CN110387527B - High-hardness self-lubricating composite coating for circular saw blade and preparation method thereof - Google Patents

High-hardness self-lubricating composite coating for circular saw blade and preparation method thereof Download PDF

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CN110387527B
CN110387527B CN201910688883.2A CN201910688883A CN110387527B CN 110387527 B CN110387527 B CN 110387527B CN 201910688883 A CN201910688883 A CN 201910688883A CN 110387527 B CN110387527 B CN 110387527B
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self
saw blade
circular saw
lubricating
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CN110387527A (en
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张戈文
卢胜
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Jinyun Pioneer Tools Co ltd
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Jinyun Pioneer Tools Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications

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  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The inventionRelates to the technical field of cutters and discloses a high-hardness self-lubricating composite coating for a circular saw blade and a preparation method thereof2And TiB2TiAl/WS simultaneously formed by deposition2‑TiB2The composite layer comprises a self-lubricating reinforced layer and a stabilizing layer, wherein the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and TiAl and WS in the stabilizing layer2And TiB2The mass fraction of (a) is constant. The invention adopts a mode of compounding the hard coating and the soft coating, the prepared composite coating has high hardness and good wear resistance, and simultaneously has antifriction and self-lubricating properties, the compatibility and affinity between the composite coating and the matrix and among all layers are good, and the service performance of the circular saw blade is greatly improved.

Description

High-hardness self-lubricating composite coating for circular saw blade and preparation method thereof
Technical Field
The invention relates to the technical field of cutters, in particular to a high-hardness self-lubricating composite coating for a circular saw blade and a preparation method thereof.
Background
The circular saw blade is a cutting tool for processing blanks made of materials such as stone, wood, metal, plastics and the like, and along with the increasing requirements of manufacturing industries such as steam friction manufacturing, heavy-duty machinery, precision instruments and the like on the strength, toughness and the like of metal materials, the difficulty of cutting processing is also increasing, and the requirements on the hardness, high-temperature resistance and the like of the cutting tool are increased.
In the prior art, in order to improve the hardness, wear resistance and the like of the cutter, a TiN layer, TiAlN layer and other hard coatings are generally arranged on the surface of the cutter so as to ensure proper cutting speed. For example, a "thick Ti/TiAlN multilayer coating with high toughness and high hardness and a method for preparing the same" disclosed in chinese patent document, publication No. CN110004415A, is deposited by using a general arc ion plating apparatus, a Ti target and a TiAl target are selected as cathode targets, and the Ti/TiAlN multilayer coating is deposited on the surface of a cemented carbide substrate; the Ti/TiAlN multilayer coating is of a layered structure and comprises a TiN transition layer, a plurality of TiAlN sublayers and a Ti sublayer, wherein the first layer deposited on the substrate is the TiN transition layer, the second layer is the TiAlN sublayer and then the Ti sublayer, the TiAlN sublayers and the Ti sublayer are alternately stacked and deposited with each other, and the outermost layer is the TiAlN sublayer. The Ti/TiAlN multilayer coating has the characteristics of high thickness, good film-substrate bonding strength, high hardness, high toughness and the like, and has good oxidation resistance.
However, in the cutting process, the interface between the tool and the workpiece, and between the tool and the chip, has large friction, which increases the cutting force, the cutting heat and the deformation of the workpiece, resulting in the wear of the tool and the reduction of the processing quality. Therefore, the cutter manufactured by using the traditional hard coating needs to use cutting fluid in the machining process so as to reduce the interface friction in the metal cutting process, ensure the machining quality and prolong the service life of the cutter. However, the cutting fluid often contains harmful chemical substances, which can cause serious environmental pollution, and meanwhile, the cutting fluid needs a whole set of circulating system to maintain, which increases the processing cost. Therefore, it is required to improve a coating layer of a cutting tool to have a self-lubricating function, so that the cutting tool can realize dry cutting without using a cutting fluid in a cutting process.
Disclosure of Invention
The invention provides a high-hardness self-lubricating composite coating for a circular saw blade and a preparation method thereof, aiming at overcoming the problems that in the prior art, a cutter manufactured by using a traditional hard coating needs to use cutting fluid in the machining process to reduce the interface friction in the metal cutting process, ensure the machining quality and prolong the service life of the cutter, but the cutting fluid often contains harmful chemical substances to cause serious environmental pollution, and meanwhile, the cutting fluid needs to be maintained by a whole set of circulating system to increase the machining cost.
