CN110484891A - A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it - Google Patents
A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it Download PDFInfo
- Publication number
- CN110484891A CN110484891A CN201910937397.XA CN201910937397A CN110484891A CN 110484891 A CN110484891 A CN 110484891A CN 201910937397 A CN201910937397 A CN 201910937397A CN 110484891 A CN110484891 A CN 110484891A
- Authority
- CN
- China
- Prior art keywords
- chamber
- plate
- technique
- vacuum
- vacuum coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
It further include that support system is blown in spray system and heating the present invention provides a kind of technique for vacuum coating chamber, including chamber lid, cavity wall and bottom of chamber plate；The spray system includes composition access, deflector and shower plate, and diversion trench is arranged in the deflector setting in shower plate top, the deflector, and the composition access is fixed on the left and right both ends of the deflector；It includes heating plate and air blowing plate that support system is blown in the heating, and the heating plate improves the temperature of environment in process cavity, and the air blowing plate holds up film base band to the bottom of film base band blowout inert gas.It further include unreeling chamber, unreeling adapter cavity, winding adapter cavity and winding chamber the present invention also provides a kind of vacuum suspension coating machine, including technique for vacuum coating chamber above-mentioned.Sheet of the present invention uses a kind of vacuum suspension technology, reduces in script technique for vacuum coating chamber to Idler processing method, installation, adjusting accuracy requirement, on the other hand also ensures the stability of film operation and coating process.
Description
Technical field
The invention mainly relates to roll-to-roll vacuum equipment fields, and in particular to a kind of technique for vacuum coating chamber and with its
Vacuum suspension coating machine.
Background technique
In roll-to-roll flexible strip vacuum coating production line, the length of band is up to thousands of rice, due to film layer structure
It is required that production line is up to tens meters.Flexible strip long range processing transmission in, often due to equipment operation it is unstable, or
For person's material itself because external environment changes, there is phenomena such as tension is unstable, wrinkles, is sagging in film.Film substrate operational process
These unstable factors occurred may result in film damage, and coating process is unstable, influence coating process normal operation, and
And influence equipment overall performance.
Existing technique for vacuum coating chamber film base band uses carrying roller mode to support substantially, i.e., people are according in actual use
The specific unfavorable characteristic phenomenon that conveyer belt generates comes adjusting carrier roller orientation, quantity, then observes operating condition, until defeated after adjustment
The normal operation plated film with energy normal boot film is sent, this adjustment mode relies on use experience more, and the adjustment period is long, cost
Greatly, modern production requirement is not met.
Summary of the invention
In order to solve this technical problem, the present invention is achieved by the following technical solutions:
A kind of technique for vacuum coating chamber, including chamber lid, cavity wall and bottom of chamber plate further include that support system is blown in spray system and heating
System；The spray system includes composition access, deflector and shower plate, and the deflector setting is described to lead on shower plate top
Diversion trench is set in flowing plate, and the composition access is fixed on the left and right both ends of the deflector；The heating blows support system and includes
Heating plate and air blowing plate, the heating plate improve the temperature of environment in process cavity, and the air blowing plate is blown to the bottom of film base band
Inert gas holds up film base band out.
Further, the diversion trench includes upper diversion trench, deflector hole and lower diversion trench, the upper diversion trench include along at
The main channel of part access direction setting and the conduit several times being connected with main channel, several described main channels, which are parallel to each other, to be set
It sets, the secondary interlaced setting of conduit, is provided with deflector hole on the secondary conduit, the lower end of the deflector hole, which is communicated with down, leads
Chute.
Further, the shower plate includes the first shower plate and the second shower plate, and second shower plate is fixed on the
One shower plate bottom, first shower plate are disposed with the first spray apertures and the first spray groove from top to bottom；Described second
Shower plate sets gradually the second spray apertures and the second spray groove from top to bottom；The lower diversion trench is connected to the first spray apertures, the
One spray groove is connected to the second spray apertures, and second spray apertures are smaller than first spray apertures and quantity is than the first spray apertures
It is more.
Further, the lower part of the chamber lid is arranged in by the first shower plate bindiny mechanism for first shower plate.
