CN115287607B - High-efficiency turbine blade electron beam physical vapor deposition device - Google Patents
High-efficiency turbine blade electron beam physical vapor deposition device Download PDFInfo
- Publication number
- CN115287607B CN115287607B CN202210979992.1A CN202210979992A CN115287607B CN 115287607 B CN115287607 B CN 115287607B CN 202210979992 A CN202210979992 A CN 202210979992A CN 115287607 B CN115287607 B CN 115287607B
- Authority
- CN
- China
- Prior art keywords
- blade
- chamber
- coating
- telescopic arm
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005328 electron beam physical vapour deposition Methods 0.000 title claims abstract description 24
- 238000000576 coating method Methods 0.000 claims abstract description 60
- 239000011248 coating agent Substances 0.000 claims abstract description 59
- 238000000151 deposition Methods 0.000 claims abstract description 43
- 230000008021 deposition Effects 0.000 claims abstract description 39
- 238000001816 cooling Methods 0.000 claims abstract description 29
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 230000008602 contraction Effects 0.000 claims abstract description 8
- 238000007789 sealing Methods 0.000 claims abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 230000001502 supplementing effect Effects 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 230000009347 mechanical transmission Effects 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000012864 cross contamination Methods 0.000 claims description 3
- 239000005002 finish coating Substances 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 10
- 238000004891 communication Methods 0.000 abstract description 2
- 239000013077 target material Substances 0.000 description 11
- 239000012720 thermal barrier coating Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a high-efficiency turbine blade electron beam physical vapor deposition device which comprises a central cavity which is integrally cylindrical and a plurality of functional cavities which are uniformly distributed on the outer side of the central cavity along the circumference, wherein plugboard valves are arranged at the communication positions of the central cavity and each functional cavity, the central cavity comprises a blade clamping and delivering mechanism which can rotate around the central axis of the central cavity, a plurality of groups of telescopic arms are connected with the central axis, each telescopic arm is connected with a blade clamping device, the extension or contraction of each telescopic arm is independently controlled, vacuum sealing of the corresponding functional cavity can be formed when the telescopic arm is in an extension state, and the blade clamping and delivering mechanism can integrally rotate around the central axis of the telescopic arm when the telescopic arm is in a contraction state, so that the blades to be deposited in the same batch can sequentially pass through each functional cavity to finish the coating deposition of the turbine blades. The invention can simultaneously carry out the procedures of mounting, preheating, depositing, cooling and disassembling on the blades to be deposited with the coating in different batches, thereby effectively improving the overall efficiency of coating production.
Description
Technical Field
The invention belongs to the technical field of aviation, and particularly relates to a high-efficiency turbine blade electron beam physical vapor deposition device.
Background
Aeroengines are known as the "heart" of an aircraft, and the performance of their high temperature components determines the service life of the engine. Thermal barrier coatings have long been listed by various aviation departments as key technologies for high temperature protection of aircraft engines as protective coatings that must be used on hot end components of high performance aircraft engines. While electron beam physical vapor deposition (EB-PVD) technology is the most widely used thermal protection technology on the turbine blade of the front stage with the most severe running environment in the current aeroengine, EB-PVD is a combination of electron beam technology and physical vapor deposition technology, and the principle is that a ceramic target material is bombarded by high-energy electron beams in a vacuum environment, and the target material is upwards evaporated and deposited on the surface of the blade above the target material to form a coating. Through decades of development, EB-PVD equipment for multi-generation thermal barrier coating has been developed, but the problems of complex equipment maintenance, low production efficiency, poor quality stability of the coating and the like still exist.
