CN110804725A - Sublimation magnetron sputtering coating all-in-one - Google Patents
Sublimation magnetron sputtering coating all-in-one Download PDFInfo
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- CN110804725A CN110804725A CN201911130795.7A CN201911130795A CN110804725A CN 110804725 A CN110804725 A CN 110804725A CN 201911130795 A CN201911130795 A CN 201911130795A CN 110804725 A CN110804725 A CN 110804725A
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- 239000011248 coating agent Substances 0.000 title claims abstract description 45
- 238000000859 sublimation Methods 0.000 title claims abstract description 29
- 230000008022 sublimation Effects 0.000 title claims abstract description 29
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 28
- 238000001704 evaporation Methods 0.000 claims abstract description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 43
- 238000004544 sputter deposition Methods 0.000 claims abstract description 42
- 230000008020 evaporation Effects 0.000 claims abstract description 36
- 238000003825 pressing Methods 0.000 claims abstract description 26
- 238000001816 cooling Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 47
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 7
- 210000001503 joint Anatomy 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 3
- 238000011068 loading method Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 238000012797 qualification Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 14
- 241000196324 Embryophyta Species 0.000 description 13
- 239000000758 substrate Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
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- 239000000463 material Substances 0.000 description 4
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- -1 argon ion Chemical class 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
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- 229910052906 cristobalite Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Health & Medical Sciences (AREA)
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- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a sublimation magnetron sputtering coating integrated machine, which belongs to the technical field of sputtering coating equipment and comprises an evaporation chamber, a workpiece driving device, a sputtering coating device, a water cooling device, a positioning and compressing device and a control cabinet, wherein a bearing cylinder for accommodating parts to be sputtered coated is arranged on the workpiece driving device and can move along the length direction of the evaporation chamber under the driving of the workpiece driving device, the output end of the sputtering coating device is covered on the bearing cylinder, the output end of the water cooling device is communicated with the evaporation chamber, and the workpiece driving device, the sputtering coating device, the water cooling device and the positioning and compressing device are all electrically connected with the control cabinet. The invention can realize the control of the whole coating environment temperature and improve the qualification rate of the coated object, and the two continuously realize the vacuum effect in the evaporation chamber through the two groups of pressing parts and the vacuum pumping equipment, thereby avoiding the instable vacuum degree in the evaporation chamber in the coating process.
Description
Technical Field
The invention relates to the technical field of sputtering coating equipment, in particular to a sublimation magnetron sputtering coating all-in-one machine.
Background
At present, many materials in the production of components such as LCD, OLED, TP and the like in the market are as follows: common film layer materials such as SiO2, SIN, TiO2, ITO, IZO, metal and the like are all used in a vacuum magnetron sputtering film plating machine (PVD); the vacuum sputtering equipment generally comprises a cathode system, a vacuum system, a conveying system and the like; the core of vacuum coating is that a required uniform film layer is prepared in a continuous and stable vacuum cavity, the existing equipment and a substrate are developed towards a large size direction, less cavity opening frequency of the vacuum cavity is needed, and the uniform film layer is uniformly applied to ensure efficient and stable operation of the equipment.
The magnetron sputtering coating is a large-area coating technology in the field, the coating area of a coated workpiece is as large as several square meters, and one set of coating equipment needs to consider the stability of the whole production capacity and quality.
Disclosure of Invention
The invention aims to provide a sublimation magnetron sputtering coating all-in-one machine aiming at the defects in the prior art.
In order to solve the above problems, the present invention provides the following technical solutions: the utility model provides a sublimation magnetron sputtering coating film all-in-one, includes evaporating chamber, work piece drive arrangement, sputter coating device, water cooling plant, location closing device and switch board, location closing device sets up the both ends at the evaporating chamber respectively, sputter coating device and work piece drive arrangement all set up in the evaporating chamber, be equipped with the bearing section of thick bamboo that supplies to wait to sputter the coating film part and hold on the work piece drive arrangement, bearing section of thick bamboo can remove along the length direction of evaporating chamber under work piece drive arrangement's drive, sputter coating device's output cover is established on bearing section of thick bamboo, water cooling plant's output and evaporating chamber intercommunication, work piece drive arrangement, sputter coating device, water cooling plant and location closing device all with switch board electric connection.
