CN110343993A - A kind of carbide surface processing method and application - Google Patents
A kind of carbide surface processing method and application Download PDFInfo
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- CN110343993A CN110343993A CN201910726962.8A CN201910726962A CN110343993A CN 110343993 A CN110343993 A CN 110343993A CN 201910726962 A CN201910726962 A CN 201910726962A CN 110343993 A CN110343993 A CN 110343993A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/20—Carburising
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/24—Nitriding
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention belongs to cemented carbide material technical field more particularly to a kind of carbide surface processing method and applications.The present invention provides a kind of carbide surface processing methods, in the carbide surface processing method, case-carbonizing processing or surface carburization processing are carried out to hard alloy, obtained hard alloy has surface Co layers poor, the Co in hard alloy can be effectively inhibited to spread to coating, the thermal expansion matching of coating and hard alloy is improved, improve the mechanical performance under coating high-temp, the usage performance of coating significantly improves, the service life of AlTiN coating is extended, mechanical performance is high at high temperature, wearability is good, cutting ability is excellent for product.
Description
Technical field
The invention belongs to cemented carbide material technical field more particularly to a kind of carbide surface processing method and answer
With.
Background technique
Hard alloy is widely used in manufacturing industry due to its high rigidity and high-wearing feature as cutting tool material.
AlTiN coating due to having the characteristics that hardness is high, film-film-substrate binding strength is high, coefficient of friction is small, oxidizing temperature is up to 800 DEG C or more,
It is current mainstream cutter coat, is particularly suitable for the materials such as cutting high-temperature alloy steel, stainless steel, titanium alloy, nickel-base alloy.So
And it is more serious to coating diffusion ratio as the Co of Binder Phase in hard alloy at high temperature, coating mechanical performance is decreased obviously, and is applied
Layer cutting-tool's used life significantly reduces.In addition, the thermal expansion coefficient of Co is larger (about the 3.2 of WC times), produced after expanded by heating
Raw internal stress easily make coating cracking failure (Tang Weizhong etc., a method of preparing diamond coatings on sintered-carbide tool,
CN1632165A, 2004-12-28).
In order to inhibit the Co in hard alloy to spread to coating, Research Thinking is mainly divided to two kinds, and one is use chemistry de-
Cobalt method, plasma etching method etc. pre-process matrix surface, reduce the Co content of matrix surface, improve coating initial stage
Growth pattern, nitride coatings (CrN, TiN etc.) are grown on the surface Co again forming core, raw for extension on WC and cubic carbide
It is long.Another kind be addition transition zone (in Sheng Wang etc., a kind of preparation method of hard alloy tool diamond interlayer,
CN102268653A, 2011-06-24), the metal intermediate layers such as preplating Ti, Cr between matrix and coating increase binding force, subtract
The internal stress of small coating and matrix, while hindering diffusion of the Co to coating.
Although preparing AlTiN coating on the hard alloy of the poor Co in surface, AlTiN coating can be improved to a certain extent
Usage performance, but remove hard alloy surface layer cobalt method have certain limitation.The de- cobalt method (Michael of chemistry
G.Peters et al,Cemented Tungsten Carbide Substrates having adherent Diamond
Films Coating Thereon, US5567526A, 1991-4-26) although the Co on hard alloy surface layer can be removed,
It is loose to will cause surface structure, coating cracking can be caused to fail in its surface layer prepares coating；Although plasma etching method can
Achieve the purpose that Co is removed on hard alloy surface layer, but it is expensive and be unsuitable for handling the matrix of complicated shape.It is closed in hard
Preplating middle layer can obtain the new superficial layer that surface is free of cobalt on gold, although the diffusion of Co can be delayed to a certain extent,
But the finite thickness of middle layer, the Co in military service hard alloy can still be spread to coating under the high temperature conditions for a long time, cause to apply
Layer failure.
Summary of the invention
In view of this, the present invention provides a kind of carbide surface processing method and applications, for solving the prior art
Inhibit hard alloy in Co to coating diffusion will cause surface structure it is loose, it is expensive, will cause the problem of coating failure.
