate; and at least one emissivity-based heat sink located within the chamber for drawing heat away from the substrate.

66. Any of the above claims further comprising at least one cooling section between the sputtering chamber and the second sputtering chamber.