CN110482481A - 一种末端膨大微结构阵列仿生黏附材料的制备方法 - Google Patents

一种末端膨大微结构阵列仿生黏附材料的制备方法 Download PDF

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CN110482481A
CN110482481A CN201910608241.7A CN201910608241A CN110482481A CN 110482481 A CN110482481 A CN 110482481A CN 201910608241 A CN201910608241 A CN 201910608241A CN 110482481 A CN110482481 A CN 110482481A
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CN110482481B (zh
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戴振东
姬科举
袁聪
唐义强
陈健
崔恩华
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Nanjing Lihang Bionic Industry Research Institute Co Ltd
Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Abstract

本发明公开了一种末端膨大微结构阵列黏附材料的制备方法,属于黏附材料的制备领域,包括以下步骤:1)在金属薄片上加工通孔;2)采用电化学方法对通孔形貌进行修型,制备出模具通孔组件;3)用聚合物填充到模具中,固化后脱模得到末端膨大微结构阵列黏附材料;本发明利用电镀对通孔的可控修饰,实现在金属材料上对复杂几何的精密加工,相比现有的非金属模具,能大大提高模具使用寿命,降低生产成本,针对不同弹性模量的衬底组件,通过调节通孔组件与衬底组件之间的正压力,可调控微结构末端形貌,从而实现不同性能黏附材料的制备。

