JPH09323204A - Multilayer coated hard tool - Google Patents
Multilayer coated hard toolInfo
- Publication number
- JPH09323204A JPH09323204A JP16680996A JP16680996A JPH09323204A JP H09323204 A JPH09323204 A JP H09323204A JP 16680996 A JP16680996 A JP 16680996A JP 16680996 A JP16680996 A JP 16680996A JP H09323204 A JPH09323204 A JP H09323204A
- Authority
- JP
- Japan
- Prior art keywords
- film
- hard tool
- nitride
- coated hard
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、優れた耐摩耗性を有す
る被覆硬質工具に関する。FIELD OF THE INVENTION The present invention relates to a coated hard tool having excellent wear resistance.
【０００２】[0002]
【従来の技術】従来、一般的であったＴｉＮやＴｉＣＮ
コーティングに対し、近年Ａｌを含有させ、耐摩耗性、
耐酸化性を向上させる研究がなされ、特公平４−５３６
４２号、特公平５−６７７０５号に代表されるように、
Ａｌの添加効果を認める事例も種々存在する。また、人
工格子（超格子）を形成し、皮膜の特性を改善した事例
も認められる。これらの発明により、従来一般的であっ
たＴｉＮやＴｉＣＮ皮膜がＡｌを含有する皮膜へと改良
がなされつつあるのが現状である。2. Description of the Related Art TiN and TiCN which have been commonly used in the past
In recent years, Al has been added to the coating to improve wear resistance,
Research has been conducted to improve oxidation resistance, and Japanese Patent Publication No. 4-536.
No. 42 and Japanese Patent Publication No. 5-67705,
There are various cases in which the effect of adding Al is recognized. There are also cases in which artificial lattices (superlattices) are formed to improve the characteristics of the coating. The present situation is that these inventions are improving conventional TiN and TiCN coatings to coatings containing Al.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、最近の
切削加工においては、高能率を得るため切削速度が更に
速くなる傾向にあり、また、金型加工においても、従来
は熱処理前の軟らかい鋼を切削していた場合が多いが、
熱処理後の高硬度材を直接加工する事例が増えつつある
のが現状である。このような高速切削、並びに高硬度材
料の切削においては、Ａｌの添加は皮膜の耐酸化性を向
上させ、ＴｉＮ皮膜よりは耐摩耗性を向上せしめるもの
の、今だ十分に満足のいくものではない。その理由は、
一般的にイオンプレーティングにより形成された皮膜
は、圧縮残留応力を有し、この圧縮残留応力は、皮膜の
膜厚が厚くなるに伴い増加する。皮膜は圧縮残留応力の
増加に伴い、その密着性は劣化し、従って、現状では使
用に耐え得る皮膜の厚さは、せいぜい５μｍが限界であ
る。その為、イオンプレーティングにより被覆された工
具は、化学蒸着法（ＣＶＤ）により蒸着された１０〜１
５μｍの膜厚を有する被覆工具に比べ、耐摩耗性が劣る
ことは否定できない事実であった。また、人工格子の形
成により、皮膜の硬さが向上することは事実であり、耐
摩耗性の向上は認められるものの、このような硬い皮膜
はヤング率が高く、皮膜が非常に高い圧縮残留応力を有
し、せいぜい３〜５μｍを形成するのが限界である。こ
のような人工格子皮膜は、高い圧縮残留応力を有するた
めに密着性に大きな課題を有するものである。However, in recent cutting work, the cutting speed tends to be further increased in order to obtain high efficiency, and in the case of die machining, soft steel before heat treatment has conventionally been cut. In many cases,
At present, the case of directly processing a hardened material after heat treatment is increasing. In such high-speed cutting and cutting of high hardness materials, addition of Al improves the oxidation resistance of the film and improves the wear resistance as compared with the TiN film, but it is still not sufficiently satisfactory. . The reason is,
Generally, a film formed by ion plating has a compressive residual stress, and this compressive residual stress increases as the film thickness of the film increases. The adhesiveness of the coating deteriorates as the compressive residual stress increases, and therefore the thickness of the coating that can withstand use is currently limited to 5 μm at the most. Therefore, a tool coated with ion plating has a thickness of 10 to 1 obtained by chemical vapor deposition (CVD).
