JP2001279465A - Surface discharge treating method, electrode for surface treatment used therefor and obtained surface treated film - Google Patents
Surface discharge treating method, electrode for surface treatment used therefor and obtained surface treated filmInfo
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- JP2001279465A JP2001279465A JP2000090929A JP2000090929A JP2001279465A JP 2001279465 A JP2001279465 A JP 2001279465A JP 2000090929 A JP2000090929 A JP 2000090929A JP 2000090929 A JP2000090929 A JP 2000090929A JP 2001279465 A JP2001279465 A JP 2001279465A
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- surface treatment
- electrode
- treated
- electric discharge
- hard
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、金型、工具、機械
部品等の表面に耐摩耗性と潤滑性とを付与する放電によ
る表面処理方法、並びにこれに用いる電極と得られた表
面処理膜に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment method by electric discharge for imparting abrasion resistance and lubricity to the surface of a mold, a tool, a machine part, etc., and an electrode used for the method and a surface treatment film obtained It is about.
【０００２】[0002]
【従来の技術】図６は、例えば刊行物｛電気加工技術、
ｖｏｌ．１６Ｎｏ．５３ｐ．３８（１９９３）｝に示さ
れた従来の放電表面改質装置を示す説明図である。図６
において、６１は表面改質をおこなう工作物、７は電
極、２４は改質材料を混入した加工液、２５は電極７を
保持する主軸であり、図示されない駆動装置により上下
方向に可動される。１５は加工槽、２６は加工用電源で
ある。2. Description of the Related Art FIG.
vol. 16No. 53p. FIG. 38 is an explanatory view showing a conventional discharge surface modification device shown in FIG. 38 (1993) #. FIG.
In the figure, 61 is a workpiece for performing surface modification, 7 is an electrode, 24 is a working fluid mixed with a modifying material, and 25 is a main shaft holding the electrode 7, which is vertically moved by a driving device (not shown). Reference numeral 15 denotes a processing tank, and reference numeral 26 denotes a processing power supply.
【０００３】次に、動作について説明する。すなわち、
被加工物たる工作物６１と電極７の間には加工用電源２
６によりパルス電圧が印加され、放電が発生する。電極
７は主軸２５とともに図示されない駆動装置により上下
方向（Ｚ軸方向）にサーボ駆動され、加工が進行する。
加工液２４にはタングステンの微粉末が混入されている
ため、工作物６１の表面においては放電により工作物６
１の母材が溶融されるとともに、加工液中のタングステ
ン粉末が混入し、工作物６１表面に改質層すなわちタン
グステン合金層が形成される。また、その他、シリコ
ン、クロムなどの粉末を加工液に混入して放電加工をお
こなうことにより、金属表面に同様な改質層が形成さ
れ、耐摩耗性が得られる。Next, the operation will be described. That is,
A processing power supply 2 is provided between the workpiece 61 and the electrode 7.
The pulse voltage is applied by 6 to generate a discharge. The electrode 7 is servo-driven in the vertical direction (Z-axis direction) by a driving device (not shown) together with the main shaft 25, and the machining proceeds.
Since the fine powder of tungsten is mixed in the working fluid 24, the workpiece 6 is discharged on the surface of the workpiece 61 by electric discharge.
The first base material is melted, and at the same time, the tungsten powder in the working fluid is mixed therein, so that a modified layer, that is, a tungsten alloy layer is formed on the surface of the workpiece 61. In addition, a similar modified layer is formed on the metal surface by performing electric discharge machining by mixing a powder of silicon, chromium, or the like into the working fluid, thereby obtaining wear resistance.
【０００４】上記従来の放電加工による表面処理装置
は、タングステンなどの粉末を加工液に混入して加工を
おこなうが、加工液に混入された粉末に吸収されるエネ
ルギは極めて小さく、放電の熱エネルギによる化学反応
が進行しないため、炭化物が形成されない。したがっ
て、工作物表面には、工作物表面の溶融により、粉末物
質であるタングステンが工作物の金属に溶け込んだ合金
層となり、耐摩耗性の高い金属炭化物の表面処理層が得
られず、機械特性や高温特性に優れたセラミック系被膜
ができないという問題があった。[0004] The above-mentioned conventional surface treatment apparatus using electric discharge machining carries out machining by mixing powder such as tungsten into a machining fluid, but the energy absorbed by the powder mixed into the machining fluid is extremely small, and the thermal energy of electric discharge is small. Does not proceed, and no carbide is formed. Therefore, due to the melting of the workpiece surface, the workpiece surface becomes an alloy layer in which tungsten, which is a powdered substance, is dissolved in the metal of the workpiece, and a surface treatment layer of a metal carbide having high wear resistance cannot be obtained, and mechanical properties are not obtained. And a ceramic coating excellent in high-temperature characteristics cannot be formed.
【０００５】また、電極としてタングステンカーバイト
などの炭化物の粉体を圧縮したものについては、粉体の
結合が弱く電極がもろいことから、放電加工における電
極の消耗を大きくすることができるため、数１０μｍ程
度の厚い堆積層が容易にできる反面、電極がもろいた
め、十分な工作物表面の再溶融がおこなわれ難く、その
結果、表面処理層は脆弱なものになる。このため、圧粉
体電極による１次加工を行った後に、銅電極による再溶
融加工（２次加工）をおこなう必要があり、電極製作や
加工工程の面で問題があった。[0005] Further, as for the electrode obtained by compressing carbide powder such as tungsten carbide, the powder is weakly bonded and the electrode is brittle, so that the consumption of the electrode in electric discharge machining can be increased. While a thick deposited layer of about 10 μm can be easily formed, the fragile electrodes make it difficult to sufficiently re-melt the surface of the workpiece, and as a result, the surface treatment layer becomes brittle. For this reason, it is necessary to perform re-melting (secondary processing) using a copper electrode after performing primary processing using a green compact electrode, and there has been a problem in electrode fabrication and processing steps.
【０００６】図３は、上記問題点を解決するために、特
開平９―１９８２９号公報に記載された放電加工による
表面処理装置の構成図で、６は加工および表面処理を行
う被処理材、７は例えばＴｉ等耐摩耗性金属により形成
された表面処理用電極、８は絶縁耐力を有し、Ｃ（炭
素）を多く含有する灯油系加工液、９は通常の放電加工
用電極と表面処理用電極７を交換する電極交換装置、１
０は電極の垂直方向の駆動を行うＺ軸駆動装置、１１は
工作物の水平方向（Ｘ方向）駆動を行うためのＸテーブ
ル、１２は工作物の水平方向（Ｙ方向）駆動を行うため
のＹテーブル、１３はＸテーブル１１用の図示されない
駆動モータを制御するＸ軸サーボアンプ、１４はＹテー
ブル１２用の図示されない駆動モータを制御するＹ軸サ
ーボアンプ、１５は加工槽、１６はＣＮＣ制御装置、１
７はＣＮＣ制御装置１６内部に設けられ、表面処理用電
極７による加工時における電極の動きを制御する軌跡移
動制御装置、１８は表面処理用電極７による加工のため
の電極パスプログラム（ＮＣプログラム）を軌跡移動制
御装置１７に供給する電極軌跡生成用ＣＡＭ、１９は加
工液８を極間に供給する加工液供給装置、２０は電極パ
ルスを供給する放電パルス供給電源である。FIG. 3 is a block diagram of a surface treatment apparatus by electric discharge machining described in Japanese Patent Application Laid-Open No. 9-19829 in order to solve the above problems. 7 is a surface treatment electrode formed of a wear-resistant metal such as Ti, 8 is a kerosene-based working fluid having a dielectric strength and containing a large amount of C (carbon), and 9 is a conventional electrode for electric discharge machining and a surface treatment. Electrode exchange device for exchanging electrode 7 for use, 1
Reference numeral 0 denotes a Z-axis driving device for driving the electrodes in the vertical direction, 11 denotes an X table for driving the workpiece in the horizontal direction (X direction), and 12 denotes a drive for driving the workpiece in the horizontal direction (Y direction). Y table, 13 is an X-axis servo amplifier that controls a drive motor (not shown) for the X table 11, 14 is a Y-axis servo amplifier that controls a drive motor (not shown) for the Y table 12, 15 is a processing tank, and 16 is CNC control. Device, 1
Reference numeral 7 denotes a trajectory movement control device which is provided inside the CNC control device 16 and controls the movement of the electrode during processing by the surface treatment electrode 7. Reference numeral 18 denotes an electrode path program (NC program) for processing by the surface treatment electrode 7. Is a CAM for generating an electrode trajectory that supplies the trajectory to the trajectory movement control device 17, 19 is a machining fluid supply device that supplies the machining fluid 8 between the electrodes, and 20 is a discharge pulse supply power supply that supplies an electrode pulse.
