JP5804589B2 - Coated mold or casting member having excellent sliding characteristics and method for producing the same - Google Patents

Coated mold or casting member having excellent sliding characteristics and method for producing the same Download PDF

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JP5804589B2
JP5804589B2 JP2011023656A JP2011023656A JP5804589B2 JP 5804589 B2 JP5804589 B2 JP 5804589B2 JP 2011023656 A JP2011023656 A JP 2011023656A JP 2011023656 A JP2011023656 A JP 2011023656A JP 5804589 B2 JP5804589 B2 JP 5804589B2
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史明 本多
史明 本多
石川 剛史
剛史 石川
謙一 井上
謙一 井上
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Hitachi Metals Ltd
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本発明は、例えばプレス加工、鍛造用の金型いった、被加工材との摺動環境において耐摩耗性や耐カジリ性といった摺動特性が要求される被覆金型または鋳造用部材に関するものである。 The present invention is, for example pressing, went a die for forging, relates coating die or casting member sliding characteristics are required, such as wear resistance and galling resistance in sliding environment with the workpiece It is.

近年、金型やドリル等の工具は、その使用環境がより過酷になっており、更なる寿命改善が求められている。そのうち、摩耗やカジリ等の損耗は工具作業面と被加工材が摺動することで生じ、特に激しい摺動環境にあるプレス加工や鍛造用金型等の塑性加工用工具では顕著である。そこで、工具の作業面には様々な表面処理を施しておくことで、作業面の耐摩耗性や耐カジリ性を高める手法が広く実施されてきている。なかでもコーティング(被覆)による手法は、ビッカース硬度でHV1000を超える硬質皮膜を被覆できるものであり、基材表面との密着性にも優れることから、それを適用した被覆工具の寿命は大きく向上する。   In recent years, tools such as molds and drills have been used more severely, and further life improvement is required. Among these, wear such as wear and galling is caused by sliding of the work surface of the tool and the workpiece, and is particularly noticeable in plastic working tools such as press working and forging dies in a severe sliding environment. In view of this, a technique for improving the wear resistance and galling resistance of the work surface by applying various surface treatments to the work surface of the tool has been widely implemented. In particular, the coating (coating) method can coat a hard film with a Vickers hardness exceeding HV1000 and has excellent adhesion to the substrate surface, so the life of the coated tool to which it is applied is greatly improved. .

上記の硬質皮膜には、例えば化学蒸着法(CVD法)で被覆したチタン炭化物(元素構成としてTiCで表記する。以下、同様)や、塩浴法で被覆したVCのほか、物理蒸着法(PVD法)で被覆したTiCN、TiC、VCN、VC、AlCrNなどの、いずれもHV2000以上の皮膜が実用化されている。各種の被覆手段のなかでは、被覆時の温度が焼戻し温度以下の低温とできるPVD法が、工具の被覆処理に有効である。
そして、被加工材の高強度化、加工製品の高精度化、成形サイクルの高速化が進む塑性加工用金型では、その作業面への負荷が特に増大していることから、硬質皮膜を形成した被覆金型が多用されており、特に冷間加工用は高硬度でかつ摩擦係数の低いTiCNやTiCが使用されている。
For example, titanium carbide coated by chemical vapor deposition (CVD) (represented by TiC as an elemental structure; hereinafter the same), VC coated by salt bath, physical vapor deposition (PVD) All coatings of HV2000 or more, such as TiCN, TiC, VCN, VC, and AlCrN coated by the above method, have been put into practical use. Among various types of coating means, the PVD method that enables the temperature during coating to be a low temperature equal to or lower than the tempering temperature is effective for coating the tool.
In the mold for plastic processing, where the work material has high strength, the processed product has high precision, and the molding cycle speed is increasing, the load on the work surface is particularly increased, so a hard coating is formed. In many cases, TiCN or TiC having a high hardness and a low friction coefficient is used for cold working.

最近の金型には、更なる被加工材の高強度化、金型の複雑形状化に加えて、温熱間加工にも対応できるように、優れた耐熱性も求められるようになってきた。これに対して金型へのPVD法を用いた硬質皮膜としては、耐摩耗性および耐酸化性に優れる上記のAlCr系の窒化物皮膜を基にして、これに第3元素を添加した、例えばAlCrSi系の窒化物皮膜(特許文献1、2)がある。また、切削工具の硬質皮膜にはAlCrV系の窒化物皮膜(非特許文献1)、そしてAlVCrSi系の窒化物皮膜がある。(特許文献3)
さらには、切削工具および摺動部材に適した硬質皮膜として、AlCr系の窒化物とVの窒化物の積層構造が開示されている。(特許文献4)
Recent molds are required to have excellent heat resistance so as to be able to cope with hot working in addition to further strengthening the work material and making the mold complex. On the other hand, as the hard film using the PVD method for the mold, the third element is added to the AlCr-based nitride film having excellent wear resistance and oxidation resistance, for example, There are AlCrSi-based nitride films (Patent Documents 1 and 2). Further, the hard film of the cutting tool includes an AlCrV-based nitride film (Non-Patent Document 1) and an AlVCrSi-based nitride film. (Patent Document 3)
Furthermore, a laminated structure of AlCr nitride and V nitride is disclosed as a hard coating suitable for a cutting tool and a sliding member. (Patent Document 4)

特開2005−042146号公報JP 2005-042146 A 特開2003−321764号公報Japanese Patent Laid-Open No. 2003-321764 特開2005−262388号公報JP 2005-262388 A 特開2005−256081号公報Japanese Patent Laid-Open No. 2005-256081

R.Franzら著「Influence of phase transition on the tribological performance of arc−evaporated AlCrVN hard coatings」,Surface & Coatings Technology 203,2009年,p.1101−1105R. Franz et al., “Influence of phase transition on the tribological performance of arc-evaporated AlCrVN hard coatings, Surface & Coatings Tech. 1101-1105

被覆工具の更なる寿命改善のためには、上述した硬質皮膜の耐摩耗性、耐熱性、摺動特性を優れたレベルで兼備させる必要がある。
この場合、特許文献1、2のAlCrSi系の窒化物皮膜は高硬度かつ耐熱性には優れているが、製品成形時の摩擦抵抗が大きく、摺動特性に改善の余地がある。また、非特許文献1に記載されているAlCrV系の窒化物皮膜は、耐熱性、摺動特性には優れるものの、皮膜硬度が低く、耐摩耗性に課題が残る。そして、特許文献3のAlVCrSi系の窒化物皮膜であっても、その多元系の成分調整は容易ではなく課題が残る。さらに、特許文献4のAlCr系の窒化物とVの窒化物の積層構造であったとしても、耐摩耗性の改善には余地があった。
In order to further improve the life of the coated tool, it is necessary to combine the above-mentioned hard coating with excellent wear resistance, heat resistance and sliding characteristics.
In this case, the AlCrSi-based nitride films of Patent Documents 1 and 2 have high hardness and excellent heat resistance, but have a large frictional resistance during product molding, and there is room for improvement in sliding characteristics. The AlCrV-based nitride film described in Non-Patent Document 1 is excellent in heat resistance and sliding characteristics, but has low film hardness and a problem in wear resistance. And even if it is the AlVCrSi type | system | group nitride film of patent document 3, the multicomponent system component adjustment is not easy but a subject remains. Furthermore, even if the laminated structure of AlCr nitride and V nitride of Patent Document 4 is used, there is room for improvement in wear resistance.