The specific technical solution of the present invention is as follows:
A kind of carbide surface processing method, comprising the following steps:
Case-carbonizing processing or surface carburization processing are carried out to hard alloy, then successively sunk on the surface of the hard alloy
Product CrN transition zone and AlTiN surface functional layer, obtain product；
Wherein, the hard alloy handled through case-carbonizing processing or surface carburization includes that core and surface are Co layers poor,
During the surface is Co layers poor the mass fraction of Co be core Co mass fraction 25%~66.6%, preferably 33.3%~
50%；
The CrN transition zone is deposited on the surface of the hard alloy, and the AlTiN surface functional layer is deposited on described
The surface of CrN transition zone.
Referring to Fig. 1, be a kind of schematic diagram of product structure that carbide surface processing method obtains provided by the invention,
The product that carbide surface processing method of the present invention obtains includes hard alloy 1, CrN transition zone 3 and AlTiN surface functional layer
4, hard alloy 1 includes the poor Co layer 2 of core and surface, and CrN transition zone 3 is deposited on the surface of hard alloy 1, AlTiN surface work
Ergosphere 4 is deposited on the surface of CrN transition zone 3.
In the present invention, case-carbonizing processing is carried out to hard alloy or surface carburization is handled, through case-carbonizing processing or table
The hard alloy that face Nitrizing Treatment obtains has outer hard interior tough material structure, and hard alloy has surface Co layers poor, Neng Gouyou
Effect inhibits the Co in hard alloy to spread to coating, and the thermal expansion matching of coating and hard alloy is improved, and improves painting
Mechanical performance under layer high temperature, the usage performance of coating significantly improve, and extend the service life of AlTiN coating, obtained production
Mechanical performance is high at high temperature, wearability is good, cutting ability is excellent for product.
Preferably, poor Co layers of the surface with a thickness of 0.01mm~1mm, more preferably 1mm, 0.8mm or 0.4mm；
The CrN transition zone with a thickness of 0.5 μm~2 μm, more preferably 1.0 μm, 1.2 μm or 1.4 μm；
The AlTiN surface functional layer with a thickness of 2 μm~8 μm, more preferably 2.5 μm, 3.0 μm or 3.5 μm.
Preferably, the atomic percent of Cr is 35at%~70at% in the CrN transition zone, and the atomic percent of N is
30at%~65at%, it is furthermore preferred that Cr:55at%, N:45at% or Cr:58at%, N:42at% or Cr:57at%, N:
43at%；
The atomic percent of Al is 20at%~45at% in the AlTiN surface functional layer, and the atomic percent of Ti is
The atomic percent of 15at%~40at%, N be 30at%~65at%, more preferably 35at%~60at%, further it is excellent
It selects, Al:30at%, Ti:28at%, N:42at% or Al:32at%, Ti:24at%, N:44at% or Al:25at%,
Ti:32at%, N:43at%.
Preferably, the hard alloy is WC-Co hard alloy, WC-Ti-Co hard alloy or WC-Ti-Ta-Co hard
Alloy.
Preferably, the condition of the case-carbonizing processing specifically:
The hard alloy is placed in hydrogen atmosphere furnace, 800 DEG C~900 DEG C pre-sintering 0.5h is heated to, is again heated to
1300 DEG C~1320 DEG C heat preservation 0.5h~1.5h carry out Carburization Treatment, and carburizing carbon source is acetylene, and the hydrogen and the acetylene are logical
The flow-rate ratio entered is 100:2~100:10；
The condition of the surface carburization processing specifically:
The hard alloy is placed in vacuum sintering furnace, the vacuum sintering furnace is evacuated to 10Pa hereinafter, being heated to
350 DEG C~380 DEG C heat preservation 1.5h~3h, then it is passed through nitrogen, it is heated to 1440 DEG C~1450 DEG C 1.2~1.8h of heat preservation and carries out nitriding
Processing.The nitrogen being passed through in surface carburization processing is high pure nitrogen, and nitrogen gas purity is more than or equal to 99.99%.