【０００７】被処理材６は表面処理をおこなう前工程に
て、切削加工や放電加工等によりあらかじめ加工がなさ
れ、形状はすでに形成されている。この形状の被処理材
６を加工槽１５内にセットする。被処理材６のセッティ
ングを行った後、電極交換装置９により、表面処理用電
極７をＺ軸駆動装置１０に取り付け上記電極７の有消耗
条件の放電条件で表面処理を開始する。表面処理中、表
面処理用電極７によって前荒加工工程による加工表面を
横方向になぞるように加工をおこなう。すなわち、ＣＮ
Ｃ制御装置１６内部に設けられた軌跡移動制御装置１７
はあらかじめ電極移動軌跡生成用ＣＡＭ１８によって作
成された電極パス情報（ＮＣプログラム）に基づき、表
面処理用電極７の縦横方向の移動の制御をおこなう。The material to be treated 6 is preliminarily processed by a cutting process, an electric discharge process or the like in a pre-process for performing the surface treatment, and the shape is already formed. The workpiece 6 having this shape is set in the processing tank 15. After setting the material 6 to be processed, the electrode 7 for surface treatment is attached to the Z-axis driving device 10 by the electrode exchanging device 9, and the surface treatment is started under the discharge condition of the consumable condition of the electrode 7. During the surface treatment, the surface is processed by the surface treatment electrode 7 so as to trace the processed surface in the pre-roughing step in the lateral direction. That is, CN
Trajectory movement control device 17 provided inside C control device 16
Controls the vertical and horizontal movement of the surface treatment electrode 7 based on the electrode path information (NC program) created by the electrode movement trajectory generation CAM 18 in advance.
【０００８】表面処理中、放電により発生した熱エネル
ギにより電極材料であるＴｉが加工部分の加工液中に浮
遊するとともに、工作物表面に付着する。また、同時に
加工液８中の炭素が放電熱エネルギにより分解し、加工
液から離脱する。この炭素と加工液中および工作物表面
に付着したＴｉとの間の化学反応により、Ｔｉの炭化物
（ＴｉＣ）が形成され、工作物表面に硬質被膜が形成さ
れる。[0008] During the surface treatment, the thermal energy generated by the electric discharge causes Ti, which is an electrode material, to float in the machining fluid in the machining portion and adhere to the workpiece surface. At the same time, the carbon in the working fluid 8 is decomposed by the heat energy of the discharge, and is separated from the working fluid. A chemical reaction between the carbon and Ti in the working fluid and on the surface of the workpiece forms carbides of Ti (TiC) and forms a hard coating on the surface of the workpiece.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、上記従
来の表面処理装置を用いた被膜には潤滑性がないため、
摺動部を持った機械部品には使用できないという課題が
あった。However, since a film using the above-mentioned conventional surface treatment apparatus has no lubricity,
There is a problem that it cannot be used for mechanical parts having a sliding portion.
【００１０】本発明はかかる課題を解消するためになさ
れたもので、被処理材表面に耐摩耗性と潤滑性の両方の
機能を有する表面処理膜を形成する放電による表面処理
方法を得ることを目的とする。また、上記表面処理方法
に用いる電極と上記機能を有する表面処理膜を得ること
を目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to provide a surface treatment method by electric discharge for forming a surface treatment film having both abrasion resistance and lubricity on the surface of a material to be treated. Aim. Another object of the present invention is to obtain an electrode used for the surface treatment method and a surface treatment film having the above function.
【００１１】[0011]
【課題を解決するための手段】本発明に係る第１の放電
による表面処理方法は、絶縁耐力を有する加工液中で、
導電性を有する電極と被処理材との間に電圧を印加して
放電を発生させ、放電の熱作用により上記被処理材の表
面に表面処理層を形成する放電による表面処理方法にお
いて、上記電極と加工液の構成材料が、硬質材料および
潤滑性材料、または硬質材料および潤滑性材料の元とな
る材料を含有することを特徴とする方法である。A first surface treatment method using electric discharge according to the present invention comprises the steps of:
In a surface treatment method by electric discharge, in which a voltage is applied between an electrode having conductivity and a material to be treated to generate a discharge, and a surface treatment layer is formed on the surface of the material to be treated by a heat action of the discharge, And the constituent material of the working fluid contains a hard material and a lubricating material, or a material that is a source of the hard material and the lubricating material.
【００１２】本発明に係る第２の放電による表面処理方
法は、上記第１の放電による表面処理方法において、電
極有消耗条件で、放電をおこなう方法である。[0012] The surface treatment method using the second discharge according to the present invention is a method for performing the discharge under the electrode wear condition in the surface treatment method using the first discharge.
【００１３】本発明に係る第３の放電による表面処理方
法は、上記第１または第２の放電による表面処理方法に
おいて、電極が硬質材料と潤滑性材料とを含有する方法
である。A third surface treatment method using an electric discharge according to the present invention is a method according to the first or second discharge method, wherein the electrode contains a hard material and a lubricating material.
【００１４】本発明に係る第４の放電による表面処理方
法は、上記第１または第２の放電による表面処理方法に
おいて、電極が硬質材料を含有し、加工液が潤滑性材料
を含有する方法である。A fourth surface treatment method using electric discharge according to the present invention is the surface treatment method according to the first or second electric discharge, wherein the electrode contains a hard material and the working fluid contains a lubricating material. is there.
【００１５】本発明に係る第５の放電による表面処理方
法は、上記第１または第２の放電による表面処理方法に
おいて、電極が炭素と結合して硬質材料となる金属と潤
滑性材料を含有し、加工液が炭素を成分として含有する
液体の方法である。A fifth surface treatment method using electric discharge according to the present invention is the surface treatment method according to the first or second electric discharge, wherein the electrode comprises a metal which becomes a hard material by bonding with carbon and a lubricating material. , Wherein the working fluid is a liquid containing carbon as a component.
