CN201126814Y - Manipulator turning device for semiconductor private facilities - Google Patents
Manipulator turning device for semiconductor private facilities Download PDFInfo
- Publication number
- CN201126814Y CN201126814Y CNU2007202017642U CN200720201764U CN201126814Y CN 201126814 Y CN201126814 Y CN 201126814Y CN U2007202017642 U CNU2007202017642 U CN U2007202017642U CN 200720201764 U CN200720201764 U CN 200720201764U CN 201126814 Y CN201126814 Y CN 201126814Y
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- Prior art keywords
- turnover
- shaft
- trip shaft
- upset
- bearing
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- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
A robot arm turnover device for semiconductor special equipment, a vacuum absorbing joint is mounted on surface of a turnover output base; a close chamber communicated to the vacuum absorbing joint is mounted inside the turnover output base; a rotary joint connected to a absorbing drive air source is connected to the rear end of a turnover shaft fixedly; the turnover shaft is provided with a air duct along the axle center; the front end of the air duct is communicated with the close chamber of the turnover output base, while the rear end of the air duct is communicated with the air duct of the rotary joint; the turnover shaft is a multi-diameter with the diameter becoming less forward to back; the step at most significant end of the turnover shaft is sleeved with a bearing; the turnover shaft and the shaft base are fixed by a bearing gland and a bolt; the shaft base is fixed to a base; a step located behind the bearing on the turnover shaft is sleeved with a bearing lock net; a turnover gear is fixed to the step behind the bearing lock net on the turnover shaft; the turnover gear is in transmission connected with a drive gear; the drive gear is connected with an output shaft of a turnover cylinder. The robot arm turnover device has small volume, light weight, simple structure, long useful life and low cost.
Description
(1) technical field
The utility model relates to a kind of absorption extracting and turning device, the particularly a kind of semiconductor manufacturing equipment absorption extracting and turning device of manipulator.
(2) background technology
Along with improving constantly of semiconductor manufacturing equipment automatization level, the employing more and more widely of the manipulator of various 26S Proteasome Structure and Functions quilt.Because the requirement of wafer process technology usually needs wafer is realized that absorption is grasped and upset.Usually design is at the arm end in the joint of manipulator upset, and this just requires, and the wrist arthritic volume is little, weight wants light.And existing absorption grasps and turning device does not often reach requirement, its upset driving mechanism and vacuum suction mechanism be coaxial to be connected, there is the not good defective of stability, reliability when rotated in sealed chamber, and have complex structure, volume greatly, Heavy Weight, the life-span is short, cost is higher defective.
(3) utility model content
The purpose of this utility model provides a kind of turnover device of mechanical arm that is used for semiconductor manufacturing equipment, solve traditional turning device rotatablely move be regardless of, make that complex structure, volume are big with vacuum passage, Heavy Weight, the life-span is short, cost is higher technical problem.
For achieving the above object, the utility model adopts following technical scheme:
This turnover device of mechanical arm that is used for semiconductor manufacturing equipment, the upset output seat 1 that comprises the trip shaft 2 that links to each other with upset cylinder 11 and be fixed on the trip shaft front end is characterized in that:
Have vacuum suction interface 14 on the surface of upset output seat 1, in the upset output seat 1 airtight chamber 15 that is communicated with vacuum suction interface 14 is arranged.
The fixedly connected swivel joint 8 that is connected with absorption driving source of the gas in the rear end of trip shaft 2, trip shaft 2 has air flue 16 along the axle center, and the front end of air flue 16 is communicated with the airtight chamber 15 of upset output seat, and the rear end of air flue 16 is communicated with the air flue of swivel joint 8.
Trip shaft 2 be one from the gradually little multidiameter of A-P diameter, be with bearing 6 on trip shaft 2 step foremost, by bearing gland 4 and screw 13 trip shaft 2 and axle bed 3 are fixed together, axle bed 3 is fixed on the pedestal 12, on trip shaft 2, be positioned at bearing 6 backs one step and be with bearing locking nut 7, be fixed with turning gear 5 on the step after being positioned at bearing locking nut 7 on the trip shaft 2, turning gear 5 is in transmission connection with the driving gear 10 of side, and driving gear 10 is connected with the output shaft of upset cylinder 11.
