JP2001237294A - Robot for specific environment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a simple structure for a robot for a vacuum environment, further reduce an inner capacity of a chamber when a workpiece is conveyed between the vacuum chamber and the air, and shorten an arrival time to a vacuum state. SOLUTION: A slide mechanism 3 having a handling part 4 for mounting a workpiece W is driven by drive means by a magnetic bond separating a bulkhead 21 for isolating a vacuum environmental space from a drive system mounting space. Thus, irrespective of a slide system, it is possible to sufficiently ensure an isolation of a drive system from the vacuum space, and a conveying system is constructed with a simpler structure than a scalar type robot.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot for transferring a work such as a semiconductor wafer, a mask, and a glass substrate for a liquid crystal display, and more particularly, to a transfer of a work in a vacuum chamber or between a vacuum chamber and the atmosphere. The present invention relates to a specific environment robot used in a load lock chamber.

[0002]

2. Description of the Related Art Conventionally, for a robot used in a specific environment such as a vacuum, a SCARA type robot is generally used because a seal for shielding a drive shaft from the atmosphere is simple. It was a target.

[0003]

However, the SCARA type robot has a drawback that it is expensive due to its complicated structure. In addition, since the arms are stacked in a stepwise manner, a large space for operating the arms is required.
For this reason, in a load lock chamber for transferring a work between a vacuum chamber and the atmosphere, the volume of the chamber becomes large, and after receiving the work in the atmosphere, a step of shutting off the chamber and the atmosphere to make the inside of the chamber a high vacuum. At
It took time to change from an atmospheric pressure state to a vacuum state, and this time was a factor in reducing the work processing capability of the entire apparatus. In addition, in the case of using a double arm system having two transfer mechanisms for performing the work exchange operation, there is a disadvantage in that more operation space for the arm is required.

An object of the present invention is to provide a robot for a specific environment such as a vacuum which has a simpler structure than the conventional one and has a reduced cost. When used in a load lock chamber for transferring a workpiece, the internal volume of the load lock chamber can be reduced, the time to reach a vacuum state can be shortened, and the processing capacity of the entire apparatus can be increased. The purpose is to provide a robot for a specific environment.

[0005]

According to the present invention, there is provided a robot for a specific environment in which a specific environment space for transporting a work is separated from a mounting space for a transfer drive system. A sliding mechanism slidably provided with a handling unit for transporting a work in a specific environment space, a partition wall for separating the specific environment space from the mounting space for the transfer drive system, and Drive means for slidingly driving the partition wall by coupling.

In the above construction, the slide mechanism having the handling portion is slid and driven by the magnetic coupling of the driving means with the partition wall therebetween, so that the specific environment space for transferring the work and the transfer drive system are mounted in the slide system. It is possible to sufficiently isolate the space.
The slide mechanism uses a linear guide or the like,
It is possible to obtain high rigidity, and therefore, it is possible to construct a transfer system with a simpler structure than a SCARA type robot.

According to a second aspect of the present invention, the driving means by magnetic coupling of the robot for a specific environment according to the first aspect is constituted by a linear motor. In this configuration, since a linear motor having both a magnetic coupling function and a driving function is used, the structures of the coupling section and the driving section can be simplified.

According to a third aspect of the present invention, the driving means by magnetic coupling of the robot for a specific environment according to the first or second aspect is connected in a non-contact manner by a magnetic coupling. . In this configuration, it is possible to transmit the driving force of the air cylinder, the belt, the ball screw, and the like to the handling unit, so that various driving methods can be selected. Further, since the driving means is a non-contact coupling, no dust is generated and the inside of the vacuum chamber can be kept clean.

According to a fourth aspect of the present invention, an elevating mechanism is provided so that the slide mechanism can be raised and lowered. In this configuration, since the slide movement and the elevating operation are possible, it is possible to convey a work placed on a fixed table or the like.

According to a fifth aspect of the present invention, a turning mechanism is provided to make the slide mechanism turnable. In this configuration, it is possible to carry the work between a plurality of units arranged radially.

