CN203923369U - A kind of special air pipe of replaceable special tracheal orifice - Google Patents
A kind of special air pipe of replaceable special tracheal orifice Download PDFInfo
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- CN203923369U CN203923369U CN201420309513.6U CN201420309513U CN203923369U CN 203923369 U CN203923369 U CN 203923369U CN 201420309513 U CN201420309513 U CN 201420309513U CN 203923369 U CN203923369 U CN 203923369U
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- air pipe
- tracheal orifice
- stud bolt
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Abstract
The utility model discloses a kind of special air pipe of replaceable special tracheal orifice, comprise the fixed block, gasket seal, stud bolt, special tracheal orifice and the special air pipe that are welded on special air pipe wall, described stud bolt is in described fixed block and be embedded in the perforate of described special air pipe, and by described gasket seal and described fixed block close contact, described special tracheal orifice runs through in described stud bolt and is communicated to described special air pipe; The utility model is by being arranged on special tracheal orifice on the stud bolt that is easy to handling, by changing stud bolt, to realize simple and quick replacing, safeguard the object of special tracheal orifice, shortened the maintenance of the equipment time, increase work efficiency, extend special air pipe work-ing life, save cost of equipment maintenance, simplicity of design is reliable simultaneously, good airproof performance, easy for installation, cost is lower.
Description
Technical field
The utility model relates to a kind of board-like PECVD equipment, is specifically related to a kind of special air pipe.
Background technology
At present, in solar battery sheet production process, need to be at plated surface one deck silicon nitride (SiN) film of cell piece, this layer film can reduce the reflectivity of sunlight, improves photoelectric transformation efficiency, also has good anti-oxidant and insulating property, the good ability of sheltering metal and water ion diffusion, chemical stability is good, and except hydrofluoric acid and hot phosphoric acid can slowly corrode, other acidic groups are originally not corrodible.Board-like PECVD(plasma enhanced chemical vapor deposition method with special air pipe) equipment arises at the historic moment, and in technological process, special gas (comprising ammonia and silane) is transported to process cavity participation reaction by the special tracheal orifice of special air pipe.Yet about non-stop run 100 hours, along with the accumulation of SiN, the special tracheal orifice that diameter is 1mm is easy to stop up and causes plated film bad, and equipment needs to safeguard.Because SiN hardness ratio is larger and special tracheal orifice is smaller, it is very inconvenient to safeguard.General every PECVD equipment has 264 special tracheal orifices, and the equipment mean time to service reaches 4 hours, and every 3 months needs of special air pipe are changed once.
Utility model content
Utility model object: the purpose of this utility model is for the deficiencies in the prior art, and a kind of special air pipe of being convenient to change special tracheal orifice, shortening the replaceable special tracheal orifice of maintenance time is provided.
Technical scheme: the special air pipe of a kind of replaceable special tracheal orifice described in the utility model, comprise the fixed block, gasket seal, stud bolt, special tracheal orifice and the special air pipe that are welded on special air pipe wall, described stud bolt is in described fixed block and be embedded in the perforate of described special air pipe, and by described gasket seal and described fixed block close contact compression, described special tracheal orifice runs through in described stud bolt and is communicated to described special air pipe; Because the utility model is as special tracheal orifice by the perforation on stud bolt medullary ray, therefore when special tracheal orifice occurs when obstruction need to be safeguarded only to need to back out stud bolt by hand, a new stud bolt part is dredged or changed to the special tracheal orifice on it and again load onto.
Preferably, the diameter of described special tracheal orifice is 1mm, is easy to like this control pore ventilation flow rate, guarantee that gas output is all steady, guarantee technological effect, if pore is bigger than normal, cause airshed fluctuation to affect coating effects greatly, if pore this region coating quality of silicon congestion affects that is easily nitrided less than normal.
Preferably, every long 1.1m of described special air pipe, is provided with one group of special tracheal orifice every 5 centimetres, can guarantee that special gas output is balanced, guarantees coating effects, if uneven distribution pore easily causes special gas output unbalanced, the thickness of cell piece and aberration cannot guarantee.