そこで本発明は、冷間から温熱間の使用環境でも作業面での摺動特性に優れる、塑性加工用金型最適な被覆金型または鋳造用部材及びその製造方法を提供することを目的とする。 Therefore, the present invention has an object to provide a coated mold or a casting member that is excellent in sliding characteristics on a work surface even in a cold to hot working environment, and is optimal for a plastic working mold , and a method for manufacturing the same. To do.

本発明者らは、被加工材との摺動環境にある被覆金型または鋳造用部材において、その硬質皮膜に生じる損耗機構に着目した。そして、硬質皮膜の損耗機構には、皮膜の硬度及び耐熱性自体が低いことによる摩耗、そして、被加工材が局部的に付着することで、その付着物を介して生じる損傷に起因するものがあることを知見した。そこで、これら両方の損耗を同時に抑制し得る手法について研究した結果、この抑制には有利な皮膜形態が存在し、それを発現するための元素構成と皮膜構造があることを見いだした。 The present inventors have paid attention to the wear mechanism that occurs in the hard coating in a coated mold or casting member in a sliding environment with the workpiece. The wear mechanism of hard coatings is caused by wear due to low hardness and heat resistance of the coating itself, and damage caused through the deposits due to local adhesion of the workpiece. I found out that there was. Therefore, as a result of research on a technique capable of simultaneously suppressing both of these wears, it was found that there is an advantageous film form for this suppression, and there is an element configuration and a film structure to express it.

すなわち、本発明は、ダイス鋼もしくは高速度鋼の基材の表面に、AlCrSi窒化物とVの窒化物が交互に積層された硬質皮膜を被覆した被覆金型または鋳造用部材であって、前記硬質皮膜の膜厚が3μm以上、表面粗さがRa<0.2μm、Rz<2.0μm、Rsk<0である摺動特性に優れた被覆金型または鋳造用部材である。また、硬質皮膜の膜厚を8μm以上とすることで、被覆金型または鋳造用部材寿命を大きく改善できるので好ましい。
交互に積層されたAlCrSi窒化物とVの窒化物の個々の膜厚は、AlCrSi窒化物の膜厚よりも、Vの窒化物の膜厚の方が厚いことが好ましい。さらに、交互に積層されたAlCrSi窒化物とVの窒化物の個々の膜厚は、AlCrSi窒化物の膜厚よりも、Vの窒化物の膜厚が1.5倍以上であることが好ましい。これらの硬質皮膜は、物理蒸着法で被覆されることがより好ましい。
また、本発明の製造方法は、ダイス鋼もしくは高速度鋼の基材の表面に、窒素雰囲気中でAlCrSi合金ターゲットを使用した物理蒸着法によるAlCrSi窒化物の被覆と、窒素雰囲気中でV金属ターゲットを使用した物理蒸着法によるVの窒化物の被覆を繰り返すことで、AlCrSi窒化物とVの窒化物が交互に積層された膜厚が3μm以上の硬質皮膜を被覆し、前記硬質皮膜の表面をダイヤモンドペーストを用いてバフ研磨し、Ra<0.2μm、Rz<2.0μm、Rsk<0にする摺動特性に優れた被覆金型または鋳造用部材の製造方法である。
AlCrSi窒化物とVの窒化物が交互に積層された膜厚が8μm以上の硬質皮膜を被覆することが好ましい。
AlCrSi合金ターゲットとV金属ターゲットへ投入する電流比は、AlCrSi合金ターゲット/V金属ターゲットが2.0以下であることが好ましい。
That is, the present invention is, on the surface of the die steel or high speed steel of the base material, and a nitride of AlCrSi, nitrides of V is a coated mold or casting member hard film was coated stacked alternately A coating die or casting member having excellent sliding characteristics, wherein the hard coating has a film thickness of 3 μm or more, surface roughness Ra <0.2 μm, Rz <2.0 μm, and Rsk <0. Moreover, it is preferable that the film thickness of the hard coating is 8 μm or more because the life of the coating mold or the casting member can be greatly improved.
A nitride of AlCrSi stacked alternately, each film thickness of the nitride of V, rather than the film thickness of the nitride AlCrSi, it is preferred towards the film thickness of the nitride of V is thick. Further, a nitride AlCrSi stacked alternately, each film thickness of the nitride of V, rather than the film thickness of the nitride AlCrSi, film thickness of the nitride of V is 1.5 times or more Is preferred. These hard coatings are more preferably coated by physical vapor deposition.
The manufacturing method of the present invention, the surface of the die steel or high speed steel of the base material, coated with a nitride of AlCrSi by physical vapor deposition method using an alloy target of AlCrSi in a nitrogen atmosphere, V in a nitrogen atmosphere by repeating the coating of nitride of V by physical vapor deposition method using a metal target, covering the nitride AlCrSi, film thickness nitride of V are alternately laminated over the hard coating 3 [mu] m, the hard the surface of the film and buffing with diamond paste, is Ra <0.2μm, Rz <2.0μm, method of manufacturing the sliding characteristics superior coated mold or casting member to Rsk <0.
And nitrides of AlCrSi, film thickness nitrides are stacked alternately in V it is preferable to coat the above hard film 8 [mu] m.
An alloy target AlCrSi, current ratio put into V metal target is preferably alloy target / V metal target AlCrSi is 2.0 or less.

本発明であれば、その表面に被覆されている硬質皮膜は、冷間から温熱間の使用領域に亘って耐摩耗性、耐熱性に優れ、そして摺動特性に優れることから、被覆金型または鋳造用部材の寿命を飛躍的に向上させることが可能である。 If the present invention, a hard film that is coated on its surface, wear resistance over the cold in the used space between the heat, excellent heat resistance, and since it is excellent in sliding properties, coating dies or It is possible to dramatically improve the life of the casting member .

本発明例である試料No.1の硬質皮膜断面の、透過型電子顕微鏡観察写真であり、本発明の皮膜構造を示す一例である。Sample No. which is an example of the present invention. 1 is a transmission electron microscope observation photograph of a cross section of 1 hard film, and is an example showing the film structure of the present invention. 本発明例と比較例のボールオンディスク試験による皮膜の損傷形態を示す皮膜表面の拡大写真であり、本発明の効果を示す一例である。It is an enlarged photograph of the film | membrane surface which shows the damage form of the film | membrane by the ball-on-disk test of this invention example and a comparative example, and is an example which shows the effect of this invention.

本発明の重要な特徴の1つは、被覆工具における、上記2種の機構による損耗を同時に抑制できる最適な元素構成の組合せと皮膜構造を見出したことにある。つまり、これらの損耗を抑制するには、硬質皮膜自体が耐摩耗性、耐熱性に優れることも然ることながら、特には被加工材との摺動特性に優れることが、上記の損耗抑制に有効である。   One of the important features of the present invention is that an optimum combination of element configurations and a coating structure capable of simultaneously suppressing wear due to the two types of mechanisms in the coated tool have been found. In other words, in order to suppress these wears, the hard coating itself is not only excellent in wear resistance and heat resistance, but also particularly excellent in sliding properties with the work material is effective in suppressing the above wear. is there.

