CN111118476A - Special gas pipeline - Google Patents
Special gas pipeline Download PDFInfo
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- CN111118476A CN111118476A CN202010083929.0A CN202010083929A CN111118476A CN 111118476 A CN111118476 A CN 111118476A CN 202010083929 A CN202010083929 A CN 202010083929A CN 111118476 A CN111118476 A CN 111118476A
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- 238000000034 method Methods 0.000 claims description 25
- 238000012545 processing Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000000903 blocking effect Effects 0.000 abstract description 7
- 230000002035 prolonged effect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 100
- 239000013049 sediment Substances 0.000 description 16
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 210000003437 trachea Anatomy 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 210000000621 bronchi Anatomy 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Abstract
The invention discloses a special gas pipeline, comprising: prevent blockking up special gas pocket of loudspeaker of air supply pipe, a plurality of groups, prevent blockking up special gas pocket of loudspeaker evenly set up in on the air supply pipe wall, prevent blockking up special gas pocket of loudspeaker and include: the air supply device comprises an outer cover and a horn-shaped special air hole arranged in the outer cover, wherein an air inlet below the horn-shaped special air hole is connected with the wall of the air supply pipe, and the side wall of an air outlet above the horn-shaped special air hole is tangentially connected with the side wall of an opening of the outer cover; the problem that the special gas hole of the special gas pipeline is easy to block is effectively avoided, the blocking period of the special gas pipeline is shortened, the service life of the special gas pipeline is prolonged, the generation cost of the special gas pipeline is reduced, and the capacity loss of a production line is reduced.
Description
Technical Field
The invention relates to the technical field of solar cells, in particular to a special gas pipeline.
Background
PECVD (plasma enhanced chemical vapor deposition) equipment is important process link equipment for solar cell production, a special gas pipeline is an important component of PECVD (plasma enhanced chemical vapor deposition) coating equipment, process gases such as silane, ammonia, Trimethylaluminum (TMA) and the like are conveyed through the special gas pipeline in the production process, the size and the uniformity of special gas holes in the continuous production process directly influence the distribution of gas in a process cavity, and whether the distribution of the special gas holes is uniform determines the quality of a coating and the uniformity of appearance color.
The existing special gas pipeline is directly perforated and uniformly distributed with a plurality of small holes with the same size. The special air holes are blocked by process products (silicon nitride, aluminum oxide and the like) within a maintenance period of five to seven days, the substances blocking the special air holes are hard, the special air holes need to be polished and cleaned by a drill, and the special air holes are easy to damage and deform after being polished by the drill for many times, so that the gas distribution is influenced, and the quality of products (crystalline silicon solar cells) is poor; the special gas pipeline is required to be replaced every three months or six months according to different materials of the special gas pipeline, and the special gas pipeline is required to be replaced within one year at the longest. The special gas hole is improved by part of conventional manufacturers, for example, an annular device is additionally arranged, a detachable threaded bolt is additionally arranged, the problems that the process gas is deposited more, the through hole is not cleaned timely and inconveniently and the like cannot be solved in the actual production process, and the direct punching of the pipeline in the actual application is the special gas hole mode of the most common special gas pipeline.
Therefore, the appearance of a special gas pipeline is urgently needed, the problem that the special gas hole of the special gas pipeline is easy to block is effectively avoided, the blocking period of the special gas pipeline is shortened, the service life of the special gas pipeline is prolonged, the generation cost of the special gas pipeline is reduced, and the capacity loss of a production line is reduced.
Disclosure of Invention
In order to solve the technical problems, the invention provides the special gas pipeline, which effectively avoids the problem that a special gas hole of the special gas pipeline is easy to block, reduces the blocking period of the special gas pipeline, prolongs the service life of the special gas pipeline, reduces the generation cost of the special gas pipeline and reduces the capacity loss of a production line.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a special gas pipeline comprising: prevent blockking up special gas pocket of loudspeaker of air supply pipe, a plurality of groups, prevent blockking up special gas pocket of loudspeaker evenly set up in on the air supply pipe wall, prevent blockking up special gas pocket of loudspeaker and include: the dustcoat with set up in the special gas pocket of loudspeaker form in the dustcoat, the below air inlet in the special gas pocket of loudspeaker form with air supply pipe wall intercommunication is connected, the lateral wall of the top gas outlet in the special gas pocket of loudspeaker form with the opening lateral wall of dustcoat is tangent to be connected.