Further, it further includes support column that support system is blown in the heating, and the top of the support column is arranged in the heating plate
Portion, air blowing plate is fixed on hot plate, and the bottom end of the support column is fixed on the bottom of chamber plate.
Further, it further includes reflecting plate that support system is blown in the heating, and the way station of support column is arranged in the reflecting plate
On rank.
Further, it further includes gasket that support system is blown in the heating, and the gasket is fixed on support column bottom and/or support
The top of column.
It further, further include cooling system and pumped vacuum systems, the cooling system is to be covered with chamber lid, cavity wall and bottom of chamber
Cooling water pipe system, the cooling water pipe system setting side and/or outside in the cavity.
The present invention also provides a kind of vacuum suspension coating machines, including above-mentioned technique for vacuum coating chamber, further include unreel chamber,
Unreel adapter cavity, winding adapter cavity and winding chamber；It is described to unreel chamber, unreel adapter cavity, technique for vacuum coating chamber, winding adapter cavity
Successively continuously it is arranged with winding chamber.
It further, further include nitrogen gas curtain, the nitrogen gas curtain is separately positioned on the adapter cavity and described true of unreeling
Between empty coating process chamber, between the technique for vacuum coating chamber and winding adapter cavity.
Further, the technique for vacuum coating chamber setting is multiple, and the adjacent vacuum is arranged in the nitrogen gas curtain
Between coating process chamber.
The invention has the benefit that
Sheet of the present invention use a kind of vacuum suspension technology, reduce in script technique for vacuum coating chamber to Idler processing method,
Installation, adjusting accuracy requirement, on the other hand also ensure the stability of film operation and coating process.Using the vacuum coating work
The vacuum suspension film-coating mechanism of skill chamber can be suitble to continuous, low cost, in real time, flexibly carry out continuity to film substrate
Vacuum technology plated film.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of technique for vacuum coating chamber of the present invention；
Fig. 2 is the upper diversion trench schematic diagram of deflector of the present invention；
Fig. 3 is the upper diversion trench and deflector hole partial schematic diagram of deflector of the present invention；
Fig. 4 is connection schematic diagram between deflector of the present invention, the first shower plate and the second shower plate；
Fig. 5 is the structural schematic diagram of vacuum suspension coating machine of the invention；
Wherein: 1, unreeling chamber；1-1, unreeling shaft；2, adapter cavity is unreeled；2-1, main drive partition is unreeled；3, the first process cavity；
3-1, composition access；3-2, the first shower plate bindiny mechanism；3-3, deflector；3-4, the first shower plate；3-5, the second shower plate；
3-6, support column；3-7, heating plate；3-8, air blowing plate；3-9, heat reflection plate；3-10, gasket, 3-11, upper diversion trench；3-12, it leads
Discharge orifice；3-13, lower diversion trench；3-14, the first spray apertures；3-15, the first spray groove；3-16, the second spray apertures；3-17, second
Spray groove；4, the second process cavity；5, adapter cavity is wound；5-1, the main drive partition of winding；6, chamber is wound；6-1, Scroll；7, nitrogen
Gas curtain；8, guide roller；9, tension-sensing roller；10, floating roller；11, nip rolls；12, film base band.
Specific embodiment
The method realized with reference to the accompanying drawings and detailed description to preferred mechanism of the invention and movement is done into one
The explanation of step.
As shown in Figure 1, a kind of technique for vacuum coating chamber, including chamber lid, cavity wall and bottom of chamber plate, three surround to be formed one it is outstanding
The vacuum technology environment of floating plated film, film base band 12 are penetrated and are pierced by from two end interfaces of cavity wall respectively.
The technique for vacuum coating chamber further includes spray system, heats and blow support system, pumped vacuum systems and cooling system.
Spray system includes composition access 3-1, shower plate bindiny mechanism 3-2, deflector 3-3, the first shower plate 3-4 and
Two shower plate 3-5.
