CN110904474A - 一种金属铟修饰的硅光电阴极薄膜制备方法和应用 - Google Patents
一种金属铟修饰的硅光电阴极薄膜制备方法和应用 Download PDFInfo
- Publication number
- CN110904474A CN110904474A CN201911291731.5A CN201911291731A CN110904474A CN 110904474 A CN110904474 A CN 110904474A CN 201911291731 A CN201911291731 A CN 201911291731A CN 110904474 A CN110904474 A CN 110904474A
- Authority
- CN
- China
- Prior art keywords
- silicon
- indium
- metal
- cathode film
- photoelectric cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 75
- 239000010703 silicon Substances 0.000 title claims abstract description 75
- 229910052738 indium Inorganic materials 0.000 title claims abstract description 55
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 54
- 239000002184 metal Substances 0.000 title claims abstract description 54
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 238000002360 preparation method Methods 0.000 title abstract description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 21
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 21
- 239000000243 solution Substances 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000000354 decomposition reaction Methods 0.000 claims abstract description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000004070 electrodeposition Methods 0.000 claims abstract description 10
- PSCMQHVBLHHWTO-UHFFFAOYSA-K Indium trichloride Inorganic materials Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 claims abstract description 9
- 239000003960 organic solvent Substances 0.000 claims abstract description 7
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Inorganic materials [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000012459 cleaning agent Substances 0.000 claims abstract description 6
- 239000008367 deionised water Substances 0.000 claims abstract description 6
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 6
- 239000007864 aqueous solution Substances 0.000 claims abstract description 5
- 238000005530 etching Methods 0.000 claims abstract description 5
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 5
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 150000003839 salts Chemical class 0.000 claims abstract description 3
- 238000006722 reduction reaction Methods 0.000 claims description 18
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 150000002471 indium Chemical class 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- -1 indium modified silicon Chemical class 0.000 claims description 2