It was an undeniable fact that the wear resistance was inferior to the coated tool having a film thickness of 5 μm. In addition, it is true that the hardness of the coating is improved by the formation of the artificial lattice, and although improvement in wear resistance is recognized, such a hard coating has a high Young's modulus and the coating has a very high compressive residual stress. And the limit is 3 to 5 μm. Since such an artificial lattice film has a high compressive residual stress, it has a great problem in adhesion.
【０００４】[0004]
【課題を解決するための手段】本発明者らは、イオンプ
レーティング皮膜において、残留圧縮応力を低減し、厚
膜化を実現し、その結果耐摩耗性を向上せしめるととも
に、更に耐酸化性を向上せしめる研究を行った結果、配
向性の異なる２種の皮膜を多層被覆することにより、残
留圧縮応力は増加することなく、厚膜化が実現でき、ま
た、ＴｉＡｌに対し所定の第３成分にを添加することに
より、更に耐酸化性が向上するという知見を得るに至っ
た。The present inventors have found that in an ion plating film, residual compressive stress is reduced, a thick film is realized, and as a result, wear resistance is improved and oxidation resistance is further improved. As a result of research to improve, by coating two kinds of films with different orientations in multiple layers, it is possible to achieve a thick film without increasing the residual compressive stress, and to obtain a predetermined third component for TiAl. Therefore, it has been found that the addition of Al improves the oxidation resistance.
【０００５】[0005]
【作用】一般にイオンプレーティングにおいては、皮膜
は結晶成長において優先成長方位を有し、その結果、柱
状の結晶構造を持つ皮膜が形成される。１つ柱状の結晶
粒子を取り出してみれば、一定方位に強い結晶成長が認
められる単結晶であり、内部欠陥は極めて少ない。この
ような結晶が連続して成膜することが、皮膜の厚さの増
加に伴い残留圧縮応力が増加する原因である。本発明者
等は、優先成長方位のそれぞれ異なる２種の皮膜を多層
被覆することにより、皮膜と皮膜の界面に多くの格子欠
陥を導入する技術を開発するに至った。つまり、（１１
１）面に配向するＴｉの窒化物、炭窒化物と（２００）
面に配向するＴｉ、Ａｌ及び第３成分の窒化物、炭窒化
物を多層被覆することにおいて界面は不連続となり、エ
ピタキシャル成長が抑制され、多くの格子欠陥が導入さ
れる。この多くの格子欠陥は、皮膜の残留圧縮応力を緩
和するように成長中に再配列し、結果、皮膜の残留応力
を抑制し、厚膜化を可能にするものである。例えば、
（２００）に配向するＴｉ、Ａｌ及び第３成分の窒化物
を０．５μｍ形成すると残留応力は、１．２ＧＰａであ
り、この皮膜を１０μｍ形成すると残留圧縮応力は、８
ＧＰａを越え著しく密着性が劣化する。一方（２００）
に配向するＴｉ、Ａｌ及び第３成分の窒化物を０．５μ
ｍ、（１１１）に配向するＴｉＮを０．５μｍ形成し、
この繰り返しの多層被覆において１０μｍの皮膜を形成
した場合は、驚くべき事にその残留圧縮応力は、せいぜ
い２ＧＰａである。従って、本発明によれば容易に厚膜
化が可能であり、その結果被覆工具に皮膜の密着性を劣
化させることなく、非常に高い耐摩耗性を付与すること
が可能である。In general, in ion plating, the film has a preferential growth orientation in crystal growth, and as a result, a film having a columnar crystal structure is formed. If one columnar crystal grain is taken out, it is a single crystal in which strong crystal growth is observed in a fixed direction, and the number of internal defects is extremely small. The continuous formation of such crystals is a cause of an increase in residual compressive stress as the thickness of the film increases. The present inventors have developed a technique for introducing a large number of lattice defects at the interfaces between films by multilayer coating two types of films having different preferential growth directions. That is, (11
1) Ti nitride and carbonitride oriented in (200) plane
When Ti, Al and the third component nitride or carbonitride oriented in the plane are coated in multiple layers, the interface becomes discontinuous, epitaxial growth is suppressed, and many lattice defects are introduced. Many of these lattice defects rearrange during growth so as to relieve the residual compressive stress of the film, thereby suppressing the residual stress of the film and enabling the film to be thicker. For example,
When Ti, Al and the nitride of the third component oriented in (200) are formed in a thickness of 0.5 μm, the residual stress is 1.2 GPa, and when this film is formed in a thickness of 10 μm, the residual compressive stress is 8
It exceeds GPa and the adhesiveness is significantly deteriorated. Meanwhile (200)
0.5μ of Ti, Al and third component nitrides oriented in
m, TiN oriented to (111) is formed 0.5 μm,
Surprisingly, when a film of 10 μm is formed in this repeated multilayer coating, the residual compressive stress is 2 GPa at most. Therefore, according to the present invention, it is possible to easily increase the film thickness, and as a result, it is possible to impart extremely high wear resistance to the coated tool without deteriorating the adhesion of the film.
