KR20150077664A - Apparatus for rotating carrier - Google Patents

Abstract

Disclosed is an apparatus for rotating a carrier. The present invention provides the apparatus for rotating a carrier, by which an asymmetric load phenomenon which may occur during rotation is removed to prevent occurrences of a torsion phenomenon and a slip phenomenon at a rotated portion, and a carrier flip unit is arranged to be adjusted in accordance with a carrier withdrawal rail after rotating the carrier flip unit, from which damage to a drive shaft or a motor or the like can be prevented and damage to the carrier can be prevented. According to an embodiment of the present invention, the apparatus for rotating a carrier comprises: a process chamber arranged to perform rotation of the carrier attached to a substrate; the carrier flip unit on which the carrier is secured to rotate the carrier; and a rotary unit coupled to the carrier flip unit and arranged to be capable of rotating, wherein an opening capable of incoming and outgoing the carrier is formed thereon.

Description

[0001] APPARATUS FOR ROTATING CARRIER [0002]

The present invention relates to a carrier rotating device, and more particularly, to a carrier rotating device that eliminates an offset load phenomenon that may occur during rotation, prevents a slipping phenomenon and a twisting phenomenon in a rotating portion, The present invention relates to a carrier rotating device in which a flip unit is adapted to be aligned with a carrier takeout rail.

In general, the substrate refers to a flat panel display (FPD) such as a plasma display panel (PDP), a liquid crystal display (LCD), and organic light emitting diodes (OLED) Semiconductor wafers, photomask glass, and the like.

Here, the substrate as the flat panel display element (FPD) and the substrate as the wafer for semiconductor are different from each other in terms of material, use, and the like, but a series of processing steps for the substrates, for example, exposure, development, etching, strip, The processes such as rinsing, cleaning and the like are substantially very similar, and the substrates are produced by sequentially progressing these processes.

An organic light emitting display (OLED), which is currently popular among flat panel display devices (FPDs), is a cemented carbide type display device that implements a color image by self-emission of organic materials. And has a wide viewing angle and a fast response speed, and has been attracting attention as a next-generation promising display device because of its simple structure and high light efficiency.

The OLED includes an anode, a cathode, and organic layers interposed between the anode and the cathode. Here, the organic layers include at least a light emitting layer, and a hole injecting layer, a hole transporting layer, an electron transporting layer, .

The OLED can be divided into a polymer organic light emitting device and a low molecular weight organic light emitting device depending on an organic film, especially a material forming the light emitting layer.

In order to realize a full color in an OLED, a light emitting layer must be patterned. As a method of manufacturing a large OLED, a direct patterning method using a fine metal mask (hereinafter referred to as FMM) and a laser induced thermal Imaging method, and a method using a color filter.

The manufacturing process of the OLED includes a pattern forming process, a deposition process, an encapsulating process, and a laminating process in which a substrate having undergone a deposited substrate and an encapsulating process is attached. Here, the deposition process is a process of attaching the deposition material provided in the evaporation source to the substrate.

On the other hand, before the deposition process is performed, the substrate may be rotated so that the positions of the upper and lower substrates of the substrate are changed according to various needs.

For example, in the process of the previous step of the deposition process, when the upper and lower substrates of the substrate are turned upside down, that is, when the upper and lower substrates are positioned on the lower and upper sides, And the entire substrate is rotated so that the lower plate is positioned at the lower part.

For this purpose, a flip process may be performed on the substrate that is rotated so that the positions of the upper and lower substrates of the substrate are changed before proceeding with the deposition process.

Here, in the flip process of the substrate, a carrier provided to attach the substrate to the substrate is used. When the substrate is transferred to the carrier flip unit after being attached to the carrier, The flip process of the substrate is performed.

In this case, in the conventional case, there is a case where a carrier flip unit for rotating a carrier is disposed, a carrier inlet rail provided to draw a carrier into a carrier flip unit, and a carrier take- Are connected to the carrier flip units, respectively.

A rotation axis disposed so as to be parallel to the traveling direction of the carrier is connected to the carrier flip unit or a rotation axis disposed so as to intersect with the traveling direction of the carrier is connected to the carrier flip unit such that rotation of the rotation axis causes the carrier flip unit to rotate And the carrier disposed inside the carrier flip unit is also rotated to flip the substrate attached to the carrier.