- 230000009467 reduction Effects 0.000 abstract description 14
- 239000010408 film Substances 0.000 description 25
- 239000010409 thin film Substances 0.000 description 13
- 239000001257 hydrogen Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 150000003376 silicon Chemical class 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 4
- 239000003344 environmental pollutant Substances 0.000 description 4
- BDAGIHXWWSANSR-UHFFFAOYSA-N formic acid Substances OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 4
- 231100000719 pollutant Toxicity 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000002803 fossil fuel Substances 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 239000012266 salt solution Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical class Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/54—Electroplating: Baths therefor from solutions of metals not provided for in groups C25D3/04 - C25D3/50
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/02—Hydrogen or oxygen
- C25B1/04—Hydrogen or oxygen by electrolysis of water
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/50—Processes
- C25B1/55—Photoelectrolysis
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
- C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
- C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
- C25B11/055—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the substrate or carrier material
- C25B11/057—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the substrate or carrier material consisting of a single element or compound
- C25B11/059—Silicon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
- C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
- C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
- C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
- C25B11/075—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B3/00—Electrolytic production of organic compounds
- C25B3/20—Processes
- C25B3/25—Reduction
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/54—Electroplating of non-metallic surfaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/36—Hydrogen production from non-carbon containing sources, e.g. by water electrolysis
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
Abstract