In fact, electron guns used in current EB-PVD apparatus have a single gun power of hundreds or even hundreds of kilowatts, the size of which directly determines the deposition rate of the coating. Typically, coating deposition rates can reach several microns/min, which allows EB-PVD devices to take only about 30 minutes of evaporation time to complete coating deposition on the blade. In view of special microstructure, specific components and production yield of the coating, the blade to be coated needs to be preheated before the coating is deposited, and the coating needs to be subjected to oxygen supplementing oxidation after the deposition. Therefore, even in the case of EB-PVD production equipment of advanced design, which does not require breaking the vacuum in the deposition chamber, the necessary steps before and after completing a complete set of coating layers are still time consuming. The necessary flow of the EB-PVD equipment for producing the thermal barrier coating is generally as follows: mounting the blade, preheating the blade, depositing a coating on the blade, cooling the blade (simultaneously supplementing oxygen and oxidizing), and disassembling the blade on which the coating is deposited. In conventional EB-PVD apparatuses, these necessary process steps are typically performed sequentially, and the production time for a single coating deposition takes about 2 hours, which limits the overall coating production efficiency.
Disclosure of Invention
Aiming at the defect of low production efficiency of the thermal barrier coating of the EB-PVD complete machine, the invention provides the turbine blade electron beam physical vapor deposition device comprising the windmill-shaped blade clamping and delivering mechanism, so that the rotating batch of blades are simultaneously sent to loading, unloading, preheating, depositing and cooling stations, and the process steps can be simultaneously carried out in the EB-PVD equipment, thereby greatly improving the overall efficiency of coating production. The high-efficiency production of the thermal barrier coating on the EB-PVD equipment can be realized through the multi-cavity design of the whole machine, the single-disc multi-blade clamping fixture, the rapid target feeding mechanism, the high-power electron gun and the vacuumizing system.
In order to achieve the above purpose, the technical scheme provided by the invention is that the high-efficiency turbine blade electron beam physical vapor deposition device comprises a vacuumizing system, a vacuum valve, an electron gun system, a target material feeding system, a mechanical transmission system and a cooling water system which are necessary for realizing coating preparation, and further comprises a central cavity which is integrally cylindrical and a plurality of functional cavities which are uniformly distributed along the circumference outside the central cavity, wherein plugboard valves are arranged at the communication positions of the central cavity and each functional cavity, the central cavity comprises a blade clamping delivery mechanism and can rotate around a central shaft thereof, the central shaft is connected with a plurality of groups of telescopic arms, one ends of the telescopic arms far away from the central shaft are respectively connected with a blade clamping device, the extension or contraction of the telescopic arms are independently controlled, vacuum sealing of the corresponding functional cavities can be formed when the telescopic arms are in an extension state, and the blade clamping delivery mechanism can integrally rotate around the central shaft when the telescopic arms are in a contraction state so as to enable the same batch of blades to be deposited to sequentially pass through each functional cavity to finish coating deposition of the turbine blades.
One end of the blade clamping device is provided with a vacuum plugging disc, and when the telescopic arm is in an extension state, the vacuum plugging disc is contacted with the inner wall of the central cavity to form vacuum sealing of the corresponding functional cavity.
The functional chambers include a blade loading and unloading chamber, a blade preheating chamber, a coating deposition chamber and a blade cooling chamber which are sequentially arranged in a clockwise or counterclockwise direction, and the four chambers are spaced at 90 degrees in the circumferential direction.
The blade loading and unloading chamber is used for installing the to-be-deposited coating blade on a blade clamping device of the blade clamping and delivering mechanism.
The blade preheating chamber is used for preheating the blade of the coating to be deposited to a set temperature, and a heater is arranged in the middle of the blade preheating chamber for heating, and a water cooling circulation system is arranged on the cavity wall of the blade preheating chamber for preventing the temperature of the cavity from being too high.
The coating deposition chamber is used for carrying out coating deposition on the blade to be deposited with the coating.
The coating cooling chamber is used for carrying out oxygen supplementing oxidation and cooling down cooling on the blade on which the coating deposition is completed.
In order to prevent heat loss and reduce cross contamination between the cavities, the gate valve is closed when the telescopic arm is in a contracted state.
The invention can also be formed by cascading more than two sets of turbine blade electron beam physical vapor deposition devices, and two adjacent sets share a functional chamber.
Compared with the prior art, the invention has the following advantages:
the invention adopts the windmill-shaped blade clamping mechanism, and can simultaneously carry out the procedures of installation, preheating, deposition, cooling and disassembly on the blades to be deposited in different batches, namely, the process steps are simultaneously carried out in the EB-PVD equipment, thereby greatly improving the overall efficiency of coating production.