Optimized technical scheme: above-mentioned upset output seat 1 is a T shape plate, and is fixing by screw and trip shaft 2.
Above-mentioned upset cylinder 11 is supported on the upset cylinder support 9, and upset cylinder support 9 is fixed on the pedestal 12.
Compared with prior art the utlity model has following characteristics and beneficial effect:
The utility model has adopted upset cylinder 11 that the upset drive source is provided, made full use of the upset cylinder stable, reliable, positioning accuracy is high and characteristics cheaply, adopted gear-driven mode to rotatablely move and vacuum passage is separated, solved the defective of the rotary seal chamber structure existence of traditional turnover device of mechanical arm that is used for semiconductor manufacturing equipment, have that volume is little, in light weight, simple in structure, long service life, advantage with low cost.
The utility model utilizes the airtight chamber and the air flue of swivel joint 8, trip shaft 2 and upset output seat 1 inside to be communicated with vacuum suction interface 14, has solved and has both rotated the problem of airtight vacuum again.Can realize that to wafer absorption is grasped and upset easily, be applicable to the mechanical wrist part structure that not only needs vacuum suction but also need overturn.
(4) description of drawings
The utility model is described in more detail below in conjunction with accompanying drawing.
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is a vertical view of the present utility model.
1-upset output seat, 2-trip shaft, 3-axle bed, 4-bearing gland, 5-upset driven gear, 6-bearing, 7-bearing locking nut, 8-swivel joint, 9-upset cylinder support, 10-driving gear, 11-upset cylinder, 12-pedestal, 13-screw, 14-vacuum suction interface, 15-airtight chamber, 16-air flue.
(5) embodiment
Embodiment is referring to shown in Fig. 1,2, and a kind of turnover device of mechanical arm that is used for semiconductor manufacturing equipment comprises it is characterized in that trip shaft 2 that links to each other with upset cylinder 11 and the upset output seat 1 that is fixed on the trip shaft front end:
Have vacuum suction interface 14 on the surface of upset output seat 1, in the upset output seat 1 airtight chamber 15 that is communicated with vacuum suction interface 14 is arranged.Above-mentioned upset output seat 1 is a T shape plate, and is fixing by screw and trip shaft 2.
The fixedly connected swivel joint 8 that is connected with absorption driving source of the gas in the rear end of trip shaft 2, trip shaft 2 has air flue 16 along the axle center, and the front end of air flue 16 is communicated with the airtight chamber 15 of upset output seat, and the rear end of air flue 16 is communicated with the air flue of swivel joint 8.
Trip shaft 2 be one from the gradually little multidiameter of A-P diameter, be with bearing 6 on trip shaft 2 step foremost, by bearing gland 4 and screw 13 trip shaft 2 and axle bed 3 are fixed together, axle bed 3 is fixed on the pedestal 12, on trip shaft 2, be positioned at bearing 6 backs one step and be with bearing locking nut 7, be fixed with turning gear 5 on the step after being positioned at bearing locking nut 7 on the trip shaft 2, turning gear 5 is in transmission connection with the driving gear 10 of side, and driving gear 10 is connected with the output shaft of upset cylinder 11.Above-mentioned upset cylinder 11 is supported on the upset cylinder support 9, and upset cylinder support 9 is fixed on the pedestal 12.
The upset output seat 1 of this turnover device of mechanical arm that is used for semiconductor manufacturing equipment and trip shaft 2 are connected by screw, described bearing 6 axle bed 3 of packing into compresses by bearing gland 4, the described trip shaft 2 of packing into is locked bearing locking nuts 7, and described turning gear 5 and swivel joint 8 are installed successively.Described upset cylinder support 9, driving gear 10 and upset cylinder 11 are connected, and overall fixed is on described pedestal 12.Provide the upset drive source by upset cylinder 11, make trip shaft 2 drive 1 rotation of upset output seat by gear drive.Vacuum source is delivered to vacuum suction interface 14 on the upset output seat 1 by air flue, and vacuum suction interface 14 is used for absorption and grasps wafer, drives source of the gas by absorption absorption power is provided, and realizes absorption extracting and flip-flop movement to wafer.
