CN110387527A - A kind of high rigidity self-lubricating composite coating and preparation method thereof for saw blade - Google Patents
A kind of high rigidity self-lubricating composite coating and preparation method thereof for saw blade Download PDFInfo
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- CN110387527A CN110387527A CN201910688883.2A CN201910688883A CN110387527A CN 110387527 A CN110387527 A CN 110387527A CN 201910688883 A CN201910688883 A CN 201910688883A CN 110387527 A CN110387527 A CN 110387527A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
Abstract
The present invention relates to cutting-tool engineering fields, disclose a kind of high rigidity self-lubricating composite coating and preparation method thereof for saw blade, composite coating successively includes bottom, buffer layer, enhancement layer and self-lubricating enhancement layer from inside to outside, wherein bottom is Ti metal layer, buffer layer is TiN layer, enhancement layer is TiAlN layers, and self-lubricating enhancement layer is TiAl, WS2And TiB2The TiAl/WS of formation is deposited simultaneously2‑TiB2Composite layer, self-lubricating enhancement layer include transition zone and stabilized zone, and the mass fraction of transition zone TiAl from inside to outside is gradually reduced, TiAl, WS in stabilized zone2And TiB2Mass fraction it is constant.The present invention is in such a way that hard conating and soft coating are compound, composite coating obtained had both had high rigidity and good wearability, anti-attrition self-lubricating property is had both again simultaneously, the compatibility and compatibility between composite coating and matrix, between each layer are good, substantially increase the service performance of saw blade.
Description
Technical field
The present invention relates to cutting-tool engineering fields, more particularly, to a kind of high rigidity self-lubricating composite coating for saw blade
And preparation method thereof.
Background technique
Saw blade is a kind of cutting tool processed for stone material, timber, metal, plastic or other material blank, as vapour rubs
The requirements of the manufacturing industry to the intensity, toughness of metal material etc. such as manufacture, heavy industry machinery and precision instrument are higher and higher, machining
Difficulty it is also increasing, hardness, the high temperature resistance etc. of cutting tool made higher requirement.
In the prior art for hardness, the wear-resisting property etc. that improve cutter, generally can tool surface be arranged TiN layer,
The hard conatings such as TiAlN layers, to guarantee suitable cutting speed.For example, one kind it is disclosed in Chinese patent literature " high tenacity and
Thick Ti/TiAlN laminated coating of high rigidity and preparation method thereof ", notification number CN110004415A, using general arc light from
Sub- coating apparatus is deposited, and selects Ti target and TiAl target as cathode targets, which is deposited on hard conjunction
Golden matrix surface；The Ti/TiAlN laminated coating is layer structure, including TiN transition zone, multiple TiAlN sublayers and Ti
Layer, the first layer for being deposited on matrix is TiN transition zone, and it is later Ti sublayer that the second layer, which is TiAlN sublayer, TiAlN sublayer and Ti
Sublayer alternates superposition deposition, and outermost layer is TiAlN sublayer.Invention Ti/TiAlN laminated coating has high thickness, good
Film substrate bond strength, high rigidity, high tenacity the features such as, and have good antioxygenic property.
But the cutter produced using traditional hard conating, in the cutting process, cutter and workpiece, cutter and the boundary of chip
There is very big friction in face, increase the deformation of cutting force, cutting heat and workpiece, result in tool wear, reduce processing matter
Amount.So the cutter produced using traditional hard conating is needed in process using cutting fluid, to reduce metal cutting
Interface friction in journey guarantees processing quality, improves cutter life.But often contain harmful chemicals in cutting fluid
Matter will cause serious environmental pollution, meanwhile, cutting fluid also needs a whole set of circulatory system to maintain, and increases processing cost.Therefore
It needs to improve the coating of cutting tool, makes coating that there is self-lubricating function, so that cutting tool be allow to cut
Without using cutting fluid in journey, dry cutting is realized.
Summary of the invention
The present invention is needed to overcome the cutter produced in the prior art using traditional hard conating in process
Guarantee processing quality using cutting fluid to reduce the interface friction in metal cutting process, improves cutter life, but cut
It cuts in liquid often containing harmful chemical substance, will cause serious environmental pollution, meanwhile, cutting fluid also needs a whole set of cyclic system
The problem of system maintains, and increases processing cost, provides a kind of for the high rigidity self-lubricating composite coating of saw blade and its preparation
Method, the composite coating prepared both have high rigidity, to guarantee the finish of suitable cutting speed and workpiece surface, and have
There is good self-lubrication, reduce knife-bits coefficient of friction of coating saw blade, to guarantee processing quality, improves cutter and use
Service life.