However, in the conventional art, the turning radius of the carrier flip unit is increased, and the slip phenomenon and the twist phenomenon occur in the rotating portion due to the offset load during the rotation, and excessive force is applied to the driving shaft connected for rotation, Or damage to the motor or the like may occur.

When the carrier is rotated by the rotation shaft after the rotation shaft is connected to the carrier flip unit, the carrier flip unit is not aligned with the carrier outgoing rail after the rotation of the carrier flip unit according to the movement of the center of gravity, There is a problem that damage may occur to the carrier.

Korea Registered Patent Registration No: 10-1314540 (Date of Notification: October 04, 2013)

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus and a method for manufacturing a semiconductor device, which can prevent slippage and torsion in a rotating portion by eliminating an offset load, Thereby preventing damage to the drive shaft or the motor and preventing the carrier from being damaged.

According to an aspect of the present invention, there is provided a plasma processing apparatus comprising: a processing chamber in which rotation of a carrier to which a substrate is attached is advanced; A carrier flip unit disposed within the process chamber and configured to receive the carrier for rotation of the carrier; And a rotation unit in which the carrier flip unit is coupled and rotatably provided and an opening through which the carrier can be inserted and removed is provided.

Further, the rotating unit may include: a rotating plate to which the carrier flip unit is coupled; And a gear teeth member formed along the circumference of the rotating plate.

The rotary plate may have a circular section.

The apparatus may further include a rotation unit guide coupled to the rotation unit and guiding rotation of the rotation unit.

The rotation unit guide includes: a guide rail coupled to the rotation unit; And a tilting guide having one side coupled to the guide rail and the other side fixedly coupled to a frame disposed in the process chamber.

The guide rail may be formed in a circular shape.

At least one inclined guide may be provided on the guide rail along the guide rail.

The inclined guide may include a housing member coupled to the frame; And a rotating ball which is disposed inside the housing member and is in contact with the guide rail and rotates when the guide rail is moved.

The apparatus may further include a power providing unit coupled to the rotating unit to provide a driving force for rotating the rotating unit.

Further, the power providing unit may include: a gear couple member connected to the gear teeth member; A gear coupling member pivot shaft rotatably coupled to the gear coupling member; And a main power source that is coupled to the gear coupling member rotation shaft and supplies power to the gear coupling member rotation shaft.

The gear coupling member may be a needle bearing.

Further, the carrier flip unit may include: a carrier seating member coupled to the rotation unit and on which the carrier is seated; And a carrier receiving groove formed in the carrier receiving member, wherein the carrier receiving groove is provided movably.

The apparatus may further include a carrier detachment prevention unit coupled to the carrier seating member to prevent the carrier from being detached from the carrier seating member when the carrier rotates.

Further, the apparatus may further include a cylinder for the carrier separation prevention unit which is disposed so as to be able to come into contact with or detach from the carrier separation prevention unit, and which provides power to the carrier separation prevention unit.

The carrier separation preventing unit may include a separation preventing member disposed to be in contact with the carrier or spaced apart from the carrier to prevent separation of the carrier; A power transmission member coupled to the release preventing member and receiving power when the cylinder for the carrier departure prevention unit is contacted; And a release preventing member pivot coupled to at least one of the release preventing member and the power transmitting member and provided so that the release preventing member is rotatable.

Further, the plurality of carrier departure prevention units may be provided at the corners of the carrier.

In order to prevent an error from occurring in the carrier flip unit due to backlash after the rotation of the carrier flip unit, the anti-backlash cylinder may be disposed so as to be contactable with or detachable from the carrier flip unit.

In addition, the anti-backlash cylinders may be provided in a pair so as to be in contact with one side of the carrier flip unit and the other side opposite from the one side.

Embodiments of the present invention can prevent slippage and twisting phenomenon in a rotating portion by eliminating an offset load phenomenon that may occur during rotation, and prevent the carrier flip unit from aligning with the carrier take-out rail after rotation of the carrier flip unit Thereby making it possible to prevent damage to the drive shaft or the motor and to prevent damage to the carrier.