First shower plate 3-4 is arranged in the lower part of chamber lid by shower plate bindiny mechanism 3-2, and deflector 3-3 setting is the
One top shower plate 3-4, the second shower plate 3-5 are fixed on the first bottom shower plate 3-4.
As shown in Figure 2,3, 4, diversion trench is provided in deflector 3-3, diversion trench includes setting gradually to lead from top to bottom
Chute 3-11, deflector hole 3-12 and lower diversion trench 3-13；Upper diversion trench 3-11 includes the main channel along the setting of composition access direction
The conduit several times being connected with main channel, several described main channels are arranged in parallel, and the secondary conduit is interlaced to be set
It sets, deflector hole 3-12 is provided on the secondary conduit, the lower end of the deflector hole 3-12 is communicated with lower diversion trench 3-13.
First shower plate 3-4 sets gradually the first spray apertures 3-14 and the first spray groove 3-15 from top to bottom；Second spray
Plate 3-5 sets gradually the second spray apertures 3-16 and the second spray groove 3-17 from top to bottom；Lower diversion trench 3-13 and the first spray apertures
3-14 connection, the first spray groove 3-15 are connected to the second spray apertures 3-16.
Composition access 3-1 is fixed on the left and right both ends of deflector 3-3, and ingredient access here is equivalent to a cylinder manifold.
Outside technique for vacuum coating chamber after entering ingredient access, process components gas passes through inside ingredient access process components gas
Circular hole channel, the upper diversion trench 3-11 for entering deflector 3-3 is covered with deflector 3-3 gradually, but is unevenly distributed, both sides mostly in
Between it is thin, then by the deflector hole 3-12 and lower diversion trench 3-13 on deflector 3-3, into the first spray of the first shower plate 3-4
The main effect of leaching hole 3-14 and the first spray groove 3-15, the first shower plate 3-4 is exactly that process components gas is allowed to need according to technique
Ask distribution and proportion, but due to when process components are sprayed from hole or slot air-flow be in bell-mouthed circulation shape, the first spray
The hole of hole 3-14 and the first spray groove 3-15 are big, and quantity is few, so the process components sprayed at this time from the first shower plate 3-4 are still
It is unevenly distributed, it is contemplated that the coating process quality requirement of technique for vacuum coating chamber, therefore it is further added by the second shower plate 3-5, to prolong
Long air-flow is allowed to spray in the second spray apertures 3-16 and second in the circulation path of the second spray apertures 3-16 and the second spray groove 3-17
Drenching diffusion inside slot 3-17, uniformly, the hole of the second spray apertures 3-16 and the second spray groove 3-17 are small, and quantity is more, therefore may finally make
Technique composition uniformly sprays in film base band 12 from the jet hole of the second shower plate 3-5.
It includes support column 3-6, heating plate 3-7, air blowing plate 3-8, heat reflection plate 3-9 and gasket 3-10 that support system is blown in heating.
The bottom end of support column 3-6 is fixed on the plate of bottom of chamber, apical support heating plate 3-7, and intermediate step supports heat reflection plate
3-9；Air blowing plate 3-8 is fixed on heating plate 3-7, and gasket 3-10 is individually fixed in the bottom support column 3-6 and/or top, is used for
Air blowing plate 3-8 is adjusted at a distance from film base band 12.
Here the effect of air blowing plate 3-8 is blowout inert gas, on the one hand film base band 12 can be made in plated film area
Domain suspends, avoid it is sagging because of the self weight of film so that plated film is uneven, it is on the other hand heated after inert gas can add
Hot film base band 12；Heating plate 3-7 is used to heat to cavity and air blowing plate 3-8, and the inert gas for allowing air blowing plate 3-8 to produce by boasting can
To heat to film base band 12, film base band 12 and the intracorporal temperature of chamber is made to reach film coating environment temperature requirement；Reflecting plate
Effect be to reflect back the heating plate 3-7 heat radiation dissipated for keeping temperature, avoid radiating after being received by cavity bottom
Fall.
Cooling system includes being covered with chamber lid, cavity wall and the cooling water pipe of bottom of chamber system, and cooling water pipe system can be arranged in
It in cavity, can also be arranged in outside cavity, cooling water takes away the intracorporal waste heat of chamber by the flowing in cooling pipe.