【００１６】本発明に係る第６の放電による表面処理方
法は、上記第１または第２の放電による表面処理方法に
おいて、電極が炭素と結合して硬質材料となる金属から
なり、加工液が炭素を成分として含有する液体に潤滑性
材料を含有する方法である。According to a sixth aspect of the present invention, in the surface treatment method using the first or second discharge, the electrode is made of a metal which is combined with carbon to form a hard material, and the machining fluid is carbon. Is a method of containing a lubricating material in a liquid containing as a component.
【００１７】本発明に係る第７の放電による表面処理方
法は、上記第１ないし第６のいずれかの放電による表面
処理方法において、硬質材料が、ＴｉＣ、ＴｉＮ、Ｔｉ
ＣＮ、ＴｉＡｌＮ、ＴｉＢ2、ＷＣ、ＴａＣ、ＺｒＣ、
ＶＣまたはＮｂＣであり、潤滑性材料が、ＢＮ、黒鉛、
ＭｏＳ2、ＷＳ2、ふっ化黒鉛またはＳｉ3Ｎ4の方法であ
る。According to a seventh aspect of the present invention, in the surface treatment method using any one of the first to sixth discharges, the hard material is TiC, TiN, TiN.
CN, TiAlN, TiB 2 , WC, TaC, ZrC,
VC or NbC, and the lubricating material is BN, graphite,
MoS 2 , WS 2 , graphite fluoride or Si 3 N 4 .
【００１８】本発明に係る第８の放電による表面処理方
法は、上記第５または第６の放電による表面処理方法に
おいて、炭素と結合して硬質材料となる金属がＴｉ、
Ｗ、Ｖ、Ｔａ、ＮｂまたはＺｒの方法である。An eighth surface treatment method according to the present invention is the surface treatment method according to the fifth or sixth discharge, wherein the metal which becomes a hard material by bonding with carbon is Ti,
The method is W, V, Ta, Nb or Zr.
【００１９】本発明に係る第９の放電による表面処理方
法は、上記第１ないし第８のいずれかの放電による表面
処理方法において、被処理材料の放電面を溶融するよう
に、電極と被処理材との間に電圧を印加する方法であ
る。A ninth surface treatment method using a discharge according to the present invention is the surface treatment method according to any one of the first to eighth discharges, wherein the electrode and the treatment target are melted so as to melt the discharge surface of the treatment target material. This is a method in which a voltage is applied to the material.
【００２０】本発明に係る第１の放電による表面処理用
電極は、加工液中で、電極と被処理材との間に電圧を印
加して放電を発生させ、放電の熱作用により上記被処理
材の表面に表面処理層を形成する放電による表面処理に
用いられ、硬質材料と潤滑性材料とを有するものであ
る。The electrode for surface treatment by the first discharge according to the present invention generates a discharge by applying a voltage between the electrode and the material to be treated in the working fluid, and the heat of the discharge causes the above-mentioned electrode to be treated. It is used for surface treatment by electric discharge for forming a surface treatment layer on the surface of a material, and has a hard material and a lubricating material.
【００２１】本発明に係る第２の放電による表面処理用
電極は、加工液中で、電極と被処理材との間に電圧を印
加して放電を発生させ、放電の熱作用により上記被処理
材の表面に表面処理層を形成する放電による表面処理に
用いられ、炭素と結合して硬質材料となる金属と潤滑性
材料を有するものである。The electrode for surface treatment by the second discharge according to the present invention generates a discharge by applying a voltage between the electrode and the material to be processed in the working fluid, and the heat treatment of the discharge causes the above-mentioned electrode to be treated. It is used for surface treatment by electric discharge for forming a surface treatment layer on the surface of a material, and has a metal which becomes a hard material by combining with carbon and a lubricating material.
【００２２】本発明に係る第１の表面処理膜は、放電に
よる表面処理により被処理材に設けられ、硬質部と潤滑
部とを有するものである。The first surface treatment film according to the present invention is provided on the material to be treated by surface treatment by electric discharge, and has a hard part and a lubrication part.
【００２３】本発明に係る第２の表面処理膜は、上記第
１の表面処理膜において、放電による表面処理が上記第
１ないし第９のいずれかの方法のものである。A second surface treatment film according to the present invention is the first surface treatment film, wherein the surface treatment by electric discharge is performed by any one of the first to ninth methods.
【００２４】本発明に係る第３の表面処理膜は、上記第
１の表面処理膜において、表面処理膜が、被処理材の構
成成分と硬質部の構成成分とからなる中間層を介して設
けられたものである。The third surface-treated film according to the present invention is the first surface-treated film, wherein the surface-treated film is provided via an intermediate layer comprising a component of a material to be treated and a component of a hard part. It was done.
【００２５】[0025]
【発明の実施の形態】実施の形態１．本発明の第１の実
施の形態の放電による表面処理方法に用いる表面処理装
置は、図３に示す従来の表面処理装置において、表面処
理用電極７および加工液８の構成材料を、硬質材料およ
び潤滑性材料、または硬質材料および潤滑性材料の元と
なる材料を含有するように構成したものである。本実施
の形態の表面処理方法は、被処理材を放電により形状を
加工するのではなく、すでに切削加工または放電加工に
よりあらかじめ形状が形成された被処理材の表面を改質
処理する方法であり、以下、一般的な放電加工装置を用
いて説明するので、慣例により加工液、加工槽等「加
工」という用語を用いているが、本発明を説明する際に
用いる「加工」という用語には「処理」という意味が含
まれているものとする。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 The surface treatment apparatus used in the surface treatment method using electric discharge according to the first embodiment of the present invention is the same as the conventional surface treatment apparatus shown in FIG. It is configured to contain a lubricating material or a material that is a source of a hard material and a lubricating material. The surface treatment method of the present embodiment is a method of modifying the surface of the material to be processed, which has been previously formed by cutting or electric discharge machining, instead of processing the shape of the material to be processed by electric discharge. In the following, since the description will be made using a general electric discharge machining apparatus, the term "machining" is used according to a customary processing fluid, machining tank, etc., but the term "machining" used when describing the present invention includes It is assumed that the meaning of “processing” is included.
【００２６】つまり、本願発明は表面処理用電極７およ
び加工液８が、上記構成材料であるので、放電により表
面処理用電極７中の材料が被処理材部分の加工液中に浮
遊し、加工液中の材料とともに、被処理材表面に付着し
反応し、硬質部と潤滑部を有する表面処理膜が形成さ
れ、耐摩耗性と潤滑性の両方の機能を持った潤滑性硬質
膜である表面処理膜を形成することができる。That is, in the present invention, since the surface treatment electrode 7 and the working fluid 8 are the above-mentioned constituent materials, the material in the surface treatment electrode 7 floats in the working fluid of the material to be treated by the discharge, and A surface that is a lubricating hard film that has both abrasion resistance and lubricity, with a surface-treated film having a hard part and a lubricating part formed by reacting with the material in the liquid and adhering to and reacting with the surface of the material to be treated. A treatment film can be formed.
