CN110760799A

CN110760799A - Linear evaporation boat

Info

Publication number: CN110760799A
Application number: CN201911179953.8A
Authority: CN
Inventors: 彭建; 田琳; 夏虎
Original assignee: BEIJING TECHNOL SCIENCE Co Ltd
Current assignee: BEIJING TECHNOL SCIENCE Co Ltd
Priority date: 2019-11-27
Filing date: 2019-11-27
Publication date: 2020-02-07

Abstract

The invention discloses a linear evaporation boat which comprises an evaporation chamber, a feed hopper and a clamping wing, wherein the feed hopper is connected with the evaporation chamber, the inner space of the feed hopper is communicated, the top of the feed hopper is provided with a feed inlet, the clamping wing is positioned outside the feed hopper and is connected with the feed hopper, the top of the evaporation chamber is provided with a linear evaporation narrow opening, the advantages of a linear source and a boat-shaped source are combined, the material utilization rate is improved, a substrate table is matched for rotation during evaporation, the coating uniformity is improved, the evaporation boat is formed by directly shearing and bending a plate, the production process is simplified, the manufacturing cost is reduced, and meanwhile, the adjustment of the evaporation opening is simpler.

Description

Linear evaporation boat

Technical Field

The invention relates to the field of high-vacuum electronic evaporation coating, in particular to a linear evaporation boat.

Background

In the field of high vacuum resistance evaporation coating, evaporation vessels are various and comprise a linear evaporation source, a boat-shaped evaporation boat, an evaporation basket and a crucible and the like, wherein the linear evaporation source has good uniformity and high material utilization rate but high manufacturing cost, the boat-shaped evaporation boat has low manufacturing cost but small evaporation uniform area, low material utilization rate and serious waste; the evaporation basket and the crucible are filled with more materials, but the limit temperature is low, and only low-melting-point materials can be evaporated.

Disclosure of Invention

The invention aims to provide a linear evaporation boat, which solves the problems in the prior art, improves the material utilization rate and the uniformity, and has low overall manufacturing cost and convenient production.

In order to achieve the purpose, the invention provides the following scheme:

the invention provides a linear evaporation boat which comprises an evaporation chamber, a feed hopper and a clamping wing, wherein the feed hopper is connected with the evaporation chamber, the inner space of the feed hopper is communicated, the top of the feed hopper is provided with a feed inlet, the clamping wing is positioned outside the feed hopper and is connected with the feed hopper, and the top of the evaporation chamber is provided with a linear evaporation narrow opening.

Preferably, the evaporation chamber comprises a bottom plate, a front wall, a rear wall and a top plate, the bottom plate and the top plate are parallel and level, the top plate comprises a front top plate and a rear top plate, the top edge of the front wall is connected with the front edge of the front top plate, the top edge of the rear wall is connected with the rear edge of the rear top plate, a gap between the front top plate and the rear top plate is the linear evaporation narrow opening, the bottom edge of the front wall and the bottom edge of the rear wall are respectively connected with the front edge and the rear edge of the bottom plate, communication openings are formed in the same sides of the front wall, the bottom plate and the rear wall, and two feed hoppers are respectively connected with the communication opening edges on the two sides of the evaporation.

Preferably, the feeding hopper comprises an inclined baffle, a front baffle and a rear baffle, the bottom edge of the inclined baffle is connected with the bottom plate, the top edge of the inclined baffle and the bottom surface of the top plate are located on the same horizontal plane, the front baffle is connected with the front wall and the inclined baffle, the rear baffle is connected with the rear wall and the inclined baffle, and the top edge of the front baffle, the top edge of the inclined bottom plate, the top edge of the rear baffle and the side edge of the top plate form the feeding hole.

Preferably, there are two clamping wings, each clamping wing comprises a vertical connecting plate and a horizontal clamping plate, the vertical connecting plate is connected with the top edge of the inclined baffle, and the side edge of the horizontal clamping plate is connected with the top edge of the vertical connecting plate.

Preferably, the linear evaporation boat is formed by directly shearing and bending a plastic plate.

Compared with the prior art, the invention has the following technical effects:

the linear evaporation boat provided by the invention has the advantages that the steam outlet is a linear evaporation port, evaporation materials are linearly evaporated, the steam outlet is smaller, the dispersion waste is reduced, the material utilization rate is improved, the linear evaporation is matched with the rotary substrate table, the film coating uniformity is improved, the structure is simple, the processing is convenient, and the overall manufacturing cost is low.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic isometric view of a linear evaporator boat according to the present invention;

FIG. 2 is a front view of a linear evaporator boat according to the present invention;

FIG. 3 is a top view of the linear evaporator boat of FIG. 2;

FIG. 4 is a schematic view of bending a plate;

in the figure: 1-evaporation chamber, 2-feed hopper, 3-clamping wing, 4-linear evaporation narrow opening and 5-feed inlet.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The invention aims to provide a linear evaporation boat, which aims to solve the problems in the prior art, combines the advantages of a linear source and a boat-shaped source, improves the material utilization rate, improves the coating uniformity, simplifies the production process, reduces the manufacturing cost and simultaneously ensures that the evaporation port is simpler to adjust.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

As shown in figures 1-3, the invention provides a linear evaporation boat, which comprises an evaporation chamber 1, a feed hopper 2 and clamping wings 3, wherein the feed hopper 2 is connected with the evaporation chamber 1 and the inner space of the feed hopper is communicated, the top of the feed hopper 2 is provided with a feed inlet 5, the clamping wings 3 are positioned outside the feed hopper 2 and are connected with the feed hopper 2, the top of the evaporation chamber 1 is provided with a linear evaporation narrow opening 4, the evaporation opening is linear, the opening is smaller, the emission waste is reduced, the material utilization rate is improved, and the large-area uniform film coating is realized by matching with a rotary substrate table.

Evaporating chamber 1 includes the bottom plate, the antetheca, back wall and roof, the bottom plate is parallel and the homolevel with the roof, the roof includes preceding roof and back roof, the antetheca topside links to each other with preceding roof is preceding, back wall roof limit links to each other with back roof behind, the crack between preceding roof and the back roof is linear evaporation slot 4 promptly, antetheca base and back wall base link to each other with the front and back both sides of bottom plate respectively, the antetheca, the bottom plate forms the intercommunication mouth with the homonymy side of back wall, feeder hopper 2 has two, be connected with the intercommunication mouth of evaporating chamber 1 both sides respectively, the roof is divided around, distance between roof and the back roof before the change, need not secondary operation, can change the line width of linear evaporation slot 4, make the regulation of linear evaporation slot 4 simpler.

Feeder hopper 2 includes oblique baffle, preceding baffle and backplate, and oblique baffle base is connected with the bottom plate, and oblique baffle topside and roof bottom surface are located same horizontal plane, and preceding baffle is connected with antetheca and oblique baffle, and the backplate is connected with back wall and oblique baffle, and preceding baffle topside, inclined bottom plate topside, backplate topside and roof side form feed inlet 5, conveniently add the raw materials to evaporation chamber 1 in, and the feeder hopper bottom is oblique baffle, and the raw materials can not be detained in 5 departments of feed inlet.

The clamping wings 3 are two, each clamping wing 3 comprises a vertical connecting plate and a horizontal clamping plate, the vertical connecting plate is connected with the top edge of the inclined baffle, and the side edge of the horizontal clamping plate is connected with the top edge of the vertical connecting plate, so that the clamping is more stable, and the evaporation boat is convenient to move.

The linear evaporation boat is formed by directly shearing, bending and molding a plastic plate, the production is simple and easy, the cost is low, and the line width of an evaporation port is adjustable.

The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.

Claims

1. A linear evaporation boat, its characterized in that: including evaporating chamber, feeder hopper and centre gripping wing, the feeder hopper with evaporating chamber connects and the inner space communicates with each other, the feed inlet has been seted up at the feeder hopper top, the centre gripping wing is located outside the feeder hopper and with the feeder hopper is connected, linear evaporation slot is seted up at the evaporating chamber top.

2. The linear evaporator boat of claim 1, wherein: the evaporation chamber comprises a bottom plate, a front wall, a rear wall and a top plate, the bottom plate and the top plate are parallel and level, the top plate comprises a front top plate and a rear top plate, the top edge of the front wall is connected with the front edge of the front top plate, the top edge of the rear wall is connected with the rear edge of the rear top plate, a gap between the front top plate and the rear top plate is the linear evaporation narrow opening, the bottom edge of the front wall and the bottom edge of the rear wall are respectively connected with the front edge and the rear edge of the bottom plate, communicated openings are formed in the same side edges of the front wall, the bottom plate and the rear wall, and two feed hoppers are respectively connected with the communicated opening edges on the two sides of.

3. The linear evaporator boat of claim 2, wherein: the feeder hopper includes oblique baffle, preceding baffle and backplate, oblique baffle base with the bottom plate is connected, oblique baffle topside with the roof bottom surface is located same horizontal plane, preceding baffle with the antetheca reaches oblique baffle is connected, the backplate with the back wall reaches oblique baffle is connected, preceding baffle topside with oblique bottom plate topside backplate topside with the roof side forms the feed inlet.

4. The linear evaporator boat of claim 3, wherein: the number of the clamping wings is two, each clamping wing comprises a vertical connecting plate and a horizontal clamping plate, the vertical connecting plate is connected with the top edge of the inclined baffle, and the side edge of the horizontal clamping plate is connected with the top edge of the vertical connecting plate.

5. The linear evaporator boat of claim 4, wherein: the linear evaporation boat is formed by directly shearing, bending and molding a plastic plate.