CN107354432A - ZrCrCN gradient composite coating cutters and preparation method thereof - Google Patents

ZrCrCN gradient composite coating cutters and preparation method thereof Download PDF

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Publication number
CN107354432A
CN107354432A CN201710532846.3A CN201710532846A CN107354432A CN 107354432 A CN107354432 A CN 107354432A CN 201710532846 A CN201710532846 A CN 201710532846A CN 107354432 A CN107354432 A CN 107354432A
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China
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zrcrcn
coating
zrcrc
transition zones
gradient
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宋文龙
马育栋
王首军
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Jining University
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Jining University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention belongs to machine-building cutting tool field, more particularly to a kind of ZrCrCN gradient composite coatings cutter and preparation method thereof, coated cutting tool surface is the ZrCrCN gradient composite coatings of nitrogen content gradient, tool matrix is followed successively by Cr transition zones and ZrCrC transition zones with applying interlayer, and the coating is the ZrCrCN gradient coating cutters prepared using the composite film coating method of non-balance magnetically controlled sputter+medium frequency magnetron sputtering.The superhard carboritride coatings of the ZrCrCN can improve the physical and mechanical properties of cutter due to adding two kinds of metals such as Cr, Zr, and coating structure composition nitrogen content gradient simultaneously in the coating.The coating has high intensity and hardness, relatively low coefficient of friction, the ability of excellent abrasive resistance and anti-crescent hollow abrasion.The cutter can effectively prevent cutting edge Integrated Chip and trickle breakage in working angles, ensure workpiece machining surface quality, and good cutting edge security is provided for tool matrix, while improve cutter life more than 60%.