1 is an overall perspective view of a carrier rotating device according to an embodiment of the present invention.
2 is a plan view of the carrier rotating device according to an embodiment of the present invention before a carrier is drawn in.
3 is a plan view of a carrier rotating device according to an embodiment of the present invention after a carrier is drawn.
4 is a perspective view showing a carrier deviation preventing unit in the carrier rotating device according to an embodiment of the present invention.
5 is a perspective view showing a state in which a carrier is rotated in a carrier rotating device according to an embodiment of the present invention.
6 is a plan view of the carrier rotating device after the carrier is rotated according to an embodiment of the present invention.
7 is a perspective view of a carrier rotating device according to an embodiment of the present invention in which a carrier is rotated and then pulled out.
8 is a perspective view of a power providing unit in a carrier rotating device according to an embodiment of the present invention.
9 is a side view of a carrier rotating device according to an embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

The terms " one side " and " other side " used in this specification may mean a specified side, or do not mean a specified side, but any side of a plurality of sides may be referred to as one side, And the other side is referred to as the other side.

Further, the term " bonding " or " connection ", as used herein, refers not only to a case where one member and another member are directly bonded or connected directly, but also when one member is indirectly bonded to another member through a joint member , And indirectly connected.

As used herein, the term 'flip process' refers to a process of rotating a substrate or a carrier on which a substrate is mounted such that the positions of the upper and lower plates are mutually changed before proceeding with other processes such as a deposition process.

2 is a plan view of a carrier rotating apparatus according to an embodiment of the present invention before a carrier is drawn in. FIG. 3 is a cross-sectional view of a carrier rotating apparatus according to an embodiment of the present invention. 4 is a perspective view showing a carrier detachment prevention unit in a carrier rotation device according to an embodiment of the present invention, and Fig. 5 is a perspective view showing a carrier rotation device according to an embodiment of the present invention FIG. 6 is a plan view of the carrier rotating device according to the embodiment of the present invention after the carrier is rotated, and FIG. 7 is a plan view of the carrier rotating device according to the embodiment of the present invention. Fig. 8 is a perspective view of the power providing unit in the carrier rotating device according to the embodiment of the present invention, and Fig. 9 is a side view of the carrier turning device according to one embodiment of the present invention.

Referring to these drawings, a carrier rotating device 100 according to an embodiment of the present invention includes a process chamber 200 in which rotation of a carrier (C) to which a substrate is attached is advanced, a process chamber 200 A carrier flip unit 300 that is disposed inside the carrier flip unit 300 and in which the carrier C is mounted for rotation of the carrier C, And a rotation unit 400 in which openings 430 and 440 are formed.

As used herein, the substrate refers to a substrate for a flat display. The flat display may be an LCD (Liquid Crystal Display), a PDP (Plasma Display Panel), or an OLED (Organic Light Emitting Diodes).

However, in this embodiment, for convenience of explanation, a glass substrate for OLED (Organic Light Emitting Diodes) will be simply described as a substrate.

In the present embodiment, the substrate itself may be rotated after being mounted on the flip unit for the flip process. However, for convenience of explanation, the carrier C may be mounted on the carrier C for transferring the substrate, The carrier flip unit 300 will be described with reference to FIGS.

Referring to FIG. 1, the process chamber 200 is provided so that the rotation of the carrier C to which the substrate is attached is advanced, and the upper and lower sides of the carrier C are reversed in the process chamber 200 Can be rotated.

This may be accomplished by rotating the carrier C through a flip process to correct any inversion of the top and bottom plates of the substrate in other processes preceding the deposition process, The substrate may be rotated to deposit the surface.

That is, before proceeding with the deposition process, after the carrier C with the substrate mounted thereon is introduced into the process chamber 200 provided for the flip process, the carrier C is moved to the carrier C is rotated, the substrate attached to the carrier C is also rotated, and the rotated substrate is transferred to the deposition process chamber for the deposition process while being attached to the carrier C, and the deposition process of the substrate proceeds.

Here, the inside of the process chamber 200 can be formed with a vacuum atmosphere so that the flip process for the carrier C can proceed reliably.

