WO2011038560A1

WO2011038560A1 - Invert device

Info

Publication number: WO2011038560A1
Application number: PCT/CN2009/076116
Authority: WO
Inventors: 杨明生; 范继良; 刘惠森; 王曼媛; 王勇
Original assignee: 东莞宏威数码机械有限公司
Priority date: 2009-09-30
Filing date: 2009-12-28
Publication date: 2011-04-07
Also published as: CN101692431B; CN101692431A

Abstract

An invert device (100), includes an invert driving part (1), a carrying part (2), a clamping part (4), a control device and a hollow cavity. The claming part (4) is mounted on the carrying part (2). The invert driving part (1) connects the carrying part (2). The control device controls and connects the invert driving part (1). The invert driving part (1) drives the carrying part (2) to invert. The object which will be inverted is held on the carrying part (2) by the clamping part (4). The hollow structure of the cavity forms an invert cavity (300). The carrying part (2) is set in the invert cavity (300). The carrying part (2) is hollow. The hollow structure of the carrying part (2) forms the carrying cavity. The clamping part (4) is set in the carrying cavity. The carrying part (2) has an inlet (202) which connects the carrying cavity. The cavity has an import (309a) which connects the carrying cavity. The inlet (202) and the import (309a) are face to face and have the same height. The invert device (100) has the virtue of simple structure, easiness in debugging, lower pollution to substrate and invert accuracy with 360 degrees.

Description

Turnover device

Technical field

The present invention relates to the flipping of a finished or semi-finished product, and more particularly to a device for inverting a substrate or substrate in a semiconductor device. Background technique

With the development of semiconductor process equipment and processes, more and more occasions need to flip the substrate. Usually, the substrate processing (such as cleaning and polishing) can only process one side of the substrate at a time. There is a need for a flip device for a substrate to flip the substrate.

At present, the flipping of the substrate has become a crucial process in the manufacturing process of semiconductors. Whether the design of the substrate flipping device is reasonable and reliable will directly affect the subsequent processing of the substrate. For example, the positioning accuracy of the flipping device is not high, which may cause the position of the substrate after the flipping to be deviated, thereby affecting the substrate. Machining and positioning accuracy; slower flipping, which leads to a series of problems such as prolonged production cycles.

The more common substrate flipping mechanisms available are as follows:

1. Directly flipping the substrate. The substrate flipping device realizes the substrate flipping by the following steps:

The substrate is placed on the substrate support by a robot, and the substrate support is lifted by a mechanism such as a steam or a motor, and stops when the specified position is reached, and the substrate chuck (the substrate chuck) is placed thereon. Set on the top of the substrate). The substrate support is lowered and the substrate chuck is flipped 180 degrees under the drive of the turning device, after which the substrate support is again raised to the designated position. At the same time, the substrate chuck drops the substrate, and the substrate carry-out portion carries the substrate out.

The above substrate flipping device has the following problems:

First, there are too many processes, which require more time and prolong the production cycle.

The flipping process will result in secondary contamination of the substrate. The rise and fall of the substrate support, the clamping of the substrate chuck, the opening and the turning of the substrate chuck are all carried out in an environment, which causes contamination of the vacuum gas quality during the turning process, thereby affecting the cleanliness of the substrate. The above-described turning process requires the use of three drive systems; the lifting system of the substrate support, the chucking mechanism of the chuck, and the turning mechanism of the chuck. Invisibly increases the number of parts and increases the cost of the system.

2. Directly flipping the substrate cassette. In response to the above problems of contamination, some companies have developed the following substrate turning device.

In order to ensure the quality of the substrate and avoid secondary contamination of the substrate, higher requirements are imposed on the existing substrate flipping device, and more and more flipping work uses standard mechanical interface device (SMIF) technology.

SIMF is a kind of "micro local environment" technology centered on the concept of "isolation technology". The so-called isolation technique is to enclose the substrate in an ultra-clean micro-local environment (micro-local environment, hereinafter referred to as the substrate box), while at the same time reducing the cleanliness requirements of the space outside the micro-local environment. This also achieves higher cleanliness, improved product yield, and saved clean room construction costs and production and operation costs.

A typical substrate flipping device includes the following parts:

The substrate cassette, the substrate handling assembly, the substrate cassette supporting assembly, the substrate cassette holding assembly, and the substrate cassette turning assembly.