Description

ZrCrCN gradient composite coating cutters and preparation method thereof
Technical field
The invention belongs to machine-building metal cutting tool field, more particularly to a kind of ZrCrCN gradient composite coatings knife Tool and preparation method thereof.
Background technology
Tool matrix material can be combined by coated cutting tool with the premium properties of coating, both maintain good tough of matrix Property and intensity, there is coating high rigidity and good anti-friction wear-resistant again, improve the performance of matrix material, widen its application and Life-span.The coated cutting tool usage amount of industrially developed country has accounted for more than the 80% of cutter sum at present, used on Digit Control Machine Tool Cutter 90% is above is coated cutting tool.TiCN is most widely used ternary carboritride coating, TiCN coatings due to Have TiC high rigidity and TiN excellent toughness concurrently, significantly improve its friction and wear behavior (JinlongLi, ShihongZhang,MingxiLi.InfluenceoftheC2H2flowrateongradientTiCNfilmsdepositedby m ulti-arcionplating[J].AppliedSurfaceScience,2013(283):134-144.), have been widely used It is higher 5-8 than the wearability of ordinary rigid alloy cutter in high-speed cutting in the processing of milling, tapping, punching press, shaping and gear hobbing Times.Chinese patent " turbo rotor groove milling cutter surface TiCN multi-layer composite coatings preparation method " (patent No. 201510564738.5) utilize Ti, nitrogen (N2) and acetylene gas (C2H2) TiCN coatings have been synthesized under 450 DEG C of depositing temperatures Milling cutter, solves 26NiCrMov145 material rotors processing problem.
Although TiCN coatings have the advantages of high rigidity, low-friction coefficient, simultaneously because its heat endurance and red hardness compared with Difference, it is suitable only for being applied to slow cutting or there is the occasion of good cooling condition, it is necessary to conventional Ti CN coating structures and preparation Method is improved.At present, diversification is the effective way that material improves mechanical property, corrosion resistance and wearability, passes through preparation Multicomponent composite coating, can both improve the bond strength of coating and matrix, take into account the combination property of a variety of single coatings again, significantly improve The performance of coated cutting tool.
The carboritride such as TiCN is mainly prepared by technologies such as chemical vapour deposition techniques (CVD) at present, that is, is passed through TiCl4(or Cr targets), CH4(or C2H2) and N2Generated Deng gas reaction, depositing temperature is usually more than 400-500 DEG C, to matrix Have a negative impact, while gaseous carbon sources easily pollute to coating apparatus, constrain its extensive use.
The content of the invention
It is an object of the invention to overcome the shortcomings of current existing carboritride coated cutting tool performance and preparation method, knot The advantages of closing multicomponent composite coating structure provides a kind of ZrCrCN gradient composite coatings cutter and preparation method thereof.The cutter uses The composite film coating method of medium frequency magnetron sputtering+non-balance magnetically controlled sputter, carbon source directly is provided using ZrCrC composition targets, and deposited Temperature control can be prepared below 300 DEG C on more extensive cutter or tool base.The coating structure is coated cutting tool table Face is the ZrCrCN gradient composite coatings of nitrogen content gradient, and tool matrix is followed successively by Cr transition zones and ZrCrC with applying interlayer Transition zone.Zr elements in the gradient composite coating cutter play solution strengthening effect to coating, improve the hardness, strong of coating Degree and abrasion resistant qualities, Cr elements improve the antioxygenic property in coating high-speed machining process, have coated cutting tool more excellent Different chemical stability and reliability, the friction and wear behavior of coated cutting tool can be significantly improved, improve cutter working durability and Processing efficiency.The multilayered and graded structure can slow down the thermal coefficient of expansion and elastic modulus difference between coating and matrix simultaneously, Improve the matching in structure and performance, increase coating and the adhesion of matrix and the impact resistance of coating.
In order to realize foregoing invention purpose, the technical solution adopted by the present invention is：
ZrCrCN gradient composite coatings cutter of the present invention, tool matrix material are high-speed steel, tool steel, mould steel, hard One kind in alloy, ceramics or cubic boron nitride, coated cutting tool surface apply for the ZrCrCN graded composites of nitrogen content gradient Layer, tool matrix are followed successively by Cr transition zones and ZrCrC transition zones with applying interlayer.
The preparation method of ZrCrCN gradient composite coatings cutter of the present invention, depositional mode be using non-balance magnetically controlled sputter+ The composite film coating method of medium frequency magnetron sputtering, 2 non-balance magnetically controlled sputter ZrCrC composition targets, 2 intermediate frequency magnetic controls are used during deposition Cr targets are sputtered, Cr transition zones are deposited using medium frequency magnetron sputtering first, ZrCrC is then deposited using non-balance magnetically controlled sputter method The ZrCrCN gradient composite coatings of transition zone and nitrogen content gradient, its preparation method are：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol In acetone, it is cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, hair dryer is put rapidly after drying fully Enter coating machine, be evacuated to 8.0 × 10-3Pa, 240 DEG C are heated to, are incubated 25~30min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 650V, dutycycle 0.2, aura Discharge Cleaning 25min；Reduction is biased into 450V, dutycycle 0.3, opens ion gun Ion Cleaning 25min, opens intermediate frequency magnetic control and splashes Cr target power supplies are penetrated, Cr target current 40A, bias 350V, 2~3min of Ions Bombardment；
(3) Cr transition zones are deposited：Ar 0.7~0.8Pa of air pressure, bias are down to 220V, Cr target current 35A, depositing temperature 200 DEG C, 5~6min of medium frequency magnetron sputtering Cr transition zones；
(4) ZrCrC transition zones are deposited：Ar 0.5~0.6Pa of air pressure, bias are adjusted to 200V, close medium frequency magnetron sputtering Cr targets Power supply, non-balance magnetically controlled sputter ZrCrC target current 40A are opened, deposit ZrCrC transition 5~6min layer by layer；
(5) ZrCrCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.6Pa, Ar 0.6~0.7Pa of air pressure, is biased 160V, ZrCrC target current 45A, 200 DEG C of depositing temperature, 9~10min of deposition ZrCrCN composite beds；Other parameters are constant, rise N2Air pressure, N2Air pressure raises 0.1Pa every time, deposits ZrCrCN 9~10min of composite bed, until N2Air pressure rises to 1.3Pa, redeposited 9~10min of ZrCrCN composite beds；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
Compared with prior art, beneficial effects of the present invention are：
The ZrCrCN gradient composite coating cutters prepared by above-mentioned technique, tool surface are nitrogen content gradient ZrCrCN gradient composite coatings, tool matrix are followed successively by Cr transition zones and ZrCrC transition zones with applying interlayer.The gradient composite coating Zr elements in cutter play solution strengthening effect to coating, improve the hardness, intensity and abrasion resistant qualities of coating, Cr elements The antioxygenic property in coating high-speed machining process is improved, makes coated cutting tool that there is more excellent chemical stability and reliable Property, and coating structure composition nitrogen content gradient, the physical and mechanical properties of traditional carboritride coated cutting tool can be improved.Together When the multilayered and graded structure can slow down thermal coefficient of expansion and elastic modulus difference between coating and matrix, improve structure and property Matching on energy, increase coating and the adhesion of matrix and the impact resistance of coating.
The ZrCrCN gradient composite coatings have high intensity and hardness, relatively low coefficient of friction, excellent abrasive resistance and The ability of anti-crescent hollow abrasion.The cutter can effectively prevent cutting edge Integrated Chip and trickle breakage in working angles, ensure work pieces process Surface quality, and good cutting edge security is provided for tool matrix, while cutter life more than 60% is improved, should ZrCrCN gradient composite coating cutters can be widely applied to steel, ferrite, martensitic stain less steel, cast iron, titanium alloy etc. absolutely mostly The finishing and semifinishing of number workpiece material.
Brief description of the drawings
Fig. 1 is the schematic cross-section of the ZrCrCN gradient composite coating cutters of the present invention；
In figure：1 it is tool matrix, 2 be Cr transition zones, 3 be ZrCrC transition zones, 4 is ZrCrCN gradient composite coatings.
Embodiment
The present invention is further described with reference to specific embodiment, so that those skilled in the art do further Understand, but and be not so limited the present invention.
Embodiment 1
ZrCrCN gradient composite coatings cutter of the present invention and preparation method thereof, the cutter are common cutter blade, its matrix Material is：Hard alloy YG6A, coated cutting tool surface be nitrogen content gradient ZrCrCN gradient composite coatings, tool matrix Cr transition zones and ZrCrC transition zones are followed successively by with applying interlayer.Depositional mode is using non-balance magnetically controlled sputter+medium frequency magnetron sputtering Composite film coating method, use 2 non-balance magnetically controlled sputter ZrCrC composition targets, 2 medium frequency magnetron sputtering Cr targets during deposition.It is first First using medium frequency magnetron sputtering deposition Cr transition zones, ZrCrC transition zones and nitrogen are then deposited using non-balance magnetically controlled sputter method The ZrCrCN gradient composite coatings of concentration gradients gradual change.Its preparation method is：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol In acetone, it is cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, hair dryer is put rapidly after drying fully Enter coating machine, be evacuated to 8.0 × 10-3Pa, 240 DEG C are heated to, are incubated 30min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 650V, dutycycle 0.2, aura Discharge Cleaning 25min；Reduction is biased into 450V, dutycycle 0.3, opens ion gun Ion Cleaning 25min, opens intermediate frequency magnetic control and splashes Cr target power supplies are penetrated, Cr target current 40A, bias 350V, Ions Bombardment 3min；
(3) Cr transition zones are deposited：Ar air pressure 0.8Pa, bias and be down to 220V, Cr target current 35A, 200 DEG C of depositing temperature, in Frequency magnetron sputtering C r transition zones 6min；
(4) ZrCrC transition zones are deposited：Ar air pressure 0.6Pa, bias are adjusted to 200V, close medium frequency magnetron sputtering Cr target power supplies, Non-balance magnetically controlled sputter ZrCrC target current 40A are opened, deposit ZrCrC transition 6min layer by layer；
(5) ZrCrCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.6Pa, Ar air pressure 0.7Pa, biases 160V, ZrCrC target current 45A, 200 DEG C of depositing temperature, deposition ZrCrCN composite beds 10min；Other parameters are constant, raise N2Air pressure, N2 Air pressure raises 0.1Pa every time, deposits ZrCrCN composite bed 10min, until N2Air pressure rises to 1.3Pa, and redeposited ZrCrCN is compound Layer 10min；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
Embodiment 2
ZrCrCN gradient composite coatings cutter of the present invention and preparation method thereof, the cutter are common fluted drill, its cutter base Body material is：High speed steel W18Cr4V, coated cutting tool surface be nitrogen content gradient ZrCrCN gradient composite coatings, cutter Matrix is followed successively by Cr transition zones and ZrCrC transition zones with applying interlayer.Depositional mode is using non-balance magnetically controlled sputter+intermediate frequency magnetic control The composite film coating method of sputtering, 2 non-balance magnetically controlled sputter ZrCrC composition targets, 2 medium frequency magnetron sputtering Cr are used during deposition Target.First using medium frequency magnetron sputtering deposition Cr transition zones, ZrCrC transition zones are then deposited using non-balance magnetically controlled sputter method With the ZrCrCN gradient composite coatings of nitrogen content gradient.Its preparation method is：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol In acetone, it is cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, hair dryer is put rapidly after drying fully Enter coating machine, be evacuated to 8.0 × 10-3Pa, 240 DEG C are heated to, are incubated 25min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 650V, dutycycle 0.2, aura Discharge Cleaning 25min；Reduction is biased into 450V, dutycycle 0.3, opens ion gun Ion Cleaning 25min, opens intermediate frequency magnetic control and splashes Cr target power supplies are penetrated, Cr target current 40A, bias 350V, Ions Bombardment 2min；
(3) Cr transition zones are deposited：Ar air pressure 0.7Pa, bias and be down to 220V, Cr target current 35A, 200 DEG C of depositing temperature, in Frequency magnetron sputtering C r transition zones 5min；
(4) ZrCrC transition zones are deposited：Ar air pressure 0.5Pa, bias are adjusted to 200V, close medium frequency magnetron sputtering Cr target power supplies, Non-balance magnetically controlled sputter ZrCrC target current 40A are opened, deposit ZrCrC transition 5min layer by layer；
(5) ZrCrCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.6Pa, Ar air pressure 0.6Pa, biases 160V, ZrCrC target current 45A, 200 DEG C of depositing temperature, deposition ZrCrCN composite beds 9min；Other parameters are constant, raise N2Air pressure, N2Gas Pressure raises 0.1Pa every time, deposits ZrCrCN composite bed 9min, until N2Air pressure rises to 1.3Pa, redeposited ZrCrCN composite beds 9min；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.

Claims (2)

1. a kind of ZrCrCN gradient composite coatings cutter, tool matrix material be high-speed steel, tool steel, mould steel, hard alloy, One kind in ceramics or cubic boron nitride, it is characterised in that coated cutting tool surface is the ZrCrCN gradients of nitrogen content gradient Composite coating, tool matrix are followed successively by Cr transition zones and ZrCrC transition zones with applying interlayer.
The preparation method of 2.ZrCrCN gradient composite coating cutters, it is characterised in that depositional mode is to be splashed using non-equilibrium magnetic controlled Penetrate+composite film coating the method for medium frequency magnetron sputtering, use 2 non-balance magnetically controlled sputter ZrCrC composition targets, 2 intermediate frequencies during deposition Magnetron sputtering C r targets, Cr transition zones are deposited using medium frequency magnetron sputtering first, then deposited using non-balance magnetically controlled sputter method The ZrCrCN gradient composite coatings of ZrCrC transition zones and nitrogen content gradient, its preparation method are：
(1) pre-treatment：Tool matrix surface is polished, the impurity such as surface and oil contaminant, rusty stain is removed, is then sequentially placed into alcohol and third In ketone, it is cleaned by ultrasonic each 40min, removes tool surface greasy dirt and other attachments, hair dryer is put into rapidly plating after drying fully Film machine, is evacuated to 8.0 × 10-3Pa, 240 DEG C are heated to, are incubated 25~30min；
(2) Ion Cleaning：Logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 650V, dutycycle 0.2, glow discharge Clean 25min；Reduction is biased into 450V, dutycycle 0.3, opens ion gun Ion Cleaning 25min, opens medium frequency magnetron sputtering Cr Target power supply, Cr target current 40A, bias 350V, 2~3min of Ions Bombardment；
(3) Cr transition zones are deposited：Ar 0.7~0.8Pa of air pressure, bias and be down to 220V, Cr target current 35A, 200 DEG C of depositing temperature, 5~6min of medium frequency magnetron sputtering Cr transition zones；
(4) ZrCrC transition zones are deposited：Ar 0.5~0.6Pa of air pressure, bias are adjusted to 200V, close medium frequency magnetron sputtering Cr targets electricity Source, non-balance magnetically controlled sputter ZrCrC target current 40A are opened, deposit ZrCrC transition 5~6min layer by layer；
(5) ZrCrCN Gradient Composite Layers are deposited：Open N2, N2Air pressure is 0.6Pa, Ar 0.6~0.7Pa of air pressure, biases 160V, ZrCrC target current 45A, 200 DEG C of depositing temperature, 9~10min of deposition ZrCrCN composite beds；Other parameters are constant, raise N2Gas Pressure, N2Air pressure raises 0.1Pa every time, deposits ZrCrCN 9~10min of composite bed, until N2Air pressure rises to 1.3Pa, redeposited 9~10min of ZrCrCN composite beds；
(6) post-process：Each power supply, ion gun and gas source are closed, coating terminates.
CN201710532846.3A 2017-07-03 2017-07-03 ZrCrCN gradient composite coating cutters and preparation method thereof Pending CN107354432A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114807850A (en) * 2022-04-30 2022-07-29 西安交通大学 Nitride hard film applied to surface of hot forging die and preparation method thereof
CN115261774A (en) * 2022-08-26 2022-11-01 集美大学 Gradient superhard composite film layer of high-speed blanking die cutting edge of aluminum alloy pop can cover and preparation method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103097579A (en) * 2010-09-21 2013-05-08 西铁城控股株式会社 White rigid decorative member
CN105063554A (en) * 2015-07-31 2015-11-18 山东大学 ZrSiCN nano-composite gradient coating cutter and preparation process thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103097579A (en) * 2010-09-21 2013-05-08 西铁城控股株式会社 White rigid decorative member
CN105063554A (en) * 2015-07-31 2015-11-18 山东大学 ZrSiCN nano-composite gradient coating cutter and preparation process thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114807850A (en) * 2022-04-30 2022-07-29 西安交通大学 Nitride hard film applied to surface of hot forging die and preparation method thereof
CN115261774A (en) * 2022-08-26 2022-11-01 集美大学 Gradient superhard composite film layer of high-speed blanking die cutting edge of aluminum alloy pop can cover and preparation method thereof
CN115261774B (en) * 2022-08-26 2023-08-29 集美大学 Gradient superhard composite film layer for cutting edge of high-speed blanking die of aluminum alloy pop can cover and preparation method of gradient superhard composite film layer

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