【００２７】また、本実施の形態において、上記の様に
被処理材を表面処理するための放電条件は、電極有消耗
条件であり、例えば図３に示す一般的な放電加工装置に
おいて、電極と被処理材の極性を、上記装置を通常の放
電加工として用いる場合と逆にすることにより、電極が
消耗する条件となる。さらに、表面処理用電極のみなら
ず、被処理材の放電面が溶融するように、電極と被処理
材との間に印加する電圧を調整することにより、被処理
材の構成材料と、硬質材料または潤滑性材料とが混じり
合った中間層を上記表面処理膜と被処理材の間に設ける
ことができ、さらに表面処理膜の剥離を防止できる。Further, in the present embodiment, the discharge conditions for surface-treating the material to be treated as described above are electrode wear-out conditions. For example, in the general electric discharge machining apparatus shown in FIG. By reversing the polarity of the material to be processed as compared with the case where the above-described apparatus is used for normal electric discharge machining, conditions for exhausting the electrodes are obtained. Further, by adjusting the voltage applied between the electrode and the material to be treated so that the discharge surface of the material to be treated as well as the electrode for the surface treatment is melted, the constituent material of the material to be treated and the hard material Alternatively, an intermediate layer in which a lubricating material is mixed can be provided between the surface treatment film and the material to be treated, and peeling of the surface treatment film can be prevented.
【００２８】実施の形態２．図４は本発明の第２の実施
の形態の表面処理用電極の構成図で、表面処理用電極７
は硬質材料２１と潤滑性材料２２を含有したものであ
る。また、図５は本発明の第２の実施の形態の他の構成
の表面処理用電極の構成図で、表面処理用電極７は炭素
と結合して硬質材料となる金属２３と潤滑性材料２２を
含有したもので、炭素を含有した加工液とともに用い
る。Embodiment 2 FIG. 4 is a configuration diagram of a surface treatment electrode according to a second embodiment of the present invention.
Contains a hard material 21 and a lubricating material 22. FIG. 5 is a configuration diagram of a surface treatment electrode having another configuration according to the second embodiment of the present invention. The surface treatment electrode 7 is composed of a metal 23 which becomes a hard material by bonding with carbon and a lubricating material 22. And used together with a working fluid containing carbon.
【００２９】実施の形態３．図１は上記実施の形態によ
り得られた表面処理された被処理材の断面図で、１は被
処理材、２は表面処理膜、３は硬質部、４は潤滑部であ
り、硬質部３と潤滑部４で表面処理膜２が形成されてい
る。被処理材１の表面は、表面処理膜２中の硬質部によ
り耐摩耗性が向上し、潤滑部により潤滑性能が向上す
る。なお、硬質部と潤滑部の割合は処理膜に求める耐摩
耗性と潤滑性の案配に依存し、どのような配合比でもよ
いことはいうまでもない。また、表面処理膜の深さ方向
への潤滑部の存在割合もどのようなものであってもよ
い。Embodiment 3 FIG. 1 is a cross-sectional view of a surface-treated material obtained according to the above embodiment, wherein 1 is a material to be processed, 2 is a surface treatment film, 3 is a hard portion, 4 is a lubricating portion, and 3 is a hard portion. The surface treatment film 2 is formed by the lubrication unit 4 and the lubrication unit 4. On the surface of the material to be treated 1, the hard portion in the surface treatment film 2 improves wear resistance, and the lubricated portion improves lubrication performance. The ratio between the hard portion and the lubricated portion depends on the abrasion resistance and lubricity required for the treated film, and it goes without saying that any mixing ratio may be used. In addition, the ratio of the lubricating portions in the depth direction of the surface treatment film may be any.
【００３０】図２は、本発明の実施の形態の別の表面処
理膜の断面図で、５は中間層であり、硬質部３が被処理
材１の構成材料と混ざり合って形成した層である。被処
理材１の表面は、表面処理膜２中の硬質部により耐摩耗
性が向上し、潤滑部により潤滑性能が向上する。また、
中間層により、表面処理膜が強固に結合し剥離しにくく
なる。なお、硬質部と潤滑部の割合は処理膜に求める耐
摩耗性と潤滑性の案配に依存し、どのような配合比でも
よいことはいうまでもない。また、表面層の深さ方向へ
の潤滑部の存在割合もどのようなものであってもよいこ
ともいうまでもない。FIG. 2 is a sectional view of another surface treatment film according to the embodiment of the present invention. Reference numeral 5 denotes an intermediate layer, which is a layer in which the hard portion 3 is formed by mixing with the constituent material of the material 1 to be treated. is there. On the surface of the material to be treated 1, the wear resistance is improved by the hard portion in the surface treatment film 2, and the lubrication performance is improved by the lubricated portion. Also,
Due to the intermediate layer, the surface treatment film is firmly bonded and hardly peeled off. The ratio between the hard portion and the lubricated portion depends on the abrasion resistance and lubricity required for the treated film, and it goes without saying that any mixing ratio may be used. It goes without saying that the ratio of the lubricating portions in the depth direction of the surface layer may be any.
【００３１】上記本発明の実施の形態に係る硬質材料と
しては、ＴｉＣ、ＴｉＮ、ＴｉＣＮ、ＴｉＡｌＮ、Ｔｉ
Ｂ2等のチタン化合物、またはＷＣ、ＴａＣ、ＺｒＣ、
ＶＣ、ＮｂＣ等の導電性セラミックスを用いることがで
きる。また、上記本発明の実施の形態に係る潤滑性材料
としては、ＢＮ、黒鉛、ＭｏＳ2、ＷＳ2、ふっ化黒鉛、
Ｓｉ3Ｎ4等を用いることができる。また、上記本発明の
実施の形態に係る硬質材料の元となる材料である、炭素
と結合して耐摩耗性の高い炭化物（硬質材料）を形成す
る金属としては、Ｔｉ、Ｗ、Ｖ、Ｔａ、Ｎｂ、Ｚｒ等を
用いることができる。また、上記本発明の実施の形態に
係る加工液としては、放電加工における絶縁耐力を有す
るものが用いられ、上記金属と結合して硬質材料を構成
する炭素を成分として含有する液体としては例えば灯油
系放電加工液や炭素粉末を含有した液体が用いられる。The hard material according to the embodiment of the present invention includes TiC, TiN, TiCN, TiAlN, Ti
Titanium compounds such as B 2 , or WC, TaC, ZrC,
Conductive ceramics such as VC and NbC can be used. Further, as the lubricating material according to the embodiment of the present invention, BN, graphite, MoS 2 , WS 2 , graphite fluoride,
Si 3 N 4 or the like can be used. In addition, as a metal which is a base material of the hard material according to the embodiment of the present invention and which forms a carbide (hard material) having high wear resistance by combining with carbon, Ti, W, V, Ta , Nb, Zr, etc. can be used. Further, as the working fluid according to the embodiment of the present invention, one having a dielectric strength in electric discharge machining is used, and as the liquid containing carbon as a component that forms a hard material by bonding with the metal, for example, kerosene A system electric discharge machining liquid or a liquid containing carbon powder is used.
【００３２】[0032]
【実施例】実施例１．本発明の第１の実施例の放電によ
る表面処理方法は、図３に示す放電加工装置において、
表面処理用電極７として図４に示す表面処理用電極を用
いて被処理材を表面処理した。[Embodiment 1] The surface treatment method using electric discharge according to the first embodiment of the present invention employs the electric discharge machining apparatus shown in FIG.
The material to be treated was subjected to surface treatment using the electrode for surface treatment shown in FIG. 4 as the electrode for surface treatment 7.
