JP2005223296A - Apparatus for transferring substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transferring apparatus for which realizes simplification and miniaturization of structure, where an interval between a pair of holding arms for holding a substrate can be adjusted, without changing the center position, and the pair of holding arms can be rotated between a holding position for holding the substrate and a retreating position turned from the holding position by substantially 90°. <P>SOLUTION: The pair of holding arms 25 and 26 are borne, respectively rotatably by a pair of arm supporters 15 and 16 mounted to a base 10 in a state of being movable in a transport direction. The respective holding arms 25 and 26 are rotated, by a rotating apparatus between the holding position for holding the substrate projecting in a horizontal direction, nearly vertical to the transport direction and the retreating position rotated from the holding position by nearly 90°. The respective arm supporters 15 and 16 are moved in linkage by the same distance, in mutually opposite directions of the transport direction by an arm supporter connection and disconnection apparatus 50. The pair of supporters 15 and 16, holding the substrate, are moved integrally in the transport direction by a transporting-moving apparatus. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a transfer apparatus that transfers a substrate between apparatuses.

In Patent Document 1, the lower surface of the LCD substrate S is held by a pair of load arms 26 (in the background art and the subject of the invention, the reference numerals are given in Patent Document 1 and are attached with reference numerals), and are horizontally mounted on the arms 26. A transfer device 14 is disclosed in which the substrate S held in a state is sucked into a hole 38 opened on the upper surface of the arm 26 and connected to a negative pressure device, and is carried into and out of the inspection device 10. The transport device 40 is mounted on the base 32 so that the X table 31 can move in the X direction, and the rotating body 30 is mounted on the X table 31 so as to be able to be driven to rotate, and is mounted on the rotating body 30 so as to be movable up and down. A connecting member 39 having a pair of arms 26 fixed thereto is supported on the support plate 28 so as to be movable in the Y direction. The inspection apparatus 10 is capable of moving linearly in the X and Y directions perpendicular to each other and bringing the electrode pads of the substrate S placed on the substrate placing table 44 rotatable about the vertical θ axis line into contact with the probe needles. To perform a physical inspection. A cassette C for storing the substrate S is placed along the moving direction of the X table 31. The transport device 40 places the substrate S on the pair of arms 26 and transports the substrate S between the cassette C and the substrate mounting table 44 of the inspection device.
JP-A-8-264619 (5th and 6th pages, FIGS. 3 and 4)

   In the transfer device described in Patent Document 1, since the LCD substrate S is placed on the pair of arms 26 and transferred, the amount of bending of the substrate S can be reduced, but the distance between the pair of arms 26 is centered. Since the position cannot be changed without changing the position, if the distance between the arms 26 is adjusted according to the substrates S having different sizes, the center position between the pair of arms 26 is changed, and the transfer device is shifted by this center position shift. Had to correct the position.

   Further, by moving the connecting member 39 in the Y direction, the pair of arms 26 are moved forward and backward between a holding position where the arms 26 protrude toward the inspection apparatus 10 and a retreat position where the arms 26 retract from the inspection apparatus 10. Since it is moved, there is a problem that the apparatus becomes large.

   The present invention has been made to solve such a conventional problem, and can adjust the distance between a pair of holding arms that hold a substrate without changing the center position, and the pair of holding arms can hold a substrate. Another object of the present invention is to provide a transport device that is simple and can be miniaturized in a structure that can be swung between a retraction position that is swung approximately 90 degrees from a holding position.

  In order to solve the above-described problem, the structural feature of the invention described in claim 1 is that the pair of holding arms is provided in a transfer device that holds the lower surface of the substrate with a pair of holding arms and transfers the substrate in a horizontal state. And a pair of arm supports mounted on the base so as to be movable in the transport direction, and the pair of holding arms, each holding arm projecting in a horizontal direction substantially perpendicular to the transport direction, and A revolving device that revolves between a holding position that holds the substrate and a retreat position that revolves approximately 90 degrees from the holding position, and each arm support that moves in an opposite direction in the transport direction in an equidistant manner. An arm support contacting / separating device; and a transport moving device that integrally moves the pair of arm supports in the transport direction.

