CN107354437B - A kind of multi-layer composite coatings improving saw blade cutting speed - Google Patents
A kind of multi-layer composite coatings improving saw blade cutting speed Download PDFInfo
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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Abstract
The invention belongs to cutting-tool engineering fields, specifically disclose a kind of multi-layer composite coatings and preparation method for improving saw blade cutting speed, it from inside to outside successively include bottom, buffer layer, enhancement layer, wearing layer, wherein bottom is Ti metal layer, buffer layer is TiN layer, enhancement layer is that multiple TiAlN single layers and TiCoN single layer are arranged alternately the composite layer to be formed, wearing layer is TiAlCoN layers, buffer layer successively includes the first TiN layer from inside to outside, second TiN layer, wherein the first TiN layer reclines Ti metal layer, second TiN layer reclines enhancement layer, Ti in wearing layer, Al, the atomic ratio of Co three is Ti:Al:Co=60:30:10.The hardness of multi-layer composite coatings of the invention is high, and coefficient of friction is low, and wear-resisting property is good, and high temperature resistance is good, is able to satisfy the biggish cutting speed of saw blade, and the stress inside multi-layer composite coatings is small, the high adhesion strength between circular saw blade substrate of intensity is high.
Description
Technical field
The invention belongs to cutting-tool engineering fields, and in particular to a kind of multi-layer composite coatings for improving saw blade cutting speed.
Background technique
Saw blade be for stone material, timber, metal, plastic or other material blank processing cutting tool, saw blade it is wear-resisting
Performance, hardness and high temperature resistant, corrosion resistance have the surface smoothness, precision and processing efficiency of cutting part important
It influences.The saw blade of the elements such as a kind of carbon containing volume of high-speed steel circular saw blade, tungsten, molybdenum, vanadium, heat with higher is hard after heat treatment
Property, wear-resisting property and heat-resisting ability, when cutting temperature is up to 600 DEG C, hardness is still without bright when cutting speed is up to 60 m/min or more
Aobvious decline.But as vapour rubs that manufacture, heavy industry be mechanical and the requirement of the manufacturing industry to the intensity, toughness of metal material etc. such as precision instrument
Higher and higher, the difficulty of machining is also increasing, proposes to the wear-resisting of cutting tool, hardness, heat resistance higher
It is required that.
It is in the prior art the hardness, the wear-resisting property that improve cutter, to guarantee suitable cutting speed and workpiece surface
Finish, machining accuracy are cut, it can be in tool surface setting hard coat such as TiN layer, AlTiN layer, Al2O3Layer etc., have compared with
High hardness and wear-resisting property.Current this hard coat develops to composite coating, nano-composite coating direction.Chinese patent
CN200910193492X, patent name TiN/(TiN+CrN)/Ti(CN) nano-composite coating and preparation method thereof, disclose by
The composite laminated coating of transition zone TiN film, (TiN+CrN) nano-composite coating and CrAlN nano-composite coating composition, has
High rigidity and high-temperature behavior.But the coefficient of friction of the composite laminated coating is high, wear-resisting property is general, and high-temperature behavior cannot
Meet more stringent high temperature requirement.
Summary of the invention
Machining Technology for Cutting is unable to satisfy to wear-resisting, the high temperature resistant of cutting tool for the coating on existing cutting tool
The higher and higher problem of the requirement of performance, the purpose of the present invention is to provide a kind of MULTILAYER COMPOSITEs for improving saw blade cutting speed
Coating, compared with existing hard coat, the coefficient of friction of the multi-layer composite coatings is low, and wearability is good, and saw blade is allowed to have
Biggish cutting speed, and hardness is good, high temperature resistant, and the adhesion strength of MULTILAYER COMPOSITE layer and saw blade is big, multi-layer composite coatings
Internal stress is small, and the intensity of multi-layer composite coatings is big.The object of the invention is also to provide prepare the MULTILAYER COMPOSITE to apply simultaneously
The method of layer.
The present invention provides the following technical solution:
A kind of multi-layer composite coatings improving saw blade cutting speed, the multi-layer composite coatings successively include from inside to outside
Bottom, buffer layer, enhancement layer, wearing layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is several TiAlN
Single layer and TiCoN single layer are arranged alternately the composite layer to be formed, and wearing layer is TiAlCoN layers.
