KR20180012396A - Apparatus for preventing clogging of exhaust of chemical vapor deposition equipment - Google Patents

Abstract

The present invention relates to an apparatus for preventing clogging of exhaust hole of a chemical vapor deposition (CVD) equipment. When a CVD process is performed for a long time, materials accumulated on an inner wall of the exhaust hole are removed while maintaining a vacuum state of the CVD equipment so that a non-reacted material is prevented from blocking the exhaust hole of the CVD equipment to prevent a clogging phenomenon. By providing the apparatus for preventing clogging of the exhaust hole of the CVD equipment capable of inducing normal chemical reaction while constantly maintaining internal pressure of the CVD equipment, clogging of the exhaust hole is prevented by periodic utilization of the apparatus for preventing clogging during CVD process to smoothly perform the long term CVD process such that the CVD equipment is able to more stably grow high quality bulk material.

Description

[0001] The present invention relates to an apparatus for preventing clogging of a CVD apparatus,

The present invention relates to a CVD (Chemical Vapor Deposition) apparatus. In particular, in order to prevent a clogging phenomenon in which an exhaust port of a CVD apparatus is clogged by unreacted substances during a long time CVD process, And more particularly, to an apparatus for preventing clogging of an exhaust system of a CVD apparatus capable of maintaining a constant internal pressure of a CVD apparatus and inducing a normal chemical reaction by removing substances deposited on the inner wall of the exhaust system.

CVD (Chemical Vapor Deposition) equipment is mainly used for the purpose of depositing a thin film of silicon or the like on a substrate in a manufacturing process of IC (Integrated Circuit) in a semiconductor field, A nitrogen film, and an amorphous silicon thin film.

CVD is a chemical process in which chemical energy is applied to a gas containing a chemical substance during the production process, or when plasma is generated at a high frequency, the raw material is radicalized and reactivity is greatly increased to be adsorbed on the substrate and deposited. In the deposition process, the deposition time is very short because it is used for forming a thin film layer of several tens nm. As shown in FIG. 1, the CVD process pyrolyzes by arbitrary energy while supplying gas in the reaction chamber which is blocked from the outside, thereby depositing the target material on the substrate.

On the other hand, CVD equipment is also used in some materials such as optical lenses to grow bulk pumped materials. CVD synthesis for the growth of bulk materials proceeds by chemical reaction at high temperature for more than 100 hours for a long time.

FIG. 2 is a view schematically showing a CVD apparatus 100 for bulk growth, in which the heater 20 is driven to sufficiently raise the temperature inside the reaction furnace 20 so as to perform a chemical reaction, And enters the chamber 10 through the gas supply line 40. Generally, when the degree of vacuum is maintained such that synthetic vapor deposition is performed at a low vacuum of 100 Torr or less, the reacted gas is continuously deposited on the surface of the reaction furnace 20 to grow continuously, And is discharged together with the exhaust part (50).

A cooling water line 60 for cooling the high temperature CVD equipment is provided around the chamber 10. The cooling water line 60 for preventing the thermal deformation of the sealing O-ring is also applied to the portion 55 (exhaust port) where the chamber 10 and the exhaust pipe 50 are connected A cooling water line 60 is provided. At this time, since the diameter of the exhaust port 55 is rapidly reduced in order to maintain the vacuum inside the chamber 10, nuclei are generated in the inner wall of the exhaust connection portion due to the temperature drop and the narrow diameter by the cooling water line 60 Nucleation occurs and clogging occurs intensively around it, clogging the exhaust port.

FIG. 3 shows a photograph of the exhaust port of a CVD apparatus for bulk growth in which clogging occurred. As shown in FIG. 3, if the exhaust port 55 is clogged by the condensate D, the exhaust gas is not normally exhausted through the exhaust pipe, so that the pressure inside the chamber is changed. As a result, a normal chemical reaction can not be induced, The desired material can not be obtained.

KR 10-0823690 B1 (Registered on April 14, 2008) KR 10-1046969 B1 (Registered June 30, 2011) KR 10-2015-0118552 A (published Feb 22, 2015) KR 10-2014-0005136 A (released April 14, 2014)

An object of the present invention to solve the above problems is to provide an apparatus for preventing clogging of an exhaust system of a CVD apparatus capable of removing condensation of unreacted materials inside an exhaust port during a long time operation of a CVD apparatus while maintaining a vacuum during a CVD process I have to.