The evaporation chamber is including box, frame and two door plants that are cylindrical structure, rack-mount is in the bottom of box, two the door plant is articulated with the both sides of box respectively, every all be equipped with the sealing rubber circle that can closely laminate with the box inside wall on the inside wall of door plant, every all be equipped with the observation window on the door plant, water cooling plant is including leading to water guard shield, cold water access pipeline and hot water access pipeline, lead to the outside of water guard shield parcel at the box, cold water access pipeline and hot water access pipeline communicate with the both ends that lead to the water guard shield respectively.
The sputtering coating device comprises a sublimation component, a magnetron sputtering component and a workpiece baking component, wherein the workpiece baking component is arranged on the inner side wall of the box body, the magnetron sputtering component is arranged in the box body and is in butt joint with the bearing cylinder, the sublimation component is arranged on the two door plates, the output ends of the sublimation component penetrate through the door plates, and finally the sublimation component is arranged on the inner side wall of the door plates.
The workpiece baking assembly comprises a plurality of groups of annular heating nets arranged along the axis direction of the box body at intervals, each annular heating net is installed on the inner side wall of the box body, the magnetron sputtering assembly comprises a first sputtering power source, a second sputtering power source and a baffle portion, the first sputtering power source and the second sputtering power source are respectively arranged at two ends inside the box body, and the baffle portion is arranged in the box body and covers the box body and is arranged on the bearing cylinder.
The workpiece driving device comprises a movable bearing part, a vertical positioning part and a transverse driving part, the movable bearing part is arranged in the box body, the setting direction of the movable bearing part is the same as the extending direction of the box body, the bearing cylinder is arranged at the top of the movable bearing part, the movable bearing part is arranged at the output end of the transverse driving part, the vertical positioning part is arranged at the top of the rack, the output end of the vertical positioning part extends into the box body, and the transverse driving part is in transmission connection with the vertical positioning part.
The movable bearing part comprises a bearing trolley, a bearing driving component and two bearing transmission components, the two bearing transmission components are symmetrically arranged at the bottom in the box body, the bearing driving component is in transmission connection with one bearing transmission component, an accommodating space for loading the bearing cylinder is formed between the two bearing transmission components, the bearing trolley is arranged between the two bearing transmission components, and the bearing cylinder is tightly attached to the top of the bearing trolley in an installation state.
Every bear drive assembly includes transmission main shaft, transmission sleeve shaft and two primary shaft bearings, two primary shaft bearing symmetry installs the both ends of bottom in the box, the both ends of transmission sleeve shaft rotate with two primary shaft bearings respectively and are connected, the transmission main shaft runs through the setting of transmission sleeve shaft and closely laminates with the inner space of transmission sleeve shaft, it includes first bevel gear, second bevel gear and first driving motor to bear drive assembly, first bevel gear cover is established on one of them transmission main shaft, first bevel gear and second bevel gear meshing, first driving motor installs in the box, second bevel gear and first driving motor's main shaft fixed connection.
Vertical locating component includes horizontal locating plate, drive locating plate, slim cylinder and three extension and drives the seat, and is three it drives the seat interval setting in the outer bottom of box to extend to drive the output of seat and run through the box along vertical direction and extend to its inside, horizontal locating plate sets up in the box bottom and drives the output fixed connection of seat with three extension, drive the locating plate setting and extend the bottom of driving the seat and be located the top of frame wherein two, slim cylinder sets up in the frame, the output of slim cylinder and the bottom fixed connection of drive locating plate.
The transverse driving assembly comprises a second driving motor, a third bevel gear, a fourth bevel gear and two sliding auxiliary parts, wherein the sliding auxiliary parts are symmetrically arranged at the bottom in the box body and located below the bearing transmission assembly, each sliding auxiliary part comprises a sliding guide rail and two second bearing seats, the two second bearing seats are arranged at two ends of the top of the transverse positioning plate, the sliding guide rail is arranged on the two second bearing seats, the third bevel gear is arranged at the end part of one sliding guide rail, the second driving motor is arranged on the frame, an output shaft vertically upwards penetrates through the box body and finally extends towards the inside of the box body, the fourth bevel gear is arranged on a main shaft of the second driving motor, and the third bevel gear is meshed with the fourth bevel gear.
The positioning and compressing device comprises two groups of compressing components, the compressing components are arranged on two box doors respectively, each compressing component comprises a rectangular box body, a positioning compressing plate and a transverse driving cylinder, the rectangular box body is arranged on the outer side wall of the box door, the positioning compressing plate is arranged inside the rectangular box body, the transverse driving cylinder is arranged on the rectangular box body, the output end of the transverse driving cylinder is fixedly connected with the side wall of the positioning compressing plate, and the positioning compressing plate is fixedly connected with the outer side wall of the box door.