In multi-layer composite coatings of the invention, bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is TiAlN single layer
With the composite layer of TiCoN single layer, heat-resistant layer is TiAlCoN layers, and TiAlN single layer is arranged alternately with TiCoN single layer in enhancement layer.Ti
Metal layer reduces the internal stress between multi-layer composite coatings and circular saw blade substrate, improves the toughness of multi-layer composite coatings and strong
Degree, buffer layer, enhancement layer make the stress inside multi-layer composite coatings smoothly transition and decay from inside to outside, and strengthen more
Adhesion strength inside layer composite coating.TiAlN single layer is arranged alternately with TiCoN single layer in enhancement layer, on the one hand makes buffer layer
Stress wave transmitting between heat-resistant layer weakens influence of the ambient pressure to multi-layer composite coatings, on the other hand adjacent
TiAlN single layer and TiCoN single layer are respectively formed two ternary phases, have different elastic properties, and it is multiple to have dispersed multilayer well
Close the pressure of coat inside.It can regard that Al is added to TiCoN or Co is added to TiAlN in heat-resistant layer TiAlCoN as, to expand
The ingredient section for opening up the spinodal decomposition of TiCoN or TiAlN, promotes the generation of spinodal decomposition.Simultaneously under the high temperature conditions, quaternary phase
TiAlCoN occurs spinodal decomposition and ternary phase TiCoN or TiAlN is precipitated, and ternary phase TiCoN or TiAlN occur spinodal decomposition and be precipitated
Binary cubic phase TiN and AlN, CoN, the aging hardening effect caused in decomposable process make the mechanical property of multi-layer composite coatings
Can greatly improve, and Ti metal layer, TiN layer, TiCoN/TiAlN, TiAlCoN layers set gradually make later layer decompose generate
The influence of residual stress greatly weaken, to make multi-layer composite coatings that there is preferable high temperature resistant, durability performance and lower
Coefficient of friction, improve the cutting speed of saw blade.
As an improvement of the present invention, the buffer layer from inside to outside successively include the first TiN layer, the second TiN layer,
In the first TiN layer recline Ti metal layer, the second TiN layer reclines enhancement layer, the second TiN layer, TiAlN single layer and TiCoN single layer
The mass fraction of middle Ti is identical and mass fraction less than Ti in the first TiN layer, and the first TiN layer is thicker than the second TiN layer by 100~
200 nm.Guarantee the stress smooth transfer inside multi-layer composite coatings and gradually weaken, strengthens the intensity of multi-layer composite coatings.
As an improvement of the present invention, the atomic ratio of Ti, Al, Co three are Ti:Al:Co=60 in the wearing layer:
30:10.Coating surface generates very thin amorphous state Al when higher Al concentration facilitates machining2O3, form hard inertia and protect
Cuticula improves the ability that multi-layer composite coatings adapt to high-speed cutting processing.Co, which is added in TiAlN, promotes spinodal decomposition section
Extension, improves the high temperature resistance and wearability of heat-resistant layer.
As an improvement of the present invention, the multi-layer composite coatings with a thickness of 4~6 μm, wherein bottom with a thickness of
80~180 nm, enhancement layer with a thickness of 1.5~2.4 μm, wearing layer with a thickness of 1.42~2.42 μm, remainder is buffer layer
Thickness, TiAlN single layer is identical as the thickness of TiCoN single layer in enhancement layer, and the total thickness of adjacent TiAlN single layer and TiCoN single layer
Degree is 100~150 nm.Multi-layer composite coatings form stronger wear-resisting, high temperature resistance under relatively thin thickness condition, and
The reinforcement unit of 10~24 adjacent TiAlN single layers and TiCoN single layer composition is formed in multi-layer composite coatings.
