CN111483809A - Substrate turnover device - Google Patents
Substrate turnover device Download PDFInfo
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- CN111483809A CN111483809A CN201910952595.3A CN201910952595A CN111483809A CN 111483809 A CN111483809 A CN 111483809A CN 201910952595 A CN201910952595 A CN 201910952595A CN 111483809 A CN111483809 A CN 111483809A
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- side wall
- arm
- face
- substrate
- coupled
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
- H01L21/67787—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks with angular orientation of the workpieces
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
A substrate turnover device according to an embodiment of the present invention may include a rotation member, a main body portion, a first arm, a second arm, a first receiving portion, and a second receiving portion. The rotating member may rotate with reference to the rotation axis. The body portion may be coupled to the rotating member. The first arm is coupled to the main body and is slidable in a cross direction intersecting with an extending direction of the rotation shaft. The second arm is coupled to the main body and is slidable in the intersecting direction. The first receiving portion may include a first coupling portion coupled with the first arm. The second receiving portion may include a second coupling portion coupled with the second arm. A placement space in which a substrate is disposed may be provided between the first receiving portion and the second receiving portion.
Description
Technical Field
The present invention relates to a substrate inverting apparatus with improved stability and reliability.
Background
An Organic light Emitting Display (O L ED: Organic L light Emitting Display) has excellent viewing angle and light-dark ratio as compared with a liquid Crystal Display (L CD: L acquisition Crystal Display) as a self-luminous Display, and can be made lightweight and thin and is advantageous in power consumption because a backlight (backlight) is not required.
In general, an organic light emitting display manufacturing apparatus requires a substrate flipping apparatus for flipping a substrate. If the time consumed in the substrate inverting apparatus increases, the yield and productivity are lowered, and thus it is required to perform the inversion of the substrate quickly, stably, and accurately to the utmost. Conventionally, when a substrate is damaged in a substrate reversing device, a process is interrupted and the substrate is recovered from the substrate reversing device. This causes an increase in the time consumed in the substrate inverting apparatus due to the stop of the process, and thus has a problem of a decrease in the yield and productivity.
Disclosure of Invention
The invention aims to provide a substrate turnover device with improved stability and reliability.
The substrate inverting apparatus according to an embodiment of the present invention may include a rotation member, a body portion, a first arm, a second arm, a first receiving portion, and a second receiving portion. The rotating member may rotate with reference to the rotation axis. The body portion may be coupled to the rotating member. The first arm may be coupled to the main body portion and may slide in a crossing direction crossing an extending direction of the rotation shaft. The second arm is coupled to the main body portion and is slidable in the intersecting direction. The first receiving portion may include a first coupling portion coupled with the first arm. The second receiving portion may include a second coupling portion coupled with the second arm. A placement space in which a substrate is disposed may be provided between the first receiving portion and the second receiving portion.
The first receiving portion may further include a first bottom portion, a side wall portion, and a first supporting portion. The first bottom may include a first face and a second face opposite the first face. The side wall portion may protrude from the first bottom portion. The first support portion may be disposed at the first face at a distance from the side wall portion. The first coupling portion may be disposed at the second face.
The first support portion may be arranged in plurality, the side wall portion may be arranged in plurality, and a height of each of the plurality of first support portions may be higher than a height of each of the plurality of side wall portions.
Each of the plurality of first supporting parts may include an elastic part disposed on the first face and a contact part disposed on the elastic part.
The second receiving portion may further include a second bottom portion, a first side wall portion, a second side wall portion, a third side wall portion, a fixing portion, and a second supporting portion. The second bottom may include a third face and a fourth face opposite to the third face. The first side wall portion may protrude from the second bottom portion. The second sidewall portion may protrude from the second bottom portion and face the first sidewall portion. The third side wall portion may protrude from the second bottom portion and connect the first side wall portion and the second side wall portion. The second bonding portion may be disposed on the fourth face. The fixing portion may be spaced apart from the first to third side wall portions and disposed on the third face. The second support portion may be spaced apart from the first to third side wall portions and disposed on the third face.
The first support part and the second support part may overlap on a plane.