【００３３】以下、図３を用いて被処理材の表面処理方
法を説明する。被処理材６は表面処理をおこなう前工程
にて、切削加工、放電加工等によりあらかじめ加工がな
され、形状はすでに形成されている。この形状の被処理
材６を加工槽１５内にセットする。被処理材６のセッテ
ィングを行った後、電極交換装置９により、表面処理用
電極７をＺ軸駆動装置１０に取り付け、電極有消耗の放
電条件で、表面処理を開始する。表面処理中、表面処理
用電極７によって前荒加工工程による加工表面を横方向
になぞるように表面処理をおこなう。すなわち、ＣＮＣ
制御装置１６内部に設けられた軌跡移動制御装置１７は
あらかじめ電極移動軌跡生成用ＣＡＭ１８によって作成
された電極パス情報（ＮＣプログラム）に基づき、表面
処理用電極７の縦横方向の移動の制御をおこなう。Hereinafter, a method for surface treatment of a material to be treated will be described with reference to FIG. The material to be treated 6 has been processed in advance by a cutting process, an electric discharge process or the like in a process prior to performing the surface treatment, and the shape has already been formed. The workpiece 6 having this shape is set in the processing tank 15. After setting the material 6 to be processed, the electrode 7 for surface treatment is attached to the Z-axis driving device 10 by the electrode exchanging device 9, and the surface treatment is started under the discharge condition in which the electrode is consumed. During the surface treatment, the surface treatment is performed by the surface treatment electrode 7 so as to trace the processed surface in the pre-roughing step in the lateral direction. That is, CNC
The trajectory movement control device 17 provided inside the control device 16 controls the movement of the surface processing electrode 7 in the vertical and horizontal directions based on the electrode path information (NC program) created by the electrode movement trajectory generation CAM 18 in advance.
【００３４】表面処理中、放電により発生した熱エネル
ギにより表面処理用電極７の硬質材料と潤滑性材料が被
処理材部分の加工液中に浮遊するとともに、被処理材表
面に付着する。これらが、被処理材表面に被膜され、図
１に示されるように硬質部３と潤滑部４を有し、耐摩耗
性と潤滑性の両方に機能を持った表面処理膜２を形成す
ることができる。なお、表面処理用電極７にはＣｏ、Ｎ
ｉなどのバインダとなる物質を混ぜることにより、処理
された表面層の靭性が大きくなることはいうまでもな
い。During the surface treatment, the hard material and the lubricating material of the surface treatment electrode 7 float in the processing liquid of the material to be treated and adhere to the surface of the material to be treated due to the thermal energy generated by the discharge. These are coated on the surface of the material to be treated to form a surface treatment film 2 having a hard portion 3 and a lubrication portion 4 as shown in FIG. 1 and having functions of both wear resistance and lubricity. Can be. In addition, Co, N
It goes without saying that by mixing a substance serving as a binder such as i, the toughness of the treated surface layer is increased.
【００３５】実施例２．上記実施例１において、表面処
理用電極７のみならず、被処理材表面をも溶融するよう
に電圧を印加する他は実施例１と同様にして、被処理材
を表面処理した。すなわち、実施例１では、放電により
発生した熱エネルギは小さいため、表面処理用電極７だ
けを溶融したが、放電パルス供給電源２０の容量を大き
くすることにより、放電により発生する熱エネルギは大
きくなるため、表面処理用電極７を溶融するだけでな
く、被処理材６の表面をも溶融させることになる。その
ため、図２に示すように、表面処理用電極７中の硬質材
料が被処理材の構成材料と混じり合った中間層５とその
表面に形成される硬質部と潤滑部の両方を持つ表面処理
膜２が形成され、表面処理膜の剥離が防止される。Embodiment 2 FIG. In the above Example 1, the material to be treated was surface-treated in the same manner as Example 1 except that a voltage was applied so as to melt not only the surface treatment electrode 7 but also the surface of the material to be treated. That is, in the first embodiment, since the heat energy generated by the discharge is small, only the surface treatment electrode 7 is melted. However, the heat energy generated by the discharge increases by increasing the capacity of the discharge pulse supply power supply 20. Therefore, not only the surface treatment electrode 7 is melted, but also the surface of the processing target material 6 is melted. Therefore, as shown in FIG. 2, a surface treatment having an intermediate layer 5 in which the hard material in the surface treatment electrode 7 is mixed with the constituent material of the material to be treated, and having both a hard portion and a lubrication portion formed on the surface thereof The film 2 is formed, and peeling of the surface treatment film is prevented.
【００３６】実施例３．実施例１において、表面処理用
電極７として硬質材料を含有するものを用い、加工液８
として潤滑性材料を含有するものを用いる他は実施例１
と同様にして、被処理材を表面処理し、図１に示すよう
に、硬質部３と潤滑部４を有する表面処理膜２を得た。Embodiment 3 FIG. In Example 1, a material containing a hard material was used as the surface treatment electrode 7,
Example 1 except that a lubricant containing a lubricating material was used.
In the same manner as described above, the material to be treated was surface-treated to obtain a surface-treated film 2 having a hard part 3 and a lubricating part 4, as shown in FIG.
【００３７】表面処理中、放電により発生した熱エネル
ギにより表面処理用電極７の硬質材料が被処理材部分の
加工液中に浮遊し、加工液中の潤滑性材料とともに、被
処理材表面に付着する。これらが、被処理材表面に被膜
され、硬質部と潤滑部を有し、耐摩耗性と潤滑性の両方
に機能を持った表面処理膜を形成することができる。During the surface treatment, the hard material of the electrode for surface treatment 7 floats in the machining fluid of the material to be treated by heat energy generated by the electric discharge, and adheres to the surface of the material to be treated together with the lubricating material in the machining fluid. I do. These are coated on the surface of the material to be treated, and have a hard part and a lubricated part, so that a surface treatment film having both abrasion resistance and lubricity can be formed.
【００３８】実施例４．上記実施例３において、表面処
理用電極７のみならず、被処理材表面をも溶融するよう
に電圧を印加する他は実施例３と同様にして、被処理材
を表面処理し、表面処理用電極７中の硬質材料が図２に
示すように、被処理材１の構成材料と混じり合った中間
層５とその表面に形成される硬質部と潤滑部の両方を持
つ表面処理膜２が形成された。Embodiment 4 FIG. In Example 3 described above, the material to be treated was subjected to surface treatment in the same manner as in Example 3 except that a voltage was applied so as to melt not only the surface treatment electrode 7 but also the surface of the material to be treated. As shown in FIG. 2, the intermediate material 5 in which the hard material in the electrode 7 is mixed with the constituent material of the material 1 to be processed, and the surface treatment film 2 having both the hard portion and the lubrication portion formed on the surface thereof are formed. Was done.
【００３９】実施例５．実施例１において、表面処理用
電極７として図５に示すように、炭素と結合して耐摩耗
性の高い炭化物（硬質材料）を形成する金属２３と潤滑
性材料２２を含有するものを用い、加工液８には、炭素
を含有する液体、一般には、灯油系放電加工液を用いる
他は実施例１と同様にして、被処理材を表面処理した。
なお、表面処理用電極７にはＣｏ、Ｎｉなどのバインダ
となる物質を混ぜることにより、処理された表面層の靭
性が大きくなることはいうまでもない。Embodiment 5 FIG. In Example 1, as shown in FIG. 5, a surface treatment electrode 7 containing a metal 23 which combines with carbon to form a carbide (hard material) having high wear resistance and a lubricating material 22 was used. The material to be treated was surface-treated in the same manner as in Example 1, except that a liquid containing carbon, generally a kerosene-based electric discharge machining liquid, was used as the machining liquid 8.
It is needless to say that the toughness of the treated surface layer is increased by mixing the surface treatment electrode 7 with a binder material such as Co or Ni.