The flipping process is a flipping device for flipping the substrate of the loading substrate by using the substrate cassette, and the only difference between the flipping device of the first direct substrate is as follows: The flipping of the substrate cassette achieves the purpose of flipping the substrate, and the other is to flip the substrate directly (no substrate cassette)

Although the substrate reversal by the substrate cassette can maintain a good cleanness of the micro-local environment, the same process has many problems, such as large number of processes, large space occupation, complicated structure, and high overall equipment cost. And when the substrate size is large, the substrate cassette will also increase, and the corresponding flip control process will be quite complicated.

3. Flip the substrate or ^^ cassette directly through the robot. This kind of robot operation has certain difficulty in controlling the rotation angle and speed.

Existing technologies are more or less unsatisfactory. More processes and redundant designs create problems such as vacuum pollution, or large space, inconvenience in installation, operation, and maintenance. In view of the above technical problems, the device provides another inverting device which is simple and compact in structure, convenient in installation and debugging, relatively low in contamination on the substrate, and capable of accurately flipping 360 degrees. Summary of the invention

SUMMARY OF THE INVENTION An object of the present invention is to provide a turning device which is simple and compact in structure, convenient in installation and debugging, relatively low in contamination on a substrate or a substrate, and capable of accurately flipping 360 degrees.

In order to achieve the above object, the technical solution of the present invention is to provide an inverting device including an inversion driving component, a carrier, a clamping member and a control device, the clamping member being mounted on the carrier, the inversion driving a component is coupled to the carrier and electrically coupled to the control device, the control device controls the flip drive component, the flip drive component drives the carrier to flip, and the object to be flipped is held by the clamp Further, the carrier further includes a cavity having a hollow structure, the hollow structure of the cavity forming an inversion cavity, the carrier is received in the inversion cavity, and the carrier has a hollow structure. The hollow structure of the carrier member forms a bearing cavity, the clamping member is installed in the bearing cavity, the carrier member is provided with an inlet communicating with the bearing cavity, and the cavity is opened and the turning cavity Connected imports.

Preferably, the inversion driving component comprises a motor and a transmission component, the transmission component comprises a worm, a worm wheel and a transmission shaft, and one end of the transmission shaft is pivotally penetrated into the cavity and fixedly connected with the carrier. The other end of the transmission shaft is fixedly connected to the worm wheel, the worm wheel is meshed with the worm, the worm is fixedly connected with an output shaft of the motor, and the control device is electrically connected to the motor. The worm wheel can be made of non-ferrous metal with good hardness and wear resistance. The preferred material is tin bronze. The worm is preferably made of steel. The worm is meshed with the worm gear. It has good self-locking property and can ensure smoother and longer transmission. .

Preferably, the cavity comprises a door flange, a door plate and a cavity tube, the cavity tube has a hollow structure, the hollow structure forms the inversion cavity, and the side wall of the cavity tube is provided with a door a flange of the door, the door flange is mounted with a door flange, the door plate is pivotally connected to the cavity tube and seals the door flange, and the inlet is opened at a left end of the cavity tube, The drive shaft is pivotally grounded through the right end of the cavity barrel. Large sidewall flange and door panel structure on the side wall of the cavity tube facilitates installation, debugging and dimensioning of internal parts of the cavity Protection.

Preferably, the left and right ends of the cavity tube are open and form a left opening and a right opening, the left opening is provided with a left flange, and the left flange is sealed with a left cover, the right A right flange is mounted on the opening, and a right cover is mounted on the outer seal of the right flange. The inlet is opened on the left cover, and the drive shaft is pivotally grounded through the right cover. This design optimizes the internal space of the cavity barrel so that the interior of the cavity barrel can be maximally utilized.

Preferably, a sidewall of the carrier is provided with a plurality of airflow holes communicating with the bearing cavity. It is convenient to efficiently process the substrate or substrate fixed in the bearing chamber with the holder.

Preferably, a viewing window is opened on the sidewall of the cavity, and a transparent viewing window is mounted on the viewing window. It is convenient to observe the flipping of the inner carrier of the cavity barrel, and the substrate or substrate held by the holder.

Preferably, a photosensor is also provided that is electrically coupled to the control device, the photosensor being mounted on the cavity and extending into the inversion cavity. The photoelectric sensor can accurately monitor the flipping position of the carrier and the loading and unloading state of the substrate or substrate, and feedback the relevant information for intelligent control.