According to an aspect of the present invention, there is provided an apparatus for preventing clogging of an exhaust system of a CVD apparatus, the apparatus comprising: a cylindrical body having a protruding inlet edge protruded in a stepped manner, A fixture of the apparatus; A rotation shaft passing through the center of the fixture and extending to the exhaust port; A handle coupled to an upper end of the rotary shaft by a fixing pin to rotate and vertically move the rotary shaft; A rotary weight coupled to a lower end of the rotary shaft by a fixing pin to remove condensed matter deposited inside the air outlet in accordance with rotation and vertical movement of the rotary shaft; Wherein one end having a first diameter is inserted into the inner periphery of the fixture and the other end of the one end is inserted into the inner periphery of the fixture, A rotating shaft engaging portion having a center portion having a second diameter equal to the stepped edge of the fastener, a rotating shaft engaging with the stepped edge of the fastener, a threaded portion formed on an outer circumference of the other end having a third diameter, A clamp that engages a center portion having a second diameter of the rotation axis coupling portion and a stepped edge of the fixture; A first sealing portion inserted into a stepped portion of the inner circumference at the other end having the third diameter of the rotary shaft coupling portion to seal between the outer circumference of the rotary shaft passing through the rotary shaft coupling portion and the rotary shaft coupling portion; And a seal adjusting part for adjusting the degree of sealing between the first sealing part and the rotation axis combining part by forming a thread on the inner circumference so as to be screwed with a thread formed on the outer circumference of the other end having the third diameter of the rotary shaft coupling part, And a coupler for preventing unscrewing of the screw connection of the seal adjusting part.

The sealing portion may include a first O-ring and a second O-ring inserted into a step of an inner circumference at the other end having a third diameter of the rotary shaft coupling portion, A compression ring inserted between the O-ring and the second O-ring and having a section inclined in the center direction so as to press the first O-ring and the second O-ring axially in accordance with the tightening of the seal adjusting section, And a cover ring covering the first O-ring, the second O-ring and the compression ring.

In addition, in the apparatus for preventing clogging of exhaust vents in a CVD apparatus according to the present invention, it is preferable that the apparatus further comprises a coupler for preventing unscrewing of the screw of the seal adjusting unit.

In the apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention, the coupler may include a coupling hole having one or more threads formed on a top surface of a columnar shape and coupled with the sealing adjustment unit by bolts, The cut portion cut to the periphery is formed and the cut portion is passed through from both sides to form a tightening hole formed with a thread so that the bolt is coupled to the tightening hole to adjust the degree of tightening the rotation axis.

In addition, in the apparatus for preventing clogging of exhaust vents in CVD equipment according to the present invention, it is preferable that the rotating weights are formed so as to form screw-shaped protrusions along the outer circumference, thereby more effectively removing the condensates accumulated in the exhaust holes Do.

Further, in the apparatus for preventing clogging of exhaust vents in a CVD equipment according to the present invention, a sealing O-ring is provided at an inner peripheral edge of the stepped edge of the fixing member coupled with a central portion having a second diameter of the rotary shaft- And an annular ring inserted into the inner periphery of the sealing O-ring so as to reduce friction with the sealing O-ring when the outer circumference of one end having the first diameter of the engaging portion is inserted into the fixing hole It is possible to prevent leakage of pressure that may occur between the CVD apparatus and the apparatus for preventing clogging of the exhaust system of the CVD apparatus according to the present invention.

As described above, the present invention has the effect of effectively removing the condensate deposited inside the exhaust port of the CVD equipment due to the quenching and the narrowed diameter due to the cooling water without affecting the CVD synthesis process.

Accordingly, it is an object of the present invention to prevent clogging of the exhaust port by periodic operation during the CVD synthesis process, thereby enabling a long-time CVD synthesis process to be smoothly performed, and to provide a CVD device capable of growing a high- .

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a simplified illustration of a typical CVD equipment,
2 is a simplified illustration of a CVD apparatus for bulk growth,
FIG. 3 is a photograph of exhaust air of a CVD apparatus for bulk growth in which clogging occurs,
4 is a view showing a state where an apparatus for preventing clogging of an exhaust port of a CVD apparatus according to the present invention is mounted on an exhaust pipe of a CVD apparatus,
5A and 5B are views showing a state before and during use of an apparatus for preventing clogging of exhaust vents of CVD equipment according to the present invention,
FIG. 6 is a perspective view illustrating an apparatus for preventing clogging of an exhaust port of a CVD apparatus according to the present invention,
7 is a front sectional view of an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention,
FIG. 8 is a partially enlarged sectional view of an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention,
FIG. 9 is an exploded perspective view of an exhaust-port clogging preventing apparatus of a CVD apparatus according to the present invention,
FIG. 10 is a perspective view for explaining the combination of the rotation shaft engaging part and the seal adjusting part of the exhaust clogging preventing device of the CVD equipment according to the present invention,
11 is a graph showing changes in the internal pressure of a conventional CVD apparatus without using an apparatus for preventing clogging of the exhaust system of the CVD apparatus according to the present invention,
FIG. 12 is a graph showing a change in pressure inside the CVD apparatus when the apparatus for preventing the clogging of the exhaust port of the CVD apparatus according to the present invention is operated. FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention will be described in detail with reference to the drawings. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS The same features of the Figures represent the same reference symbols wherever possible. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives. In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