The special gas pipeline provided by the invention effectively avoids the problem that a special gas hole of the special gas pipeline is easy to block, reduces the blocking period of the special gas pipeline, prolongs the service life of the special gas pipeline, reduces the generation cost of the special gas pipeline and reduces the capacity loss of a production line.
On the basis of the technical scheme, the following improvements can be made:
preferably, a diameter of an air inlet below the horn specific air hole is smaller than a diameter of an air outlet above the horn specific air hole.
Preferably, the method comprises the following steps: the air supply pipe comprises a main air pipe, an air supply pipe and at least more than two upper air pipes, the main air pipe is communicated with the two branch air pipes which are symmetrically distributed, the branch air pipes are communicated with the air supply pipe, the anti-blocking horn special air holes are formed in the side wall of the air supply pipe and communicated with the air supply pipe, and one special air is passed through the anti-blocking horn special air holes to uniformly enter the technical cavity.
Preferably, the outer cover has any one of a cylindrical shape, a circular truncated cone shape, an inverted circular truncated cone shape, and a hexagonal shape.
Preferably, the diameter of the air inlet hole below the horn-shaped special air hole is 0.1mm-2 mm.
Preferably, the diameter of the air outlet hole above the horn-shaped special air hole is 1.5mm-5 mm.
Preferably, the height of the specific air hole of the anti-blocking horn is 1mm-5 mm.
Preferably, the anti-blocking trumpet-shaped special air hole is detachably connected with the side wall of the air supply pipe.
Preferably, a sealing ring is arranged at the joint of the anti-blocking horn-shaped special air hole and the side wall of the air supply pipe.
Preferably, the method comprises the following steps: deposit thickness detection sensor, central processing unit and main pipeline controller, deposit thickness detection sensor with central processing unit electricity is connected, central processing unit with main pipeline controller electricity is connected, and the special gas input or the special gas of control trunk line are cut off.
Drawings
Fig. 1 is a structural diagram of a special gas pipeline according to an embodiment of the present invention;
fig. 2 is an enlarged structural diagram of a special gas pipeline a according to an embodiment of the present invention;
fig. 3 is a structural diagram of a special gas pipeline according to an embodiment of the present invention;
fig. 4 is a structural diagram of a special anti-blocking horn air hole of a special air pipeline according to an embodiment of the present invention;
fig. 5 is a flow chart of a special gas pipeline according to an embodiment of the present invention;
wherein: 1. the anti-blocking air supply device comprises an air supply pipe, 2 an anti-blocking horn special air hole, 3 an air inlet below the horn special air hole, 4 an air outlet above the horn special air hole, 5 an outer cover, 6 the horn special air hole, 7 a tangent joint of the side wall of the air outlet above the horn special air hole and the side wall of an opening of the outer cover, 8 a main air pipe, 9 a branch air pipe and 11 special air.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
To achieve the object of the present invention, as shown in fig. 1 to 5, a special gas pipeline in the embodiment includes: prevent blockking up loudspeaker special gas pocket 2 by air supply pipe 1, a plurality of groups, prevent blockking up loudspeaker special gas pocket 2 evenly set up in on the air supply pipe 1 wall, prevent blockking up loudspeaker special gas pocket 2 and include: the dustcoat 5 with set up in special gas pocket 6 of loudspeaker form in the dustcoat, the below air inlet 3 in the special gas pocket of loudspeaker form with 1 wall intercommunication of air supply pipe is connected, the lateral wall of the top gas outlet 4 in the special gas pocket of loudspeaker form with the tangent connection of opening lateral wall of dustcoat 5.