本发明公开了一种金属铟修饰的硅光电阴极薄膜制备方法,将硅片依次置于有机溶剂清洗剂和去离子水中超声清洗30±10分钟,其后将硅片放入10±5%氢氟酸水溶液中刻蚀20‑100秒备用;2)将金属铟盐In(NO3)3·4H2O或InCl3溶解于1±0.3M NaNO3溶液中,制得0.02M的In(NO3)3·4H2O或InCl3溶液,用于光辅助硅光电极的电沉积;将清洗好的硅片与电化学工作站连接,在‑1.0V(vs.SCE)电位下,通过紫外可见光照30±10秒,得到金属铟修饰的硅光电阴极薄膜。该法制备得到的金属铟修饰的硅光电阴极薄膜在光电催化水分解、二氧化碳还原等领域具有较大应用潜力。
Description
技术领域
本发明属于半导体材料技术领域,具体涉及一种金属铟修饰的硅光电阴极薄膜及其制备方法
背景技术
二十一世纪以来化石燃料燃烧引发的环境污染、温室效应和能源短缺等问题已成为人类社会向前发展的严峻阻力。因此,开发环境友好和可持续的新型能源替代传统的化石燃料已成为人类社会急需解决的重大挑战。取之不尽用之不竭的太阳能被认为是最有可能取代化石燃料的清洁能源。利用太阳能光电催化进行水分解和二氧化碳,将可再生的太阳能转化为化学能的同时减缓温室效应并能够有效解决环境污染问题。
硅在地壳中含量丰富,极具低成本优势。其带隙为1.12ev,完全满足可见光吸收对带隙的要求,其导带位置也满足光解水制氢和二氧化碳还原及多种污染物降解的需求。此外,目前硅的提纯和制备技术已相对成熟,现已被广泛应用于太阳能光伏产业中。硅的优质特性迎合了光电催化对半导体材料的需要,这也使得硅成为光电化学体系中一种非常有前景的半导体材料。
虽然硅光电阴极具有低成本和带隙合适等优势,但利用硅光电阴极进行水分解、二氧化碳还原和污染物降解存在低的反应活性、选择性和法拉第效率等问题。为了解决硅光电阴极半导体的此类问题。本发明提出了一种对金属铟溶液具有普适性的光辅助电沉积(光电沉积)的方法,通过此法能够得到金属铟修饰的硅光电阴极薄膜。光电沉积金属的反应原料采用少量或微量的金属溶液即可,在不同偏压的条件下,可以稳定的生成从纳米至微米等不同大小的金属颗粒。光电沉积相对于原子层沉积和真空离子溅射或者化学气相沉积具有低成本,反应条件温和,可调控等诸多优势。此外硅光电阴极和金属颗粒优异的界面性能将有助于快速输导电子,使得光生电子和空穴能够有效的分离和转移,进而能够显著提高硅光电阴极的光电性能。此发明制备得到的金属铟修饰的硅光电阴极薄膜在光电催化分解水产氢、二氧化碳还原等领域具有较大应用潜力。
发明内容
本发明的目的是,提出了一种对各种金属铟溶液具有普适性的光辅助电沉积于硅光电阴极薄膜上的方法,通过此法能够在温和条件下,低成本的得到金属铟修饰的硅光电阴极薄膜。硅光电阴极和金属颗粒优异的界面性能将有助于快速输导电子,使得光生电子和空穴能够有效的分离和转移,进而能够显著提高硅光电阴极的光电性能。此发明制备得到的金属铟修饰的硅光电阴极薄膜在光电催化分解水产氢、二氧化碳还原和污染物降解等领域具有较大应用潜力。
本发明目的的技术解决方案是:一种金属铟修饰硅光电阴极薄膜的方法,步骤为:
1)将硅片依次置于有机溶剂清洗剂和去离子水中超声清洗30±10分钟,其后将硅片放入10±5%氢氟酸水溶液中刻蚀20-100秒备用;
2)将金属铟盐In(NO3)3·4H2O或InCl3溶解于1±0.3M NaNO3溶液中,制得0.02M的In(NO3)3·4H2O或InCl3溶液,用于光辅助硅光电极的电沉积;
3)将清洗好的硅片与电化学工作站连接,在-1.0V(vs.SCE)电位下,通过紫外可见光照30±10秒,得到金属铟修饰的硅光电阴极薄膜。
所述步骤(1)中的有机溶剂清洗剂包括但不限于丙酮、乙醇以及甲醇等。
用于沉积的金属铟盐溶液包括但不限于In(NO3)3·5H2O,InCl3等。
光辅助电沉积过程应处于室温和光强稳定的条件下进行。
制备得到的金属铟修饰的硅光电阴极薄膜在光电催化水分解、二氧化碳还原反应中的应用。
有益效果:此发明制备得到的金属铟修饰的硅光电阴极薄膜在光电催化分解水产氢、二氧化碳还原和污染物降解等领域具有较大应用潜力。如图6所示,不含金属铟的硅光电阴极薄膜的二氧化碳还原光电流和斩波电流均明显低于含金属铟修饰的硅光电阴极薄膜的二氧化碳还原光电流和斩波电流。如图7所示,通过此法担载的金属铟修饰的硅光电阴极薄膜,相对于于在氩气环境下,在二氧化碳环境中具有高的光电流和斩波电流,表明,该材料具有高的二氧化碳还原性能。同时,该金属铟修饰的硅光电阴极薄膜在氩气中的光电流来自于水分解制氢表明该材料就有高的水分解制氢性能。如图8所示,在紫外可见光照射下,将此金属铟修饰的硅光电阴极薄膜在不同偏压下进行两小时的二氧化碳还原反应。二氧化碳还原电流随偏压的增加而增大。在-1VRHE偏压下,具有超过16mA cm-2的光电流。如图9,10,11所示,将此金属铟修饰的硅光电阴极薄膜在不同偏压下进行两小时的二氧化碳还原反应。在-1VRHE偏压下,两小时的反应产生了超过180μmol cm-2的甲酸,300μmol cm-2的氢气,6μmol cm-2的一氧化碳,能明显超过无金属铟的硅光电阴极。
附图说明
图1为金属铟修饰的硅光电阴极薄膜结构示意图;
图2为金属铟修饰的硅光电阴极薄膜扫描电镜图;
图3为金属铟修饰的硅光电阴极薄膜的XRD特征峰;
图4为金属铟修饰的硅光电阴极薄膜的硅的XPS特征峰;
图5为金属铟修饰的硅光电阴极薄膜的铟的XPS特征峰;
图6为不含金属铟和含金属铟修饰的硅光电阴极薄膜的二氧化碳还原光电流对比图
图7为金属铟修饰的硅光电阴极薄膜的二氧化碳还原光电流对比图;
图8为金属铟修饰的硅光电阴极薄膜在不同电位下二氧化碳还原电流值;
图9为金属铟修饰的硅光电阴极薄膜在不同电位下将二氧化碳还原为甲酸的产物时间图;
图10为金属铟修饰的硅光电阴极薄膜在不同电位下将水分解分氢气的产物时间图;