To achieve the goals above, the invention adopts the following technical scheme:
A kind of high rigidity self-lubricating composite coating for saw blade, from inside to outside successively include bottom, buffer layer, enhancement layer and
Self-lubricating enhancement layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is TiAlN layers, and self-lubricating enhancement layer is
TiAl、WS2And TiB2The TiAl/WS of formation is deposited simultaneously2-TiB2Composite layer, the self-lubricating enhancement layer include transition zone and steady
The mass fraction of given layer, transition zone TiAl from inside to outside is gradually reduced, TiAl, WS in the stabilized zone2And TiB2Quality
Score is constant.
In composite coating in the present invention, using Ti metal layer as bottom, composite coating and annular saw chip base can be improved
Compatibility, compatibility and wetability between body facilitate the surface energy for reducing interface, enhance the binding force of composite coating,
The internal stress between composite coating and circular saw blade substrate is reduced simultaneously, improves the toughness and intensity of composite coating.Buffer layer and
Enhancement layer makes the stress inside composite coating smoothly transition and decay from inside to outside, and the presence of TiN buffer layer improves bottom
The compatibility of layer and enhancement layer avoids influencing the bond strength of interlayer because ingredient is mutated.Enhancement layer uses TiAlN layers, TiAlN
Layer is hard conating, and fusing point is high, hardness is big, chemical stability is good, can effectively improve the mechanical property and cutting speed of saw blade.
Self-lubricating enhancement layer is TiAl, WS2And TiB2The TiAl/WS of formation is deposited simultaneously2-TiB2Composite layer, WS2It is soft painting
Layer material has low shear strength and low-friction coefficient, therefore composite coating can be made to have greasy property, does not need additional profit
Lubrication prescription can play good lubricant effect, realize dry cutting.But if individually depositing WS on enhancement layer2Soft coating, WS2With
TiAlN layers because ingredient and microstructure on difference, bond strength is not high, and WS2The thermal stability and wearability of layer are insufficient,
Reduce the cutting ability of saw blade.The present invention is by soft coating material WS2With hard coat material TiAl, TiB2It deposits simultaneously, because
WS2And TiB2Crystal structure be all hexagonal structure, and the lattice equations at interface are close, the S-S atomic distance on same layer and
Ti-Ti atomic distance can be matched preferably, while WS2It is combined between each layer of layer structure by Van der Waals force, S -- S is easy
Fracture, therefore Ti-S key is easy to form, two interfaces can adjust to form coherence/half altogether by lattice distortion transition and the network of dislocation
Lattice interface, coherence/semicoherent interface formation, it is suppressed that WS2Growing up for crystal grain, hinders WS2The shape of loose columanar structure
At, while promoting TiB2Heterogeneous nucleation, make TiB2It with crystal growth pattern forming core and grows up, so as to form WS2-
TiB2-WS2Alternate layer structure, so that obtained coating had not only had the high rigidity and good wearability of hard conating, but also
The anti-attrition self-lubricating property for having both soft coating, substantially increases the service performance of saw blade.
Meanwhile in order to make WS2-TiB2-WS2Alternate layer structure has good bond strength with TiAlN layers, goes forward side by side
One step improves the hardness of self-lubricating enhancement layer, adds TiAl in the present invention in self-lubricating enhancement layer, forms TiAl/WS2-TiB2
Composite layer, and self-lubricating enhancement layer is made to be divided into transition zone and stabilized zone, the quality of transition zone and the TiAlN layers of side TiAl to recline
Score is maximum, and the mutation because of ingredient and microstructure is avoided to influence the bond strength between two layers, and then transition zone is from inside to outside
The mass fraction of TiAl gradually decreases, WS2And TiB2Mass fraction increase, constantly to stabilized zone transition.In stabilized zone, TiAl,
WS2、TiB2Mass fraction remain unchanged.In TiAl/WS2-TiB2In composite layer, WS2And TiB2Form WS2-TiB2-WS2Alternately
Layer structure, and TiAl and WS2And TiB2When co-deposition, since the generation Gibbs free energy of Ti-S is less than Al-S, before this
A part of Ti atomic substitutions position of W atom exists in the form of Ti-S key, forms substitution solid solution, and due to Al atom
Radius be less than Ti atom, Al atom is final to be present in substitution solid solution in the form of replacing Ti atom again；And it is another
Part TiAl is then located between the adjacent S atom of interlayer, forms interstitial solid solution.Therefore, the presence of TiAl further increases
The hardness and wear-resisting property of self-lubricating enhancement layer.