Preferably, a mounting plate is further disposed, the mounting plate is located outside the cavity and one end is fixedly connected to the cavity, and the other end of the mounting plate is suspended. The installation plate is arranged to facilitate the fixing of the turning device to the frame, so that the work is more stable and safe.

Preferably, the cavity barrel has a cylindrical shape. It not only facilitates the 360 degree flip of the bearing member, but also saves the volume of the entire turning device, and is more convenient for detecting the inside of the cavity barrel.

Preferably, the motor is a private motor. The output of the servo motor is transmitted to the worm wheel through the worm, so that the rotation of the transmission shaft driven by the worm wheel is more stable, and the rotation of the carrier connected to the transmission shaft is more stable and accurate, thereby avoiding unstable rotation. The carrier is vibrated, which in turn affects the flipping of the product substrate or substrate.

Compared with the prior art, since the cavity of the inverting device of the present invention has a hollow structure, the hollow structure of the cavity forms an inversion cavity, and the carrier for inverting the substrate or the substrate is accommodated in the cavity barrel. The noise caused by the flipping of the carrier is greatly reduced to the outside, and the fine particle powder generated by the inverting driving component cannot be entered into the inversion cavity due to the obstruction of the cavity tube, thereby greatly improving the clearance. Cleanliness; the servo motor for power supply and the worm drive for transmitting output power ensure compact and low cost of the overall structure of the turning device; the rotation of the drive shaft can be realized by the meshing of the worm and the worm wheel, which can realize a large The transmission ratio, and the transmission is stable and self-locking, which improves the turning efficiency of the substrate or the substrate. In addition, since the flipping device of the present invention is convenient to install and debug, and can be accurately flipped 360 degrees, it is more suitable for flipping a substrate or a substrate in a semiconductor device. DRAWINGS

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an overall structural view of a reversing device of the present invention.

2 is a schematic view showing the structure of the inverting device of the present invention after the cavity barrel is removed.

3 is a schematic view showing the structure of a cavity barrel of the inverting device of the present invention. detailed description

As shown in FIG. 1, FIG. 2 and FIG. 3, the inverting device 100 of the present invention comprises an inversion driving member 1, a carrier 2, a clamping member 4 and a control device (not shown), and the clamping member 4 is mounted on the same. On the carrier 2, the inversion driving component 1 is connected to the carrier 2 and electrically connected to the control device, the control device controls the inversion driving component 1, and the inverting driving component 1 drives the carrier The flipping device 100 further includes a cavity having a hollow structure, and the hollow structure of the cavity forms an inversion cavity 300, and the inverting object is clamped on the carrier 2 by the clamping member 4, The carrier 2 is received in the inversion cavity 300, the carrier 2 has a hollow structure, the hollow structure of the carrier 2 forms a bearing cavity 200, and the clamping member 4 is mounted on the bearing cavity 200. The carrier 2 is provided with an inlet 202 communicating with the carrying cavity 200, and the cavity is provided with an inlet 309a communicating with the inversion cavity 300. The inlet 202 is opposite to the inlet 309a and is located in the same Height.

Preferably, the inversion driving component 1 includes a motor 14 and a transmission component, the transmission component includes a worm 13 , a worm wheel 12 and a transmission shaft 11 , and one end of the transmission shaft 11 is pivotally penetrated into the cavity and The carrier 2 is fixedly connected, the other end of the transmission shaft 11 is fixedly connected to the worm wheel 12, the worm wheel 12 is meshed with the worm 13 , and the worm 13 is fixedly connected with the output shaft of the motor 14 . The control device is electrically connected to the motor 14. The worm wheel 12 can be used with good hardness and wear resistance. The ferrous metal is made of tin bronze. The worm 13 is preferably made of steel. The worm 13 is meshed with the worm wheel 12 and has good self-locking property to ensure a smoother and longer transmission.

Preferably, the cavity comprises a door flange 304, a door panel 305 and a cavity barrel 301. The cavity barrel 301 has a hollow structure, and the hollow structure forms the inversion cavity 300, and the cavity barrel 301 A door flange is opened on the side wall, and the door flange is mounted with a door flange 304. The door plate 305 is pivotally connected to the cavity tube 301 and seals the door flange 304. The inlet 309a is opened. At the left end of the cavity barrel 301, the drive shaft 11 is pivotally grounded through the right end of the cavity barrel 301. The side wall of the cavity barrel 301 has a larger door flange 304 and a door panel 305 structure for easy installation, commissioning and maintenance of the internal parts of the cavity.

