CN111304625A - Band saw blade coating equipment and method - Google Patents
Band saw blade coating equipment and method Download PDFInfo
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- CN111304625A CN111304625A CN202010161865.1A CN202010161865A CN111304625A CN 111304625 A CN111304625 A CN 111304625A CN 202010161865 A CN202010161865 A CN 202010161865A CN 111304625 A CN111304625 A CN 111304625A
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- 238000000576 coating method Methods 0.000 title claims abstract description 185
- 239000011248 coating agent Substances 0.000 title claims abstract description 148
- 238000000034 method Methods 0.000 title claims abstract description 51
- 238000001816 cooling Methods 0.000 claims abstract description 133
- 238000010438 heat treatment Methods 0.000 claims abstract description 53
- 230000008569 process Effects 0.000 claims abstract description 29
- 230000007704 transition Effects 0.000 claims description 75
- 239000007789 gas Substances 0.000 claims description 47
- 230000001681 protective effect Effects 0.000 claims description 20
- 238000003860 storage Methods 0.000 claims description 17
- 238000005086 pumping Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000010924 continuous production Methods 0.000 abstract description 5
- 238000004321 preservation Methods 0.000 abstract description 4
- 239000013077 target material Substances 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C15/00—Enclosures for apparatus; Booths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
- B05D3/0218—Pretreatment, e.g. heating the substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
- B05D3/0426—Cooling with air
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The band saw blade coating equipment and the process method provided by the invention adopt a continuous cavity design, so that a plurality of working procedures such as heating, vacuumizing, heat preservation (coating), cooling and the like are effectively connected after a workpiece is arranged in the cavity, semi-continuous production is formed, the plurality of working procedures such as heating, vacuumizing, heat preservation (coating), cooling and the like can be simultaneously carried out, and at most, three batches (or five batches) of band saw blades are simultaneously treated, so that most of waiting time for heating, cooling and vacuumizing is saved, the utilization rate of the equipment is improved, the production efficiency is improved, and the coating cost of the band saw blades is effectively reduced. Meanwhile, the size of the cavity is also designed according to the size of the band saw blade, so that the space is saved, and the equipment utilization rate and the production efficiency are improved.
Description
Technical Field
The invention relates to the field of saw blade coatings, in particular to band saw blade coating equipment and a band saw blade coating method.
Background
At present, the domestic coated band saw blade products are very few and occasionally visible from European and American manufacturers, and the domestic band saw blade manufacturers do not provide the coated band saw blade products on a large scale. Patents CN201220701751.2, CN201220701897.7 and CN200720154484.0 disclose respective coated band saw blade products, but do not describe the apparatus and process for coating thereof.
① gasifying the surface of a target material, such as sublimation of the target material in a high-temperature and vacuum environment, magnetron sputtering is realized by ion bombardment on the surface of the target material under a magnetic field, and ion plating is realized by ion bombardment on the surface of the target material under a gas discharge. ② directionally transporting gasified atoms to the direction of a workpiece. ③ gasified atoms are deposited on the surface of the workpiece, so that a required film is formed.
Disclosure of Invention
In order to overcome the defects of low production efficiency and high coating cost in the prior art, the invention aims to provide band saw blade coating equipment and a process method.
In order to achieve the purpose, the invention adopts the technical scheme that:
a band saw blade coating equipment comprises a chamber and a gate, and is structurally characterized in that the chamber is provided with a plurality of chambers which are connected in sequence, the chamber sequentially comprises a preheating chamber, a coating chamber and a cooling chamber from left to right, and the gate is provided with a plurality of chambers which are integrally formed into a closed space sequentially comprising the first gate, the preheating chamber, the third gate, the coating chamber, the fourth gate, the cooling chamber and the sixth gate from left to right; a heating device is arranged in the preheating chamber, and a vacuumizing device is externally connected; a heating device and a target material are arranged in the coating chamber, and a vacuumizing device is externally connected; the cooling chamber is internally provided with a heating device and a cooling device, and is externally connected with a vacuumizing device and a gas storage tank.