Hereinafter, the attached drawings are exaggerated or simplified in order to facilitate understanding and clarification of the structure and operation of the technology, and it is to be understood that each component does not exactly coincide with the actual size.

The terms first, second, etc. may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprises" or "having" and the like are used to specify that there is a feature, a number, a step, an operation, an element, a component or a combination thereof described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In addition, when an element is referred to as including an element, it is understood that the element may include other elements, not the other element, unless specifically stated otherwise, and the meaning of the term " Means a unit or module type that processes at least one function or operation.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It is to be understood that the same terms as those defined in the commonly used terms are defined in consideration of the functions of the present invention and are to be construed in accordance with the technical idea of the present invention and the meaning commonly understood or commonly recognized in the technical field And is not to be construed as an ideal or overly formal sense unless expressly defined to the contrary.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

4A and 4B are views showing a state in which an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention is mounted on an exhaust pipe of a CVD apparatus. Fig. 3 is a view schematically showing a state in use; Fig.

4 to 5B, the apparatus 200 for preventing clogging of the exhaust of the CVD apparatus according to the present invention is mounted through an upper part of the spare line 51 provided on the upper part of the exhaust pipe 50 connected to the upper part of the CVD equipment . In the case of the exhaust pipe 50 in which the spare line 51 is not provided, a hole is formed in the upper portion of the exhaust pipe 50 so as to be perpendicular to the exhaust port 55, After the step 201 is formed, the edge of the fixture 201 is formed to be stepped, and then the step can be mounted by clamping the step and a later-described rotary shaft coupling part with a clamp.

Referring to FIG. 5A, the apparatus 200 for preventing clogging of exhaust of a CVD apparatus according to the present invention, which is mounted at a position perpendicular to the exhaust port 55, does not affect the flow of the exhaust gas during the CVD synthesis process, In order to prevent unreacted materials from being deposited on the rotating weight of the lower stage, it is mounted so as to be positioned above the exhaust pipe 50 at a normal time when no operation is performed, and in order to remove condensed matter accumulated in the exhaust opening 55, 5b, the device 200 is rotated and vertically moved to scrape out the condensate accumulated on the inner wall of the exhaust port 55 or to pierce the clogged exhaust port 55 do.

FIG. 6 is a perspective view showing an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention, FIG. 7 is a front sectional view of an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention, FIG. 9 is an exploded perspective view of an exhaust clogging prevention device of a CVD apparatus according to the present invention, and FIG. 10 is a perspective view of a rotary shaft engaging portion and a sealing adjustment portion of an exhaust clogging prevention device of a CVD equipment according to the present invention. Fig.

6 to 10, an apparatus 200 for preventing clogging of an exhaust system of a CVD apparatus according to the present invention includes a rotation shaft 210 (see FIG. 6) formed through a central portion of the fixing member 201 and reaching the exhaust port 55 A rotary shaft 230, a rotary shaft coupling part 240, a clamp 250, a first sealing part 260, a sealing adjusting part 270, a coupler 280, and a second sealing part 270. [ (290).

The handle 220 is coupled to the upper end of the rotary shaft 210 by a fixing pin to move the rotary shaft 210 in the vertical direction and the rotary weight 230 is coupled to the rotary shaft 210, And the condensed matter D accumulated in the exhaust port 55 is removed in accordance with the rotation and the upward / downward movement of the rotation shaft 210.

9, the rotary weight 230 has a rotary shaft insertion portion 233 at the center of the upper surface thereof to which the rotary shaft 210 is inserted and fixed, and a fixing hole 235, into which the fixing pin 235 is inserted and fixed 234 are formed on one side of the rotary shaft inserting portion 233 and a screw-shaped projection 232 may be formed on a side surface from the lower end to the edge of the upper surface to efficiently crush the condensate D.

