CN110453225B - 酸性蚀刻废液的处理方法 - Google Patents
酸性蚀刻废液的处理方法 Download PDFInfo
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- CN110453225B CN110453225B CN201910812770.9A CN201910812770A CN110453225B CN 110453225 B CN110453225 B CN 110453225B CN 201910812770 A CN201910812770 A CN 201910812770A CN 110453225 B CN110453225 B CN 110453225B
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- CN
- China
- Prior art keywords
- etching
- solution
- nickel
- waste liquid
- copper
- Prior art date
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- 239000002699 waste material Substances 0.000 title claims abstract description 132
- 238000005530 etching Methods 0.000 title claims abstract description 131
- 238000000034 method Methods 0.000 title claims abstract description 27
- 230000002378 acidificating effect Effects 0.000 title claims abstract description 22
- 239000007788 liquid Substances 0.000 claims abstract description 149
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 103
- 229910001453 nickel ion Inorganic materials 0.000 claims abstract description 63
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000001556 precipitation Methods 0.000 claims abstract description 30
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910001431 copper ion Inorganic materials 0.000 claims abstract description 24
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052802 copper Inorganic materials 0.000 claims abstract description 23
- 239000010949 copper Substances 0.000 claims abstract description 23
- 239000012716 precipitator Substances 0.000 claims abstract description 22
- 239000000126 substance Substances 0.000 claims abstract description 18
- 238000005868 electrolysis reaction Methods 0.000 claims abstract description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 36
- 239000002244 precipitate Substances 0.000 claims description 21
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 20
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 15
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 15
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 14
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 14
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 8
- 235000019270 ammonium chloride Nutrition 0.000 claims description 7
- 239000008394 flocculating agent Substances 0.000 claims description 7
- 235000006408 oxalic acid Nutrition 0.000 claims description 6
- 229920002401 polyacrylamide Polymers 0.000 claims description 6
- CJTCBBYSPFAVFL-UHFFFAOYSA-N iridium ruthenium Chemical compound [Ru].[Ir] CJTCBBYSPFAVFL-UHFFFAOYSA-N 0.000 claims description 5
- 230000001376 precipitating effect Effects 0.000 claims description 5
- 229910000929 Ru alloy Inorganic materials 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- VNYOIRCILMCTHO-UHFFFAOYSA-L nickel(2+);oxalate;dihydrate Chemical compound O.O.[Ni+2].[O-]C(=O)C([O-])=O VNYOIRCILMCTHO-UHFFFAOYSA-L 0.000 description 16
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 8
- 239000000460 chlorine Substances 0.000 description 8
- 229910052801 chlorine Inorganic materials 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- -1 oxalic acid ions Chemical class 0.000 description 7
- 238000005979 thermal decomposition reaction Methods 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- DOLZKNFSRCEOFV-UHFFFAOYSA-L nickel(2+);oxalate Chemical compound [Ni+2].[O-]C(=O)C([O-])=O DOLZKNFSRCEOFV-UHFFFAOYSA-L 0.000 description 3
- 150000003891 oxalate salts Chemical class 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- IRXRGVFLQOSHOH-UHFFFAOYSA-L dipotassium;oxalate Chemical compound [K+].[K+].[O-]C(=O)C([O-])=O IRXRGVFLQOSHOH-UHFFFAOYSA-L 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 2