All gates can be opened and closed, band saw blades can be transferred among different chambers, the heating device can enable the temperature to rise to the temperature required by the coating, the vacuumizing equipment can enable the vacuum degree in the chambers to meet the high vacuum requirement required by the coating, the gas storage tank is used for filling protective gas to avoid the oxidation of the band saw blades, and the preheating chamber is used for enabling the temperature of a workpiece to rise to the temperature required by the coating and enabling the vacuum degree to meet the high vacuum requirement required by the coating. The coating chamber is used for coating a hard coating on the surface of a workpiece, the temperature of the coating chamber is always kept at the temperature required by the coating process, the vacuum degree is always kept at the vacuum degree required by the coating process, and the coating is realized by arranging a target material in the coating chamber. The cooling chamber has the functions of vacuumizing and heating, ensures that the vacuum degree and the temperature in the cooling chamber are consistent with those in the coating chamber when the band saw blade is transferred between the coating chamber and the cooling chamber, and simultaneously plays a role in cooling, so that the temperature of the workpiece is reduced to room temperature under the action of circulating gas. Adopt above-mentioned equipment to carry out the coating of band saw blade, through the relative position and the time control of four processes of rational arrangement intensification, evacuation, coating, cooling, make four processes of intensification, evacuation, coating, cooling carry out in proper order or go on simultaneously, can practice thrift the time of middle process wait greatly. Meanwhile, the size of the cavity is also designed according to the size of the band saw blade, so that the space is saved, and the equipment utilization rate and the production efficiency are improved.
Further, the gas storage tank is filled with a protective gas, and preferably, the protective gas is an inert gas and/or a reducing gas.
Furthermore, the cooling device is a fan, so that the gas inside the cooling chamber forms circulating convection to accelerate the temperature reduction.
Furthermore, a mechanical arm is arranged between every two adjacent chambers, and a support frame is arranged in each chamber. The band saw blade is transferred between different chambers through the mechanical arm, and the band saw blade is positioned on the supporting frame.
According to the embodiment of the invention, the invention can be further optimized, and the following is the technical scheme formed after optimization:
a band saw blade coating equipment comprises a chamber and a gate, and is structurally characterized in that the chamber is provided with a plurality of chambers which are sequentially connected, the chamber sequentially comprises a preheating chamber, a preheating transition chamber, a coating chamber, a cooling transition chamber and a cooling chamber from left to right, and the gate is provided with a plurality of gates which integrally form a closed space sequentially comprising a first gate, the preheating chamber, a second gate, the preheating transition chamber, a third gate, the coating chamber, a fourth gate, the cooling transition chamber, a fifth gate, the cooling chamber and a sixth gate from left to right; the preheating chamber is internally provided with a heating device and is externally connected with a gas storage tank; a heating device is arranged in the preheating transition chamber, and a vacuumizing device is externally connected; a heating device and a target material are arranged in the coating chamber, and a vacuumizing device is externally connected; a heating device is arranged in the cooling transition chamber, and a vacuumizing device is externally connected; and a cooling device is arranged in the cooling chamber and is externally connected with a gas storage tank. The function of the preheating chamber is to raise the temperature of the workpiece to the temperature required by the coating, and the function of the preheating transition chamber is to make the vacuum degree reach the high vacuum requirement required by the coating. The coating chamber is used for coating the surface of the workpiece with the hard coating, the temperature of the coating chamber is always kept at the temperature required by the coating process, and the vacuum degree is always kept at the vacuum degree required by the coating process. The cooling transition chamber takes on the bearing function, and the purpose is to prevent the protective gas in the cooling chamber from entering the coating chamber, thereby ensuring the high vacuum degree of the coating chamber. The cooling chamber has the function of cooling, so that the temperature of the workpiece is reduced to room temperature under the action of the circulating gas.
Further, the gas storage tank is filled with a protective gas, and preferably, the protective gas is an inert gas and/or a reducing gas.
Furthermore, the cooling device is a fan, so that the gas inside the cooling chamber forms circulating convection to accelerate the temperature reduction.
Furthermore, a mechanical arm is arranged between every two adjacent chambers, and a support frame is arranged in each chamber. The band saw blade is transferred between different chambers through the mechanical arm, and the band saw blade is positioned on the supporting frame.
Based on the same inventive concept, the invention also provides a band saw blade coating method, which is characterized by comprising the following steps:
and starting heating devices and vacuumizing equipment of the coating chamber and the cooling chamber to start the heating of the coating chamber and the cooling chamber until the temperature required by the coating process is reached, and simultaneously, the vacuum degree reaches the requirement of the coating process.