The fixing parts may include a first fixing part, a second fixing part, and a third fixing part. The first fixing portion may be disposed between the second support portion and the first sidewall portion. The second fixing portion may be disposed between the second support portion and the second sidewall portion. The third fixing portion may be disposed between the second supporting portion and the third side wall portion.
A first groove may be defined in the first arm, and the first coupling portion may be coupled to the first groove.
A second groove may be defined in the second arm, and the second coupling portion may be coupled to the second groove.
The rotating member may rotate such that the first groove and the second groove face in opposite directions to a direction of gravity.
The substrate inverting apparatus may further include a chamber. The chamber may accommodate the rotation member, the body portion, the first arm, the second arm, the first accommodation portion, and the second accommodation portion. The substrate may be provided to the placing space through the first opening portion.
The chamber may further define: a second opening portion through which the first housing portion and the second housing portion are inserted and removed; and a third opening portion facing the second opening portion.
The substrate turnover device may further include: and a motion transmission unit coupled to the main body unit and rotating with reference to the rotation axis.
The first arm may include: a first slider that slides in conjunction with the motion transmission unit; and a first coupling arm coupled to the first slider and coupled to the first receiving portion.
The second arm may include: a second slider which slides in conjunction with the motion transmission unit; and a second coupling arm connected to the second slider and coupled to the second receiving portion.
The substrate inverting apparatus according to an embodiment of the present invention may include: the coupling mechanism includes a rotating member, a body portion, a gear portion, a first slider, a first coupling arm, a second slider, a second coupling arm, a first housing portion, and a second housing portion. The rotating member may rotate with reference to the rotation axis. The body portion may be coupled to the rotating member. The gear portion may be coupled to the body portion and may rotate with respect to the rotation axis. The first slider may be coupled to the body portion and may slide in a manner of engaging with the gear in a crossing direction crossing an extending direction of the rotary shaft. The first coupling arm may be connected with the first slider. The second slider may be coupled to the body portion and may slide while meshing with the gear portion in the intersecting direction. The second coupling arm may be connected with the second slider. The first receiving portion may be coupled with the first coupling arm. And may include a second receiving part coupled with the second coupling arm, and the first receiving part and the second receiving part may seal the substrate.
The first receiving portion may include a first bottom portion, a sidewall portion, a first supporting portion, and a first coupling portion. The first bottom may include a first face and a second face opposite the first face. The side wall portion may protrude from the first bottom portion. The first support portion may be disposed at the first face at a distance from the side wall portion. The first coupling portion may be disposed at the second face.
The first coupling arm may define a first groove, and the first coupling portion may be detachably coupled to the first groove.
The second receiving portion may include a second bottom portion, a first side wall portion, a second side wall portion, a third side wall portion, a second combining portion, a fixing portion, and a second supporting portion. The second bottom may include a third face and a fourth face opposite to the third face. The first side wall portion may protrude from the second bottom portion. The second sidewall portion may protrude from the second bottom portion and face the first sidewall portion. The third side wall portion may protrude from the second bottom portion and connect the first side wall portion and the second side wall portion. The second bonding portion may be disposed on the fourth face. The fixing portion may be disposed on the third surface at a distance from the first to third side wall portions. The second support portion may be spaced apart from the first to third side wall portions and disposed on the third face.
The second coupling arm may define a second groove, and the second coupling portion may be detachably coupled to the second groove.
According to the present invention, the first receiving portion and the second receiving portion of the substrate inverting apparatus may be rotated to cover the substrate. When a breakage occurs in the substrate, the broken substrate may be removed from the chamber in a state of being covered by the first and second accommodation portions. The substrate inverting apparatus may receive a new first receiving portion and a new second receiving portion in a state of being previously cleaned. The substrate turnover device may integrally replace the broken substrate with the first and second accommodation parts, and may reduce a time required to replace the broken substrate. Therefore, the substrate inverting apparatus can improve the yield and productivity of the process. As a result, the stability and reliability of the substrate inverting apparatus can be improved.
Drawings
Fig. 1 is a perspective view of a substrate inverting apparatus according to an embodiment of the present invention.