Has the advantages that: firstly, the equipment adopts a box type structure, the air exhaust system is arranged at the rear, the disassembly and the maintenance are convenient, the surface of the whole machine is smooth, the cleaning is convenient, and the equipment is suitable for being installed in a purification room; the evaporation chamber is made of stainless steel, a shield which can be filled with cold water and hot water is arranged outside the evaporation chamber, the wall can be heated or cooled, the environment temperature of the whole coating film can be controlled, the qualification rate of the object to be coated is improved, the two parts continuously realize the vacuum effect in the evaporation chamber through two groups of pressing parts and vacuumizing equipment, and the instability of the vacuum degree in the evaporation chamber in the coating process is avoided.
The bottom plate of the evaporation chamber has enough area to arrange an evaporation source and various joints, the valve adopts pneumatics, the operation is very convenient, the use is reliable, the oil return of a diffusion pump can be prevented by adopting a water-cooling baffle plate, and an optical sealing mechanical baffle plate is also arranged at an air extraction opening of the evaporation chamber, so that the oil pollution of the evaporation chamber can be reduced to a very low degree;
the pumping speed of the pumping elements equipped in the equipment is large, the main machine and the power control cabinet are independent, the modular design is adopted, and all the functional modules can be combined randomly according to different purposes, so that the equipment has the advantages of short pumping time, high working vacuum degree, short production period and the like.
Secondly, the film plating machine is suitable for plating various multilayer optical films and electrical films, evaporating various metal films in the electronic industry, evaporating various dielectric films in the optical industry, and micro-electronics and optical film forming technical fields; is ideal equipment for developing various film process researches.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a first partial schematic view of the present invention;
FIG. 3 is a second partial schematic view of the present invention;
FIG. 4 is a partial cross-sectional view of the first embodiment of the present invention;
fig. 5 is a partial sectional view of the second embodiment of the present invention.
Description of reference numerals: the device comprises an evaporation chamber 1, a box body 1a, a rack 1b, a door plate 1c, a workpiece driving device 2, a carrying trolley 2a, a carrying driving component 2b, a first bevel gear 2b1, a second bevel gear 2b2, a carrying transmission component 2c, a transmission main shaft 2c1, a transmission sleeve shaft 2c2, a first bearing seat 2c3, a transverse positioning plate 2d, a driving positioning plate 2e, a thin cylinder 2f, an extension driving seat 2g, a second driving motor 2h, a third bevel gear 2i, a fourth bevel gear 2j, a sliding auxiliary part 2k, a sliding guide rail 2k1, a second bearing seat 2k2, a sputtering coating device 3, a water cooling device 4, a positioning and pressing device 5, a control cabinet 6, a carrying cylinder 7, a rectangular box body 8, a positioning and pressing plate 9, and a transverse driving cylinder 10.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience of description of the present invention, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Referring to fig. 1 to 5, the sublimation magnetron sputtering coating all-in-one machine comprises an evaporation chamber 1, a workpiece driving device 2, a sputtering coating device 3, a water cooling device 4, a positioning and compressing device 5 and a control cabinet 6, wherein the positioning and compressing device 5 is respectively arranged at two ends of the evaporation chamber 1, the sputtering coating device 3 and the workpiece driving device 2 are both arranged in the evaporation chamber 1, the workpiece driving device 2 is provided with a bearing cylinder 7 for accommodating a part to be sputtered and coated, the bearing cylinder 7 can move along the length direction of the evaporation chamber 1 under the driving of the workpiece driving device 2, the output end of the sputtering coating device 3 is covered on the bearing cylinder 7, the output end of the water cooling device 4 is communicated with the evaporation chamber 1, and the workpiece driving device 2, the sputtering coating device 3, the water cooling device 4 and the positioning and compressing device 5 are all electrically connected with the control cabinet 6, the working principle is as follows: one of the two coating methods is that the resistance evaporation is to put the film material in a vacuum chamber made of metal, to evaporate it by heating the resistance evaporation source, when the average free path of the evaporated molecule is larger than the linear size of the vacuum chamber, the atom and molecule of the steam escape from the surface of the evaporation source, and is little impacted and blocked by other molecule or atom, and can reach the surface of the coated substrate directly, because the temperature of the substrate is lower, the substrate is condensed to form film, the electron beam evaporation is to generate electron beam by applying negative high pressure under a certain vacuum condition, and bombard the argon atom by a certain route through the action of a specific magnetic field, to generate positive argon ion, which runs to the surface of the target material at high speed, and the sputtered target atom is deposited on the substrate to complete the coating, because the ion sputtering energy is large, the coating compactness is good, and the electron beam evaporation is under a certain vacuum condition, the negative high voltage is added to generate an electron beam, argon atoms are bombarded according to a certain route under the action of a specific magnetic field to generate positive argon ions which run to the surface of the target material at a high speed, and sputtering target atoms are deposited on the base material to finish the coating;
the electric control cabinet of the equipment adopts a large-plate structure and a novel Programmable Logic Controller (PLC) which is more reasonable than the former structure, has visual and comprehensive display, simple operation and convenient maintenance; through optimized program control, misoperation possibly caused by manual operation can be avoided, and the safety and the reliability of equipment are improved.