In the present invention, hard alloy is WC-Co hard alloy, preferably progress case-carbonizing processing, and WC-Co hard alloy is
Homogeneous hard alloy, the mass fraction of Co are preferably 5%~15%.
Hard alloy is WC-Ti-Co hard alloy or WC-Ti-Ta-Co hard alloy, preferably carries out surface carburization processing,
WC-Ti-Co hard alloy or WC-Ti-Ta-Co hard alloy are homogeneous alloy.Wherein, in WC-Ti-Ta-Co hard alloy, Co
Mass fraction be 6%~12%, Ti mass fraction be 2%~5%, Ta mass fraction be 0~2%.
Preferably, the condition of CrN transition zone is deposited specifically:
Using metal Cr as target, vacuum room temperature be 300~450 DEG C, be passed through nitrogen flow velocity be 200sccm~
450sccm, vacuum chamber pressure are 0.6Pa~3.0Pa, and substrate negative voltage is -70~-180V, and it is 70A that arc power, which exports electric current,
~120A, sedimentation time are 10min~50min.
Preferably, the condition of depositing Al TiN surface functional layer specifically:
Using AlTi as target, vacuum room temperature is 300~450 DEG C, and the flow velocity for being passed through nitrogen is 250sccm~500sccm,
Vacuum chamber pressure is 1.0Pa~3.0Pa, and substrate negative voltage is -100~-180V, and it is 80A~150A that arc power, which exports electric current,
Sedimentation time is 40min~120min.
Preferably, after case-carbonizing processing or surface carburization are handled, before deposition CrN transition zone, further includes: aura is clear
It washes；
The aura cleaning includes: specifically that vacuum chamber is warming up to 300~450 DEG C, extremely to the vacuum chamber
2.0*10-3~8.0*10-3The argon gas that Pa, Xiang Suoshu vacuum chamber are passed through 150sccm~450sccm adjusts working bias voltage to -600
~-1100V carries out aura to the carbide surface and cleans 20min~50min.
After case-carbonizing processing or surface carburization processing, before aura cleaning, it is also preferable to include: hard alloy is carried out
Surface clean specifically includes: mirror surface is polished to hard alloy, then respectively with acetone and alcohol ultrasonic cleaning 15min~
It is dry after 30min, it is put into vacuum chamber.
Preferably, after depositing Al TiN surface functional layer, before obtaining product, further includes:
Nitrogen is passed through to vacuum chamber to be cooled down.Vacuum chamber is cooled to room temperature, and obtains product.
Carbide surface processing method of the present invention need to only carry out at case-carbonizing or surface carburization reinforcing hard alloy
Reason, can remove the Co in hard alloy surface layer, be not necessarily to additional treatments technique, and operation is relatively simple, and applies arc ion plating
Technology selects suitable deposition parameter, and the more excellent AlTiN coating of mechanical performance under high temperature can be obtained.
The present invention also provides the products that carbide surface processing method obtains described in above-mentioned technical proposal in skiver
Application in tool.
In conclusion the present invention provides a kind of carbide surface processing methods, comprising the following steps: to hard alloy
Case-carbonizing processing or surface carburization processing are carried out, then is sequentially depositing CrN transition zone and AlTiN on the surface of the hard alloy
Surface functional layer obtains product；Wherein, the hard alloy handled through case-carbonizing processing or surface carburization include core and
Surface is Co layers poor, and the mass fraction of Co is the 25%~66.6% of the mass fraction of core Co during the surface is Co layers poor；It is described
CrN transition zone is deposited on the surface of the hard alloy, and the AlTiN surface functional layer is deposited on the table of the CrN transition zone
Face.In carbide surface processing method of the present invention, case-carbonizing processing is carried out to hard alloy or surface carburization is handled, is obtained
Hard alloy have surface Co layer poor, can effectively inhibit Co in hard alloy to coating diffusion, coating and hard alloy
Thermal expansion matching improved, improve the mechanical performance under coating high-temp, the usage performance of coating significantly improves, extend
The service life of AlTiN coating, mechanical performance is high at high temperature, wearability is good, cutting ability is excellent for product, is able to solve existing
Have technology inhibit hard alloy in Co to coating diffusion will cause surface structure it is loose, it is expensive, will cause coating failure
The problem of.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described.