Claims (3)
1. a turnover device of mechanical arm that is used for semiconductor manufacturing equipment comprises trip shaft (2) that links to each other with upset cylinder (11) and the upset that is fixed on trip shaft front end output seat (1), it is characterized in that:
Have vacuum suction interface (14) on the surface of upset output seat (1), in the upset output seat (1) airtight chamber (15) that is communicated with vacuum suction interface (14) is arranged;
The fixedly connected swivel joint (8) that is connected with absorption driving source of the gas in the rear end of trip shaft (2), trip shaft (2) has air flue (16) along the axle center, the front end of air flue (16) is communicated with the airtight chamber (15) of upset output seat, and the rear end of air flue (16) is communicated with the air flue of swivel joint (8);
Trip shaft (2) be one from the gradually little multidiameter of A-P diameter, be with bearing (6) on trip shaft (2) step foremost, by bearing gland (4) and screw (13) trip shaft (2) and axle bed (3) are fixed together, axle bed (3) is fixed on the pedestal (12), on trip shaft (2), be positioned at bearing (6) back one step and be with bearing locking nut (7), be fixed with turning gear (5) on the step after being positioned at bearing locking nut (7) on the trip shaft (2), turning gear (5) is in transmission connection with the driving gear (10) of side, and driving gear (10) is connected with the output shaft of upset cylinder (11).
2. the turnover device of mechanical arm that is used for semiconductor manufacturing equipment according to claim 1 is characterized in that: above-mentioned upset output seat (1) is a T shape plate, and is fixing by screw and trip shaft (2).
3. the turnover device of mechanical arm that is used for semiconductor manufacturing equipment according to claim 1 and 2 is characterized in that: above-mentioned upset cylinder (11) is supported on the upset cylinder support (9), and upset cylinder support (9) is fixed on the pedestal (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007202017642U CN201126814Y (en) | 2007-12-25 | 2007-12-25 | Manipulator turning device for semiconductor private facilities |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007202017642U CN201126814Y (en) | 2007-12-25 | 2007-12-25 | Manipulator turning device for semiconductor private facilities |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201126814Y true CN201126814Y (en) | 2008-10-01 |
Family
ID=40000280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007202017642U Expired - Fee Related CN201126814Y (en) | 2007-12-25 | 2007-12-25 | Manipulator turning device for semiconductor private facilities |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201126814Y (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101804908A (en) * | 2010-05-14 | 2010-08-18 | 天津必利优科技发展有限公司 | Material turnover device and automatic turnover material-taking equipment adopting same |
| CN101890710A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer adsorption type conveying manipulator |
| WO2011038560A1 (en) * | 2009-09-30 | 2011-04-07 | 东莞宏威数码机械有限公司 | Invert device |
| CN102269600A (en) * | 2010-12-20 | 2011-12-07 | 吴江市博众精工科技有限公司 | Turnover mechanism |
| CN103085081A (en) * | 2013-01-29 | 2013-05-08 | 东华大学 | Hinge joint mechanism with angular displacement sensor |
| CN103192400A (en) * | 2012-01-05 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | End execution device of side-turn atmospheric mechanical hand |