- 229940039748 oxalate Drugs 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- ZNCPFRVNHGOPAG-UHFFFAOYSA-L sodium oxalate Chemical compound [Na+].[Na+].[O-]C(=O)C([O-])=O ZNCPFRVNHGOPAG-UHFFFAOYSA-L 0.000 description 2
- 229940039790 sodium oxalate Drugs 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001965 increasing effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B23/00—Obtaining nickel or cobalt
- C22B23/04—Obtaining nickel or cobalt by wet processes
- C22B23/0453—Treatment or purification of solutions, e.g. obtained by leaching
- C22B23/0461—Treatment or purification of solutions, e.g. obtained by leaching by chemical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
- C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
- C25C1/12—Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrochemistry (AREA)
- ing And Chemical Polishing (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
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CN201910812770.9A CN110453225B (zh) | 2019-08-29 | 2019-08-29 | 酸性蚀刻废液的处理方法 |
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CN201910812770.9A CN110453225B (zh) | 2019-08-29 | 2019-08-29 | 酸性蚀刻废液的处理方法 |
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CN110453225A CN110453225A (zh) | 2019-11-15 |
CN110453225B true CN110453225B (zh) | 2021-07-30 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111398196A (zh) * | 2020-04-21 | 2020-07-10 | 遂宁市瑞思科环保科技有限公司 | 一种酸性蚀刻废液中镍含量的检测方法 |
CN111925026A (zh) * | 2020-07-03 | 2020-11-13 | 昆山中环实业有限公司 | 一种酸性含铜蚀刻废液处理工艺 |
CN112251755B (zh) * | 2020-09-27 | 2022-04-29 | 深圳市祺鑫环保科技有限公司 | 三氯化铁蚀刻废液的回收处理方法及其回收处理系统 |
CN114016034A (zh) * | 2021-11-04 | 2022-02-08 | 兴平市秦兴环保科技有限公司 | 一种刻蚀废液混酸的回收再利用处理方法 |
CN114990339A (zh) * | 2022-05-23 | 2022-09-02 | 广东鑫菱环境科技有限公司 | 一种半导体铜合金蚀刻液的回收与循环再生利用方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4083758A (en) * | 1976-09-27 | 1978-04-11 | Criterion | Process for regenerating and for recovering metallic copper from chloride-containing etching solutions |
CN202881408U (zh) * | 2012-11-06 | 2013-04-17 | 赣州聚环科技有限公司 | 酸性蚀刻液中金属铜回收装置 |
CN107354488A (zh) * | 2017-05-23 | 2017-11-17 | 西北矿冶研究院 | 一种脱铜终液的处理方法 |
CN109161895A (zh) * | 2018-08-27 | 2019-01-08 | 安徽绿洲危险废物综合利用有限公司 | 酸性氯化铜蚀刻液铜回收再生系统及回收再生方法 |
CN109868476A (zh) * | 2019-01-28 | 2019-06-11 | 湖北永绍科技股份有限公司 | 一种含铜离子和硝酸根的刻蚀液回收再利用方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105523668B (zh) * | 2015-12-04 | 2018-04-13 | 陈丽珊 | 一种pcb含氨氮废水零排放处理方法及装置 |
-
2019
- 2019-08-29 CN CN201910812770.9A patent/CN110453225B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4083758A (en) * | 1976-09-27 | 1978-04-11 | Criterion | Process for regenerating and for recovering metallic copper from chloride-containing etching solutions |
CN202881408U (zh) * | 2012-11-06 | 2013-04-17 | 赣州聚环科技有限公司 | 酸性蚀刻液中金属铜回收装置 |
CN107354488A (zh) * | 2017-05-23 | 2017-11-17 | 西北矿冶研究院 | 一种脱铜终液的处理方法 |
CN109161895A (zh) * | 2018-08-27 | 2019-01-08 | 安徽绿洲危险废物综合利用有限公司 | 酸性氯化铜蚀刻液铜回收再生系统及回收再生方法 |
CN109868476A (zh) * | 2019-01-28 | 2019-06-11 | 湖北永绍科技股份有限公司 | 一种含铜离子和硝酸根的刻蚀液回收再利用方法 |
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Denomination of invention: Treatment method of acid etching waste liquid Effective date of registration: 20220120 Granted publication date: 20210730 Pledgee: Shenzhen SME financing Company limited by guarantee Pledgor: Shenzhen Qixin Environmental Protection Technology Co.,Ltd. Registration number: Y2022440020012 |
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