The front panel of the electric control cabinet is provided with a direct current sputtering power supply, a radio frequency sputtering power supply, a vacuum gauge, a digital temperature controller, a potentiometer, an operating switch and an indicator light, and the working parameters and the state of the machine can be observed through a gauge head and the indicator light. The panel is also provided with a touch screen, and the whole machine can be conveniently subjected to vacuum and other operations through the touch buttons on the panel.
The inside of the power control cabinet is provided with an electric appliance board, and a vacuum system control element, a work turning speed regulator, a power regulator for baking and steam resistance and a wire holder for switching are installed.
The power supply of the equipment is 220V/380V, 50Hz AC power supply, which is connected to each part through a main switch air breaker, three-phase power supply indicator lamps are arranged below an electricity control box, and each branch circuit has an independent control part, which is detailed in an electrical schematic diagram.
All electrical components of the device are as follows: the resistance evaporation transformer is arranged inside and outside the main frame and is arranged in the electric control box of 670X 1480X 2000 mm.
The mechanical pump used by said machine is 3.7KW, and in order to prevent power failure in midway, a release valve of mechanical pump is specially set. The diffusion pump adopts 6-8 KW of three-phase heating due to high power, an indicator light indicates the working state of the diffusion pump, and a water flow monitor is arranged in a circuit and can automatically give an alarm when the water pressure is insufficient; the rotation of the workpiece is driven by an alternating current motor, and the rotating speed of the workpiece is adjustable; the baking power of the substrate is 6KW, the temperature is controlled and measured by using the silicon controlled rectifier to adjust and cooperate with a digital temperature indicator, the temperature can be automatically raised and controlled, in order to ensure the safe and reliable work of the equipment, the host machine and the electricity control box must be reliably grounded and are provided with grounding screws and grounding labels, in addition, the host machine and the electricity control box are provided with door switches to prevent the occurrence of high-voltage unsafe accidents, and the high-voltage power supply can be switched on only when all doors are properly closed.
Evaporating chamber 1 is including box 1a, frame 1b and two door plant 1c that are cylindrical structure, frame 1b installs in the bottom of box 1a, two door plant 1c is articulated with box 1 a's both sides respectively, every all be equipped with the sealing rubber circle that can closely laminate with box 1a inside wall on door plant 1 c's the inside wall, every all be equipped with the observation window on the door plant 1c, water cooling plant 4 inserts pipeline and hot water including logical water guard shield, cold water and inserts the pipeline, it inserts the pipeline to lead to the outside of water guard shield parcel at box 1a, cold water inserts pipeline and hot water and inserts the pipeline and communicate with the both ends that lead to the water guard shield respectively, by box 1a and door constitution. The two are connected by a hinge, an O-shaped vacuum rubber ring is used for sealing, the sealing pressure mainly depends on the atmospheric pressure acting on the door, and the pre-pressure is generated by the action of a pressing mechanism on the door. A plurality of holes with the diameter of 33.5 mm are arranged on a chassis of the box body 1a and can be used for installing other joints, 1 observation window with the diameter of 80mm is respectively arranged on each door to observe the film coating condition of a workpiece and the working condition of an evaporation source; the evaporation chamber 1 is made of stainless steel, and is externally provided with a shield through which cold water and hot water can be introduced, so that the wall can be heated or cooled. The bottom plate of the evaporation chamber 1 has a sufficient area to arrange evaporation sources and various joints. The valve is pneumatic, and the operation is very convenient. The use is reliable. The water-cooling baffle plate can prevent the diffusion pump from returning oil. The pumping opening of the evaporation chamber 1 is also provided with an optical sealing mechanical baffle, so that the oil pollution of the evaporation chamber 1 can be reduced to a very low degree. The equipment is provided with an air extracting element with a large pumping speed, the host machine and the power control cabinet are independent, a building block design is adopted, and all functional modules can be combined randomly according to different purposes. Therefore, the method has the advantages of short air extraction time, high working vacuum degree, short production period and the like.