そして、耐摩耗性と耐熱性に優れるAlCrSi窒化物と、摺動特性に優れるVの窒化物とを積層構造にすることを見出した。積層構造とすることで、金型または鋳造用部材の使用環境下においてVの窒化物が、摺動特性に優れるVの酸化物を皮膜表面に成形し、AlCrSi窒化物が持つ耐摩耗性と耐熱性を阻害することなく摺動特性を大きく改善することができる。さらに、これらの効果を発揮するためには、積層構造の最適な膜厚と表面状態があることを見出して本発明に到達した。以下、その詳細について説明する。 Then, it was found that a nitride of AlCrSi excellent in abrasion resistance and heat resistance, and a nitride of V excellent in sliding properties to the laminated structure. By adopting a laminated structure, the nitride of V in the usage environment of the mold or casting member forms V oxide with excellent sliding characteristics on the surface of the coating, and the wear resistance of the nitride of AlCrSi The sliding characteristics can be greatly improved without impairing the heat resistance. Furthermore, in order to exert these effects, the inventors have found that there is an optimum film thickness and surface state of the laminated structure, and have reached the present invention. The details will be described below.

AlCrSi窒化物はHV3000以上の高硬度であり耐摩耗性に優れ、さらには耐熱性も優れることから、摩耗形態の損傷を抑制することができる。しかし、本発明者の研究によれば、耐熱性と耐摩耗性に優れるAlCrSi窒化物であっても、苛酷な摺動環境下では、その使用中における皮膜表面では、局所的に被加工材が付着し易く、皮膜表面上で摺動抵抗が不均一となり、カジリや焼付きが発生して皮膜の損傷が発生する場合があることを突き止めた。特に、被加工材がFe系の場合、被加工材から発生するFe酸化物が皮膜表面を損傷させる場合があった。 Since the nitride of AlCrSi has a high hardness of HV3000 or higher, has excellent wear resistance, and also has excellent heat resistance, it is possible to suppress damage in the form of wear. However, according to the study of the present inventor, even in nitride AlCrSi having excellent heat resistance and abrasion resistance, under severe sliding environment, with a film surface in that in use, locally workpiece It has been found that the film tends to adhere, the sliding resistance becomes uneven on the surface of the film, and galling and seizure may occur, resulting in damage to the film. In particular, when the work material is Fe-based, Fe oxide generated from the work material may damage the coating surface.

一方、Vの窒化物は25〜200℃の使用温度域においてVを主体とする化合物が該温度域では適度に酸化され、それが薄い酸化層として基材表面に形成されると、相手材(被加工材)との親和性を低下させため、摺動特性に優れることを確認した。
そして、被加工材がFe系の場合でも、Vの酸化物は、Fe酸化物と反応して、Fe酸化物を軟化させるので、皮膜への攻撃性が低減するため摺動抵抗を抑制し、更には、皮膜表面に形成されるVの酸化物の直上に、微結晶のFe酸化物が薄く均等に付着することで、Fe酸化物自体も摺動特性の向上に起因することを見出した。
上記のVの窒化物を被覆した工具では、その使用中における皮膜表面への被加工材の付着を低減できるので、該機構による工具損耗を抑制できる。しかし、概ね300℃以上の使用温度域になると、Vの窒化物の酸化は更に進行することから、酸化膜形成による損耗防止には引続き寄与するものの、一方では、この過剰な酸化自体が皮膜の摩耗を助長する。
On the other hand, when a compound mainly composed of V is suitably oxidized in the temperature range of 25 to 200 ° C. and formed as a thin oxide layer on the surface of the base material, the nitride of V becomes a counterpart material ( In order to reduce the affinity with the workpiece, it was confirmed that the sliding properties are excellent.
And even when the workpiece is Fe-based, the oxide of V reacts with the Fe oxide and softens the Fe oxide, so the aggression to the film is reduced and the sliding resistance is suppressed, Furthermore, it has been found that the microcrystalline Fe oxide adheres thinly and evenly immediately above the V oxide formed on the surface of the film, so that the Fe oxide itself is also caused by the improvement of the sliding characteristics.
In the above-mentioned tool coated with the nitride of V, adhesion of the workpiece to the surface of the coating during use can be reduced, so that tool wear due to the mechanism can be suppressed. However, since the oxidation of the nitride of V further proceeds in the operating temperature range of approximately 300 ° C. or higher, it continues to contribute to the prevention of wear due to the formation of the oxide film. Helps wear.

この課題に対しては、優れた耐摩耗性と耐熱性を有する硬質皮膜の特性を阻害することなく、Vの窒化物を含有させて優れた摺動特性を付与することができれば、上記の損耗抑制効果は導入しつつも、この硬質皮膜は温熱間の使用領域でも安定して継続使用することができる。
そしてこの場合、Ti系炭化物や窒化物はHV3000以上の高硬度が得られることから、耐摩耗性には優れるものの、自身の酸化温度が低いため、金型の作業面温度が上昇すると皮膜の摩耗が進行しやすい。一方、AlCrSi窒化物においては、HV3000以上の高硬度が得られるので、耐摩耗性に優れ、そして上述した通り耐熱性にも優れることから、Ti系炭化物等に懸念される上記の問題もない。但し、Vの窒化物には見られるような酸化は生じないので、それ単独では摺動特性に乏しく、被加工材の付着に起因する局部的な摩耗には対応し難い。
In order to solve this problem, the above-described wear and tear can be achieved if V can be added to provide excellent sliding characteristics without impairing the characteristics of the hard film having excellent wear resistance and heat resistance. While introducing the suppression effect, this hard coating can be used continuously and stably even in the use region between warm temperatures.
In this case, Ti-based carbides and nitrides have a high hardness of HV3000 or higher, so they have excellent wear resistance, but their own oxidation temperature is low, so if the working surface temperature of the mold rises, the wear of the film Is easy to progress. On the other hand, in the nitride of AlCrSi, because high hardness of more than HV3000 is obtained, excellent abrasion resistance, and since it is also excellent as heat resistance as described above, there is no above-mentioned problem of concern to the Ti-containing carbide such as . However, since the oxidation as seen in the nitride of V does not occur, it alone has poor sliding characteristics, and it is difficult to cope with local wear caused by adhesion of the workpiece.

そこで、本発明は、AlCrSi窒化物とVの窒化物の積層構造からなる硬質皮膜とすることで、酸化保護皮膜を生成するVの窒化物の優れた摺動作用が、耐摩耗性と耐熱性に優れたAlCrSi窒化物の特性を損なうことなく付与できることを見出した。これにより、優れた耐摩耗性および耐熱性、そして摺動特性が、冷間から温熱間の使用領域に亘って同時に達成される。上記の諸特性をバランスよく併せもった本発明の金型または鋳造用部材は、その使用中の各温度環境でも皮膜摺動面の凹凸発生が抑えられ、かつ被加工材への攻撃性も低いことから、摺動時に発生するカジリ等の損傷を抑制し、金型または鋳造用部材の寿命を改善できる。 Accordingly, the present invention includes a nitride AlCrSi, by a hard coating composed of a laminated structure of a nitride of V, have a good sliding operation of the nitride of V to produce an oxidized protective coating, a wear-resistant found can be imparted without impairing the properties of the nitride of AlCrSi having excellent heat resistance. As a result, excellent wear resistance, heat resistance, and sliding characteristics are simultaneously achieved over the use range between cold and hot. The mold or casting member of the present invention having the above characteristics in a well-balanced manner can suppress the occurrence of unevenness on the sliding surface of the film even in each temperature environment during use, and has low attack on the workpiece. Thus, damage such as galling that occurs during sliding can be suppressed, and the life of the mold or casting member can be improved.