According to a sixth aspect of the present invention, a plurality of slide mechanisms are provided, and a plurality of handling units for mounting a work are arranged vertically. In this configuration, since a plurality of slide mechanisms and a plurality of handling units are provided, the operation of exchanging the work by the robot can be performed, and the time required for conveyance can be reduced.

According to a seventh aspect of the present invention, in the robot in which the slide mechanism is configured to be rotatable, the drive means is configured to convert the rotational motion of the motor into a linear motion, and the rotational force of the motor is controlled by the slide mechanism. Is transmitted through a transmission shaft provided through a turning shaft that supports the rotating shaft. In this configuration, since no motor is placed on the slide mechanism, the size of the slide mechanism can be reduced, and the volume of a specific environmental space, for example, a vacuum chamber can be reduced.

According to an eighth aspect of the present invention, a specific environment space of the robot for a specific environment according to any one of the first to seventh aspects is provided.
For example, a window made of a transparent body is provided at a position sandwiching the work in a member separating the vacuum chamber and the mounting space for the transfer drive system, and an optical sensor for detecting the work through the window is provided. In this configuration, since the work placed on the transfer chuck can be detected by the optical sensor, it is possible to reliably transfer the work.

In the robot for a specific environment as described above, the slide mechanism base on which the slide mechanism is mounted may be formed in a cylindrical shape concentric with the turning axis of the turning mechanism. As described above, by configuring the slide mechanism base in a cylindrical shape, when used in the load lock chamber, if the side wall of the chamber is provided adjacent to the cylindrical slide mechanism base, the volume in the chamber can be increased. Can be reduced, so that it is possible to shorten the time required to change the pressure from the atmospheric pressure to the vacuum state.

The slide mechanism base may be formed in a cylindrical shape in which only an area necessary for movement of the slide mechanism is cut out. As a result, the internal volume of the load lock chamber can be reduced, and the time required to change from atmospheric pressure to a vacuum can be reduced.

The optical sensor may be of a transmission type and the optical axis may be provided in a direction parallel to the slide direction of the work. Thus, even when a plurality of transport chucks are provided in the up-down direction, it is possible to detect each work independently by providing the same number of sensors as the number of transport chuck stages.

Further, the optical axis of the optical sensor may be provided at right angles to the sliding direction of the work. Thus, even when a plurality of transport chucks are provided above and below, if a sensor is provided at a position where the slide mechanism is operated and the work can block the optical axis of the sensor one by one, a plurality of transport chucks can be provided by one sensor. It is possible to detect the work.

In the robot for a specific environment as described above, a window made of a transparent body is provided at a position facing the work in a member separating the vacuum chamber and the driving mechanism mounting space, and the work is detected through this window. May be provided with a reflection type optical sensor. In this configuration, since the work can be detected from one direction, only one detection window needs to be provided for one work.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A vacuum environment robot according to an embodiment of the present invention will be described below with reference to the drawings.
1 to 4 show a robot for a vacuum environment according to the first embodiment. In these drawings, a robot mechanism 1 includes a first slide mechanism 3 having a handling section 4, 4 ′ for mounting and transporting a work W in a vacuum environment space, and a second slide mechanism 3 having a second slide mechanism 4 ′.
The slide mechanism 3 'is provided. Each of these slide mechanisms 3, 3 'is provided with a linear guide 3 on the slide mechanism base 2.
It is slidably provided by 0. Here, the work W is intended for a wafer, and the handling unit 4
4 'is provided with a dent slightly larger than the outer dimension of the wafer, and is configured to drop the wafer into this dent and hold and transport the outer edge.

Each of the handling sections 4 and 4 'is arranged vertically, and the support arms 5 of the upper handling section 4 are provided.
Is formed in a U-shape avoiding the transfer area of the work W so as not to hinder the movement of the lower handling section 4 '. The first slide mechanism 3 and the second slide mechanism 3 '
Since the mechanical configuration is the same, the following description will be given mainly for the first slide mechanism 3. These mechanisms are provided in pairs and have corresponding numbers.