Preferably, in self-lubricating enhancement layer transition zone with a thickness of the 1/6~1/10 of stabilized zone.Using this transition zone and
The ratio of stabilized zone can not only guarantee self-lubricating enhancement layer and reinforce the good bond strength of interlayer, but also can guarantee self-lubricating
Hardness, wearability and the self-lubricating property of enhancement layer make saw blade have good service performance.
Preferably, buffer layer includes successively from inside to outside the first TiN layer and the second TiN layer, wherein the first TiN layer reclines
Ti metal layer, the second TiN layer recline enhancement layer, and the second TiN layer is identical as the mass fraction of Ti in enhancement layer and less than the first TiN
The mass fraction of Ti, the first TiN layer are 100~200nm thicker than the second TiN layer in layer.Guarantee that the stress inside composite coating is steady
It transmits and gradually weakens, strengthen the intensity of composite coating.
Preferably, composite coating with a thickness of 4~6 μm, wherein bottom with a thickness of 80~180nm, enhancement layer thickness
1.45~2.65 μm, self-lubricating enhancement layer with a thickness of 1.5~2.3 μm, remaining is buffer layer.Each layer uses suitable thickness,
It can guarantee that the hardness, wearability and self-lubrication of composite coating meet the requirement of saw blade.
The invention also discloses the preparation method of the above-mentioned high rigidity self-lubricating composite coating for saw blade, including it is as follows
Step:
(1) it cleans oil removing: circular saw blade substrate being placed in the nonionic surfactant solution that mass concentration is 5%~10% and is impregnated
It is placed in acetone and is cleaned by ultrasonic again after cleaning, aeration-drying is placed on 280~360 DEG C of calcinings and naturally cools to room in 1~3 hour
Temperature；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, 3 × 10-1Pa~5 × 10- is first evacuated to
Then 1Pa is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, being passed through argon gas into furnace body makes pressure rise to 2Pa, opens
Open Ti target, 2~3A of electric current, bias -75~-95V, the depositing Ti metal layer 8~14 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target current
Pressure is to deposit the first TiN layer 5~7 minutes under -75~-95V in Ti layer on surface of metal, and then passing to nitrogen makes pressure rise to 4Pa,
Deposit the second TiN layer in the first TiN layer, sedimentation time 3.2~4.6 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: opening TiAl alloy target, electrical current is 4~6A, bias -90~-120V, sedimentation time 15
~20 minutes formation enhancement layers；
(5) prepared by self-lubricating enhancement layer: being passed through argon gas into vacuum drying oven, opens WS2Target and TiB2Target keeps operating air pressure 0.1
Under~0.5Pa, bias -50~-40V, TiAl alloy target current is down to 1A in 10~20 minutes sedimentation times from 3A,
WS2Target current 0.5~0.6A, TiB20.5~0.6A of target current sedimentation time 10~20 minutes, obtains transition zone；Keep TiAl
Alloy target current 1A, WS2Target current 0.5~0.6A, TiB20.5~0.6A of target current sedimentation time 100~120 minutes, is obtained
Stabilized zone.
Using the above method, the composite coating in the present invention can effectively be made, and guarantee each layer in composite coating
Thickness and performance requirement is all used in combination.
Preferably, the material of circular saw blade substrate described in step (1) is high-speed steel.Keep saw blade with higher hard
Degree.
Preferably, nonionic surface active agent described in step (1) is polyoxyethylate amide, Nonyl pheno
One of ether or anhydrous sorbitol.The oil impurities that circular saw blade substrate surface can be effectively removed, avoid to composite coating
Deposition impacts.
Preferably, the atomic ratio of Ti and Al is (2-3) in TiAl alloy target in step (4) and (5): 1.Using this ratio
Example can make composite coating have optimal hardness.
Preferably, using a TiAl alloy target, a TiB in step (5)2Target, two WS2Target.Guarantee that self-lubricating adds
Effective ratio of each component, is conducive to WS in strong layer2-TiB2-WS2The formation of reticular structure and the ratio of solid solution, so that from moistening
Sliding enhancement layer has high rigidity and good lubricity.
Therefore, the invention has the following beneficial effects: composite coatings obtained in the present invention, and both the height with hard conating was hard
Degree and good wearability, while the anti-attrition self-lubricating property of soft coating is had both again, between composite coating and matrix, between each layer
Compatibility and compatibility are good, substantially increase the service performance of saw blade.
Specific embodiment
The present invention will be further described With reference to embodiment.
Embodiment 1:
A kind of high rigidity self-lubricating composite coating for saw blade successively includes with a thickness of 80 with a thickness of 4 μm from inside to outside
The bottom of nm, the buffer layer of 970nm, 1.45 μm of enhancement layer and 1.5 μm of self-lubricating enhancement layer, wherein bottom is Ti metal
Layer, buffer layer are TiN layer, and buffer layer includes successively from inside to outside the first TiN layer and the second TiN layer, wherein the first TiN layer reclines
Ti metal layer, the second TiN layer recline enhancement layer, and the second TiN layer is identical as the mass fraction of Ti in enhancement layer and less than the first TiN
The mass fraction of Ti, the first TiN layer are 100nm thicker than the second TiN layer in layer.Enhancement layer is TiAlN layers, and self-lubricating enhancement layer is
TiAl、WS2And TiB2The TiAl/WS of formation is deposited simultaneously2-TiB2Composite layer, self-lubricating enhancement layer include transition zone and stabilization
The mass fraction of layer, transition zone TiAl from inside to outside is gradually reduced, TiAl, WS in stabilized zone2And TiB2Mass fraction it is constant,
Transition zone with a thickness of the 1/10 of stabilized zone.
The above-mentioned high rigidity self-lubricating composite coating for saw blade the preparation method comprises the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in the polyoxyethylate amide solution that mass concentration is 5% after impregnating 1h and set again
It is cleaned by ultrasonic in acetone, aeration-drying is placed on 280 DEG C of calcinings, 3 hours cooled to room temperatures, and wherein circular saw blade substrate is
High-speed steel；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 3 × 10-1Then Pa takes out true
Sky is to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens Ti target, electric current
2A, bias -75V, the depositing Ti metal layer 8 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2A, bias in Ti target current
To deposit the first TiN layer 7 minutes under -95V in Ti layer on surface of metal, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN
The second TiN layer is deposited on layer, sedimentation time 4.6 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: opening TiAl alloy target, electrical current 4A, bias -90V, sedimentation time is to be formed within 15 minutes to add
Strong layer, wherein the atomic ratio of Ti and Al is 2:1 in TiAl alloy target；
(5) prepared by self-lubricating enhancement layer: being passed through argon gas into vacuum drying oven, opens two WS2Target and a TiB2Target keeps work
Under air pressure 0.1Pa, bias -50V, TiAl alloy target current is down to 1A, two WS from 3A in 10 minutes sedimentation times2Target
Electric current 0.5A, TiB2Target current 0.5A sedimentation time 10 minutes, obtains transition zone；Keep TiAl alloy target current 1A, two WS2
Target current 0.5A, TiB2Target current 0.5A sedimentation time 100 minutes, obtains stabilized zone.
Embodiment 2:
A kind of high rigidity self-lubricating composite coating for saw blade successively includes with a thickness of 180 with a thickness of 6 μm from inside to outside
The bottom of nm, the buffer layer of 870nm, 2.65 μm of enhancement layer and 2.3 μm of self-lubricating enhancement layer, wherein bottom is Ti metal
Layer, buffer layer are TiN layer, and buffer layer includes successively from inside to outside the first TiN layer and the second TiN layer, wherein the first TiN layer reclines
Ti metal layer, the second TiN layer recline enhancement layer, and the second TiN layer is identical as the mass fraction of Ti in enhancement layer and less than the first TiN
The mass fraction of Ti, the first TiN layer are 100nm thicker than the second TiN layer in layer.Enhancement layer is TiAlN layers, and self-lubricating enhancement layer is
TiAl、WS2And TiB2The TiAl/WS of formation is deposited simultaneously2-TiB2Composite layer, self-lubricating enhancement layer include transition zone and stabilization
The mass fraction of layer, transition zone TiAl from inside to outside is gradually reduced, TiAl, WS in stabilized zone2And TiB2Mass fraction it is constant,
Transition zone with a thickness of the 1/6 of stabilized zone.