And opening the first gate, moving the band saw blade into the support frame in the preheating chamber, closing the first gate, starting a vacuumizing device in the preheating chamber to enable the vacuum degree in the preheating chamber to meet the requirements of the coating process, and starting a heating device in the preheating chamber to enable the preheating chamber to start to heat up until the temperature required by the coating process.
And opening a third gate, moving the band saw blade in the preheating chamber to the support frame of the coating chamber by using a mechanical arm, and closing the third gate, wherein the temperature and the vacuum degree in the coating chamber and the preheating chamber are required to be respectively consistent and reach the coating process requirements.
And (3) carrying out coating treatment on the band saw blade in the coating chamber, realizing coating by using the target material, and coating according to the coating process requirements until the coating is finished.
And opening a fourth gate, moving the band saw blade in the coating chamber to the support frame of the cooling chamber by using a mechanical arm, and closing the fourth gate, wherein the vacuum degrees and the temperatures of the coating chamber and the cooling chamber are required to be respectively consistent.
And closing the heating device and the vacuumizing equipment of the cooling chamber, filling the protective gas into the cooling chamber through a gas storage tank, and opening the cooling device to reduce the temperature of the cooling chamber to below 150 ℃.
And opening a sixth gate, taking out the band saw blade in the cooling chamber, closing the sixth gate, closing the cooling device, stopping filling the protective gas, and re-opening the heating device and the vacuumizing equipment of the cooling chamber.
And further, after the band saw blade in the preheating chamber is moved into the coating chamber, the vacuumizing equipment and the heating device of the preheating chamber are closed, the first gate is opened, a new band saw blade is moved into the preheating chamber, the first gate is closed, and the subsequent steps are sequentially carried out on the new band saw blade.
In the process method, when the first batch of band saw blades are moved into the coating chamber from the preheating chamber, the second batch of band saw blades can be moved into the preheating chamber for preheating, so that the preheating process of the second batch of band saw blades and the coating process of the first batch of band saw blades can be synchronously performed, and the waiting time in the middle process is saved. When the first batch of band saw blades are moved into the cooling chamber from the coating chamber, the second batch of band saw blades can be synchronously moved into the coating chamber from the preheating chamber, and at the moment, the third batch of band saw blades can be moved into the preheating chamber to be circulated in sequence. By adopting the semi-continuous production process, at most three batches of band saw blades can be simultaneously carried out in the equipment, and the production efficiency is greatly improved.
Based on the same inventive concept, the invention also provides a band saw blade coating method, which is characterized by comprising the following steps:
starting the heating devices in the preheating transition chamber, the coating chamber and the cooling transition chamber, starting the vacuumizing devices of the coating chamber and the cooling transition chamber, and filling the protective gas into the preheating chamber and the cooling chamber; and starting the preheating transition chamber, the coating chamber and the cooling transition chamber to heat up to the temperature required by the coating process, so that the vacuum degrees in the coating chamber and the cooling transition chamber meet the requirement of the coating process, and the preheating chamber and the cooling chamber are always kept at positive pressure.
And opening the first gate, moving the band saw blade into the preheating chamber, closing the first gate, and starting a heating device in the preheating chamber to raise the temperature in the preheating chamber to the temperature required by the coating process.
And opening a second gate, moving the band saw blade in the preheating chamber into the preheating transition chamber, and closing the second gate, wherein the temperature in the preheating transition chamber is ensured to reach the temperature required by the coating process. And starting the vacuumizing equipment in the preheating transition chamber to enable the vacuum degree in the preheating transition chamber to meet the requirements of the coating process.
And opening a third gate, moving the band saw blade in the preheating transition chamber into the coating chamber, and closing the third gate, wherein the vacuum degrees of the preheating transition chamber and the coating chamber are required to meet the requirements of the coating process, and the temperatures of the preheating transition chamber and the coating chamber reach the temperatures required by the coating process.
And (3) carrying out coating treatment on the band saw blade in the coating chamber, realizing coating by using the target material, and coating according to the coating process requirements until the coating is finished.
And opening a fourth gate, moving the band saw blade in the coating chamber into the cooling transition chamber, and closing the fourth gate, wherein the vacuum degrees of the cooling transition chamber and the coating chamber are required to meet the vacuum degree requirement of the coating process, and the temperature of the cooling transition chamber and the coating chamber reaches the temperature required by the coating process.
And opening a fifth gate, moving the band saw blade in the cooling transition chamber into the cooling chamber, closing the fifth gate, and then opening a cooling device in the cooling chamber to form gas circulation in the cooling chamber and enable the vacuum degree of the cooling transition chamber to meet the requirements of the coating process.