Since process components gas is two kinds of gases, mutual reaction just can be relatively more abundant under certain temperature environment, and the chemistry
The process along with heat absorption is reacted, by the continuous heating of heating plate 3-7, to guarantee that cavity inner temperature reaches technique requirement；
In addition air blowing plate 3-8 blows out inert gas and can also be heated to film base band 12, is conducive to chemical reaction in film base band 12
The generation and combination on surface.It but is more than desired technological temperature precision when heating plate 3-7 is the heat provided in cavity in cavity
When, cooling system is opened at this time, heat extra in cavity is taken away, and is cooling in cavity, can be made at the heat in cavity
In a kind of dynamic equilibrium, to reach technologic temperature accuracy requirement.
Pumped vacuum systems includes pump line, vacuum corner valve, vacuum pump and vacuum meter.Wherein, vacuum corner valve is arranged in the cavity,
And vacuum pump is connected to by pump line, vacuum meter is on cavity for the vacuum degree in test chamber.Work is in process cavity
When state, vacuum pump is in always on state, and the process components gas and heating sprayed with spray system blows the blowout of support system
Inert gas realizes a dynamic equilibrium in process cavity, to maintain the requirement of the vacuum degree environment of process requirements.
The workflow of the process cavity are as follows:
Film base band 12 is advanced with constant speed from one end of process cavity to the other end, the second spray of 12 top of film base band
It drenches plate 3-5 and process components gas, uniform spray plated film in film base band 12,12 lower section of film base band is sprayed with constant speed
Air blowing plate 3-8 blow out the inert gas that was heated by the heaters towards the back side of film base band 12, with Balanced films base band 12
The self weight of body and top the first shower plate 3-4 spray pressure caused by process gas, so that film base band 12 is suspended smooth, to protect
It is uniform to demonstrate,prove 12 surface coating of film base band.
As shown in figure 5, a kind of vacuum suspension coating machine, including technique for vacuum coating chamber, further include unreeling chamber 1, unreeled
Cross chamber 2, winding adapter cavity 5 and winding chamber 6；It is successively continuously configured to unreel chamber 1, unreels adapter cavity 2, technique for vacuum coating chamber,
Wind adapter cavity 5 and winding chamber 6.The present embodiment is set to for technique for vacuum coating chamber is arranged to 2 process cavities
One process cavity 3 and the second process cavity 4, but the number of process cavity require according to the technique of product, can also be designed to 1, or
Person 3 even more.
It is unreeling between adapter cavity 2 and the first process cavity 3, between the first process cavity 3 and the second process cavity 4, the second technique
Nitrogen gas curtain 7 is provided between chamber 4 and winding adapter cavity 5.Entire vacuum suspension coating machine is separated into multiple by nitrogen gas curtain 7
Mutually independent operation interval can prevent two works when the film of the first process cavity 3 and the second process cavity 4 plating heterogeneity
The different materials of skill chamber interfere, and prevent process components gas from entering retractable volume chamber 1 and its adapter cavity, lead to mechanical part
The hidden danger such as stuck can also increase plated film type by repeatedly plating different films, improve into film quality according further to process requirement
Amount.
In addition, the vacuum suspension coating machine, further includes drive system, pumped vacuum systems and control system.
It unreels chamber 1 and is provided with unreeling shaft 1-1 and guide roller 8, winding chamber 6 is provided with Scroll 6-1 and guide roller 8, unreels
Chamber 1 and winding chamber 6 are respectively intended to put film base band and receive film base band, that is, unreel and wind.
It unreels adapter cavity 2 and is provided with and unreel main drive partition 2-1, tension-sensing roller 9, floating roller 10, nip rolls 11 and guide roller
8, it unreels main drive partition 2-1 and is mainly used to then calculate the coil diameter for unreeling and winding respectively to progress technique tension partition is unreeled,
Nip rolls 11 flattens film, detects tension；It winds the setting of adapter cavity 5 and winds main drive partition 5-1, tension-sensing roller 9, floating roller
10 and guide roller 8, keep technique tension and winding tension independent, winding tension can carry out gradient control, be applicable in large winding diameter
Plated film improves production efficiency.