The above-mentioned high rigidity self-lubricating composite coating for saw blade the preparation method comprises the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in the nonylphenol polyoxyethylene ether solution that mass concentration is 10% after impregnating 1h
It is placed in acetone and is cleaned by ultrasonic again, aeration-drying is placed on 360 DEG C of calcinings, 1 hour cooled to room temperature, wherein annular saw chip base
Body is high-speed steel；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 5 × 10-1Then Pa takes out true
Sky is to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens Ti target, electric current
3A, bias -95V, the depositing Ti metal layer 14 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2A, bias in Ti target current
To deposit the first TiN layer 6 minutes under -75V in Ti layer on surface of metal, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN
The second TiN layer is deposited on layer, sedimentation time 3.2 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: opening TiAl alloy target, electrical current 6A, bias -120V, sedimentation time is to be formed for 20 minutes
Enhancement layer, wherein the atomic ratio of Ti and Al is 3:1 in TiAl alloy target；
(5) prepared by self-lubricating enhancement layer: being passed through argon gas into vacuum drying oven, opens two WS2Target and a TiB2Target keeps work
Under air pressure 0.5Pa, bias -40V, TiAl alloy target current is gradually decreased to 1A from 3A in 20 minutes sedimentation times, two
WS2Target current 0.6A, TiB2Target current 0.6A sedimentation time 20 minutes, obtains transition zone；Keep TiAl alloy target current 1A, two
A WS2Target current 0.6A, TiB2Target current 0.6A sedimentation time 120 minutes, obtains stabilized zone.
Embodiment 3:
A kind of high rigidity self-lubricating composite coating for saw blade successively includes with a thickness of 100 with a thickness of 5 μm from inside to outside
The bottom of nm, the buffer layer of 950nm, 2.05 μm of enhancement layer and 1.9 μm of self-lubricating enhancement layer, wherein bottom is Ti metal
Layer, buffer layer are TiN layer, and buffer layer includes successively from inside to outside the first TiN layer and the second TiN layer, wherein the first TiN layer reclines
Ti metal layer, the second TiN layer recline enhancement layer, and the second TiN layer is identical as the mass fraction of Ti in enhancement layer and less than the first TiN
The mass fraction of Ti, the first TiN layer are 100nm thicker than the second TiN layer in layer.Enhancement layer is TiAlN layers, and self-lubricating enhancement layer is
TiAl、WS2And TiB2The TiAl/WS of formation is deposited simultaneously2-TiB2Composite layer, self-lubricating enhancement layer include transition zone and stabilization
The mass fraction of layer, transition zone TiAl from inside to outside is gradually reduced, TiAl, WS in stabilized zone2And TiB2Mass fraction it is constant,
Transition zone with a thickness of the 1/7 of stabilized zone.
The above-mentioned high rigidity self-lubricating composite coating for saw blade the preparation method comprises the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in the Sorbitan alcoholic solution that mass concentration is 8% after impregnating 1h and be placed in again
It is cleaned by ultrasonic in acetone, aeration-drying is placed on 320 DEG C of calcinings, 2 hours cooled to room temperatures, and wherein circular saw blade substrate is height
Fast steel；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 4 × 10-1Then Pa takes out true
Sky is to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens Ti target, electric current
2.5A, bias -85V, the depositing Ti metal layer 11 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2.5A, bias in Ti target current
To deposit the first TiN layer 6 minutes under -85V in Ti layer on surface of metal, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN
The second TiN layer is deposited on layer, sedimentation time 4 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: opening TiAl alloy target, electrical current 5A, bias -100V, sedimentation time is to be formed for 18 minutes
Enhancement layer, wherein the atomic ratio of Ti and Al is 2.5:1 in TiAl alloy target；
(5) prepared by self-lubricating enhancement layer: being passed through argon gas into vacuum drying oven, opens two WS2Target and a TiB2Target keeps work
Under air pressure 0.3Pa, bias -45V, TiAl alloy target current is gradually decreased to 1A from 3A in 15 minutes sedimentation times, two
WS2Target current 0.55A, TiB2Target current 0.55A sedimentation time 15 minutes, obtains transition zone；TiAl alloy target current 1A is kept,
Two WS2Target current 0.55A, TiB2Target current 0.55A sedimentation time 110 minutes, obtains stabilized zone.
The composite coating that the above method is prepared, coefficient of friction 0.103 ± 0.02, wear rate 10-15 m3/ Nm, highest make
With 890 DEG C of temperature, 2833 ± 20HV of Vickers hardness, 97 ± 2N of adhesion strength between composite coating and high speed steel substrate.