Fig. 2 is a perspective view of a rotating apparatus according to an embodiment of the present invention.
Fig. 3 is a perspective view of a rotating part according to an embodiment of the present invention.
Fig. 4 is a perspective view of a first receiving part according to an embodiment of the present invention.
Fig. 5 is a sectional view taken along a-a' shown in fig. 4.
Fig. 6 is a perspective view of a second receiving part according to an embodiment of the present invention.
Fig. 7 is a flowchart showing the manner in which the substrate inverting apparatus operates.
Fig. 8 is a perspective view showing an operation state of the substrate inverting apparatus.
Fig. 9 is a perspective view showing an operation state of the substrate inverting apparatus.
Fig. 10 is a sectional view taken along B-B' of fig. 9.
Fig. 11 is a perspective view showing an operation state of the substrate inverting apparatus.
Fig. 12 is a perspective view showing an operation state of the substrate inverting apparatus.
Fig. 13a is a perspective view showing an operation state of the substrate inverting apparatus.
Fig. 13b is a perspective view showing an operation state of the substrate inverting apparatus.
Description of the symbols
SID: substrate turning device CB: chamber
RT: rotating part BD: main body part
CA 1: first coupling arm CA 2: second combining arm
S L1 first slide S L2 second slide
ST 1: first accommodating portion ST 2: second accommodating part
Detailed Description
In the present specification, when a certain constituent element (or a region, a layer, a portion, or the like) is referred to as being "on", connected to ", or combined with another constituent element, it means that it may be directly arranged/connected/combined with another constituent element, or a third constituent element may be arranged therebetween.
Like reference numerals refer to like elements. In the drawings, the thickness, ratio, and size of the components are exaggerated for effective explanation of technical contents.
When referring to "and/or," it is meant that more than one combination, as may be defined by the relevant composition, is included in its entirety.
The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one constituent element from another constituent element. For example, a first component may be named a second component, and similarly, a second component may also be named a first component, without departing from the scope of the present invention. Singular references include plural references unless the context clearly dictates otherwise.
Also, terms such as "below", "lower", "upper", and the like are used to explain the correlation between the constituents shown in the drawings. The terms are described as relative terms, based on the directions shown in the drawings.
All terms (including technical and scientific terms) used in the present specification have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs, unless defined differently. Also, terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will be defined expressly herein without being interpreted in an idealized or overly formal sense.
The terms "comprises," "comprising," "includes," or "including," are intended to define the presence of the stated features, integers, steps, operations, elements, components, or groups thereof, and should be understood not to preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof.
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
Fig. 1 is a perspective view of a substrate inverting apparatus according to an embodiment of the present invention, and fig. 2 is a perspective view of a rotating apparatus according to an embodiment of the present invention.
Referring to fig. 1 and 2, the substrate reversing device SID may include a chamber CB and a rotating device MC.
The chamber CB may include: first faces spaced apart and facing in a first direction DR 1; a second face spaced apart to face in a second direction DR2 intersecting the first direction DR 1; and a third face spaced apart to face in a third direction DR3 crossing the first and second directions DR1 and DR 2. Although the chamber CB configured as a hexahedron is shown in the present embodiment, this is merely exemplary, and the chamber CB may include various forms.
In addition, the directions denoted by the first to third directions DR1, DR2, DR3 are used as relative concepts, and may be converted to other directions. Hereinafter, the first to third directions are directions to which the first to third directions DR1, DR2, DR3 are respectively referred, so that the same reference numerals are referred. Also, in the present specification, the expression "viewed from the plane" may be defined as a case of being viewed from the third direction DR3, with a plane defined by the first direction DR1 and the second direction DR2 being defined as a plane. The first direction DR1, the second direction DR2 and the third direction DR3 may be orthogonal to each other.
A first opening GV may be defined in one of the first surfaces. A second opening MP1 may be defined in one of the second surfaces. A third opening portion MP2 may be defined at the other one of the second faces. The chamber CB may house a rotating means MC.
The rotation device MC may include a rotation part MCa (refer to fig. 3), a first accommodation part ST1, and a second accommodation part ST 2. A placing space in which the substrate SUB (refer to fig. 8) is disposed may be provided between the first and second accommodating parts ST1 and ST 2.