To this end, a vacuum pump (not shown) may be connected to one side of the process chamber 200 as a means for maintaining the inside of the process chamber 200 in a vacuum atmosphere. Here, the vacuum pump (not shown) may be a so-called turbo pump.

Referring to FIG. 1, a carrier flip unit 300 is disposed within the process chamber 200 and is provided to seat the carrier C for rotation of the carrier C.

Here, the carrier flip unit 300 may include a carrier seating member 310 and a carrier seating groove 320.

1 and 3, the carrier seating member 310 is disposed inside the process chamber 200 so that the carrier C is seated, and one side of the carrier seating member 310 is coupled to the rotation unit 400. That is, the carrier seating member 310 is coupled to the rotation unit 400 that rotates along the rotation unit guide 500, and is configured to rotate in conjunction with the rotation of the rotation unit 400, .

The carrier seating groove 320 is formed in the carrier seating member 310 so that the carrier C is movably provided and the carrier C is mounted on the carrier seating groove 310 through the receiving opening 430 formed in the rotating unit 400 Enters the groove 320, moves along the carrier receiving groove 320, and is seated at a predetermined position (see FIG. 3).

1, a carrier deviation prevention unit 700 is provided to be coupled to the carrier seating member 310 to prevent the carrier C from being detached from the carrier seating member 310 upon rotation of the carrier C .

That is, when the carrier C is seated on the carrier seating member 310, the carrier seating member 310 is rotated by the rotation of the rotation unit 400, so that if the carrier C is not supported, The carrier C can be released from the carrier seating member 310 during the rotation of the carrier C so that the carrier detachment prevention unit 700 prevents the carrier C from coming off.

Here, the carrier separation prevention unit 700 may be configured to include the separation prevention member 710, the power transmission member 720, and the separation prevention member rotation axis 730. [

The release preventing member 710 is disposed to be in contact with the carrier C or to be spaced apart from the carrier C so as to prevent the carrier C from coming off.

3, the release preventing member 710 has a plurality of, for example, four (4) pieces, as shown in FIG. 3, and the release preventing member 710 contacts the carrier C to prevent the carrier C from coming off. In this case, when the carrier C is seated on the carrier seating member 310, four separation preventing members 710 are provided on each of the four corners of the carrier C, .

The description will be made as to the release preventing member 710 preventing the separation of the carrier C from the carrier C while being separated from the carrier C by a predetermined distance. When the carrier C is seated on the carrier seating member 310, The member 710 is driven to be spaced apart from the carrier C by a predetermined distance.

Here, if the separation preventing member 710 is spaced apart from the carrier C by a predetermined distance, the carrier C may be finely moved after it is seated on the carrier seating member 310, It is possible to prevent the carrier C from being separated from the carrier seating member 310 beyond the predetermined range.

Referring to FIG. 3, the power transmitting member 720 is coupled to the separation preventing member 710 and is moved by receiving power from the cylinder 800 for the carrier separation preventing unit. When the power transmitting member 720 moves, The release preventing member 710 coupled to the release member 720 also moves in conjunction therewith.

Here, the power transmitting member 720 and the release preventing member 710 may be separately formed and then joined together, or may be integrally formed.

3, the release preventing member rotating shaft 730 is coupled to at least one of the escape prevention member 710 and the power transmitting member 720. [

That is, the cylinder 800 for the carrier detachment prevention unit, which is disposed so as to come into contact with or detachable from the power transmitting member 720 and provides power to the power transmitting member 720, contacts the power transmitting member 720, The release preventing member rotating shaft 730 coupled to the power transmitting member 720 rotates.

When the release preventing member rotating shaft 730 is rotated, the release preventing member 710 coupled to the release preventing member rotating shaft 730 rotates along the release preventing member rotating shaft 730 in conjunction therewith.

1, before the carrier C is seated on the carrier seating member 310 of the carrier flip unit 300, the cylinder 800 for the carrier separation preventing unit is provided with the power transmitting member 720, As shown in Fig.

When the carrier C is moved into the carrier flip unit 300 in a state in which the cylinder 800 for the carrier departure prevention unit is disengaged from the power transmitting member 720, May collide with the release preventing member (710) of the release mechanism (700).