Preferably, the left and right ends of the cavity barrel 301 are open and form a left opening 311 and a right opening 312. The left opening 311 is provided with a left flange 307, and the left flange 307 is sealed with a left outer side. a cover 309, a right flange 308 is mounted on the right opening 312, and a right cover 310 is externally sealed on the right flange 308. The inlet 309a is opened on the left cover 309, the drive shaft The 11 is pivoted through the right cover 310. This design optimizes the interior space of the cavity barrel 301 so that the interior of the cavity barrel 301 can be maximized.

Preferably, a plurality of airflow holes 201 communicating with the carrying cavity 200 are defined in the side wall of the carrier 2. It is convenient to efficiently process the substrate or substrate fixed in the carrying chamber 200 with the holding member 4.

Preferably, the side wall of the cavity is provided with an observation window, and the observation window is provided with a transparent observation window 302. It is convenient to observe the inversion of the inner carrier 2 of the cavity barrel 301, and the substrate or substrate held by the holding member 4.

Preferably, a photosensor (not shown) electrically connected to the control device is further included, and the photosensor is mounted on the cavity and extends into the inversion cavity 300. Through the photoelectric sensor, the flipping position of the carrier 2 and the loading and unloading state of the substrate or the substrate can be accurately monitored, and relevant information is fed back to realize intelligent control.

Preferably, the mounting plate 306 is further disposed outside the cavity, and one end is fixedly connected to the cavity, and the other end of the mounting plate 306 is suspended. The installation plate 306 is arranged to facilitate the fixing of the turning device 100 to the frame, so that the work is more stable and safe. Preferably, the cavity barrel 301 has a cylindrical shape. Not only the 360 degree inversion of the carrier 2 is facilitated, but also the volume of the entire inverting device 100 is saved, and the inside of the cavity barrel 301 is more conveniently detected.

Preferably, the motor 14 is a private motor 14. The output of the servo motor 14 is transmitted to the worm wheel 12 through the worm 13 so that the rotation of the transmission shaft 11 driven by the worm wheel 12 is more stable, and the rotation of the carrier 2 connected to the transmission shaft 11 is also more stable and precise. The vibration of the carrier 2 caused by the unstable rotation is avoided, thereby affecting the flipping of the product substrate or the substrate.

The working principle of the inverting device 100 of the present invention is described in detail with reference to FIG. 1, FIG. 2 and FIG. 3. In operation, the control device is activated, and the control device outputs the command to an external device (not shown), The external device (which may be a robot) feeds the substrate or substrate into the interior of the carrier 2 through the inlet 309a on the left cover 309 and the inlet 202 on the carrier 2, and is held by the holder 4. During the loading of the substrate or substrate into the carrier 2, the photosensor of the circular flange 303 provided on the cavity barrel 301 monitors the substrate loading state or the position of the substrate cassette and monitors The incoming signal is fed back to the control device, and the control device processes the input signal of the photoelectric sensor and outputs an instruction to control the start and stop of the private service motor 14. After the self-service motor 14 is started, the worm 13 is driven to rotate synchronously, and the worm 13 meshes with the worm wheel 12, which in turn drives the worm wheel 12 to rotate. The transmission shaft 11 penetrating the worm wheel 12 and fixedly connected thereto also rotates, thereby driving the transmission shaft. 11 The fixed carrier 2 rotates, indirectly flipping the substrate or substrate inside the carrier 2. After the substrate or substrate and carrier 2 are flipped over to the designated position, the photosensor again feeds back the monitored signal to the control device, which controls the private motor 14 to stop and control the external device to carry the substrate or substrate. This completes the flipping action of the entire substrate or substrate.