And opening the sixth gate when the process temperature is reduced to be close to the room temperature, taking out the band saw blade, and closing the sixth gate.
And further, after the band saw blade in the preheating chamber is moved into the preheating transition chamber, closing the heating device of the preheating chamber, opening the first gate, moving a new band saw blade into the preheating chamber, closing the first gate, and sequentially performing subsequent steps on the new band saw blade.
And furthermore, when the fifth gate is opened, the cooling chamber is not vacuum, so that the vacuum degree of the cooling transition chamber communicated with the cooling chamber is influenced, and the vacuumizing device is opened again, so that the vacuum degree of the cooling transition chamber can be recovered to the same requirement as that of the coating chamber, and the vacuum degree of the cooling transition chamber is ensured.
In the process method, when the first batch of band saw blades are moved into the preheating transition chamber from the preheating chamber, the second batch of band saw blades can be moved into the preheating chamber for preheating, so that the preheating of the second batch of band saw blades and the vacuumizing process of the first batch of band saw blades can be synchronously performed, and the waiting time in the middle process is saved. When the first batch of band saw blades are moved into the coating chamber from the preheating transition chamber, the second batch of band saw blades can be synchronously moved into the preheating transition chamber from the preheating chamber, and at the moment, the third batch of band saw blades can be moved into the preheating chamber to be sequentially circulated. By adopting the semi-continuous production process, five batches of band saw blades can be simultaneously carried out at most, and the production efficiency is greatly improved.
In this way,
compared with the prior art, the invention has the beneficial effects that:
according to the band saw blade coating equipment and the process method, a plurality of working procedures such as heating, vacuumizing, heat preservation (coating), cooling and the like are effectively connected after a workpiece is arranged in a cavity, semi-continuous production is formed, the plurality of working procedures such as heating, vacuumizing, heat preservation (coating), cooling and the like can be simultaneously carried out, and at most, three batches (or five batches) of band saw blades are simultaneously processed, so that most of the waiting time for heating, cooling and vacuumizing is saved, the utilization rate of the equipment is improved, the production efficiency is improved, and the coating cost of the band saw blades is effectively reduced. Meanwhile, the size of the cavity is also designed according to the size of the band saw blade, so that the space is saved, and the equipment utilization rate and the production efficiency are improved.
Drawings
FIG. 1 is a front view of a first embodiment of the present invention;
FIG. 2 is a top view of the first embodiment of the present invention;
FIG. 3 is a front view of a second embodiment of the present invention;
fig. 4 is a top view of a second embodiment of the present invention.
In the figure
1-a chamber; 2-a gate; 3-a target material; 4-a mechanical arm; 5-a support frame; 6-band saw blade;
101-a preheating chamber; 102-preheating a transition chamber; 103-a coating chamber; 104-cooling the transition chamber; 105-a cooling chamber;
201-a first gate; 202-a second gate; 203-a third gate; 204-a fourth gate; 205-a fifth gate; 206-sixth gate.
Detailed Description
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. For convenience of description, the words "upper", "lower", "left" and "right" in the following description are used only to indicate the correspondence between the upper, lower, left and right directions of the drawings themselves, and do not limit the structure.
The first embodiment:
a band saw blade coating apparatus, as shown in fig. 1 and fig. 2, comprising a plurality of chambers and a plurality of gates, wherein the chambers are connected in sequence, the chambers comprise a preheating chamber 101, a coating chamber 103 and a cooling chamber 105 in sequence from left to right, and the gates comprise a plurality of gates, and form a closed space comprising the first gate 201, the preheating chamber 101, the third gate 203, the coating chamber 103, the fourth gate 204, the cooling chamber 105 and the sixth gate 206 in sequence from left to right; a heating device is arranged in the preheating chamber 101, and is externally connected with a vacuumizing device through a pipeline; a heating device and a target 3 are arranged in the coating chamber 103, and a vacuumizing device is connected outside through a pipeline; the cooling chamber 105 is internally provided with a heating device and a cooling device, and is externally connected with a vacuumizing device and an air storage tank through pipelines. The gas storage tank is filled with protective gas, and the protective gas is preferably N2Ar, etc. inert gas and/or H2Reducing gas and protecting gas to avoid oxidation of band saw blade. The cooling device is a fan. Every two adjacent cavity between be equipped with arm 4, accomplish the transfer of band saw blade between different cavities through the arm, every be equipped with support frame 5 in the cavity.
