CN219568046U - Multifunctional vacuum coating machine - Google Patents
Multifunctional vacuum coating machine Download PDFInfo
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- CN219568046U CN219568046U CN202222530064.5U CN202222530064U CN219568046U CN 219568046 U CN219568046 U CN 219568046U CN 202222530064 U CN202222530064 U CN 202222530064U CN 219568046 U CN219568046 U CN 219568046U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The multifunctional vacuum coating machine can be used for coating films on polyester films or hard plastic substrates. When plating PET materials, the evaporation system is arranged in a straight line, and the PET substrate winding system is arranged in a vacuum chamber through a vacuum chamber small door and is fixed in the vacuum chamber through the end surfaces at two ends; the vacuum chamber is sealed, the vacuum pumping system is controlled by the electrical control system to vacuumize the vacuum chamber, and when the vacuum degree reaches the process setting requirement, the evaporation system and the PET substrate winding system are started to begin coating; when the hard substrate is plated, the evaporation system is moved to an installation position according to the requirement, the hard substrate is fixed on the hard substrate rotating system, the hard substrate rotating system is installed in the vacuum chamber through the vacuum chamber gate, the hard substrate rotating system is fixed on the rotating shaft at the top of the vacuum chamber, the vacuum chamber gate is closed, and when the vacuum degree reaches the process setting requirement, the evaporation system and the hard substrate rotating system are started to start film plating.
Description
Technical Field
The utility model relates to the technical field of evaporation coating, in particular to a multifunctional vacuum coating machine which can be used for coating a polyester film or a hard plastic substrate.
Background
Vacuum coating machines are mainly used for coating films which are required to be carried out under a higher vacuum degree, and generally comprise: evaporating plating and sputtering plating.
The material to be coated is called a substrate, and the material to be coated is called a target. The substrate and the target are in the vacuum cavity.
The evaporation coating is generally performed by heating the target material to evaporate the surface components in the form of radicals or ions. And deposited on the surface of the substrate to form a thin film through a film forming process (scattered-island structure-vagal structure-lamellar growth). For sputtering type coating films, the method can be simply understood as that electrons or high-energy laser are used for bombarding a target material, surface components are sputtered in an atomic group or ion form and finally deposited on the surface of a substrate, and the film is finally formed through a film forming process.
Vacuum coating machines are well established techniques, but are only capable of coating a specific substrate of a certain type.
Disclosure of Invention
In order to overcome the defects in the prior art, the technical problem to be solved by the utility model is to provide a multifunctional vacuum coating machine which can be used for coating films on polyester films and hard plastic substrates.
The technical scheme of the utility model is as follows: this kind of multi-functional vacuum coating machine, it includes: the vacuum equipment comprises a vacuum pumping system (1), a vacuum chamber (2), a PET substrate winding system (3), a hard substrate rotating system (4), an evaporating system (5), an electrical control system (6) and a water cooling system (7);
the vacuum air extraction systems are uniformly distributed on the side surface of the vacuum chamber and avoid the gate position, the vacuum air extraction systems are connected with the vacuum chamber through a flange on the side surface of the vacuum chamber, the vacuum chamber is a cylinder and is provided with a gate (21) for entering and exiting the hard substrate, and the gate is provided with a small gate (22) for entering and exiting the PET substrate winding system; the evaporation system is arranged at the bottom of the vacuum chamber, water pipes of the water cooling system are uniformly arranged on the inner wall of the vacuum chamber, and the evaporation system is connected with a refrigerating device outside the vacuum chamber through a pipeline; the two ends of the PET substrate winding system are fixed on the side surfaces of the vacuum chamber, the hard substrate rotating system is fixed on the top of the vacuum chamber through a rotating shaft, the PET substrate winding system and the hard substrate rotating system are installed in the vacuum chamber at the same time, and one installation is selected according to the coating requirement;
when plating PET materials, the evaporation system is arranged in a straight line, and the PET substrate winding system is arranged in a vacuum chamber through a vacuum chamber small door and is fixed in the vacuum chamber through the end surfaces at two ends; the vacuum chamber is sealed, the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the PET substrate winding system are started to begin coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system and the speed of the PET substrate winding system;
when a hard substrate is plated, the evaporation system is moved to an installation position according to the requirement, the hard substrate is fixed on the hard substrate rotating system, the hard substrate rotating system is installed into a vacuum chamber through a vacuum chamber gate, the hard substrate rotating system is fixed on a rotating shaft at the top of the vacuum chamber, and the vacuum chamber gate is closed; the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the hard substrate rotating system are started to start coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system, the rotating speed of the hard substrate and the coating time.
