CN110503983B - 磁盘用玻璃基板及其制造方法、磁盘和玻璃基板中间体 - Google Patents
磁盘用玻璃基板及其制造方法、磁盘和玻璃基板中间体 Download PDFInfo
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- CN110503983B CN110503983B CN201910743784.XA CN201910743784A CN110503983B CN 110503983 B CN110503983 B CN 110503983B CN 201910743784 A CN201910743784 A CN 201910743784A CN 110503983 B CN110503983 B CN 110503983B
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- glass substrate
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- glass
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- 239000011521 glass Substances 0.000 title claims abstract description 376
- 239000000758 substrate Substances 0.000 title claims abstract description 333
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 230000003746 surface roughness Effects 0.000 claims abstract description 21
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 15
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 14
- 238000005498 polishing Methods 0.000 claims description 137
- 238000011282 treatment Methods 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 36
- 238000001039 wet etching Methods 0.000 claims description 17
- 230000009477 glass transition Effects 0.000 claims description 9
- 238000005530 etching Methods 0.000 abstract description 17
- 238000000227 grinding Methods 0.000 description 76
- 239000006061 abrasive grain Substances 0.000 description 38
- 239000012530 fluid Substances 0.000 description 38
- 238000012545 processing Methods 0.000 description 37
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- 238000007517 polishing process Methods 0.000 description 22
- 230000008569 process Effects 0.000 description 21
- 239000002002 slurry Substances 0.000 description 20
- 239000002245 particle Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 238000005339 levitation Methods 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 239000006249 magnetic particle Substances 0.000 description 10
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- 230000015572 biosynthetic process Effects 0.000 description 7
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- 238000005259 measurement Methods 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 239000005354 aluminosilicate glass Substances 0.000 description 5
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- 230000000694 effects Effects 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 229910052783 alkali metal Inorganic materials 0.000 description 4
- 150000001340 alkali metals Chemical class 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 4
- 239000008119 colloidal silica Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000005389 magnetism Effects 0.000 description 4
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052593 corundum Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
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- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
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- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
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- 239000003921 oil Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 244000145845 chattering Species 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000000465 moulding Methods 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73921—Glass or ceramic substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-195128 | 2015-09-30 | ||