The method based on the band saw blade coating equipment comprises the following steps:
starting the heating devices and the vacuum-pumping devices of the coating chamber 103 and the cooling chamber 105 to cool the coating chamberThe temperature of the chamber is raised to 400-600 ℃ required by the coating process, and the vacuum degree reaches 1 × 10 of the requirement of the coating process-3~1Pa。
Opening the first gate 201, moving the band saw blade into the support frame 5 in the preheating chamber 101, closing the first gate 201, and opening the vacuum-pumping equipment in the preheating chamber 101 to make the vacuum degree in the preheating chamber reach 1 × 10 of the coating process requirement-3And (4) starting a heating device in the preheating chamber 101 under the pressure of 1Pa, so that the preheating chamber starts to heat up to the temperature of 400-600 ℃ required by the coating process, and the step can be performed synchronously with the previous step.
When the temperature of the coating chamber and the preheating chamber reaches 400-600 ℃ required by the coating process, and the vacuum degree reaches 1 multiplied by 10-3And when the pressure is 1Pa, opening a third gate 203, moving the band saw blade in the preheating chamber 101 to a support frame 5 of the coating chamber 103 by using a mechanical arm 4, and closing the third gate 203.
And (3) carrying out coating treatment on the band saw blade in the coating chamber, coating the band saw blade in the coating chamber by using the target material, and coating according to the coating process requirements until the coating is finished.
When the vacuum degrees and the temperatures of the cooling chamber and the coating chamber are respectively consistent, the fourth gate 204 is opened, the band saw blade in the coating chamber 103 is moved to the support frame 5 of the cooling chamber 105 by the mechanical arm 4, and the fourth gate 204 is closed.
And closing the heating device and the vacuumizing equipment of the cooling chamber 105, filling the protective gas into the cooling chamber 105 through the gas storage tank, and starting the cooling device to reduce the temperature of the cooling chamber to be below 150 ℃.
And opening a sixth gate 206, taking out the band saw blade in the cooling chamber 105, closing the sixth gate 206, closing the cooling device, stopping filling the protective gas, and restarting a heating device and a vacuumizing device of the cooling chamber 105.
Further, after the band saw blade in the preheating chamber 101 is moved into the coating chamber 103, the vacuum-pumping device and the heating device of the preheating chamber 101 are closed, the first gate 201 is opened, when the temperature of the preheating chamber is reduced to below 150 ℃, a new band saw blade is moved into the preheating chamber 101, the first gate 201 is closed, and the subsequent steps are sequentially performed on the new band saw blade.
In the process method, when the preheating of the first batch of band saw blades is finished and the coating is carried out, a new batch of band saw blades can be moved into the preheating chamber for the preheating process, so that the preheating of the new batch of band saw blades and the coating of the first batch of band saw blades can be carried out synchronously, and the waiting time in the middle process is saved. By adopting the semi-continuous production process method, three batches of band saw blades can be simultaneously carried out at most, and the production efficiency is greatly improved.
Taking a general coating apparatus with a chamber size of 600 x 800 (41 x 1.3 gauge band saw blade as an example), the annual capacity is about 18 ten thousand meters, and an average production tray takes about 200min (two trays can be produced in one furnace, and the time for one furnace is about 400 min). The equipment and process of this example were used to coat band saw blades (assuming that the diameter of the band saw blade coil was also 600mm, the band saw blade specification was 41 x 1.3), the annual capacity was 20 km, and it took about 180min to produce a disc of coated band saw blade. In contrast, the apparatus and method of this patent provided a 12% increase in annual production and a 10% reduction in the time required to produce a disc coated band saw blade.