When the PET material is plated, the evaporation system is arranged in a straight line, and the PET substrate winding system is arranged in a vacuum chamber through a small vacuum chamber door and is fixed in the vacuum chamber through the end surfaces at two ends; the vacuum chamber is sealed, the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the PET substrate winding system are started to begin coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system and the speed of the PET substrate winding system; when a hard substrate is plated, the evaporation system is moved to an installation position according to the requirement, the hard substrate is fixed on the hard substrate rotating system, the hard substrate rotating system is installed into a vacuum chamber through a vacuum chamber gate, the hard substrate rotating system is fixed on a rotating shaft at the top of the vacuum chamber, and the vacuum chamber gate is closed; the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the hard substrate rotating system are started to begin coating when the vacuum degree meets the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system, the rotating speed of the hard substrate and the coating time; thereby realizing the coating of the polyester film and the hard plastic substrate.
Drawings
Fig. 1 shows a schematic structure of a multifunctional vacuum coater according to the present utility model.
Fig. 2 shows a schematic structural view of a hard substrate rotating system of the multifunctional vacuum coating machine according to the present utility model.
Detailed Description
As shown in fig. 1, the multifunctional vacuum coating machine comprises: a vacuum pumping system 1, a vacuum chamber 2, a PET substrate winding system 3, a hard substrate rotating system 4, an evaporating system 5, an electric control system 6 and a water cooling system 7;
the vacuum air extraction systems are uniformly distributed on the side surface of the vacuum chamber and avoid the position of a gate, the vacuum air extraction systems are connected with the vacuum chamber through a flange on the side surface of the vacuum chamber, the vacuum chamber is a cylinder and is provided with a gate 21 for entering and exiting a hard substrate, and the gate is provided with a small gate 22 for entering and exiting a PET substrate winding system; the evaporation system is arranged at the bottom of the vacuum chamber, water pipes of the water cooling system are uniformly arranged on the inner wall of the vacuum chamber, and the evaporation system is connected with a refrigerating device outside the vacuum chamber through a pipeline; the two ends of the PET substrate winding system are fixed on the side surfaces of the vacuum chamber, the hard substrate rotating system is fixed on the top of the vacuum chamber through a rotating shaft, the PET substrate winding system and the hard substrate rotating system are installed in the vacuum chamber at the same time, and one installation is selected according to the coating requirement;
when plating PET materials, the evaporation system is arranged in a straight line, and the PET substrate winding system is arranged in a vacuum chamber through a vacuum chamber small door and is fixed in the vacuum chamber through the end surfaces at two ends; the vacuum chamber is sealed, the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the PET substrate winding system are started to begin coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system and the speed of the PET substrate winding system; (after coating, the evaporation system, the winding system and the vacuumizing system are closed, and when the pressure in the vacuum chamber is recovered to be equal to that in the outdoor, the small door is opened to take out the winding system)
When a hard substrate is plated, the evaporation system is moved to an installation position according to the requirement, the hard substrate is fixed on the hard substrate rotating system, the hard substrate rotating system is installed into a vacuum chamber through a vacuum chamber gate, the hard substrate rotating system is fixed on a rotating shaft at the top of the vacuum chamber, and the vacuum chamber gate is closed; the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the hard substrate rotating system are started to start coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system, the rotating speed of the hard substrate and the coating time. (after the film coating is finished, the evaporation system, the hard substrate rotating system and the vacuumizing system are closed, and when the air pressure in the vacuum chamber is recovered to be equal to that in the outdoor, the door is opened to take out the hard substrate rotating system)
When the PET material is plated, the evaporation system is arranged in a straight line, and the PET substrate winding system is arranged in a vacuum chamber through a small vacuum chamber door and is fixed in the vacuum chamber through the end surfaces at two ends; the vacuum chamber is sealed, the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the PET substrate winding system are started to begin coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system and the speed of the PET substrate winding system; when a hard substrate is plated, the evaporation system is moved to an installation position according to the requirement, the hard substrate is fixed on the hard substrate rotating system, the hard substrate rotating system is installed into a vacuum chamber through a vacuum chamber gate, the hard substrate rotating system is fixed on a rotating shaft at the top of the vacuum chamber, and the vacuum chamber gate is closed; the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the hard substrate rotating system are started to begin coating when the vacuum degree meets the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system, the rotating speed of the hard substrate and the coating time; thereby realizing the coating of the polyester film and the hard plastic substrate.