The special gas pipeline provided by the invention effectively avoids the problem that a special gas hole of the special gas pipeline is easy to block, reduces the blocking period of the special gas pipeline, prolongs the service life of the special gas pipeline, reduces the generation cost of the special gas pipeline and reduces the capacity loss of a production line.
In some embodiments, the diameter of the horn specific air hole's lower air inlet 3 is smaller than the diameter of the horn specific air hole's upper air outlet 4.
Adopt above-mentioned embodiment, its simple structure, and convenient operation, 4 diameters in the top gas outlet in loudspeaker special gas pocket are 3mm, the diameter of the below air inlet 3 in loudspeaker special gas pocket is 1mm, the area of the top gas outlet 4 in loudspeaker special gas pocket is equivalent to 9 times of the 3 areas in the below air inlet in loudspeaker special gas pocket, the area of the top gas outlet 4 in loudspeaker special gas pocket is far greater than the 3 areas in the below air inlet in loudspeaker special gas pocket, the effectual problem of preventing blockking up loudspeaker special gas pocket 2 and blockking up of having avoided special gas pipeline appears like this.
In some embodiments, the method comprises: main trachea 8, air supply pipe 1 and at least two above trachea 9, the bronchus 9 of two symmetric distributions that main trachea 8 is linked together, bronchus 9 intercommunication air supply pipe 1, prevent blockking up loudspeaker special gas pocket 2 set up in on the air supply pipe 1 lateral wall and with air supply pipe 1 intercommunication, a special gas 11 passes through prevent blockking up loudspeaker special gas pocket 2 and evenly get into the process chamber in.
By adopting the embodiment, the anti-blocking special bellmouth air hole 2 of the special air pipeline is adopted, the special air pipeline only has the special air 11 in one way in the using process, the gas for preventing the special bellmouth air hole 2 in the technological process is a gas, process sediment deposition is not easy to occur, and the blocking of the anti-blocking special bellmouth air hole 2 is reduced.
In some embodiments, the housing 5 is any one of cylindrical, frustoconical, inverted frustoconical, or hexagonal.
By adopting the embodiment, the gas supply pipe has simple structure and convenient operation, and can use gas supply pipes with different structures.
In some embodiments, the diameter of the air inlet hole 3 below the horn-shaped special air hole is 0.1mm-2 mm.
By adopting the embodiment, the structure is simple, the operation is convenient, and the problem that the special air hole 2 of the anti-blocking loudspeaker of the special air pipeline is easy to block is effectively avoided.
In some embodiments, the diameter of the air outlet 4 above the horn-shaped special air hole is 1.5mm-5 mm.
By adopting the embodiment, the structure is simple, the operation is convenient, and the problem that the special air hole 2 of the anti-blocking loudspeaker of the special air pipeline is easy to block is effectively avoided.
In some embodiments, the anti-clogging horn specific air hole 2 has a height of 1mm to 5 mm.
By adopting the embodiment, the structure is simple, the operation is convenient, and the problem that the special air hole 2 of the anti-blocking loudspeaker of the special air pipeline is easy to block is effectively avoided.
In some embodiments, the anti-clogging trumpet-shaped special air hole 2 is detachably connected with the side wall of the air supply pipe 1.
By adopting the embodiment, the anti-blocking air supply pipe is simple in structure and convenient to operate, a certain amount of sediment is always deposited in the process of a certain period of technology, the air supply pipe 1 is easy to damage in the subsequent sediment removing process by using the drill bit, the anti-blocking horn-shaped special air hole 2 is detached in the sediment cleaning process, and the sediment is removed by using the drill bit, so that the air supply pipe 1 can be effectively prevented from being damaged and polluted.
In some embodiments, a sealing ring (not shown) is provided at the connection position of the anti-clogging trumpet-shaped special air hole 2 and the side wall of the air supply pipe 1.
By adopting the embodiment, the special gas pipeline sealing device is simple in structure and convenient to operate, ensures the whole sealing performance of the special gas pipeline, and avoids leakage of the special gas 11.