Second embodiment:
a band saw blade coating apparatus, as shown in fig. 3 and 4, comprising a chamber and a gate, wherein the chamber is provided with a plurality of chambers and is connected in sequence, the chamber comprises a preheating chamber 101, a preheating transition chamber 102, a coating chamber 103, a cooling transition chamber 104 and a cooling chamber 105 in sequence from left to right, the gate is provided with a plurality of chambers, and forms a closed space comprising the first gate 201, the preheating chamber 101, the second gate 202, the preheating transition chamber 102, the third gate 203, the coating chamber 103, the fourth gate 204, the cooling transition chamber 104, the fifth gate 205, the cooling chamber 105 and the sixth gate 206 in sequence from left to right; a heating device is arranged in the preheating chamber 101, and an air storage tank is externally connected; a heating device is arranged in the preheating transition chamber 102, and a vacuumizing device is externally connected; a heating device and a target 3 are arranged in the coating chamber 103, and a vacuumizing device is connected externally; a heating device is arranged in the cooling transition chamber 104 and is externally connected with a vacuumizing device; the cooling chamber 105 is internally provided withA cooling device is arranged and is externally connected with a gas storage tank; the gas storage tank is filled with protective gas, preferably N2Ar, etc. inert gas and/or H2Reducing gas and protecting gas to avoid oxidation of band saw blade. The cooling device is a fan. Every two adjacent cavity between be equipped with arm 4, accomplish the transfer of band saw blade between different cavities through the arm, every be equipped with support frame 5 in the cavity.
The method based on the band saw blade coating equipment comprises the following steps:
starting the heating devices in the preheating transition chamber 102, the coating chamber 103 and the cooling transition chamber 104 to heat the preheating transition chamber, the coating chamber and the cooling transition chamber to the temperature of 400-600 ℃ required by the coating process, and starting the vacuum pumping equipment in the coating chamber 103 and the cooling transition chamber 104 to ensure that the vacuum degree of the vacuum pumping equipment reaches 1 × 10 of the requirement of the coating process-3And (4) charging the protective gas into the preheating chamber 101 and the cooling chamber 105 at 1Pa, and keeping the pressure at the positive pressure all the time.
Opening the first gate 201, moving the band saw blade into the preheating chamber 101, closing the first gate 201, and opening the heating device in the preheating chamber 101; the preheating chamber is heated to the temperature of 400-600 ℃ required by the coating process, and the step can be performed synchronously with the previous step.
When the temperature in the preheating transition chamber reaches 400-600 ℃ required by the coating process, the second gate 202 is opened, the band saw blade in the preheating chamber 101 is moved into the preheating transition chamber 102, the second gate 202 is closed, the vacuumizing equipment in the preheating transition chamber 102 is opened until the vacuum degree reaches 1 × 10 of the coating process requirement-3~1Pa。
When the temperature in the coating chamber and the preheating transition chamber reaches 400-600 ℃ required by the coating process, and the vacuum degree reaches 1 multiplied by 10-3And when the pressure is 1Pa, opening a third gate 203, moving the band saw blade in the preheating transition chamber 102 into the coating chamber 103, and closing the third gate 203.
And (3) carrying out coating treatment on the band saw blade in the coating chamber 103, realizing coating by the target in the coating chamber, and coating according to the coating process requirement until the coating is finished.
When the vacuum degrees and the temperatures of the cooling transition chamber and the coating chamber are respectively consistent, the fourth gate 204 is opened, the band saw blade in the coating chamber 103 is moved into the cooling transition chamber 104, and the fourth gate 204 is closed.
The fifth gate 205 is opened, the band saw blade in the cooling transition chamber 104 is moved into the cooling chamber 105, the fifth gate 205 is closed, and then the cooling device in the cooling chamber 105 is opened, so that the temperature of the cooling chamber is reduced to below 150 ℃.
The sixth shutter 206 is opened, the band saw blade is taken out, and the sixth shutter 206 is closed.
Further, after the band saw blade in the preheating chamber 101 is moved into the preheating transition chamber 102, the first gate 201 is opened, a new band saw blade is moved into the preheating chamber 101, the first gate 201 is closed, and the subsequent steps are sequentially performed on the new band saw blade.
Further, every time the band saw blade in the cooling transition chamber 104 moves into the cooling chamber 105, the vacuum pumping device of the cooling transition chamber 104 is opened after the fifth gate 205 is closed.
In the process method, when the first batch of band saw blades are moved into the preheating transition chamber from the preheating chamber, a new batch of band saw blades can be moved into the preheating chamber for the preheating process, so that the preheating of the new batch of band saw blades and the vacuumizing process of the first batch of band saw blades can be synchronously performed, and the waiting time in the middle process is saved. By adopting the process method, five batches of band saw blades can be carried out at most simultaneously, and the production efficiency is greatly improved.