Composite coating produced by the present invention, with small coefficient of friction, is carried out while with high rigidity using saw blade
When cutting, self-lubricating can be realized without cutting fluid, the wear rate of coating is low, and it is high with the adhesion strength of matrix, it substantially increases
The service life of saw blade.
Claims (9)
1. a kind of high rigidity self-lubricating composite coating for saw blade, characterized in that from inside to outside successively include bottom, buffering
Layer, enhancement layer and self-lubricating enhancement layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is TiAlN layers, from profit
Sliding enhancement layer is TiAl, WS2And TiB2The TiAl/WS of formation is deposited simultaneously2-TiB2Composite layer, the self-lubricating enhancement layer include
The mass fraction of transition zone and stabilized zone, transition zone TiAl from inside to outside is gradually reduced, TiAl, WS in the stabilized zone2
And TiB2Mass fraction it is constant.
2. a kind of high rigidity self-lubricating composite coating for saw blade according to claim 1, characterized in that it is described from
Lubricate enhancement layer in transition zone with a thickness of the 1/6~1/10 of stabilized zone.
3. a kind of high rigidity self-lubricating composite coating for saw blade according to claim 1, characterized in that described slow
Rush layer successively includes the first TiN layer and the second TiN layer, the Ti metal layer wherein the first TiN layer reclines, the second TiN layer from inside to outside
Recline enhancement layer, and the second TiN layer is identical as the mass fraction of Ti in enhancement layer and mass fraction less than Ti in the first TiN layer,
First TiN layer is 100~200nm thicker than the second TiN layer.
4. a kind of high rigidity self-lubricating composite coating for saw blade according to claim 1, characterized in that described multiple
Close coating with a thickness of 4~6 μm, wherein bottom with a thickness of 80~180nm, 1.45~2.65 μm of enhancement layer thickness, self-lubricating
Enhancement layer with a thickness of 1.5~2.3 μm, remaining is buffer layer.
5. a kind of preparation method of high rigidity self-lubricating composite coating for saw blade as described in claim 1-4 is any,
It is characterized in that including the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in the nonionic surfactant solution that mass concentration is 5%~10% and is impregnated
It is placed in acetone and is cleaned by ultrasonic again after cleaning, aeration-drying is placed on 280~360 DEG C of calcinings and naturally cools to room in 1~3 hour
Temperature；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 × 10- 1Then Pa is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, being passed through argon gas into furnace body makes pressure rise to 2Pa, opens
Open Ti target, 2~3A of electric current, bias -75~-95V, the depositing Ti metal layer 8~14 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target current
Pressure is to deposit the first TiN layer 5~7 minutes under -75~-95V in Ti layer on surface of metal, and then passing to nitrogen makes pressure rise to 4Pa,
Deposit the second TiN layer in the first TiN layer, sedimentation time 3.2~4.6 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: opening TiAl alloy target, electrical current is 4~6A, bias -90~-120V, sedimentation time 15
~20 minutes formation enhancement layers；
(5) prepared by self-lubricating enhancement layer: being passed through argon gas into vacuum drying oven, opens WS2Target and TiB2Target, holding operating air pressure 0.1~
Under 0.5Pa, bias -50~-40V, TiAl alloy target current is down to 1A, WS from 3A in 10~20 minutes sedimentation times2
Target current 0.5~0.6A, TiB20.5~0.6A of target current sedimentation time 10~20 minutes, obtains transition zone；TiAl is kept to close
Gold target electric current 1A, WS2Target current 0.5~0.6A, TiB20.5~0.6A of target current sedimentation time 100~120 minutes, is obtained steady
Given layer.
6. a kind of high rigidity self-lubricating composite coating preparation method for saw blade according to claim 5, feature
It is that the material of circular saw blade substrate described in step (1) is high-speed steel.
7. a kind of high rigidity self-lubricating composite coating preparation method for saw blade according to claim 5, feature
It is that nonionic surface active agent described in step (1) is polyoxyethylate amide, nonylphenol polyoxyethylene ether or anhydrous sorbitol
One of.
8. a kind of high rigidity self-lubricating composite coating preparation method for saw blade according to claim 5, feature
It is that the atomic ratio of Ti and Al is (2-3) in the TiAl alloy target in step (4) and (5): 1.
9. a kind of high rigidity self-lubricating composite coating preparation method for saw blade according to claim 5, feature
It is that a TiAl alloy target, a TiB are used in step (5)2Target, two WS2Target.
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