CN202688436U - Detachable special gas hole - Google Patents
Detachable special gas hole Download PDFInfo
- Publication number
- CN202688436U CN202688436U CN 201220315041 CN201220315041U CN202688436U CN 202688436 U CN202688436 U CN 202688436U CN 201220315041 CN201220315041 CN 201220315041 CN 201220315041 U CN201220315041 U CN 201220315041U CN 202688436 U CN202688436 U CN 202688436U
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- China
- Prior art keywords
- pore
- detachable special
- detachable
- gas hole
- protective guard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a detachable special gas hole which comprises an embedded part and an exposed part. The embedded part is a cylinder with an outer thread. The exposed part is a gengon fixed on one end of the cylinder and used for dismantling the detachable special gas hole. A through gas hole is arranged between two ends of the detachable special gas hole. The detachable special gas hole can resolve a problem that depositing silicon nitride blocks a technical gas hole, and can guarantee stability of the craft.
Description
Technical field
The utility model relates to a kind of production unit of silicon solar cell, be specifically related to a kind of PECVD deposition chambers can be independently the more device of air-vent, i.e. a kind of detachable special pore.
Background technology
Sun power is paid close attention to by people its utilization as a kind of cleaning, the reproducible energy always.How crystal-silicon solar cell reduces the cost of solar cell as the main flow of present solar cell, raises the efficiency the emphasis that becomes domestic and international crystal silicon solar energy battery research.The PECVD filming process is as requisite one process procedure of production line for manufacturing battery, and the optimizing equipment mode of production is saved cost and improved production capacity, seems particularly important.In the board-like filming equipment of tradition, the maintenance cycle of special pore is short, it is loaded down with trivial details to safeguard, and maintenance process has the problem of damage to pore, is affect one of coating process effect and product line throughput principal element.
The utility model content
The utility model purpose: the purpose of this utility model is for the deficiencies in the prior art, and a kind of detachable special pore that can be convenient to equipment maintenance is provided, and has solved the affect problem of pore damage on technique.
Technical scheme: a kind of detachable special pore described in the utility model, it is characterized in that, comprise embedded part and exposed parts, described embedded part is with externally threaded right cylinder, described exposed parts is to be fixed on the gengon that described right cylinder one end is used for this detachable special pore of dismounting, has the pore of perforation between the two ends of this detachable special pore.
For fear of in technological process above-mentioned special pore marginal deposit silicon nitride cause this spy's pore to remove hard problem; this detachable special pore also includes the pore protective guard suitable with described gengon, and the end face of described pore protective guard has the circular hole that is connected with described pore.
Further, this detachable special pore is made with stainless material, and is high temperature resistant, and resistance to air loss is good behind the embedded equipment.
Further, the described pore protective guard gengon that is hollow.
Further, described pore protective guard is made with the platinum tin material.
Further, the diameter of described circular hole is 2 times of hole diameter, guarantees when preventing that silicon nitride is deposited on the independent pore, and there is not any impact in flowing of process gas.。
The utility model compared with prior art, its beneficial effect is: 1, the utility model can solve the silicon nitride that deposits in the technological process to the air vent of craft blockage problem, guarantees the stability of technique; 2, the utility model all adopts high temperature material, is applicable to all PECVD equipment.3, the independent pore in the utility model and pore protective guard can be used repeatedly, and are beneficial to cost control.4, the utility model can be changed each pore of device interior separately, and is simple in structure and Operation and Maintenance is easy.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is described independent pore protective guard schematic diagram.
Embodiment
The below is elaborated to technical solutions of the utility model, but protection domain of the present utility model is not limited to described embodiment.
As illustrated in fig. 1 and 2; a kind of detachable special pore; be made with stainless material; comprise embedded part and exposed parts; described embedded part is with externally threaded right cylinder 1; described cylindrical height is 0.5cm; described exposed parts is to be fixed on the hexahedron 2 that described right cylinder 1 one ends are used for this detachable special pore of dismounting; the height of described hexahedron 2 is 0.5cm; have the pore 3 of perforation between the two ends of this detachable special pore; this detachable special pore also includes the pore protective guard suitable with described gengon; described pore protective guard is the hexahedron of hollow; described pore protective guard is made with the platinum tin material, and the end face of described pore protective guard has the circular hole 4 that is connected with described pore 3, and the diameter of described circular hole 3 is 2 times of pore 3 diameters
The installation process of above-mentioned detachable special pore is: torque spanner is transferred to 35 Newton force, embedded part is screwed in the apparatus and process gas to chamber delivery outlet, cover the pore protective guard and get final product.
Maintenance process only needs the detachable special pore that will stop up to back out with spanner to replace with new detachable special pore and get final product; the detachable special pore of replacing and pore protective guard can be reused after cleaning; this detachable special pore has been saved maintenance time; effectively reduce cost, having avoided existing equipment to make an opening through pore damage and the decline of air vent aperture uniformity coefficient that pore causes affects the problems such as technological effect.
As mentioned above, although represented and explained the utility model with reference to specific preferred embodiment, it shall not be construed as the restriction to the utility model self.Under the spirit and scope prerequisite of the present utility model that does not break away from the claims definition, can make in the form and details various variations to it.
Claims (6)
1. detachable special pore, it is characterized in that, comprise embedded part and exposed parts, described embedded part is with externally threaded right cylinder, described exposed parts is to be fixed on the gengon that described right cylinder one end is used for this detachable special pore of dismounting, has the pore of perforation between the two ends of this detachable special pore.
2. detachable special pore according to claim 1 is characterized in that, also includes the pore protective guard suitable with described gengon, and the end face of described pore protective guard has the circular hole that is connected with described pore.
3. detachable special pore according to claim 1 is characterized in that, this detachable special pore is made with stainless material.
4. detachable special pore according to claim 2 is characterized in that, described pore protective guard is the gengon of hollow.
5. detachable special pore according to claim 3 is characterized in that, described pore protective guard is made with the platinum tin material.
6. detachable special pore according to claim 2 is characterized in that, the diameter of described circular hole is 2 times of hole diameter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220315041 CN202688436U (en) | 2012-07-02 | 2012-07-02 | Detachable special gas hole |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220315041 CN202688436U (en) | 2012-07-02 | 2012-07-02 | Detachable special gas hole |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202688436U true CN202688436U (en) | 2013-01-23 |
Family
ID=47544083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220315041 Expired - Lifetime CN202688436U (en) | 2012-07-02 | 2012-07-02 | Detachable special gas hole |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202688436U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103779166A (en) * | 2014-01-17 | 2014-05-07 | 北京京东方光电科技有限公司 | Etching device reaction chamber electrode and etching device |
| CN111118476A (en) * | 2020-02-10 | 2020-05-08 | 江苏科来材料科技有限公司 | Special gas pipeline |
-
2012
- 2012-07-02 CN CN 201220315041 patent/CN202688436U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103779166A (en) * | 2014-01-17 | 2014-05-07 | 北京京东方光电科技有限公司 | Etching device reaction chamber electrode and etching device |
| CN111118476A (en) * | 2020-02-10 | 2020-05-08 | 江苏科来材料科技有限公司 | Special gas pipeline |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: CECEP SOLAR ENERGY TECHNOLOGY (ZHENJIANG) Co.,Ltd. Assignor: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. Contract record no.: 2014990000106 Denomination of utility model: Detachable special gas hole Granted publication date: 20130123 License type: Common License Record date: 20140304 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| C56 | Change in the name or address of the patentee |
Owner name: CECEP SOLAR ENERGY TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CECEP SOLAR ENERGY TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee after: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee before: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee after: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee before: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130123 |