The sputtering coating device 3 comprises a sublimation component, a magnetron sputtering component and a workpiece baking component, wherein the workpiece baking component is arranged on the inner side wall of the box body 1a, the magnetron sputtering component is arranged in the box body 1a and is in butt joint with the bearing barrel 7, the sublimation component is arranged on the two door plates 1c, the output ends of the sublimation component penetrate through the door plates 1c, and the sublimation component is finally arranged on the inner side wall of the door plates 1 c.
The work piece toasts the subassembly and includes the annular heating net that a plurality of groups set up along box 1 a's axis direction interval, every the annular heating net is all installed on box 1 a's inside wall, magnetron sputtering subassembly includes first sputtering power, second sputtering power and baffle portion, first sputtering power and second sputtering power set up respectively at the inside both ends of box 1a, the baffle portion sets up in box 1a and the cover is established on bearing cylinder 7, and first sputtering power and second sputtering power can adopt the direct current sputtering power that has 5KW respectively and follow the alternating current sputtering power of 1KW to accomplish the setting of sputtering power.
The workpiece driving device 2 comprises a movable bearing part, a vertical positioning part and a transverse driving part, the movable bearing part is arranged in the box body 1a, the arrangement direction of the movable bearing part is the same as the extension direction of the box body 1a, the bearing cylinder 7 is arranged at the top of the movable bearing part, the movable bearing part is arranged at the output end of the transverse driving part, the vertical positioning part is arranged at the top of the rack 1b, the output end of the vertical positioning part extends into the box body 1a, the transverse driving part is in transmission connection with the vertical positioning part, and the transverse driving part is positioned at the side part of the evaporation chamber 1. The transmission of the second driving motor 2h in the transverse driving part drives the workpiece frame to rotate by reducing the speed through the gear, and the second driving motor 2h can adjust the speed in a stepless manner, is convenient for customers to meet any requirements and rotates very stably.
The movable bearing part comprises a bearing trolley 2a, a bearing driving component 2b and two bearing transmission components 2c, the two bearing transmission components 2c are symmetrically arranged at the bottom in the box body 1a, the bearing driving component 2b is in transmission connection with one bearing transmission component 2c, an accommodating space for loading the bearing cylinder 7 is formed between the two bearing transmission components 2c, the bearing trolley 2a is arranged between the two bearing transmission components 2c, in the installation state, the bearing cylinder 7 is tightly attached to the top of the bearing trolley 2a, when the bearing cylinder 7 and the bearing trolley 2a need to be synchronously moved, one bearing transmission component 2c is driven to rotate by the bearing driving component 2b, because the bottoms of the bearing cylinders 7 are tightly attached to the two bearing transmission components 2c and because the transverse driving part is connected with the bearing trolley 2a, when the transverse driving component and the bearing driving component 2b work synchronously, the bearing cylinder 7 and the bearing trolley 2a can be driven to move synchronously.
Each bearing and driving assembly 2c comprises a driving spindle 2c1, a driving sleeve shaft 2c2 and two first bearing seats 2c3, the two first bearing seats 2c3 are symmetrically installed at two ends of the bottom in the box body 1a, two ends of the driving sleeve shaft 2c2 are respectively connected with the two first bearing seats 2c3 in a rotating manner, the driving spindle 2c1 penetrates through the driving sleeve shaft 2c2 and is tightly attached to the inner space of the driving sleeve shaft 2c2, the bearing and driving assembly 2b comprises a first bevel gear 2b1, a second bevel gear 2b2 and a first driving motor, the first bevel gear 2b1 is sleeved on one of the driving spindles 2c1, the first bevel gear 2b1 is engaged with the second bevel gear 2b2, the first driving motor is installed in the box body 1a, the second bevel gear 2b2 is fixedly connected with the spindle of the first driving motor, and the first driving motor drives the second bevel gear 2 to rotate through the first driving motor 2b2, since the first bevel 2b1 is engaged with the second bevel 2b2, the first bevel 2b1 can be driven to rotate, one of the transmission main shafts 2c1 can be driven to rotate, and the carrier 7 can be driven to move on the two transmission sleeve shafts 2c 2.