First process cavity 3 is identical with the structure of the second process cavity 4, and effect is all the chamber as plated film, all passes through
Cavity top spray, the scheme that lower part is blown guarantee the stable operation of coating process.Pass through nitrogen curtain between two process cavities,
So that the intracavitary environment of two process cavities is mutually indepedent, it is independent of each other.
The process components gas of two process cavities can use identical component, can also use heterogeneity, can be according to reality
Border production requirement is configured.
Complete machine operational process is: unreeling chamber 1, unreeling shaft 1-1 is unreeled, and unreels adapter cavity 2 by the importing of guide roller 8；Into
Enter to unreel adapter cavity 2, passes sequentially through the tension-sensing roller 9 for unreeling adapter cavity 2, guide roller 8, unreels main drive partition 2-1, guide roller
8, film base band 12 is sequentially sent to the first process cavity 3 by guide roller 8, floating roller 10, tension-sensing roller 9, nip rolls 11, guide roller 8
With the second process cavity 4, after the completion of plated film, into winding adapter cavity 5；Pass through tension-sensing roller 9, winding in winding adapter cavity 5
Main drive partition 5-1, guide roller 8, floating roller 10, tension-sensing roller 9 and guide roller 8, into winding chamber 6；By the guiding for winding chamber
Roller 8 is oriented to Scroll 6-1, finally completes winding by Scroll 6-1.
Finally, it should be noted that these are only the preferred embodiment of the present invention, it is not intended to restrict the invention, although
Referring to embodiment, invention is explained in detail, for those skilled in the art, still can be to aforementioned
Technical solution documented by each embodiment is modified or equivalent replacement of some of the technical features, but it is all
Within the spirit and principles in the present invention, any modification, equivalent replacement, improvement and so on should be included in protection of the invention
Within the scope of.
Claims (11)
1. a kind of technique for vacuum coating chamber, including chamber lid, cavity wall and bottom of chamber plate, which is characterized in that further include spray system and plus
Hot blow support system；The spray system includes composition access, deflector and shower plate, and the deflector is arranged on shower plate
Diversion trench is arranged in the deflector in portion, and the composition access is fixed on the left and right both ends of the deflector；The heating is blown
Support system includes heating plate and air blowing plate, and the heating plate improves the temperature of environment in process cavity, and the air blowing plate is to film base
The bottom blowout inert gas of band holds up film base band.
2. a kind of technique for vacuum coating chamber according to claim 1, which is characterized in that the diversion trench includes upper water conservancy diversion
Slot, deflector hole and lower diversion trench, the upper diversion trench include being connected along the main channel of composition access direction setting and with main channel
Conduit several times, several described main channels are arranged in parallel, the secondary interlaced setting of conduit, on the secondary conduit
It is provided with deflector hole, the lower end of the deflector hole is communicated with lower diversion trench.
3. a kind of technique for vacuum coating chamber according to claim 2, which is characterized in that the shower plate includes the first spray
Plate and the second shower plate, second shower plate are fixed on the first shower plate bottom, and first shower plate is from top to bottom successively
It is provided with the first spray apertures and the first spray groove；Second shower plate sets gradually the second spray apertures and the second spray from top to bottom
Drench slot；The lower diversion trench is connected to the first spray apertures, and the first spray groove is connected to the second spray apertures, the second spray apertures ratio
First spray apertures are small and quantity is more than the first spray apertures.
4. a kind of technique for vacuum coating chamber according to claim 3, which is characterized in that first shower plate passes through first
The lower part of the chamber lid is arranged in shower plate bindiny mechanism.
5. a kind of technique for vacuum coating chamber according to claim 1, which is characterized in that the heating blows support system and further includes
The top of the support column is arranged in support column, the heating plate, and air blowing plate is fixed on hot plate, the bottom end of the support column
It is fixed on the bottom of chamber plate.