Description

一种末端膨大微结构阵列仿生黏附材料的制备方法
技术领域
本发明涉及一种黏附材料的制备方法,特别涉及一种末端膨大微结构阵列黏附材料的制备方法。
背景技术
自然界中许多生物在垂直表面甚至天花板上表现出卓越的附着能力。例如飞蛾幼虫、部分甲虫、苍蝇、蜜蜂、蜘蛛、壁虎等,这种所谓的“干黏附”能力得益于它们脚掌底部的微结构。受这种生物功能的启发,学者们对各种几何形状的纤维末端(例如扁平,球形,凹形或末端膨大状等)展开了研究(请参见Del Campo A,Greiner C,álvarez I,etal.Patterned Surfaces with Pillars with Controlled 3D Tip Geometry MimickingBioattachment Devices.Advanced Materials,2007,19(15):1973-1977),并结合多种制备方法,制备出了多种具有干黏附特性的仿生结构材料。这些研究中具有蘑菇头状末端膨大的纤维阵列因其低预压(<5N/cm2)下的稳定黏附特性得到了广泛的关注。(请参见Hu H,Tian H,Li X,et al.Biomimetic Mushroom-Shaped Microfibers for Dry Adhesives byElectrically Induced Polymer Deformation.ACS Applied Materials&Interfaces,2014,6(16):14167-14173)。
末端膨大微结构阵列仿生黏附材料的制备方法主要可以分为模具直接复模和后期处理成型两类。专利US20110117321A1和专利US8524092B2通过对SU8和硅基底的光刻制模,直接复模分别制备了单层级和多层级的蘑菇头状末端膨大微结构阵列仿生黏附材料。直接复膜成型对模板的设计加工要求较高,且脱模过程对材料的弹性和韧性亦有要求,所以其发展方向上需要对多孔模板做出较大的创新性设计,以适应多品类、规模化的制备需求。而后期处理成型弱化了对前期多孔模具的要求,可以通过软刻蚀、蘸涂、机压成型、电子束刻蚀等末端修饰加工实现。专利US8398909B1和专利US9340708B2用蘸涂工艺在倾斜的聚合物PU纤维阵列末端构筑了鸭舌板状结构,该结构表现出了类似于生物体干黏附单元的黏附力各向异性,为主动调控黏附材料的黏脱附提供了良好的设计思路。蘸涂修饰工艺展示出了调控末端微结构的便捷性和多样性,有助于研究末端形貌与黏附力学的映射关系,但是二次成型一定程度上制约了规模化发展。
微纳米尺度多孔模板是直接复模成型工艺的关键,模板的制备主要有光刻、微纳米压印、电化学加工等技术方法,所涉及微纳孔基材大都是硅基底。
硅基底光刻技术获得的微纳孔基材在制备微纳米纤维上具有较好的可设计性,但是硅基材的平面特性以及重复使用次数受限等问题,使得多数基于该技术的黏附材料距离大规模产业化仍然具有一段距离。
多孔金属/金属氧化物是一类金属/金属氧化物内部弥散分布着大量的有方向性的或随机的孔洞,这些孔洞的形成可以通过多种加工手段获取,并可以实现孔结构的定向精确调控,常常作为模塑成型的模具在工业化生产中应用。韩国的Dong等利用阳极氧化铝(AAO)作为模板制备了纳米尺度的PS纤维阵列跨尺度结构,其中的AAO模板由电化学改进工艺制备(请参见Y.L.Dong,D.H.Lee,S.G.Lee,K.Cho.Hierarchical Gecko-InspiredNanohairs with a High Aspect Ratio Induced by Nanoyielding.Soft Matter.2012,8(18):4905-4910)。哈工大的Zhang等利用多孔镍/氧化镍(p-Ni/NiO)为模板制备了PDMS纤维阵列,p-Ni/NiO多孔模板通过电镀工艺辅助后续热处理获得,并展示出了孔型的可调性(请参见E.Zhang,Y.Liu,J.Yu,T.Lv,L.Li.Fabrication of Hierarchical Gecko-Inspired Microarrays Using a Three-Dimensional Porous Nickel OxideTemplate.Journal of Materials Chemistry B.2015,3(32):6571-6575)。
多孔金属/金属氧化物作为模板在尺度和规模上具有良好的可扩展性,但目前研究显示这类多孔金属/金属氧化物的孔结构均一性以及末端结构加工精度有待进一步改善。随着微纳加工技术的发展,获得定向性、均一性良好的阵列孔金属,并以此为模板制备仿生黏附材料成为了一种有潜力的发展策略。
发明内容
本发明针对现有技术中存在的问题,公开了一种末端膨大微结构阵列仿生黏附材料的制备方法,巧妙地利用电镀对通孔的可控修饰,实现在金属材料上对复杂几何的精密加工,大大提高模具使用寿命,降低生产成本,模具选用不同弹性模量的衬底可灵活调控微结构末端形貌,从而实现不同性能黏附材料的制备。
本发明是这样实现的:
一种末端膨大微结构阵列仿生黏附材料的制备方法,其特征在于,步骤如下:
步骤一、在金属薄片上加工通孔阵列;
步骤二、采用电镀对通孔形貌进行修饰,用步骤一所述的金属薄片作为电镀阴极,与电镀阳极平行布置,由于靠近阳极侧孔口的电流密度比孔中间位置和远离阳极侧孔口的电流密度大,使得靠近阳极侧孔口处镀层沉积速度比孔中间位置和远离阳极侧孔口处快,从而制备出类双曲面形通孔阵列组件,使通孔组件下表面和衬底组件上表面紧密贴合,所述的通孔组件、衬底组件构成模具组件。该方法是采用电化学方法对通孔形貌进行修饰,制备出模具通孔组件,该电化学方法对通孔形貌进行修饰的效果是:通过电镀使通孔中部的镀层厚度偏厚,沿通孔轴线方向往两侧逐渐变薄。