In order to achieve the purpose, the invention adopts the following technical scheme:
the high-hardness self-lubricating composite coating for the circular saw blade sequentially comprises a bottom layer, a buffer layer, a reinforcing layer and a self-lubricating reinforcing layer from inside to outside, wherein the bottom layer is a Ti metal layer, the buffer layer is a TiN layer, the reinforcing layer is a TiAlN layer, and the self-lubricating reinforcing layer is TiAl or WS2And TiB2TiAl/WS simultaneously formed by deposition2-TiB2The self-lubricating reinforced layer comprises a transition layer and a stable layer, the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and the stable layerMedium TiAl, WS2And TiB2The mass fraction of (a) is constant.
In the composite coating, the Ti metal layer is used as the bottom layer, so that the affinity, compatibility and wettability between the composite coating and the circular saw blade substrate can be improved, the surface energy at an interface can be reduced, the binding force of the composite coating is enhanced, the internal stress between the composite coating and the circular saw blade substrate is reduced, and the toughness and strength of the composite coating are improved. The buffer layer and the reinforcing layer enable stress inside the composite coating to smoothly transit from inside to outside and attenuate, and the existence of the TiN buffer layer improves the compatibility of the bottom layer and the reinforcing layer and avoids influencing the bonding strength between layers due to abrupt change of components. The reinforcing layer adopts a TiAlN layer which is a hard coating layer, has high melting point, high hardness and good chemical stability, and can effectively improve the mechanical property and the cutting speed of the circular saw blade.
The self-lubricating reinforced layer is TiAl or WS2And TiB2TiAl/WS simultaneously formed by deposition2-TiB2Composite layer, WS2The soft coating material has low shearing strength and low friction coefficient, so that the composite coating has lubricating property, can play a good lubricating effect without adding a lubricant, and realizes dry cutting. But if WS is deposited on the reinforcing layer alone2Soft coating, WS2The bonding strength is not high and WS is low due to the difference of the composition and the microstructure with the TiAlN layer2The layer is not sufficiently heat stable and wear resistant, reducing the cutting performance of the circular saw blade. The invention uses soft coating material WS2And hard coating materials TiAl and TiB2Simultaneously deposit because of WS2And TiB2The crystal structures of the two layers are all hexagonal structures, the lattice mismatching degrees of the interfaces are similar, the S-S atomic distance and the Ti-Ti atomic distance on the same layer can be well matched, and meanwhile, WS (white space) is2The layers of the laminated structure are combined through Van der Waals force, S-S bonds are easy to break, so that Ti-S bonds are easy to form, two interfaces can form coherent/semi-coherent interfaces through lattice distortion transition and dislocation network adjustment, the formation of the coherent/semi-coherent interfaces inhibits WS2The growth of crystal grains hinders WS2The formation of loose columnar crystal structure and the promotion of TiB2Non-uniform nucleation of TiB2Nucleation and growth in a crystal growth mode to form WS2-TiB2-WS2The alternating layered structure ensures that the obtained coating has the high hardness and good wear resistance of a hard coating and also has the antifriction and self-lubricating properties of a soft coating, thereby greatly improving the service performance of the circular saw blade.
At the same time, in order to WS2-TiB2-WS2The alternating laminated structure and the TiAlN layer have good bonding strength, and the hardness of the self-lubricating reinforcing layer is further improved2-TiB2The composite layer is divided into a transition layer and a stabilizing layer, the mass fraction of TiAl on the side where the transition layer is attached to the TiAlN layer is the largest, the influence on the bonding strength between the two layers due to the mutation of components and microstructures is avoided, then the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and WS is2And TiB2The mass fraction of (a) increases and continuously transitions to the stable layer. In the stabilizing layer, TiAl, WS2、TiB2The mass fraction of (a) remains unchanged. In TiAl/WS2-TiB2In a composite layer, WS2And TiB2Form WS2-TiB2-WS2Alternating layered structure, while TiAl and WS2And TiB2During codeposition, because the Gibbs free energy of Ti-S generation is less than that of Al-S, a part of Ti atoms replace the position of W atoms and exist in the form of Ti-S bonds to form a replacement solid solution, and because the radius of the Al atoms is less than that of the Ti atoms, the Al atoms finally exist in the replacement solid solution in the form of replacement Ti atoms; and the other part of TiAl is positioned between the adjacent S atoms between the layers to form an interstitial solid solution. Therefore, the existence of TiAl further increases the hardness and the wear resistance of the self-lubricating reinforcing layer.