Fig. 3 is a perspective view of a rotating part according to an embodiment of the present invention.
Referring to fig. 3, the rotation part MCa may include a rotation part RT, a main body part BD, a first arm AM1, and a second arm AM 2.
The rotation member RT can rotate with reference to the rotation axis RTX. The rotation axis RTX may extend in a first direction DR 1. Rotating component RT may have a shape that extends in first direction DR 1. The rotating member RT may have a cylindrical shape. However, this is only exemplary and in an embodiment of the present invention, the rotating member RT may have various shapes.
The main body BD may extend in a crossing direction crossing an extending direction of the rotation axis RTX. The main body portion BD may be connected to the rotating member RT. For example, the main body portion BD may extend in the third direction DR3 to be connected to the rotating member RT. However, this is merely exemplary, and in an embodiment of the present invention, the main body portion BD may be integrally provided with the rotation member RT to be rotated. The main body BD is rotatable about the rotation axis RTX.
The first arm AM1 may be coupled to the body portion BD. and the first portion AM1 may slide in the crossing direction, for example, the first arm AM1 may slide in the third direction DR3, the first arm AM1 may be coupled to the first accommodating portion ST1 (refer to fig. 2), and the first arm AM1 may include a first slider S L1 and a first coupling arm CA 1.
The first slide S L may extend in the crossing direction, for example, the first slide S L1 may extend in the third direction DR 3. the first slide S L may slide in the crossing direction, for example, the first slide S L1 may slide in the third direction DR 3. the first slide S L1 may include a rack.
The first coupling arm CA1 may be coupled to cross the first slider S L1, the first coupling arm CA1 may extend in the first direction DR1, the first coupling arm CA1 and the first slider S L1 may be orthogonal to each other, a first groove HA1 may be defined at the first coupling arm CA1, the first groove HA1 may be provided in plurality, the first coupling arm CA1 and the first slider S L1 may be provided in a single body type.
The second arm AM2 may be coupled to the body portion BD. and the second arm AM2 may slide in the crossing direction, for example, the second arm AM2 may slide in the third direction DR3, the second arm AM2 may be coupled to the second accommodating portion ST2 (refer to fig. 2), the second arm AM2 may be substantially the same configuration as the first arm AM1, and the second arm AM2 may include a second slider S L2 and a second coupling arm CA 2.
The second slider S L2 may extend in the crossing direction, for example, the second slider S L2 may extend in the third direction DR3, the second slider S L02 may be spaced apart from the first slider S L1 in the second direction DR2, the second slider S L2 may slide in the crossing direction, for example, the second slider S L2 may slide in the third direction DR3, the second slider S L2 and the first slider S L1 may slide symmetrically with respect to the rotation axis RTX, the second slider S L2 may include a rack, however, this is merely exemplary, and in an embodiment of the present invention, the second slider S L2 may include various sliders, for example, the second slider S L2 may include a linear slider.
The second coupling arm CA2 may be coupled to cross the second slider S L2, the second coupling arm CA2 may extend in the first direction DR1, the second coupling arm CA2 and the second slider S L2 may be orthogonal to each other, the second coupling arm CA2 may be spaced apart from the first coupling arm CA1 in the third direction DR3, the second coupling arm CA2 may define a second groove HA 2. the second groove HA2 may be provided in plurality, the second coupling arm CA2 and the second slider S L2 may be provided in a single body.
The rotation part MCa may further include a motion transmission part GR. and a motion transmission part GR may rotate with reference to a rotation axis RTX, the motion transmission part GR may rotate independently of the rotation part RT, the motion transmission part GR may be coupled to the main body part BD., when the motion transmission part GR rotates, the first slider S L1 linked with the motion transmission part GR may move in a first sliding direction parallel to the third direction DR3, the second slider S L2 linked with the motion transmission part GR may move in a second sliding direction which is an opposite direction of the first sliding direction, as the motion transmission part GR rotates, the first coupling arm CA1 and the second coupling arm CA2 may move in the third direction DR3, for example, when the motion transmission part GR rotates, the first coupling arm CA1 coupled with the first slider S L may move in the first sliding direction, the second coupling arm CA2 coupled with the second slider S L may move in the second sliding direction, the second coupling arm CA1 and the second coupling arm CA may move in the second sliding direction, the second coupling arm CA 3638 may include a plurality of coupling arms DR3, and the third coupling arm may move in the second coupling arm DR 3.
Fig. 4 is a perspective view of a first receiving part according to an embodiment of the present invention, and fig. 5 is a sectional view taken along a-a' shown in fig. 4.
Referring to fig. 4 and 5, the first container ST1 may be coupled to the first arm AM1 (refer to fig. 2). The first accommodating part ST1 may include a first bottom BA1, side wall parts SWa, SWb, SWc, SWd, a first support part SP1, and a first coupling part CB 1.
The first bottom BA1 may be defined to be parallel to a plane defined by the first direction DR1 and the second direction DR 2. For example, the first bottom BA1 may have a quadrangular shape parallel to the first and second directions DR1 and DR2, respectively. However, this is merely exemplary, and the first bottom BA1 may have various shapes, and is not limited to any one embodiment. The first bottom BA1 may include a first face BA1-1 and a second face BA1-2 opposite the first face BA 1-1.
The side wall portions SWa, SWb, SWc, SWd may protrude from the first bottom BA1 in a direction opposite to the third direction DR 3. The side wall portions SWa, SWb, SWc, SWd may be disposed at edges of the first bottom BA 1. The side wall portions SWa, SWb, SWc, SWd may include first, second, third, and fourth side wall portions SWa, SWb, SWc, and SWd.
The first sidewall portion SWa may protrude from the first face BA1-1 in a direction parallel to an opposite direction of the third direction DR 3. The first side wall portion SWa may extend in the second direction DR 2. The second side wall portion SWb may extend in the first direction DR 1. The third side wall portion SWc may be disposed to be spaced apart from the first side wall portion SWa in the first direction DR 1. The fourth side wall portion SWd may be disposed to be spaced apart from the second side wall portion SWb in the second direction DR 2.
The first support SP1 may be disposed at the first face BA 1-1. The first support part SP1 may be disposed apart from the sidewall parts SWa, SWb, SWc, SWd. The first support part SP1 can support the substrate SUB (see fig. 8). Although four first support parts SP1 are exemplarily shown in fig. 4, it is not limited thereto and the first support parts SP1 may be provided in various numbers.
Each of the first support parts SP1 may include an elastic part SR and a contact part P L the elastic part SR may be disposed at the first face BA1-1 the elastic part SR may include a spring, however, this is merely exemplary illustrated, and in an embodiment of the present invention, the elastic part SR may include a variety of substances having elasticity the contact part P L may be disposed on the elastic part SR the contact part P L may support the substrate SUB (refer to fig. 8) in contact with the substrate SUB (refer to fig. 8) the contact part P L may be a cylindrical shape protruding in an opposite direction of the third direction DR3 the portion of the contact part P L contacting the substrate SUB (refer to fig. 8) may be spherical, however, this is merely exemplary, and in an embodiment of the present invention, the contact part P L may have a variety of shapes.
The height HT1 of each first support part SP1 may be greater than the height HT2 of each side wall part SWa, SWb, SWc, SWd.
The first coupling portion CB1 may be disposed at the second face BA 1-2. The first coupling portion CB1 can be coupled to the first groove HA1 (see fig. 3) of the first coupling arm CA1 (see fig. 3). The first coupling portion CB1 is detachably coupled to the first groove HA 1.
Fig. 6 is a perspective view of a second receiving part according to an embodiment of the present invention.
Referring to fig. 6, the second container ST2 may be coupled to the second arm AM2 (refer to fig. 2). The second receiving part ST2 may include a second bottom BA2, a first side wall part SW1, a second side wall part SW2, a third side wall part SW3, a fixing part FX2, a second supporting part SP2, and a second coupling part CB 2.