In some embodiments, the method comprises: deposit thickness detection sensor, central processing unit and main pipeline controller, deposit thickness detection sensor with central processing unit electricity is connected, central processing unit with main pipeline controller electricity is connected, and the special gas of control trunk line 8 is inputed or special gas is cut off.
By adopting the embodiment, when the sediment thickness of the air outlet 4 above the horn-shaped special air hole reaches the set threshold value, the sediment thickness detection sensor converts the sediment thickness reaching the set threshold value into an electric signal, sends the signal to the central processing unit, interprets the signal after background operation, generates a signal for controlling the stop of the special air, sends the signal to the main pipeline controller, closes the air inlet of the main pipeline 8, stops the special air 11 to be input into the main pipeline 8, detaches the anti-blocking horn-special air hole 2 from the side wall of the air supply pipe 1, and removes and cleans the sediment at the air outlet 4 above the horn-shaped special air hole through the drill bit; when the sediment thickness of the upper air outlet 4 of the horn-shaped special air hole does not reach the set threshold value, the sediment thickness detection sensor changes the sediment thickness not reaching the set threshold value into an electric signal, the signal is sent to a central processing unit, the signal is interpreted after background operation, the signal of the special air is generated and input to a main pipeline controller, the air inlet of the main pipeline 8 is opened, the special air 11 is input into the main pipeline 8, the special air 11 is communicated with an air supply pipe 1 through two symmetrically distributed branch air pipes 9 communicated with the main air pipe 8 and is input into an anti-blocking horn-shaped special air hole 2, the special air 11 is uniformly input into a process cavity through the upper air outlet 4 of the horn-shaped special air hole, and therefore the operation is convenient, the through hole is convenient to clean in time, and operation.
The invention provides a special gas pipeline which has the following beneficial effects:
1) the diameter of an air outlet above the anti-blocking special air hole of the horn is 3mm, the diameter of an air inlet below the special air hole of the horn is 1mm, the area of the air outlet above the special air hole of the horn is 9 times of the area of the air inlet below the special air hole of the horn, and the area of the air outlet above the special air hole of the horn is far larger than the area of the air inlet below the special air hole of the horn, so that the problem that the special air hole of the special air pipeline is easy to block is effectively avoided;
2) the special gas pipeline with the horn-mouth-shaped special gas holes is adopted, in the using process, only one special gas pipeline is provided with one special gas, the gas in the anti-blocking horn-shaped special gas holes is one gas in the technical process, process sediments are not easy to deposit, and the blockage of the horn-mouth-shaped special gas holes is reduced; practical experiments verify that the deposits are very little deposited on the inner wall of the horn-shaped special air hole 6, and mainly deposited at the joint of the horn-shaped special air hole 6 and the outer wall of the outer cover 5, so that the horn-shaped special air hole 6 is tangentially connected with the outer wall of the outer cover 5, steps at the position of the air outlet 4 above the horn-shaped special air hole are reduced as much as possible, and blockage of the horn-mouth-shaped special air hole 2 is reduced;
3) the period of the original special air hole passing through the drill bit through hole can be prolonged from the existing 5-7 days, the period of the anti-blocking horn special air hole passing through the drill bit through hole is prolonged to 30-40 days, and the damage to a special air pipeline is reduced;
4) after the inconsistent damage of the special air holes of the anti-blocking horn is reduced, the service life of the special air pipeline can be prolonged by 4-5 times, and the sharing cost of the special air pipeline is reduced.
As shown in fig. 4, the anti-clogging bell mouth special air vent comprises a housing 5 with the following different shapes: a cylindrical housing 5 (fig. 4(b), a truncated cone housing 5 (fig. 4(c), an inverted truncated cone housing 5 (fig. 4(d)), a hexagonal housing 5 (fig. 4(e)), and a polygonal housing 5, and the like;
although the connection between the side wall of the upper air outlet 4 of the trumpet-shaped special air hole and the opening side wall of the outer cover 5 in fig. 4(f) can cause deposition of process deposits, compared with the connection between the side wall of the upper air outlet 4 of the trumpet-shaped special air hole and the opening side wall of the outer cover 5 in other shapes, the blockage speed of the upper air outlet 4 of the trumpet-shaped special air hole is accelerated, but the blockage prevention speed of the trumpet-shaped special air hole in fig. 4(f) is still 2-3 times slower than that of the existing special air hole.
