CN111010134B - 体声波谐振器及其频率调整方法、滤波器、电子设备 - Google Patents
体声波谐振器及其频率调整方法、滤波器、电子设备 Download PDFInfo
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- CN111010134B CN111010134B CN201911027012.2A CN201911027012A CN111010134B CN 111010134 B CN111010134 B CN 111010134B CN 201911027012 A CN201911027012 A CN 201911027012A CN 111010134 B CN111010134 B CN 111010134B
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- top electrode
- acoustic wave
- bulk acoustic
- wave resonator
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Images
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (12)
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CN201911027012.2A CN111010134B (zh) | 2019-10-26 | 2019-10-26 | 体声波谐振器及其频率调整方法、滤波器、电子设备 |
PCT/CN2020/088664 WO2021077714A1 (zh) | 2019-10-26 | 2020-05-06 | 体声波谐振器及其频率调整方法、滤波器、电子设备 |
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CN201911027012.2A CN111010134B (zh) | 2019-10-26 | 2019-10-26 | 体声波谐振器及其频率调整方法、滤波器、电子设备 |
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CN111010134A CN111010134A (zh) | 2020-04-14 |
CN111010134B true CN111010134B (zh) | 2021-06-01 |
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CN111010134B (zh) * | 2019-10-26 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 体声波谐振器及其频率调整方法、滤波器、电子设备 |
CN111934641B (zh) * | 2020-07-08 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 体声波谐振器及其频率调整方法、滤波器、电子设备 |
CN111934643B (zh) * | 2020-07-13 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 压电层双侧设置质量负载的体声波谐振器、滤波器及电子设备 |
CN112087216B (zh) * | 2020-08-03 | 2022-02-22 | 诺思(天津)微系统有限责任公司 | 具有声学孔的体声波谐振器及组件、滤波器及电子设备 |
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CN204481097U (zh) * | 2015-01-29 | 2015-07-15 | 河南易炫电子科技有限公司 | 一种用于无线通信的具有桥接器的耦合谐振滤波器 |
CN110266285A (zh) * | 2019-05-31 | 2019-09-20 | 武汉大学 | 一种微机械谐振器、其制备及频率微调校正方法 |
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JP2008035358A (ja) * | 2006-07-31 | 2008-02-14 | Hitachi Media Electoronics Co Ltd | 薄膜圧電バルク波共振器及びそれを用いた高周波フィルタ |
DE102012205033B4 (de) * | 2011-03-29 | 2020-01-30 | Avago Technologies International Sales Pte. Limited | Gestapelter akustischer Resonator, welcher eine Brücke aufweist |
US20140117815A1 (en) * | 2012-10-26 | 2014-05-01 | Avago Technologies General Ip (Singapore) Pte. Ltd | Temperature compensated resonator device having low trim sensitivy and method of fabricating the same |
US9948272B2 (en) * | 2015-09-10 | 2018-04-17 | Qorvo Us, Inc. | Air gap in BAW top metal stack for reduced resistive and acoustic loss |
CN205249154U (zh) * | 2015-12-16 | 2016-05-18 | 王天乐 | 一种薄膜体声波谐振器及一种滤波器、振荡器、无线收发器 |
JP2018125696A (ja) * | 2017-01-31 | 2018-08-09 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびマルチプレクサ |
JP6925877B2 (ja) * | 2017-06-07 | 2021-08-25 | 太陽誘電株式会社 | 弾性波デバイス |
CN110190826B (zh) * | 2019-05-31 | 2020-10-02 | 厦门市三安集成电路有限公司 | 谐振薄膜层、谐振器和滤波器 |
CN111010134B (zh) * | 2019-10-26 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 体声波谐振器及其频率调整方法、滤波器、电子设备 |
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- 2019-10-26 CN CN201911027012.2A patent/CN111010134B/zh active Active
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- 2020-05-06 WO PCT/CN2020/088664 patent/WO2021077714A1/zh active Application Filing
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CN204481097U (zh) * | 2015-01-29 | 2015-07-15 | 河南易炫电子科技有限公司 | 一种用于无线通信的具有桥接器的耦合谐振滤波器 |
CN110266285A (zh) * | 2019-05-31 | 2019-09-20 | 武汉大学 | 一种微机械谐振器、其制备及频率微调校正方法 |
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WO2021077714A1 (zh) | 2021-04-29 |
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Denomination of invention: Bulk acoustic wave resonator and its frequency adjustment method, filter and electronic equipment Effective date of registration: 20210908 Granted publication date: 20210601 Pledgee: Tianjin TEDA Haihe intelligent manufacturing industry development fund partnership (L.P.) Pledgor: ROFS MICROSYSTEM(TIANJIN) Co.,Ltd. Registration number: Y2021980009022 |
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