本発明の採用するAlCrSi窒化物とVの窒化物の積層皮膜はその個々の窒化物層の両特性をより効果的に発現させるためには、ナノレベルの厚さであることが好ましい。そしてこの場合の好ましい膜厚は、AlCrSi窒化物の膜厚が100nm以下であり、Vの窒化物の膜厚が100nm以下である。
金型の使用環境下で十分な摺動特性を得るためには、交互に積層されたAlCrSi窒化物とVの窒化物の個々の膜厚は、AlCrSi窒化物の膜厚よりも、Vの窒化物の膜厚の方が厚いことが好ましい。そして、その個々のAlCrSi窒化物の膜厚よりも、Vの窒化物の膜厚が1.5倍以上であれば、摺動特性を高めるVの酸化物が十分に生成されるのでより好ましい。Vの窒化物の膜厚が厚くなり過ぎると、使用環境によっては、耐摩耗性が低下する場合もあり、Vの窒化物の膜厚は、AlCrSi窒化物の膜厚の4.0倍以下とすることが好ましい。
A nitride of AlCrSi employing the present invention, to more effectively express both characteristics of the multilayer coating that individual nitride layer of a nitride of V is preferably a thickness of nanometer level. The preferred thickness of this case, the film thickness of the nitride AlCrSi is at 100nm or less, the film thickness of the nitride V is 100nm or less.
In order to obtain sufficient sliding characteristics under use environment of the mold, a nitride AlCrSi stacked alternately, each film thickness of the nitride of V, rather than the film thickness of the nitride AlCrSi, The film thickness of V nitride is preferably thicker. If the thickness of the V nitride is 1.5 times or more than the thickness of the individual AlCrSi nitride, it is more preferable because the oxide of V that enhances the sliding characteristics is sufficiently generated. . If the thickness of the nitride of V becomes too thick, the wear resistance may deteriorate depending on the use environment. The thickness of the nitride of V is not more than 4.0 times the thickness of the nitride of AlCrSi. It is preferable that

そして、各構成元素の割合調整において本発明では、Vの窒化物の金属組成成分はVの一元素で固定されているので、もう一方のAlCrSi窒化物の組成を所定のものに調整するのが最適である。そして、このときのAlCrSi窒化物を構成する各元素種の割合は、AlCrSiN(但し、a、b、cは原子比を示し、a+b+c=1)の表記にて、a、b、c≠0かつa+b>0.5の組成であることが好ましい。更に好ましくはa+b>0.8である。耐熱性が優れるAlの含有量がCrより多い方がより好ましい。 In the present invention the ratio adjustment of each constituent element, the metal composition component of nitrides of V is fixed in one element of V, to adjust the composition of the nitride of the other AlCrSi the predetermined ones Is the best. At this time, the ratio of each element type constituting the nitride of AlCrSi is Al a Cr b Si c N (where a, b, and c indicate atomic ratios, and a + b + c = 1), , B, c ≠ 0 and a + b> 0.5. More preferably, a + b> 0.8. It is more preferable that the content of Al having excellent heat resistance is larger than that of Cr.

硬質皮膜の膜厚を3μm以上とする。
プレス成形では、皮膜表面から加えられる力が大きいため、皮膜がこれよりも薄いと皮膜強度が乏しくなり、皮膜が損傷し易くなる。特に、高負荷環境では、皮膜と基材の界面に大きな力が加わるため、皮膜と基材の弾性変形量の違いから、皮膜剥離や皮膜損傷が発生し易く、金型または鋳造用部材の寿命に及ぼす膜厚の影響が大きくなる。そのため、高負荷環境下では、膜厚を8μm以上とすることが好ましい。
硬質皮膜の膜厚が厚くなり過ぎると、皮膜剥離が発生し易くなる場合があり、膜厚は20μm以下であることが好ましい。より好ましくは15μm以下である。
The film thickness of the hard film is 3 μm or more.
In press molding, since the force applied from the film surface is large, if the film is thinner than this, the film strength becomes poor and the film is easily damaged. In particular, in a high stress environment, to join a large force at the interface of the film and the substrate, from the difference between the film and the elastic deformation amount of the substrate, the film peeling and film damage easily occurs, the mold or casting member life The influence of the film thickness on the thickness increases. Therefore, the film thickness is preferably 8 μm or more under a high load environment.
When the film thickness of the hard film becomes too thick, film peeling may easily occur, and the film thickness is preferably 20 μm or less. More preferably, it is 15 μm or less.

表面粗さをRa<0.2μm、Rz<2.0μm、Rsk<0とする。
硬質皮膜の表面には、ドロップレットや皮膜欠陥、不純物等が含まれ、金型または鋳造用部材として使用するのに適切で無いため、平滑にする必要がある。特に、厚膜になると、ドロップレットや皮膜欠陥が蓄積することで表面粗さが低下するので、皮膜表面を平滑にする必要がある。
そして、摺動環境下では、皮膜表面の凸部が起点となり、被加工材の付着が発生して皮膜剥離や摩耗が発生する。そのため、凸部を低減させることが最も重要となる。
そのため、一般的な表面粗さであるRa、Rzのみでは(ISO4287−1997)、凸部の頻度を把握するには不十分であり、Ra、Rzに加えては、Rskの制御が重要となる。
表面粗さRsk値(ISO4287−1997)は、振幅分布曲線の中心線に対する対象性を示すパラメーターである。例えば、表面に凹部が多い皮膜表面の場合は、Rsk<0を示し、凸部が多い場合にはRsk>0を示し、凸部と凹部の頻度を管理することが可能である。
そして、表面粗さを上記の範囲に制御することで、Vの窒化物層を含む被覆工具では、工具の使用環境下で基材表面に形成されるVの酸化物が極めて均等に薄く成形されるため、摺動特性が向上する。そして、被加工材がFe系である場合には、Vの酸化物上にFe酸化物が皮膜全体に薄く均一に付着することで、摺動特性を向上させることができる。
The surface roughness is Ra <0.2 μm, Rz <2.0 μm, and Rsk <0.
The surface of the hard coating contains droplets, coating defects, impurities, and the like, and is not suitable for use as a mold or a casting member , so it needs to be smooth. In particular, when the film is thick, the surface roughness decreases due to accumulation of droplets and film defects, so the surface of the film needs to be smooth.
Under the sliding environment, the convex portion on the surface of the film is the starting point, and adhesion of the work material occurs, resulting in film peeling or wear. Therefore, it is most important to reduce the convex portions.
Therefore, only Ra and Rz, which are general surface roughnesses (ISO4287-1997), are insufficient to grasp the frequency of the convex portions, and in addition to Ra and Rz, control of Rsk is important. .
The surface roughness Rsk value (ISO4287-1997) is a parameter indicating the objectivity with respect to the center line of the amplitude distribution curve. For example, when the surface of the film has many concave portions, Rsk <0 is indicated, and when there are many convex portions, Rsk> 0 is indicated, and the frequency of the convex portions and the concave portions can be managed.
By controlling the surface roughness within the above range, in the coated tool including the V nitride layer, the V oxide formed on the surface of the base material under the use environment of the tool is very thinly formed. Therefore, the sliding characteristics are improved. When the workpiece is Fe-based, the sliding property can be improved by allowing the Fe oxide to be thinly and uniformly deposited on the entire V oxide on the V oxide.

本発明が採用する上記の硬質皮膜は、その被覆方法について特に限定されるものではない。しかし、金型または鋳造用部材の基材への熱影響、製品の疲労強度、そして皮膜の密着性等を考慮すると、基材がダイス鋼もしくは高速度鋼であれば、その焼戻し温度以下の低温で成膜でき、皮膜に圧縮応力が残留するアークイオンプレーティング法もしくはスパッタリング法等の物理蒸着法(PVD法)が好ましい。 The above-mentioned hard coating employed by the present invention is not particularly limited with respect to the coating method. However, considering the heat effect on the base material of the mold or casting member , the fatigue strength of the product , the adhesion of the film, etc., if the base material is die steel or high speed steel, the temperature is lower than its tempering temperature. It is preferable to use a physical vapor deposition method (PVD method) such as an arc ion plating method or a sputtering method in which the film can be formed by a method and compressive stress remains in the film.