The PET substrate winding system may be mounted on a movable rail car, comprising: the device comprises a winding and unwinding mechanism, a film coating water-cooling main roller, a film coating water-cooling plate, a guide roller and a variable frequency motor.
As shown in fig. 2, the hard substrate rotation system may include: a rotation shaft 41, a rotation motor 42, a rotation rail, and a hard substrate rotation frame 43.
The evaporation system may include: the interface of the electron gun, the crucible and the evaporation cover is a rotary joint, the crucible rotates according to a design program, the crucible is provided with an independent switch and a main regulating switch for regulating voltage and current, and the electron gun is arranged in a straight line when in a PET (polyethylene terephthalate) base material.
The electrical control system may include: the device comprises a comprehensive operation table, a winding operation table, a main power supply electric cabinet, a winding electric cabinet, a vacuum power supply electric cabinet, an air source control box, an ion source control unit and an electron gun control cabinet.
The water cooling system may include: evaporative cooling, baffle cooling, vacuum pump cooling.
In addition, an observation window is arranged on the vacuum chamber so as to observe the plating condition from the outside.
Preferably, the multifunctional vacuum coating machine further comprises a cutting film system, and the evaporation system further comprises a film thickness control device.
Preferably, the surface of the vacuum chamber is polished and opened in a left-right sliding manner.
Preferably, the PET substrate winding system adopts a three-motor constant tension winding control mode. The whole set of system is arranged on the movable rail guide car, so that the whole system can conveniently enter and exit the vacuum chamber, and the operation and maintenance of loading and unloading the base material are convenient.
Preferably, the rotating shaft of the hard substrate rotating system is arranged at the top of the vacuum chamber, an external sealing mode is adopted, the rotating motor is a variable frequency motor, and the hard substrate is fixed on the guide rail after entering the vacuum chamber from the rotating guide rail. The hard base material rotating system is driven by a variable frequency motor, is connected by magnetic fluid and has a maximum load of 400 kg. And a mounting guide rail is arranged below the rotating shaft, and the hard workpiece enters the vacuum chamber from the mounting guide rail through the tool and is fixed on the guide rail. The mounting rail and the winding device should have a certain safety distance in the vertical direction. Ensuring that the winding device does not interfere with the mounting rail.
Preferably, the electron gun of the evaporation system is a plurality of independent electron guns, and each electron gun is provided with a unit for displaying output current and power.
Preferably, the evaporation system further comprises a water cooling box, and the vacuum chamber is divided into an upper substrate winding chamber and a lower evaporation coating chamber when the PET substrate is coated.
Preferably, the evaporation system further comprises a baffle for use in plating the rigid substrate.
Preferably, the evaporation system further comprises a hall ion source that cleans the hard substrate prior to coating.
The electric control operation system is responsible for information acquisition, analysis and processing. The detailed working condition and process of the touch screen display system are controlled in a manual mode and an automatic mode, and the touch screen display system is safe and reliable. The application of the digital closed-loop tension control technology ensures that the transmission synchronism is good, accurate and reliable; the voltage and current of each group of crucibles can be adjusted independently or in total, and all the crucibles have numerical values. And a plurality of pictures are operated and displayed, so that the operation requirement of a coating process is met.
Preferably, the evaporative cooling, the baffle cooling and the vacuum pump cooling all comprise full cooling pipelines, and a water-break alarm device is arranged on the water inlet pipeline.
The present utility model is not limited to the preferred embodiments, but can be modified in any way according to the technical principles of the present utility model, and all such modifications, equivalent variations and modifications are included in the scope of the present utility model.