图11为金属铟修饰的硅光电阴极薄膜在不同电位下将二氧化碳还原为一氧化碳的产物时间图。
具体实施方式
以下结合附图本对发明做进一步详细描述。通过下面的实施例可以使本专业技术人员更全面地理解本发明。以下以金属铟修饰的硅光电阴极薄膜的制备和应用为例,将有助于相关领域的技术工作人员进一步理解本发明,但不以任何形式限制本发明。同时,这里指出对本领域的普通技术人员来说,本发明中的数据只针对本发明,在不脱离本发明构思的前提下,合理地若干调整和改进,都属于本发明的保护范围。
基本制备参数:
1)将硅片依次置于有机溶剂清洗剂和去离子水中超声清洗30分钟,其后将硅片放入10%氢氟酸水溶液中刻蚀1分钟备用;
2)将包括但不限于种类的金属铟盐In(NO3)3·4H2O,InCl3溶解于1M NaNO3溶液中,制得0.02M的目标金属盐溶液用于光辅助电沉积;
3)将清洗好的硅片与电化学工作站连接,在-1.0V(vs.SCE)电位下,通过紫外可见光照30秒,得到金属铟修饰的硅光电阴极薄膜。
有机溶剂清洗剂包括但不限于丙酮、乙醇以及甲醇等。
光辅助电沉积过程应处于室温和光强稳定的条件下进行。
制备得到的金属铟修饰的硅光电阴极薄膜在光电催化水分解、二氧化碳还原反应中的应用。
实施例1
用玻璃刀将硅片切割为面积大小1*1.5cm的样品,用硅胶将硅片背面导电银胶进行封装,再将封装好的硅片样品依次置于丙酮、乙醇溶液和去离子水中超声清洗30分钟,其后将硅片放入10%氢氟酸水溶液中刻蚀1分钟,将刻蚀完成后的硅片置于氮气保护气氛下备用。
实施例2
根据薄膜的应用目的选择某种金属盐溶液溶解于1M NaNO3溶液中,制得0.02M的目标金属盐溶液用于光辅助电沉积。以金属铟溶液为例,称量8.4995g NaNO3溶解于100ml去离子水中,待固体完全溶解后加入0.7817g In(NO3)3·5H2O充分混合。将制备得到的100ml沉积溶液密封备用。
实施例3
将实施例2中的金属铟溶液倒入标准光电化学池中。将实施例1中得到的硅片连接到电化学工作站阴极,对电极阳极采用面积大小为2*3cm的铂片电极,参比电极选用饱和甘汞电极。将硅片需要沉积金属铟的部分置于溶液中,并使其正面对准打开的氙灯光源。在电化学工作站it模式,-1.0V电位下开始沉积30秒后停止沉积。得到如图2所示的金属铟修饰的硅光电阴极薄膜。底层是硅光电阴极薄膜,薄膜表面的白色颗粒即为金属铟,金属铟的分布粒径从纳米至微米级。如图3所示,即为金属铟修饰的硅光电阴极薄膜的XRD图,圆形标识为硅的特征峰,菱形标志为铟的特征峰。如图4所示,即为金属铟修饰的硅光电阴极薄膜的硅的特征峰。图5为金属铟修饰的硅光电阴极薄膜的铟的特征峰。
Claims (5)
1.一种金属铟修饰硅光电阴极薄膜的方法,其特征在于:
1)将硅片依次置于有机溶剂清洗剂和去离子水中超声清洗30±10分钟,其后将硅片放入10±5%氢氟酸水溶液中刻蚀20-100秒备用;
2)将金属铟盐In(NO3)3·4H2O或InCl3溶解于1±0.3M NaNO3溶液中,制得0.02M的In(NO3)3·4H2O或InCl3溶液,用于光辅助硅光电极的电沉积;
3)将清洗好的硅片与电化学工作站连接,在-1.0V(vs.SCE)电位下,通过紫外可见光照30±10秒,得到金属铟修饰的硅光电阴极薄膜。
2.如权利要求1所述的方法,其特征在于,所述步骤(1)中的有机溶剂清洗剂包括但不限于丙酮、乙醇以及甲醇等。
3.如权利要求1所述的方法,其特征在于,用于沉积的金属铟盐溶液包括但不限于In(NO3)3·5H2O,InCl3等。
4.如权利要求1所述的方法,其特征在于,光辅助电沉积过程应处于室温和光强稳定的条件下进行。
5.一种根据权利要求1-4之一制备得到的金属铟修饰的硅光电阴极薄膜在光电催化水分解、二氧化碳还原反应中的应用。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911291731.5A CN110904474A (zh) | 2019-12-16 | 2019-12-16 | 一种金属铟修饰的硅光电阴极薄膜制备方法和应用 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911291731.5A CN110904474A (zh) | 2019-12-16 | 2019-12-16 | 一种金属铟修饰的硅光电阴极薄膜制备方法和应用 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110904474A true CN110904474A (zh) | 2020-03-24 |
Family
ID=69824511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911291731.5A Pending CN110904474A (zh) | 2019-12-16 | 2019-12-16 | 一种金属铟修饰的硅光电阴极薄膜制备方法和应用 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110904474A (zh) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106319556A (zh) * | 2016-09-21 | 2017-01-11 | 浙江大学 | 一种高效光电催化产氢电极的制备方法及应用 |
CN108198943A (zh) * | 2018-01-10 | 2018-06-22 | 江南大学 | 一种硫化铅敏化氧化铟锡光电阴极的简单制备方法 |
-
2019
- 2019-12-16 CN CN201911291731.5A patent/CN110904474A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106319556A (zh) * | 2016-09-21 | 2017-01-11 | 浙江大学 | 一种高效光电催化产氢电极的制备方法及应用 |
CN108198943A (zh) * | 2018-01-10 | 2018-06-22 | 江南大学 | 一种硫化铅敏化氧化铟锡光电阴极的简单制备方法 |
Non-Patent Citations (3)
Title |
---|
A.G. MUNOZ ET AL.,: "Photoelectrochemical Conditioning of MOVPE p-InP Films for Light-Induced Hydrogen Evolution: Chemical, Electronic and Optical Properties", 《ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY》 * |
A.G. MUNOZ ET AL.,: "Solar tandem water splitting from efficient III-V photovoltaics:Implications of electrochemical surface activation", 《ELECTROCHIMICA ACTA》 * |
NIKOLAY KORNIENKO ET AL.,: "Growth and Photoelectrochemical Energy Conversion of Wurtzite Indium Phosphide Nanowire Arrays", 《ACS NANO》 * |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7052587B2 (en) | Photoelectrochemical device and electrode | |
CN107574456A (zh) | 一种超薄二硫化钼纳米片/硅纳米线异质结结构的制备方法 | |
CN106435635A (zh) | 一种高效光电催化分解水产氧电极的制备方法及应用 | |
Wan et al. | A solar assisted microbial electrolysis cell for hydrogen production driven by a microbial fuel cell | |
US8188362B2 (en) | Photophysicochemical cell | |
CN103132120B (zh) | 一种制备可高效降解有机污染物的光电催化电极材料的方法 | |
KR101670860B1 (ko) | 물 분해용 촉매 및 이의 제조방법 | |
CN102352494A (zh) | CdSe/CdS量子点敏化TiO2纳米管复合膜的制备方法 | |
CN103367759A (zh) | 可见光响应型光催化废水燃料电池及其制备方法和应用 | |
KR102015341B1 (ko) | 산화구리 및 전이금속 황화물을 포함하는 환원전극, 이의 제조방법, 이를 포함하는 미생물 전기분해전지 및 폐수처리 방법 | |
CN114481192B (zh) | 一种Cd掺杂的二氧化钛/硫化铟锌光阳极及其制备方法 | |
CN109308982A (zh) | 一种共修饰铋酸铜纳米棒光电阴极制备方法 | |
Li et al. | A portable photocatalytic fuel cell based on TiO2 nanorod photoanode for wastewater treatment and efficient electricity generation | |
CN107268020B (zh) | 一种Ta3N5薄膜的制备方法及Ta3N5薄膜的应用 | |
WO2024103785A1 (zh) | 一种用于太阳光全解水制氢的铜铋硫基光电化学电池 | |
CN111334812B (zh) | 基于水合羟基氧化铁的非晶硅薄膜光电极及其制备方法 | |
CN112717917B (zh) | 一种两步喷雾热解制备钒酸铋薄膜的方法及应用 | |
CN103219565B (zh) | 逆光电化学电池 | |
CN111841609A (zh) | 一种Cu2O/C3N4/TiO2异质结可见光催化剂及其制备方法 | |
CN106319553A (zh) | 一种光电催化氧化Ce(Ⅲ)得到Ce(Ⅳ)的方法及其Ce(Ⅳ)和应用 | |
CN111514881A (zh) | 一种硼氧化钼纳米多孔薄膜电催化剂及其制备方法和应用 | |
CN111509243A (zh) | 一种CNTs修饰的BiOCl/ZnO异质结纳米阵列光阳极在光催化燃料电池中的应用 | |
CN110904474A (zh) | 一种金属铟修饰的硅光电阴极薄膜制备方法和应用 | |
CN113289622B (zh) | 一种水分解制氢复合材料及其制备方法 | |
CN107460513A (zh) | MoS2/CdS薄膜电极的制备方法和应用 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200324 |