【０００６】更に、切削中に皮膜表面に発生したクラッ
クは、結晶成長方向の異なる皮膜の界面において、その
伝播が抑制される傾向にあることが認められた。つま
り、クラック先端に発生する応力集中を界面の多数の格
子欠陥が緩和し、クラックの伝播に対し高い抵抗を示
す。同時にクラックは、更に進展する場合、界面に沿っ
て伝播し基体への伝播、それに起因する刃先の欠損を大
巾に抑制するものである。従って、本発明のよる多層被
覆硬質工具は、厚膜化により高い耐摩耗性を有すると共
に、クラックが伝播し難いため、同時に高い靱性を有す
るものである。よって、皮膜が厚い時のみならず、比較
的薄い場合においても工具寿命を向上させることは言う
までもない。また、ＴｉとＡｌの窒化物、炭窒化物その
ものの耐酸化性の向上に対し研究を加えた結果、Ｚｒ、
Ｈｆ、Ｙといった成分を添加することにより、耐酸化性
が著しく改善されることを見出した。Further, it has been found that cracks generated on the surface of the coating during cutting tend to be suppressed in propagation at the interface of the coating having different crystal growth directions. That is, many lattice defects at the interface alleviate the stress concentration generated at the crack tip, and exhibit high resistance to crack propagation. At the same time, when the crack further propagates, it propagates along the interface and greatly suppresses the propagation to the substrate and the resulting loss of the cutting edge. Therefore, the multilayer-coated hard tool according to the present invention has high wear resistance due to the increased film thickness and, at the same time, has high toughness because cracks hardly propagate. Therefore, it goes without saying that the tool life is improved not only when the coating is thick, but also when it is relatively thin. In addition, as a result of research on improvement of oxidation resistance of Ti and Al nitrides and carbonitrides, Zr,
It has been found that the addition of components such as Hf and Y significantly improves the oxidation resistance.
【０００７】また、本発明による多層皮膜は、前述のご
とく残留圧縮応力が極めて小さいため、高速度鋼、及び
サーメット合金に対しても極めて高い密着性を示すもの
である。一般的にイオンプレーティングの皮膜は、コー
ティング中に圧縮応力が発生する。また、高速度鋼やサ
ーメット合金は、熱膨張係数が皮膜よりも大きいため、
コーティング後の冷却工程において皮膜には更に圧縮応
力が付加される。その結果、室温に取り出した時、超硬
合金基体の場合よりも非常に高い圧縮応力を有し、結
果、密着性が著しく悪くなる。このような問題点も本発
明多層皮膜は、解決するものである。Further, the multilayer coating according to the present invention has extremely small residual compressive stress as described above, and therefore exhibits extremely high adhesion to high speed steel and cermet alloy. In general, a film of ion plating has compressive stress generated during coating. In addition, since high-speed steel and cermet alloys have a coefficient of thermal expansion larger than that of the coating,
Further compressive stress is applied to the film in the cooling step after coating. As a result, when taken out at room temperature, it has a much higher compressive stress than in the case of a cemented carbide substrate, resulting in a markedly poor adhesion. The multilayer film of the present invention solves such problems.