The second bottom BA2 may be defined to be parallel to a plane defined by the first direction DR1 and the second direction DR 2. For example, the second bottom BA2 may have a quadrangular shape parallel to the first and second directions DR1 and DR2, respectively. However, this is merely exemplary, and the second bottom BA2 may have various shapes, and is not limited to any one embodiment. The second bottom BA2 may include a third face BA2-1 and a fourth face BA2-2 opposite the third face BA 2-1.
The first side wall portion SW1 may protrude from the third face BA2-1 in a direction parallel to the third direction DR 3. The first side wall portion SW1 may extend in the first direction DR 1. The second side wall portion SW2 may extend in the second direction DR 2. The third side wall portion SW3 and the first side wall portion SW1 may be arranged spaced apart in the second direction DR 2.
At least one edge of the second bottom BA2 may not be provided with a side wall portion. For example, the side wall portion may not be provided at the area facing the second side wall portion SW 2. The substrate SUB (see fig. 8) can enter and exit the second accommodating portion ST2 through the region.
The second support part SP2 may be disposed at the third face BA2-1, the second support part SP2 may be disposed spaced apart from the first to third side wall parts SW1, SW2, SW3 the second support part SP2 may support the substrate SUB (refer to fig. 8), although fig. 6 exemplarily shows four second support parts SP2, but is not limited thereto, the second support part SP2 may be provided in various numbers, for example, the number of the second support parts SP2 may be the same as the number of the first support parts SP1 (refer to fig. 4), the second support part SP2 may be configured by substantially the same substance as the contact part P L (refer to fig. 5).
The securing portion FX2 may be disposed on the third face BA 2-1. The fixing portion FX2 may be disposed apart from the first to third side wall portions SW1, SW2, SW 3. The fixing portion FX2 can fix the substrate SUB (see fig. 8) to the second housing portion ST2 without movement. The securing portion FX2 may include a first securing portion, a second securing portion, and a third securing portion. The first fixing portion may be disposed between the second supporting portion SP2 and the first side wall portion SW 1. The second fixing portion may be disposed between the second supporting portion SP2 and the second side wall portion SW 2. The third fixing portion may be disposed between the second supporting portion SP2 and the third side wall portion SW 3.
The second bonding portion CB2 may be disposed at the fourth face BA 2-2. The second binding portion CB2 can be bound to the second groove HA2 (see fig. 3) of the second binding arm CA2 (see fig. 3). The second coupling part CB2 is detachably coupled to the second groove HA 2.
Fig. 7 is a flowchart showing a manner in which the substrate reversing device operates, and fig. 8 is a perspective view showing an operating state of the substrate reversing device.
Referring to fig. 7 and 8, the substrate SUB may be disposed on the second receiving part ST2 (T1). The substrate reversing device SID may further include a robot arm (robot arm) RM. The substrate SUB may be arranged on the robot arm RM. The first opening GV may overlap a portion of the second accommodating part ST2 when viewed from the first direction DR 1. The robot arm RM can supply the substrate SUB to the second storage ST2 through the first opening GV. The robot arm RM may dispose the substrate SUB on the second support SP2 (refer to fig. 2). The fixing portion FX2 may be disposed to face a side surface of the substrate SUB so as to fix the substrate SUB without moving. The robot arm RM can move to the outside of the chamber CB (see fig. 1) through the first opening GV.
Fig. 9 is a perspective view showing an operation state of the substrate inverting apparatus, and fig. 10 is a sectional view taken along B-B' of fig. 9.
Referring to fig. 7, 9 and 10, the substrate SUB may be covered by the first and second container parts ST1 and ST2 (T2).
The substrate SUB may be disposed on the second support part SP 2. The fixing portion FX2 may face the side surface of the substrate SUB. The fixing portion FX2 may fix the substrate SUB so that the substrate SUB does not move when rotating. The first support part SP1 may be disposed on the substrate SUB. The elastic portion SR (refer to fig. 5) of each first support part SP1 may be compressed in the third direction DR3 to support the substrate SUB. Each of the first support parts SP1 and each of the second support parts SP2 may overlap in plan.
The third side wall portion SWc (refer to fig. 4) of the first receiving portion ST1 may cover an area of the second receiving portion ST2 where no side wall portion is provided. The first and second accommodating parts ST1 and ST2 may cover the substrate SUB.
The user can check whether the substrate SUB is broken (T3).
When the substrate SUB is broken, the substrate SUB, the first container ST1, and the second container ST2 can be integrally collected through the second opening MP1 (see fig. 13b) or the third opening MP2 (see fig. 13b) (T7). The first and second accommodating parts ST1 and ST2 in which the substrate SUB is broken are collected, and a new first accommodating part ST1 and a new second accommodating part ST2 are disposed to the rotation part MCa (refer to fig. 3) (T8). The robot arm RM (refer to fig. 8) may dispose the substrate SUB onto the second support SP 2. The substrate SUB may be disposed on the second receiving part ST2 (T1). Therefore, the substrate reversing device SID (refer to fig. 1) can be operated again.
According to the present invention, the substrate reversing device SID (refer to fig. 1) may receive the new first container ST1 and the new second container ST2 in a state of being separately cleaned in advance. The substrate reversing device SID (see fig. 1) can replace the broken substrate SUB integrally with the first accommodation unit ST1 and the second accommodation unit ST 2. The time required to replace the broken substrate SUB can be reduced. Accordingly, the substrate reversing device SID (see fig. 1) can improve the throughput and productivity of the process. As a result, the stability and reliability of the substrate inverting apparatus SID (see fig. 1) can be improved.
Fig. 11 is a perspective view showing an operation state of the substrate reversing device, and fig. 12 is a perspective view showing an operation state of the substrate reversing device.
Referring to fig. 7, 11, and 12, when the substrate SUB (see fig. 8) is not broken, the first and second containers ST1 and ST2 may rotate with respect to the rotation axis RTX (T4).
The substrate reversing device SID can rotate about a rotation axis RTX (see fig. 3). The main body BD is rotatable integrally with the rotating member RT. The rotating member RT may rotate in such a manner that the first and second slots HA1 and HA2 face in the opposite direction of the gravity direction. The substrate reversing device SID may prevent the first and second container parts ST1 and ST2 from falling down in the third direction DR3 due to gravity.
When the rotation is completed, the substrate SUB may be turned upside down. If the substrate SUB is not broken, the turned-over substrate SUB may be recovered from the first accommodating part ST1 (T6).
The substrate reversing device SID rotates so that the reversed substrate SUB can be disposed on the first accommodation portion ST 1. The robot arm RM may be disposed between the first accommodating portion ST1 and the turned substrate SUB through the first opening GV. The robot arm RM may be provided to an area formed by a height difference between the first support part SP1 and the sidewall parts SWa, SWb, SWc, SWd (refer to fig. 4). The robot arm RM can lift the substrate SUB turned upside down and move to the outside of the chamber CB (see fig. 1) through the first opening GV.
Fig. 13a is a perspective view showing an operation state of the substrate inverting apparatus. Fig. 13b is a perspective view showing an operation state of the substrate inverting apparatus.
Referring to fig. 7, 13a and 13b, the substrate SUB may be damaged in the process of inverting the substrate SUB by the substrate inverting apparatus SID.
In the case where the substrate SUB is broken before being turned over, the first groove HA1 and the second groove HA2 may be oriented toward the second opening portion MP 1. The first and second container parts ST1 and ST2 may be moved out of the chamber CB through the second opening part MP 1.
In the case where the substrate SUB is broken after being turned over, the first groove HA1 and the second groove HA2 may be oriented toward the third opening portion MP 2. The first and second container parts ST1 and ST2 may be moved out of the chamber CB through the third opening part MP 2.
According to the present invention, the substrate reversing device SID may receive the new first container ST1 and the new second container ST2 in a state of being separately cleaned in advance. The substrate reversing device SID may integrally replace the broken substrate SUB with the first and second container portions ST1 and ST2, and may supply a new first and second container portions ST1 and ST2 into the chamber CB through the second or third opening portion MP1 or MP 2. The time required to replace the broken substrate SUB can be reduced. Therefore, the substrate reversing device SID can improve the throughput and productivity of the process. As a result, the stability and reliability of the substrate reversing device SID can be improved.
