CN205011835U

CN205011835U - Board -like PECVD is with cyclic annular venthole of special air pipe cover

Info

Publication number: CN205011835U
Application number: CN201520776934.4U
Authority: CN
Inventors: 鲁科; 乔琦; 陆红艳; 黄海涛; 陈如龙
Original assignee: Wuxi Suntech Power Co Ltd
Current assignee: Wuxi Suntech Power Co Ltd
Priority date: 2015-10-08
Filing date: 2015-10-08
Publication date: 2016-02-03
Anticipated expiration: 2025-10-08

Abstract

The utility model provides a board -like PECVD is with cyclic annular venthole of special air pipe cover, the venthole body that sets up on special air pipe, it improves the part and lies in: establish a lantern ring around the venthole body, the lantern ring is located the outside of venthole body. Furtherly, the lantern ring and this component parts of an entirety of venthole centre of a circle. Furtherly, the height of the lantern ring is 4-7mm, and the internal diameter is 3-6mm, and the wall thickness of the lantern ring is 1-1.2mm. Furtherly more, the height of the lantern ring is 5-6mm, and the internal diameter is 4-5mm. Furtherly, the diameter of venthole body is 1-1.2mm. The utility model has the advantages of: the special air pipe venthole that can effectively prevent PECVD blocks up, make special trachea way coating film thickness everywhere even.

Description

The special air pipe collar shape production well of board-like PECVD

Technical field

The utility model relates to manufacture of solar cells field, and especially one relates to PECVD(plasma reinforced chemical vapour deposition) filming equipment.

Background technology

Current solar cell filming equipment panel PECVD, its Principle of plating is that A and B gas gushes out from the pore of different pipelines, enters vacuum cavity, utilizes microwave tube by gaseous plasma, react, and forms film at silicon chip surface, as shown in Figure 1:

In Fig. 1, the lower surface of silicon chip 1 needs plated film, and microwave tube 2 is positioned at below silicon chip 1; From A gas piping 3 and B gas piping 4, spray A gas and B gas respectively, utilize microwave tube 2 by gaseous plasma, form the plasma body of A gas and the plasma body of B gas, then form film 5 at silicon chip 1 lower surface.In the paper direction perpendicular to Fig. 1, A gas piping 3 and B gas piping 4 are all intervally distributed with multiple production well.A gas piping 3 and B gas piping 4 are all called special air pipe.

And spray apertures (production well) diameter of special air pipe in current cavity only has about 1mm, very little, this kind of design easily deposition reaction resultant on hole, production well is caused to block gradually, thus gas flow reduces gradually, the most serious result is that production well is blocked completely, and gas completely cannot be out.The coating film thickness at plug-hole place will reduce greatly, thus cause the membrane thickness unevenness degree in whole road to increase, and quality product reduces, and causes the maintenance intervals of equipment greatly to shorten.

Summary of the invention

For the deficiencies in the prior art, the utility model provides the special air pipe collar shape production well of a kind of board-like PECVD, can solve the production well plug-hole problem of special air pipe in board-like PECVD.The technical solution adopted in the utility model is:

The special air pipe collar shape production well of a kind of board-like PECVD, comprise the production well body that special air pipe is arranged, its improvements are:

Around production well body, establish a collar, the collar is positioned at the outside of production well body.

Further, the collar and production well body concentric.

Further, the height of the collar is 4 ~ 7mm, and internal diameter is 3 ~ 6mm, and the wall thickness of the collar is 1 ~ 1.2mm.

Further, the height of the collar is 5 ~ 6mm, and internal diameter is 4 ~ 5mm.

Further, the diameter of production well body is 1 ~ 1.2mm.

The utility model has the advantage of:

1) the special air pipe production well blocking of PECVD can effectively be prevented; Make special feed channel coating film thickness everywhere even.

2) structure is simple, and easy to make, the collar selects stainless steel, long service life, is welded and fixed with special air pipe, convenient to existing filming equipment transformation.

Accompanying drawing explanation

Fig. 1 is existing PECVD device plated film schematic diagram.

Fig. 2 is structure of the present utility model composition schematic diagram.

Fig. 3 is schematic top plan view of the present utility model.

Embodiment

Below in conjunction with concrete drawings and Examples, the utility model is described in further detail.

The special air pipe collar shape production well of the board-like PECVD that the utility model proposes, as shown in Figure 2, comprise the production well body 10 that special air pipe is arranged, the diameter of described production well body 10 is preferably 1 ~ 1.2mm;

Around production well body 10, establish a collar 20, the collar 20 can adopt welding process to be fixed on special air pipe, and the collar 20 is positioned at the outside of production well body 10; The collar 20 and special air pipe all adopt stainless steel usually.

The collar 20 and production well body 10 concentric; The height of the collar 20 is preferably 4 ~ 7mm, and internal diameter is preferably 3 ~ 6mm, and the wall thickness of the collar 20 is 1 ~ 1.2mm;

In solar cell plated film PECVD process, experiment proves, when the height of the collar 20 is 5 ~ 6mm, when internal diameter is 4 ~ 5mm, and the best results of anti-blockage holes.

As shown in Figure 2, this collar 20 increases production well bore indirectly, and is zone of positive pressure in the collar 20, conversion zone 30 is above the collar 20, resultant of reaction is deposited on around the collar 20, and production well body 10 place in the collar 20 can not be deposited on, thus prevent plug-hole.

After adopting the utility model, the film uniformity of solar cell plated film is excellent, and stable.The maintenance time of filming equipment extends greatly, and maintenance intervals was deferred to more than 8 days from original 3 ~ 4 days.

Claims

1. the special air pipe collar shape production well of board-like PECVD, comprises the production well body (10) that special air pipe is arranged, it is characterized in that:

Around production well body (10), establish a collar (20), the collar (20) is positioned at the outside of production well body (10).

2. the special air pipe collar shape production well of board-like PECVD as claimed in claim 1, is characterized in that:

The collar (20) and production well body (10) concentric.

3. the special air pipe collar shape production well of board-like PECVD as claimed in claim 1, is characterized in that:

The height of the collar (20) is 4 ~ 7mm, and internal diameter is 3 ~ 6mm, and the wall thickness of the collar (20) is 1 ~ 1.2mm.

4. the special air pipe collar shape production well of board-like PECVD as claimed in claim 3, is characterized in that:

The height of the collar (20) is 5 ~ 6mm, and internal diameter is 4 ~ 5mm.

5. the special air pipe collar shape production well of board-like PECVD as claimed in claim 1, is characterized in that:

The diameter of production well body (10) is 1 ~ 1.2mm.