| JP2015195128 | 2015-09-30 | ||
| CN201680029894.4A CN107615381B (zh) | 2015-09-30 | 2016-09-30 | 磁盘用玻璃基板、磁盘、玻璃基板中间体和磁盘用玻璃基板的制造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680029894.4A Division CN107615381B (zh) | 2015-09-30 | 2016-09-30 | 磁盘用玻璃基板、磁盘、玻璃基板中间体和磁盘用玻璃基板的制造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110503983A CN110503983A (zh) | 2019-11-26 |
| CN110503983B true CN110503983B (zh) | 2021-03-19 |
Family
ID=58423694
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910743784.XA Active CN110503983B (zh) | 2015-09-30 | 2016-09-30 | 磁盘用玻璃基板及其制造方法、磁盘和玻璃基板中间体 |
| CN201680029894.4A Active CN107615381B (zh) | 2015-09-30 | 2016-09-30 | 磁盘用玻璃基板、磁盘、玻璃基板中间体和磁盘用玻璃基板的制造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680029894.4A Active CN107615381B (zh) | 2015-09-30 | 2016-09-30 | 磁盘用玻璃基板、磁盘、玻璃基板中间体和磁盘用玻璃基板的制造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US10720180B2 (enExample) |
| JP (2) | JP6106813B1 (enExample) |
| CN (2) | CN110503983B (enExample) |
| MY (1) | MY168096A (enExample) |
| SG (1) | SG11201709624VA (enExample) |
| WO (1) | WO2017057686A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107256712B (zh) * | 2012-09-28 | 2020-04-14 | Hoya株式会社 | 磁盘用玻璃基板及其制造方法、磁盘、圆环状的玻璃基板 |
| CN110503983B (zh) * | 2015-09-30 | 2021-03-19 | Hoya株式会社 | 磁盘用玻璃基板及其制造方法、磁盘和玻璃基板中间体 |
| JP6695318B2 (ja) * | 2017-12-27 | 2020-05-20 | Hoya株式会社 | 円盤状ガラス基板の製造方法、薄板ガラス基板の製造方法、導光板の製造方法及び円盤状ガラス基板 |
| JP7533100B2 (ja) * | 2020-10-07 | 2024-08-14 | 住友金属鉱山株式会社 | ウェハーの汚染検知方法 |
| JP7467759B2 (ja) * | 2021-02-24 | 2024-04-15 | Hoya株式会社 | 磁気ディスク用基板、磁気ディスク、円環形状基板、および磁気ディスク用基板の製造方法 |
| US11270724B1 (en) | 2021-03-04 | 2022-03-08 | Western Digital Technologies, Inc. | Glass substrates for heat assisted magnetic recording (HAMR) and methods and apparatus for use with the glass substrates |
| JP7732498B2 (ja) * | 2021-03-30 | 2025-09-02 | ソニーグループ株式会社 | 磁気記録媒体 |
Citations (3)
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|---|---|---|---|---|
| CN101977860A (zh) * | 2008-03-19 | 2011-02-16 | Hoya株式会社 | 磁记录介质基板用玻璃、磁记录介质基板、磁记录介质和它们的制造方法 |
| CN104584126A (zh) * | 2012-09-28 | 2015-04-29 | Hoya株式会社 | 磁盘用玻璃基板、磁盘以及磁盘用玻璃基板的制造方法 |
| CN106030709A (zh) * | 2014-03-31 | 2016-10-12 | Hoya株式会社 | 磁盘用玻璃基板 |
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|---|---|---|---|---|
| JPH0785463A (ja) * | 1993-09-20 | 1995-03-31 | A G Technol Kk | 磁気ディスク |
| JPH07244947A (ja) * | 1994-03-08 | 1995-09-19 | Hitachi Ltd | 磁気ディスク装置、磁気ディスクおよび磁気ディスクの製造方法 |
| SG84541A1 (en) | 1998-08-19 | 2001-11-20 | Hoya Corp | Glass substrate for magnetic recording medium, magnetic recording medium, and method of manufacturing the same |
| JP3359304B2 (ja) | 1998-08-19 | 2002-12-24 | ホーヤ株式会社 | 磁気記録媒体用ガラス基板、磁気記録媒体及びそれらの製造方法 |
| JP3959588B2 (ja) * | 1999-05-13 | 2007-08-15 | 日本板硝子株式会社 | 情報記録媒体用ガラス基板、情報記録媒体用ガラス基板の製造方法及び情報記録媒体 |
| US6509111B1 (en) * | 1999-09-24 | 2003-01-21 | Hitachi, Ltd. | Magnetic recording media and magnetic disk apparatus |
| US6706427B2 (en) * | 1999-12-21 | 2004-03-16 | Hoya Corporation | Management technique of friction coefficient based on surface roughness, substrate for information recording medium, information recording medium and manufacture method thereof |
| US6852432B2 (en) * | 2000-06-30 | 2005-02-08 | Hitachi, Ltd. | Magnetic recording media and magnetic disk apparatus |
| JP3734745B2 (ja) * | 2000-12-18 | 2006-01-11 | Hoya株式会社 | 磁気記録媒体用ガラス基板の製造方法およびそれを用いて得られる磁気記録媒体用ガラス基板 |
| JP4274708B2 (ja) * | 2001-05-14 | 2009-06-10 | Hoya株式会社 | 磁気記録媒体用ガラス基板及びその製造方法 |
| JP2005078708A (ja) * | 2003-08-29 | 2005-03-24 | Toshiba Corp | 磁気ディスクおよびこれを備えた磁気ディスク装置 |
| JP2006079800A (ja) * | 2004-08-11 | 2006-03-23 | Showa Denko Kk | 磁気記録媒体用シリコン基板及びその製造方法並びに磁気記録媒体 |
| JP2006089363A (ja) * | 2004-08-27 | 2006-04-06 | Showa Denko Kk | 磁気記録媒体用ガラス基板の製造方法、それにより得られる磁気記録媒体用ガラス基板およびこの基板を用いて得られる磁気記録媒体 |
| JP2006092722A (ja) * | 2004-08-27 | 2006-04-06 | Showa Denko Kk | 磁気ディスク用基板および磁気ディスクの製造方法 |
| JP4545714B2 (ja) * | 2005-07-08 | 2010-09-15 | 昭和電工株式会社 | 磁気記録媒体並びに磁気記録再生装置 |
| WO2007007650A1 (en) * | 2005-07-08 | 2007-01-18 | Showa Denko K.K. | Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus |
| JP5484649B2 (ja) * | 2006-01-27 | 2014-05-07 | 古河電気工業株式会社 | 薄板ガラスの製造方法 |
| JP2007272995A (ja) * | 2006-03-31 | 2007-10-18 | Hoya Corp | 磁気ディスク装置および非磁性基板の良否判定方法、磁気ディスク、並びに磁気ディスク装置 |
| US8241423B2 (en) * | 2006-09-29 | 2012-08-14 | Sumco Techxiv Corporation | Silicon single crystal substrate and manufacture thereof |
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| JP5035405B2 (ja) | 2009-11-26 | 2012-09-26 | 旭硝子株式会社 | 磁気記録媒体用ガラス基板の製造方法 |
| KR101477469B1 (ko) * | 2012-03-30 | 2014-12-29 | 호야 가부시키가이샤 | 마스크 블랭크용 기판, 다층 반사막 부착 기판, 투과형 마스크 블랭크, 반사형 마스크 블랭크, 투과형 마스크, 반사형 마스크 및 반도체 장치의 제조 방법 |
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| US9595286B2 (en) * | 2013-03-01 | 2017-03-14 | Hoya Corporation | Glass substrate for magnetic disk and magnetic disk |
| CN110503983B (zh) * | 2015-09-30 | 2021-03-19 | Hoya株式会社 | 磁盘用玻璃基板及其制造方法、磁盘和玻璃基板中间体 |
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2016
- 2016-09-30 CN CN201910743784.XA patent/CN110503983B/zh active Active
- 2016-09-30 MY MYPI2017704463A patent/MY168096A/en unknown
- 2016-09-30 WO PCT/JP2016/079037 patent/WO2017057686A1/ja not_active Ceased
- 2016-09-30 US US15/579,033 patent/US10720180B2/en active Active
- 2016-09-30 SG SG11201709624VA patent/SG11201709624VA/en unknown
- 2016-09-30 CN CN201680029894.4A patent/CN107615381B/zh active Active
- 2016-09-30 JP JP2017502273A patent/JP6106813B1/ja active Active
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2017
- 2017-03-06 JP JP2017042094A patent/JP6577501B2/ja active Active
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2020
- 2020-05-27 US US16/884,931 patent/US11211090B2/en active Active
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2021
- 2021-12-10 US US17/548,008 patent/US11710505B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101977860A (zh) * | 2008-03-19 | 2011-02-16 | Hoya株式会社 | 磁记录介质基板用玻璃、磁记录介质基板、磁记录介质和它们的制造方法 |
| CN104584126A (zh) * | 2012-09-28 | 2015-04-29 | Hoya株式会社 | 磁盘用玻璃基板、磁盘以及磁盘用玻璃基板的制造方法 |
| CN106030709A (zh) * | 2014-03-31 | 2016-10-12 | Hoya株式会社 | 磁盘用玻璃基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6106813B1 (ja) | 2017-04-05 |
| US20180174606A1 (en) | 2018-06-21 |
| MY168096A (en) | 2018-10-11 |
| WO2017057686A1 (ja) | 2017-04-06 |
| JPWO2017057686A1 (ja) | 2017-10-05 |
| US20220101877A1 (en) | 2022-03-31 |
| US11211090B2 (en) | 2021-12-28 |
| CN107615381B (zh) | 2019-09-13 |
| CN110503983A (zh) | 2019-11-26 |
| JP6577501B2 (ja) | 2019-09-18 |
| SG11201709624VA (en) | 2017-12-28 |
| US11710505B2 (en) | 2023-07-25 |
| US20200286516A1 (en) | 2020-09-10 |
| JP2017130249A (ja) | 2017-07-27 |
| CN107615381A (zh) | 2018-01-19 |
| US10720180B2 (en) | 2020-07-21 |
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