Claims (9)
1. The multifunctional vacuum coating machine is characterized in that: it comprises the following steps: the vacuum equipment comprises a vacuum pumping system (1), a vacuum chamber (2), a PET substrate winding system (3), a hard substrate rotating system (4), an evaporating system (5), an electrical control system (6) and a water cooling system (7);
the vacuum air extraction systems are uniformly distributed on the side surface of the vacuum chamber and avoid the gate position, the vacuum air extraction systems are connected with the vacuum chamber through a flange on the side surface of the vacuum chamber, the vacuum chamber is a cylinder and is provided with a gate (21) for entering and exiting the hard substrate, and the gate is provided with a small gate (22) for entering and exiting the PET substrate winding system; the evaporation system is arranged at the bottom of the vacuum chamber, water pipes of the water cooling system are uniformly arranged on the inner wall of the vacuum chamber, and the evaporation system is connected with a refrigerating device outside the vacuum chamber through a pipeline; the two ends of the PET substrate winding system are fixed on the side surfaces of the vacuum chamber, the hard substrate rotating system is fixed on the top of the vacuum chamber through a rotating shaft, the PET substrate winding system and the hard substrate rotating system are installed in the vacuum chamber at the same time, and one installation is selected according to the coating requirement;
when plating PET materials, the evaporation system is arranged in a straight line, and the PET substrate winding system is arranged in a vacuum chamber through a vacuum chamber small door and is fixed in the vacuum chamber through the end surfaces at two ends; the vacuum chamber is sealed, the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the PET substrate winding system are started to begin coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system and the speed of the PET substrate winding system;
when a hard substrate is plated, the evaporation system is moved to an installation position according to the requirement, the hard substrate is fixed on the hard substrate rotating system, the hard substrate rotating system is installed into a vacuum chamber through a vacuum chamber gate, the hard substrate rotating system is fixed on a rotating shaft at the top of the vacuum chamber, and the vacuum chamber gate is closed; the vacuum pumping system is controlled by the electric control system to vacuumize the vacuum chamber, the evaporation system and the hard substrate rotating system are started to start coating when the vacuum degree reaches the process setting requirement, and the film thickness is controlled by controlling the power of the evaporation system, the rotating speed of the hard substrate and the coating time.
2. The multifunctional vacuum coating machine according to claim 1, wherein: the multifunctional vacuum coating machine further comprises a film cutting system, and the evaporation system further comprises a film thickness control device.
3. The multifunctional vacuum coating machine according to claim 2, wherein: and the surface of the vacuum chamber is polished, and the door is opened in a left-right sliding mode.
4. A multifunctional vacuum coating machine according to any one of claims 1-3, characterized in that: the PET substrate winding system adopts a three-motor constant-tension winding control mode.
5. The multifunctional vacuum coating machine according to claim 4, wherein: the rotating shaft of the hard substrate rotating system is arranged at the top of the vacuum chamber, an external sealing mode is adopted, the rotating motor is a variable frequency motor, and the hard substrate is fixed on the guide rail after entering the vacuum chamber from the rotating guide rail.
6. The multifunctional vacuum coating machine according to claim 5, wherein: the electron gun of the evaporation system is a plurality of independent electron guns, and each electron gun is provided with a unit for displaying output current and power.
7. The multifunctional vacuum coating machine according to claim 6, wherein: the evaporation system further comprises a water cooling box, and the vacuum chamber is divided into an upper substrate winding chamber and a lower evaporation coating chamber when the PET substrate is plated.
8. The multifunctional vacuum coating machine according to claim 7, wherein: the evaporation system also includes a baffle for use in plating the rigid substrate.
9. The multifunctional vacuum coating machine according to claim 8, wherein: the evaporation system also includes a hall ion source that cleans the hard substrate prior to coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222530064.5U CN219568046U (en) | 2022-09-23 | 2022-09-23 | Multifunctional vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222530064.5U CN219568046U (en) | 2022-09-23 | 2022-09-23 | Multifunctional vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219568046U true CN219568046U (en) | 2023-08-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222530064.5U Active CN219568046U (en) | 2022-09-23 | 2022-09-23 | Multifunctional vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219568046U (en) |
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2022
- 2022-09-23 CN CN202222530064.5U patent/CN219568046U/en active Active
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