Fig. 1 is a kind of schematic diagram of product structure that carbide surface processing method obtains provided by the invention；
Fig. 2 is mass fraction distributions of 1 hard alloy of the embodiment of the present invention from a surface to the Co of core；
Fig. 3 is interface element distribution map of 1 product of the embodiment of the present invention after 800 DEG C of annealing 2h；
Fig. 4 is interface element distribution map of 1 product of comparative example of the present invention after 800 DEG C of annealing 2h；
Fig. 5 is the hardness and elastic modulus variation diagram (H of the embodiment of the present invention 1 and 1 product of comparative example in 800 DEG C of annealing 2h
Refer to hardness, E refers to elastic modulus change figure)；
Fig. 6 is cutter made of 2 product of 3 product of the embodiment of the present invention and comparative example in Vc=250m/min, ap=
The working durability curve graph of SKD11 mould steel is cut under the machining condition of 0.5mm, f=0.1mm/r；
It illustrates: 1. hard alloy；2. surface is Co layers poor；3.CrN transition zone；4.AlTiN surface functional layer.
Specific embodiment
The present invention provides a kind of carbide surface processing method and applications, inhibit hard to close for solving the prior art
Co in gold to coating diffusion will cause surface structure it is loose, it is expensive, will cause the problem of coating failure.
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
Embodiment 1
The surface treatment of the present embodiment progress hard alloy, comprising the following steps:
1) surface preparation is carried out to WC-8%Co hard alloy: WC-8%Co hard alloy is carried out at case-carbonizing
Reason, specifically: using WC-8%Co hard alloy as sample, sample is placed in hydrogen atmosphere furnace, is heated to 800 DEG C of pre-sinterings
0.5h is then heated to 1320 DEG C of heat preservation 1h and carries out Carburization Treatment, and acetylene is passed through flow-rate ratio as carburizing carbon source, hydrogen and acetylene
For 100:3.
2) surface clean is carried out to the hard alloy that case-carbonizing is handled: the hard that case-carbonizing is handled is closed
Gold is polished, polished first to use acetone ultrasonic cleaning hard alloy 15min to mirror surface then hard with alcohol ultrasonic cleaning
Then hard alloy is air-dried and is put into vacuum chamber by matter alloy 15min.
3) aura cleaning is carried out to hard alloy: vacuum chamber is warming up to 350 DEG C, to vacuum chamber to 5.0*10- 3Pa is passed through the argon gas of 300sccm to vacuum chamber, adjusts working bias voltage to -1000V, carries out aura cleaning to carbide surface
30min。
4) deposit CrN transition zone: adjustment vacuum room temperature is passed through the nitrogen of 300sccm to vacuum chamber to 350 DEG C, adjusts
The chamber of vacuum chamber is depressed into 1.2Pa, and substrate negative voltage is adjusted to -100V, lights Cr target, it is 80A, deposition that arc power, which exports electric current,
Time is 20min.
5) depositing Al TiN surface functional layer: adjustment vacuum room temperature is passed through the nitrogen of 300sccm to vacuum chamber to 350 DEG C
Gas, the chamber for adjusting vacuum chamber are depressed into 3.0Pa, and substrate negative voltage is adjusted to -120V, light AlTi target, and arc power exports electric current
For 80A, sedimentation time 60min.
6) cooling: to be passed through nitrogen to vacuum chamber and be cooled to room temperature, obtain product.
In the embodiment of the present invention, the detection of Co distribution is carried out to the hard alloy after step 2) polishing, as a result such as Fig. 2 institute
Show, is mass fraction distributions of 1 hard alloy of the embodiment of the present invention from a surface to the Co of core, the results showed that hard alloy table
The content of face Co be 3.6wt%, poor Co layers of surface with a thickness of 1mm.