The vertical positioning assembly comprises a transverse positioning plate 2d, a driving positioning plate 2e, a thin cylinder 2f and three extension driving seats 2g, the three extension driving seats 2g are arranged at the outer bottom of the box body 1a at intervals, the output end of each extension driving seat 2g penetrates through the box body 1a along the vertical direction and extends towards the inside of the box body, the transverse positioning plate 2d is arranged at the inner bottom of the box body 1a and is fixedly connected with the output ends of the three extension driving seats 2g, the driving positioning plate 2e is arranged at the bottoms of two extension driving seats 2g and is positioned at the top of the rack 1b, the thin cylinder 2f is arranged on the rack 1b, the output end of the thin cylinder 2f is fixedly connected with the bottom of the driving positioning plate 2e, when the position of the whole bearing cylinder 7 in the box body 1a needs to be finely adjusted, the driving positioning plate 2e is driven by the thin cylinder 2f, because the extension driving seat 2g is installed on the driving positioning plate 2e, and because the transverse positioning plate 2d is installed at the output end of the extension driving seat 2g, the transverse positioning plate 2d can be driven to move along the vertical direction, and because the transverse driving assembly is installed on the transverse positioning plate 2d, the carrying cylinder 7 can be driven to perform fine adjustment of the position in the box body 1 a.
The transverse driving assembly comprises a second driving motor 2h, a third bevel gear 2i, a fourth bevel gear 2j and two sliding auxiliary parts 2k, the two sliding auxiliary parts 2k are symmetrically arranged at the bottom in the box body 1a and are positioned below the bearing transmission assembly 2c, each sliding auxiliary part 2k comprises a sliding guide rail 2k1 and two second bearing seats 2k2, the two second bearing seats 2k2 are arranged at two ends of the top of the transverse positioning plate 2d, the sliding guide rail 2k1 is arranged on the two second bearing seats 2k2, the third bevel gear 2i is arranged at the end of one sliding guide rail 2k1, the second driving motor 2h is arranged on the rack 1b, an output shaft vertically upwards extends to the inside of the transverse positioning plate by finally penetrating through the box body 1a, the fourth bevel gear 2j is arranged on a main shaft of the second driving motor 2h, the third bevel gear 2i is meshed with the fourth bevel gear 2j, the fourth bevel gear 2j is driven to rotate by the second driving motor 2h, because the fourth bevel gear 2j is meshed with the third bevel gear 2i, the third bevel gear 2i can be driven to rotate, and because the third bevel gear 2i is sleeved on one of the sliding guide rails 2k1, the sliding guide rail 2k1 can be driven to rotate, so that the bearing trolley 2a is driven.
The positioning and pressing device 5 comprises two groups of pressing components which are respectively arranged on two box doors, each pressing component comprises a rectangular box body 8, a positioning and pressing plate 9 and a transverse driving cylinder 10, the rectangular box body 8 is arranged on the outer side wall of the box door, the positioning pressing plate 9 is arranged inside the rectangular box body 8, the transverse driving cylinder 10 is arranged on the rectangular box body 8, the output end of the box door is fixedly connected with the side wall of a positioning and pressing plate 9, the positioning and pressing plate 9 is fixedly connected with the outer side wall of the box door, when the pressing state is needed, the positioning pressing plate 9 is driven to move along the horizontal direction by the transverse driving cylinder 10, the outer side wall of the box door of the positioning pressing plate 9 can be driven to move, so that the box door is further pressed in a vacuum state, and the vacuum state in the box body 1a is kept stable in a coating state.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that any minor modifications, equivalent changes and modifications made to the above embodiment according to the technical spirit of the present invention are within the technical scope of the present invention.