Preferably, the thickness of the transition layer in the self-lubricating reinforcing layer is 1/6-1/10 of the stabilizing layer. By adopting the proportion of the transition layer and the stabilizing layer, the good bonding strength between the self-lubricating reinforcing layer and the reinforcing layer can be ensured, and the hardness, the wear resistance and the self-lubricating property of the self-lubricating reinforcing layer can be ensured, so that the circular saw blade has good use performance.
Preferably, the buffer layer sequentially comprises a first TiN layer and a second TiN layer from inside to outside, wherein the first TiN layer is attached to the Ti metal layer, the second TiN layer is attached to the reinforcing layer, the mass fraction of Ti in the second TiN layer and the reinforcing layer is the same and smaller than that in the first TiN layer, and the first TiN layer is 100-200 nm thicker than the second TiN layer. The stress in the composite coating is ensured to be stably transferred and gradually weakened, and the strength of the composite coating is enhanced.
Preferably, the thickness of the composite coating is 4-6 mu m, the thickness of the bottom layer is 80-180 nm, the thickness of the reinforcing layer is 1.45-2.65 mu m, the thickness of the self-lubricating reinforcing layer is 1.5-2.3 mu m, and the rest are buffer layers. Each layer adopts proper thickness, and the hardness, the wear resistance and the self-lubricating property of the composite coating can be ensured to meet the use requirements of the circular saw blade.
The invention also discloses a preparation method of the high-hardness self-lubricating composite coating for the circular saw blade, which comprises the following steps:
(1) cleaning and deoiling: placing a circular saw blade substrate in a non-ionic surfactant solution with the mass concentration of 5% -10%, soaking, cleaning, placing in acetone, ultrasonically cleaning, ventilating, drying, placing at 280-360 ℃, calcining for 1-3 hours, and naturally cooling to room temperature;
(2) preparing a bottom layer: placing the cooled circular saw blade substrate in a vacuum furnace, firstly vacuumizing to 3 x 10 < -1 > Pa-5 x 10 < -1 > Pa, then vacuumizing to 1.2 x 10 < -2 > Pa, heating the furnace body to 500 ℃, introducing argon into the furnace body to increase the pressure to 2Pa, starting a Ti target, carrying out current of 2-3A and bias voltage of-75 to-95V, and depositing a Ti metal layer on the surface of the circular saw blade substrate for 8-14 minutes;
(3) preparing a buffer layer: introducing nitrogen into a vacuum furnace to increase the pressure to 3.2Pa, depositing a first TiN layer on the surface of the Ti metal layer for 5-7 minutes under the condition that the Ti target current is 2-3A and the bias voltage is-75 to-95V, then introducing nitrogen to increase the pressure to 4Pa, depositing a second TiN layer on the first TiN layer for 3.2-4.6 minutes, and preparing a buffer layer;
(4) preparing a reinforcing layer: starting the TiAl alloy target, electrifying the TiAl alloy target with the current of 4-6A, biasing to-90-120V, and depositing for 15-20 minutes to form a reinforcing layer;
(5) preparing a self-lubricating reinforcing layer: introducing argon into the vacuum furnace, and starting WS2Target and TiB2The target is kept at the working pressure of 0.1-0.5 Pa and under the bias voltage of-50-40V, the TiAl alloy target current is reduced from 3A to 1A, WS within the deposition time of 10-20 minutes2Target current 0.5-0.6A, TiB2The target current is 0.5-0.6A, and the deposition time is 10-20 minutes, so that a transition layer is obtained; maintaining TiAl alloy target current 1A, WS2Target current 0.5-0.6A, TiB2The target current is 0.5-0.6A, and the deposition time is 100-120 minutes, so that the stable layer is obtained.