6. a kind of technique for vacuum coating chamber according to claim 5, which is characterized in that the heating blows support system and further includes
Reflecting plate, the reflecting plate are arranged in the intermediate step of support column.
7. a kind of technique for vacuum coating chamber according to claim 6, which is characterized in that the heating blows support system and further includes
Gasket, the gasket are fixed on the top of support column bottom and/or support column.
8. a kind of technique for vacuum coating chamber according to claim 1, which is characterized in that further include cooling system and vacuumizing
System, the cooling system are to be covered with chamber lid, cavity wall and the cooling water pipe of bottom of chamber system, and the cooling water pipe system is arranged in chamber
Body inside and or outside.
9. a kind of vacuum suspension coating machine, which is characterized in that including vacuum coating described in any one of claim 1~8
Process cavity further includes unreeling chamber, unreeling adapter cavity, winding adapter cavity and winding chamber；It is described to unreel chamber, unreel adapter cavity, vacuum
Coating process chamber, winding adapter cavity and winding chamber are successively continuously arranged.
10. a kind of vacuum suspension coating machine according to claim 9, which is characterized in that further include nitrogen gas curtain, the nitrogen
Gas gas curtain be separately positioned on it is described unreel between adapter cavity and the technique for vacuum coating chamber, the technique for vacuum coating chamber and receipts
It rolls up between adapter cavity.
11. a kind of vacuum suspension coating machine according to claim 10, which is characterized in that the technique for vacuum coating chamber is set
Set multiple, the nitrogen gas curtain is arranged between the adjacent technique for vacuum coating chamber.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910937397.XA CN110484891A (en) | 2019-09-29 | 2019-09-29 | A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it |
| CN202010400910.4A CN111519161A (en) | 2019-09-29 | 2020-05-13 | Vacuum coating process chamber and vacuum suspension coating machine with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910937397.XA CN110484891A (en) | 2019-09-29 | 2019-09-29 | A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110484891A true CN110484891A (en) | 2019-11-22 |
Family
ID=68544706
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910937397.XA Pending CN110484891A (en) | 2019-09-29 | 2019-09-29 | A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it |
| CN202010400910.4A Pending CN111519161A (en) | 2019-09-29 | 2020-05-13 | Vacuum coating process chamber and vacuum suspension coating machine with same |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010400910.4A Pending CN111519161A (en) | 2019-09-29 | 2020-05-13 | Vacuum coating process chamber and vacuum suspension coating machine with same |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN110484891A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115125524A (en) * | 2022-07-05 | 2022-09-30 | 常州第六元素半导体有限公司 | Sectional type roll-to-roll CVD graphene continuous growth equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116479412A (en) * | 2023-04-24 | 2023-07-25 | 江苏微导纳米科技股份有限公司 | Winding type processing equipment and processing method |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000058294A (en) * | 1998-08-07 | 2000-02-25 | Furontekku:Kk | Plasma treatment device |
| JP2001023907A (en) * | 1999-07-07 | 2001-01-26 | Mitsubishi Heavy Ind Ltd | Film-forming device |
| JP4399206B2 (en) * | 2003-08-06 | 2010-01-13 | 株式会社アルバック | Thin film manufacturing equipment |
| JP4423082B2 (en) * | 2004-03-29 | 2010-03-03 | 京セラ株式会社 | Gas nozzle, manufacturing method thereof, and thin film forming apparatus using the same |
| JP5026373B2 (en) * | 2008-09-04 | 2012-09-12 | シャープ株式会社 | Vapor growth apparatus and vapor growth method |
| JP5150461B2 (en) * | 2008-11-14 | 2013-02-20 | 芝浦メカトロニクス株式会社 | Plasma processing equipment |
| CN101892466B (en) * | 2010-06-25 | 2012-10-31 | 蚌埠玻璃工业设计研究院 | Offline large-area coating film production line |