【００４０】つまり、実施例１と同様に、加工中、放電
により発生した熱エネルギにより、表面処理用電極７中
の炭素と結合して耐摩耗性の高い炭化物を形成する金属
２３が加工液中に溶け込む。この時、加工液８には、炭
素を含有する液体、一般には、灯油系放電加工液が使用
されるが、この炭素と化学反応を起こし、硬質性の金属
炭化物を形成しすることにより、図１に示すように、硬
質部３と潤滑部４を有する表面処理膜２を得た。That is, in the same manner as in the first embodiment, the metal 23 which combines with carbon in the surface treatment electrode 7 to form carbide having high wear resistance by the thermal energy generated by electric discharge during machining is formed in the machining fluid. Blends into At this time, a liquid containing carbon, in general, a kerosene-based electric discharge machining liquid is used as the machining liquid 8, and a chemical reaction occurs with the carbon to form a hard metal carbide, thereby forming a hard metal carbide. As shown in FIG. 1, a surface treatment film 2 having a hard part 3 and a lubricating part 4 was obtained.
【００４１】実施例６．上記実施例３において、表面処
理用電極７のみならず、被処理材表面をも溶融するよう
に電圧を印加する他は実施例３と同様にして、被処理材
を表面処理し、表面処理用電極７中の硬質材料が図２に
示すように、被処理材１の構成材料と混じり合った中間
層５とその表面に形成される硬質部と潤滑部の両方を持
つ表面処理膜２が形成された。Embodiment 6 FIG. In Example 3 described above, the material to be treated was subjected to surface treatment in the same manner as in Example 3 except that a voltage was applied so as to melt not only the surface treatment electrode 7 but also the surface of the material to be treated. As shown in FIG. 2, the intermediate material 5 in which the hard material in the electrode 7 is mixed with the constituent material of the material 1 to be processed, and the surface treatment film 2 having both the hard portion and the lubrication portion formed on the surface thereof are formed. Was done.
【００４２】実施例７．実施例１において、表面処理用
電極７として、炭素と結合して耐摩耗性の高い炭化物
（硬質材料）を形成する金属を含有し、加工液８には、
炭素を含有する液体に潤滑性材料を含有するものを用い
る他は実施例１と同様にして、被処理材を表面処理し、
図１に示すように、硬質部３と潤滑部４を有する表面処
理膜２を得た。なお、表面処理用電極７にはＣｏ、Ｎｉ
などのバインダとなる物質を混ぜることにより、処理さ
れた表面処理膜の靭性が大きくなることはいうまでもな
い。Embodiment 7 FIG. In Example 1, the surface treatment electrode 7 contains a metal that combines with carbon to form a carbide (hard material) having high wear resistance.
Surface treatment of the material to be treated was performed in the same manner as in Example 1 except that a liquid containing carbon contained a lubricating material.
As shown in FIG. 1, a surface treatment film 2 having a hard part 3 and a lubricating part 4 was obtained. In addition, Co, Ni is used for the electrode 7 for surface treatment.
Needless to say, by mixing such a substance as a binder, the toughness of the treated surface-treated film is increased.
【００４３】実施例８．上記実施例７において、表面処
理用電極７のみならず、被処理材表面を溶融するように
電圧を印加する他は実施例７と同様にして、被処理材を
表面処理し、表面処理用電極７中の硬質材料が、図２に
示すように、被処理材１の構成材料と混じり合った中間
層５とその表面に形成される硬質部と潤滑部の両方を持
つ表面処理膜２が形成された。Embodiment 8 FIG. In Example 7, not only the surface treatment electrode 7 but also a surface treatment of the material to be treated was performed in the same manner as in Example 7 except that a voltage was applied so as to melt the surface of the material to be treated. As shown in FIG. 2, the hard material in 7 is mixed with the constituent material of the material 1 to be processed, and the surface treatment film 2 having both a hard portion and a lubrication portion formed on the surface thereof is formed. Was done.
【００４４】[0044]
【発明の効果】本発明の第１の放電加工による表面処理
方法は、絶縁耐力を有する加工液中で、導電性を有する
電極と被処理材との間に電圧を印加して放電を発生さ
せ、放電の熱作用により上記被処理材の表面に表面処理
層を形成する放電による表面処理方法において、上記電
極と加工液の構成材料が、硬質材料および潤滑性材料、
または硬質材料および潤滑性材料の元となる材料を含有
することを特徴とする方法で、硬質部と潤滑部の両方を
備え、潤滑性のある耐摩耗性の表面被膜を得るという効
果がある。According to the first surface treatment method by electric discharge machining of the present invention, a discharge is generated by applying a voltage between a conductive electrode and a material to be treated in a machining fluid having a dielectric strength. In the surface treatment method by electric discharge, which forms a surface treatment layer on the surface of the material to be treated by the thermal action of electric discharge, the constituent materials of the electrode and the working fluid are a hard material and a lubricating material,
Alternatively, a method characterized by containing a hard material and a material that is a base material of a lubricating material is effective in obtaining a lubricating and wear-resistant surface coating having both a hard portion and a lubricating portion.
【００４５】本発明の第２の放電による表面処理方法
は、上記第１の放電による表面処理方法において、電極
有消耗条件で、放電をおこなう方法で、硬質部と潤滑部
の両方を備え、潤滑性のある耐摩耗性の表面被膜を得る
という効果がある。The second surface treatment method using electric discharge according to the present invention is the surface treatment method according to the first electric discharge method, wherein both the hard part and the lubricated part are provided by performing the electric discharge under the condition that the electrode is consumed. There is an effect of obtaining a wear-resistant surface coating having good properties.
【００４６】本発明の第３の放電による表面処理方法
は、上記第１または第２の放電による表面処理方法にお
いて、電極が硬質材料と潤滑性材料とを含有する方法
で、硬質部と潤滑部の両方を備え、潤滑性のある耐摩耗
性の表面被膜を得るという効果がある。The third surface treatment method using electric discharge according to the present invention is the surface treatment method using the first or second electric discharge, wherein the electrode contains a hard material and a lubricating material. And an effect of obtaining a lubricating and wear-resistant surface coating.
【００４７】本発明の第４の放電による表面処理方法
は、上記第１または第２の放電による表面処理方法にお
いて、電極が硬質材料を含有し、加工液が潤滑性材料を
含有する方法で、硬質部と潤滑部の両方を備え、潤滑性
のある耐摩耗性の表面被膜を得るという効果がある。The fourth surface treatment method using electric discharge according to the present invention is a method according to the first or second electric discharge method, wherein the electrode contains a hard material and the working fluid contains a lubricating material. It has both a hard part and a lubricated part, and is effective in obtaining a lubricating and wear-resistant surface coating.
【００４８】本発明の第５の放電による表面処理方法
は、上記第１または第２の放電による表面処理方法にお
いて、電極が炭素と結合して硬質材料となる金属と潤滑
性材料を含有し、加工液が炭素を成分として含有する液
体の方法で、硬質部と潤滑部の両方を備え、潤滑性のあ
る耐摩耗性の表面被膜を得るという効果がある。The fifth surface treatment method using electric discharge according to the present invention is the surface treatment method according to the first or second electric discharge, wherein the electrode comprises a metal which becomes a hard material by bonding with carbon, and a lubricating material; This is a liquid method in which the working fluid contains carbon as a component, and has the effect of providing both a hard part and a lubricated part and obtaining a lubricating and wear-resistant surface coating.