The slide mechanism 3 is driven by magnetic coupling across a partition 21 that separates a vacuum environment space in which the workpiece W is transported from the mounting space for the transport drive system of the slide mechanism 3, and is externally moved. The magnet coupling 6 includes the armature 61 and the internal moving element 62. The external moving element 61 is fixed to a lower part of the support arm 5, and the support arm 5 is fixed on the linear block 30 a of the linear guide 30. The internal moving element 62 is provided inside the slide mechanism base 2 with a partition wall 21 made of a non-magnetic material above the slide mechanism base 2 interposed therebetween. Each of the outer mover 61 and the inner mover 62 is provided with several permanent magnets therein, and is configured to operate integrally with the partition 21 separated by magnetic coupling (drive means). The internal mover 62 is slidably provided by a linear guide 7 provided inside the slide mechanism base 2, and is configured to move on the same line as the external mover 61.

The drive system of the slide mechanism 3 according to the present embodiment is a belt drive system. Slide mechanism base 2
Pulleys 8 are provided at both ends in the sliding direction of the upper wall, and a belt 81 is stretched between the pulleys 8. A part of the belt 81 is connected to the internal moving member 62 by a connecting member 63. A drive pulley 82 provided near the center of the slide mechanism base 2 is meshed with the belt 81, and idlers 83 are provided on both sides of the drive pulley 82 to ensure this meshing and adjust the tension of the belt 81. I have. The drive pulley 82 is provided at a distal end of a transmission shaft 84 provided through a base support shaft 9 (turn shaft) supporting the slide mechanism base 2, and is provided below the base support shaft 9. It is configured to be driven by the slide motor 85 provided.

The slide mechanism base 2 is fixed on a base support shaft 9 composed of a spline shaft. The base support shaft 9 is vertically movably supported by a spline nut 92, and is configured to be driven up and down by an elevating mechanism 11 provided below the spline nut support cylinder 100. The elevating mechanism 11 has a ball screw 111a.
And a motor 112, and a ball screw nut 111b
Is fixed at the lower end of the spline nut support cylinder 100, and a support member 115 supported by a support post 114 is provided.
c is fixed, and a pulley 116 is
Is provided. An elevating motor 112 for driving the ball screw 111a is provided on the support member 115, and a pulley 117 is provided on an output shaft of the elevating motor 112. The pulley 117 and a pulley A belt 118 is stretched between them.

On the other hand, the upper end of the spline nut support cylinder 100 is rotatably supported by a cross roller bearing 101, and a pulley 102 is provided on a side wall of the support cylinder. The outer ring of the cross roller bearing 101 is fixed to the robot support tube 103. A ring-shaped permanent magnet 121 and a pole piece 122 are provided on the inner wall of the robot support tube 103. A magnetic shaft 1 made of a magnetic material is provided on the outer peripheral surface of the turning shaft 9 opposed thereto.
23 is provided so as to rotate integrally with the spline nut support cylinder 100, and a minute gap 124 is formed between the pole piece 122 and the magnetic body shaft 123. A magnetic fluid is injected into this gap 124, and the magnetic fluid sealing mechanism 12 is Forming
The inside of the vacuum chamber V and the outside of the atmospheric pressure are rotatably shut off. In order to improve the pressure resistance, the pole piece 1
12 and four permanent magnets 121 are provided. The upper part of the magnetic body shaft 123 and the lower surface of the slide mechanism base 2 are connected by an extendable bellows 104 so that the slide mechanism base 2 can be moved up and down while shutting off the vacuum chamber V and the outside.

