CN101851738A - Nano composite titanium silicon nitride tool coating and preparation method thereof - Google Patents
Nano composite titanium silicon nitride tool coating and preparation method thereof Download PDFInfo
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- CN101851738A CN101851738A CN200910038284A CN200910038284A CN101851738A CN 101851738 A CN101851738 A CN 101851738A CN 200910038284 A CN200910038284 A CN 200910038284A CN 200910038284 A CN200910038284 A CN 200910038284A CN 101851738 A CN101851738 A CN 101851738A
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Abstract
The invention discloses a nano composite titanium silicon nitride tool coating. The coating formulation is as follows: 30-68at.% of titanium, 2-20at.% of Si and 30-50at.% of nitrogen. The titanium silicon nitride coating prepared by the formulation comprises the components the sum of which is 100%. The tool manufactured by the invention has significantly improved mechanical wear resistant performance and abrasion wear resistant performance, can meet the requirement on better performance of alloy tools of modern industry, and has huge market potential and practical use value.
Description
Technical field
A kind of nano composite titanium silicon nitride tool coating that utilizes the physical gas phase deposition technology coating and preparation method thereof.
Background technology
The inserted tool coating is in intensity and toughness preferably on Wimet, the speedy steel cutting-tool matrix surface; CVD (Chemical Vapor Deposition) method by physics or chemistry; apply the high rigidity of several microns of one decks at matrix surface; the metal of high-wearing feature or nonmetallic compound; to reduce diffusion and the chemical reaction between cutter and workpiece; protection tool matrix material, the wear resistance and the cutting hardness of raising cutter.
Utilize the hard coating material of physical gas phase deposition technology preparation in early days, normally simple T iN, TiC coating, its microhardness is about HV 2300, application of temperature is 500～600 ℃, rapid steel or Hardmetal materials have higher anti-mechanical wear, wear-resistant grinding abrasion performance and lower frictional coefficient relatively.
In order further to improve the wear resistance and the cutting hardness of cutter, there is elements such as in the TiN coating, adding C, Al to form the multi-element coating of multicomponent at present, as TiCN, TiAlN coating, microhardness reaches HV 3000, have than TiN the anti-mechanical wear that the TiCN coating is higher, wear-resistant grinding abrasion performance.The application temperature of TiAlN coating is also brought up to more than 800 ℃.
Along with industrial expansions such as automobile, Aeronautics and Astronautics, heavy-duty machines, and the popularizing rapidly of numerically-controlled machine, Machining Technology is just towards improving working (machining) efficiency, cuts down finished cost and the direction that reduces environmental pollution develops.High-speed machining, DRY CUTTING and little lubricated cutting become the development trend of present machining.Wimet in the past, speedy steel cutting-tool and TiCN, the TiAlN coated cutting tool widely used at present though improved the anti-mechanical wear of cutter, wear-resistant grinding abrasion performance effectively, still can not satisfy the better performance demands of modernized industrial tool setting tool
Summary of the invention
Have the more nano-structured coating material of high-mechanical property and high-temperature stability, can satisfy the better performance demands of modernized industrial tool setting tool.
The object of the present invention is to provide a kind of prescription and preparation method in carbide tool surface coated with nano composite titanium silicon nitride coating, use the cutter of the present invention's preparation, on the basis of existing technology, further improve the technical indicator of cutting tool, to satisfy the demand of modernization industry to better cutter.
The tool matrix that the present invention uses is the WC/Co Wimet, and the tool matrix top coat is the titanium silicon nitride hard coating material.
Inserted tool matrix of the present invention is a high tenacity K series hard alloy, and the mean grain size of WC is the 0.3-1 micron;
The present invention adopts physical gas phase deposition technology coating one deck titanium/titanium nitride transition layer at WC/Co inserted tool matrix surface, and then coating one deck titanium silicon nitride coated material, the thickness 0.1-0.5 micron of transition layer wherein, the thickness of amorphous ti silica coating is the 1-4 micron.Its coating formula is as follows: titanium 30-68at.%
Silicon 2-20at.%
Nitrogen 30-50at.%
With the titanium silicon nitride coating that this prescription is made, its each composition summation should be 100%.