The cavity of the inverting device 100 of the present invention has a hollow structure, the hollow structure of the cavity forms an inversion cavity 300, and the carrier 2 for inverting the substrate or the substrate is received in the cavity barrel 301, so that the carrier 2 The noise emitted by the flipping is greatly reduced to the outside, and at the same time, the fine particle powder generated by the inversion driving component 1 cannot enter the inversion cavity 300 due to the obstruction of the cavity barrel 301, thereby greatly improving the cleanliness. The servo motor 14 for supplying power and the worm drive for transmitting the output power ensure compactness and low cost of the overall structure of the turning device 100; the rotation of the transmission shaft 11 is realized by the meshing of the worm 13 and the worm wheel 12, which can be realized Large transmission ratio, smooth transmission and self-locking, improving the flipping efficiency of the substrate or substrate. In addition, since the turning device 100 of the present invention is convenient to install and debug, 360 can be performed. The degree of accurate flipping is therefore more suitable for flipping the substrate or substrate in a semiconductor device. It can be understood that the inverting device 100 reverses the substrate or the substrate, and the substrate carrying the substrate can also be flipped through the carrier 2 (the substrate is described in the background art), or It is another product and is not limited to its scope of application. Moreover, the unique cavity design of the inverting device 100 is not limited to its existing functions and applications. For example, a coating device or a cleaning device or a transmission device may be externally connected to the door flange 304. For example, the cavity can also be applied to other devices, and even other fields. Furthermore, the inverting device 100 drives a worm 13 and a worm wheel 12 for one-stage transmission through a motor 14, and can also add a set of gears for secondary transmission.

The specific structure and working principle of the servo motor 14, the worm drive, the photoelectric sensor and the control device involved in the inverting device 100 of the present invention are well known to those skilled in the art and will not be described in detail herein.

The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and the equivalent changes made by the scope of the present invention remain within the scope of the present invention.

Claims

Rights request

What is claimed is: 1. A turning device comprising: a turning drive member, a carrier member, a clamping member and a control device, wherein the clamping member is mounted on the carrier member, the inversion driving member is coupled to the carrier member and The control device is electrically connected, the control device controls the inversion driving component, the inverting driving component drives the carrier to reverse, and the object to be inverted is clamped on the carrier by the clamping member, wherein: Further comprising a cavity having a hollow structure, the hollow structure of the cavity forming an inversion cavity, the carrier is received in the inversion cavity, the carrier is in a hollow structure, and the hollow structure of the carrier forms a bearing a cavity, the clamping member is mounted in the bearing cavity, the carrier is provided with an inlet communicating with the bearing cavity, and the cavity is provided with an inlet communicating with the inversion cavity, the inlet and the inlet The imports are relatively and at the same height.

2. The inverting device according to claim 1, wherein: the inversion driving component comprises a motor and a transmission component, the transmission component comprises a worm, a worm wheel and a transmission shaft, and one end of the transmission shaft is pivotally penetrated into the ground. The cavity is fixedly connected to the carrier, the other end of the transmission shaft is fixedly connected to the worm wheel, the worm wheel is meshed with the worm, and the worm is fixedly connected with the output shaft of the motor, A control device is electrically coupled to the motor.

3. The inverting device according to claim 2, wherein: the cavity comprises a door flange, a door panel and a cavity barrel, the cavity barrel has a hollow structure, and the hollow structure forms the inversion cavity, a door flange is opened on a side wall of the cavity tube, a door flange is mounted on the door flange, the door plate is pivotally connected to the cavity tube and seals the door flange, the inlet Opening at a left end of the cavity barrel, the transmission shaft is pivotally grounded through a right end of the cavity barrel.

4. The inverting device according to claim 3, wherein: the left and right ends of the cavity tube are open and form a left opening and a right opening, and the left opening is provided with a left flange, the left method The outer seal is installed with a left cover, the right flange is provided with a right flange, and the right flange is sealed with a right cover. The inlet is opened on the left cover, and the transmission shaft is pivotally grounded through the right cover.

The inverting device according to claim 1, wherein the side wall of the carrier member is provided with an air flow hole communicating with the carrier chamber.

6. The inverting device according to claim 1, wherein: a viewing window is opened on a side wall of the cavity, and a transparent viewing window is mounted on the observation window.

7. The inverting device of claim 1 further comprising: a photosensor electrically coupled to said control device, said photosensor being mounted to said cavity and extending into said inverting cavity.

8. The inverting device according to claim 1, further comprising: a mounting plate, the mounting plate being located outside the cavity and having one end fixedly connected to the cavity, and the other end of the mounting plate being suspended.

9. The turning device of claim 1 wherein: said cavity barrel is cylindrical.

10. The turning device according to claim 1, wherein: the motor is a private motor.