Taking a general coating apparatus with a chamber size of 600 x 800 (41 x 1.3 gauge band saw blade as an example), the annual capacity is about 18 ten thousand meters, and an average production tray takes about 200min (two trays can be produced in one furnace, and the time for one furnace is about 400 min). The equipment and the method are adopted to coat the band saw blade (assuming that the diameter of a band saw blade coil is 600mm, the specification of the band saw blade is 41 x 1.3), the annual capacity can reach 28 ten thousand meters, and about 120min is required for producing a disc of coated band saw blade. In contrast, the apparatus and method of this patent increased annual yield by 55% and reduced the time required to produce a disc coated band saw blade by 40%.
The foregoing examples are set forth to illustrate the present invention more clearly and are not to be construed as limiting the scope of the invention, which is defined in the appended claims to which the invention pertains, as modified in all equivalent forms, by those skilled in the art after reading the present invention.
Claims (10)
1. A band saw blade coating apparatus comprising a chamber and a shutter, characterized in that the chamber is provided in plurality and connected in sequence, the chamber comprises a preheating chamber (101), a coating chamber (103), and a cooling chamber (105) in sequence from left to right, the shutter is provided in plurality and integrally forms a closed space comprising the first shutter (201), the preheating chamber (101), the third shutter (203), the coating chamber (103), the fourth shutter (204), the cooling chamber (105), and the sixth shutter (206) in sequence from left to right;
a heating device is arranged in the preheating chamber (101), and a vacuumizing device is externally connected;
a heating device and a target (3) are arranged in the coating chamber (103), and a vacuumizing device is connected outside;
the cooling chamber (105) is internally provided with a heating device and a cooling device and is externally connected with a vacuumizing device and an air storage tank.
2. A band saw blade coating equipment comprises a chamber and a gate, and is characterized in that the chamber is provided with a plurality of chambers which are connected in sequence, the chamber comprises a preheating chamber (101), a preheating transition chamber (102), a coating chamber (103), a cooling transition chamber (104) and a cooling chamber (105) from left to right, the gate is provided with a plurality of chambers, and a closed space which comprises the first gate (201), the preheating chamber (101), the second gate (202), the preheating transition chamber (102), the third gate (203), the coating chamber (103), the fourth gate (204), the cooling transition chamber (104), the fifth gate (205), the cooling chamber (105) and the sixth gate (206) from left to right is integrally formed;
a heating device is arranged in the preheating chamber (101), and is externally connected with a gas storage tank;
a heating device is arranged in the preheating transition chamber (102), and a vacuumizing device is externally connected;
a heating device and a target (3) are arranged in the coating chamber (103), and a vacuumizing device is connected outside;
a heating device is arranged in the cooling transition chamber (104), and a vacuumizing device is externally connected;
the cooling chamber (105) is internally provided with a cooling device and externally connected with an air storage tank.
3. The band saw blade coating apparatus according to any one of claims 1 to 2, wherein the gas tank is filled with a protective gas, preferably the protective gas is an inert gas and/or a reducing gas.
4. The band saw blade coating apparatus according to any one of claims 1 to 2, wherein the cooling device is a fan.
5. The band saw blade coating apparatus according to any one of claims 1 to 2, wherein a robot arm (4) is provided between each two adjacent chambers, and a support frame (5) is provided in each chamber.
6. A method of treatment using the band saw blade coating apparatus of claim 1, comprising the steps of:
starting heating devices and vacuumizing equipment of the coating chamber (103) and the cooling chamber (105);
opening a first gate (201), moving a band saw blade into a support frame (5) in the preheating chamber (101), closing the first gate (201), and opening vacuumizing equipment and a heating device in the preheating chamber (101);
opening a third gate (203), moving a band saw blade in the preheating chamber (101) to a support frame (5) of the coating chamber (103) by using a mechanical arm (4), and closing the third gate (203);
coating the band saw blade in the coating chamber (103);
opening a fourth gate (204), moving the band saw blade in the coating chamber (103) to a support frame (5) of the cooling chamber (105) by using a mechanical arm (4), and closing the fourth gate (204);
closing the heating device and the vacuumizing equipment of the cooling chamber (105), filling the protective gas into the cooling chamber (105) through a gas storage tank, and starting the cooling device;
and opening a sixth gate (206), taking out the band saw blade in the cooling chamber (105), closing the sixth gate (206), closing the cooling device, stopping filling the protective gas, and re-opening the heating device and the vacuum-pumping equipment of the cooling chamber (105).