A disk-shaped flange 103 for fixing to the bottom wall of the vacuum chamber is provided above the robot support cylinder 103.
a is provided. A turning mechanism 13 including a turning motor 130 for turning the robot mechanism 1 is provided on a lower surface of the flange 103a, and a pulley 131 is provided on an output shaft of the turning motor 130. A reducer 132 is provided on the lower surface of the flange 103a, and pulleys 133, 13 are provided on an input shaft and an output shaft of the reducer 132, respectively.
4 are provided. A belt 1 is provided between the pulley 131 and the pulley 133 and between the pulley 134 and the pulley 102.
35 and 136 are stretched, and the driving force of the swing motor 130 is transmitted through the speed reducer 132 to the spline nut support cylinder 100.
The pulley 102 provided on the side wall is driven to make the robot mechanism 1 pivotable.

Next, the operation of the robot configured as described above will be described. To operate the slide mechanism 3, when a slide motor 85 provided below the base support shaft 9 is driven, the rotational force is applied to a lower end of a transmission shaft 84 from a pulley 86 provided on an output shaft via a belt 87. The power is transmitted to the provided pulley 88, and the drive pulley 82 provided at the upper end of the transmission shaft 84 is rotated via the transmission shaft 84. The rotational force of the driving pulley 82 moves the belt 81 stretched on the pulley 8 provided on the upper wall of the slide mechanism base 2. Thereby, the inner movable member 62 to which a part of the belt 81 is fixed
Is slid. When the internal moving element 62 is moved, the external moving element 61 coupled by magnetic force also moves as a unit, so that the handling unit 4 provided in the slide mechanism 3 is slid. The stop position in the sliding direction is controlled by a rotary encoder provided on the opposite side of the output shaft of the slide motor 85.

As described above, the slide mechanism 3 includes the partition 21
To drive from the inside of the slide mechanism base 2 separated by
The drive system mounting space can be easily and reliably shielded from the specific environment space. Further, the structure can be simplified as compared with the SCARA type robot.

As for the operation of the elevating mechanism 11, when the elevating motor 112 is driven, the ball screw 111a rotates via the belt 118 stretched between the pulley 117 and the pulley 116, and the ball fixed to the elevating plate 113 The screw nut 111b is moved to move the lifting plate 113 up and down. Thus, the base support shaft 9 fixed to the lift plate 113
The slide mechanism base 2 provided above the base support shaft 9 is also moved up and down. The vertical stop position is configured to be controlled by a rotary encoder incorporated on the opposite side of the output shaft of the elevating motor 112.

By providing the elevating mechanism 11 in this manner, the work W placed on a table or a pin which cannot move up and down
Is received, the handling unit 4 is provided at the bottom of the work W.
Is inserted, and the elevating mechanism 11 is raised in that state, and the handling unit 4 is placed on the handling unit 4 with the work W placed thereon.
Is contracted, the workpiece W can be received. In order to place the work W on a table or a pin, the operation reverse to the above may be performed.

Next, regarding the operation of the turning mechanism 13, when the turning motor 130 is driven, the driving force is transmitted from the pulley 131 provided on the output shaft to the speed reducer 132 via the belt 135 and the pulley 133. Then, the rotating force of the turning motor is reduced to a speed suitable for rotating the robot mechanism 1, and the spline nut supporting cylinder 10 is rotated via a pulley 134 provided on an output shaft of the speed reducer 132.
The pulley 102 provided on the 0 side wall is driven to rotate the robot mechanism 1. Note that the stop position in the turning direction is configured to be controlled by a rotary encoder built in the opposite side of the output shaft of the turning motor 130.

By providing the turning mechanism 13 as described above, it becomes possible to transfer the processing units arranged radially with respect to the robot.

In this embodiment, each mechanism is driven by a motor. However, the driving means is not limited to a motor, and an air cylinder or the like may be used. Also, regarding the driving force transmission method, it is not limited to the belt,
A gear may be used, or a direct drive system in which a motor is provided directly on the rotating shaft may be used.

In driving the slide mechanism 3,
A magnet coupling type rodless cylinder having both a drive mechanism and a magnet coupling mechanism may be used.

FIG. 5 shows a vacuum environment robot according to a second embodiment of the present invention. In the present embodiment, the slide mechanism 3
Is formed in a cylindrical shape concentric with the turning axis of the turning mechanism. Other configurations are first
This is the same as the embodiment.

By forming the slide mechanism base 2 in a cylindrical shape as described above, when the slide mechanism base 2 is used in the load lock chamber, the side wall of the chamber V is formed in the cylindrical slide mechanism base 2.
, It is possible to reduce the volume in the chamber V, and it is possible to shorten the time required to change from atmospheric pressure to a vacuum state.

In this embodiment, the slide mechanism base 2 is integrally formed on a cylinder. However, a separate member for forming the cylinder on the non-cylindrical slide mechanism base 2 is provided. And may be formed in a cylindrical shape.

FIGS. 6 to 8 show a robot for a vacuum environment according to a third embodiment of the present invention. In the present embodiment, the drive means for driving the slide mechanism across the partition wall by magnetic coupling is constituted by the linear motor 14.
Also, a slide mechanism base 2 on which the slide mechanism 3 is mounted.
Is formed in a cylindrical shape in which only an area necessary for moving the slide mechanism is cut out.

The partition member 22 for separating the vacuum chamber and the driving system mounting space is provided with windows 23a and 23b made of a transparent material at positions interposing the work W therebetween, and through the windows 23a and 23b. A pair of transmission optical sensors 15a (light emitting side), 15b for detecting the work W
(Light receiving side) is provided. Transmission type optical sensor 15a,
The optical axis 15c of 15b is provided in a direction parallel to the sliding direction of the work W. Here, the transmission type optical sensors 15a ', 15a'
b 'is provided.

Further, the linear motor 14 for operating the slide mechanism 3 is composed of a moving element 141 composed of a permanent magnet and a coil rail 142 composed of a coil. The mover 141 is fixed to the lower part of the support arm 5, and the coil rail 142 is provided inside the slide mechanism base 2 via the partition wall 21 made of a non-magnetic material on the upper part of the slide mechanism base 2. 142a is led out from a hole provided at the center of the base support shaft 9.

In order to operate the slide mechanism 3 by the linear motor 14, the direction of the current flowing through the coil of the coil rail 142 is switched in accordance with the magnetic pole of the permanent magnet provided on the mover 141. To move the slide mechanism 3. The stop position in the sliding direction may be controlled by detecting the position of the moving element 141 with a linear sensor.

The transmission type optical sensors 15a, 15b are provided in two systems corresponding to the upper and lower handling units 4, 4 '. When a work is placed on the handling units 4, 4', the transmission type optical sensors 15a, 15b are provided. By blocking the optical axis 15c of
The existence of the work W can be confirmed. Thereby, the presence / absence signal of the work W is transmitted to the controller of the robot, etc., and the presence / absence of the work W at the time of starting the robot, a handling error at the time of operation, and the like are detected. It is possible to prevent the work W and the robot mechanism from being damaged. The configurations and operations of the lifting mechanism 11 and the turning mechanism 13 are the same as those of the first embodiment.

In this embodiment, the driving means for driving the slide mechanism 3 across the partition 21 by magnetic coupling is constituted by the linear motor 14 having both magnetic coupling function and driving function. The connecting part and the driving part can have a simple structure.

The slide mechanism base 2 is formed in a cylindrical shape in which only an area necessary for the movement of the slide mechanism 3 is cut out, and when used in a load lock chamber, the slide mechanism base of the second embodiment is used. It is possible to further reduce the internal volume of the load lock chamber, and it is possible to further shorten the time required to change from the atmospheric pressure to a vacuum state.

Further, since the work W placed on the handling unit 4 can be detected by the transmission type optical sensors 15a and 15b, the work W can be transported reliably. Further, since the optical axes 15c of the transmission optical sensors 15a and 15b are provided in a direction parallel to the sliding direction of the workpiece W, the plurality of handling units 4 are vertically arranged.
, Each work W can be detected independently by providing the same number of sensors as the number of stages of the handling unit 4.

In this embodiment, the slide mechanism base 2 is provided with transparent windows 23a and 23b, and the slide mechanism base 2 is provided with transmission type optical sensors 15a and 15b. Therefore, the transmission optical sensors 15a and 15b are not exposed to a vacuum environment, and there is no need to use a special vacuum environment sensor.

