CN215610498U - HES-2 type efficient silane purification tower - Google Patents
HES-2 type efficient silane purification tower Download PDFInfo
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- CN215610498U CN215610498U CN202121277101.5U CN202121277101U CN215610498U CN 215610498 U CN215610498 U CN 215610498U CN 202121277101 U CN202121277101 U CN 202121277101U CN 215610498 U CN215610498 U CN 215610498U
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Abstract
The utility model discloses an HES-2 type efficient silane purification tower which comprises a tower body, wherein an air inlet is formed in the lower part of the side wall of the tower body, an air outlet is formed in the top of the side wall of the tower body, a first purification layer and a second purification layer are arranged in the tower body at intervals from bottom to top, the first purification layer comprises a dust removal packing layer and a spraying layer arranged above the dust removal packing layer, the second purification layer comprises a demisting packing layer and a spraying layer arranged above the demisting packing layer, the spraying layer comprises a plurality of horizontal spraying pipes arranged side by side, a plurality of nozzles distributed at intervals in the axial direction are arranged on the spraying pipes, and the nozzles are arranged downwards; one end of the spray pipe horizontally penetrates out of the tower body and is connected with a water supply pipe through a joint, and the spray pipe is detachably arranged on the tower body; and valves corresponding to each other are arranged between the water supply pipe and the spray pipe. But the shower level is taken out and is overhauld and maintain, and this process purifying column need not to shut down to can overhaul the maintenance to one or more spray piping simultaneously, but the shower that does not need to overhaul can normal operating.
Description
Technical Field
The utility model relates to the technical field of industrial environment-friendly equipment, in particular to an HES-2 type efficient silane purification tower.
Background
At present, most solar cell production enterprises adopt PECVD (plasma enhanced chemical vapor deposition) equipment to prepare an antireflection film, silane waste gas is generated in the process, and the common silane waste gas treatment equipment comprises a silane combustion barrel and a washing tower.
The spray tower adopted at present can remove a part of SiO in waste gas2Powder of SiO simultaneously2The powder is also easy to attach to the nozzle, the nozzle is blocked to influence the spraying effect, and the maintenance and the replacement are inconvenient; the chemical environment in the tower is severe, the nozzle is difficult to replace when entering the tower, and SiO attached to the wall of the tower2The powder is not easy to clean.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects in the prior art, the utility model provides an HES-2 type efficient silane purification tower which is used for purifying dust generated after silane tail gas is combusted in the industries of photovoltaics, semiconductors and the like and solves the technical problems in the background technology.
The HES-2 type efficient silane purification tower comprises a tower body, wherein an air inlet is formed in the lower portion of the side wall of the tower body, an air outlet is formed in the top of the side wall of the tower body, a first purification layer and a second purification layer are arranged in the tower body at intervals from bottom to top, the first purification layer comprises a dust removal packing layer and a spraying layer arranged above the dust removal packing layer, the second purification layer comprises a demisting packing layer and a spraying layer arranged above the demisting packing layer, the spraying layer comprises a plurality of horizontal spraying pipes arranged side by side, a plurality of nozzles distributed at intervals along the axial direction are arranged on the spraying pipes, and the nozzles are arranged downwards;
one end of the spray pipe horizontally penetrates out of the tower body and is connected with a water supply pipe through a joint, and the spray pipe is detachably arranged on the tower body;
and valves which are in one-to-one correspondence are arranged between the water supply pipe and the spray pipe.
Further, install fixed frame on the tower body lateral wall, the fixed plate that is provided with on the shower, the shower is followed penetrate in the fixed frame in the tower body, the fixed plate passes through bolt fixed mounting in fixed frame.
Further, the fixed frame is a square frame, and the fixed plate is a square plate matched with the fixed frame.
Further, the tower body bottom is provided with the silt guide plate that is the type of falling V, the tower body bottom in silt guide plate both sides all are provided with the drain.
Furthermore, the bottom of the tower body is also provided with a flushing port which is arranged between the silt guiding plate and the dedusting packing layer.
Further, still be provided with the access hole that has the observation function on the tower body.
The utility model has the beneficial effects that:
waste gas is by HES-2 high-efficient silane purifying column at the operation in-process, and waste gas is got into by the air inlet, is discharged by top gas outlet again, and the dust in the waste gas influences the efficiency of nozzle after on adhering to the nozzle of shower, closes corresponding valve this moment, pulls down the fixed plate on the shower that corresponds from fixed frame, with the joint and the delivery pipe disconnection of shower, then takes out the shower level and overhauls the maintenance, and it can with its reinstallation after overhauing the completion. The purification tower does not need to be shut down in the process, one or more spraying pipelines can be overhauled and maintained simultaneously, and the spraying pipes which do not need to be overhauled can normally run.
The dust that the layer of spraying washed down falls to the bottom of tower along with the sparge water to deposit at the bottom of the tower, the silt board that leads of falling the V-arrangement can make silt concentrate near the drain, makes silt get rid of totally more easily.
In daily operation, the inspection hole with the window function is used for observing the operation condition of the spraying pipeline and inspecting the spraying system, the accumulation condition of powder on the lower part of the tower body can be observed, the powder is appropriately treated, when the powder is accumulated more, the dust sludge at the bottom of the tower can be cleaned through the flushing hole, the inner wall of the flushing tower can be cleaned, and the powder can be discharged from the sewage outlet.
Drawings
In order to more clearly illustrate the detailed description of the utility model or the technical solutions in the prior art, the drawings that are needed in the detailed description of the utility model or the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
FIG. 1 is a first schematic structural diagram of an HES-2 type efficient silane purification tower according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram ii of an HES-2 type efficient silane purification tower according to an embodiment of the present invention.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and therefore are only examples, and the protection scope of the present invention is not limited thereby.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the utility model pertains.