【００４９】本発明の第６の放電による表面処理方法
は、上記第１または第２の放電による表面処理方法にお
いて、電極が炭素と結合して硬質材料となる金属からな
り、加工液が炭素を成分として含有する液体に潤滑性材
料を含有する方法で、硬質部と潤滑部の両方を備え、潤
滑性のある耐摩耗性の表面被膜を得るという効果があ
る。The sixth surface treatment method using electric discharge according to the present invention is the surface treatment method according to the first or second electric discharge, wherein the electrode is made of a metal which is combined with carbon to form a hard material, and the working fluid contains carbon. The method of containing a lubricating material in a liquid contained as a component has the effect of providing both a hard part and a lubricating part and obtaining a lubricating and wear-resistant surface coating.
【００５０】本発明の第７の放電による表面処理方法
は、上記第１ないし第６のいずれかの放電による表面処
理方法において、硬質材料が、ＴｉＣ、ＴｉＮ、ＴｉＣ
Ｎ、ＴｉＡｌＮ、ＴｉＢ2、ＷＣ、ＴａＣ、ＺｒＣ、Ｖ
ＣまたはＮｂＣであり、潤滑性材料が、ＢＮ、黒鉛、Ｍ
ｏＳ2、ＷＳ2、ふっ化黒鉛またはＳｉ3Ｎ4の方法で、硬
質部と潤滑部の両方を備え、潤滑性のある耐摩耗性の表
面被膜を得るという効果がある。According to a seventh aspect of the present invention, in the surface treatment method using any one of the first to sixth discharges, the hard material is TiC, TiN, TiC.
N, TiAlN, TiB 2 , WC, TaC, ZrC, V
C or NbC, and the lubricating material is BN, graphite, M
By the method of oS 2 , WS 2 , graphite fluoride or Si 3 N 4 , there is an effect of obtaining both a hard part and a lubricated part and obtaining a lubricating and wear-resistant surface coating.
【００５１】本発明の第８の放電による表面処理方法
は、上記第５または第６の放電による表面処理方法にお
いて、炭素と結合して硬質材料となる金属がＴｉ、Ｗ、
Ｖ、Ｔａ、ＮｂまたはＺｒの方法で、硬質部と潤滑部の
両方を備え、潤滑性のある耐摩耗性の表面被膜を得ると
いう効果がある。The eighth surface treatment method using electric discharge according to the present invention is the surface treatment method according to the fifth or sixth electric discharge, wherein the metal which becomes a hard material by combining with carbon is Ti, W,
The method of V, Ta, Nb or Zr has an effect of providing both a hard part and a lubricated part and obtaining a lubricating and wear-resistant surface coating.
【００５２】本発明の第９の放電による表面処理方法
は、上記第１ないし第８のいずれかの放電による表面処
理方法において、被処理材料の放電面を溶融するよう
に、電極と被処理材との間に電圧を印加する方法で、さ
らに密着性の強い表面処理膜が得られるという効果があ
る。A ninth surface treatment method using an electric discharge according to the present invention is the surface treatment method according to any one of the first to eighth discharges, wherein the electrode and the material to be treated are melted so as to melt the discharge surface of the material to be treated. By applying a voltage between the two, there is an effect that a surface treatment film having stronger adhesion can be obtained.
【００５３】本発明の第１の放電による表面処理用電極
は、加工液中で、電極と被処理材との間に電圧を印加し
て放電を発生させ、放電の熱作用により上記被処理材の
表面に表面処理層を形成する放電による表面処理に用い
られ、硬質材料と潤滑性材料とを有するもので、硬質部
と潤滑部の両方を備え、潤滑性のある耐摩耗性の表面被
膜を得るという効果がある。The electrode for surface treatment by the first discharge of the present invention generates a discharge by applying a voltage between the electrode and the material to be treated in a working fluid, and the material to be treated by the heat action of the discharge. It is used for surface treatment by electric discharge that forms a surface treatment layer on the surface of the material, and has a hard material and a lubricating material. There is an effect of obtaining.
【００５４】本発明の第２の放電による表面処理用電極
は、加工液中で、電極と被処理材との間に電圧を印加し
て放電を発生させ、放電の熱作用により上記被処理材の
表面に表面処理層を形成する放電による表面処理に用い
られ、炭素と結合して硬質材料となる金属と潤滑性材料
を有するもので、硬質部と潤滑部の両方を備え、潤滑性
のある耐摩耗性の表面被膜を得るという効果がある。The surface treatment electrode by the second discharge of the present invention generates a discharge by applying a voltage between the electrode and the material to be treated in the working fluid, and the material to be treated is heated by the discharge. It is used for surface treatment by electric discharge that forms a surface treatment layer on the surface of the material.It has a metal and a lubricating material that combines with carbon to become a hard material, and has both a hard part and a lubricating part, and has lubricity. There is an effect of obtaining a wear-resistant surface coating.
【００５５】本発明の第１の表面処理膜は、放電による
表面処理により被処理材に設けられ、硬質部と潤滑部と
を有するもので、潤滑性のある耐摩耗性の表面被膜を得
るという効果がある。The first surface treatment film of the present invention is provided on a material to be treated by surface treatment by electric discharge, has a hard portion and a lubricated portion, and obtains a lubricating and wear-resistant surface film. effective.
【００５６】本発明の第２の表面処理膜は、上記第１の
表面処理膜において、放電による表面処理が上記第１な
いし第９のいずれかの方法のもので、潤滑性のある耐摩
耗性の表面被膜を得るという効果がある。The second surface-treated film of the present invention is the first surface-treated film, wherein the surface treatment by discharge is performed by any one of the first to ninth methods, and the lubricating wear-resistant This has the effect of obtaining a surface coating.
【００５７】本発明の第３の表面処理膜は、上記第１の
表面処理膜において、表面処理膜が、被処理材の構成成
分と硬質部の構成成分とからなる中間層を介して設けら
れたもので、密着性が強いという効果がある。The third surface-treated film of the present invention is the first surface-treated film, wherein the surface-treated film is provided via an intermediate layer comprising a component of a material to be treated and a component of a hard part. The effect is that the adhesion is strong.
【図１】 本発明の実施の形態により得られた表面処理
された被処理材の断面図である。FIG. 1 is a cross-sectional view of a surface-treated material obtained according to an embodiment of the present invention.
【図２】 本発明の実施の形態により得られた表面処理
された被処理材の断面図である。FIG. 2 is a cross-sectional view of a surface-treated material obtained according to an embodiment of the present invention.
【図３】 一般的な放電加工による表面処理装置の構成
図である。FIG. 3 is a configuration diagram of a surface treatment apparatus using general electric discharge machining.
【図４】 本発明の実施の形態の表面処理用電極の構成
図である。FIG. 4 is a configuration diagram of a surface treatment electrode according to the embodiment of the present invention.
【図５】 本発明の実施の形態の表面処理用電極の構成
図である。FIG. 5 is a configuration diagram of a surface treatment electrode according to the embodiment of the present invention.
【図６】 従来の放電表面改質装置を示す説明図であ
る。FIG. 6 is an explanatory view showing a conventional discharge surface modification device.