The present invention can pass through to change the performance that the silicone content in the coating is regulated microstructure, microhardness and the resistance to high temperature oxidation of coating, to adapt to different processing objects and machining condition.
The tool matrix pretreatment technology that the present invention relates to is: coated cutting tool is not through cleaner for metal ultrasonic cleaning, rinsed with deionized water, alcohol ultrasonic cleaning, and acetone dewaters.
Plated film step of the present invention is: will evenly be fixed on the support through pretreated not coated cutting tool, spacing is more than or equal to 10mm, and in the coating equipment of packing into, regulating the work support rotating speed is 10-20rpm, is evacuated to base vacuum 2.5～3.0 * 10
-3Pa opens well heater simultaneously, is warming up to 300-500 ℃; Open Ar air-flow metered valve, regulate vacuum chamber and be about 0.3-0.4Pa, matrix adds negative bias voltage 290-310V, carries out glow discharge sputtering and cleans 9-11min, sputtering power 7kw; Open utmost point ion gun subsequently, with Ti high-energy ionic bombardment matrix 3-5 minute with the activation matrix surface; Reduce the matrix bias-voltage then to 200-260V, open N simultaneously
2The air-flow metered valve, under flow 200-300sccm, temperature 400-500 ℃, operating pressure 0.7-0.9Pa condition, depositing TiN transition layer 9-11min; According to feeding reactant gases N
2, deposited coatings, depositing time remains on 100-120min; After finishing plated film, take out the normal temperature cooling after cutter is cooled to 170 ℃ with stove and get final product.
The cutter that uses the present invention to make, its anti-mechanical wear performance and wear-resistant grinding abrasion performance all are improved largely, and can satisfy the demand of the better performance of the modernization involutory golden cutter of industry, and huge market potential and practical use value are arranged.
Embodiment
The present invention adopts physical gas phase deposition technology coating one deck titanium/titanium nitride transition layer in WC/Co inserted tool surface, and then coating one deck titanium silicon nitride coated material, the thickness 0.1-0.5 micron of transition layer wherein, the thickness of amorphous ti silica coating is the 1-4 micron.Its coating formula is as follows: titanium 50at.%
Silicon 6at.%
Nitrogen 44at.%
The tool matrix pretreatment technology that the present invention relates to is: coated cutting tool is not through cleaner for metal ultrasonic cleaning, rinsed with deionized water, alcohol ultrasonic cleaning, and acetone dewaters.
Plated film step of the present invention is: will evenly be fixed on the support through pretreated not coated cutting tool, spacing is 10mm, and in the coating equipment of packing into, regulating the work support rotating speed is 10rpm, is evacuated to base vacuum 3.0 * 10
-3Pa opens well heater simultaneously, is warming up to 400 ℃, opens Ar air-flow metered valve, regulates vacuum chamber and is about 0.3Pa, and matrix adds negative bias voltage 300V, carries out glow discharge sputtering and cleans 10min, sputtering power 7kw; Open utmost point ion gun subsequently, bombarded matrix 4 minutes with the Ti high-energy ionic; Reduce the matrix bias-voltage then to 200V, open N simultaneously
2The air-flow metered valve, under flow 200sccm, 400 ℃ of temperature, operating pressure 0.7Pa condition, depositing TiN transition layer 10min; According to feeding reactant gases N
2, deposited coatings, depositing time remains on 100min; After finishing plated film, take out the normal temperature cooling after cutter is cooled to 170 ℃ with stove and get final product.
On K30 carbide end mill surface, the titanium silicon nitride coating slotting cutter of preparation, the tool surface coat-thickness is the 2-3 micron, the transition layer 0.1-0.5 micron that contains titanium/titanium nitride, with at the titanium nitride coating slotting cutter of identical carbide end mill surface deposition and uncoated carbide end mill the life-span of high speed cutting quenched steel contrast experiment, every kind of cutter got 5, mean lifetime is respectively: no coated cutting tool cutting 9.2m, titanium nitride coating Tool in Cutting 23.1m, nano composite titanium silicon nitride coated cutting tool cutting 40.3m.Its machining condition is workpiece material: DIN 1.2311 (HRC 52), cutting speed: 200m/min, and feed rate: 0.02mm/tooth, cutting-in: 0.1mm cuts wide: 2mm, dried milling, climb cutting.
Claims (1)
1. nano composite titanium silicon nitride tool coating, it is characterized in that: coating formula is as follows:
Titanium 30-68at.%
Silicon 2-20at.%
Nitrogen 30-50at.%
With the titanium silicon nitride coating that this prescription is made, its each composition summation should be 100%;
The plated film step of coated cutting tool is: will evenly be fixed on the support through pretreated not coated cutting tool, spacing is more than or equal to 10mm, and in the coating equipment of packing into, regulating the work support rotating speed is 10-20rpm, is evacuated to base vacuum 2.5～3.0 * 10
-3Pa opens well heater simultaneously, is warming up to 300-500 ℃; Open Ar air-flow metered valve, regulate vacuum chamber and be about 0.3-0.4Pa, matrix adds negative bias voltage 290-310V, carries out glow discharge sputtering and cleans 9-11min, sputtering power 7kw; Open utmost point ion gun subsequently, with Ti high-energy ionic bombardment matrix 3-5 minute with the activation matrix surface; Reduce the matrix bias-voltage then to 200-260V, open N simultaneously
2The air-flow metered valve, under flow 200-300sccm, temperature 400-500 ℃, operating pressure 0.7-0.9Pa condition, depositing TiN transition layer 9-11min; According to feeding reactant gases N
2, deposited coatings, depositing time remains on 100-120min; After finishing plated film, take out the normal temperature cooling after cutter is cooled to 170 ℃ with stove and get final product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910038284A CN101851738A (en) | 2009-03-31 | 2009-03-31 | Nano composite titanium silicon nitride tool coating and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910038284A CN101851738A (en) | 2009-03-31 | 2009-03-31 | Nano composite titanium silicon nitride tool coating and preparation method thereof |
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| Publication Number | Publication Date |
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| CN101851738A true CN101851738A (en) | 2010-10-06 |
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| CN200910038284A Pending CN101851738A (en) | 2009-03-31 | 2009-03-31 | Nano composite titanium silicon nitride tool coating and preparation method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104975435A (en) * | 2014-04-10 | 2015-10-14 | 超晶科技有限公司 | Vacuum hard coating water needle plate and manufacturing method thereof |
| CN106756841A (en) * | 2016-12-09 | 2017-05-31 | 广东工业大学 | A kind of preparation method of cutter composite coating |
| US10619644B2 (en) | 2014-12-25 | 2020-04-14 | Ihi Corporation | Compressor vane or blade for engine |
-
2009
- 2009-03-31 CN CN200910038284A patent/CN101851738A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104975435A (en) * | 2014-04-10 | 2015-10-14 | 超晶科技有限公司 | Vacuum hard coating water needle plate and manufacturing method thereof |
| CN104975435B (en) * | 2014-04-10 | 2017-10-13 | 超晶科技有限公司 | Vacuum hard coat water needle plate and its preparation method |
| US10619644B2 (en) | 2014-12-25 | 2020-04-14 | Ihi Corporation | Compressor vane or blade for engine |
| CN106756841A (en) * | 2016-12-09 | 2017-05-31 | 广东工业大学 | A kind of preparation method of cutter composite coating |
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Open date: 20101006 |