In the present embodiment, the light receiving side and the light emitting side are determined by the transmission type optical sensors 15a and 15b for the first slide mechanism 3 and the transmission type optical sensors 15a 'and 15b' for the second slide mechanism 3 '. By providing the reverse, the light of the sensors does not interfere with each other and malfunction does not occur.

FIGS. 9 and 10 show a robot for a vacuum environment according to a fourth embodiment of the present invention. In this embodiment, the third
In the vacuum environment robot of the embodiment, the optical axes 15c of the transmission optical sensors 15a and 15b are provided in a direction perpendicular to the sliding direction of the workpiece W, and the other configurations are the same as those of the third embodiment. Is the same.

The transmission type optical sensor 15a in the present embodiment
The (light emission side) is provided inside a sensor chamber 24 provided in a shape protruding from the upper wall of the slide mechanism base 2 and protruding to the upper surface of the work. A window 23 made of a transparent material is provided on the optical axis 15c of the transmission optical sensor 15a on the lower surface of the sensor chamber 24.
a window 23 made of a transparent material is also provided on the upper surface 22 of the slide mechanism base 2 facing the transmission type optical sensor 15a.
The transmission type optical sensor 15b (light receiving side) is provided inside the slide mechanism base 2.

In the present embodiment, even when a plurality of handling units 4 are provided above and below, the slide mechanism 3 is operated to operate the optical axis 15c of the transmissive optical sensor one by one of the work W.
Transmission type optical sensors 15a, 15
b, a set of transmission optical sensors 15a, 15a,
A plurality of works W can be detected at 15b.

FIGS. 11 and 12 show a vacuum environment robot according to a fifth embodiment of the present invention. In this embodiment, a magnetic levitation mechanism is provided on the moving element 141 of the linear motor 14,
The linear motor 14 has a function of a linear guide. Further, the sensor for detecting the work W is the same as the fourth embodiment, and the optical axis 15c of the transmission type optical sensor 15a, 15b is used.
Are provided in a direction perpendicular to the sliding direction of the workpiece W, but the sensor chamber 24 is formed in a disk shape so as to eliminate local protrusion of the slide mechanism base 2. Other configurations are the same as those of the fourth embodiment.

In the present embodiment, the movable member 141 is provided so as to surround the coil rail 142, and the movable member 141 has permanent magnets incorporated in the vertical portion 141a and the horizontal portion 141b. A suction or repulsion force is generated according to the polarity of the moving member 141 and the partition 21.
A coil is provided so that the movable element 141 can be slid while keeping a certain space in the area.

As described above, in the present embodiment, there is no generation of dust because the slide mechanism in the vacuum chamber has no mechanical contact portion. Further, since the linear motor 14 and the linear guide are formed integrally, the slide mechanism 3 can have a simple configuration. Further, by forming the sensor chamber 24 in a disk shape and eliminating local protrusion of the slide mechanism base 2, it is possible to reduce the internal volume of the vacuum chamber.

The vacuum environment robot according to the present invention is not limited to the above-described various embodiments, and various embodiments can be constructed by combining the claims. Further, the work is not limited to the wafer, but can be applied to various substrates such as a mask and a glass substrate for liquid crystal by changing the shape and size of the handling unit. Further, since the transfer drive system mounting space and the work transfer space can be shielded, the device can be used in a special atmosphere such as water or a flammable atmosphere in addition to the vacuum environment.

[0054]

As described above, according to the first aspect of the present invention, the drive system can be sufficiently isolated from a specific environment such as a vacuum while being a slide type robot. Since the slide mechanism is held by a linear guide or the like, high rigidity can be obtained. Therefore, the transfer system can be constructed with a simpler structure than the SCARA type robot.

According to the second aspect of the present invention, in addition to the above effects, the structures of the coupling portion and the driving portion can be further simplified.