By adopting the method, the composite coating can be effectively prepared, and the composite use requirements of the thickness and the performance of each layer in the composite coating are ensured.
Preferably, in the step (1), the circular saw blade base is made of high-speed steel. The circular saw blade has higher hardness.
Preferably, the nonionic surfactant in step (1) is one of polyoxyethylene amide, polyoxyethylene nonyl phenyl ether or sorbitan. Can effectively remove oil impurities on the surface of the circular saw blade substrate and avoid influencing the deposition of the composite coating.
Preferably, the atomic ratio of Ti to Al in the TiAl alloy targets in steps (4) and (5) is (2-3): 1. The composite coating can have the optimal hardness by adopting the proportion.
Preferably, one TiAl alloy target, one TiB is used in step (5)2Target, two WS2A target. Ensures the effective proportion of each component in the self-lubricating reinforcing layer and is beneficial to WS2-TiB2-WS2The formation of the network structure and the proportion of the solid solution enable the self-lubricating reinforced layer to have high hardness and good lubricity.
Therefore, the invention has the following beneficial effects: the composite coating prepared by the invention has the advantages of high hardness and good wear resistance of the hard coating, wear reduction and self-lubricating performance of the soft coating, good compatibility and affinity between the composite coating and a matrix and among layers, and great improvement on the service performance of the circular saw blade.
Detailed Description
The invention is further described with reference to specific embodiments.
Example 1:
the utility model provides a high rigidity self-lubricating composite coating for saw blade, thickness is 4 mu m, include the bottom that thickness is 80nm from inside to outside in proper order, 970 nm's buffer layer, 1.45 mu m's enhancement layer and 1.5 mu m's self-lubricating enhancement layer, wherein the bottom is the Ti metal layer, the buffer layer is the TiN layer, the buffer layer is by interior first TiN layer and the second TiN layer of outwards including in proper order, wherein first TiN layer pastes and leans on the Ti metal layer, the enhancement layer is leaned on to the second TiN layer, the mass fraction of Ti is the same and is less than the mass fraction of Ti in the first TiN layer in second TiN layer and the enhancement layer, first TiN layer is 100nm thicker than second TiN layer. The reinforced layer is TiAlN layer, and the self-lubricating reinforced layer is TiAl, WS2And TiB2TiAl/WS simultaneously formed by deposition2-TiB2The composite layer comprises a self-lubricating reinforced layer and a stabilizing layer, wherein the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and TiAl and WS in the stabilizing layer2And TiB2The mass fraction of (a) is constant and the thickness of the transition layer is 1/10 of the stabilizing layer.
The preparation method of the high-hardness self-lubricating composite coating for the circular saw blade comprises the following steps:
(1) cleaning and deoiling: placing a circular saw blade substrate into a polyoxyethylene amide solution with the mass concentration of 5% to soak for 1h, then placing the circular saw blade substrate into acetone to ultrasonically clean, placing the circular saw blade substrate into 280 ℃ to calcine for 3 h after ventilation drying, and naturally cooling the circular saw blade substrate to room temperature, wherein the circular saw blade substrate is made of high-speed steel;
(2) preparing a bottom layer: placing the cooled circular saw blade matrix in a vacuum furnace, firstly vacuumizing to 3 multiplied by 10-1Pa, then vacuumized to 1.2X 10-2Heating the furnace body to 500 ℃, introducing argon gas into the furnace body to increase the pressure to 2Pa, starting a Ti target, carrying out current of 2A and bias voltage of-75V, and depositing a Ti metal layer on the surface of the circular saw blade substrate for 8 minutes;
(3) preparing a buffer layer: introducing nitrogen into a vacuum furnace to increase the pressure to 3.2Pa, depositing a first TiN layer on the surface of the Ti metal layer for 7 minutes under the condition that the Ti target current is 2A and the bias voltage is-95V, then introducing nitrogen to increase the pressure to 4Pa, depositing a second TiN layer on the first TiN layer for 4.6 minutes, and preparing a buffer layer;
(4) preparing a reinforcing layer: starting the TiAl alloy target, electrifying at a current of 4A, biasing at-90V, and depositing for 15 minutes to form a reinforcing layer, wherein the atomic ratio of Ti to Al in the TiAl alloy target is 2: 1;
(5) preparing a self-lubricating reinforcing layer: introducing argon into the vacuum furnace, and opening two Ws2Target and a TiB2The target is kept at the working gas pressure of 0.1Pa and the bias voltage of-50V, the TiAl alloy target current is reduced from 3A to 1A within the deposition time of 10 minutes, and two WS2Target Current 0.5A, TiB2Target current is 0.5A, and deposition time is 10 minutes, so that a transition layer is obtained; maintaining TiAl alloy target current 1A, two WS2Target Current 0.5A, TiB2Target current 0.5A, deposition time 100 minutes, stable layer was obtained.