【符号の説明】 １ 被処理材、２ 表面処理膜、３ 硬質部、４ 潤滑
部、５ 中間層、６被処理材、７ 表面処理用電極、８
加工液、１５ 加工槽、２１ 硬質材料、２２ 潤滑
性材料、２３ 炭素と結合して硬質材料となる金属。[Description of Signs] 1 Material to be treated, 2 Surface treatment film, 3 Hard part, 4 Lubricated part, 5 Intermediate layer, 6 Material to be treated, 7 Surface treatment electrode, 8
Working fluid, 15 Working tank, 21 Hard material, 22 Lubricating material, 23 Metal that combines with carbon to become a hard material.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 後藤 昭弘 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 Ｆターム(参考） 3C059 AA01 AB03 CK01 DC01 EA00 HA03 4K044 AA01 AB05 BA18 BA19 BB01 BC01 CA34 CA71 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akihiro Goto 2-3-2 Marunouchi, Chiyoda-ku, Tokyo F-term (reference) 3C059 AA01 AB03 CK01 DC01 EA00 HA03 4K044 AA01 AB05 BA18 BA19 BB01 BC01 CA34 CA71
Claims (14)
有する電極と被処理材との間に電圧を印加して放電を発
生させ、放電の熱作用により上記被処理材の表面に表面
処理層を形成する放電による表面処理方法において、上
記電極と加工液の構成材料が、硬質材料および潤滑性材
料、または硬質材料および潤滑性材料の元となる材料を
含有することを特徴とする放電による表面処理方法。1. A discharge is generated by applying a voltage between a conductive electrode and a material to be processed in a working fluid having a dielectric strength, and the surface of the material to be processed is surfaced by a heat action of the discharge. A surface treatment method by electric discharge for forming a treatment layer, wherein the constituent materials of the electrode and the working fluid contain a hard material and a lubricating material, or a material that is a source of the hard material and the lubricating material. Surface treatment method.
を特徴とする請求項１に記載の放電による表面処理方
法。2. The surface treatment method according to claim 1, wherein the electric discharge is performed under the electrode wear condition.
ることを特徴とする請求項１または請求項２に記載の放
電による表面処理方法。3. The surface treatment method according to claim 1, wherein the electrode contains a hard material and a lubricating material.
性材料を含有することを特徴とする請求項１または請求
項２に記載の放電による表面処理方法。4. The method according to claim 1, wherein the electrode contains a hard material, and the working fluid contains a lubricating material.
属と潤滑性材料を含有し、加工液が炭素を成分として含
有する液体であることを特徴とする請求項１または請求
項２に記載の放電による表面処理方法。5. The method according to claim 1, wherein the electrode contains a metal which becomes a hard material by bonding to carbon and a lubricating material, and the working fluid is a liquid containing carbon as a component. A surface treatment method by the above-described discharge.
属からなり、加工液が炭素を成分として含有する液体に
潤滑性材料を含有するものであることを特徴とする請求
項１または請求項２に記載の放電による表面処理方法。6. The method according to claim 1, wherein the electrode is made of a metal which becomes a hard material by bonding with carbon, and the working fluid contains a lubricating material in a liquid containing carbon as a component. Item 3. A surface treatment method by electric discharge according to item 2.
Ｎ、ＴｉＡｌＮ、ＴｉＢ2、ＷＣ、ＴａＣ、ＺｒＣ、Ｖ
ＣまたはＮｂＣであり、潤滑性材料が、ＢＮ、黒鉛、Ｍ
ｏＳ2、ＷＳ2、ふっ化黒鉛またはＳｉ3Ｎ4であることを
特徴とする請求項１ないし請求項６のいずれかに記載の
放電による表面処理方法。7. The hard material is TiC, TiN, TiC.
N, TiAlN, TiB 2 , WC, TaC, ZrC, V
C or NbC, and the lubricating material is BN, graphite, M
7. The surface treatment method according to claim 1, wherein the surface treatment is made of oS 2 , WS 2 , graphite fluoride or Si 3 N 4 .
ｉ、Ｗ、Ｖ、Ｔａ、ＮｂまたはＺｒであることを特徴と
する請求項５または請求項６に記載の放電による表面処
理方法。8. The metal which becomes a hard material by combining with carbon is T
7. The surface treatment method according to claim 5, wherein the surface treatment is i, W, V, Ta, Nb or Zr.
電極と被処理材との間に電圧を印加することを特徴とす
る請求項１ないし請求項８のいずれかに記載の放電によ
る表面処理方法。9. A method for melting a discharge surface of a material to be processed,
9. The surface treatment method according to claim 1, wherein a voltage is applied between the electrode and the material to be treated.
電圧を印加して放電を発生させ、放電加工の熱作用によ
り上記被処理材の表面に表面処理層を形成する放電加工
による表面処理に用いられ、硬質材料と潤滑性材料とを
有する放電による表面処理用電極。10. An electric discharge machining method in which a voltage is applied between an electrode and a material to be treated in a machining fluid to generate a discharge, and a surface treatment layer is formed on the surface of the material to be treated by a heat effect of the electric discharge machining. For surface treatment by electric discharge, having a hard material and a lubricating material, used for surface treatment by a material.
電圧を印加して放電を発生させ、放電加工の熱作用によ
り上記被処理材の表面に表面処理層を形成する放電加工
による表面処理に用いられ、炭素と結合して硬質材料と
なる金属と潤滑性材料を有する放電による表面処理用電
極。11. An electric discharge machining method in which a voltage is applied between an electrode and a material to be treated in a machining fluid to generate a discharge, and a surface treatment layer is formed on the surface of the material to be treated by a heat effect of the electric discharge machining. For surface treatment by electric discharge, which has a lubricating material and a metal which becomes a hard material by being combined with carbon and which is used for surface treatment with the carbon.
設けられ、硬質部と潤滑部とを有する表面処理膜。12. A surface treatment film provided on a material to be treated by surface treatment by electric discharge and having a hard part and a lubrication part.
請求項９のいずれかに記載の方法であることを特徴とす
る請求項１２に記載の表面処理膜。13. The surface treatment film according to claim 12, wherein the surface treatment by electric discharge is the method according to any one of claims 1 to 9.
硬質部の構成成分とからなる中間層を介して設けられた
ことを特徴とする請求項１２に記載の表面処理膜。14. The surface treatment film according to claim 12, wherein the surface treatment film is provided via an intermediate layer composed of a component of the material to be treated and a component of the hard portion.
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|---|---|---|---|
| JP2000090929A JP2001279465A (en) | 2000-03-29 | 2000-03-29 | Surface discharge treating method, electrode for surface treatment used therefor and obtained surface treated film |
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| WO2009096543A1 (en) * | 2008-01-30 | 2009-08-06 | Ihi Corporation | Discharge surface treatment method and coating block for discharge surface treatment |
| JP5168288B2 (en) * | 2008-01-30 | 2013-03-21 | 株式会社Ｉｈｉ | Discharge surface treatment method and discharge surface treatment coating block |
| US9478325B2 (en) | 2008-01-30 | 2016-10-25 | Ihi Corporation | Discharge surface treatment method and coating block for discharge surface treatments |
| CN103553618A (en) * | 2013-10-12 | 2014-02-05 | 山东大学 | Method for preparing ultrafine vanadium carbide reinforced ceramic tool material |
| CN103553618B (en) * | 2013-10-12 | 2015-04-01 | 山东大学 | Method for preparing ultrafine vanadium carbide reinforced ceramic tool material |
| CN110387527A (en) * | 2019-07-29 | 2019-10-29 | 缙云县先锋工具有限公司 | A kind of high rigidity self-lubricating composite coating and preparation method thereof for saw blade |
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