It in the embodiment of the present invention, obtains after tested, the CrN transition zone of product and the thickness difference of AlTiN surface functional layer
For 1.0 μm and 2.5 μm.The atom percentage content of each element in CrN transition zone are as follows: Cr:55at%, N:45at%.AlTiN table
The atom percentage content of each element in the functional layer of face are as follows: Al:30at%, Ti:28at%, N:42at%.
Embodiment 2
The surface treatment of the present embodiment progress hard alloy, comprising the following steps:
1) surface preparation is carried out to WC-6%Co hard alloy: WC-6%Co hard alloy is carried out at case-carbonizing
Reason, specifically: using WC-6%Co hard alloy as sample, sample is placed in hydrogen atmosphere furnace, is heated to 850 DEG C of pre-sinterings
0.5h is then heated to 1310 DEG C of heat preservation 0.8h and carries out Carburization Treatment, and acetylene is passed through flow as carburizing carbon source, hydrogen and acetylene
Than for 100:2.
2) surface clean is carried out to the hard alloy that case-carbonizing is handled: the hard that case-carbonizing is handled is closed
Gold is polished, polished first to use acetone ultrasonic cleaning hard alloy 20min to mirror surface then hard with alcohol ultrasonic cleaning
Then hard alloy is air-dried and is put into vacuum chamber by matter alloy 20min.
3) aura cleaning is carried out to hard alloy: vacuum chamber is warming up to 400 DEG C, to vacuum chamber to 3.0*10- 3Pa is passed through the argon gas of 250sccm to vacuum chamber, adjusts working bias voltage to -800V, carries out aura cleaning to carbide surface
25min。
4) deposit CrN transition zone: adjustment vacuum room temperature is passed through the nitrogen of 350sccm to vacuum chamber to 400 DEG C, adjusts
The chamber of vacuum chamber is depressed into 2.0Pa, and substrate negative voltage is adjusted to -110V, lights Cr target, and it is 100A that arc power, which exports electric current, is sunk
The product time is 25min.
5) depositing Al TiN surface functional layer: adjustment vacuum room temperature is passed through the nitrogen of 350sccm to vacuum chamber to 400 DEG C
Gas, the chamber for adjusting vacuum chamber are depressed into 3.0Pa, and substrate negative voltage is adjusted to -150V, light AlTi target, and arc power exports electric current
For 80A, sedimentation time 80min.
6) cooling: to be passed through nitrogen to vacuum chamber and be cooled to room temperature, obtain product.
In the embodiment of the present invention, the detection of Co distribution, hard alloy table are carried out to the hard alloy after step 2) polishing
The content of face Co be 3.1wt%, poor Co layers of surface with a thickness of 0.8mm.
It in the embodiment of the present invention, obtains after tested, the CrN transition zone of product and the thickness difference of AlTiN surface functional layer
For 1.2 μm and 3.0 μm.The atom percentage content of each element in CrN transition zone are as follows: Cr:58at%, N:42at%.AlTiN table
The atom percentage content of each element in the functional layer of face are as follows: Al:32at%, Ti:24at%, N:44at%.
Embodiment 3
The surface treatment of the present embodiment progress hard alloy, comprising the following steps:
1) surface preparation is carried out to YT-15 hard alloy: surface carburization processing is carried out to YT-15 hard alloy, specifically
Are as follows: using YT-15 hard alloy as sample, sample is placed in vacuum sintering furnace, vacuum sintering furnace be evacuated to 10Pa hereinafter, plus
Heat then passes to nitrogen, is heated to 1450 DEG C of heat preservation 1.5h to 350 DEG C of heat preservation 2h.
2) surface clean is carried out to the hard alloy that surface carburization is handled: the hard that surface carburization is handled is closed
Gold is polished, polished first to use acetone ultrasonic cleaning hard alloy 25min to mirror surface then hard with alcohol ultrasonic cleaning
Then hard alloy is air-dried and is put into vacuum chamber by matter alloy 25min.
3) aura cleaning is carried out to hard alloy: vacuum chamber is warming up to 400 DEG C, to vacuum chamber to 4.0*10- 3Pa is passed through the argon gas of 280sccm to vacuum chamber, adjusts working bias voltage to -900V, carries out aura cleaning to carbide surface
30min。
4) deposit CrN transition zone: adjustment vacuum room temperature is passed through the nitrogen of 280sccm to vacuum chamber to 400 DEG C, adjusts
The chamber of vacuum chamber is depressed into 2.5Pa, and substrate negative voltage is adjusted to -120V, lights Cr target, it is 90A, deposition that arc power, which exports electric current,
Time is 30min.
5) depositing Al TiN surface functional layer: adjustment vacuum room temperature is passed through the nitrogen of 280sccm to vacuum chamber to 400 DEG C
Gas, the chamber for adjusting vacuum chamber are depressed into 3.0Pa, and substrate negative voltage is adjusted to -150V, light AlTi target, and arc power exports electric current
For 90A, sedimentation time 90min.
6) cooling: to be passed through nitrogen to vacuum chamber and be cooled to room temperature, obtain product.
In the embodiment of the present invention, the detection of Co distribution, hard alloy table are carried out to the hard alloy after step 2) polishing
The content of face Co be 3.5wt%, poor Co layers of surface with a thickness of 0.4mm.
It in the embodiment of the present invention, obtains after tested, the CrN transition zone of product and the thickness difference of AlTiN surface functional layer
For 1.4 μm and 3.5 μm.The atom percentage content of each element in CrN transition zone are as follows: Cr:57at%, N:43at%.AlTiN table
The atom percentage content of each element in the functional layer of face are as follows: Al:25at%, Ti:32at%, N:43at%.
Comparative example 1
The surface treatment that this comparative example carries out hard alloy obtains product with embodiment 1, but without step 1).
Comparative example 2
The surface treatment that this comparative example carries out hard alloy obtains product with embodiment 3, but without step 1).
Embodiment 4
The present embodiment by embodiment 1 and 1 product of comparative example in 800 DEG C of annealing 2h, then carry out interface element distribution detection, knot
Fruit please refers to Fig. 3 and Fig. 4, the respectively interface element point of the embodiment of the present invention 1 and 1 product of comparative example after 800 DEG C of annealing 2h
Butut.The result shows that 1 product floating coat of comparative example and the Co content at carbide interface are significantly higher, and diffuse to
CrN transition zone；And 1 product floating coat of embodiment and the Co content at carbide interface are lower, and Co is not spread to coating.
Referring to Fig. 5, the hardness and elastic modulus for the embodiment of the present invention 1 and 1 product of comparative example in 800 DEG C of annealing 2h becomes
Change figure.The result shows that the hardness and elastic modulus of 1 product of the embodiment of the present invention is equal before 800 DEG C of annealing and after 800 DEG C of annealing 2h
Higher than comparative example product.
Embodiment 5
The present embodiment by cutter made of 2 product of 3 product of embodiment and comparative example in Vc=250m/min, ap=0.5mm,
SKD11 mould steel is cut under the machining condition of f=0.1mm/r, referring to Fig. 6, being 3 product of the embodiment of the present invention and comparative example 2
Cutter made of product cuts SKD11 mould steel at Vc=250m/min, the machining condition of ap=0.5mm, f=0.1mm/r
Working durability curve graph.The result shows that cutting-tool's used life made of 3 product of embodiment is compared to made of 2 product of comparative example
Cutter, which is doubled, to be controlled.
The above result shows that the product that surface treatment method of the present invention obtains include hard alloy, CrN transition zone and
AlTiN surface functional layer, hard alloy have surface Co layers poor, and the Co in hard alloy can effectively be inhibited to spread to coating,
The thermal expansion matching of coating and hard alloy is improved, and the mechanical performance under coating high-temp, the causativity of coating are improved
It can significantly improve, extend the service life of AlTiN coating, mechanical performance is high at high temperature, wearability is good, cutting ability for product
It is excellent.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of carbide surface processing method, which comprises the following steps:
Case-carbonizing processing or surface carburization processing are carried out to hard alloy, then are sequentially depositing on the surface of the hard alloy
CrN transition zone and AlTiN surface functional layer, obtain product；
Wherein, the hard alloy handled through case-carbonizing processing or surface carburization includes that core and surface are Co layers poor, described
The mass fraction of Co is the 25%~66.6% of the mass fraction of core Co during surface is Co layers poor；
The CrN transition zone is deposited on the surface of the hard alloy, and the AlTiN surface functional layer is deposited on the CrN mistake
Cross the surface of layer.
2. carbide surface processing method according to claim 1, which is characterized in that poor Co layers of the thickness in surface
For 0.01mm~1mm；
The CrN transition zone with a thickness of 0.5 μm~2 μm；
The AlTiN surface functional layer with a thickness of 2 μm~8 μm.
3. carbide surface processing method according to claim 1, which is characterized in that Cr in the CrN transition zone
Atomic percent is 35at%~70at%, and the atomic percent of N is 30at%~65at%；
The atomic percent of Al is 20at%~45at% in the AlTiN surface functional layer, and the atomic percent of Ti is
The atomic percent of 15at%~40at%, N are 30at%~65at%.
4. carbide surface processing method according to claim 1, which is characterized in that the hard alloy is WC-Co
Hard alloy, WC-Ti-Co hard alloy or WC-Ti-Ta-Co hard alloy.
5. carbide surface processing method according to claim 1, which is characterized in that the item of the case-carbonizing processing
Part specifically:
The hard alloy is placed in hydrogen atmosphere furnace, 800 DEG C~900 DEG C pre-sintering 0.5h is heated to, is again heated to 1300
DEG C~1320 DEG C of heat preservation 0.5h~1.5h progress Carburization Treatments, the carbon source of the carburizing is acetylene, the hydrogen and the acetylene
The flow-rate ratio being passed through is 100:2~100:10；
The condition of the surface carburization processing specifically:
The hard alloy is placed in vacuum sintering furnace, the vacuum sintering furnace is evacuated to 10Pa hereinafter, being heated to 350 DEG C
~380 DEG C of heat preservation 1.5h~3h, then it is passed through nitrogen, it is heated to 1440 DEG C~1450 DEG C 1.2~1.8h of heat preservation and carries out Nitrizing Treatment.
6. carbide surface processing method according to claim 1, which is characterized in that the condition of deposition CrN transition zone
Specifically:
Using metal Cr as target, vacuum room temperature is 300~450 DEG C, and the flow velocity for being passed through nitrogen is 200sccm~450sccm, very
Empty room chamber pressure is 0.6Pa~3.0Pa, and substrate negative voltage is -70~-180V, and it is 70A~120A that arc power, which exports electric current, is sunk
The product time is 10min~50min.
7. carbide surface processing method according to claim 1, which is characterized in that depositing Al TiN surface functional layer
Condition specifically:
Using AlTi as target, vacuum room temperature is 300~450 DEG C, and the flow velocity for being passed through nitrogen is 250sccm~500sccm, vacuum
Chamber pressure is 1.0Pa~3.0Pa, and substrate negative voltage is -100~-180V, and it is 80A~150A, deposition that arc power, which exports electric current,
Time is 40min~120min.
8. carbide surface processing method according to claim 1, which is characterized in that case-carbonizing processing or surface are seeped
After nitrogen processing, before deposition CrN transition zone, further includes: aura cleaning；
The aura cleaning includes: specifically that vacuum chamber is warming up to 300~450 DEG C, to the vacuum chamber to 2.0*10-3
~8.0*10-3The argon gas that Pa, Xiang Suoshu vacuum chamber are passed through 150sccm~450sccm adjusts working bias voltage to -600~-1100V,
Aura is carried out to the carbide surface and cleans 20min~50min.
9. carbide surface processing method according to claim 1, which is characterized in that depositing Al TiN surface functional layer
Later, before obtaining product, further includes:
Nitrogen is passed through to vacuum chamber to be cooled down.
10. the product that carbide surface processing method obtains described in claim 1 to 9 any one answering in cutting element
With.
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