2. The production of the thermal barrier coating on the EB-PVD equipment can be efficiently realized through the multi-cavity design of the whole machine, the single-disc multi-blade clamping fixture, the rapid target feeding mechanism, the high-power electron gun and the vacuumizing system.
3. The invention can realize cascade connection of 2 sets of the devices, and further improves the production efficiency of the whole machine by sharing a certain chamber, such as a coating deposition chamber.
Drawings
FIG. 1 is a schematic view of the telescopic operation of the device of the present invention;
FIG. 2 is a schematic representation of the operation of the device of the present invention in a contracted state;
FIG. 3 is a schematic view of the operation of the device of the present invention as it rotates;
FIG. 4 is a perspective view of the internal structure of the device of the present invention in its extended state;
FIG. 5 is a schematic diagram of a common coating deposition chamber of 2 sets of EB-PVD equipment.
In the drawings, the meaning of the reference numerals: 101, a "windmill" chamber; 201, a blade loading and unloading chamber; 301, a blade preheating chamber; 401 a coating deposition chamber; 501, a blade cooling chamber; 102, a windmill-shaped blade clamping and delivering mechanism; 103, vertical rotation axis; 104, telescoping arms; 105, blade clamping device; 106, vacuum plugging the disc; 107 coating the blade; 101L, left "windmill" chamber; 101R, right "windmill" chamber; 201L, left blade loading and unloading chamber; 201R, right side blade loading and unloading chamber; 301L, left blade preheating chamber; 301R, right side blade preheating chamber; 401C, a central coating deposition chamber; 501L, left side blade cooling chamber; 501R, right side blade cooling chamber.
Detailed Description
The invention will be further described in detail with reference to the drawings.
As shown in fig. 1, the inventive apparatus includes a "windmill" chamber 101, a blade handling chamber 201, a blade preheating chamber 301, a coating deposition chamber 401, and a blade cooling chamber 501. In addition, the vacuum pumping system, the electron gun system, the target feeding system, the mechanical transmission system, the cooling water system and the electric power system are also included.
The windmill chamber 101 is cylindrical in shape as a whole, 4 chambers of the blade loading and unloading chamber 201, the blade preheating chamber 301, the coating deposition chamber 401 and the blade cooling chamber 501 are uniformly distributed and communicated on the outer circumference of the windmill chamber, and the communicating positions of the 4 chambers and the windmill chamber are respectively provided with a plugboard valve. The "windmill-shaped" blade clamping and delivering mechanism 102 is located in the "windmill" chamber, and is a key component of the present invention, and is mainly used for simultaneously delivering different batches of blades to the blade loading and unloading chamber, the blade preheating chamber, the coating deposition chamber and the blade cooling chamber, so that the same batch of blades sequentially pass through the blade loading and unloading chamber, the blade preheating chamber, the coating deposition chamber and the blade cooling chamber for processing.
As shown in fig. 2 and 4, the "windmill-shaped" blade clamping and delivering mechanism 102 is located in the "windmill" chamber and can rotate around its central axis, and is in a cross shape as a whole, and the vertical rotation axis 103,4 set of telescopic arms 104 are all connected with the blade clamping device 105, and the extension or contraction of the telescopic arms 104 are all independently controlled. One end of the blade clamping device is provided with a vacuum plugging disc 106, when the telescopic arm is in an extension state, the vacuum plugging disc is contacted with the inner wall of the central cavity to form vacuum sealing of a corresponding cavity, and when the telescopic arm is in a contraction state, the windmill-shaped blade clamping delivery mechanism can integrally rotate around the shaft. The windmill chamber is also connected with a mechanical transmission mechanism for realizing the telescopic or rotary movement of the windmill-shaped blade clamping and delivering mechanism. The "windmill" chamber, the blade loading and unloading chamber, the blade preheating chamber, the coating deposition chamber, and the blade cooling chamber all communicate with the necessary evacuation system and vacuum valves.