As shown in FIGS. 8 to 10, the rotation shaft coupling unit 240 may include holes having diameters larger than the diameter of the rotation shaft 210 so as to pass through the center of the rotation shaft 210, One end 241 having a first diameter is inserted into the inner periphery of the fixing member 201 and a central portion 243 having the same second diameter as the stepped edge of the fixing member 201 is formed, And a thread is formed on the outer circumferential edge of the other end 245 having the third diameter and a step is formed on the inner circumferential edge.

The central portion 243 having the second diameter of the rotary shaft coupling portion 240 is brought into contact with the stepped edge of the fixture 201 of the same diameter and these two are closely contacted and fixed by a coupling means such as a clamp 250 . The rotary shaft coupling portion 240 and the fixing hole 201 are coupled and fixed by the clamp 250 so that the rotary shaft 210 inserted through the rotary shaft coupling portion 240 moves up and down vertically to the air outlet 55 And is stably disposed at a position where it can be moved.

The first sealing part 260 is inserted into the inner peripheral step of the other end 245 having the third diameter of the rotation axis coupling part 240 and inserted into the rotation axis 210 inserted through the rotation axis coupling part 240 And the rotary shaft engaging portion 240. As shown in FIG.

The first sealing part 260 includes a first O-ring 261 and a second O-ring 263 inserted into the inner peripheral step of the other end 245 having the third diameter of the rotary shaft coupling part 240, And the first O-ring 261 and the second O-ring 263 are inserted between the first O-ring 261 and the second O-ring 263 to press the first O-ring 261 and the second O-ring 263 in the axial direction A second O-ring 263, and a second O-ring 263, which are inserted between the second O-ring 263 and the seal adjusting portion 270, And a cover ring 267 covering the ring 265. Since the first sealing part 260 includes the double O-rings in a stepwise manner, the sealing device between the rotating shaft 210 and the rotating shaft coupling part 240 is further strengthened in the exhaust blocking device of the CVD equipment according to the present invention, The internal pressure of the CVD equipment is maintained as it is during the removal of the condensate in the CVD apparatus 55, thereby achieving a stable CVD process.

As shown in FIGS. 8 to 10, the seal adjusting part 270 is screwed into the inner periphery of the rotary shaft coupling part 240 so as to be screwed with a thread formed on the outer periphery of the other end 245 having the third diameter, And the degree of sealing between the first sealing portion 260 and the rotation axis connecting portion 240 is adjusted. The first O-ring 261 and the second O-ring 263 of the first sealing portion 260 are pressed up and down by the compression ring 265 and the covering ring 267 by tightening the seal adjusting portion 270 And is contracted while being sucked into the inclined surfaces of the compression ring 265, so that strong sealing is performed.

It is preferable to further include a coupler 280 for preventing unscrewing of the seal adjusting portion 270.

6 and 9, the coupler 280 includes a coupling hole 281 having one or more threads formed on a top surface of a columnar shape and coupled with the sealing adjuster 270 by a bolt 282, And a bolt 286 is coupled to the fastening hole 285 by forming a fastening hole 285 having a threaded portion penetrating the cutout 283 from both sides to form a fastening hole 285 cut from the center to the outer circumference. So that the degree of tightening the rotation shaft 210 can be adjusted. 5A, the rotary shaft 210 is completely moved upward and fixed when the apparatus 200 for preventing the clogging of exhaust air is not operated, so that in the CVD process, Do not disturb the flow of gas.

The second sealing portion 290 is fastened by the clamp 250 to the inner periphery of the stepped edge of the fastener 201 coupled with the central portion 243 having the second diameter of the rotary shaft coupling portion 240. [ 9, when the outer periphery of one end 241 having a first diameter of the rotary shaft coupling part 240 is inserted into the fixing hole 201, And an annular ring (293) inserted into the inner periphery of the sealing O-ring (291) so as to reduce friction with the sealing O-ring (291).

The use of the second sealing portion 290 makes it possible to prevent the clogging prevention device 200 of the CVD apparatus according to the present invention from being installed vertically to the exhaust port 55 through the hole formed in the upper portion of the exhaust pipe 50, A stable CVD process can be performed by maintaining the internal pressure of the CVD equipment as it is while removing the condensate in the exhaust port 55 through the sealing.

FIG. 11 is a view showing a change in pressure inside the apparatus when a conventional CVD apparatus without using an apparatus for preventing the clogging of the exhaust system of the CVD apparatus according to the present invention is changed. FIG. 12 is a view showing an apparatus for preventing clogging of an exhaust system of a CVD apparatus according to the present invention. The diagram shows the pressure change inside the equipment during the process of the operated CVD equipment.

