CN110629168B - 一种真空镀膜机的蒸发装置 - Google Patents
一种真空镀膜机的蒸发装置 Download PDFInfo
- Publication number
- CN110629168B CN110629168B CN201911042223.3A CN201911042223A CN110629168B CN 110629168 B CN110629168 B CN 110629168B CN 201911042223 A CN201911042223 A CN 201911042223A CN 110629168 B CN110629168 B CN 110629168B
- Authority
- CN
- China
- Prior art keywords
- evaporation
- gas
- boat
- crucible
- pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (9)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911042223.3A CN110629168B (zh) | 2019-10-30 | 2019-10-30 | 一种真空镀膜机的蒸发装置 |
PCT/CN2020/118421 WO2021082847A1 (zh) | 2019-10-30 | 2020-09-28 | 一种真空镀膜机的蒸发装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911042223.3A CN110629168B (zh) | 2019-10-30 | 2019-10-30 | 一种真空镀膜机的蒸发装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110629168A CN110629168A (zh) | 2019-12-31 |
CN110629168B true CN110629168B (zh) | 2021-11-02 |
Family
ID=68978682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911042223.3A Active CN110629168B (zh) | 2019-10-30 | 2019-10-30 | 一种真空镀膜机的蒸发装置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN110629168B (zh) |
WO (1) | WO2021082847A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110629168B (zh) * | 2019-10-30 | 2021-11-02 | 东北大学 | 一种真空镀膜机的蒸发装置 |
WO2022022188A1 (zh) * | 2020-07-27 | 2022-02-03 | 江苏菲沃泰纳米科技股份有限公司 | 原料气化装置和镀膜装置以及镀膜设备及其进料方法 |
CN112144018A (zh) * | 2020-08-14 | 2020-12-29 | 浙江长宇新材料有限公司 | 一种带氧化物中间层的复合材料制备系统及方法 |
CN113088918B (zh) * | 2021-04-19 | 2022-11-25 | 辽宁分子流科技有限公司 | 一种智能蒸发镀膜机 |
CN114832730B (zh) * | 2022-05-06 | 2023-08-01 | 聊城市鲁西化工工程设计有限责任公司 | 一种流化床反应装置及合成有机氯硅烷单体的方法 |
CN115404447B (zh) * | 2022-09-29 | 2024-06-04 | 京东方科技集团股份有限公司 | 坩埚组件以及具有其的蒸镀装置 |
CN116892002B (zh) * | 2023-06-06 | 2024-01-30 | 艾姆西艾(宿迁)电池技术有限公司 | 一种卷绕式真空镀膜机蒸发源保护装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201037150Y (zh) * | 2007-04-10 | 2008-03-19 | 西安中意高频设备厂 | 真空感应镀锡装置 |
CN101899652A (zh) * | 2009-12-01 | 2010-12-01 | 东莞宏威数码机械有限公司 | 气体供应系统及方法 |
CN106244995A (zh) * | 2016-09-21 | 2016-12-21 | 铜陵市铜创电子科技有限公司 | 一种设有新型蒸镀坩埚的金属化薄膜真空镀膜装置 |
CN108026636A (zh) * | 2015-07-31 | 2018-05-11 | 希尔贝格公司 | 用于涂覆条带形衬底的感应蒸发器、蒸发器系统和蒸发方法 |
CN109943809A (zh) * | 2019-03-26 | 2019-06-28 | 云谷(固安)科技有限公司 | 一种蒸镀设备 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE970246C (de) * | 1948-10-02 | 1958-08-28 | Siemens Ag | Vorrichtung zur laufenden Bedampfung endloser Gebilde |
JPS59590B2 (ja) * | 1976-02-25 | 1984-01-07 | 株式会社日立製作所 | 抵抗加熱蒸着用ボ−ト |
DE19607400C2 (de) * | 1996-02-28 | 1999-09-09 | Leybold Ag | Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten |
AT2793U1 (de) * | 1998-11-26 | 1999-04-26 | Plansee Ag | Verdampfungseinrichtung |
KR101006938B1 (ko) * | 2002-09-20 | 2011-01-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 제조 시스템 및 발광장치 제작방법 |
JP4558375B2 (ja) * | 2004-05-17 | 2010-10-06 | 株式会社アルバック | 有機材料用蒸発源及び有機蒸着装置 |
CN101736294B (zh) * | 2009-12-23 | 2012-10-10 | 东莞宏威数码机械有限公司 | 蒸发舟夹紧装置 |
CN102268642A (zh) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | 电阻加热式蒸发源 |
KR102694826B1 (ko) * | 2016-07-21 | 2024-08-14 | 주식회사 선익시스템 | 가열부재가 구비된 도가니가 포함되는 박막 증착장치 |
CN206396319U (zh) * | 2017-01-19 | 2017-08-11 | 中国工程物理研究院激光聚变研究中心 | 一种大尺度自支撑铍薄膜的制备装置 |
CN108018526A (zh) * | 2017-12-26 | 2018-05-11 | 安徽金美新材料科技有限公司 | 一种具有导向加热功能的蒸发舟 |
CN208136323U (zh) * | 2018-04-09 | 2018-11-23 | 上海大学 | 可拆卸式的不同材料组件结合型的热蒸发舟 |
GB2574400B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
CN208532921U (zh) * | 2018-07-04 | 2019-02-22 | 李秀虎 | 真空镀膜用夹持装置 |
CN208717422U (zh) * | 2018-07-17 | 2019-04-09 | 江门市兆业科技有限公司 | 一种铝蒸发槽结构 |
CN110629168B (zh) * | 2019-10-30 | 2021-11-02 | 东北大学 | 一种真空镀膜机的蒸发装置 |
-
2019
- 2019-10-30 CN CN201911042223.3A patent/CN110629168B/zh active Active
-
2020
- 2020-09-28 WO PCT/CN2020/118421 patent/WO2021082847A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201037150Y (zh) * | 2007-04-10 | 2008-03-19 | 西安中意高频设备厂 | 真空感应镀锡装置 |
CN101899652A (zh) * | 2009-12-01 | 2010-12-01 | 东莞宏威数码机械有限公司 | 气体供应系统及方法 |
CN108026636A (zh) * | 2015-07-31 | 2018-05-11 | 希尔贝格公司 | 用于涂覆条带形衬底的感应蒸发器、蒸发器系统和蒸发方法 |
CN106244995A (zh) * | 2016-09-21 | 2016-12-21 | 铜陵市铜创电子科技有限公司 | 一种设有新型蒸镀坩埚的金属化薄膜真空镀膜装置 |
CN109943809A (zh) * | 2019-03-26 | 2019-06-28 | 云谷(固安)科技有限公司 | 一种蒸镀设备 |
Also Published As
Publication number | Publication date |
---|---|
WO2021082847A1 (zh) | 2021-05-06 |
CN110629168A (zh) | 2019-12-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110629168B (zh) | 一种真空镀膜机的蒸发装置 | |
US20200095671A1 (en) | Carrying device and semiconductor processing apparatus | |
CN104878370A (zh) | 一种分体式可控温加热盘结构 | |
CN110129727A (zh) | 用于燃料电池金属双极板的预涂镀金属卷带的制备方法 | |
CN115537926A (zh) | 一种提高生长效率的大尺寸物理气相法碳化硅生长坩埚 | |
WO2023045051A1 (zh) | 溅射沉积设备及溅射沉积方法 | |
CN110629174B (zh) | 利用牵引式氮等离子体增强反应气氛环境制备Ti-Al-N 硬质薄膜的方法 | |
CN202576548U (zh) | 一种具有真空夹层炉壁的真空电弧镀膜机 | |
CN108103447A (zh) | 一种自封防漏低沸点材料热蒸发镀膜装置 | |
CN102220559B (zh) | 平板太阳能吸热镀膜板的生产方法及生产装置 | |
CN105671508A (zh) | 一种卷对卷磁控溅射真空镀膜装置 | |
WO2023093455A1 (zh) | 一种进气分配机构及具有其的 cvd 反应设备 | |
CN102206807B (zh) | 生产平板太阳能吸热镀膜板的方法及装置 | |
CN112414189B (zh) | 一种适用于浇筑式毛细芯的平板式蒸发器 | |
CN102603200B (zh) | 一种浮法玻璃在线镀膜装置 | |
CN216972664U (zh) | 一种提高布气均匀性的磁控溅射布气装置 | |
CN211872084U (zh) | 一种化学气相沉积装置 | |
CN112436100A (zh) | 一种用于基材表面的等温模头装置及应用方法 | |
CN105441885B (zh) | 一种真空镀膜冷却装置 | |
CN219079641U (zh) | 一种气相沉积炉 | |
CN110042362A (zh) | 一种多用途化学气相沉积装置 | |
CN2903096Y (zh) | 一种羰基金属化合物气相渗透/沉积装置 | |
CN217110362U (zh) | 一种表面金属处理后节能型干燥装置 | |
CN219772254U (zh) | 用于热炉的喷淋装置及热炉 | |
CN210826345U (zh) | 一种微波镀纳米金刚石薄膜的设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20191231 Assignee: Liaoning molecular flow technology Co.,Ltd. Assignor: Northeastern University Contract record no.: X2021990000177 Denomination of invention: Evaporation device of vacuum coater License type: Common License Record date: 20210326 |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20191231 Assignee: Bosuye Technology (Shenyang) Co.,Ltd. Assignor: Northeastern University Contract record no.: X2023210000030 Denomination of invention: Evaporation device of vacuum deposition machine Granted publication date: 20211102 License type: Common License Record date: 20230420 |
|
EE01 | Entry into force of recordation of patent licensing contract |