【０００８】次に、皮膜にカーボンを含有させることに
より、皮膜硬度が著しく向上し、更なる耐摩耗性の向上
を実現させることが可能である。この場合、カーボン含
有量を不連続に変化させると概してカーボンを含有する
皮膜の残留圧縮応力は著しく高いため、その界面強度が
著しく劣化する。従って、カーボンを含有させるために
は、Ｃ2Ｈ2あるいはＣＨ4といったカーボン供給源を連
続して徐々に増加させ、皮膜にカーボンを含有せしめる
ことにおいて、密着性に問題を生じることなく、皮膜の
潤滑性向上、及び硬さ向上による耐摩耗性の向上が可能
である。更に、切削中に皮膜は酸化し、形成されたポー
ラスな酸化皮膜が摩耗する繰り返しにより、摩耗が進行
する現象を見出した。この皮膜の酸化を更に抑制する手
段としては、酸化に対し最も安定であるＡｌ2Ｏ3皮膜を
介在させることが最も効果的である。本発明者らは、イ
オンプレーティングにより皮膜を形成した後、プラズマ
ＣＶＤもしくはＭＯＣＶＤによりＡｌ2Ｏ3を形成するこ
とにより、密着性の極めて優れるＡｌ2Ｏ3皮膜を形成す
ることに成功した。Ａｌ2Ｏ3の形成により、皮膜の酸化
による摩耗は大巾に抑制される。特に、本発明による皮
膜は基体が超硬合金、あるいはサーメット合金のインサ
ート、高速度鋼エンドミルといったような比較的一刃当
たりの送り量が高く、皮膜に耐摩耗性と靱性（耐クラッ
ク伝播性）が必要とされる用途において特に有効であ
る。Next, by including carbon in the coating, the coating hardness is remarkably improved and it is possible to further improve the wear resistance. In this case, if the carbon content is changed discontinuously, the residual compressive stress of the coating film containing carbon is generally extremely high, so that the interfacial strength thereof is significantly deteriorated. Therefore, in order to contain carbon, when a carbon supply source such as C 2 H 2 or CH 4 is continuously and gradually increased so that carbon is contained in the film, there is no problem in adhesion, and the film It is possible to improve wear resistance by improving lubricity and hardness. Further, it has been found that the film is oxidized during cutting and the porous oxide film formed is repeatedly worn, whereby the wear progresses. The most effective means for further suppressing the oxidation of this film is to interpose an Al 2 O 3 film, which is the most stable against oxidation. The present inventors succeeded in forming an Al 2 O 3 film having extremely excellent adhesion by forming a film by ion plating and then forming Al 2 O 3 by plasma CVD or MOCVD. Due to the formation of Al 2 O 3, the wear due to the oxidation of the film is greatly suppressed. In particular, the coating according to the present invention has a relatively high feed amount per blade such as inserts of cemented carbide or cermet alloy and high-speed steel end mills, and the coating has wear resistance and toughness (crack propagation resistance). Is especially effective in applications where is required.
【０００９】以下、数値を限定した理由について述べ
る。Ｔｉ、Ａｌ及び第３成分の窒化物、炭窒化物のＩ
（２００）／Ｉ（１１１）の値を１以上とした理由は、
この皮膜が（１１１）面に強く配向すればするほど高い
圧縮応力を有するようになるため好ましくなく、（２０
０）面に配向した方が、この皮膜自体の残留圧縮応力が
低いため、（２００）面に配向すべく１以上とした。Ｔ
ｉの窒化物、炭窒化物は前述のように、（２００）面に
配向したＴｉ、Ａｌ及び第３成分の窒化物、炭窒化物層
との多層被覆において、界面に格子欠陥を導入するた
め、前記ＴｉとＡｌの窒化物、炭窒化物と反対に（１１
１）面に配向させなければならず、Ｉ（２００）／Ｉ
（１１１）の値は１以下とした。第３成分のＺｒ、Ｈ
ｆ、Ｙ等に対しては、その置換量において０．１原子％
以下だと耐酸化性の向上に対し、全く効果が認められ
ず、また、５０原子％を越えると本来ＴｉもしくはＴｉ
とＡｌの窒化物、炭窒化物が有する耐摩耗性を劣化させ
るため、０．１原子％以上５０原子％以下とした。以
下、実施例に基づき本発明を説明する。The reasons for limiting the numerical values will be described below. Ti, Al and nitrides of the third component, carbonitrides I
The reason why the value of (200) / I (111) is 1 or more is as follows.
The stronger the orientation of this film on the (111) plane, the higher the compressive stress, which is not preferable.
Since the residual compressive stress of the film itself is lower when it is oriented to the (0) plane, it was set to 1 or more so as to be oriented to the (200) plane. T
As described above, the i-nitride and carbonitride introduce lattice defects at the interface in the multilayer coating with Ti, Al and the third component nitride and carbonitride layers oriented in the (200) plane. , The opposite of Ti and Al nitrides and carbonitrides (11
1) It must be oriented in the plane, and I (200) / I
The value of (111) was set to 1 or less. Third component Zr, H
For f, Y, etc., the substitution amount is 0.1 atom%
If it is less than 50%, no effect is observed for improving the oxidation resistance, and if it exceeds 50 atomic%, Ti or Ti
In order to deteriorate the wear resistance of Al nitride and carbonitride, the content of Al is set to 0.1 atom% or more and 50 atom% or less. Hereinafter, the present invention will be described based on examples.
【００１０】[0010]
実施例１ ＪＩＳ Ｐ４０グレードの超硬合金インサート、及びφ
１２、４枚刃の市販高速度鋼ラフィングエンドミルにア
ークイオンプレーティング法により、Ｔｉターゲット、
ＴｉＡｌＭｅターゲット（Ｔｉ／Ａｌ＝１、Ｍｅ＝５ａ
ｔ％、Ｍｅ＝Ｚｒ、Ｈｆ、Ｃｒ、Ｗ、Ｙ、Ｓｉ）を用
い、表１に示す皮膜を形成した。Example 1 JIS P40 grade cemented carbide insert, and φ
A 12- or 4-flute commercially available high-speed steel roughing end mill was used for the Ti target by the arc ion plating method.
TiAlMe target (Ti / Al = 1, Me = 5a
t%, Me = Zr, Hf, Cr, W, Y, Si) to form the coatings shown in Table 1.
【００１１】[0011]
【表１】 [Table 1]
【００１２】比較工具として同じアークイオンプレーテ
ィング法により、ＴｉＮ、ＴｉＡｌＮ皮膜を形成した。
超硬合金インサートにおいては、切削条件１に基づきフ
ライス切削を行い、逃げ面摩耗値が０．３ｍｍに達する
までの切削長さと求め、それを寿命とした。また、高速
度鋼エンドミルにおいては、切削条件２に基づき切削を
行い、逃げ面摩耗値が０．２ｍｍに達するまでの切削長
を求め、それを寿命とした。その結果も表１に併記す
る。切削条件１は、被削材ＤＡＣ（調質材）ＨＲＣ＝４
０、切削速度１００ｍ／ｍｉｎ、送り０．１ｍｍ／刃、
切り込み２ｍｍで行い、インサートの形状はＳＥＥ４２
−ＴＮ型を用いた。切削条件２は、被削材ＤＡＣ（生
材）ＨＲＣ＝１０、切削速度５０ｍ／ｍｉｎ、送り０．
０７ｍｍ／刃、切り込み軸方向１８ｍｍ、径方向６ｍ
ｍ、切削油なし、Ｄｏｗｎ Ｃｕｔで行った。TiN and TiAlN coatings were formed by the same arc ion plating method as a comparative tool.
For the cemented carbide insert, milling was performed based on the cutting conditions 1, and the cutting length until the flank wear value reached 0.3 mm was obtained, which was taken as the life. Further, in the high-speed steel end mill, cutting was performed based on the cutting condition 2 and the cutting length until the flank wear value reached 0.2 mm was obtained and used as the life. The results are also shown in Table 1. Cutting condition 1 is a work material DAC (tempered material) HRC = 4
0, cutting speed 100m / min, feed 0.1mm / blade,
The cut is 2 mm, and the shape of the insert is SEE42.
-TN type was used. Cutting condition 2 is a work material DAC (raw material) HRC = 10, a cutting speed of 50 m / min, and a feed of 0.
07mm / blade, cutting axis direction 18mm, radial direction 6m
m, without cutting oil, performed with Down Cut.
【００１３】表１から明らかなように本発明による多層
被覆工具は、１０μｍ以上の厚膜化においても皮膜の剥
離や刃先のチッピングは認められず、安定した長時間の
切削が可能である。As is clear from Table 1, the multilayer coated tool according to the present invention is capable of stable cutting for a long time without peeling of the coating or chipping of the cutting edge even when the coating thickness is increased to 10 μm or more.
【００１４】実施例２ 実施例１で用いた超硬インサートを用い、表２に示す発
明合金を実施例１と同様にアークイオンプレーティング
法を用い成膜した後、ＭＯ−ＣＶＤにより６００℃、１
ｈｒ、α−Ａｌ2Ｏ3をその上に最外層として成膜した。
切削条件１により、その寿命を評価した結果も表２に併
記する。Example 2 Using the cemented carbide insert used in Example 1, the invention alloys shown in Table 2 were formed by the arc ion plating method in the same manner as in Example 1, and then MO-CVD was carried out at 600 ° C. 1
hr, α-Al 2 O 3 was formed thereon as the outermost layer.
Table 2 also shows the results of evaluation of the life under cutting condition 1.
【００１５】[0015]
【表２】 [Table 2]
【００１６】表２から明らかなように本発明工具は、Ａ
ｌ2Ｏ3皮膜を形成することにより、更に長寿命化が達成
される。As is clear from Table 2, the tool of the present invention is A
A longer life can be achieved by forming the l 2 O 3 film.
【００１７】実施例３ 実施例１で試作した試料番号１の本発明合金において、
皮膜中に連続してカーボン含有量を増加させ、カーボン
を含有せしめた工具を試作した。その内容を表３に示
す。Example 3 In the alloy of the present invention of sample No. 1 manufactured as a trial in Example 1,
The carbon content was continuously increased in the coating, and a tool containing carbon was prototyped. The contents are shown in Table 3.
【００１８】[0018]
【表３】 [Table 3]
【００１９】表３中、αはＣ2Ｈ2を添加し始めた時点の
皮膜の厚さ、ｂは徐々にＣ2Ｈ2量を増やし、その後一定
とした時点の皮膜の厚さを示す。すなわちａ−ｂの間が
連続してカーボン含有量が増加する層である。この場
合、Ｔｉの窒化物もしくは炭窒化物Ｔｉ、Ａｌ及び第３
成分の窒化物もしくは炭窒化物の各層の厚さはそれぞれ
０．５μｍとした。実施例１において用いた切削条件１
及び２において超硬インサート、高速度鋼エンドミルに
対し、切削テストを行い寿命を求めた。その結果も表３
に併記する。In Table 3, α represents the thickness of the coating at the time when the addition of C 2 H 2 was started, and b represents the thickness of the coating at the time when the amount of C 2 H 2 was gradually increased and then fixed. That is, it is a layer in which the carbon content continuously increases between a and b. In this case, Ti nitride or carbonitride Ti, Al and third
The thickness of each layer of the component nitride or carbonitride was 0.5 μm. Cutting condition 1 used in Example 1
In No. 2 and No. 2, a cutting test was performed on the cemented carbide insert and the high speed steel end mill to obtain the life. The results are also shown in Table 3.
Also described in.
【００２０】表３から明らかなように、本発明合金にカ
ーボンを含有量しめることにより、更に耐摩耗性の向上
が確認された。As is apparent from Table 3, further improvement in wear resistance was confirmed by adding carbon to the alloy of the present invention.
【００２１】実施例４ ６ヶのターゲットを有するアークイオンプレーティング
装置を用い（３段×２列）最上段の１ケを第３成分のタ
ーゲットを設置し、そのしたの２ケをＴｉターゲット、
反対の列の３ヶをＴｉＡｌターゲットとし表４に示す組
成の発明を試作した。Example 4 Using an arc ion plating device having 6 targets (3 stages × 2 rows), one target at the uppermost stage was provided with a target of the third component, and two of those targets were Ti targets,
An invention having the composition shown in Table 4 was made as a trial by using three TiAl targets in the opposite row.
【００２２】[0022]
【表４】 [Table 4]
【００２３】第３成分比は、第３成分ターゲットからの
距離により変化するが、また、同時に第３成分ターゲッ
トに流すアーク電流Ｔｉを調整することにより抑制し
た。これらの本発明例及び比較例を大気中７５０℃で１
ｈｒ保持し酸化をさせ酸化膜厚を抑制した。その結果を
表４に併記する。また、切削条件１により、インサート
において寿命評価をした結果も併記する。The third component ratio changes depending on the distance from the third component target, but it is also suppressed by adjusting the arc current Ti flowing through the third component target at the same time. These invention examples and comparative examples were
It was held for an hour to oxidize and suppress the oxide film thickness. The results are shown in Table 4. In addition, the results of life evaluation of the insert under the cutting condition 1 are also shown.
【００２４】表４より、第３成分の添加により耐酸化性
の著しい向上が認められ、同時に耐酸化性向上に起因す
る寿命の向上が確認される。From Table 4, it is confirmed that the addition of the third component markedly improves the oxidation resistance, and at the same time, the improvement of the life due to the improvement of the oxidation resistance is confirmed.
【００２５】実施例５ ２５ＴｉＣ−３０ＴｉＮ−２０ＷＣ−５ＴａＣ−５Ｍｏ
2Ｃ−８Ｃｏ−７Ｎｉ（重量％）なる組成のサーメット
合金を表５に示す内容で試作し、実施例１と同様にコー
ティングを行った。Example 5 25TiC-30TiN-20WC-5TaC-5Mo
A cermet alloy having a composition of 2 C-8Co-7Ni (% by weight) was prototyped according to the contents shown in Table 5, and coated in the same manner as in Example 1.
【００２６】[0026]
【表５】 [Table 5]
【００２７】インサートにおいて、切削条件３により切
削評価を行い、逃げ面摩耗量が０．１５ｍｍに達するま
での切削長を求め寿命とした。その結果も表５に併記す
る。切削条件３は、インサート（ＳＥＥ４２−ＴＮ）を
用い被削材ＳＫＤ６１（生材 ＨＲＣ１２）、切削速度
２５０ｍ／ｍｉｎ、送り量 ０．１ｍｍ／刃、切り込み
量 ２ｍｍである。被削材の大きさは、実施例１と同一
である。表５に示すとおり、本発明多層被覆サーメット
においては、切削中に皮膜の剥離がなく、長寿命の達成
が可能である。The insert was subjected to cutting evaluation under cutting conditions 3 and the cutting length until the flank wear amount reached 0.15 mm was obtained and used as the life. The results are also shown in Table 5. The cutting condition 3 is a work material SKD61 (green material HRC12) using an insert (SEE42-TN), a cutting speed of 250 m / min, a feed amount of 0.1 mm / blade, and a cutting amount of 2 mm. The size of the work material is the same as in Example 1. As shown in Table 5, in the multilayer coated cermet of the present invention, there is no peeling of the coating during cutting and it is possible to achieve a long life.
【００２８】[0028]
【発明の効果】以上の如く、本発明を適用することによ
り、皮膜の厚さの増加に伴う残留圧縮応力を緩和すると
ともに厚膜化が出来、更に、膜の密着性を劣化させるこ
となく、また、クラックが伝播し難いため、同時に高い
靱性を有する被膜が得られた。また、第３元素、酸化物
被膜、皮膜にカーボンを含有等とを組み合わせることに
より皮膜硬度、潤滑性、耐酸化性を顕著に向上させるこ
とが出来る。As described above, by applying the present invention, it is possible to alleviate the residual compressive stress due to the increase in the thickness of the film and to increase the film thickness, and further, without deteriorating the adhesion of the film. Moreover, since cracks were difficult to propagate, a coating film having high toughness was obtained at the same time. Further, by combining the third element, the oxide film, and the film containing carbon, the film hardness, lubricity and oxidation resistance can be remarkably improved.
Claims (7)
と、Ｔｉ、Ａｌ及び第３成分の窒化物もしくは炭窒化物
からなる層を、少なくとも２層以上被覆した多層被覆硬
質工具において、Ｘ線回折における（１１１）面の強度
をＩ（１１１）、（２００）面の強度をＩ（２００）と
したとき、Ｔｉの窒化物もしくは炭窒化物層のＩ（２０
０）／Ｉ（１１１）の値が１以下であり、Ｔｉ、Ａｌ及
び第３成分の窒化物もしくは炭窒化物層のＩ（２００）
／Ｉ（１１１）の値が１以上であり、かつ、第３成分は
Ｚｒ、Ｈｆ、Ｃｒ、Ｗ、Ｙ、Ｓｉ、Ｃｅ、Ｎｂから選ば
れた１種もしくは２種以上の成分である特徴とする多層
被覆硬質工具。1. A multi-layer coated hard tool comprising a Ti nitride or carbonitride layer and at least two layers of Ti, Al and a third component nitride or carbonitride coated with X-rays. When the intensity of the (111) plane in diffraction is I (111) and the intensity of the (200) plane is I (200), I (20) of the Ti nitride or carbonitride layer
0) / I (111) is 1 or less, and I (200) of the nitride or carbonitride layer of Ti, Al and the third component
The value of / I (111) is 1 or more, and the third component is one or more components selected from Zr, Hf, Cr, W, Y, Si, Ce, and Nb. Multi-layer coated hard tool to do.
カーボンの含有量が、基体表面から被膜表面の方向にお
いて連続して増加する層を有することを特徴とする多層
被覆硬質工具。2. The multilayer hard tool according to claim 1, wherein
A multilayer coated hard tool having a layer in which the carbon content continuously increases in the direction from the substrate surface to the coating surface.
において、Ｚｒ、Ｈｆ、Ｃｒ、Ｗ、Ｙ、Ｓｉ、Ｃｅ、Ｎ
ｄの１種、または２種以上の添加量がＴｉとＡｌに対し
０．１原子パーセントから５０原子パーセントの範囲で
あることを特徴とする多層被覆硬質工具。3. The multilayer coated hard tool according to claim 1, wherein Zr, Hf, Cr, W, Y, Si, Ce and N are used.
A multilayer coated hard tool, characterized in that the addition amount of one or more of d is 0.1 atomic percent to 50 atomic percent with respect to Ti and Al.
において、Ａｌの酸化物層を少なくとも１層有すること
を特徴とする多層被覆硬質工具。4. The multilayer-coated hard tool according to claim 1, which has at least one Al oxide layer.
において、基体が超硬合金インサートであることを有す
る多層被覆硬質工具。5. The multilayer coated hard tool according to claim 1, wherein the substrate is a cemented carbide insert.
において、基体が高速度鋼エンドミルであることを特徴
とする多層被覆硬質工具。6. The multilayer coated hard tool according to claim 1, wherein the substrate is a high speed steel end mill.
において、基体がサーメットインサートであることを特
徴とする多層被覆硬質工具。7. The multilayer coated hard tool according to claim 1, wherein the base body is a cermet insert.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16680996A JP3452726B2 (en) | 1996-06-05 | 1996-06-05 | Multi-layer coated hard tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16680996A JP3452726B2 (en) | 1996-06-05 | 1996-06-05 | Multi-layer coated hard tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09323204A true JPH09323204A (en) | 1997-12-16 |
| JP3452726B2 JP3452726B2 (en) | 2003-09-29 |
Family
ID=15838080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16680996A Expired - Fee Related JP3452726B2 (en) | 1996-06-05 | 1996-06-05 | Multi-layer coated hard tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3452726B2 (en) |
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