步骤三、用聚合物填充到步骤二所述的模具组件中,固化后脱模得到末端膨大微结构阵列黏附材料。
进一步,所述的衬底组件为包含不同弹性模量材质的系列组件,所述的衬底组件的弹性模量范围为0.3-60MPa。该衬底组件可以是是多个弹性垫,每个弹性垫的材料的弹性模量不同,使用时,根据不同的要求从中选用一个弹性模量合适的弹性垫。衬底组件选用不同弹性模量的组件时,可调控微结构末端形貌。
进一步,步骤一中所述的通孔阵列中:通孔孔径不大于100微米,相邻两通孔的中心距不大于100微米,所述通孔可以是圆柱形或者异型孔;所述金属薄片厚度不大于1mm。
进一步,步骤三中所述的聚合物为有机或无机的弹性体;包括聚二甲基硅氧烷、附加交联剂的硅高分子弹性体、含丙烯酸酯官能团的或双组份的预聚体及橡胶材料中的一种,或者上述弹性体的改性材料。
进一步,步骤二中所述的电镀工艺为:室温下将清洗活化后的通孔阵列用预镀镍配方电镀1-3分钟,电流密度为2-8A/dm2;然后将通孔阵列移到电镀槽中,通孔阵列作为阴极,镍板作阳极,两电极平行布置;电镀参数为电流密度2-5A/dm2,电镀温度50-70℃,电镀全程机械搅拌,电镀时间1-3小时,形成中部直径小于两端直径的类双曲面通孔组件。
本发明与现有技术相比的有益效果在于:
1)本发明所涉及的制备方法通过通孔阵列的加工以及电镀的方式,即通过减材制造方法和增材制造方法的巧妙组合,实现在金属材料上对复杂几何的精密加工,大大提高模具使用寿命,降低生产成本;本发明利用电镀对通孔的可控修饰,实现在金属材料上对复杂几何的精密加工,相比现有的非金属模具,能大大提高模具使用寿命,降低生产成本,针对不同弹性模量的衬底组件,通过调节通孔组件与衬底组件之间的正压力,可调控微结构末端形貌,通孔组件与衬底组件之间的压力越大,衬底的弹性模量越小,就会使衬底陷入通孔的深度越大,最后浇筑出的黏附材料微结构中“吸盘状”末端的中间凹陷就越深,从而实现不同性能黏附材料的制备;
2)本发明所涉及的制备方法中所使用的模具衬底组件包含不同弹性模量材料的系列组件;所述衬底组件选用不同弹性模量的组件时,结合施加的正压力可实现对微结构末端形貌的灵活调控;
3)本发明所涉及的制备方法可以一次成型,与微纳米压印技术结合可以实现末端膨大微结构阵列黏附材料的经济、可靠的工业化生产。
附图说明
图1是本发明一种末端膨大微结构阵列黏附材料的制备方法流程图;
图2是本发明的通孔组件俯视图;
图3是本发明的通孔组件截面图;
图4是本发明衬底组件对微结构末端形貌调控原理示意图;
图5是本发明实施例中末端膨大圆柱阵列黏附材料电镜照片。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚明了,下面通过附图中示出的具体实施例来描述本发明。但是应该理解,这些描述只是示例性的,而并非要限制本发明的范围。此外,在以下说明中,省略了对公知结构和技术的描述,以避免不必要地混淆本发明的概念。
如图1所示,所示的是本发明一种末端膨大微结构阵列黏附材料的制备方法流程图,具体步骤为:
步骤1:用激光在金属薄片上加工通孔阵列;所述通孔孔径不大于100微米,相邻两通孔的中心距不大于100微米;所述金属薄片厚度不大于1mm,所述通孔可以是圆柱形,也可以是异型孔;
步骤2:采用电镀对通孔形貌进行修饰,制备出模具组件;所述电镀对通孔形貌进行修饰是指通过电镀使通孔中部的镀层厚度偏厚,沿通孔轴线方向往两侧逐步变薄;
步骤3:用聚合物填充到模具中,固化后脱模得到末端膨大微结构阵列黏附材料。所述模具包含通孔组件和衬底组件,所述通孔组件由权利要求1中所述步骤2制备,所述衬底组件包含不同弹性模量材料的系列组件;所述衬底组件选用不同弹性模量的组件时,可调控微结构末端形貌。所述聚合物可以是任何有机或无机的弹性体,如PDMS(聚二甲基硅氧烷)、附加交联剂的硅高分子弹性体、含丙烯酸酯官能团的或双组份的预聚体及橡胶材料,也可以是上述材料的改性材料。
本实施例中采用SUS304不锈钢带进行制备,具体实施方式采用以下技术方案:
步骤1:选用厚度为0.06mm的SUS304不锈钢带,用皮秒激光加工圆柱形通孔阵列,孔径为0.085mm,孔距0.13mm,相邻两行孔采用错排排列。
步骤2:将步骤1制备好的通孔阵列浸入10wt%的草酸溶液中,超声清洗至熔渣除尽后,放入碱性除油剂中超声清洗20分钟后用去离子水清洗干净;在37%浓盐酸HCl中室温浸渍0.5-1min,活化表面;室温下用预镀镍配方电镀1分钟,电流密度为2A/dm2。然后将通孔阵列移到电镀槽中,通孔阵列作为阴极,镍板作阳极,两电极平行布置,电镀的主要技术参数为电流密度2A/dm2,电镀温度55-60℃,电镀全程需要机械搅拌,电镀时间2小时,形成中部直径小,两端直径大的类双曲面通孔组件,具体的如图2~3所示。
步骤3:将(Sylgard 184A)和固化剂(Sylgard 184B)按质量比10:1均匀混合,提前配制出PDMS。使模具的通孔组件下表面和衬底组件上表面在一定正压力下紧密贴合,类双曲面通孔与弹性衬底形成“吸盘状”界面,如图4所示,然后将PDMS浇筑到模具,本实施例中的模具衬底组件选用弹性模量较大的聚四氟乙烯。真空除气泡10分钟,随后,将之置于对流烘箱中70℃固化2小时。最后,小心脱模便可制备出末端膨大圆柱阵列黏附材料,如图5所示,制备过程中通孔组件与衬底组件之间的压力越大,衬底的弹性模量越小,就会使衬底陷入通孔的深度越大,最后浇筑出的黏附材料微结构中“吸盘状”末端的中间凹陷就越深,从而实现不同性能黏附材料的制备,该“吸盘状”末端中部凹陷深度与衬底的弹性模量(E0)、泊松比(μ0)、正压力(P)成正相关。
以上显示和描述了本发明的基本原理和主要特征和本发明的优点。本行业的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。

Claims (5)

1.一种末端膨大微结构阵列仿生黏附材料的制备方法,其特征在于,步骤如下:
步骤一、在金属薄片上加工通孔阵列;
步骤二、采用电镀对通孔形貌进行修饰,用步骤一所述的金属薄片作为电镀阴极,与电镀阳极平行布置,制备出类双曲面形通孔阵列组件,使通孔组件下表面和衬底组件上表面紧密贴合,所述的通孔组件、衬底组件构成模具组件;
步骤三、用聚合物填充到步骤二所述的模具组件中,固化后脱模得到末端膨大微结构阵列黏附材料。
2.根据权利要求1所述的一种末端膨大微结构阵列仿生黏附材料的制备方法,其特征在于,所述的衬底组件为包含不同弹性模量材质的弹性垫,所述的衬底组件的弹性模量范围为0.3-60MPa。
3.根据权利要求1所述的一种末端膨大微结构阵列仿生黏附材料的制备方法,其特征在于,步骤一中所述的通孔阵列中:通孔孔径不大于100微米,相邻两通孔的中心距不大于100微米,所述通孔可以是圆柱形或者异型孔;所述金属薄片厚度不大于1mm。
4.根据权利要求1所述的一种末端膨大微结构阵列仿生黏附材料的制备方法,其特征在于,步骤二中所述的电镀工艺为:室温下将清洗活化后的通孔阵列用预镀镍配方电镀1-3分钟,电流密度为2-8A/dm2;然后将通孔阵列移到电镀槽中,通孔阵列作为阴极,镍板作阳极,两电极平行布置;电镀参数为电流密度2-5A/dm2,电镀温度50-70℃,电镀全程机械搅拌,电镀时间1-3小时,形成中部直径小于两端直径的类双曲面通孔组件。
5.根据权利要求1所述的一种末端膨大微结构阵列仿生黏附材料的制备方法,其特征在于,步骤三中所述的聚合物为有机或无机的弹性体;包括聚二甲基硅氧烷、附加交联剂的硅高分子弹性体、含丙烯酸酯官能团的或双组份的预聚体及橡胶材料中的一种,或者上述弹性体的改性材料。
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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111348619A (zh) * 2020-03-18 2020-06-30 广东工业大学 一种基于光学操控的纳米孔阵列的可控加工方法及装置
CN111993657A (zh) * 2020-08-12 2020-11-27 南京艾德恒信科技有限公司 一种基于微通孔镍基模具的仿生黏附结构平压制造方法
WO2021004225A1 (zh) * 2019-07-08 2021-01-14 南京溧航仿生产业研究院有限公司 一种末端膨大微结构阵列仿生黏附材料的制备方法
CN112590083A (zh) * 2020-12-10 2021-04-02 南京航空航天大学 基于微纳增材制备仿生黏附材料的方法
CN112939621A (zh) * 2021-04-06 2021-06-11 南京航空航天大学 一种透气型仿生黏附材料及其制备方法
CN112959576A (zh) * 2021-01-28 2021-06-15 清华大学 喇叭状微结构阵列粘附表面的制备工艺
CN112987493A (zh) * 2021-03-19 2021-06-18 华南理工大学 一种大深宽比结构薄膜的制备装置及其制备方法
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* Cited by examiner, † Cited by third party
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JP7256773B2 (ja) * 2020-04-24 2023-04-12 信越化学工業株式会社 平坦性制御方法、塗膜の形成方法、平坦性制御装置、及び塗膜形成装置
US11478976B2 (en) * 2020-08-12 2022-10-25 Nanjing Adhesion Technology Co., Ltd Flat-pressing manufacturing method of bionic adhesive structure based on micro through-hole nickel-based mold
CN113354948A (zh) * 2021-06-03 2021-09-07 南京航空航天大学 一种末端膨大的仿生黏附材料高效制造方法
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WO2024038479A1 (ja) * 2022-08-15 2024-02-22 河西工業株式会社 成型金型、成型金型の製造方法、及び、成型品の製造方法