Claims (10)
1. The utility model provides a sublimation magnetron sputtering coating film all-in-one which characterized in that: comprises an evaporation chamber (1), a workpiece driving device (2), a sputtering coating device (3), a water cooling device (4), a positioning and pressing device (5) and a control cabinet (6), the positioning and pressing devices (5) are respectively arranged at two ends of the evaporation chamber (1), the sputtering coating device (3) and the workpiece driving device (2) are both arranged in the evaporation chamber (1), the workpiece driving device (2) is provided with a bearing cylinder (7) for accommodating parts to be sputtered and coated, the bearing cylinder (7) can move along the length direction of the evaporation chamber (1) under the drive of the workpiece drive device (2), the output end of the sputtering coating device (3) is covered on the bearing cylinder (7), the output end of the water cooling device (4) is communicated with the evaporation chamber (1), and the workpiece driving device (2), the sputtering coating device (3), the water cooling device (4) and the positioning and pressing device (5) are all electrically connected with the control cabinet (6).
2. The sublimation magnetron sputtering coating all-in-one machine of claim 1, characterized in that: evaporating chamber (1) is including box (1 a), frame (1 b) and two door plant (1 c) that are cylindrical structure, the bottom at box (1 a) is installed in frame (1 b), two door plant (1 c) is articulated with the both sides of box (1 a) respectively, every all be equipped with the sealing rubber circle that can closely laminate with box (1 a) inside wall on the inside wall of door plant (1 c), every all be equipped with the observation window on door plant (1 c), water cooling plant (4) are including leading to water guard shield, cold water access pipeline and hot water access pipeline, it wraps up in the outside of box (1 a) to lead to the water guard shield, cold water access pipeline and hot water access pipeline communicate with the both ends that lead to the water guard shield respectively.
3. The sublimation magnetron sputtering coating all-in-one machine of claim 2, characterized in that: the sputtering coating device (3) comprises a sublimation component, a magnetron sputtering component and a workpiece baking component, wherein the workpiece baking component is arranged on the inner side wall of the box body (1 a), the magnetron sputtering component is installed in the box body (1 a) and is in butt joint with the bearing cylinder (7), the sublimation component is installed on two door plates (1 c), the output ends of the sublimation component penetrate through the door plates (1 c), and the sublimation component is finally arranged on the inner side wall of the door plates (1 c).
4. The sublimation magnetron sputtering coating all-in-one machine of claim 3, characterized in that: the workpiece baking assembly comprises a plurality of groups of annular heating nets arranged along the axis direction of the box body (1 a) at intervals, each annular heating net is installed on the inner side wall of the box body (1 a), the magnetron sputtering assembly comprises a first sputtering power source, a second sputtering power source and a baffle part, the first sputtering power source and the second sputtering power source are respectively arranged at two ends inside the box body (1 a), and the baffle part is arranged in the box body (1 a) and covered on the bearing cylinder (7).
5. The sublimation magnetron sputtering coating all-in-one machine of claim 4, characterized in that: the workpiece driving device (2) comprises a moving bearing part, a vertical positioning part and a transverse driving part, the moving bearing part is arranged in the box body (1 a) and the direction of the moving bearing part is the same as the extending direction of the box body (1 a), the bearing cylinder (7) is arranged at the top of the moving bearing part, the moving bearing part is arranged at the output end of the transverse driving part, the vertical positioning part is arranged at the top of the rack (1 b) and the output end of the vertical positioning part extends into the box body (1 a), and the transverse driving part is in transmission connection with the vertical positioning part.
6. The sublimation magnetron sputtering coating all-in-one machine of claim 5, characterized in that: the movable bearing part comprises a bearing trolley (2 a), a bearing driving component (2 b) and two bearing transmission components (2 c), the two bearing transmission components (2 c) are symmetrically arranged at the bottom in the box body (1 a), the bearing driving component (2 b) is in transmission connection with one bearing transmission component (2 c), an accommodating space for loading a bearing cylinder (7) is formed between the two bearing transmission components (2 c), the bearing trolley (2 a) is arranged between the two bearing transmission components (2 c), and the bearing cylinder (7) is tightly attached to the top of the bearing trolley (2 a) in an installation state.
7. The sublimation magnetron sputtering coating all-in-one machine of claim 6, characterized in that: each bearing transmission assembly (2 c) comprises a transmission main shaft (2 c 1), a transmission sleeve shaft (2 c 2) and two first bearing seats (2 c 3), wherein the two first bearing seats (2 c 3) are symmetrically arranged at two ends of the bottom in the box body (1 a), two ends of the transmission sleeve shaft (2 c 2) are respectively and rotatably connected with the two first bearing seats (2 c 3), the transmission main shaft (2 c 1) penetrates through the transmission sleeve shaft (2 c 2) and is tightly attached to the inner space of the transmission sleeve shaft (2 c 2), the bearing driving assembly (2 b) comprises a first umbrella tooth (2 b 1), a second umbrella tooth (2 b 2) and a first driving motor, the first umbrella tooth (2 b 1) is sleeved on one of the transmission main shafts (2 c 1), the first umbrella tooth (2 b 1) is meshed with the second umbrella tooth (2 b 2), and the first driving motor is arranged in the box body (1 a), and the second bevel gear (2 b 2) is fixedly connected with a main shaft of the first driving motor.