| CN104245248A (en) * | 2012-02-06 | 2014-12-24 | 苹果公司 | Test system with test trays and automated test tray flipper |
| CN104723345A (en) * | 2015-03-19 | 2015-06-24 | 北京工业大学 | Reversible tail end assembly applied to wafer conveying robot |
| CN106523534A (en) * | 2016-12-29 | 2017-03-22 | 浙江舜宇光学有限公司 | Bearing group rotating device, bearing group rotating operation device and adjusting method of bearing group rotating operation device |
| CN108994597A (en) * | 2018-09-10 | 2018-12-14 | 东莞市松研智达工业设计有限公司 | Gasket is taken and assembly integrated mechanical hand |
| CN109366469A (en) * | 2018-12-18 | 2019-02-22 | 广东华工佳源环保科技有限公司 | Paper pulp molding forming mechanical arm |
| CN109366513A (en) * | 2018-12-18 | 2019-02-22 | 广东华工佳源环保科技有限公司 | Dry embryo upset sucking disc frame of paper pulp moulded product |
| CN109909786A (en) * | 2019-04-29 | 2019-06-21 | 宇晶机器（长沙）有限公司 | A kind of convertible multistation loading and unloading manipulator |
-
2007
- 2007-12-25 CN CNU2007202017642U patent/CN201126814Y/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011038560A1 (en) * | 2009-09-30 | 2011-04-07 | 东莞宏威数码机械有限公司 | Invert device |
| CN101804908B (en) * | 2010-05-14 | 2011-10-19 | 天津必利优科技发展有限公司 | Material turnover device and automatic turnover material-taking equipment adopting same |
| CN101804908A (en) * | 2010-05-14 | 2010-08-18 | 天津必利优科技发展有限公司 | Material turnover device and automatic turnover material-taking equipment adopting same |
| CN101890710A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer adsorption type conveying manipulator |
| CN102269600A (en) * | 2010-12-20 | 2011-12-07 | 吴江市博众精工科技有限公司 | Turnover mechanism |
| CN103192400A (en) * | 2012-01-05 | 2013-07-10 | 沈阳新松机器人自动化股份有限公司 | End execution device of side-turn atmospheric mechanical hand |
| US9423420B2 (en) | 2012-02-06 | 2016-08-23 | Apple Inc. | Testing system with test trays |
| CN104245248A (en) * | 2012-02-06 | 2014-12-24 | 苹果公司 | Test system with test trays and automated test tray flipper |
| CN104245248B (en) * | 2012-02-06 | 2017-02-22 | 苹果公司 | Test system with test trays and automated test tray flipper |
| CN103085081A (en) * | 2013-01-29 | 2013-05-08 | 东华大学 | Hinge joint mechanism with angular displacement sensor |
| CN103085081B (en) * | 2013-01-29 | 2015-01-07 | 东华大学 | Hinge joint mechanism with angular displacement sensor |
| CN104723345A (en) * | 2015-03-19 | 2015-06-24 | 北京工业大学 | Reversible tail end assembly applied to wafer conveying robot |
| CN104723345B (en) * | 2015-03-19 | 2016-08-24 | 北京工业大学 | A kind of turning connector assembly being applied to wafer transfer robot |
| CN106523534A (en) * | 2016-12-29 | 2017-03-22 | 浙江舜宇光学有限公司 | Bearing group rotating device, bearing group rotating operation device and adjusting method of bearing group rotating operation device |
| CN106523534B (en) * | 2016-12-29 | 2019-08-09 | 浙江舜宇光学有限公司 | Bearing group rotating device, operation equipment and its adjusting method |
| CN108994597A (en) * | 2018-09-10 | 2018-12-14 | 东莞市松研智达工业设计有限公司 | Gasket is taken and assembly integrated mechanical hand |
| CN109366469A (en) * | 2018-12-18 | 2019-02-22 | 广东华工佳源环保科技有限公司 | Paper pulp molding forming mechanical arm |
| CN109366513A (en) * | 2018-12-18 | 2019-02-22 | 广东华工佳源环保科技有限公司 | Dry embryo upset sucking disc frame of paper pulp moulded product |
| CN109366469B (en) * | 2018-12-18 | 2024-07-09 | 广东华工环源环保科技有限公司 | Pulp molding forming mechanical arm |
| CN109909786A (en) * | 2019-04-29 | 2019-06-21 | 宇晶机器（长沙）有限公司 | A kind of convertible multistation loading and unloading manipulator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081001 Termination date: 20131225 |