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5632878A (en) * 1994-02-01 1997-05-27 Fet Engineering, Inc. Method for manufacturing an electroforming mold
CN1232372A (zh) * 1996-11-09 1999-10-20 戈特利布捆扎机械有限公司 制造热塑塑料粘接扣的方法和装置
US20060015061A1 (en) * 2004-07-16 2006-01-19 Shih-Chi Kuo Microneedle array device and its fabrication method
CN1925766A (zh) * 2004-03-12 2007-03-07 戈特利布捆扎机械有限公司 生产基础材料上的粘附元件的方法
US20080063866A1 (en) * 2006-05-26 2008-03-13 Georgia Tech Research Corporation Method for Making Electrically Conductive Three-Dimensional Structures
KR100888057B1 (ko) * 2007-11-29 2009-03-11 한국기계연구원 몰딩을 이용한 건식부착물 제조방법
CN102012632A (zh) * 2010-09-10 2011-04-13 中国科学院合肥物质科学研究院 一种具有不同顶端结构的仿生粘附阵列的制备方法
CN103274354A (zh) * 2013-05-17 2013-09-04 哈尔滨工业大学 一种仿壁虎结构粘合剂的制备方法
US20140010988A1 (en) * 2006-12-14 2014-01-09 Carnegie Mellon University, Center For Technology Transfer And Enterprise Creation Dry adhesives and methods for making dry adhesives
CN103738913A (zh) * 2013-12-31 2014-04-23 中山大学 一种准三维微、纳米柱阵列的制作方法
US20160144538A1 (en) * 2014-11-20 2016-05-26 National Tsing Hua University Biomimetic adhesive layer and method of manufacturing the same
CN105836696A (zh) * 2016-03-24 2016-08-10 西安交通大学 一种基于电致动的干粘附复合结构及制造工艺

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6432339B1 (en) * 1997-08-25 2002-08-13 Velcro Industries B.V. Continuous molding of fastener products with a mold belt
DE19828856C1 (de) * 1998-06-29 1999-10-07 Binder Gottlieb Gmbh & Co Verfahren zur Herstellung eines Haftverschlußteiles
US7052638B2 (en) * 1999-01-15 2006-05-30 Velcro Industries B.V. Hook and loop fastener
JP4342179B2 (ja) * 2000-12-22 2009-10-14 ゴットリープ ビンダー ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンデイトゲゼルシャフト マイクロファスナーのための締め付けエレメントの製造方法。
DE10161744A1 (de) * 2001-12-15 2003-06-18 Werner Jahn Verfahren zur Herstellung eines Haftverschlußteiles
DE10207194C1 (de) * 2002-02-21 2003-06-12 Binder Gottlieb Gmbh & Co Oberfläche
US7641469B2 (en) * 2004-09-28 2010-01-05 Velcro Industries B.V. Fastener molding
US8398909B1 (en) 2008-09-18 2013-03-19 Carnegie Mellon University Dry adhesives and methods of making dry adhesives
US8703032B2 (en) 2009-10-14 2014-04-22 Simon Fraser University Biomimetic dry adhesives and methods of production therefor
CN110482481B (zh) * 2019-07-08 2023-04-04 南京航空航天大学 一种末端膨大微结构阵列仿生黏附材料的制备方法