First, as shown in FIG. 11, when the conventional CVD apparatus without the clogging preventing device of the CVD apparatus according to the present invention was used, the internal pressure continuously increased after 60 hours from the start of the clogging process. This is a phenomenon that occurs. If the internal pressure of the CVD equipment rises, it is difficult to induce an ideal chemical reaction, and the process must be stopped.

As shown in FIG. 12, when the clogging phenomenon is prevented, it is confirmed that the internal pressure of the CVD apparatus is maintained in a stable state when the CVD apparatus using the apparatus for preventing the clogging of exhaust of the CVD apparatus according to the present invention is operated have.

In addition, even though the apparatus for preventing the clogging of exhaust of the CVD apparatus according to the present invention is periodically operated during the progress of the CVD synthesis process, there is no change in the internal pressure. Therefore, even when the condensation inside the exhaust hole is removed through sufficient sealing, It can be confirmed that a stable CVD process is performed.

As described above, the apparatus for preventing the clogging of the exhaust system of the CVD apparatus according to the present invention can remove the condensation of the unreacted material inside the exhaust gas generated during long operation of the CVD apparatus, while maintaining the vacuum during the CVD process.

In addition, the apparatus for preventing clogging of the exhaust system of the CVD apparatus according to the present invention prevents the clogging of the exhaust port by periodic operation during the CVD synthesis process so that the CVD synthesis process can be smoothly performed for a long time. Allow the bulk material to grow.

Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. Therefore, the scope of the present invention should not be limited by the described embodiments but should be determined by the scope of the appended claims and equivalents thereof.

201: fixture 210: rotary shaft
220: handle 230: rotational weight
240: rotation shaft coupling portion 250: clamp
260: first sealing part 270: sealing adjusting part
280: Coupler 290: Second sealing part

Claims (6)

A cylindrical fixture protruding from the hole formed in the upper part of the exhaust pipe so as to be perpendicular to the exhaust port of the CVD apparatus and having a protruding edge formed in a stepped shape;
A rotation shaft passing through the center of the fixture and extending to the exhaust port;
A handle coupled to an upper end of the rotary shaft by a fixing pin to rotate and vertically move the rotary shaft;
A rotary weight coupled to a lower end of the rotary shaft by a fixing pin to remove condensed matter deposited inside the air outlet in accordance with rotation and vertical movement of the rotary shaft;
Wherein one end having a first diameter is inserted into the inner periphery of the fixture and the other end of the one end is inserted into the inner periphery of the fixture, A rotary shaft engaging portion having a central portion having a second diameter equal to the stepped edge of the fastener, a rotary shaft engaging the stepped edge of the fastener, a thread formed on an outer periphery of the other end having a third diameter,
A clamp that engages a center portion having a second diameter of the rotation axis coupling portion and a stepped edge of the fixture;
A first sealing portion inserted into a stepped portion of the inner circumference at the other end having the third diameter of the rotary shaft coupling portion to seal between the outer circumference of the rotary shaft passing through the rotary shaft coupling portion and the rotary shaft coupling portion; And
A seal adjusting part for forming a thread on the inner circumference so as to be screwed with a thread formed on the outer circumference of the other end having the third diameter of the rotary shaft coupling part to adjust the degree of sealing between the first sealing part and the rotary shaft coupling part;
And an exhaust port for preventing clogging of the exhaust system of the CVD apparatus.
2. The apparatus according to claim 1,
A first O-ring and a second O-ring inserted into a step of an inner circumference of the other end having a third diameter of the rotary shaft coupling portion, and a second O-ring inserted between the first O-ring and the second O-ring, And a sealing ring inserted between the second O-ring and the sealing regulating portion and covering the first O-ring, the second O-ring and the compression ring. Wherein the exhaust gas is introduced into the exhaust system.
The method according to claim 1,
And a coupler for preventing unscrewing of the screw connection of the seal adjusting part.
The connector according to claim 3,
A coupling part having one or more threads formed on a top surface of a columnar shape and coupled with the sealing adjustment part by a bolt and formed with a cut part having one side cut from the center to the outer circumference, And a bolt is coupled to the fastening hole to adjust the tightening degree of the rotation shaft.
The rotary weighing apparatus according to claim 1,
And a screw-shaped protrusion is formed along the outer periphery of the exhaust port.
The method according to claim 1,
And an outer peripheral edge of the stepped edge of the fastener coupled with a central portion having a second diameter of the rotary shaft coupling portion by the clamp,
And an annular ring inserted into an inner periphery of the sealing O-ring so as to reduce friction between the sealing O-ring and an outer circumferential edge of the one end having the first diameter of the rotary shaft engaging portion when the fixing member is inserted into the fixing hole Further comprising a second sealing part for sealing the exhaust port of the CVD apparatus.

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