8. The sublimation magnetron sputtering coating all-in-one machine of claim 7, characterized in that: the vertical positioning assembly comprises a transverse positioning plate (2 d), a driving positioning plate (2 e), a thin cylinder (2 f) and three extension driving seats (2 g), the three extension driving seats (2 g) are arranged at the outer bottom of the box body (1 a) at intervals, the output end of each extension driving seat (2 g) penetrates through the box body (1 a) along the vertical direction and extends towards the inside of the box body, the transverse positioning plate (2 d) is arranged at the bottom in the box body (1 a) and is fixedly connected with the output ends of the three extension driving seats (2 g), the driving positioning plate (2 e) is arranged at the bottom of two extending driving seats (2 g) and is positioned at the top of the frame (1 b), the thin cylinder (2 f) is arranged on the rack (1 b), and the output end of the thin cylinder (2 f) is fixedly connected with the bottom of the driving positioning plate (2 e).
9. The sublimation magnetron sputtering coating all-in-one machine of claim 8, characterized in that: the transverse driving assembly comprises a second driving motor (2 h), a third bevel gear (2 i), a fourth bevel gear (2 j) and two sliding auxiliary parts (2 k), wherein the two sliding auxiliary parts (2 k) are symmetrically arranged at the bottom in the box body (1 a) and are positioned below the bearing transmission assembly (2 c), each sliding auxiliary part (2 k) comprises a sliding guide rail (2 k 1) and two second bearing seats (2 k 2), the two second bearing seats (2 k 2) are arranged at two ends of the top of the transverse positioning plate (2 d), the sliding guide rail (2 k 1) is arranged on the two second bearing seats (2 k 2), the third bevel gear (2 i) is arranged at the end part of one sliding guide rail (2 k 1), the second driving motor (2 h) is arranged on the rack (1 b) and has an output shaft which is vertically upward, and finally, the second driving motor penetrates through the box body (1 a) and extends towards the interior of the box body, the fourth bevel gear (2 j) is arranged on a main shaft of the second driving motor (2 h), and the third bevel gear (2 i) is meshed with the fourth bevel gear (2 j).
10. The sublimation magnetron sputtering coating all-in-one machine of claim 1, characterized in that: the positioning and pressing device (5) comprises two groups of pressing parts, the pressing parts are arranged on two box doors respectively, each pressing part comprises a rectangular box body (8), a positioning pressing plate (9) and a transverse driving cylinder (10), the rectangular box body (8) is arranged on the outer side wall of each box door, the positioning pressing plate (9) is arranged inside the rectangular box body (8), the transverse driving cylinder (10) is arranged on the rectangular box body (8), the output end of the transverse driving cylinder is fixedly connected with the side wall of the positioning pressing plate (9), and the positioning pressing plate (9) is fixedly connected with the outer side wall of each box door.
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| CN201911130795.7A CN110804725A (en) | 2019-11-19 | 2019-11-19 | Sublimation magnetron sputtering coating all-in-one |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911130795.7A CN110804725A (en) | 2019-11-19 | 2019-11-19 | Sublimation magnetron sputtering coating all-in-one |
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| CN208395262U (en) * | 2018-04-26 | 2019-01-18 | 常州龙腾光热科技股份有限公司 | A kind of magnetron sputtering coater |
| CN211170856U (en) * | 2019-11-19 | 2020-08-04 | 成都四盛科技有限公司 | Sublimation magnetron sputtering coating all-in-one |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2399401Y (en) * | 1999-12-22 | 2000-10-04 | 中国科学院沈阳科学仪器研制中心 | Continuous film coating appts. for plane display |
| KR100879380B1 (en) * | 2008-06-30 | 2009-01-20 | 정도화 | Batch type vacuum coating apparatus and coating method thereby |
| CN101928919A (en) * | 2010-08-18 | 2010-12-29 | 哈尔滨一工普威特镀膜有限公司 | Device for depositing thin film on small object |
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