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5632878A (en) * 1994-02-01 1997-05-27 Fet Engineering, Inc. Method for manufacturing an electroforming mold
CN1232372A (zh) * 1996-11-09 1999-10-20 戈特利布捆扎机械有限公司 制造热塑塑料粘接扣的方法和装置
CN1925766A (zh) * 2004-03-12 2007-03-07 戈特利布捆扎机械有限公司 生产基础材料上的粘附元件的方法
US20060015061A1 (en) * 2004-07-16 2006-01-19 Shih-Chi Kuo Microneedle array device and its fabrication method
US20080063866A1 (en) * 2006-05-26 2008-03-13 Georgia Tech Research Corporation Method for Making Electrically Conductive Three-Dimensional Structures
US20140010988A1 (en) * 2006-12-14 2014-01-09 Carnegie Mellon University, Center For Technology Transfer And Enterprise Creation Dry adhesives and methods for making dry adhesives
KR100888057B1 (ko) * 2007-11-29 2009-03-11 한국기계연구원 몰딩을 이용한 건식부착물 제조방법
CN102012632A (zh) * 2010-09-10 2011-04-13 中国科学院合肥物质科学研究院 一种具有不同顶端结构的仿生粘附阵列的制备方法
CN103274354A (zh) * 2013-05-17 2013-09-04 哈尔滨工业大学 一种仿壁虎结构粘合剂的制备方法
CN103738913A (zh) * 2013-12-31 2014-04-23 中山大学 一种准三维微、纳米柱阵列的制作方法
US20160144538A1 (en) * 2014-11-20 2016-05-26 National Tsing Hua University Biomimetic adhesive layer and method of manufacturing the same
CN105836696A (zh) * 2016-03-24 2016-08-10 西安交通大学 一种基于电致动的干粘附复合结构及制造工艺

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11254566B2 (en) 2019-07-08 2022-02-22 Nanjing University Of Aeronautics And Astronautics Preparation method of bionic adhesive material with tip-expanded microstructural array
WO2021004225A1 (zh) * 2019-07-08 2021-01-14 南京溧航仿生产业研究院有限公司 一种末端膨大微结构阵列仿生黏附材料的制备方法
CN111348619B (zh) * 2020-03-18 2020-09-29 广东工业大学 一种基于光学操控的纳米孔阵列的可控加工方法及装置
CN111348619A (zh) * 2020-03-18 2020-06-30 广东工业大学 一种基于光学操控的纳米孔阵列的可控加工方法及装置
CN111993657A (zh) * 2020-08-12 2020-11-27 南京艾德恒信科技有限公司 一种基于微通孔镍基模具的仿生黏附结构平压制造方法
WO2022040916A1 (zh) * 2020-08-25 2022-03-03 南京艾德恒信科技有限公司 一种基于微通孔镍基模具的仿生黏附结构平压制造方法
CN112590083A (zh) * 2020-12-10 2021-04-02 南京航空航天大学 基于微纳增材制备仿生黏附材料的方法
CN112959576A (zh) * 2021-01-28 2021-06-15 清华大学 喇叭状微结构阵列粘附表面的制备工艺
CN112987493A (zh) * 2021-03-19 2021-06-18 华南理工大学 一种大深宽比结构薄膜的制备装置及其制备方法
CN112987493B (zh) * 2021-03-19 2023-12-05 华南理工大学 一种大深宽比结构薄膜的制备装置及其制备方法
CN112939621A (zh) * 2021-04-06 2021-06-11 南京航空航天大学 一种透气型仿生黏附材料及其制备方法
CN113651289A (zh) * 2021-07-07 2021-11-16 北京大学 吸盘结构成型模具的制备方法和吸盘结构的制备方法
CN113651289B (zh) * 2021-07-07 2024-06-04 北京大学 吸盘结构成型模具的制备方法和吸盘结构的制备方法
CN115122549A (zh) * 2022-06-22 2022-09-30 西北工业大学 一种柔性伞状微结构阵列超表面及其制造方法
WO2024060574A1 (zh) * 2022-09-20 2024-03-28 武汉大学 用于仿生结构黏附剂的桥接柱状阵列结构及制备方法

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