CN111254499A - 一种单晶炉结构及其使用方法 - Google Patents
一种单晶炉结构及其使用方法 Download PDFInfo
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- CN111254499A CN111254499A CN202010147888.7A CN202010147888A CN111254499A CN 111254499 A CN111254499 A CN 111254499A CN 202010147888 A CN202010147888 A CN 202010147888A CN 111254499 A CN111254499 A CN 111254499A
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- 239000013078 crystal Substances 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000001816 cooling Methods 0.000 claims abstract description 167
- 239000000498 cooling water Substances 0.000 claims abstract description 126
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 64
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 11
- 239000010439 graphite Substances 0.000 claims abstract description 11
- 239000010453 quartz Substances 0.000 claims abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 241000883990 Flabellum Species 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 238000003756 stirring Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000009471 action Effects 0.000 claims description 5
- 238000004321 preservation Methods 0.000 claims description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 3
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 3
- 241001330002 Bambuseae Species 0.000 claims description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 3
- 239000011425 bamboo Substances 0.000 claims description 3
- 230000002035 prolonged effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000009194 climbing Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
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CN202010147888.7A CN111254499B (zh) | 2020-03-05 | 2020-03-05 | 一种单晶炉结构及其使用方法 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111742726A (zh) * | 2020-06-24 | 2020-10-09 | 浙江穗丰机电科技有限公司 | 一种便于启闭的通风口 |
CN112340639A (zh) * | 2020-10-23 | 2021-02-09 | 国网安徽省电力有限公司合肥供电公司 | 一种用于顶升电流互感器的便携式顶升结构 |
CN114111210A (zh) * | 2021-11-12 | 2022-03-01 | 洛阳龙门医药股份有限公司 | 一种用于原料药的降温冷却设备 |
CN114808146A (zh) * | 2022-05-18 | 2022-07-29 | 倪建刚 | 一种带自动冷却设备的单晶炉底盘组件及其使用方法 |
CN114990701A (zh) * | 2022-05-18 | 2022-09-02 | 倪建刚 | 一种能实现水冷却循环降温的单晶炉底盘设备及其使用方法 |
CN117415425A (zh) * | 2023-12-19 | 2024-01-19 | 武汉特种工业泵厂有限公司 | 一种离心泵外圆筒切割设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2148059A2 (de) * | 2008-07-25 | 2010-01-27 | Voith Patent GmbH | Kühlsystem, insbesondere eines Kraftfahrzeuges |
CN204779925U (zh) * | 2015-05-26 | 2015-11-18 | 河北宁通电子材料有限公司 | 一种应用于单晶炉的冷却装置及包含其的单晶炉 |
CN204987607U (zh) * | 2015-09-24 | 2016-01-20 | 泰州市姜堰奥威机械有限公司 | 一种精密水冷却机 |
CN106087036A (zh) * | 2016-07-15 | 2016-11-09 | 保山新澳泰能源有限公司 | 一种直拉单晶炉 |
CN107557855A (zh) * | 2016-06-30 | 2018-01-09 | 崔敏娟 | 一种硅单晶炉 |
-
2020
- 2020-03-05 CN CN202010147888.7A patent/CN111254499B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2148059A2 (de) * | 2008-07-25 | 2010-01-27 | Voith Patent GmbH | Kühlsystem, insbesondere eines Kraftfahrzeuges |
CN204779925U (zh) * | 2015-05-26 | 2015-11-18 | 河北宁通电子材料有限公司 | 一种应用于单晶炉的冷却装置及包含其的单晶炉 |
CN204987607U (zh) * | 2015-09-24 | 2016-01-20 | 泰州市姜堰奥威机械有限公司 | 一种精密水冷却机 |
CN107557855A (zh) * | 2016-06-30 | 2018-01-09 | 崔敏娟 | 一种硅单晶炉 |
CN106087036A (zh) * | 2016-07-15 | 2016-11-09 | 保山新澳泰能源有限公司 | 一种直拉单晶炉 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111742726A (zh) * | 2020-06-24 | 2020-10-09 | 浙江穗丰机电科技有限公司 | 一种便于启闭的通风口 |
CN111742726B (zh) * | 2020-06-24 | 2021-07-09 | 浙江穗丰机电科技有限公司 | 一种便于启闭的通风口 |
CN112340639A (zh) * | 2020-10-23 | 2021-02-09 | 国网安徽省电力有限公司合肥供电公司 | 一种用于顶升电流互感器的便携式顶升结构 |
CN114111210A (zh) * | 2021-11-12 | 2022-03-01 | 洛阳龙门医药股份有限公司 | 一种用于原料药的降温冷却设备 |
CN114111210B (zh) * | 2021-11-12 | 2023-03-14 | 洛阳龙门医药股份有限公司 | 一种用于原料药的降温冷却设备 |
CN114808146A (zh) * | 2022-05-18 | 2022-07-29 | 倪建刚 | 一种带自动冷却设备的单晶炉底盘组件及其使用方法 |
CN114990701A (zh) * | 2022-05-18 | 2022-09-02 | 倪建刚 | 一种能实现水冷却循环降温的单晶炉底盘设备及其使用方法 |
CN114808146B (zh) * | 2022-05-18 | 2024-07-05 | 倪建刚 | 一种带自动冷却设备的单晶炉底盘组件及其使用方法 |
CN114990701B (zh) * | 2022-05-18 | 2024-07-05 | 倪建刚 | 一种能实现水冷却循环降温的单晶炉底盘设备及其使用方法 |
CN117415425A (zh) * | 2023-12-19 | 2024-01-19 | 武汉特种工业泵厂有限公司 | 一种离心泵外圆筒切割设备 |
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Denomination of invention: The invention relates to a single crystal furnace structure and an application method thereof Effective date of registration: 20220105 Granted publication date: 20210326 Pledgee: Agricultural Bank of China Limited by Share Ltd. Shanghai Minhang branch Pledgor: SHANGHAI PANMENG ELECTRONIC MATERIALS CO.,LTD. Registration number: Y2022310000003 |
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Effective date of registration: 20231220 Address after: Aviation Science and Technology Park 16 # 103-303, No. 6 Binjiang West Road, High tech Zone, Jingdezhen City, Jiangxi Province, 333000 Patentee after: Jiangxi Hanjing Electronic Materials Co.,Ltd. Address before: 201600 Building 2, 399 changta Road, Songjiang District, Shanghai Patentee before: SHANGHAI PANMENG ELECTRONIC MATERIALS CO.,LTD. |
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