According to the third aspect of the present invention,
Since the driving force of the air cylinder, belt, ball screw, etc. can be transmitted to the slide mechanism, various driving methods can be selected, and the vacuum chamber is kept clean without generating dust. It is possible.

According to the fourth aspect of the present invention, further,
Since the slide and the elevating operation are possible, it is possible to transport a work placed on a fixed table or the like.

According to the invention described in claim 5, further,
Transport between a plurality of units arranged radially is possible.

According to the sixth aspect of the present invention, further,
Since a plurality of slide mechanisms are provided, the operation of exchanging the work by the robot becomes possible, and the time required for the conveyance can be reduced.

According to the invention of claim 7, further,
Since no motor is provided in the slide mechanism, the size of the slide mechanism can be reduced, and the volume of the vacuum chamber can be reduced.

According to the eighth aspect of the present invention, further,
Since the work placed on the transfer chuck can be detected by the optical sensor, it is possible to reliably transfer the work.

[Brief description of the drawings]

FIG. 1 is a perspective view of a robot for a vacuum environment according to a first embodiment of the present invention.

FIG. 2 is a plan view of the robot.

FIG. 3 is a sectional view taken along line AA of FIG. 2;

FIG. 4 is a perspective view showing the internal structure of the slide mechanism base according to the first embodiment.

FIG. 5 is a perspective view of a robot for a vacuum environment according to a second embodiment of the present invention.

FIG. 6 is a perspective view of a robot for a vacuum environment according to a third embodiment of the present invention.

FIG. 7 is a perspective view showing the internal structure of a slide mechanism base according to a third embodiment.

FIG. 8 is a sectional view taken along line BB of FIG. 6;

FIG. 9 is a perspective view of a robot for a vacuum environment according to a fourth embodiment of the present invention.

FIG. 10 is a sectional view taken along the line CC of FIG. 9;

FIG. 11 is a perspective view of a robot for a vacuum environment according to a fifth embodiment of the present invention.

FIG. 12 is a sectional view taken along line DD of FIG. 11;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Robot mechanism 2 Slide mechanism base 3 Slide mechanism 4 Handling part 6 Magnet coupling 9 Base support shaft (rotating axis) 11 Elevating mechanism 13 Rotating mechanism 14 Linear motor 15a Transmission optical sensor (light emitting side) 15b Transmission light Sensor (light receiving side) 15c Optical axis 21 Partition wall 23a Window 23b Window 30 Linear guide 84 Transmission axis W Work

Claims (8)

[Claims] 1. A specific environment robot in which a specific environment space for transporting a workpiece and a transport drive system mounting space are separated from each other, wherein a sliding unit provided with a handling unit for transporting the workpiece in the specific environment space. A free sliding mechanism; a partition separating the specific environment space and the transport drive system mounting space; and a driving unit for slidingly driving the slide mechanism across the partition by magnetic coupling. Environment specific robot. 2. The robot according to claim 1, wherein the driving means is a linear motor. 3. The robot for a specific environment according to claim 1, wherein the driving unit is configured to be connected in a non-contact manner by a magnetic coupling. 4. The robot for a specific environment according to claim 1, further comprising an elevating mechanism capable of elevating the slide mechanism. 5. The robot for a specific environment according to claim 1, further comprising a turning mechanism for turning the slide mechanism. 6. The robot for a specific environment according to claim 1, wherein a plurality of the slide mechanisms are provided, and a plurality of the handling units are arranged in a vertical direction. 7. The slide mechanism is configured to be rotatable, and the driving means has a mechanism for converting a rotational motion of a motor into a linear motion, and a rotational force of the motor penetrates a rotary shaft supporting the slide mechanism. 6. The transmission is performed via a transmission shaft provided as a part.
Or the robot for a specific environment according to claim 6. 8. A member that separates the specific environment space from the mounting space of the transport drive system is provided with a window made of a transparent body with the work interposed therebetween, and an optical sensor for detecting the work is provided through the window. The robot for a specific environment according to any one of claims 1 to 7, wherein: