CN111498429A - 清洁片及带清洁功能的输送构件 - Google Patents

清洁片及带清洁功能的输送构件 Download PDF

Info

Publication number
CN111498429A
CN111498429A CN202010074360.1A CN202010074360A CN111498429A CN 111498429 A CN111498429 A CN 111498429A CN 202010074360 A CN202010074360 A CN 202010074360A CN 111498429 A CN111498429 A CN 111498429A
Authority
CN
China
Prior art keywords
cleaning
layer
cleaning sheet
conveying member
cleaning layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010074360.1A
Other languages
English (en)
Chinese (zh)
Inventor
深道佑一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of CN111498429A publication Critical patent/CN111498429A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143—Wipes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G45/00—Lubricating, cleaning, or clearing devices
    • B65G45/10—Cleaning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/10—Adhesives in the form of films or foils without carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
CN202010074360.1A 2019-01-30 2020-01-22 清洁片及带清洁功能的输送构件 Pending CN111498429A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-014551 2019-01-30
JP2019014551A JP7270397B2 (ja) 2019-01-30 2019-01-30 クリーニングシートおよびクリーニング機能付搬送部材

Publications (1)

Publication Number Publication Date
CN111498429A true CN111498429A (zh) 2020-08-07

Family

ID=71865823

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010074360.1A Pending CN111498429A (zh) 2019-01-30 2020-01-22 清洁片及带清洁功能的输送构件

Country Status (4)

Country Link
JP (1) JP7270397B2 (ja)
KR (1) KR20200094668A (ja)
CN (1) CN111498429A (ja)
TW (1) TW202041288A (ja)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752019A (ja) * 1993-08-10 1995-02-28 Fuji Photo Film Co Ltd 研磨テープを用いた清浄方法
JP2003115521A (ja) * 2001-10-05 2003-04-18 Nitto Denko Corp クリーニングシ―ト、及びこれを用いたクリーニング方法
TW200415720A (en) * 2002-11-25 2004-08-16 Nitto Denko Corp Cleaning sheet and method of cleaning substrate processing equipment
CN1577757A (zh) * 2003-06-26 2005-02-09 日东电工株式会社 清洁部件和清洁方法
CN1589980A (zh) * 2003-04-14 2005-03-09 日东电工株式会社 清洁片、具有清洁功能的承载元件和基片处理设备的清洁方法
CN1778830A (zh) * 2004-10-19 2006-05-31 日东电工株式会社 基片处理设备的清洁基片及其优选的耐热性树脂
US20060141258A1 (en) * 2004-10-19 2006-06-29 Nitto Denko Corporation Cleaning substrate of substrate processing equipment and heat resistant resin preferable therefor
JP2007216092A (ja) * 2006-02-14 2007-08-30 Nitto Denko Corp クリーニング機能付搬送部材および基板処理装置のクリーニング方法
CN102413951A (zh) * 2009-04-30 2012-04-11 日东电工株式会社 清洁片、带清洁功能的搬送构件、基板处理装置的清洁方法及基板处理装置
JP2012193470A (ja) * 2011-03-16 2012-10-11 Teijin Techno Products Ltd 定着装置のクリーニングシート

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10154686A (ja) 1996-11-22 1998-06-09 Toshiba Corp 半導体基板処理装置のクリーニング方法
JPH1187458A (ja) 1997-09-16 1999-03-30 Hitachi Ltd 異物除去機能付き半導体製造装置
JP2005222609A (ja) * 2004-02-05 2005-08-18 Fuji Photo Film Co Ltd クリーニングテープ
JP2006019616A (ja) * 2004-07-05 2006-01-19 Nitto Denko Corp クリーニング機能付き搬送部材および基板処理装置のクリーニング方法
JP2006099923A (ja) * 2004-09-30 2006-04-13 Fuji Photo Film Co Ltd クリーニングテープ
JP2006099920A (ja) * 2004-09-30 2006-04-13 Fuji Photo Film Co Ltd 磁気抵抗効果型ヘッド用クリーニングテープ
JP2006107598A (ja) * 2004-10-04 2006-04-20 Fuji Photo Film Co Ltd クリーニングテープ
JP2007307521A (ja) 2006-05-22 2007-11-29 Nitto Denko Corp クリーニングシート、クリーニング機能付搬送部材、および基板処理装置のクリーニング方法
JP2007311699A (ja) * 2006-05-22 2007-11-29 Nitto Denko Corp クリーニングシートの製造方法、クリーニング機能付搬送部材の製造方法、および基板処理装置のクリーニング方法
JP2010094983A (ja) * 2008-09-16 2010-04-30 Toyobo Co Ltd 積層ポリイミドフィルム
JP2010212489A (ja) * 2009-03-11 2010-09-24 Fujifilm Corp 組成物
JP2011105926A (ja) * 2009-10-23 2011-06-02 Toyobo Co Ltd ポリイミド前駆体及びポリイミド前駆体溶液