The design can additionally add an anti-blocking horn-shaped special air hole outside the special air pipeline instead of directly designing the horn-shaped special air hole on the wall of the existing special air pipeline, and mainly has the following reasons:
1) the wall of the special gas pipeline is thin and about 1mm, and the height required by the anti-blocking horn-shaped special gas hole cannot be met;
2) the blockage of the special air holes is mainly caused by sediment deposition at the outlets of the special air holes, and the sediment deposition at the outlets of the special air holes still cannot be reduced by directly designing the outlets on the original special air pipelines;
3) no matter what kind of mode design's special gas hole, will deposit a certain amount of deposit always in certain periodic technological process, design the horn mouth directly on special gas pipeline wall, in the follow-up sediment process of getting rid of with the drill bit easy damage the special gas hole of design, also can pollute simultaneously and damage the air supply pipe.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, many variations and modifications can be made without departing from the inventive concept of the present invention, which falls into the protection scope of the present invention.
Claims (10)
1. A special gas pipeline, comprising: prevent blockking up special gas pocket of loudspeaker of air supply pipe, a plurality of groups, prevent blockking up special gas pocket of loudspeaker evenly set up in on the air supply pipe wall, prevent blockking up special gas pocket of loudspeaker and include: the dustcoat with set up in the special gas pocket of loudspeaker form in the dustcoat, the below air inlet in the special gas pocket of loudspeaker form with air supply pipe wall intercommunication is connected, the lateral wall of the top gas outlet in the special gas pocket of loudspeaker form with the opening lateral wall of dustcoat is tangent to be connected.
2. The special gas pipeline according to claim 1, wherein the diameter of the lower gas inlet of the horn special gas hole is smaller than the diameter of the upper gas outlet of the horn special gas hole.
3. The special gas pipeline according to claim 2, comprising: the anti-blocking air supply device comprises a main air pipe, an air supply pipe and at least two upper air pipes, wherein the main air pipe is communicated with the two branch air pipes which are symmetrically distributed, the branch air pipes are communicated with the air supply pipe, anti-blocking horn special air holes are formed in the side wall of the air supply pipe and communicated with the air supply pipe, and one special air is passed through the anti-blocking horn special air holes to uniformly enter a process cavity.
4. The special gas pipeline according to claim 3, wherein the outer cover is any one of cylindrical, truncated cone, inverted truncated cone or hexagonal.
5. The special air pipeline according to claim 4, characterized in that the diameter of the lower air inlet of the trumpet-shaped special air hole is 0.1mm-2 mm.
6. The special gas pipeline according to claim 5, wherein the diameter of the air outlet above the trumpet-shaped special gas hole is 1.5mm-5 mm.
7. The special gas pipeline of claim 6, wherein the height of the anti-clogging horn special gas hole is 1mm-5 mm.
8. The special gas pipeline of claim 7 wherein the anti-clogging trumpet special gas orifice is removably connected to the gas supply pipe side wall.
9. The special gas pipeline of claim 8 wherein a sealing ring is disposed at the junction of the anti-clogging trumpet-shaped special gas hole and the side wall of the gas supply pipe.
10. The special gas pipeline according to claim 9, comprising: deposit thickness detection sensor, central processing unit and main pipeline controller, deposit thickness detection sensor with central processing unit electricity is connected, central processing unit with main pipeline controller electricity is connected, and the special gas input or the special gas of control trunk line are cut off.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010083929.0A CN111118476A (en) | 2020-02-10 | 2020-02-10 | Special gas pipeline |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010083929.0A CN111118476A (en) | 2020-02-10 | 2020-02-10 | Special gas pipeline |
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| CN111118476A true CN111118476A (en) | 2020-05-08 |
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| CN202010083929.0A Pending CN111118476A (en) | 2020-02-10 | 2020-02-10 | Special gas pipeline |
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