  According to a second aspect of the present invention, there is provided a structural feature according to the first aspect, wherein a guide extending in the transport direction is provided on the base, and the pair of arm supports are slidably mounted on the guide. Then, a slide is slidably mounted on the guide between the pair of arm supports, and the slide and each arm support are connected by the arm support contact / separation device. The pair of arm supports is moved in the transport direction via the arm support contact / separation device by moving the slide in the transport direction.

According to a third aspect of the present invention, the swiveling device supports each holding arm on each arm support so that the holding arm can turn about a vertical axis in a horizontal plane, and each holding arm is supported by each holding arm. It is swung via a Geneva mechanism between a holding position that holds the substrate by projecting in a horizontal direction substantially perpendicular to the transport direction and a retracted position that opens in opposite directions until each holding arm is parallel to the transport direction. A rotation drive device.

  According to a fourth aspect of the present invention, in any one of the first to third aspects, a plurality of suction members that are connected to a negative pressure device and suck a substrate are opened on the upper surface of each holding arm. In addition, an on-off valve is provided for opening and closing each adsorbing member according to the size of the substrate.

   In the invention according to claim 1 configured as described above, the arm support on which the holding arm is supported can be moved by an equal distance in conjunction with each other in the opposite directions by the arm support contact / separation device. With the adjusted pair of holding arms, the substrate can be held at two locations on the lower surface with a small amount of bending. In addition, when the substrate to be transferred changes, the distance between the pair of holding arms can be adjusted according to the size of the substrate without changing the center position, and it is necessary to change the loading position and unloading position of the apparatus for loading and unloading the substrate. Therefore, setup change can be easily performed. Further, the pair of holding arms can be swung between a holding position where the holding arm protrudes in a horizontal direction substantially perpendicular to the transport direction and holds the substrate, and a retreat position rotated about 90 degrees from the holding position. It is possible to provide a transport device that has a simple structure and can be miniaturized.

  In the invention according to claim 2 configured as described above, a pair of arm supports is mounted on a guide extending in the transport direction on a base, and both arm supports are separated by arm support contacting / separating devices. The slide connected in the above is mounted on the guide, the slide is moved by the transfer movement device, the pair of arm supports are moved in the transfer direction, and the substrate held by the holding arm is transferred. As described above, since the pair of arm supports and the slide arranged between the arm supports are slidably mounted on the same guide, the apparatus can be simplified, downsized, and the cost can be reduced. it can.

  In the invention according to claim 3 configured as described above, each holding arm is supported on each arm support so as to be pivotable about a vertical axis, and each holding arm is pivotally driven via a Geneva mechanism. The holding arms are arranged between a holding position in which each holding arm protrudes in a horizontal direction substantially perpendicular to the transport direction and holds the substrate, and a retracted position that opens in opposite directions until parallel to the transport direction. It is possible to turn at high speed with reduced shock when stopping.

  In the invention according to claim 4 configured as described above, the substrate is securely attached to the pair of holding arms by being sucked at the lower surface by a plurality of suction members that are connected to the negative pressure device and open to the upper surface of each holding arm. Retained. When a small substrate is transported, the suction member that does not face the substrate is closed by the on-off valve, so that it is possible to prevent the negative pressure from being lowered due to air flowing in from the suction member that does not face the substrate.

   Hereinafter, a substrate transfer apparatus according to the present invention will be described with reference to the drawings. In FIG. 1, reference numeral 1 denotes a production line for producing a liquid crystal display device by mounting a chip or film on a liquid crystal panel (hereinafter referred to as a substrate), a cleaning device 2 for cleaning the terminals of the substrate P, an anisotropic conductive film ( The ACF tensioning device 3 for attaching the ACF) to the substrate P, the mounting device 4 for mounting a film (FPC) on which a chip or a circuit is printed, and the pressure bonding device 5 for pressing the mounted chip or FPC to the substrate P for final pressure bonding. In order to sequentially convey the substrate from the cleaning device 2 to the pressure bonding device 5, a substrate conveyance device 6 is disposed across adjacent devices. In each of the devices 2 to 5, a stage 8 is mounted on the base 7, and each stage 8 is linearly moved in the X, Y, and Z directions perpendicular to each other and is rotationally indexed about the vertical axis θ. It is like that. The substrate P carried in a horizontal state on the stage 8 from the substrate transfer device 6 is sucked by the negative pressure of the suction hole that is opened on the upper surface of the stage 8 and communicated with the negative pressure device, and is sucked to the stage 8. Above the stage 8 of each apparatus 2 to 5, a working unit is provided, and each operation such as cleaning of terminals and attaching ACF to the substrate P attracted to the stage 8 and indexed to a predetermined position is performed. Done.

   As shown in FIGS. 1 and 3, on the front front side of the apparatuses 2 to 5, a base 10 of the substrate transfer apparatus 6 extends in the X direction across two adjacent apparatuses, and is interposed via a support stand 11. It is fixed on the floor. A guide rail 12 is fixed to the upper surface of the base 10 in the X direction, and a sliding engagement portion 13 a fixed to the lower surface of the slide 13 is slidably engaged with the guide rail 12. A pair of linear motor magnet coils 14 a of a linear motor 14 that conveys and moves the slide 13 in the X direction is fixed horizontally in the X-axis direction to the support portion 13 b that is suspended from the rear end surface of the slide 13, and is attached to the lower surface of the base 10. The pair of linear motor magnets 14b of the linear motor 14 is fixed horizontally in the X direction with the magnetic pole surfaces facing each linear motor magnet coil 14a.

  As shown in FIGS. 2 and 4, a pair of arm supports 15 and 16 are slidably mounted on both sides of the slide 13 on the guide rail 12, and extend in the X direction on the arm supports 15 and 16. Racks 17 and 18 are fixed to face each other. The racks 17 and 18 are meshed with a pinion 19, and the pinion 19 is supported on the slide 13 so as to be rotatable about a vertical axis. When the distance between the arm supports 15 and 16 is adjusted in accordance with the size of the substrate P, the clamping device 20 provided on the slide 13 is fastened and the racks 17 and 18 are tightened toward the pinion 19, respectively. The relative movement of the arm supports 15 and 16 is restricted. In order to indicate the distance between the arm supports 15 and 16, the scale 21 is fixed to the rear arm support 15 extending in the X direction, and the pointer 22 is attached to the slide 13 toward the scale 21.

  Thus, the arm supports 15 and 16 are opposed to each other in the X direction, which is the conveying direction, by the pinion 19, the racks 17 and 18, the clamp device 20 and the like mounted between the slide 13 and the arm supports 15 and 16. An arm support body contacting / separating device 50 is configured to move in an interlocking manner with an equal distance. The linear motor 14, the slide 13, the pinion 19, the racks 17 and 18, the clamp device 20, and the like constitute a transport movement device 51 that integrally moves the pair of arm supports 15 and 16 in the transport direction. The device 51 moves the pair of arm supports 15 and 16 in the transport direction via the arm support contact / separation device 50 by moving the slide 13 in the transport direction by the linear motor 14.

  The swing support shafts 23 and 24 are fixed vertically to the arm supports 15 and 16, and the support arms 25 and 26 protrude from the swing support shafts 23 and 24 in a horizontal direction substantially perpendicular to the X direction. Is supported so as to be swiveled so as to swivel between a holding position for holding and a retracted position opened in opposite directions until parallel to the X direction. Driven arm portions 25 a, 26 a are projected horizontally at right angles to the holding arms 25, 26 from the base end portions supported on the turning center shafts 23, 24 of the holding arms 25, 26. When the holding arms 25 and 26 are located at the holding positions, the driven arm portions 25a and 26a protrude outward in opposite directions, and are engraved on the lower surface of the driven arm portions 25a and 26a from the end surface to the base end portion. The long grooves 25b and 26b extend in the X direction. Drive arms 29 and 30 are supported on the support shafts 27 and 28 fixed vertically to the arm supports 15 and 16 in front of the turning center shafts 23 and 24 so as to be rotatable about the vertical axis. When the holding arms 25 and 26 and the drive arms 29 and 30 protrude rearward at a right angle to the X direction, rollers 31 and 32 fitted to the open ends of the long grooves 25b and 26b are freely rotatable at the tip of 30. It is supported. Sector gears 33 and 34 formed at the front end portions of the drive arms 29 and 30 are meshed with racks 37 and 38 fixed to the movable bodies 35 and 36 in the X direction, and the movable bodies 35 and 36 are arm support bodies 15 and 36. 16 is slidably mounted in the X direction and is reciprocated in the X direction by air cylinders 39 and 40.

The Geneva mechanism 52 is constituted by the drive arms 29 and 30, the rollers 31 and 32, the long grooves 25b and 26b, the driven arm portions 25a and 25b, and the like. The air cylinders 39 and 40, the racks 37 and 38, the sector gears 33 and 34, the support shafts 27 and 28, the geneva mechanism 52, etc. are used to move the pair of holding arms 25 and 26 between the holding position and the retracted position. A rotation driving device 53 is configured to be rotated. The pair of holding arms 25 and 26 are arranged between a holding position where the holding arms 25 and 26 protrude in a horizontal direction substantially perpendicular to the transport direction and hold the substrate P, and a retreat position where the holding arm 25 and 26 turn about 90 degrees from the holding position. The swivel device 54 that swivels is supported by the arm supports 15 and 16 so that the holding arms 25 and 26 can be swung around the vertical axis in the horizontal plane. Between the holding position that protrudes in the horizontal direction at a substantially right angle to hold the substrate P, and the retracted position that opens in opposite directions until each holding arm is parallel to the transport direction, through the Geneva mechanism 52. A rotation driving device 53 is provided.

  The swivel device 54 is formed so that gears are formed concentrically with the swivel center shafts 23 and 24 at the base end portions of the holding arms 25 and 26, and the gears are engaged with and coupled to the gears supported on the support shafts 27 and 28. Alternatively, the gears formed at the base end portions of the holding arms 25 and 26 may be directly rotated by a rack reciprocated by an air cylinder.

  As shown in FIG. 5, a plurality of suction pads 41 (suction members) are provided on the upper surface of the pair of holding arms 25 and 26, and each suction pad 41 is formed in the holding arms 25 and 26. The negative pressure device 43 is connected through the common passage 42. Open / close valves 45 are provided in the respective branch paths 44 that communicate the common passage 42 and the respective suction pads 41. The valve body 46 of the on-off valve 45 is rotatably supported by the holding arms 25 and 26 so as to intersect the branch path 44, and the operation portion 46 a of the valve body 46 protrudes laterally from the outer surface of the holding arms 25 and 26. Has been. When the operating portion 46a is rotated and the valve hole 46b formed in a diametrical direction at a portion intersecting the branch passage 44 of the valve body 46 and the branch passage 44 are in communication with each other, the on-off valve 45 is opened. When a negative pressure is supplied to the suction pad 41 and the communication pad is disconnected, the on-off valve 45 is closed and the suction pad 41 is shut off from the negative pressure device 43.

  Next, the operation of the present embodiment will be described by taking as an example the case where the substrate P is unloaded from the cleaning device 2 and loaded into the ACF tensioning device 3. The arm support 15 and 16 connected to the slide 13 and the slide 13 of the substrate transfer device 6 via racks 17 and 18 and a pinion 19 are moved by the linear motor 14 to a position opposite to the unloading position of the cleaning device 2. . At this time, the holding arms 25 and 26 are positioned at a retracted position opened in opposite directions until parallel to the X direction. When the terminal cleaning is completed, the stage 8 of the cleaning device 2 is lifted in the Z direction to a raised position where the substrate P adsorbed on the stage 8 does not interfere with the upper surfaces of the holding arms 25 and 26, and then moved in the X and Y directions. Indexed to the unloading position.

  When the stage 8 is stopped at the unloading position, the racks 37 and 38 fixed to the movable bodies 35 and 36 are advanced by the air cylinders 39 and 40 and the drive arms are driven by the sector gears 33 and 34 meshed with the racks 37 and 38. The holding arms 25 and 26 are supported on the turning center shafts 23 and 24 by the engagement between the rollers 31 and 32 and the long grooves 25b and 26b, and are turned to a holding position substantially perpendicular to the X direction. . The rotation of the drive arms 29 and 30 is transmitted to the holding arms 25 and 26 through the engagement between the rollers 31 and 32 constituting the Geneva mechanism 52 and the long grooves 25b and 26b, so that the holding arms 25 and 26 are started. It is possible to turn at high speed with reduced shock at the time and stop. When the holding arms 25 and 26 are turned to the holding position, the stage 8 descends in the Z direction to the substrate P transfer height position, and temporarily stops at the height position. Then, the suction pad 41 opened on the upper surfaces of the holding arms 25 and 26 is communicated with the negative pressure device 43, and the substrate P is sucked onto the holding arms 25 and 26. When the suction onto the holding arms 25 and 26 is completed, the suction hole opened on the upper surface of the stage 8 is communicated with the atmosphere, and the substrate P is unclamped. At this time, since the substrate P is held at two positions on the lower surface by the pair of holding arms 25 and 26 adjusted to an appropriate interval, the amount of bending of the substrate P can be suppressed small. Further, since the suction pad 41 that does not face the substrate P is closed in advance by the opening / closing valve 45 and the communication with the negative pressure device 43 is closed, air from the suction pad 41 that does not face the substrate P is closed. The negative pressure does not decrease due to leakage. When the substrate P is unclamped, the stage 8 of the cleaning device 2 is lowered in the Z direction to a lowered position that does not interfere with the lower surfaces of the holding arms 25 and 26, and then waits until the substrate P is completely unloaded from the unloading position of the cleaning device 2. To do.

  The arm supports 15 and 16 connected to the slide 13 and the slide 13 via racks 17 and 18 and a pinion 19 are moved by the linear motor 14 to a position facing the loading position of the ACF tensioning device 3. The stage 8 of the ACF tensioning device 3 is moved in the X and Y directions while being lowered in the Z direction to the lowered position, and is stopped at the loading position. After confirming that the slide 13 and the arm supports 15 and 16 are stopped at the carry-in position, the stage 8 moves up to the substrate P transfer height position in the Z direction and temporarily stops at the height position. Then, the suction hole opened on the upper surface of the stage 8 is communicated with the negative pressure device so that the substrate P is sucked and held on the stage 8, and the suction pad 41 opened on the upper surfaces of the holding arms 25 and 26 is communicated with the atmosphere to hold the substrate P. It is released from the arms 25 and 26. After the transfer operation of the substrate P at the carry-in position is completed, the stage 8 of the ACF adhering apparatus 3 has the substrate P transfer height to a position where it does not interfere with the suction pads 41 opened on the upper surfaces of the holding arms 25 and 26 and the lower surface of the substrate P. It rises in the Z direction from the position. Thereafter, the racks 37 and 38 are retracted by the air cylinders 39 and 40, the drive arms 29 and 30 are reversely rotated via the racks 37 and 38 and the sector gears 33 and 34, and the rollers 31 and 32 are engaged with the long grooves 25b and 26b. As a result, the holding arms 25 and 26 are turned to the retracted positions opened in opposite directions until they become parallel to the X direction.

  When the holding arms 25 and 26 are turned to the retracted position, the stage 8 of the ACF tensioning device 3 is moved to the operating position, and the arm support body connected to the slide 13 and the slide 13 via the racks 17 and 18 and the pinion 19. 15 and 16 are moved by the linear motor 14 to a position facing the carry-out position of the cleaning device 2 and wait until the operation of the cleaning device 2 is completed. At this time, the pair of holding arms 25 and 26 are pivoted to the retreat positions opened in opposite directions until they become parallel to the X direction, and thus do not interfere with the stage 8 of the cleaning device 2. Accordingly, it is not necessary to lengthen the stroke in the Y direction of the stage 8 such as the cleaning device 2 in order to avoid interference with the holding arms 25 and 26, and each device 2 to 5 can be miniaturized.

  When the size of the substrate P to be transferred changes, the clamping device 20 is loosened to release the tightening of the racks 17 and 18 toward the pinion 19, and one of the arm supports 15 and 16 is moved to move the pair of holding arms 25. , 26 is adjusted appropriately so as to reduce the amount of bending according to the length of the substrate P. At this time, the arm supports 15 and 16 are interlocked by the pinions 19 of the racks 17 and 18 and moved in the transport direction by an equal distance in opposite directions, and the center position between the pair of holding arms 25 and 26 does not change. When the size of the substrate P is changed, it is not necessary to change the loading position and the unloading position of each of the devices 2 to 5, and the setup change is easy. When the adjustment of the distance between the holding arms 25 and 26 is completed, the clamp device 20 is fastened, the racks 17 and 18 are tightened toward the pinion 19, and the relative movement of the arm supports 15 and 16 is restricted.

  In the above embodiment, in the arm support body separating / separating device 50, the pinion 19 supported on the slide 13 and the racks 17 and 18 fixed to the arm support bodies 15 and 16 are engaged with each other to engage the slide 13 and the arm support body 15, 16, but the slide 13 and the arm supports 15, 16 are connected by a link mechanism so that the arm supports 15, 16 are moved in conjunction with each other in the opposite direction in the transport direction by an equal distance. May be.

  In the above embodiment, each holding arm is supported on each arm support so as to be pivotable about a vertical line. However, each arm support is pivotable about a horizontal axis extending in the X direction. And a pair of holding arms between a holding position where each holding arm protrudes in a horizontal direction substantially perpendicular to the transport direction and a retreat position where each holding arm pivots downward until it is parallel to the Y direction. Then, it may be made to turn.

  Although the case where the liquid crystal panel is transported has been described in the above embodiment, the present invention can also be used for transporting an electroluminescence panel, a plasma display panel, and the like.

The figure which shows the production line of the liquid crystal display device equipped with the board | substrate conveyance apparatus which concerns on this embodiment. The top view which looked at the principal part of the board | substrate conveyance apparatus from upper direction. The figure seen along the AA line of FIG. The figure seen along the BB line of FIG. The expanded sectional view which cut | disconnected the suction pad part of the holding arm.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Production line of liquid crystal display device, 2 ... Terminal cleaning device, 3 ... ACF sticking measure, 4 ... Mounting device, 5 ... Crimping device, 6 ... Substrate conveyance device, 7 ... Base, 8 ... Stage, 10 ... Base, DESCRIPTION OF SYMBOLS 11 ... Support stand, 12 ... Guide rail, 13 ... Slide, 14 ... Linear motor, 15, 16 ... Arm support, 17, 18 ... Rack, 19 ... Pinion, 20 ... Clamping device, 21 ... Scale, 22 ... Pointer, 23, 24 ... turning center axis, 25, 26 ... holding arm, 25a, 26a ... driven arm, 25b, 26b ... long groove, 27, 28 ... support shaft, 29, 30 ... drive arm, 31, 32 ... roller, 33 34, sector gear, 35, 36, movable body, 37, 38 ... rack, 39, 40 ... air cylinder, 41 ... suction pad, 42 ... common passage, 43 ... negative pressure device, 44 ... branch passage, 45 ... Opening / closing valve, 46 ... Valve body, 46a ... Operation part, 46b ... Valve hole, 50 ... Arm support body separating / separating device, 51 ... Transfer and movement device, 52 ... Geneva mechanism, 53 ... Turning drive device, 54 ... Turning apparatus.

Claims (4)

In the transfer device that holds the lower surface of the substrate with a pair of holding arms and transfers the substrate in a horizontal state,
A pair of arm supports, each of which is rotatably supported by the pair of holding arms, and is movably mounted on the base in the transport direction;
Swing that turns the pair of holding arms between a holding position where each holding arm protrudes in a horizontal direction substantially perpendicular to the transport direction to hold the substrate and a retreat position that turns about 90 degrees from the holding position. Equipment,
An arm support contact / separation device for moving each arm support in an interlocking manner in the opposite direction to each other in the transport direction;
A transport moving device that integrally moves a pair of arm supports in the transport direction;
A substrate transfer device comprising: In claim 1,
A guide extending in the transport direction is provided on the base;
The pair of arm supports are slidably mounted on the guide,
A slide is slidably mounted on the guide between the pair of arm supports,
Connecting the slide and each arm support by the arm support contacting / separating device;
The substrate transfer apparatus, wherein the transfer moving device moves the pair of arm supports in the transfer direction via the arm support contacting / separating device by moving the slide in the transfer direction. In claim 1 or 2,
The swivel device supports each holding arm on each arm support so that it can swivel around a vertical axis in a horizontal plane,
Each holding arm is located between a holding position where each holding arm protrudes in a horizontal direction substantially perpendicular to the transport direction and holds the substrate, and a retracted position opened in opposite directions until each holding arm is parallel to the transport direction. A substrate transport apparatus comprising a rotation drive device for turning through a Geneva mechanism. In any one of Claims 1 thru | or 3,
A plurality of suction members that are connected to a negative pressure device and suck the substrate are opened on the upper surface of each holding arm,
A substrate transfer apparatus comprising an opening / closing valve that opens and closes each adsorbing member according to the size of the substrate.

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