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0752019A (ja) * 1993-08-10 1995-02-28 Fuji Photo Film Co Ltd 研磨テープを用いた清浄方法
JP2003115521A (ja) * 2001-10-05 2003-04-18 Nitto Denko Corp クリーニングシ―ト、及びこれを用いたクリーニング方法
TW200415720A (en) * 2002-11-25 2004-08-16 Nitto Denko Corp Cleaning sheet and method of cleaning substrate processing equipment
CN1589980A (zh) * 2003-04-14 2005-03-09 日东电工株式会社 清洁片、具有清洁功能的承载元件和基片处理设备的清洁方法
CN101402091A (zh) * 2003-04-14 2009-04-08 日东电工株式会社 清洁片、具有清洁功能的承载元件和基片处理设备的清洁方法
CN1577757A (zh) * 2003-06-26 2005-02-09 日东电工株式会社 清洁部件和清洁方法
CN1778830A (zh) * 2004-10-19 2006-05-31 日东电工株式会社 基片处理设备的清洁基片及其优选的耐热性树脂
US20060141258A1 (en) * 2004-10-19 2006-06-29 Nitto Denko Corporation Cleaning substrate of substrate processing equipment and heat resistant resin preferable therefor
JP2007216092A (ja) * 2006-02-14 2007-08-30 Nitto Denko Corp クリーニング機能付搬送部材および基板処理装置のクリーニング方法
CN102413951A (zh) * 2009-04-30 2012-04-11 日东电工株式会社 清洁片、带清洁功能的搬送构件、基板处理装置的清洁方法及基板处理装置
JP2012193470A (ja) * 2011-03-16 2012-10-11 Teijin Techno Products Ltd 定着装置のクリーニングシート

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《化工百科全书》编辑部编, 化学工业出版社 *
《化工百科全书》编辑部编: "《化工百科全书 第12卷 木材和林产化学品—前列腺素 mu-gian》", 30 November 1996 *

Also Published As

Publication number Publication date
KR20200094668A (ko) 2020-08-07
JP2020121271A (ja) 2020-08-13
JP7270397B2 (ja) 2023-05-10
TW202041288A (zh) 2020-11-16

Similar Documents

Publication Publication Date Title
JP5167195B2 (ja) クリーニングシート、クリーニング機能付搬送部材、基板処理装置のクリーニング方法、および基板処理装置
TWI358760B (en) Cleaning member and cleaning method
TWI395264B (zh) 清潔片材，具有清潔功能之搬送構件及基板處理設備之清潔方法
CN111498434B (zh) 清洁片及带清洁功能的输送构件
JP7315439B2 (ja) クリーニングシートおよびクリーニング機能付搬送部材
CN111498429A (zh) 清洁片及带清洁功能的输送构件
CN111498430A (zh) 清洁片及带清洁功能的输送构件
CN111495878A (zh) 清洁片及带清洁功能的输送构件
CN111500185A (zh) 清洁片及带清洁功能的输送构件
CN111498431A (zh) 清洁片及带清洁功能的输送构件
TWI843793B (zh) 清潔片及具清潔功能之搬送構件
JP2007103639A (ja) クリーニングシート、クリーニング機能付搬送部材および基板処理装置のクリーニング方法
JP2022169945A (ja) クリーニングシートおよびクリーニング機能付搬送部材
CN116003795A (zh) 改性聚苯并噁唑、改性聚苯并噁唑片材、清洁片材和具有清洁功能的转移构件
JP2006303337A (ja) クリーニング機能付き搬送部材と基板処理装置のクリーニング方法
JP2005329322A (ja) クリーニング機能付き搬送部材の清浄化方法
JP2006222371A (ja) クリーニング機能付き搬送部材と基板処理装置のクリーニング方法
JP2006066578A (ja) クリーニング機能付き搬送部材と基板処理装置のクリーニング方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20200807