7. The process for coating band saw blades according to claim 6, wherein every time a band saw blade in the preheating chamber (101) is moved into the coating chamber (103), the evacuation equipment and the heating device of the preheating chamber (101) are closed, the first shutter (201) is opened, a new band saw blade is moved into the preheating chamber (101), the first shutter (202) is closed, and the subsequent steps are sequentially performed on the new band saw blade.
8. A method of treatment using the band saw blade coating apparatus of claim 2, comprising the steps of:
starting the heating devices in the preheating transition chamber (102), the coating chamber (103) and the cooling transition chamber (104), starting the vacuumizing equipment of the coating chamber (103) and the cooling transition chamber (104), and filling the preheating chamber (101) and the cooling chamber (105) with the protective gas;
opening a first gate (201), moving a band saw blade into the preheating chamber (101), closing the first gate (201), and opening a heating device in the preheating chamber (101);
opening a second gate (202), moving the band saw blade in the preheating chamber (101) into the preheating transition chamber (102), closing the second gate (202), and opening the vacuumizing equipment in the preheating transition chamber (102);
opening a third gate (203), moving the band saw blade in the preheating transition chamber (102) into the coating chamber (103), and closing the third gate (203);
coating the band saw blade in the coating chamber (103);
opening a fourth gate (204), moving the band saw blade in the coating chamber (103) into the cooling transition chamber (104), and closing the fourth gate (204);
opening a fifth gate (205), moving the band saw blade in the cooling transition chamber (104) into the cooling chamber (105), closing the fifth gate (205), and then opening a cooling device in the cooling chamber (105);
and opening the sixth gate (206), taking out the band saw blade, and closing the sixth gate (206).
9. The process for coating band saw blades according to claim 8, wherein each time a band saw blade in the preheating chamber (101) is moved into the preheating transition chamber (102), the heating device of the preheating chamber (101) is closed, the first shutter (201) is opened, a new band saw blade is moved into the preheating chamber (101), the first shutter (201) is closed, and the subsequent steps are sequentially performed on the new band saw blade.
10. The process for coating a band saw blade according to any one of claims 8 to 9, wherein a vacuum device of the cooling transition chamber (104) is opened after the fifth shutter (205) is closed every time the band saw blade in the cooling transition chamber (104) is moved into the cooling chamber (105).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010161865.1A CN111304625A (en) | 2020-03-10 | 2020-03-10 | Band saw blade coating equipment and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010161865.1A CN111304625A (en) | 2020-03-10 | 2020-03-10 | Band saw blade coating equipment and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501574A (en) * | 2020-10-27 | 2021-03-16 | 东兴华鸿光学科技有限公司 | Coating equipment for sunglasses |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070163392A1 (en) * | 2006-01-13 | 2007-07-19 | Wikus-Sagenfabrik Wilhelm H. Kullmann Gmbh & Co. Kg | Saw blade including teeth having a cutting portion with a wearing protection layer |
| CN102560408A (en) * | 2012-01-20 | 2012-07-11 | 纳峰真空镀膜（上海）有限公司 | Continuous vacuum coating device |
| CN207331047U (en) * | 2017-05-19 | 2018-05-08 | 上海金科纳米涂层技术有限公司 | Tool surface continuous coating apparatus |
| CN108085654A (en) * | 2017-12-21 | 2018-05-29 | 深圳市三鑫精美特玻璃有限公司 | A kind of tilting continuous vacuum magnetic control sputtering film plating device and coating film production line |
-
2020
- 2020-03-10 CN CN202010161865.1A patent/CN111304625A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070163392A1 (en) * | 2006-01-13 | 2007-07-19 | Wikus-Sagenfabrik Wilhelm H. Kullmann Gmbh & Co. Kg | Saw blade including teeth having a cutting portion with a wearing protection layer |
| CN102560408A (en) * | 2012-01-20 | 2012-07-11 | 纳峰真空镀膜（上海）有限公司 | Continuous vacuum coating device |
| CN207331047U (en) * | 2017-05-19 | 2018-05-08 | 上海金科纳米涂层技术有限公司 | Tool surface continuous coating apparatus |
| CN108085654A (en) * | 2017-12-21 | 2018-05-29 | 深圳市三鑫精美特玻璃有限公司 | A kind of tilting continuous vacuum magnetic control sputtering film plating device and coating film production line |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112501574A (en) * | 2020-10-27 | 2021-03-16 | 东兴华鸿光学科技有限公司 | Coating equipment for sunglasses |
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Application publication date: 20200619 |