| CN102230165A (en) * | 2011-06-16 | 2011-11-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spray header structure for chemical vapor deposition epitaxial equipment |
| CN202323022U (en) * | 2011-11-30 | 2012-07-11 | 天威新能源控股有限公司 | Gas distribution system for base plate type coating equipment |
| CN203559124U (en) * | 2013-10-31 | 2014-04-23 | 沈阳拓荆科技有限公司 | Spray structure with criss-cross groove type multi-gas independent channels |
| CN206204412U (en) * | 2016-11-25 | 2017-05-31 | 威海蓝膜光热科技有限公司 | Coating for selective absorption of sunlight spectrum sputters volume to volume coating film production line upwards |
| CN106929819A (en) * | 2017-03-30 | 2017-07-07 | 深圳市捷佳伟创新能源装备股份有限公司 | A kind of MOCVD device reaction cavity |
| CN110172682A (en) * | 2019-04-30 | 2019-08-27 | 中国科学院半导体研究所 | The inlet spray head of vapor deposition apparatus |
| CN212533117U (en) * | 2019-09-29 | 2021-02-12 | 江苏微导纳米科技股份有限公司 | Vacuum coating process chamber and vacuum suspension coating machine with same |
-
2019
- 2019-09-29 CN CN201910937397.XA patent/CN110484891A/en active Pending
-
2020
- 2020-05-13 CN CN202010400910.4A patent/CN111519161A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115125524A (en) * | 2022-07-05 | 2022-09-30 | 常州第六元素半导体有限公司 | Sectional type roll-to-roll CVD graphene continuous growth equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111519161A (en) | 2020-08-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110484891A (en) | A kind of technique for vacuum coating chamber and the vacuum suspension coating machine with it | |
| US9340865B2 (en) | Thin film-manufacturing apparatus,thin film-manufacturing method,and substrate-conveying roller | |
| US4807562A (en) | Reactor for heating semiconductor substrates | |
| CN102994965B (en) | Magnetron sputtering reeling coater for large-area flexible substrate | |
| CN109477203A (en) | Method for being coated with the depositing device and coating flexible base board of flexible base board | |
| CN101629283A (en) | Roll-to-roll plasma device for enhancing chemical vapor deposition | |
| US20120180720A1 (en) | Cvd apparatus | |
| CN205295419U (en) | Amorphous is heat treatment furnace for strip | |
| CN212533117U (en) | Vacuum coating process chamber and vacuum suspension coating machine with same | |
| CN207376113U (en) | A kind of magnetic material filming equipment | |
| CN201158699Y (en) | Coiling film-plating machine | |
| CN206783755U (en) | A kind of vacuum web plasma coating system | |
| TWI453295B (en) | Gas isolation chamber and plasma deposition apparatus thereof | |
| KR101365044B1 (en) | Annealing apparatus for ribbon of photovoltaic module | |
| KR101243878B1 (en) | An apparatus for manufacturing a solar cell | |
| CN203845948U (en) | Device for producing coated glass on float glass production line | |
| CN103951272A (en) | Device for producing coated glass on floating method line | |
| JP3560134B2 (en) | Thin-film semiconductor manufacturing equipment | |
| CN206204412U (en) | Coating for selective absorption of sunlight spectrum sputters volume to volume coating film production line upwards | |
| CN205152317U (en) | Vertical coiling formula strap paper tinsel vacuum ion coating machine | |
| CN205688003U (en) | A kind of volume to volume magnetic control sputtering vacuum coating device | |
| CN206109530U (en) | A gas injection ware unit for inciting somebody to action during process gas supplies evaporimeter source | |
| CN107236938A (en) | A kind of continous way membrane production equipment | |
| CN210596251U (en) | Filament frame structure of hot filament CVD deposition system | |
| CN106048562B (en) | Parallel roll-to-roll vacuum coating system and vacuum coating method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 214028 No.11 Lijiang Road, Xinwu District, Wuxi City, Jiangsu Province Applicant after: Jiangsu micro nano technology Co., Ltd Address before: 214028, No. four, No. 7 Road, Wuxi New District, Jiangsu Applicant before: JIANGSU LEADMICRO GUIDE NANO EQUIPMENT TECHNOLOGY Co.,Ltd. |
|
| CB02 | Change of applicant information | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20191122 |
|
| WD01 | Invention patent application deemed withdrawn after publication |