Example 2:
the utility model provides a high rigidity self-lubricating composite coating for saw blade, thickness is 6 mu m, include the bottom that thickness is 180nm from inside to outside in proper order, 870 nm's buffer layer, 2.65 mu m's enhancement layer and 2.3 mu m's self-lubricating enhancement layer, wherein the bottom is the Ti metal layer, the buffer layer is the TiN layer, the buffer layer is by interior first TiN layer and the second TiN layer of outwards including in proper order, wherein first TiN layer pastes and leans on the Ti metal layer, the enhancement layer is leaned on to the second TiN layer, the mass fraction of Ti is the same and is less than the mass fraction of Ti in the first TiN layer in second TiN layer and the enhancement layer, first TiN layer is 100nm thicker than second TiN layer. The reinforced layer is TiAlN layer, and the self-lubricating reinforced layer is TiAl, WS2And TiB2TiAl/WS simultaneously formed by deposition2-TiB2The composite layer comprises a self-lubricating reinforced layer and a stabilizing layer, wherein the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and TiAl and WS in the stabilizing layer2And TiB2The mass fraction of (a) is constant and the thickness of the transition layer is 1/6 of the stabilizing layer.
The preparation method of the high-hardness self-lubricating composite coating for the circular saw blade comprises the following steps:
(1) cleaning and deoiling: placing a circular saw blade substrate into a nonylphenol polyoxyethylene ether solution with the mass concentration of 10%, soaking for 1h, then placing the circular saw blade substrate into acetone, ultrasonically cleaning, ventilating, drying, then placing the circular saw blade substrate into 360 ℃, calcining for 1h, and naturally cooling to room temperature, wherein the circular saw blade substrate is made of high-speed steel;
(2) preparing a bottom layer: placing the cooled circular saw blade matrix in a vacuum furnace, firstly vacuumizing to 5 multiplied by 10-1Pa, then vacuumized to 1.2X 10-2Heating the furnace body to 500 ℃, introducing argon gas into the furnace body to increase the pressure to 2Pa, starting a Ti target, carrying out current of 3A and bias voltage of-95V, and depositing a Ti metal layer on the surface of the circular saw blade substrate for 14 minutes;
(3) preparing a buffer layer: introducing nitrogen into a vacuum furnace to increase the pressure to 3.2Pa, depositing a first TiN layer on the surface of the Ti metal layer for 6 minutes under the condition that the Ti target current is 2A and the bias voltage is-75V, then introducing nitrogen to increase the pressure to 4Pa, depositing a second TiN layer on the first TiN layer for 3.2 minutes, and preparing a buffer layer;
(4) preparing a reinforcing layer: starting the TiAl alloy target, electrifying the TiAl alloy target at 6A, biasing to 120V, and depositing for 20 minutes to form a reinforcing layer, wherein the atomic ratio of Ti to Al in the TiAl alloy target is 3: 1;
(5) preparing a self-lubricating reinforcing layer: introducing argon into the vacuum furnace, and opening two Ws2Target and a TiB2The target is kept at the working pressure of 0.5Pa and the bias voltage of-40V, the TiAl alloy target current is gradually reduced from 3A to 1A within the deposition time of 20 minutes, and two WS are2Target Current 0.6A, TiB2The target current is 0.6A, and the deposition time is 20 minutes, so that a transition layer is obtained; maintaining TiAl alloy target current 1A, two WS2Target Current 0.6A, TiB2Target current 0.6A, deposition time 120 minutes, resulting in a stable layer.
Example 3:
a high rigidity self-lubricating composite coating for saw blade, thickness is 5 mu m, includes the bottom that thickness is 100nm, 950 nm's buffer layer, 2.05 mu m's enhancement layer and 1.9 mu m's self-lubricating enhancement layer from inside to outside in proper order, and wherein the bottom is the Ti metal layer, and the buffer layer is the TiN layer, and the buffer layer outwards includes first TiN layer and second TiN layer in proper order by interior, and wherein first TiN layer pastes and leans on the Ti metal layer, and second TiN layer pastes and leans on by interiorAnd the mass fraction of Ti in the second TiN layer and the strengthening layer is the same and smaller than that of Ti in the first TiN layer, and the first TiN layer is 100nm thicker than the second TiN layer. The reinforced layer is TiAlN layer, and the self-lubricating reinforced layer is TiAl, WS2And TiB2TiAl/WS simultaneously formed by deposition2-TiB2The composite layer comprises a self-lubricating reinforced layer and a stabilizing layer, wherein the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and TiAl and WS in the stabilizing layer2And TiB2The mass fraction of (a) is constant and the thickness of the transition layer is 1/7 of the stabilizing layer.
The preparation method of the high-hardness self-lubricating composite coating for the circular saw blade comprises the following steps:
(1) cleaning and deoiling: placing a circular saw blade substrate in a sorbitan solution with the mass concentration of 8% for soaking for 1h, then placing the circular saw blade substrate in acetone for ultrasonic cleaning, after ventilation drying, placing the circular saw blade substrate in 320 ℃ for calcining for 2 h, and naturally cooling to room temperature, wherein the circular saw blade substrate is made of high-speed steel;
(2) preparing a bottom layer: placing the cooled circular saw blade matrix in a vacuum furnace, firstly vacuumizing to 4 multiplied by 10-1Pa, then vacuumized to 1.2X 10-2Heating the furnace body to 500 ℃, introducing argon gas into the furnace body to increase the pressure to 2Pa, starting a Ti target, carrying out current of 2.5A and bias voltage of-85V, and depositing a Ti metal layer on the surface of the circular saw blade substrate for 11 minutes;
(3) preparing a buffer layer: introducing nitrogen into the vacuum furnace to increase the pressure to 3.2Pa, depositing a first TiN layer on the surface of the Ti metal layer for 6 minutes under the condition that the Ti target current is 2.5A and the bias voltage is-85V, then introducing nitrogen to increase the pressure to 4Pa, depositing a second TiN layer on the first TiN layer for 4 minutes, and preparing a buffer layer;
(4) preparing a reinforcing layer: starting the TiAl alloy target, electrifying at 5A, biasing to 100V, and depositing for 18 minutes to form a reinforcing layer, wherein the atomic ratio of Ti to Al in the TiAl alloy target is 2.5: 1;
(5) preparing a self-lubricating reinforcing layer: introducing argon into the vacuum furnace, and opening two Ws2Target and a TiB2The target is maintained at the working pressure of 0.3Pa and the bias voltage of-45V, and the TiAl alloy target current is gradually changed from 3A within the deposition time of 15 minutesDown to 1A, two WS2Target Current 0.55A, TiB2Target current is 0.55A, deposition time is 15 minutes, and a transition layer is obtained; maintaining TiAl alloy target current 1A, two WS2Target Current 0.55A, TiB2Target current 0.55A, deposition time 110 minutes, resulting in a stable layer.
The friction coefficient of the composite coating prepared by the method is 0.103 +/-0.02, and the wear rate is 10-15 m3The maximum service temperature is 890 ℃, the Vickers hardness is 2833 +/-20 HV, and the bonding strength between the composite coating and the high-speed steel matrix is 97 +/-2N.
The composite coating prepared by the invention has high hardness and small friction coefficient, can realize self lubrication without cutting fluid when a circular saw blade is used for cutting, has low wear rate and high bonding strength with a substrate, and greatly prolongs the service life of the circular saw blade.