本発明において、PVD法を採用して積層皮膜を形成する場合、その成膜にV(バナジウム)金属ターゲットを用いることができる。V金属ターゲットは加工性が良く製造が容易であるという利点がある。したがって、金型または鋳造用部材の基材の表面に、窒素雰囲気中でAlCrSi合金ターゲットを使用した物理蒸着法によるAlCrSi窒化物の被覆と、窒素雰囲気中でV金属ターゲットを使用した物理蒸着法によるVの窒化物の被覆を繰り返すことで、本発明の被覆金型または鋳造用部材を容易に得ることができる。
より具体的には、製造が容易なV金属の単体と、成分の調整されたAlCrSi合金との個々でなる2種類以上のターゲットを準備する。そして、複数のターゲットが取り囲む中心で基材が回転する構造の、ターゲット成分が交互に被覆されるPVD装置を使用することができる。この時、その成膜雰囲気を窒素に調節することで、回転する基材表面がAlCrSi合金ターゲット前面を通過する際にはAlCrSi窒化物が被覆され、V金属ターゲット前面を通過する際にはVの窒化物を被覆することができる。
In the present invention, when a laminated film is formed by employing the PVD method, a V (vanadium) metal target can be used for the film formation. The V metal target has an advantage that it has good workability and is easy to manufacture. Thus, the surface of the base material of the mold or casting member, the coating of the nitride AlCrSi by physical vapor deposition method using an alloy target of AlCrSi in a nitrogen atmosphere, a physical vapor deposition using a V metal target in a nitrogen atmosphere By repeating the coating of the nitride of V by the method, the coating mold or casting member of the present invention can be easily obtained.
More specifically, two or more types of targets each consisting of a simple V metal that is easy to manufacture and an AlCrSi alloy with adjusted components are prepared. And the PVD apparatus by which a target component is coat | covered alternately with the structure where a base material rotates in the center which a some target surrounds can be used. At this time, by adjusting the film forming atmosphere to nitrogen, when the surface of the rotating substrate passes the front surface of the AlCrSi alloy target , the nitride of AlCrSi is coated, and when passing the front surface of the V metal target, V The nitride can be coated.

本発明の表面粗さを達成するためには、コーティング後の磨き方法が重要となる。従来のコーティング磨き方法である、研磨紙による磨きや、樹脂とダイヤモンド粒子からなるメディアを照射する磨きでは、RaやRzの表面粗さは平滑化するも、凸部こそを確実に低減させることは容易ではない。そこで、ダイヤモンドペーストを用いたバフ研磨を実施することにより凸部が減少し、RaやRzだけでなくRskの値を効率的に小さくすることができて好ましい。   In order to achieve the surface roughness of the present invention, a polishing method after coating is important. With the conventional coating polishing methods such as polishing with abrasive paper and polishing with media made of resin and diamond particles, the surface roughness of Ra and Rz is smoothed, but the protrusions can be reliably reduced. It's not easy. Therefore, it is preferable to perform buffing using a diamond paste to reduce the number of protrusions and efficiently reduce the value of Rsk as well as Ra and Rz.

ターゲットを使用する物理蒸着法では、ターゲットの各成分により被覆レートが異なるため、ターゲットへ投入する電流を制御することで、個々の膜厚を制御することができる。本発明で使用するAlCrSi合金ターゲットとV金属ターゲットでは、Vの金属ターゲットの方がAlCrSi合金ターゲットよりも成膜レートが高いため、AlCrSiの窒化物の膜厚よりも、Vの窒化物の膜厚の方が厚膜となり易い。
そこで、工具使用環境下で十分な潤滑特性を得るために、AlCrSiの窒化物の膜厚よりも、Vの窒化物の膜厚の方を厚膜とするには、AlCrSi合金ターゲットとV金属ターゲットへ投入する電流比を、AlCrSi合金ターゲット/V金属ターゲットが2.0以下とすることが好ましい。この場合、AlCrSi合金ターゲットへ投入する電流を小さくしても良いし、V金属ターゲットへ投入する電流を大きくしても良い。より好ましくは、1.5以下である。
一定の成膜レートを確保するためには、ターゲットへ投入する電流は、80A以上であることが好ましい。ターゲットへ投入する電流が大きくなり過ぎると、成膜が安定し難いので、160A以下とすることが好ましい。
In the physical vapor deposition method using a target, since the coating rate differs depending on each component of the target, the individual film thickness can be controlled by controlling the current applied to the target. The alloy target and V metal target AlCrSi used in the present invention, towards the metal target of V is due to the high deposition rate than alloy target AlCrSi, than the thickness of the nitride AlCrSi, nitrides V The film thickness tends to be a thick film.
Therefore, in order to obtain sufficient lubricating properties under tool use environment than the thickness of the nitride AlCrSi, in the direction of thickness of the nitride of V and thick film, an alloy of AlCrSi target and V metal The ratio of the current supplied to the target is preferably 2.0 or less for the alloy target of AlCrSi / V metal target. In this case, may be a smaller current to be introduced into the alloy target AlCrSi, it may increase the current to be introduced into the V metal target. More preferably, it is 1.5 or less.
In order to ensure a constant film formation rate, the current input to the target is preferably 80 A or more. If the current applied to the target becomes too large, the film formation is difficult to stabilize, so it is preferable to set the current to 160 A or less.

本発明の採用する硬質皮膜は、その各々がAlCrSi窒化物とVの窒化物の化合物構造を有し、最適な膜厚と表面状態とすることでその特性を発揮できる。よって、AlCrSi窒化物とVの窒化物の一部又は全部が炭窒化物、酸炭窒化物の形態をとったとしても本発明の作用効果は発揮される。 Hard coating employed in the present invention includes a nitride of each of AlCrSi, has a compound structure of a nitride and V, can exhibit its properties by the optimum film thickness and surface condition. Therefore, a nitride AlCrSi, some or all carbonitride nitride and V, effect effects of the present invention though the form of the oxycarbonitride was being exerted.

実施例1では、ボールオンディスク試験機にて、皮膜組成の有する特性を評価した。
表面処理を行う基材は、JISに規定される高速度鋼SKH51の円盤状試験片(直径20mm×厚さ5mm)を準備した。これは、真空中1180℃の加熱保持より窒素ガス冷却により焼入れ後、540〜580℃での焼戻しにより64HRCに調質したものである。そしてこれらの平面を、表面粗さRa0.016μm、Rz0.016μm、Rsk−0.116に鏡面機械研磨した後、アルカリ超音波洗浄を行った。
In Example 1, the characteristics of the coating composition were evaluated with a ball-on-disk tester.
As the base material to be surface-treated, a disk-shaped test piece (diameter 20 mm × thickness 5 mm) of high-speed steel SKH51 specified by JIS was prepared. This was tempered to 64 HRC by tempering at 540 to 580 ° C. after quenching by cooling with nitrogen gas from heating and holding at 1180 ° C. in vacuum. These flat surfaces were mirror-polished to a surface roughness Ra of 0.016 μm, Rz of 0.016 μm, and Rsk−0.116, and then subjected to alkali ultrasonic cleaning.

成膜手段には、アークイオンプレーティング法を用いた。その成膜は複数のターゲットが取り囲む中心で基材が回転する構造のPVD装置を用いて行うものであり、そのアーク蒸発源には表1に示す第1、第2のターゲットを設置した。そして基材をチャンバー内の、遊星機構を有する冶具テーブル上の、回転機構を有したプレートに設置した。なお、テーブルと、テーブル上のプレートは夫々独立して回転する。   An arc ion plating method was used as the film forming means. The film formation is performed using a PVD apparatus having a structure in which the substrate rotates around the center surrounded by a plurality of targets, and the first and second targets shown in Table 1 are installed in the arc evaporation source. Then, the substrate was placed on a plate having a rotation mechanism on a jig table having a planetary mechanism in the chamber. The table and the plate on the table rotate independently of each other.

次に、チャンバー容積が1.4m(処理品の挿入空間は0.3m)のアークイオンプレーティング装置内において、温度773K、1×10−3Paの真空中で加熱脱ガスを行った後、723Kの温度においてArプラズマによるクリーニングを行った。そして装置内に反応ガスの窒素を導入し、各種ターゲット上にアーク放電を発生させて、723Kのもとで、反応ガス圧力は3Pa、テーブル回転数は5rpm、コーティング時の基材には−100Vのバイアス電圧を印加して被覆した。また、V金属ターゲットへ投入する電流を変えることで、各膜厚比を調整した。
試料No.1〜5では、硬質皮膜のトータルの膜厚が約3.5μm、試料No.6、7ではトータルの膜厚が約8μmなるよう成膜時間を調整した。表1に成膜条件を示す。
Next, heat degassing was performed in a vacuum at a temperature of 773 K and 1 × 10 −3 Pa in an arc ion plating apparatus having a chamber volume of 1.4 m 3 (the insertion space for the processed product is 0.3 m 3 ). Thereafter, cleaning with Ar plasma was performed at a temperature of 723K. Then, nitrogen in the reaction gas was introduced into the apparatus, and arc discharge was generated on various targets. Under 723 K, the reaction gas pressure was 3 Pa, the table rotation speed was 5 rpm, and the base material during coating was -100 V. A bias voltage of Moreover, each film thickness ratio was adjusted by changing the electric current supplied to the V metal target.
Sample No. 1 to 5, the total film thickness of the hard coating is about 3.5 μm. 6 and 7, the film formation time was adjusted so that the total film thickness was about 8 μm. Table 1 shows the film forming conditions.

被覆後の試料は、所定の表面粗さになるよう粒径3μmのダイヤモンドペーストを用いたバフ研磨にて皮膜表面を平滑化した。そして、各試料の皮膜表面の表面粗さRa、Rz、Rsk値は、触針式粗さ計(株式会社東京精密製 SURFCOM480A)を使用し、評価長さ4mm、測定速度0.3mm/s、カットオフ値0.8mmの条件にて測定した。
皮膜表面の硬度は、ビッカース硬さ試験機(株式会社ミツトヨ製 HM100)を使用し、150kgfの荷重にて測定した。
積層皮膜の平均膜厚は、透過電子顕微鏡観察で測定した。トータルの膜厚は電子顕微鏡観察で測定した。表2に各測定結果を示す。
The coated surface was smoothed by buffing using a diamond paste having a particle diameter of 3 μm so that the sample had a predetermined surface roughness. And the surface roughness Ra, Rz, Rsk value of the film surface of each sample uses a stylus type roughness meter (SURFCOM 480A manufactured by Tokyo Seimitsu Co., Ltd.), an evaluation length of 4 mm, a measurement speed of 0.3 mm / s, The measurement was performed under the condition of a cut-off value of 0.8 mm.
The hardness of the coating surface was measured with a load of 150 kgf using a Vickers hardness tester (HM100 manufactured by Mitutoyo Corporation).
The average film thickness of the laminated film was measured by transmission electron microscope observation. The total film thickness was measured with an electron microscope. Table 2 shows each measurement result.

AlCrSiの窒化物層とVの窒化物層が交互に積層した試料No.1〜3は、硬度がHV3000以上であった。Vの窒化物層の膜厚が厚くなると、硬度が低下する傾向であった。試料No.5のVの窒化物は、硬度がHV2100であり、AlCrSiの窒化物を含有する皮膜に比べて低硬度となった。
交互に積層された個々の膜厚は、測定領域の隣り合う各10層の膜厚の平均から求めた。
試料No.1の積層皮膜の個々の膜厚は、AlCrSi窒化物層が約3nm、Vの窒化物層が約6nmの厚さであった。図1に試料No.1の、透過型電子顕微鏡による皮膜の断面観察写真を示す。
試料No.2は、AlCrSi窒化物層が約3nm、Vの窒化物層が約4.5nmの厚さであった。試料No.3は、AlCrSi窒化物層が約3nm、Vの窒化物層が約3nmの厚さであった。試料No.6は、AlCrSi窒化物層が約3nm、Vの窒化物層が約6nmであった。
各試料の表面粗さは、Ra<0.2μm、Rz<2.0μm、Rsk<0であった。
Sample No. 1 in which AlCrSi nitride layers and V nitride layers were alternately laminated. 1 to 3 had a hardness of HV3000 or higher. As the thickness of the V nitride layer increased, the hardness tended to decrease. Sample No. The V nitride of 5 had a hardness of HV2100, which was lower than that of the film containing the AlCrSi nitride.
The individual film thicknesses that were alternately stacked were obtained from the average of the film thicknesses of 10 adjacent layers in the measurement region.
Sample No. Individual film thickness of 1 of the laminated coating, nitride layer of about 3nm of AlCrSi, nitride layer V is had a thickness of about 6 nm. In FIG. 1 is a cross-sectional observation photograph of a film by a transmission electron microscope.
Sample No. 2, the nitride layer of AlCrSi about 3 nm, the nitride layer of the V is had a thickness of about 4.5 nm. Sample No. 3, a nitride layer of AlCrSi about 3 nm, the nitride layer of the V is had a thickness of about 3 nm. Sample No. 6, nitride layer AlCrSi about 3 nm, the nitride layer of V was about 6 nm.
The surface roughness of each sample was Ra <0.2 μm, Rz <2.0 μm, and Rsk <0.

試料No.1〜7について、相手材をJIS軸受鋼SUJ2としたときの摺動特性を評価した。試験条件は、ボールオンディスク試験機(CSM Instruments社製Tribometer)を使用した。25℃(常温)〜400℃の大気中にて、コーティング皮膜にSUJ2球(直径6mm)を2Nの荷重で押し付けながら、円盤状試験片を150mm/秒の速度で回転させた。試験距離は、100mとし、摩擦係数は10m、20m、30m、40m、50m、60m、70m、80m、90m、100mでの値の平均値をとった。表3に各温度における各種皮膜の摩耗係数を示す。   Sample No. About 1-7, the sliding characteristic when an other party material was set to JIS bearing steel SUJ2 was evaluated. As a test condition, a ball-on-disk tester (Tribometer manufactured by CSM Instruments) was used. The disk-shaped test piece was rotated at a speed of 150 mm / sec while pressing SUJ2 balls (diameter 6 mm) against the coating film with a load of 2 N in the atmosphere of 25 ° C. (normal temperature) to 400 ° C. The test distance was 100 m, and the friction coefficient was an average value of 10 m, 20 m, 30 m, 40 m, 50 m, 60 m, 70 m, 80 m, 90 m, and 100 m. Table 3 shows the wear coefficients of various films at various temperatures.

AlCrSiの窒化物とVの窒化物の積層構造である試料No.1〜3、6は、Vの窒化物である試料No.5と同等に摩擦係数が低くなった。試料No.1〜3の積層周期の比較から、Vの窒化物層の比率が少なくなるに伴い、摩擦係数が高くなった。Vの窒化物を含有していないAlCrSiの窒化物である試料No.4、7は、本発明例に比べて摩耗係数が高くなった。   Sample No. 2 having a laminated structure of AlCrSi nitride and V nitride. 1 to 3 and 6 are sample Nos. 1 and 2 which are nitrides of V. The coefficient of friction was as low as 5. Sample No. From the comparison of the stacking periods of 1 to 3, the friction coefficient increased as the ratio of the nitride layer of V decreased. Sample No. 1, which is a nitride of AlCrSi not containing nitride of V. Nos. 4 and 7 had higher wear coefficients than the examples of the present invention.

さらに、上記試験後の皮膜表面については、表面粗さ計(東京精密株式会社製 サーフコム480A)にて、1.5mm/sの条件で皮膜摺動部の凹凸を測定し、相手材の付着や皮膜の摩耗状態を評価した。つまり、表面凹凸値がプラス(+)の場合は付着形態であり、マイナス(−)の場合は皮膜が摩耗していることを意味している。表4に皮膜の摩耗状態の測定結果を示す。(図2には皮膜表面の拡大概観写真を示す。)表5には、相手材φ6SUJ2ボールの摩耗の測定結果を示す。   Furthermore, about the film surface after the said test, the unevenness | corrugation of a film | membrane sliding part was measured on the conditions of 1.5 mm / s with a surface roughness meter (Surfcom 480A by Tokyo Seimitsu Co., Ltd.), The wear state of the film was evaluated. That is, when the surface unevenness value is plus (+), it is an attached form, and when it is minus (−), it means that the film is worn. Table 4 shows the measurement results of the wear state of the film. (FIG. 2 shows an enlarged overview photograph of the coating surface.) Table 5 shows the measurement results of the wear of the mating member φ6 SUJ2 ball.

試料No.1〜3、6は、耐摩耗性と耐熱性に優れるAlCrSiの窒化物を含有しているため、各温度環境において摺動部の凹凸が少なくなった。そして、摺動特性の優れるVの窒化物層も含有しているため、相手材の摩耗径も各温度環境でほぼ同等であり、相手材への攻撃性も少なくなった。
一方、試料No.4、7は、摺動性能の優れるVの窒化物層を含有しておらず、表4に示すように、25℃の試験環境から皮膜表面に相手材が局部的に付着した。そして、試験温度が高くなるに伴い、その付着量が増加した。また、付着量の増加に伴い、相手材への攻撃性も大きくなり、表5に示すようにボールの摩耗径が極めて大きくなった。
試料No.5は、局部的な付着が発生せず、表5に示すように相手攻撃性も低くなった。しかし、200℃以上の試験環境では皮膜の耐熱性が低く、皮膜の酸化が進行し、表4に示すように皮膜の摩耗量が増加した。
AlCrSiN膜とVN膜はいずれも、各試験温度においても、摺動面における相手材の付着量、または、皮膜の摩耗量にバラツキが大きく、本発明組成のAlCrSiの窒化物とVの窒化物の積層皮膜と比べて摺動特性が劣る結果となった。
Sample No. Since 1-3, 6 contains the nitride of AlCrSi which is excellent in abrasion resistance and heat resistance, the unevenness | corrugation of the sliding part decreased in each temperature environment. And since it contains the nitride layer of V which is excellent in sliding characteristics, the wear diameter of the counterpart material is almost the same in each temperature environment, and the aggressiveness to the counterpart material is reduced.
On the other hand, sample No. Nos. 4 and 7 did not contain a V nitride layer having excellent sliding performance, and as shown in Table 4, the counterpart material locally adhered to the surface of the film from a 25 ° C. test environment. As the test temperature increased, the amount of adhesion increased. Further, as the adhesion amount increased, the attacking property against the counterpart material also increased, and the wear diameter of the ball became extremely large as shown in Table 5.
Sample No. In No. 5, local adhesion did not occur, and the opponent aggression was also low as shown in Table 5. However, in the test environment of 200 ° C. or higher, the heat resistance of the film was low, the film was oxidized, and the amount of wear of the film increased as shown in Table 4.
Both the AlCrSiN film and the VN film have large variations in the amount of adhesion of the mating material on the sliding surface or the wear amount of the film at each test temperature, and the AlCrSi nitride and the V nitride of the composition of the present invention The sliding property was inferior compared to the laminated film.

次に、実金型の使用環境を想定した、硬質皮膜への負荷加重がより大きい、往復動摩擦摩耗試験で実際の耐久性を評価した。
表面処理を行う基材には、真空中1050℃の加熱保持より窒素ガス冷却により焼入れ後、540〜580℃での焼戻しにより45HRCに調質した、JISに規定されるダイス鋼SKD61の角状試験片(180×20×20)を準備した。そしてこれらの平面を表面粗さRa0.016μm、Rz0.016μm、Rsk−0.116に鏡面機械研磨した後、アルカリ超音波洗浄を行った。
Next, the actual durability was evaluated by a reciprocating frictional wear test in which the load applied to the hard coating was larger, assuming the usage environment of the actual mold.
For the substrate to be surface-treated, a square test of die steel SKD61 as defined in JIS, which was tempered to 45 HRC by tempering at 540 to 580 ° C. after quenching by cooling with nitrogen gas from heating at 1050 ° C. in vacuum. A piece (180 × 20 × 20) was prepared. These planes were mirror-polished to a surface roughness Ra of 0.016 μm, Rz of 0.016 μm, and Rsk−0.116, and then subjected to alkali ultrasonic cleaning.

成膜手段には、実施例1と同様の、アークイオンプレーティング法を用いた。実施例1と同様の条件でArプラズマによるクリーニングを行った。そして装置内に反応ガスの窒素を導入し、各種ターゲット上にアーク放電を発生させて、723Kのもとで、反応ガス圧力は3Pa、テーブル回転数は5rpm、コーティング時の基材には−100Vのバイアス電圧を印加して、試料No.8〜No.19を被覆した。被覆時間を調整することで膜厚を変化させた。
そして、粒径3μmのダイヤモンドペーストを用いたバフ研磨で、試料No.8〜17の皮膜表を平滑化した。
試料No.18、19は#600番と、#1000番の研磨紙にて皮膜表面を平滑化した。成膜条件を表6に示す。
As the film forming means, the same arc ion plating method as in Example 1 was used. Cleaning with Ar plasma was performed under the same conditions as in Example 1. Then, nitrogen in the reaction gas was introduced into the apparatus, and arc discharge was generated on various targets. Under 723 K, the reaction gas pressure was 3 Pa, the table rotation speed was 5 rpm, and the base material during coating was -100 V. No. 5 was applied to the sample No. 8-No. 19 was coated. The film thickness was changed by adjusting the coating time.
The sample No. 1 was then buffed using a diamond paste having a particle size of 3 μm. The film surface of 8-17 was smoothed.
Sample No. Nos. 18 and 19 were smoothed with # 600 and # 1000 abrasive papers. The film forming conditions are shown in Table 6.

表面を平滑化した試料No.8〜23について、実施例1と同様の方法で、表面粗さ、膜厚を測定した。そして、往復動摩擦摩耗試験機(株式会社共和技研)を用いて、損傷回数と摩擦係数を測定した。摺動する相手材には、φ10×16のSKD61(45HRC)を用いた。測定荷重は200kgf、測定速度は150mm/s、摺動距離は300mm往復、試験条件は常温、無潤滑にて試験を実施した。
往復摩擦摩耗試験の回数を300往復までとし、皮膜が損傷して基材が露出した時点の回数で評価を行った。摩擦係数は、摺動時の摩擦応力を測定荷重で除算して求めた。
各種特性評価の結果を表7に示す。
Sample No. whose surface was smoothed About 8-23, the surface roughness and the film thickness were measured by the same method as Example 1. And the frequency | count of damage and the friction coefficient were measured using the reciprocating friction wear test machine (Kyowa Giken Co., Ltd.). SKD61 (45HRC) of φ10 × 16 was used as the mating material to slide. The test was carried out at a measurement load of 200 kgf, a measurement speed of 150 mm / s, a sliding distance of 300 mm reciprocation, test conditions of room temperature and no lubrication.
The number of reciprocating friction and wear tests was up to 300 reciprocations, and the evaluation was performed by the number of times when the film was damaged and the substrate was exposed. The coefficient of friction was obtained by dividing the friction stress during sliding by the measured load.
Table 7 shows the results of various characteristic evaluations.

本発明例の中でも、膜厚が8μm以上である試料No.8〜14は、高負荷がかかる往復動摩擦摩耗試験でも、皮膜損傷が発生しなかった。
本発明の試料No.15〜17は、試料No.8〜14と比べて膜厚が薄く、高負荷の使用環境下では、皮膜損傷が発生した。
試料No.18は、本発明例の試料No.9とRa、Rzは同程度であるが、Rsk>0で、皮膜表面に凸部が多く存在した。そのため、膜厚が厚いにもかかわらず、摺動抵抗が高く、凸部を起点とした摩耗粉の発生が原因で、皮膜損傷が発生した。
試料No.19は、表面粗さが本発明の規定する範囲を満たさず、膜厚も好ましい範囲内にないため、皮膜損傷が直ぐに発生した。
Among the examples of the present invention, Sample No. with a film thickness of 8 μm or more is used. In Nos. 8 to 14, no film damage occurred even in a reciprocating frictional wear test in which a high load was applied.
Sample No. of the present invention. 15 to 17 are sample Nos. Compared with 8-14, the film thickness was thin, and film damage occurred under a high load use environment.
Sample No. 18 is a sample No. of the present invention example. 9 and Ra and Rz were similar, but Rsk> 0, and there were many convex portions on the coating surface. Therefore, although the film thickness was large, the sliding resistance was high, and the film damage occurred due to the generation of abrasion powder starting from the convex portion.
Sample No. In No. 19, since the surface roughness did not satisfy the range defined by the present invention and the film thickness was not within the preferred range, film damage occurred immediately.

本発明の被覆金型または鋳造用部材は、その皮膜表面が優れた耐摩耗性、耐熱性、摺動特性を有することから各種機械を構成する摺動部品にも適用できる。 Coated molds or casting member of the present invention, abrasion resistance thereof film surface has excellent heat resistance, since it has sliding properties, can be applied to the sliding components of the various machines.

Claims (8)

ダイス鋼もしくは高速度鋼の基材の表面に、AlCrSi窒化物とVの窒化物が交互に積層された硬質皮膜を被覆した被覆金型または鋳造用部材であって、
前記硬質皮膜の膜厚が3μm以上、表面粗さがRa<0.2μm、Rz<2.0μm、Rsk<0であることを特徴とする摺動特性に優れた被覆金型または鋳造用部材
On the surface of the die steel or high speed steel of the base material, and a nitride of AlCrSi, a coated mold or casting member nitride coated with hard coating are alternately stacked and V,
A coated mold or casting member having excellent sliding characteristics, wherein the hard coating has a film thickness of 3 μm or more, surface roughness Ra <0.2 μm, Rz <2.0 μm, and Rsk <0.
前記硬質皮膜の膜厚が8μm以上であることを特徴とする請求項1に記載の摺動特性に優れた被覆金型または鋳造用部材 The coated mold or casting member having excellent sliding characteristics according to claim 1, wherein the hard coating has a thickness of 8 μm or more. 交互に積層されたAlCrSi窒化物とVの窒化物の個々の膜厚は、AlCrSi窒化物の膜厚よりも、Vの窒化物の膜厚の方が厚いことを特徴とする請求項1ないし2に記載の摺動特性に優れた被覆金型または鋳造用部材Claims and nitride AlCrSi stacked alternately, each film thickness of the nitride of V, rather than the film thickness of the nitride AlCrSi, characterized in that towards the film thickness of the nitride of V is thick 3. A coated mold or a casting member having excellent sliding characteristics according to 1 or 2. 交互に積層されたAlCrSi窒化物とVの窒化物の個々の膜厚は、AlCrSi窒化物の膜厚よりも、Vの窒化物の膜厚が1.5倍以上であることを特徴とする請求項3に記載の摺動特性に優れた被覆金型または鋳造用部材Wherein a nitride of AlCrSi stacked alternately, each film thickness of the nitride of V, rather than the film thickness of the nitride AlCrSi, the film thickness of the nitride V is 1.5 times or more A coated mold or a casting member having excellent sliding characteristics according to claim 3. 前記硬質皮膜は物理蒸着法により被覆したことを特徴とする請求項1ないし4のいずれかに記載の摺動特性に優れた被覆金型または鋳造用部材 5. The coated mold or casting member having excellent sliding characteristics according to claim 1, wherein the hard film is coated by a physical vapor deposition method. ダイス鋼もしくは高速度鋼の基材の表面に、窒素雰囲気中でAlCrSi合金ターゲットを使用した物理蒸着法によるAlCrSi窒化物の被覆と、窒素雰囲気中でV金属ターゲットを使用した物理蒸着法によるVの窒化物の被覆を繰り返すことで、
AlCrSi窒化物とVの窒化物が交互に積層された膜厚が3μm以上の硬質皮膜を被覆し、
前記硬質皮膜の表面をダイヤモンドペーストを用いてバフ研磨し、Ra<0.2μm、Rz<2.0μm、Rsk<0にすることを特徴とする摺動特性に優れた被覆金型または鋳造用部材の製造方法。
On the surface of the die steel or high speed steel of the base material, coated with a nitride of AlCrSi by physical vapor deposition method using an alloy target of AlCrSi in a nitrogen atmosphere, by physical vapor deposition method using a V metal target in a nitrogen atmosphere By repeating the nitride coating of V,
And nitrides of AlCrSi, film thickness nitride of V are alternately laminated to cover the above hard film 3 [mu] m,
Wherein the surface of the hard film buffing using a diamond paste, Ra <0.2μm, Rz <2.0μm , excellent coated molds or casting member in sliding properties, characterized in that the Rsk <0 Manufacturing method.
AlCrSi窒化物とVの窒化物が交互に積層された膜厚が8μm以上の硬質皮膜を被覆することを特徴とする請求項6に記載の摺動特性に優れた被覆金型または鋳造用部材の製造方法。 And nitrides of AlCrSi, for superior coated mold or cast the sliding properties according to claim 6 having a thickness of nitride of V are alternately laminated is characterized by coating the above hard film 8μm Manufacturing method of member . AlCrSi合金ターゲットとV金属ターゲットへ投入する電流比は、AlCrSi合金ターゲット/V金属ターゲットが2.0以下であることを特徴とする請求項6ないし7に記載の摺動特性に優れた被覆金型または鋳造用部材の製造方法。 8. The coating with excellent sliding characteristics according to claim 6, wherein the current ratio of the AlCrSi alloy target and the V metal target is 2.0 or less when the AlCrSi alloy target / V metal target is 2.0 or less. A method for producing a mold or a casting member .
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