A kind of preparation method for the multi-layer composite coatings improving saw blade cutting speed, comprising the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in the nonionic surfactant solution that mass concentration is 5%~10%
It is placed in acetone and is cleaned by ultrasonic again after soaking and washing, aeration-drying is placed on 280~360 DEG C of calcinings, 1~3 hour natural cooling
To room temperature；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 ×
10-1Then Pa is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, being passed through argon gas into furnace body makes pressure rise to 2Pa,
Open Ti target, 2~3A of electric current, bias -75~-95V, the depositing Ti metal layer 8~14 minutes on circular saw blade substrate surface；
(3) buffer layer prepare: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, Ti target current be electric current 2~
3A, bias are to deposit the first TiN layer 5~7 minutes under -75~-95V in Ti layer on surface of metal, and then passing to nitrogen makes pressure liter
To 4Pa, the second TiN layer is deposited in the first TiN layer, sedimentation time 3.2~4.6 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: being separately turned on TiAl alloy target, TiCo alloys target, electrical current is 4~6A, bias -90
~-120V, depositing Ti AlN single layer when circular saw blade substrate turns to TiAl alloy target, circular saw blade substrate turn to heavy when TiCo alloys target
Product TiCoN single layer, so that TiAlN single layer and TiCoN single layer alternating deposit be made to form enhancement layer, sedimentation time is 14~18 points
Clock；
(5) prepared by wearing layer: opening TiAlCo alloys target, electrical current is 7~9A, bias -124~-136V, in annular saw
Depositing Ti AlCoN layers on sheet matrix, sedimentation time is 14~16 minutes；
(6) by step (5), treated that saw blade is placed in soaking and washing in above-mentioned nonionic surfactant solution and leads to
It air-dries dry.
As a kind of improvement of the method for the present invention, the material of the circular saw blade substrate is high-speed steel.
As a kind of improvement of the method for the present invention, ionic surfactant is polyoxyethylate amide, polyoxyethylene nonyl phenyl second
One of alkene ether or anhydrous sorbitol.
As a kind of improvement of the method for the present invention, crystallite dimension is 2~4 nm in heat-resistant layer.
The cementitiousness of multi-layer composite coatings through above method preparation is strong, and high temperature resistant, corrosion-resistant, wear-resisting poor performance are good,
It can satisfy the requirement of high-speed cutting, applied at elevated temperature.Non-ionic surfactant is used in the cleaning process of circular saw blade substrate
Agent soaking and washing, and calcine and deoil, the damage for avoiding circular saw blade substrate from being subject in pretreatment process.Finally formed heat-resistant layer
In crystallite dimension be 2~4 nm, the nano-scale of heat-resistant layer further enhances the wearability of multi-layer composite coatings, heat-resisting resistance to
Oxidation susceptibility, coefficient of friction is small, and hardness is high.
Beneficial effects of the present invention are as follows:
The multi-layer composite coatings of raising saw blade cutting speed of the invention are compared with existing hard coat, and hardness is more
Height, coefficient of friction is low, and wear-resisting property is good, and high temperature resistance is good, is able to satisfy biggish cutting speed, and in multi-layer composite coatings
The stress in portion is small, and intensity is high, and the adhesion strength between multi-layer composite coatings and circular saw blade substrate is high.
Specific embodiment
A specific embodiment of the invention is described further below.
Unless otherwise instructed, raw material employed in the present invention is commercially available or commonly used in the art, such as
Without special instruction, the method in following embodiments is the conventional method of this field.
Embodiment 1
A kind of multi-layer composite coatings improving saw blade cutting speed successively include bottom, buffer layer, reinforcement from inside to outside
Layer, wearing layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is that several TiAlN single layers and TiCoN single layer are handed over
For the composite layer that setting is formed, wearing layer is TiAlCoN layers, and buffer layer successively includes the first TiN layer, the 2nd TiN from inside to outside
Layer, the Ti metal layer wherein the first TiN layer reclines, the second TiN layer recline enhancement layer, the second TiN layer, TiAlN single layer and TiCoN
The mass fraction of Ti is identical in single layer and mass fraction less than Ti in the first TiN layer, the first TiN layer are thicker than the second TiN layer by 100
Nm, the atomic ratio of Ti, Al, Co three are preferably Ti:Al:Co=60:30:10 in wearing layer.Multi-layer composite coatings with a thickness of
4 μm, wherein bottom with a thickness of 80 nm, enhancement layer with a thickness of 1.5 μm, wearing layer with a thickness of 1.42 μm, buffer layer
With a thickness of 1 μm, TiAlN single layer is identical as the thickness of TiCoN single layer in enhancement layer, and adjacent TiAlN single layer and TiCoN single layer
Overall thickness be 100 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprising the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in 30 DEG C of nonionic surfactant solution soaking and washing 1 hour
It is placed in acetone and is cleaned by ultrasonic again afterwards, then aeration-drying, then be placed at 280 DEG C and calcine 3 hours cooled to room temperatures,
The material of middle circular saw blade substrate is high-speed steel, and nonionic surface active agent is preferably polyoxyethylate amide, mass concentration 5%；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa, then
It is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens Ti target, electricity
Flow 2A, bias -75V, the depositing Ti metal layer 8 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2A, partially in Ti target current
Pressure is to deposit the first TiN layer 5 minutes under -75V in Ti layer on surface of metal, and then passing to nitrogen makes pressure rise to 4Pa, first
Deposit the second TiN layer in TiN layer, sedimentation time 3.2 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: being separately turned on TiAl alloy target, TiCo alloys target, electrical current 4A, bias -90V, circle
Depositing Ti AlN single layer when saw bit matrix turns to TiAl alloy target, depositing Ti CoN is mono- when circular saw blade substrate turns to TiCo alloys target
Layer, so that TiAlN single layer and TiCoN single layer alternating deposit be made to form enhancement layer, sedimentation time is 14 minutes；
(5) prepared by wearing layer: opening TiAlCo alloys target, electrical current 7A, bias -124V, on circular saw blade substrate
AlCoN layers of depositing Ti, sedimentation time is 14 minutes；
(6) by step (5), treated that saw blade is placed in soaking and washing in above-mentioned nonionic surfactant solution and leads to
It air-dries dry.
The crystallite dimension of heat-resistant layer is 2~4 nm, coefficient of friction 0.57 in the multi-layer composite coatings of above method preparation
± 0.03, the maximum operation (service) temperature of permission is 1180 DEG C, and vickers hardness hv value is 3640, and the maximum cutting speed of permission is 132
M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
Embodiment 2
A kind of multi-layer composite coatings improving saw blade cutting speed successively include bottom, buffer layer, reinforcement from inside to outside
Layer, wearing layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is that several TiAlN single layers and TiCoN single layer are handed over
For the composite layer that setting is formed, wearing layer is TiAlCoN layers, and buffer layer successively includes the first TiN layer, the 2nd TiN from inside to outside
Layer, the Ti metal layer wherein the first TiN layer reclines, the second TiN layer recline enhancement layer, the second TiN layer, TiAlN single layer and TiCoN
The mass fraction of Ti is identical in single layer and mass fraction less than Ti in the first TiN layer, the first TiN layer are thicker than the second TiN layer by 100
~200 nm, the atomic ratio of Ti, Al, Co three are preferably Ti:Al:Co=60:30:10 in wearing layer.Multi-layer composite coatings
With a thickness of 5 μm, wherein bottom with a thickness of 130 nm, enhancement layer with a thickness of 1.95 μm, wearing layer with a thickness of 1.92 μm,
Buffer layer with a thickness of 1 μm, TiAlN single layer is identical as the thickness of TiCoN single layer in enhancement layer, and adjacent TiAlN single layer with
The overall thickness of TiCoN single layer is 125 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprising the following steps:
(1) it cleans oil removing: it is small that circular saw blade substrate being placed in soaking and washing 1.5 in 25 DEG C of nonionic surfactant solution
Shi Houzai, which is placed in acetone, to be cleaned by ultrasonic, then aeration-drying, then is placed at 320 DEG C and is calcined 2 hours cooled to room temperatures,
Wherein the material of circular saw blade substrate is high-speed steel, and nonionic surface active agent is preferably nonylphenol polyoxyethylene ether, and quality is dense
Degree is 7%；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 4 × 10-1Pa, then
It is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens Ti target, electricity
Flow 2.5A, bias -80V, the depositing Ti metal layer 11 minutes on circular saw blade substrate surface；
(3) buffer layer prepare: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, Ti target current be electric current 2.5A,
Bias is to deposit the first TiN layer 6 minutes under -80V in Ti layer on surface of metal, and then passing to nitrogen makes pressure rise to 4Pa, first
Deposit the second TiN layer in TiN layer, sedimentation time 3.9 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: being separately turned on TiAl alloy target, TiCo alloys target, electrical current 5A, bias -105V, circle
Depositing Ti AlN single layer when saw bit matrix turns to TiAl alloy target, depositing Ti CoN is mono- when circular saw blade substrate turns to TiCo alloys target
Layer, so that TiAlN single layer and TiCoN single layer alternating deposit be made to form enhancement layer, sedimentation time is 16 minutes；
(5) prepared by wearing layer: opening TiAlCo alloys target, electrical current 8A, bias -130V, on circular saw blade substrate
AlCoN layers of depositing Ti, sedimentation time is 15 minutes；
(6) by step (5), treated that saw blade is placed in soaking and washing in above-mentioned nonionic surfactant solution and leads to
It air-dries dry.
The crystallite dimension of heat-resistant layer is 2~4 nm, coefficient of friction 0.57 in the multi-layer composite coatings of above method preparation
± 0.03, the maximum operation (service) temperature of permission is 1180 DEG C, and vickers hardness hv value is 3640, and the maximum cutting speed of permission is 132
M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
Embodiment 3
A kind of multi-layer composite coatings improving saw blade cutting speed successively include bottom, buffer layer, reinforcement from inside to outside
Layer, wearing layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is that several TiAlN single layers and TiCoN single layer are handed over
For the composite layer that setting is formed, wearing layer is TiAlCoN layers, and buffer layer successively includes the first TiN layer, the 2nd TiN from inside to outside
Layer, the Ti metal layer wherein the first TiN layer reclines, the second TiN layer recline enhancement layer, the second TiN layer, TiAlN single layer and TiCoN
The mass fraction of Ti is identical in single layer and mass fraction less than Ti in the first TiN layer, the first TiN layer are thicker than the second TiN layer by 200
Nm, the atomic ratio of Ti, Al, Co three are preferably Ti:Al:Co=60:30:10 in wearing layer.Multi-layer composite coatings with a thickness of
6 μm, wherein 80~180 nm of thickness of bottom, enhancement layer with a thickness of 2.4 μm, wearing layer with a thickness of 2.42 μm, remainder is
The thickness of buffer layer, TiAlN single layer is identical as the thickness of TiCoN single layer in enhancement layer, and adjacent TiAlN single layer and TiCoN are mono-
The overall thickness of layer is 150 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprising the following steps:
(1) it cleans oil removing: circular saw blade substrate being placed in 20 DEG C of nonionic surfactant solution soaking and washing 2 hours
It is placed in acetone and is cleaned by ultrasonic again afterwards, then aeration-drying, then be placed at 360 DEG C and calcine 1 hour cooled to room temperature,
The material of middle circular saw blade substrate is high-speed steel, and nonionic surface active agent is preferably anhydrous sorbitol, mass concentration 10%；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 5 × 10-1Pa, then
It is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens Ti target, electricity
Flow 3A, bias -95V, the depositing Ti metal layer 14 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 3A, partially in Ti target current
Pressure is to deposit the first TiN layer 7 minutes under -95V in Ti layer on surface of metal, and then passing to nitrogen makes pressure rise to 4Pa, first
The second TiN layer is deposited in TiN layer, 3.2~4.6 minutes when deposition, to be prepared into buffer layer；
(4) prepared by enhancement layer: being separately turned on TiAl alloy target, TiCo alloys target, electrical current 6A, bias -120V, circle
Depositing Ti AlN single layer when saw bit matrix turns to TiAl alloy target, depositing Ti CoN is mono- when circular saw blade substrate turns to TiCo alloys target
Layer, so that TiAlN single layer and TiCoN single layer alternating deposit be made to form enhancement layer, sedimentation time is 18 minutes；
(5) prepared by wearing layer: opening TiAlCo alloys target, electrical current 9A, bias -136V, on circular saw blade substrate
AlCoN layers of depositing Ti, sedimentation time is 16 minutes；
(6) by step (5), treated that saw blade is placed in soaking and washing in above-mentioned nonionic surfactant solution and leads to
It air-dries dry.
The crystallite dimension of heat-resistant layer is 2~4 nm, coefficient of friction 0.57 in the multi-layer composite coatings of above method preparation
± 0.03, the maximum operation (service) temperature of permission is 1180 DEG C, and vickers hardness hv value is 3640, and the maximum cutting speed of permission is 132
M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
The hardness of multi-layer composite coatings of the invention is high, and coefficient of friction is low, and wear-resisting property is good, high temperature resistant is good, is able to satisfy circle
The biggish cutting speed of saw blade, and the stress of coat inside is small, the high adhesion strength between circular saw blade substrate of intensity is high.
Claims (6)
1. it is a kind of improve saw blade cutting speed multi-layer composite coatings, which is characterized in that the multi-layer composite coatings from it is inner to
It outside successively include bottom, buffer layer, enhancement layer, wearing layer, wherein bottom is Ti metal layer, and buffer layer is TiN layer, and enhancement layer is
Several TiAlN single layers and TiCoN single layer are arranged alternately the composite layer to be formed, and wearing layer is TiAlCoN layers；
The buffer layer is from inside to outside successively including the first TiN layer, the second TiN layer, the Ti metal layer wherein the first TiN layer reclines,
Second TiN layer reclines enhancement layer, and the mass fraction of Ti is identical in the second TiN layer, TiAlN single layer and TiCoN single layer and is less than
The mass fraction of Ti in first TiN layer, the first TiN layer are 100~200nm thicker than the second TiN layer；
The multi-layer composite coatings with a thickness of 4~6 μm, wherein bottom with a thickness of 80~180nm, enhancement layer with a thickness of
1.5~2.4 μm, wearing layer with a thickness of 1.42~2.42 μm, remainder is the thickness of buffer layer, in enhancement layer TiAlN single layer with
The thickness of TiCoN single layer is identical, and the overall thickness of adjacent TiAlN single layer and TiCoN single layer is 100~150nm.
2. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, which is characterized in that described wear-resisting
The atomic ratio of Ti, Al, Co three are Ti:Al:Co=60:30:10 in layer.
3. a kind of preparation method of the multi-layer composite coatings of raising saw blade cutting speed as described in claim 1 to 2 is any,
The following steps are included:
(1) it cleans oil removing: circular saw blade substrate being placed in the nonionic surfactant solution that mass concentration is 5%~10% and is soaked
It is placed in acetone and is cleaned by ultrasonic again after bubble cleaning, aeration-drying is placed on 280~360 DEG C of calcinings and naturally cools to room in 1~3 hour
Temperature；
(2) prepared by bottom: circular saw blade substrate after cooling being placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 × 10- 1Then Pa is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into furnace body makes pressure rise to 2Pa, opens
Ti target, 2~3A of electric current, bias -75~-95V, the depositing Ti metal layer 8~14 minutes on circular saw blade substrate surface；
(3) prepared by buffer layer: being passed through nitrogen into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target current
Pressure is to deposit the first TiN layer 5~7 minutes under -75~-95V in Ti layer on surface of metal, and then passing to nitrogen makes pressure rise to 4Pa,
Deposit the second TiN layer in the first TiN layer, sedimentation time 3.2~4.6 minutes, to be prepared into buffer layer；
(4) prepared by enhancement layer: it is separately turned on TiAl alloy target, TiCo alloys target, electrical current is 4~6A, bias -90~-
120V, depositing Ti AlN single layer when circular saw blade substrate turns to TiAl alloy target, circular saw blade substrate deposit when turning to TiCo alloys target
TiCoN single layer, so that TiAlN single layer and TiCoN single layer alternating deposit be made to form enhancement layer, sedimentation time is 14~18 minutes；
(5) prepared by wearing layer: opening TiAlCo alloys target, electrical current is 7~9A, bias -124~-136V, in annular saw chip base
Depositing Ti AlCoN layers on body, sedimentation time is 14~16 minutes；
(6) it by step (5) treated saw blade is placed in above-mentioned nonionic surfactant solution soaking and washing and divulges information dry
It is dry.
4. the preparation method of the multi-layer composite coatings according to claim 3 for improving saw blade cutting speed, feature exist
In the material of the circular saw blade substrate is high-speed steel.
5. the preparation method of the multi-layer composite coatings according to claim 3 for improving saw blade cutting speed, feature exist
In nonionic surface active agent is one of polyoxyethylate amide, nonylphenol polyoxyethylene ether or anhydrous sorbitol.
6. the preparation method of the multi-layer composite coatings according to claim 3 for improving saw blade cutting speed, feature exist
In crystallite dimension is 2~4nm in wearing layer.
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| CN110387527B (en) * | 2019-07-29 | 2021-07-13 | 缙云县先锋工具有限公司 | High-hardness self-lubricating composite coating for circular saw blade and preparation method thereof |
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