CN111485219A - 具有高耐磨性的AlCrSiN/Mo热处理型涂层及其制备工艺 - Google Patents
具有高耐磨性的AlCrSiN/Mo热处理型涂层及其制备工艺 Download PDFInfo
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- CN111485219A CN111485219A CN202010293381.2A CN202010293381A CN111485219A CN 111485219 A CN111485219 A CN 111485219A CN 202010293381 A CN202010293381 A CN 202010293381A CN 111485219 A CN111485219 A CN 111485219A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
沉积压强(Pa) | Al(at.%) | Cr(at.%) | Mo(at.%) | Si(at.%) | N(at.%) |
1.6 | 16.4 | 31.2 | 5.1 | 1.9 | 45.4 |
Claims (7)
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CN202010293381.2A CN111485219B (zh) | 2020-04-15 | 2020-04-15 | 具有高耐磨性的AlCrSiN/Mo热处理型涂层及其制备工艺 |
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CN202010293381.2A CN111485219B (zh) | 2020-04-15 | 2020-04-15 | 具有高耐磨性的AlCrSiN/Mo热处理型涂层及其制备工艺 |
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CN111485219A true CN111485219A (zh) | 2020-08-04 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112609156A (zh) * | 2020-11-20 | 2021-04-06 | 江苏科技大学 | 具有热循环服役能力的宽温域自润滑膜材料及其制备方法 |
CN115505886A (zh) * | 2022-09-23 | 2022-12-23 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 高硬度、高耐磨性的AlCrSiN/AlCrMoSiN纳米多层复合涂层及其制备方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110453190A (zh) * | 2019-09-23 | 2019-11-15 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 一种AlCrSiN/Mo自润滑薄膜的复合磁控溅射制备方法 |
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2020
- 2020-04-15 CN CN202010293381.2A patent/CN111485219B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110453190A (zh) * | 2019-09-23 | 2019-11-15 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 一种AlCrSiN/Mo自润滑薄膜的复合磁控溅射制备方法 |
Non-Patent Citations (2)
Title |
---|
杨瑞成,杨钒编著;边丽萍,李线绒,冯晓春,张江娜参编: "《失效分析与选材》", 31 December 2014 * |
钟星等: ""占空比对脉冲电弧离子镀AlCrSiN涂层热稳定性和抗氧化性的影响"", 《中国表面工程》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112609156A (zh) * | 2020-11-20 | 2021-04-06 | 江苏科技大学 | 具有热循环服役能力的宽温域自润滑膜材料及其制备方法 |
CN112609156B (zh) * | 2020-11-20 | 2023-09-12 | 江苏科技大学 | 具有热循环服役能力的宽温域自润滑膜材料及其制备方法 |
CN115505886A (zh) * | 2022-09-23 | 2022-12-23 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 高硬度、高耐磨性的AlCrSiN/AlCrMoSiN纳米多层复合涂层及其制备方法 |
CN115505886B (zh) * | 2022-09-23 | 2023-10-24 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | 高硬度、高耐磨性的AlCrSiN/AlCrMoSiN纳米多层复合涂层及其制备方法 |
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