CN107177826B - MoNbC/MoNbCN lamination composite coating layer cutter and its preparation process - Google Patents
MoNbC/MoNbCN lamination composite coating layer cutter and its preparation process Download PDFInfo
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- CN107177826B CN107177826B CN201710532642.XA CN201710532642A CN107177826B CN 107177826 B CN107177826 B CN 107177826B CN 201710532642 A CN201710532642 A CN 201710532642A CN 107177826 B CN107177826 B CN 107177826B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention belongs to machine-building cutting tool fields, more particularly to a kind of MoNbC/MoNbCN lamination composite coating layer cutter and its preparation process.The present invention uses medium frequency magnetron sputtering+arc ion plating composite film coating method, directlys adopt MoNbC composition target and makees carbon source, and depositing temperature is controlled at 300 DEG C hereinafter, can prepare on more extensive cutter or tool base.MoNbC/MoNbCN lamination composite coating layer cutter prepared by the present invention, tool matrix surface is deposited with coating, the coating is from inside to outside successively are as follows: Ti transition zone, MoNbC coating and the alternate composite lamainated structure of MoNbCN coating, outermost layer is MoNbCN coating, prepared MoNbC/MoNbCN lamination composite coating layer cutter combines MoNbC carbide coating, the advantages of MoNbCN carboritride coating and laminated construction, more existing carboritride coated cutting tool has more excellent physical mechanical property, it can be widely applied to hardened steel, the high speed of the difficult-to-machine materials such as aluminium alloy, high-accuracy continuously or intermittently machining.
Description
Technical field
The invention belongs to machine-building metal cutting tool fields, compound more particularly to a kind of MoNbC/MoNbCN lamination
Coated cutting tool and its preparation process.
Background technique
More stringent requirements are proposed for the fast-developing material and performance to cutter of contemporary Machining Technology for Cutting, dry type, height
Speed cutting becomes the direction of Tool in Cutting development.Become in tool surface deposition ganoine thin film and improves cutter service performance
Important channel.TiCN is most widely used at present ternary carboritride hard coat, and TiCN coating is due to having both TiC's
The excellent toughness of high rigidity and TiN significantly improves its friction and wear behavior (JinlongLi, ShihongZhang, Mingxi
Li.InfluenceoftheC2H2flowrateongradientTiCNfilmsdepositedbymulti-arcionplating
[J] .AppliedSurfaceScience, 2013 (283): 134-144.), it is widely used to milling, tapping, punching press, molding
And the processing of gear hobbing, it is 5-8 times higher than the wearability of ordinary rigid alloy cutter in high-speed cutting." steam turbine turns Chinese patent
Sub- wheel groove milling cutter surface TiCN multi-layer composite coatings preparation process " (patent No. 201510564738.5) utilizes Ti, nitrogen (N2)
With acetylene gas (C2H2) TiCN coating milling cutter has been synthesized under 450 DEG C of depositing temperatures, solve 26NiCrMov145 material rotors
Process problem.
Although TiCN coating has the advantages that high rigidity, low-friction coefficient, simultaneously because its thermal stability and red hardness compared with
Difference is suitable only for being applied to slow cutting or the occasion with good cooling condition, need to conventional Ti CN coating structure and preparation
Technique improves.Currently, diversification is that material improves mechanical property, the effective way of corrosion resistance and wearability, pass through preparation
Multicomponent composite coating, not only can be improved the bond strength of coating and matrix, but also take into account the comprehensive performance of a variety of single coatings, significantly improve
The performance of coated cutting tool.
The carboritrides such as TiCN mainly pass through the preparation of the technologies such as chemical vapour deposition technique (CVD) at present, that is, pass through
TiCl4(or Ti target), CH4(or C2H2) and N2Equal gas reactions generate, and depositing temperature is usually more than 400 DEG C, generate to matrix
Adverse effect, while gaseous carbon sources are easy to pollute coating apparatus, constrain its extensive use.
Laminar composite has been developed in recent years Material reinforcement toughening new technology, and this structure is by imitating shellfish
Shell, therefore it is called bionical laminated composite materials.The nacre of shell is a kind of natural layer structure material in nature,
Its fracture toughness is but higher by 3000 times or more than common single homogeneous texture.Therefore, pass through mimic biology material structure form
Interlayer design, the toughness, stability and antifriction that current carboritride coating can be improved in the lamination composite coating prepared are resistance to
The comprehensive performances such as mill property.
Summary of the invention
For current existing carboritride coated cutting tool performance and the deficiency of preparation method, in conjunction with laminar composite knot
The advantages of structure, the object of the invention provide a kind of MoNbC/MoNbCN lamination composite coating layer cutter and its preparation process.
MoNbC/MoNbCN lamination composite coating layer cutter of the present invention, including tool matrix, tool matrix surface are heavy
Product has a coating, and the coating is from inside to outside successively are as follows: Ti transition zone, MoNbC coating and the alternate composite laminate of MoNbCN coating
Structure, outermost layer are MoNbCN coating；
Wherein:
Tool matrix material is high-speed steel, in tool steel, mould steel, hard alloy, ceramics, diamond, cubic boron nitride
One kind.
The preparation process of MoNbC/MoNbCN lamination composite coating layer cutter of the present invention, depositional mode are using intermediate frequency
Magnetron sputtering+arc ion plating composite film coating method uses 2 medium frequency magnetron sputtering MoNbC composition targets, 2 electric arcs when deposition
Ion plating Ti target: using electric arc ion-plating deposition Ti transition zone first, then uses medium frequency magnetron sputtering method alternating deposit
MoNbC coating and MoNbCN coating, outermost layer are MoNbCN coating.
It include Mo, 20-30wt%'s that weight fraction is 50-70wt% in the medium frequency magnetron sputtering MoNbC composition target
The C of Nb and 10-20wt%, the medium frequency magnetron sputtering MoNbC composition target are prepared using vacuum hot-pressing, specifically include following system
Standby step:
(1) powder of Mo, Nb and C that the good powder purity of weight proportion is 99.9% is mixed and is packed into mould first
Then mold equipped with mixed-powder is placed in vacuum hotpressing stove by tool；
(2) it is rapidly heated first, and starts to apply initial pressure 10-40MPa in heating, then it is warming up to 1000 at a slow speed~
1400 DEG C, heat preservation, mixed-powder forms to obtain sample after hot pressed sintering；
(3) be sintered after sample furnace cooling be cooled to 200 DEG C or less after come out of the stove medium frequency magnetron sputtering MoNbC is compound
Target.
The preparation process of the MoNbC/MoNbCN lamination composite coating layer cutter, specifically includes the following steps:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, it is miscellaneous to remove surface and oil contaminant, rusty stain etc.
Then matter is sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, electricity are blown
Air-dry it is dry sufficiently after be put into coating machine rapidly, be evacuated to 8.0 × 10-3Pa is heated to 280 DEG C, keeps the temperature 40min；
(2) tool matrix surface ion is cleaned: logical Ar gas, pressure 1.1Pa, unlatching grid bias power supply, voltage 500V,
Duty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 400V, and duty ratio 0.3 opens ion source Ion Cleaning 35min,
Open arc ion plating Ti target power supply, Ti target current 70A, bias 250V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone is plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias drop
To 170V, arc ion plating Ti target current 80A, 200 DEG C of depositing temperature, 4~5min of depositing Ti transition zone；
(4) MoNbC coating is deposited on Ti transition zone using medium frequency magnetron sputtering: closes arc ion plating Ti target power supply,
0.8~0.9Pa of Ar air pressure is adjusted, bias is adjusted to 200V, 180 DEG C of depositing temperature, opens the compound target current of medium frequency magnetron sputtering MoNbC
30A deposits 3~4min of MoNbC coating；
(5) MoNbCN coating is deposited on MoNbC coating using medium frequency magnetron sputtering: opens N2, N2Air pressure is 1.4Pa, is adjusted
Ar 0.7~0.8Pa of air pressure, bias 150V adjust the compound target current 35A of medium frequency magnetron sputtering MoNbC, 180 DEG C of depositing temperature, compound
3~4min of MoNbCN coating is deposited, closes N after the completion of deposition2；
(6) MoNbC coating is deposited on MoNbCN coating using medium frequency magnetron sputtering: adjusts 0.8~0.9Pa of Ar air pressure, partially
It presses and is adjusted to 200V, 180 DEG C of depositing temperature, the unlatching compound target current 30A of medium frequency magnetron sputtering MoNbC, deposition MoNbC coating 3~
4min；
(7) (5), (6), (5) ... (6), (5) are repeated, alternating deposit MoNbC coating, MoNbCN coating, MoNbC are applied
Layer MoNbC coating, MoNbCN coating, are co-deposited 80min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
MoNbC/MoNbCN lamination composite coating layer cutter prepared by the present invention, tool matrix surface are deposited with coating, institute
State coating from inside to outside successively are as follows: Ti transition zone, MoNbC coating and the alternate composite lamainated structure of MoNbCN coating, outermost layer
For MoNbCN coating.Ti transition zone main function on tool matrix is inter-laminar stress caused by slowing down because of coating composition mutation,
The binding performance between coating and tool matrix is improved, the wherein Mo element in coating improves the hardness and strength of coating, changes
The oxidation-resistance property of kind coating, reduces the coefficient of friction of coating, and Nb element improves the hardness of coating, intensity and anti-
It presses, wear-resisting, corrosion resisting property, the C element in coating reduces the coefficient of friction of coating surface, and coating is made to have excellent antifriction profit
Sliding and wear resistance.The interface layer of the composite lamainated structure can prevent the growth of coating column crystal simultaneously, hinder to split
The extension of line and defect improves the hardness, toughness and impact resistance of coating.
Compared with prior art, the present invention having the advantages that beneficial effect.
The present invention uses medium frequency magnetron sputtering+arc ion plating composite film coating method, directlys adopt MoNbC composition target work
Carbon source, and depositing temperature is controlled at 300 DEG C hereinafter, can prepare on more extensive cutter or tool base.The present invention is made
Standby MoNbC/MoNbCN lamination composite coating layer cutter combine MoNbC carbide coating, MoNbCN carboritride coating and
The advantages of laminated construction, has very high hardness and toughness, excellent antioxygenic property and thermal stability, good antifriction lubrication
And wear resistance, the friction and bonding during dry cutting between cutter and workpiece can be effectively reduced, compared to tradition
The coated cutting tools such as TiCN reduce cutting force and 40% or more cutting temperature, improve 50% or more coated cutting tool antioxygenic property, prolong
Long cutter life and 75% or more durability, prepared MoNbC/MoNbCN lamination composite coating layer cutter can be widely applied to
The high speed of the difficult-to-machine materials such as hardened steel, aluminium alloy, high-accuracy continuously or intermittently machining.
Detailed description of the invention
The coating structure schematic diagram of Fig. 1, MoNbC/MoNbCN lamination composite coating layer cutter of the invention.
In figure: 1, tool matrix 2, Ti transition zone 3, MoNbC coating 4, MoNbCN coating 5, MoNbC coating and MoNbCN are applied
The alternate composite lamainated structure of layer.
Specific embodiment
Two most preferred embodiments of the invention are given below:
Embodiment 1
MoNbC/MoNbCN lamination composite coating layer cutter described in the present embodiment, the cutter are common turning insert, base
Body material are as follows: hard alloy P30, tool matrix surface are deposited with coating, and the coating is from inside to outside successively are as follows: Ti transition zone,
MoNbC coating and the alternate composite lamainated structure of MoNbCN coating, outermost layer are MoNbCN coating.
The preparation process of MoNbC/MoNbCN lamination composite coating layer cutter described in the present embodiment, depositional mode are in using
Frequency magnetron sputtering+arc ion plating composite film coating method uses 2 medium frequency magnetron sputtering MoNbC composition targets, 2 electricity when deposition
Arc ion plating Ti target: using electric arc ion-plating deposition Ti transition zone first, then uses medium frequency magnetron sputtering method alternating deposit
MoNbC coating and MoNbCN coating, outermost layer are MoNbCN coating.
In the medium frequency magnetron sputtering MoNbC composition target comprising weight fraction be 50wt% Mo, 30wt% Nb and
The C of 20wt%.
The preparation process of the MoNbC/MoNbCN lamination composite coating layer cutter, specifically includes the following steps:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, it is miscellaneous to remove surface and oil contaminant, rusty stain etc.
Then matter is sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, electricity are blown
Air-dry it is dry sufficiently after be put into coating machine rapidly, be evacuated to 8.0 × 10-3Pa is heated to 280 DEG C, keeps the temperature 40min；
(2) tool matrix surface ion is cleaned: logical Ar gas, pressure 1.1Pa, unlatching grid bias power supply, voltage 500V,
Duty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 400V, and duty ratio 0.3 opens ion source Ion Cleaning 35min,
Open arc ion plating Ti target power supply, Ti target current 70A, bias 250V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone is plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias drop
To 170V, arc ion plating Ti target current 80A, 200 DEG C of depositing temperature, 4~5min of depositing Ti transition zone；
(4) MoNbC coating is deposited on Ti transition zone using medium frequency magnetron sputtering: closes arc ion plating Ti target power supply,
0.8~0.9Pa of Ar air pressure is adjusted, bias is adjusted to 200V, 180 DEG C of depositing temperature, opens the compound target current of medium frequency magnetron sputtering MoNbC
30A deposits 3~4min of MoNbC coating；
(5) MoNbCN coating is deposited on MoNbC coating using medium frequency magnetron sputtering: opens N2, N2Air pressure is 1.4Pa, is adjusted
Ar 0.7~0.8Pa of air pressure, bias 150V adjust the compound target current 35A of medium frequency magnetron sputtering MoNbC, 180 DEG C of depositing temperature, compound
3~4min of MoNbCN coating is deposited, closes N after the completion of deposition2；
(6) MoNbC coating is deposited on MoNbCN coating using medium frequency magnetron sputtering: adjusts 0.8~0.9Pa of Ar air pressure, partially
It presses and is adjusted to 200V, 180 DEG C of depositing temperature, the unlatching compound target current 30A of medium frequency magnetron sputtering MoNbC, deposition MoNbC coating 3~
4min；
(7) (5), (6), (5) ... (6), (5) are repeated, alternating deposit MoNbC coating, MoNbCN coating, MoNbC are applied
Layer MoNbC coating, MoNbCN coating, are co-deposited 80min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
Embodiment 2
MoNbC/MoNbCN lamination composite coating layer cutter described in the present embodiment, the cutter are Common boring cutter piece, matrix
Material are as follows: high speed steel W18Cr4V, tool matrix surface are deposited with coating, and the coating is from inside to outside successively are as follows: Ti transition zone,
MoNbC coating and the alternate composite lamainated structure of MoNbCN coating, outermost layer are MoNbCN coating.
The preparation process of MoNbC/MoNbCN lamination composite coating layer cutter described in the present embodiment, depositional mode are in using
Frequency magnetron sputtering+arc ion plating composite film coating method uses 2 medium frequency magnetron sputtering MoNbC composition targets, 2 electricity when deposition
Arc ion plating Ti target: using electric arc ion-plating deposition Ti transition zone first, then uses medium frequency magnetron sputtering method alternating deposit
MoNbC coating and MoNbCN coating, outermost layer are MoNbCN coating.
In the medium frequency magnetron sputtering MoNbC composition target comprising weight fraction be 70wt% Mo, 20wt% Nb and
The C of 10wt%.
The preparation process of the MoNbC/MoNbCN lamination composite coating layer cutter, specifically includes the following steps:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, it is miscellaneous to remove surface and oil contaminant, rusty stain etc.
Then matter is sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, electricity are blown
Air-dry it is dry sufficiently after be put into coating machine rapidly, be evacuated to 8.0 × 10-3Pa is heated to 280 DEG C, keeps the temperature 40min；
(2) tool matrix surface ion is cleaned: logical Ar gas, pressure 1.1Pa, unlatching grid bias power supply, voltage 500V,
Duty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 400V, and duty ratio 0.3 opens ion source Ion Cleaning 35min,
Open arc ion plating Ti target power supply, Ti target current 70A, bias 250V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone is plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias drop
To 170V, arc ion plating Ti target current 80A, 200 DEG C of depositing temperature, 4~5min of depositing Ti transition zone；
(4) MoNbC coating is deposited on Ti transition zone using medium frequency magnetron sputtering: closes arc ion plating Ti target power supply,
0.8~0.9Pa of Ar air pressure is adjusted, bias is adjusted to 200V, 180 DEG C of depositing temperature, opens the compound target current of medium frequency magnetron sputtering MoNbC
30A deposits 3~4min of MoNbC coating；
(5) MoNbCN coating is deposited on MoNbC coating using medium frequency magnetron sputtering: opens N2, N2Air pressure is 1.4Pa, is adjusted
Ar 0.7~0.8Pa of air pressure, bias 150V adjust the compound target current 35A of medium frequency magnetron sputtering MoNbC, 180 DEG C of depositing temperature, compound
3~4min of MoNbCN coating is deposited, closes N after the completion of deposition2；
(6) MoNbC coating is deposited on MoNbCN coating using medium frequency magnetron sputtering: adjusts 0.8~0.9Pa of Ar air pressure, partially
It presses and is adjusted to 200V, 180 DEG C of depositing temperature, the unlatching compound target current 30A of medium frequency magnetron sputtering MoNbC, deposition MoNbC coating 3~
4min；
(7) (5), (6), (5) ... (6), (5) are repeated, alternating deposit MoNbC coating, MoNbCN coating, MoNbC are applied
Layer MoNbC coating, MoNbCN coating, are co-deposited 80min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
Claims (1)
1. a kind of preparation process of MoNbC/MoNbCN lamination composite coating layer cutter, it is characterised in that: tool matrix material is height
One of fast steel, tool steel, mould steel, hard alloy, ceramics, diamond, cubic boron nitride, tool matrix surface are deposited with
Coating, the coating is from inside to outside successively are as follows: Ti transition zone, MoNbC coating and the alternate composite lamainated structure of MoNbCN coating,
Outermost layer is MoNbCN coating；
Coated cutting tool depositional mode is using medium frequency magnetron sputtering+arc ion plating composite film coating method, using in 2 when deposition
2 arc ion plating Ti targets: frequency magnetron sputtering MoNbC composition target uses electric arc ion-plating deposition Ti transition zone first, then adopts
With medium frequency magnetron sputtering method alternating deposit MoNbC coating and MoNbCN coating, outermost layer is MoNbCN coating；Intermediate frequency magnetic control
Sputter the C of the Nb and 10-20wt% comprising Mo, 20-30wt% that weight fraction is 50-70wt% in MoNbC composition target, system
Standby technique are as follows:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, then it is sequentially placed into alcohol and acetone,
It is cleaned by ultrasonic each 40min, is put into coating machine rapidly after drying sufficiently of drying, is evacuated to 8.0 × 10-3Pa is heated to 280 DEG C,
Keep the temperature 40min；
(2) clean to tool matrix surface ion: logical Ar gas, pressure 1.1Pa open grid bias power supply, voltage 500V, duty
Than 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 400V, and duty ratio 0.3 opens ion source Ion Cleaning 35min, opens
Arc ion plating Ti target power supply, Ti target current 70A, bias 250V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone being plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias is down to
170V, arc ion plating Ti target current 80A, 200 DEG C of depositing temperature, 4~5min of depositing Ti transition zone；
(4) MoNbC coating is deposited on Ti transition zone using medium frequency magnetron sputtering: closes arc ion plating Ti target power supply, adjust Ar
0.8~0.9Pa of air pressure, bias are adjusted to 200V, 180 DEG C of depositing temperature, open the compound target current 30A of medium frequency magnetron sputtering MoNbC,
Deposit 3~4min of MoNbC coating；
(5) MoNbCN coating is deposited on MoNbC coating using medium frequency magnetron sputtering: opens N2, N2Air pressure is 1.4Pa, adjusts Ar gas
Press 0.7~0.8Pa, bias 150V, adjust the compound target current 35A of medium frequency magnetron sputtering MoNbC, 180 DEG C of depositing temperature, composite deposition
MoNbCN 3~4min of coating, deposition close N after the completion2；
(6) MoNbC coating is deposited on MoNbCN coating using medium frequency magnetron sputtering: adjusts 0.8~0.9Pa of Ar air pressure, bias tune
To 200V, 180 DEG C of depositing temperature, the compound target current 30A of medium frequency magnetron sputtering MoNbC is opened, deposits 3~4min of MoNbC coating；
(7) (5), (6), (5) ... (6), (5) are repeated, alternating deposit MoNbC coating, MoNbCN coating, MoNbC are applied
Layer MoNbC coating, MoNbCN coating, are co-deposited 80min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN106163708A (en) * | 2014-04-10 | 2016-11-23 | 株式会社图格莱 | Coating tool |
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| CN106086787A (en) * | 2016-06-15 | 2016-11-09 | 济宁学院 | Ti TiN+MoS2/ Ti lamination composite coating layer cutter and preparation technology thereof |
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Effective date of registration: 20201026 Address after: 221700 Yuanzhao Village Industrial Zone, Zhao Zhuang Town, Fengxian County, Xuzhou, Jiangsu Patentee after: XUZHOU GEILI MAGNETIC INDUSTRY Co.,Ltd. Address before: 272001 Shandong city of Jining province high tech Zone Haichuan Road No. 16 Jining high tech Zone University Park Patentee before: JINING University |