Although the present invention has been described with reference to the preferred embodiments, it is to be understood that various modifications and changes can be made to the present invention without departing from the spirit and scope of the present invention as set forth in the appended claims, by those skilled in the relevant art or having ordinary knowledge in the relevant art. Therefore, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification, but should be determined by the scope described in the claims.
Claims (10)
1. A substrate inverting apparatus, comprising:
a rotating member that rotates with reference to the rotating shaft;
a main body connected to the rotating member;
a first arm coupled to the main body and sliding in a cross direction intersecting with an extending direction of the rotation shaft;
a second arm coupled to the body portion and sliding in the intersecting direction;
a first receiving portion including a first coupling portion coupled with the first arm; and
a second receiving part including a second coupling part coupled with the second arm,
wherein a placement space in which a substrate is arranged is provided between the first accommodating portion and the second accommodating portion.
2. The substrate inverting apparatus of claim 1,
the first accommodation portion further includes:
a first bottom including a first face and a second face opposite to the first face;
a side wall portion protruding from the first bottom portion; and
a first support portion disposed on the first face at a distance from the side wall portion,
wherein the first joining portion is arranged at the second face.
3. The substrate inverting apparatus of claim 2,
the first support portion is arranged in plurality, the side wall portion is arranged in plurality,
a height of each of the plurality of first supporting portions is higher than a height of each of the plurality of side wall portions,
each of the plurality of first supporting portions includes an elastic portion disposed on the first face and a contact portion disposed on the elastic portion.
4. The substrate inverting apparatus of claim 2,
the second receiving portion further includes:
a second bottom including a third face and a fourth face facing the third face;
a first side wall portion protruding from the second bottom portion;
a second side wall portion protruding from the second bottom portion and facing the first side wall portion;
a third side wall portion protruding from the second bottom portion and connecting the first side wall portion and the second side wall portion;
a fixing portion spaced apart from the first to third side wall portions and disposed on the third face; and
a second support portion spaced apart from the first to third side wall portions and disposed on the third face,
wherein the second joining portion is arranged on the fourth face.
5. The substrate inverting apparatus of claim 4,
the first support portion and the second support portion overlap on a plane.
6. The substrate inverting apparatus of claim 4,
the fixing portion includes:
a first fixing portion disposed between the second support portion and the first side wall portion;
a second fixing portion arranged between the second support portion and the second side wall portion; and
a third fixing portion disposed between the second support portion and the third side wall portion.
7. The substrate inverting apparatus of claim 1,
a first slot is defined in the first arm,
the first combining part is combined with the first groove,
a second slot is defined in the second arm,
the second coupling portion is coupled to the second groove.
8. The substrate inverting apparatus of claim 1, further comprising:
a chamber that houses the rotating member, the body portion, the first arm, the second arm, the first housing portion, and the second housing portion, and that defines a first opening, a second opening through which the first housing portion and the second housing portion are moved in and out, and a third opening facing the second opening,
the substrate is supplied to the placement space through the first opening portion.
9. The substrate inverting apparatus of claim 1, further comprising:
and a motion transmission unit coupled to the main body unit and rotating with reference to the rotation axis.
10. The substrate inverting apparatus of claim 9,
the first arm includes: a first slider that slides in conjunction with the motion transmission unit; and a first coupling arm connected to the first slider and coupled to the first receiving portion,
the second arm includes: a second slider which slides in conjunction with the motion transmission unit; and a second coupling arm connected to the second slider and coupled to the second receiving portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2019-0010372 | 2019-01-28 | ||
| KR1020190010372A KR20200093721A (en) | 2019-01-28 | 2019-01-28 | Substrate inversion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111483809A true CN111483809A (en) | 2020-08-04 |
| CN111483809B CN111483809B (en) | 2023-08-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910952595.3A Active CN111483809B (en) | 2019-01-28 | 2019-10-09 | Substrate turnover device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20200093721A (en) |
| CN (1) | CN111483809B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20200093721A (en) | 2020-08-06 |
| CN111483809B (en) | 2023-08-18 |
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