The blade loading and unloading chamber is used to mount the blade 107 to be deposited onto the blade gripper 105 of the "windmill" blade gripper delivery mechanism.
The blade preheating chamber is used to preheat the blade to a set temperature prior to coating deposition. The middle of the blade preheating chamber is provided with a heater for heating, and the wall of the blade preheating chamber is provided with a water cooling circulation for preventing the temperature of the chamber from being too high.
The coating deposition chamber is used for coating deposition of the blade. The target material feeding system is positioned below the coating deposition chamber, the required ceramic target material is conveyed, the electron gun is positioned above the coating deposition chamber, and the electron gun is directly irradiated downwards to bombard the ceramic target material to heat the ceramic target material, so that the ceramic target material melts and evaporates. The inner wall of the coating deposition chamber is provided with a water-cooled circulating plate to prevent the temperature of the chamber wall from being too high.
The coating cooling chamber is used for carrying out oxygen supplementing oxidation and cooling down cooling on the blade with the coating deposited. The chamber is provided with access ports for oxygen and cooling gas (nitrogen or argon).
The operation of one embodiment of the apparatus of the present invention, as shown in fig. 3, comprises the steps of:
a) The 4 groups of telescopic arms 104 of the windmill-shaped blade clamping and delivering mechanism are extended, the windmill-shaped cavity and all functional cavities form a closed space through 4 vacuum plugging discs 106, and then all vacuum cavities are pumped to a vacuum state;
b) The blade loading and unloading chamber 201 is evacuated and a first batch of blades are mounted to the corresponding blade clamp number one, and then the door is closed for evacuation;
c) And after the 4 groups of telescopic arms shrink, the windmill-shaped blade clamping and delivering mechanism integrally rotates around the shaft for 90 degrees, and then the 4 groups of telescopic arms are stretched and vacuum sealing is carried out by using a vacuum sealing disc. At this time, the second lot of blades are mounted to the blade holder No. two in the blade loading and unloading chamber while the first lot of blades are heated in the blade preheating chamber;
d) After preheating, the telescopic arm is contracted, the windmill-shaped blade clamping and delivering mechanism rotates 90 degrees around the shaft, the telescopic arm is extended, a third batch of blades can be installed on a third blade clamping device in a blade loading and unloading chamber, meanwhile, the second batch of blades are heated in the blade preheating chamber, and the first batch of blades are subjected to coating deposition in the coating deposition chamber;
e) After the second batch of blades are preheated and the first batch of blades are coated and deposited, the 'windmill-shaped' blade clamping and delivering mechanism is contracted by a telescopic arm, the telescopic arm is extended, a fourth batch of blades are arranged on a fourth blade clamping device in a blade loading and unloading chamber, the third batch of blades are heated in the blade preheating chamber, the second batch of blades are coated and deposited in the coating deposition chamber, and the first batch of blades are subjected to oxygen supplementing oxidation and blowing cooling in the coating cooling chamber;
f) After the corresponding steps are finished on each batch of blades, the first batch of blades which have finished all the working procedures can be taken out from the first blade clamping device in the blade loading and unloading chamber through rotation again, and the fifth batch of blades are mounted on the first blade clamping device;
g) The process is cyclically alternated, so that coating deposition in the form of 'pipeline' of the blade can be realized.
Notably, the gate valve between each chamber and the "windmill" chamber can be closed when the telescoping arm is in a contracted state to prevent heat loss and reduce cross contamination between the chambers.
Because of the requirement of the process flow of the blade coating preparation process, the preparation device needs to be provided with a plurality of stations for loading, unloading, preheating, depositing and cooling, the windmill-shaped blade clamping and delivering mechanism is designed to be 4 spokes in the embodiment of the invention, the number of the windmill-shaped blade clamping and delivering mechanism can be correspondingly modified for the coating process with more or less process flows, and the vacuum chambers of corresponding processes can be increased or decreased.
For designs with higher requirements on the production efficiency of the whole machine, 2 sets of devices can also share a certain chamber, such as a coating deposition chamber, as shown in fig. 5, and in this case, the coating deposition chamber can also be designed as double-source evaporation. In the figure, 101L is a left side "windmill" chamber, 101R is a right side "windmill" chamber, 201L is a left side blade loading and unloading chamber, 201R is a right side blade loading and unloading chamber, 301L is a left side blade preheating chamber, 301R is a right side blade preheating chamber, 401C is a central coating deposition chamber, 501L is a left side blade cooling chamber, and 501R is a right side blade cooling chamber.
There is no limitation on the configuration of the blade clamp, and the plurality of blade stations thereon may be circumferentially distributed or horizontally linearly distributed. The feeding mode of the target material is not limited, and the target material can be single-tube continuous or circular rotation or flat delivery mode.
It should be noted that, a rail moving manner may be used instead of the telescopic arm, and a similar function may be realized in cooperation with the integral rotation.
The above is a further detailed description of the invention in connection with specific preferred embodiments, and it is not to be construed as limiting the practice of the invention to these descriptions. It should be noted that modifications can be made by those skilled in the art without departing from the principles of the present invention, which modifications should also be considered as falling within the scope of the present invention.
Claims (2)
1. The utility model provides a high-efficient turbine blade electron beam physical vapor deposition device, including realizing the necessary evacuation system of coating preparation, vacuum valve, electron gun system, target feeding system, mechanical transmission system and cooling water system, characterized by including whole cylindrical central cavity and a plurality of functional chamber that evenly distributed set up along circumference in the outside of central cavity, the intercommunication department of central cavity and each functional chamber all is equipped with the push-pull valve, and the central cavity contains blade clamping delivery mechanism, can rotate around its central axis, the central axis is connected with a plurality of telescopic arm of group, and the one end that the telescopic arm kept away from the central axis all is connected with blade clamping ware, blade clamping ware one end is furnished with vacuum shutoff dish, vacuum shutoff dish and central cavity inner wall contact can form the vacuum seal of corresponding functional chamber when the telescopic arm is the extension state, the extension or contraction of the telescopic arm is independently controlled, vacuum sealing can be formed on corresponding functional chambers when the telescopic arm is in an extension state, the blade clamping and delivering mechanism can integrally rotate around the center of the telescopic arm when the telescopic arm is in a contraction state so as to enable the same batch of blades to be deposited to sequentially pass through each functional chamber to finish coating deposition of the turbine blade, the functional chambers comprise a blade loading and unloading chamber, a blade preheating chamber, a coating deposition chamber and a blade cooling chamber which are sequentially arranged along a clockwise or anticlockwise direction, the blade loading and unloading chamber is used for mounting the blades to be deposited on a blade clamping device of the blade clamping and delivering mechanism, the blade preheating chamber is used for preheating the blades to be deposited to a set temperature, the coating deposition chamber is used for carrying out coating deposition on the blades to be deposited, the coating cooling chamber is used for carrying out oxygen supplementing oxidation and cooling on the blade on which the coating is deposited.
2. The high efficiency turbine blade e-beam physical vapor deposition apparatus of claim 1 wherein said gate valve is closed when said telescoping arm is in a retracted state to prevent heat loss and reduce cross contamination between the chambers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210979992.1A CN115287607B (en) | 2022-08-16 | 2022-08-16 | High-efficiency turbine blade electron beam physical vapor deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210979992.1A CN115287607B (en) | 2022-08-16 | 2022-08-16 | High-efficiency turbine blade electron beam physical vapor deposition device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115287607A CN115287607A (en) | 2022-11-04 |
| CN115287607B true CN115287607B (en) | 2024-03-19 |
Family
ID=83829536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210979992.1A Active CN115287607B (en) | 2022-08-16 | 2022-08-16 | High-efficiency turbine blade electron beam physical vapor deposition device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115287607B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6206975B1 (en) * | 1998-05-02 | 2001-03-27 | Leybold Systems Gmbh | Vacuum treatment system for application of thin, hard layers |
| CN102560375A (en) * | 2012-02-23 | 2012-07-11 | 上海中智光纤通讯有限公司 | Thin film deposition equipment |
| CN102586737A (en) * | 2012-03-09 | 2012-07-18 | 上海先进半导体制造股份有限公司 | Physical vapor deposition method of aluminum-copper film |
| CN105441876A (en) * | 2014-09-02 | 2016-03-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film deposition apparatus |
| CN109904327A (en) * | 2017-12-07 | 2019-06-18 | 中国科学院大连化学物理研究所 | A kind of cluster formula vacuum deposition system being used to prepare perovskite solar battery |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200715448A (en) * | 2005-07-25 | 2007-04-16 | Canon Anelva Corp | Vacuum processing apparatus, semiconductor device manufacturing method and semiconductor device manufacturing system |
-
2022
- 2022-08-16 CN CN202210979992.1A patent/CN115287607B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6206975B1 (en) * | 1998-05-02 | 2001-03-27 | Leybold Systems Gmbh | Vacuum treatment system for application of thin, hard layers |
| CN102560375A (en) * | 2012-02-23 | 2012-07-11 | 上海中智光纤通讯有限公司 | Thin film deposition equipment |
| CN102586737A (en) * | 2012-03-09 | 2012-07-18 | 上海先进半导体制造股份有限公司 | Physical vapor deposition method of aluminum-copper film |
| CN105441876A (en) * | 2014-09-02 | 2016-03-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film deposition apparatus |
| CN109904327A (en) * | 2017-12-07 | 2019-06-18 | 中国科学院大连化学物理研究所 | A kind of cluster formula vacuum deposition system being used to prepare perovskite solar battery |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115287607A (en) | 2022-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6316292B2 (en) | Inverted cylindrical magnetron (ICM) system and method of use | |
| KR102147372B1 (en) | Apparatus and methods for carousel atomic layer deposition | |
| EP2520689B1 (en) | Coating methods and apparatus | |
| US5792519A (en) | Method for the plasma assisted high vacuum physical vapor coating of parts with wear resistant coatings and equipment for carrying out the method | |
| US9133542B2 (en) | Coating methods and apparatus | |
| BRPI0923092B1 (en) | DEVICE AND METHOD FOR TREATING AND / OR COATING SURFACES OF SUBSTRATE COMPONENTS BY DEPOSITION FROM THE GASEOUS PHASE | |
| KR101719909B1 (en) | Film forming apparatus, susceptor and film forming method | |
| CN107058947A (en) | For preparing fuel battery metal double polar plate amorphous carbon-film magnetron sputtering continuous lines | |
| KR100532031B1 (en) | Device for vacuum coating slide bearings | |
| CN111286705B (en) | Double-chamber three-station multi-target co-sputtering magnetron sputtering coating equipment | |
| US20100034974A1 (en) | Method and apparatus for coating or heat treatment of blisks for aircraft gas turbines | |
| CN115287607B (en) | High-efficiency turbine blade electron beam physical vapor deposition device | |
| CN112063962A (en) | Method for preparing uniform coating on surface of complex profile by PS-PVD | |
| CN219689835U (en) | Vacuum magnetron sputtering double-sided coating system | |
| US20110223353A1 (en) | High pressure pre-oxidation for deposition of thermal barrier coating with hood | |
| CN117385326A (en) | Rotating device for EB-PVD thermal barrier coating and blade coating method | |
| US6206975B1 (en) | Vacuum treatment system for application of thin, hard layers | |
| CN108286036B (en) | In-situ oxygen supplement type scanning electron beam vapor deposition (IOC-SEVD) device and method thereof | |
| CN111304625A (en) | Band saw blade coating equipment and method | |
| CN212199404U (en) | Revolution and rotation film coating device for coating film | |
| CN110699654A (en) | ARC coating production line and coating process | |
| CN109913833A (en) | Metal MO film continuous magnetron sputtering production line | |
| CN220034647U (en) | Continuous film plating equipment for metal bipolar plate of fuel cell | |
| CN213113466U (en) | High-vacuum cesium iodide physical vapor deposition coating equipment | |
| CN109913846A (en) | Multi-purpose metal film vacuum coating production line |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |