CN110306190A - A kind of polynary nanometer gradient coating cutter and preparation method thereof - Google Patents

A kind of polynary nanometer gradient coating cutter and preparation method thereof Download PDF

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Publication number
CN110306190A
CN110306190A CN201910512048.3A CN201910512048A CN110306190A CN 110306190 A CN110306190 A CN 110306190A CN 201910512048 A CN201910512048 A CN 201910512048A CN 110306190 A CN110306190 A CN 110306190A
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coating
alzrtac
tinbtac
gradient coating
preparation
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邢佑强
吴泽
刘磊
黄开靓
李想
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Southeast University
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Southeast University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition

Abstract

The invention discloses a kind of polynary nanometer gradient coating cutters and preparation method thereof, tool matrix material is high-speed steel, hard alloy or ceramics, tool matrix material surface has the alternatively distributed polynary nanometer gradient coating of TiNbTaC+AlZrTaC, the gradient coating at least contains there are two TiNbTaC and two AlZrTaC single layer, and TiNbTaC and the thickness of AlZrTaC single layer are less than or equal to 100nm；The preparation method of the coating uses multi-arc ion coating+medium frequency magnetron sputtering mode.The advantages of tool surface gradient coating combines carbide coating, nanometer layer and gradient-structure, so that cutter coat internal residual stress is significant lower, coating and matrix and painting interfacial bonding strength are higher；Meanwhile coating hardness with higher, good physical mechanical property, thermal stability, inoxidizability and abrasion resistance etc..The cutter compensates for the limitation of single coating processing object, can be widely applied to the machining of the materials such as stainless steel, titanium alloy, aluminium alloy.

Description

A kind of polynary nanometer gradient coating cutter and preparation method thereof
Technical field
The invention belongs to technical field of mechanical cutting tool manufacture, in particular to a kind of TiNbTaC+AlZrTaC more members Nanometer gradient coated cutting tool and preparation method thereof.
Background technique
Cutting-Tool Coating Technology is a kind of good process for modifying surface, coated cutting tool have high rigidity, good heat resistance, The advantages that inoxidizability and corrosion resistance, carrying out coating treatment to tool surface is to improve one of the important method of cutter life. In recent years, to further increase cutting performance, coated cutting tool is from single layer to diversification and Composite Development；Meanwhile single painting Being greatly limited property by preparing gradient composite coating can take into account the excellent performance of single coating to layer in use, It can overcome the disadvantages that its limitation again, to significantly improve coated cutting tool performance.
Chinese invention patent " application number: 201710533151.7 " reports a kind of AlNbN/AlNbCN laminated coating cutter And its preparation process, the cutter combine AlNbN and AlNbCN coated cutting tool advantage, have good physical mechanical property, it can It is widely used in the machining of the materials such as titanium alloy, stainless steel.Chinese invention patent " application number: 2011102143939.2 " is reported A kind of gradient multiple coating tool in road and preparation method thereof, which combines ZrN, ZrTiN and gradient lamination The characteristics of structure, has high hardness and wear-resisting property.Chinese invention patent " application number: 201810077086.6 " reports one Kind silicon nitride-hard alloy laminated coating cutter and preparation method thereof, which is prepared using laser cladding method, takes into account nitridation The characteristics of silicon based ceramic and hard alloy, not only with good toughness but also hardness with higher and wear-resisting property.
Summary of the invention
Goal of the invention: the present invention provides a kind of polynary nanometer gradient coating cutter and preparation method thereof.The tool surface applies Layer hardness, good physical mechanical property, thermal stability, inoxidizability and abrasion resistance with higher etc..The cutter makes up The limitation of single coating processing object, can be widely applied to the machining of the materials such as stainless steel, titanium alloy, aluminium alloy.
Technical solution: a kind of polynary nanometer gradient coating cutter of the invention, tool matrix material are high-speed steel, hard conjunction Gold or ceramics, substrate material surface have the alternatively distributed polynary nanometer gradient coating of TiNbTaC+AlZrTaC.The gradient coating At least contain two layers of TiNbTaC and two layers of AlZrTaC single layer, and the thickness of TiNbTaC and AlZrTaC single layer is less than or equal to 100nm.Ti Elements Atom percentage is in 30-40% in TiNbTaC coating, and Nb Elements Atom percentage is in 5-20%, Ta element Atomic percent is in 10-40%, and C element atomic percent is in the sum of 20-40%, the Ti, Nb, Ta, C element atomic percent It is 1；Al Elements Atom percentage is in 30-40% in AlZrTaC coating, and Zr Elements Atom percentage is in 5-15%, Ta pantogen Sub- percentage is in 20-40%, the sum of the Al, Zr, Ta, C element atomic percent in 20-40%, C element atomic percent 1。
A kind of preparation method of polynary nanometer gradient coating cutter of the invention, is splashed using multi-arc ion coating+intermediate frequency magnetic control The method of co-deposition is penetrated in tool surface preparation TiNbTaC and the alternatively distributed polynary nanometer gradient coating of AlZrTaC.It is specific Preparation method, comprising the following steps:
(1) it pre-treatment: by tool matrix material grinding and polishing, is sequentially placed into alcohol and acetone and is cleaned by ultrasonic each 20- 30min removes surface grease stain pollutant, is put into vacuum chamber of film coating machine, vacuum chamber rapidly after sufficiently drying using vacuum oven Base vacuum is 7.0 × 10-3-8.0×10-3Pa is heated to 200-300 DEG C, soaking time 30-40min；
(2) Ion Cleaning: it is passed through Ar2, pressure 0.5-2.0Pa, unlatching grid bias power supply, voltage 700-1200V, duty Than 0.3, Glow Discharge Cleaning 20-30min；Bias is reduced to 300-800V, opens ion source Ion Cleaning 20-30min, opens Arc source Ti target, bias 400-600V, target current 40-80A, ion bombardment Ti target 0.5-1min；
(3) depositing TiN bTaC layers: adjustment operating air pressure is 0.5-2.0Pa, bias 100-200V, adjusts Ti target current 60- 120A；NbTaC composition target arc power is opened, target current is adjusted to 60-80A, depositing TiN bTaC coating 5-10min；
(4) depositing Al ZrTaC layers: closing Ti target and NbTaC composition target, adjustment operating air pressure is 0.5-1.0Pa, bias 100-150V, opens AlZrTaC composition target arc power, and target current is adjusted to 60-80A, depositing Al ZrTaC coating 5-10min；
(5) it depositing TiN bTaC+AlZrTaC alternating gradient coating: repeats above step (3) and (4), alternating deposit TiNbTaC+AlZrTaC gradient coating；
(6) it post-processes: closing all targets, close grid bias power supply and gas source, keep the temperature 30-60min, coating terminates.
Wherein, the total number of plies of TiNbTaC+AlZrTaC alternating gradient coating is 4-100 layers.
The utility model has the advantages that 1. gradient coating cutter hardness with higher of the invention, good thermal stability, inoxidizability Deng, be remarkably improved propose cutter cutting ability；2.TiNbTaC+AlZrTaC gradient coating overcomes the limitation of single coating Property, the coated cutting tool scope of application is increased, nano coating can significantly improve coating and matrix and apply interfacial bonding strength, reduce Coating internal stress；3. the machining that the cutter can be widely applied to the materials such as stainless steel, titanium alloy, aluminium alloy.
Detailed description of the invention
Fig. 1 is polynary nanometer gradient coating cutter structure schematic diagram of the invention, in which: 1 is tool matrix material, and 2 are TiNbTaC layers, 3 be AlZrTaC layers, and 4 be TiNbTaC+AlZrTaC alternating gradient coating.
Specific embodiment
Example 1: a kind of polynary nanometer gradient coating cutter of the invention, tool matrix material are 9W18Cr4V high-speed steel, It is characterized by: tool matrix material surface has the alternatively distributed polynary nanometer gradient coating of TiNbTaC+AlZrTaC.The ladder Degree coating at least contains two layers of TiNbTaC and two layers of AlZrTaC single layer, and the thickness of TiNbTaC and AlZrTaC single layer is small In equal to 100nm.Ti Elements Atom percentage is in 30%, Nb Elements Atom percentage in 20%, Ta element in TiNbTaC coating Atomic percent is 30%, and for C element atomic percent 20%, the sum of the Ti, Nb, Ta, C element atomic percent are 1； Al Elements Atom percentage exists in 30%, Zr Elements Atom percentage in 10%, Ta Elements Atom percentage in AlZrTaC coating 30%, for C element atomic percent 30%, the sum of the Al, Zr, Ta, C element atomic percent are 1.
A kind of preparation method of polynary nanometer gradient coating cutter of the invention, it is characterised in that using multi-arc ion coating+ The method that medium frequency magnetron sputtering is co-deposited is in tool surface preparation TiNbTaC and the alternatively distributed polynary nanometer gradient of AlZrTaC Coating.Its specific preparation method, comprising the following steps:
(1) pre-treatment: by tool matrix material grinding and polishing, being sequentially placed into alcohol and acetone and be cleaned by ultrasonic each 30min, Surface grease stain pollutant is removed, is put into vacuum chamber of film coating machine rapidly after sufficiently drying using vacuum oven, vacuum chamber background is true Sky is 8.0 × 10-3Pa is heated to 300 DEG C, soaking time 30min；
(2) Ion Cleaning: it is passed through Ar2, pressure 2.0Pa, unlatching grid bias power supply, voltage 1000V, duty ratio 0.3, brightness Light Discharge Cleaning 30min；Bias is reduced to 600V, opens ion source Ion Cleaning 25min, opens arc source Ti target, bias 500V, target current 60A, ion bombardment Ti target 1min；
(3) depositing TiN bTaC layers: adjustment operating air pressure is 1.5Pa, bias 200V, adjusts Ti target current 100A；It opens NbTaC composition target arc power, target current are adjusted to 80A, depositing TiN bTaC coating 8min；
(4) depositing Al ZrTaC layers: close Ti target and NbTaC composition target, adjustment operating air pressure is 1.0Pa, bias 150V, AlZrTaC composition target arc power is opened, target current is adjusted to 80A, depositing Al ZrTaC coating 8min；
(5) it depositing TiN bTaC+AlZrTaC alternating gradient coating: repeats above step (3) and (4), alternating deposit TiNbTaC+AlZrTaC gradient coating, so that total number of plies is 20 layers；
(6) it post-processes: closing all targets, close grid bias power supply and gas source, keep the temperature 60min, coating terminates.
Example 2:
A kind of polynary nanometer gradient coating cutter of the invention, tool matrix material are YG6 hard alloy, and feature exists In: tool matrix material surface has the alternatively distributed polynary nanometer gradient coating of TiNbTaC+AlZrTaC.The gradient coating is extremely Contain two layers of TiNbTaC and two layers of AlZrTaC single layer less, and the thickness of TiNbTaC and AlZrTaC single layer is less than or equal to 100nm.Ti Elements Atom percentage is in 40%, Nb Elements Atom percentage in 10%, Ta Elements Atom hundred in TiNbTaC coating Divide than 20%, for C element atomic percent 30%, the sum of the Ti, Nb, Ta, C element atomic percent are 1；AlZrTaC In coating Al Elements Atom percentage in 35%, Zr Elements Atom percentage in 15%, Ta Elements Atom percentage in 20%, C For Elements Atom percentage 30%, the sum of the Al, Zr, Ta, C element atomic percent are 1.
A kind of preparation method of polynary nanometer gradient coating cutter of the invention, it is characterised in that using multi-arc ion coating+ The method that medium frequency magnetron sputtering is co-deposited is in tool surface preparation TiNbTaC and the alternatively distributed polynary nanometer gradient of AlZrTaC Coating.Its specific preparation method, comprising the following steps:
(1) pre-treatment: by tool matrix material grinding and polishing, being sequentially placed into alcohol and acetone and be cleaned by ultrasonic each 20min, Surface grease stain pollutant is removed, is put into vacuum chamber of film coating machine rapidly after sufficiently drying using vacuum oven, vacuum chamber background is true Sky is 7.0 × 10-3Pa is heated to 220 DEG C, soaking time 30min；
(2) Ion Cleaning: it is passed through Ar2, pressure 1.0Pa, unlatching grid bias power supply, voltage 800V, duty ratio 0.3, brightness Light Discharge Cleaning 20min；Bias is reduced to 500V, opens ion source Ion Cleaning 20min, opens arc source Ti target, bias 400V, target current 80A, ion bombardment Ti target 0.5min；
(3) depositing TiN bTaC layers: adjustment operating air pressure is 1.0Pa, bias 150V, adjusts Ti target current 80A；It opens NbTaC composition target arc power, target current are adjusted to 60A, depositing TiN bTaC coating 5min；
(4) depositing Al ZrTaC layers: close Ti target and NbTaC composition target, adjustment operating air pressure is 0.5Pa, bias 120V, AlZrTaC composition target arc power is opened, target current is adjusted to 80A, depositing Al ZrTaC coating 5min；
(5) it depositing TiN bTaC+AlZrTaC alternating gradient coating: repeats above step (3) and (4), alternating deposit TiNbTaC+AlZrTaC gradient coating, so that total number of plies is 100 layers；
(6) it post-processes: closing all targets, close grid bias power supply and gas source, keep the temperature 30min, coating terminates.

Claims (5)

1. a kind of polynary nanometer gradient coating cutter, tool matrix material is high-speed steel, hard alloy or ceramics, and feature exists In: tool matrix material surface has the alternatively distributed polynary nanometer gradient coating of TiNbTaC+AlZrTaC.The gradient coating is extremely Contain two layers of TiNbTaC and two layers of AlZrTaC single layer less, and the thickness of TiNbTaC and AlZrTaC single layer is less than or equal to 100nm。
2. a kind of polynary nanometer gradient coating cutter according to claim 1, it is characterised in that: Ti in TiNbTaC coating Elements Atom percentage is in 30-40%, and Nb Elements Atom percentage is in 5-20%, and Ta Elements Atom percentage is in 10-40%, C For Elements Atom percentage in 20-40%, the sum of the Ti, Nb, Ta, C element atomic percent are 1；Al member in AlZrTaC coating Plain atomic percent is in 30-40%, and Zr Elements Atom percentage is in 5-15%, and Ta Elements Atom percentage is in 20-40%, C member For plain atomic percent in 20-40%, the sum of the Al, Zr, Ta, C element atomic percent are 1.
3. a kind of preparation method of polynary nanometer gradient coating cutter, it is characterised in that: splashed using multi-arc ion coating+intermediate frequency magnetic control The method of co-deposition is penetrated in tool surface preparation TiNbTaC and the alternatively distributed polynary nanometer gradient coating of AlZrTaC.
4. a kind of preparation method of polynary nanometer gradient coating cutter according to claim 3, which is characterized in that including with Lower step:
(1) pre-treatment: by tool matrix material grinding and polishing, being sequentially placed into alcohol and acetone and be cleaned by ultrasonic each 20-30min, Surface grease stain pollutant is removed, is put into vacuum chamber of film coating machine rapidly after sufficiently drying using vacuum oven, vacuum chamber background is true Sky is 7.0 × 10-3-8.0×10-3Pa is heated to 200-300 DEG C, soaking time 30-40min；
(2) Ion Cleaning: it is passed through Ar2, pressure 0.5-2.0Pa, unlatching grid bias power supply, voltage 700-1200V, duty ratio 0.3, Glow Discharge Cleaning 20-30min；Bias is reduced to 300-800V, opens ion source Ion Cleaning 20-30min, opens electricity Arc source Ti target, bias 400-600V, target current 40-80A, ion bombardment Ti target 0.5-1min；
(3) depositing TiN bTaC layers: adjustment operating air pressure is 0.5-2.0Pa, bias 100-200V, adjusts Ti target current 60- 120A；NbTaC composition target arc power is opened, target current is adjusted to 60-80A, depositing TiN bTaC coating 5-10min；
(4) depositing Al ZrTaC layers: closing Ti target and NbTaC composition target, adjustment operating air pressure is 0.5-1.0Pa, bias 100- 150V, opens AlZrTaC composition target arc power, and target current is adjusted to 60-80A, depositing Al ZrTaC coating 5-10min；
(5) it depositing TiN bTaC+AlZrTaC alternating gradient coating: repeats above step (3) and (4), alternating deposit TiNbTaC+ AlZrTaC gradient coating；
(6) it post-processes: closing all targets, close grid bias power supply and gas source, keep the temperature 30-60min, coating terminates.
5. a kind of preparation method of polynary nanometer gradient coating cutter according to claim 4, it is characterised in that: step (5) in, the total number of plies of TiNbTaC+AlZrTaC alternating gradient coating is 4-100 layers.
CN201910512048.3A 2019-06-13 2019-06-13 A kind of polynary nanometer gradient coating cutter and preparation method thereof Pending CN110306190A (en)

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CN112746248A (en) * 2020-12-15 2021-05-04 东南大学 Wide-temperature-range self-lubricating coating cutter and preparation method thereof
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Application publication date: 20191008