Claims (6)

1. The high-hardness self-lubricating composite coating for the circular saw blade is characterized by sequentially comprising a bottom layer, a buffer layer, a reinforcing layer and a self-lubricating reinforcing layer from inside to outside, wherein the bottom layer is a Ti metal layer, the buffer layer is a TiN layer, the reinforcing layer is a TiAlN layer, and the self-lubricating reinforcing layer is TiAl or WS2And TiB2TiAl/WS simultaneously formed by deposition2-TiB2Compounding layers;
the self-lubricating reinforced layer comprises a transition layer and a stable layer, the mass fraction of TiAl in the transition layer is gradually reduced from inside to outside, and TiAl and WS in the stable layer2And TiB2The mass fraction of (a) is unchanged; the thickness of a transition layer in the self-lubricating reinforcing layer is 1/6-1/10 of that of the stabilizing layer;
the buffer layer sequentially comprises a first TiN layer and a second TiN layer from inside to outside, wherein the first TiN layer is attached to the Ti metal layer, the second TiN layer is attached to the reinforcing layer, the mass fraction of Ti in the second TiN layer and the reinforcing layer is the same and smaller than that of Ti in the first TiN layer, and the first TiN layer is 100-200 nm thicker than the second TiN layer;
the thickness of the composite coating is 4-6 mu m, the thickness of the bottom layer is 80-180 nm, the thickness of the reinforcing layer is 1.45-2.65 mu m, the thickness of the self-lubricating reinforcing layer is 1.5-2.3 mu m, and the rest are buffer layers.
2. The method for preparing a high-hardness self-lubricating composite coating for a circular saw blade as claimed in claim 1, comprising the steps of:
(1) cleaning and deoiling: placing a circular saw blade substrate in a non-ionic surfactant solution with the mass concentration of 5% -10%, soaking, cleaning, placing in acetone, ultrasonically cleaning, ventilating, drying, placing at 280-360 ℃, calcining for 1-3 hours, and naturally cooling to room temperature;
(2) preparing a bottom layer: placing the cooled circular saw blade matrix in a vacuum furnace, firstly vacuumizing to 3 multiplied by 10-1Pa～5×10- 1Pa, then vacuumized to 1.2X 10-2Heating the furnace body to 500 ℃, introducing argon into the furnace body to increase the pressure to 2Pa, starting a Ti target, carrying out current of 2-3A and bias voltage of-75-95V, and depositing a Ti metal layer on the surface of the circular saw blade substrate for 8-14 minutes;
(3) preparing a buffer layer: introducing nitrogen into a vacuum furnace to increase the pressure to 3.2Pa, depositing a first TiN layer on the surface of the Ti metal layer for 5-7 minutes under the condition that the Ti target current is 2-3A and the bias voltage is-75 to-95V, then introducing nitrogen to increase the pressure to 4Pa, depositing a second TiN layer on the first TiN layer for 3.2-4.6 minutes, and preparing a buffer layer;
(4) preparing a reinforcing layer: starting the TiAl alloy target, electrifying the TiAl alloy target with the current of 4-6A, biasing to-90-120V, and depositing for 15-20 minutes to form a reinforcing layer;
(5) preparing a self-lubricating reinforcing layer: introducing argon into the vacuum furnace, and starting WS2Target and TiB2The target is kept at the working pressure of 0.1-0.5 Pa and under the bias voltage of-50-40V, the TiAl alloy target current is reduced from 3A to 1A, WS within the deposition time of 10-20 minutes2Target current 0.5-0.6A, TiB2The target current is 0.5-0.6A, and the deposition time is 10-20 minutes, so that a transition layer is obtained; maintaining TiAl alloy target current 1A, WS2Target current 0.5-0.6A, TiB2The target current is 0.5-0.6A, and the deposition time is 100-120 minutes, so that the stable layer is obtained.
3. The method for preparing a high-hardness self-lubricating composite coating for a circular saw blade as claimed in claim 2, wherein the circular saw blade substrate in the step (1) is made of high-speed steel.
4. The method as claimed in claim 2, wherein the non-ionic surfactant in the step (1) is one of polyoxyethylene amide, polyoxyethylene nonyl phenyl ether, and sorbitan.
5. The method for preparing a high-hardness self-lubricating composite coating for a circular saw blade as claimed in claim 2, wherein the atomic ratio of Ti and Al in the TiAl alloy targets in the steps (4) and (5) is (2-3): 1.
6. The method for preparing a high-hardness self-lubricating composite coating for a circular saw blade as claimed in claim 2, wherein a TiAl alloy target, a TiB target and the like are used in the step (5)2Target, two WS2A target.
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