2, a cylinder 800 for a carrier separation preventing unit is brought into contact with the power transmitting member 720 of the detachment preventing unit 700 to press the power transmitting member 720, The separation preventing member 710 coupled to the power transmitting member 720 rotates and moves along the separation preventing member rotating shaft 730 so that the carrier C does not collide with the separation preventing member 710, So that it can enter the unit 300.

3 and 4, when the carrier C is seated on the carrier seating member 310, the cylinder 800 for the carrier separation preventing unit is disengaged from the power transmitting member 720. In this case, , The release preventing member 710 rotates along the release preventing member rotating shaft 730 and is held in contact with the carrier C or spaced apart from the carrier C by a predetermined distance.

Thereby, as described above, the release preventing member 710 has an effect of preventing the carrier C from being detached from the carrier seating member 310. [

Referring to FIG. 1, a rotation unit 400 is disposed inside the process chamber 200 and is rotatable along a rotation unit guide 500 described later.

That is, the rotation unit 400 is not coupled to the rotation shaft but is coupled to the rotation unit guide 500 and rotates. The carrier flip unit 300 described above is coupled to the rotation unit 400 to rotate the rotation unit 400 So that it is possible to prevent slippage and twisting phenomenon in the rotating portion by eliminating the offset load phenomenon that may occur during the rotation.

The rotation unit 400 is formed with openings 430 and 440 through which the carrier C can enter and exit so that the carrier C can enter the carrier seating member 310.

As shown in FIG. 1, for example, when the rotating units 400 are disposed in pairs, the rotating unit 400 is provided with a receiving opening 430 through which the carrier C can be drawn And the other rotation unit 400 may be provided with a drawing opening 440 through which the carrier C can be drawn.

That is, when the carrier C is rotated after the carrier C is seated on the carrier seating member 310 through the inlet opening 430 formed in one rotation unit 400, C are drawn out through the draw-out opening 440 formed in the other rotation unit 400.

1, the rotation unit 400 includes a rotation plate 410 to which the carrier seating member 310 of the carrier flip unit 300 is coupled, a gear teeth member 420). The rotation plate 410 may have a circular cross section.

Here, the rotation unit 400 may be coupled to the rotation unit guide 500 for guiding the rotation of the rotation unit 400 to rotate.

5, the rotation unit guide 500 includes a guide rail 510 coupled to the rotation unit 400, a frame 500 disposed at one side of the guide rail 510 and disposed inside the process chamber 200, 210 and the other side of which is fixedly coupled.

The guide rail 510 may be formed in a circular shape and the guide rail 510 is coupled to the rotation unit 400. When the guide rail 510 is rotated along the inclined guide 520, The rotation unit 400 coupled to the rotation unit 510 also rotates.

The inclined guide 520 may be configured to include a housing member 521 coupled to the frame 210 and a rotating ball 522 disposed and rotated in the housing member 521, As described above, a plurality of inclination guides 520 are fixedly coupled to the frame 210.

The rotating ball 522 disposed inside the housing member 521 is in contact with the guide rail 510. Since the housing member 521 is fixedly coupled to the frame 210, The rotation unit 400 coupled to the guide rail 510 guides the rotation of the guide rail 510. The rotation of the rotation unit 400 is transmitted to the guide rail 510, And supports the load during rotation of the guide rail 510 to reduce friction.

On the other hand, a power supply unit 600 for rotating the rotation unit 400 may be coupled to the rotation unit 400. That is, the power providing unit 600 is coupled to the rotating unit 400 to provide a driving force by which the rotating unit 400 can rotate.

8 and 9, the power providing unit 600 includes a gear coupling member 610 connected to the gear teeth member 420 and a gear coupling member 610 pivotally coupled to the gear coupling member 610, And a main power source 630 that is coupled to the gear coupling member rotation shaft 620 and supplies power to the gear coupling member rotation shaft 620.

That is, when the main power source 630 including the motor and the like is rotated, the gear coupling member rotation shaft 620 coupled to the main power source 630 also rotates and is coupled to the gear coupling member rotation shaft 620 The gear coupling member 610 rotates in conjunction therewith.

Here, the gear coupling member 610 is coupled to the gear teeth member 420 of the rotation unit 400 to transmit rotational force, and the rotation unit 400 is coupled to the gear teeth member 420 through the gear coupling member 610. [ As shown in Fig.

The gear coupling member 610 may be provided as a needle bearing to reduce the friction that may occur between the gear coupling member 610 and the gear teeth member 420.

9, the power providing units 600 may be provided in pairs to be coupled to the gear teeth member 420 below the gear teeth member 420, in which case the power providing unit 600 may be coupled to the process chamber < RTI ID = (Not shown).

Here, when the power providing unit 600 is installed outside the process chamber 200, it is easy to process various cables coupled to the power providing unit 600.

7 and 8, when the gear unit 420 and the gear coupling member 610 are engaged to rotate the rotation unit 400, the rotation of the carrier flip unit 300 After the rotation of the gear member 450 is completed, backlash between the gear teeth member 420 and the gear coupling member 610 may not cause the carrier flip unit 300 to stop at a predetermined stop position and an error may be generated.

In order to prevent this, the anti-backlash cylinder 900 may be disposed so as to be contactable with or detachable from the carrier flip unit 300. The anti-backlash cylinders 900 may be provided in a pair so as to be in contact with one side of the carrier flip unit 300 and the other side opposite from the one side.

6, after the carrier flip unit 300 is completely rotated, even if the carrier seating member 310 is moved out of the predetermined stop position by the backlash, the carrier positioning member 310 is disposed on both sides of the carrier seating member 310 The backlash preventing cylinder 900 presses the carrier seating member 310 with an even force so that the carrier flip unit 300 is balanced so that the carrier flip unit 300 accurately stops at a preset stop position do.

When the backlash preventing cylinder 900 presses the carrier seating member 310 to balance the carrier flip unit 300, the carrier seating member 310 is aligned with the carrier withdrawing rail (not shown) .

Hereinafter, referring to the drawings, the carrier rotation device 100 according to an embodiment of the present invention can eliminate slipping phenomenon and twisting phenomenon in a rotating portion by removing an offset load phenomenon that may occur during rotation, The operation and effect of the carrier flip unit 300 to be aligned with the carrier draw-out rail (not shown) after the rotation of the flip unit 300 will be described

Referring to FIG. 1, the carrier C may enter the carrier flip unit 300 within the process chamber 200 for a flip process.

2, a cylinder 800 for a carrier separation prevention unit is brought into contact with the power transmitting member 720 to prevent the collision between the carrier C and the release preventing member 710, so that the power transmitting member 720 The release preventing member 710 coupled to the power transmitting member 720 rotates along the release preventing member rotating shaft 730 so that the carrier C rotates along with the carrier of the carrier flip unit 300 So that it is possible to enter the seating member 310.

3 and 4, after the carrier C enters the carrier seating member 310, the cylinder 800 for the carrier separation preventing unit is retracted and released from the power transmitting member 720, It is possible to prevent the member 710 from contacting the carrier C or being spaced apart from the carrier C by a predetermined distance so that the carrier C is separated from the carrier seating member 310. [

5, when the carrier C is mounted on the carrier seating member 310 and is provided so as to be prevented from being detached from the carrier seating member 310 by the carrier deviation preventing unit 700, Power is supplied to the unit 400 to rotate the rotation unit 400.

Here, the rotation unit 400 is formed with a gear teeth member 420, and the gear coupling member 610 of the power providing unit 600 is coupled to the gear teeth member 420 to transmit rotational force.

The guide rail 510 is coupled to the rotation unit 400. The guide rail 510 is coupled to the inclination guide 520 and rotates along the inclination guide 520. Therefore, It is possible to remove the middle phenomenon.

6, the carrier seating member 310 coupled to the rotation unit 400 rotates so that the upper and lower sides of the carrier C are turned over. Here, when the backlash preventing cylinder 900 is mounted on the carrier seating member 310, So that the carrier flip unit 300 is balanced.

And, referring to FIG. 7, the rotated carrier C is conveyed to another process along the carrier draw-out rail (not shown).

As described above, the slip phenomenon and the twisting phenomenon are prevented from occurring in the rotating portion by eliminating the offset load phenomenon that may occur during the rotation, and after the rotation of the carrier flip unit 300, the carrier flip unit 300 takes out the carrier (Not shown) so that breakage of the drive shaft, motor, etc. can be prevented and damage to the carrier C can be prevented.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: carrier rotation device 200: process chamber
300: Carrier flip unit 310: Carrier seating member
320: carrier seating groove 400: rotating unit
410: rotating plate 420: gear teeth member
500: rotation unit guide 510: guide rail
520: inclination guide 521: housing member
522: rotating ball 600: power providing unit
610: Gear coupling member 620: Gear coupling member rotation shaft
630: main power source 700: carrier separation prevention unit
710: release preventing member 720: power transmitting member
730: Release preventing member rotating shaft 800: Cylinder separation preventing unit cylinder
900: Anti-backlash cylinder

Claims (18)

A process chamber in which rotation of a carrier to which a substrate is attached is advanced;
A carrier flip unit disposed within the process chamber and configured to receive the carrier for rotation of the carrier; And
And a rotation unit to which the carrier flip unit is coupled and rotatably provided, the carrier unit having an opening through which the carrier can be inserted and removed. The method according to claim 1,
The rotation unit includes:
A rotation plate to which the carrier flip unit is coupled; And
And a gear teeth member formed along the circumference of the rotating plate. 3. The method of claim 2,
Wherein the rotation plate is circular in cross section. The method according to claim 1,
And a rotation unit guide coupled to the rotation unit to guide rotation of the rotation unit. 5. The method of claim 4,
The rotation unit guide
A guide rail coupled to the rotating unit; And
And a tilting guide having one side coupled to the guide rail and the other side fixedly coupled to a frame disposed in the process chamber. 6. The method of claim 5,
Wherein the guide rail is provided in a circular shape. 6. The method of claim 5,
Wherein the at least one inclined guide is provided on at least one of the guide rails and is coupled to the guide rail along the guide rails. 8. The method according to any one of claims 5 to 7,
The inclination guide
A housing member coupled to the frame; And
And a rotating ball disposed inside the housing member and contacting the guide rail, the rotating ball being rotated when the guide rail is moved. 3. The method of claim 2,
Further comprising a power providing unit coupled to said rotating unit to provide a driving force for rotating said rotating unit. 10. The method of claim 9,
The power providing unit includes:
A gear couple member connected to the gear teeth member;
A gear coupling member pivot shaft rotatably coupled to the gear coupling member; And
And a main power source coupled to the gear coupling member rotation shaft and supplying power to the gear coupling member rotation shaft. 11. The method of claim 10,
Wherein the gear coupling member is provided as a needle bearing. The method according to claim 1,
The carrier flip unit includes:
A carrier seating member coupled to the rotating unit and on which the carrier is seated; And
And a carrier receiving groove formed in the carrier receiving member and provided with a carrier movable. 13. The method of claim 12,
Further comprising a carrier separation preventing unit coupled to the carrier seating member to prevent the carrier from being separated from the carrier seating member upon rotation of the carrier. 14. The method of claim 13,
Further comprising a cylinder for the carrier separation prevention unit which is disposed so as to be contactable with or detachable from the carrier separation prevention unit to provide power to the carrier separation prevention unit. 15. The method of claim 14,
The carrier separation prevention unit includes:
A separation preventing member disposed in contact with the carrier or spaced apart from the carrier to prevent separation of the carrier;
A power transmission member coupled to the release preventing member and receiving power when the cylinder for the carrier departure prevention unit is contacted; And
And a release preventing member pivot shaft coupled to at least one of the release preventing member and the power transmitting member, the release preventing member pivotable to allow the release preventing member to pivot. 14. The method of claim 13,
Wherein the plurality of carrier detent preventing units are provided at corners of the carrier. The method according to claim 10 or 11,
Further comprising a backlash preventing cylinder arranged so as to be able to come into contact with or contact with the carrier flip unit in order to prevent an error from occurring in the carrier flip unit due to backlash after rotation of the carrier flip unit Rotating device. 18. The method of claim 17,
Wherein the backlash preventing cylinder is provided in a pair so as to be brought into contact with one side of the carrier flip unit and the other side opposite from the one side.

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