As shown in figures 1-2, the utility model provides an HES-2 type efficient silane purification tower, which comprises a tower body 1, wherein an air inlet 2 is arranged at the lower part of the side wall of the tower body 1, an air outlet 3 is arranged at the top of the tower body, a first purification layer and a second purification layer are arranged in the tower body 1 at intervals from bottom to top, the first purification layer comprises a dust removal packing layer 4 and a spraying layer arranged above the dust removal packing layer 4, the second purification layer comprises a demisting packing layer 6 and a spraying layer arranged above the demisting packing layer 6, the spraying layer comprises a plurality of horizontal spraying pipes 5 arranged side by side, a plurality of nozzles 7 distributed at intervals along the axial direction are arranged on the spraying pipes 5, and the nozzles 7 are arranged downwards. One end of the spray pipe 5 horizontally penetrates out of the tower body 1 and is connected with a water supply pipe 9 through a joint 8, and the spray pipe 5 is detachably arranged on the tower body 1. And valves corresponding to each other are arranged between the water supply pipe 9 and the spray pipe 5.
Specifically, a fixed frame 10 is installed on the side wall of the tower body 1, a fixed plate 11 is fixedly arranged on the spray pipe 5, the spray pipe 5 penetrates into the tower body 1 from the inside of the fixed frame 10, and the fixed plate 11 is fixedly installed on the fixed frame 10 through bolts. For the convenience takes out shower 5, fixed frame 10 designs for square frame, and fixed plate 11 is the square board that matches with fixed frame 10, and fixed plate 11 passes through the bolt fastening on the border all around of fixed frame 10.
Further, the bottom of the tower body 1 is provided with an inverted V-shaped silt guiding plate 12, and the bottom of the tower body 1 is provided with drain outlets 13 on two sides of the silt guiding plate 12. The dust washed by the spraying layer falls to the bottom of the tower along with washing water and is deposited at the bottom of the tower, and the inverted V-shaped sludge guide plate 12 can enable sludge to be concentrated near the sewage discharge outlet 13, so that the sludge can be discharged completely more easily.
Furthermore, the bottom of the tower body 1 is also provided with a washing port 14, and the washing port 14 is arranged between the silt guiding plate 12 and the dedusting and packing layer 4. The tower body 1 is also provided with an access opening 15 with an observation function. In daily operation, the operation condition of the spraying pipeline and the maintenance spraying system are observed through the access hole 15 with the window function, the accumulation condition of powder at the lower part of the tower body can be observed, the powder is appropriately treated, when the powder is accumulated more, the powder sludge at the bottom of the tower can be cleaned through the flushing hole 14, the inner wall of the flushing tower can be flushed, and the powder sludge can be discharged from the sewage outlet 13.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention, and they should be construed as being included in the following claims and description.
Claims (6)
1. The utility model provides a HES-2 type high-efficient silane purifying tower, includes tower body (1), tower body (1) lateral wall lower part sets up air intake (2), top and sets up air outlet (3), the interval from the bottom up is provided with first purification layer and second and purifies the layer in tower body (1), first purification layer is in including dust removal packing layer (4) and setting the layer that sprays above dust removal packing layer (4), the second purifies the layer and includes defogging packing layer (6) and set up and is in the layer that sprays above defogging packing layer (6), its characterized in that: the spraying layer comprises a plurality of horizontal spraying pipes (5) arranged side by side, a plurality of nozzles (7) distributed at intervals along the axial direction are arranged on the spraying pipes (5), and the nozzles (7) are arranged downwards;
one end of the spray pipe (5) horizontally penetrates out of the tower body (1) and is connected with a water supply pipe (9) through a joint (8), and the spray pipe (5) is detachably arranged on the tower body (1);
and valves which are in one-to-one correspondence are arranged between the water supply pipe (9) and the spray pipe (5).
2. The HES-2 type high-efficiency silane purification tower as claimed in claim 1, wherein: install fixed frame (10) on tower body (1) lateral wall, the fixed plate (11) that are provided with on shower (5), shower (5) are followed penetrate in fixed frame (10) in tower body (1), fixed plate (11) are in through bolt fixed mounting on fixed frame (10).
3. The HES-2 type high-efficiency silane purification tower as claimed in claim 2, wherein: the fixed frame (10) is a square frame, and the fixed plate (11) is a square plate matched with the fixed frame (10).
4. The HES-2 type high-efficiency silane purification tower as claimed in claim 1, wherein: the novel sludge treatment tower is characterized in that a reversed V-shaped sludge guide plate (12) is arranged at the bottom of the tower body (1), and sewage discharge outlets (13) are formed in the two sides of the sludge guide plate (12) at the bottom of the tower body (1).
5. The HES-2 type high-efficiency silane purification tower as claimed in claim 4, wherein: the bottom of the tower body (1) is also provided with a flushing port (14), and the flushing port (14) is positioned between the silt guiding plate (12) and the dust removal packing layer (4).
6. The HES-2 type high-efficiency silane purification tower as claimed in claim 1, wherein: the tower body (1) is also provided with an access hole (15) with an observation function.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121277101.5U CN215610498U (en) | 2021-06-08 | 2021-06-08 | HES-2 type efficient silane purification tower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121277101.5U CN215610498U (en) | 2021-06-08 | 2021-06-08 | HES-2 type efficient silane purification tower |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215610498U true CN215610498U (en) | 2022-01-25 |
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ID=79942050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121277101.5U Active CN215610498U (en) | 2021-06-08 | 2021-06-08 | HES-2 type efficient silane purification tower |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215610498U (en) |
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2021
- 2021-06-08 CN CN202121277101.5U patent/CN215610498U/en active Active
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