Further, described gasket seal is made by viton, and special tracheae Working environment reaches 300 degrees Celsius conventionally, and the characteristic that viton has is high temperature resistant, oil resistant and chemical-resistant resistance corrode, therefore can reach the technical requirements of high temperature resistant and good airproof performance.
Beneficial effect: the utility model is by being arranged on special tracheal orifice on the stud bolt that is easy to handling, by changing stud bolt, to realize simple and quick replacing, safeguard the object of special tracheal orifice, shortened the maintenance of the equipment time, increase work efficiency, extend special air pipe work-ing life, save cost of equipment maintenance, simplicity of design is reliable simultaneously, good airproof performance, easy for installation, cost is lower.
Accompanying drawing explanation
Fig. 1 is the floor map of the special air pipe of utility model;
Fig. 2 is section (along A-A in Fig. 1) schematic diagram of special tracheal orifice structure.
Embodiment
Below technical solutions of the utility model are elaborated, but protection domain of the present utility model is not limited to described embodiment.
embodiment: a kind of special air pipe 5 of replaceable special tracheal orifice 4, as shown in Figure 1, special air pipe 5 is provided with 22 groups of special tracheal orifice 4 structures, as shown in Figure 2, each special tracheal orifice 4 structure has fixed block 1, gasket seal 2, stud bolt 3 and special tracheal orifice 4, and concrete, the diameter of special tracheal orifice 4 is 1mm.Fixed block 1 its end face of annular is welded on special air pipe 5 walls, stud bolt 3 is in fixed block 1 and be embedded in the opening on special air pipe 5 walls, between stud bolt 3 and fixed block 1, by viton (FKM) gasket seal 2 close contacts press seal, special tracheal orifice 4 runs through and is communicated to special air pipe 5 along the medullary ray of stud bolt 3.
Special tracheal orifice 4 is changed while safeguarding, from fixed block 1, backed out stud bolt 3 the special tracheal orifice 4 on it is dredged, or stud bolt 3 parts that directly more renew load onto again, simplified and safeguarded step, simple to operate, improved production efficiency.
As mentioned above, although represented and explained the utility model with reference to specific preferred embodiment, it shall not be construed as the restriction to the utility model self.Not departing under the spirit and scope prerequisite of the present utility model of claims definition, can make in the form and details various variations to it.
Claims (4)
1. the special air pipe of a replaceable special tracheal orifice, it is characterized in that: comprise the fixed block, gasket seal, stud bolt, special tracheal orifice and the special air pipe that are welded on special air pipe wall, described stud bolt is in described fixed block and be embedded in the perforate of described special air pipe, and by described gasket seal and described fixed block close contact, described special tracheal orifice runs through in described stud bolt and is communicated to described special air pipe.
2. the special air pipe of replaceable special tracheal orifice according to claim 1, is characterized in that: the diameter of described special tracheal orifice is 1mm.
3. the special air pipe of replaceable special tracheal orifice according to claim 1, is characterized in that: every long 1.1m of described special air pipe, is provided with one group of special tracheal orifice every 5 centimetres.
4. the special air pipe of replaceable special tracheal orifice according to claim 1, is characterized in that: described gasket seal is made by viton.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420309513.6U CN203923369U (en) | 2014-06-12 | 2014-06-12 | A kind of special air pipe of replaceable special tracheal orifice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420309513.6U CN203923369U (en) | 2014-06-12 | 2014-06-12 | A kind of special air pipe of replaceable special tracheal orifice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203923369U true CN203923369U (en) | 2014-11-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420309513.6U Active CN203923369U (en) | 2014-06-12 | 2014-06-12 | A kind of special air pipe of replaceable special tracheal orifice |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203923369U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111118476A (en) * | 2020-02-10 | 2020-05-08 | 江苏科来材料科技有限公司 | Special gas pipeline |
-
2014
- 2014-06-12 CN CN201420309513.6U patent/CN203923369U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111118476A (en) * | 2020-02-10 | 2020-05-08 | 江苏科来材料科技有限公司 | Special gas pipeline |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |