JP3705381B2 - Multi-layer hard tool - Google Patents

Multi-layer hard tool Download PDF

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Publication number
JP3705381B2
JP3705381B2 JP25238496A JP25238496A JP3705381B2 JP 3705381 B2 JP3705381 B2 JP 3705381B2 JP 25238496 A JP25238496 A JP 25238496A JP 25238496 A JP25238496 A JP 25238496A JP 3705381 B2 JP3705381 B2 JP 3705381B2
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Japan
Prior art keywords
film
carbonitride
nitride
hard tool
cutting
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Expired - Fee Related
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JP25238496A
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Japanese (ja)
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JPH1076407A (en
Inventor
ブレンドル ハンス
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Moldino Tool Engineering Ltd
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Hitachi Tool Engineering Ltd
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Priority to JP25238496A priority Critical patent/JP3705381B2/en
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to BR9711680A priority patent/BR9711680A/en
Priority to ES97936553T priority patent/ES2192690T3/en
Priority to KR10-1999-7001800A priority patent/KR100512269B1/en
Priority to EP97936553A priority patent/EP0925386B1/en
Priority to AT97936553T priority patent/ATE233832T1/en
Priority to DE59709451T priority patent/DE59709451D1/en
Priority to PCT/CH1997/000321 priority patent/WO1998010120A1/en
Priority to US09/242,707 priority patent/US6395379B1/en
Publication of JPH1076407A publication Critical patent/JPH1076407A/en
Priority to US10/101,579 priority patent/US6558749B2/en
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Publication of JP3705381B2 publication Critical patent/JP3705381B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、優れた耐摩耗性を有する多層被覆硬質工具に関する。
【0002】
【従来の技術】
従来一般的であったTiNやTiCNコーティングに対し、近年Alを含有させ、耐摩耗性、耐酸化性を向上させる研究がなされ、特公平4−53642号、特公平5−67705号に代表されるように、Alの添加効果を認める事例も種々存在する。また、人工格子(超格子)を形成して、皮膜の特性を改善した事例も認められる(例として、特開平7−97679号)。これらの発明により、従来一般的であったTiNやTiCN皮膜がAlを含有する皮膜へと改良がなされつつある。
【0003】
【発明が解決しようとする課題】
しかしながら、最近の切削加工においては、高能率を得るため切削速度が更に速くなる傾向にあり、また、金型加工においても、従来は熱処理前の軟らかい鋼を切削していた場合が多いが、熱処理後の高硬度材を直接加工する事例が増えつつあるのが現状である。
【0004】
このような高速切削、並びに高硬度材料の切削においては、Alの添加は皮膜の耐酸化性を向上させ、TiNやTiCN皮膜よりは耐摩耗性を向上せしめるものの、今だ十分に満足のいくものではない。その理由は、一般的にイオンプレーティングにより形成された皮膜は、圧縮残留応力を有し、この圧縮残留応力は、皮膜の膜厚が厚くなるに伴い増加する。皮膜は圧縮残留応力の増加に伴い、その密着性は劣化し、従って現状では、使用に耐え得る皮膜の厚さは、せいぜい5μmが限界である。その為イオンプレーティングにより被覆された工具は、化学蒸着法(CVD)により蒸着された10〜15μmの膜厚を有する被覆工具に比べ、耐摩耗性が劣ることは否定できない事実であった。また、人工格子の形成により、皮膜の硬さが向上することは事実であり、耐摩耗性の向上は認められるものの、このような硬い皮膜はヤング率とも高く、皮膜が非常に高い圧縮残留応力を有し、せいぜい3〜5μmを形成するのが限界である。また、このような人工格子皮膜は、高い圧縮残留応力を有するために密着性に大きな課題を有するものである。
【0005】
【課題を解決するための手段】
本発明者らは、イオンプレーティング皮膜において、残留圧縮応力を低減し、厚膜化を実現し、その結果耐摩耗性を向上せしめる研究を行った結果、配向性の異なる2種の皮膜を多層被覆することにより、残留圧縮応力は増加することなく、厚膜化が実現できるという知見を得るに至った。
【0006】
一般に、イオンプレーティングにおいては皮膜は結晶成長において優先成長方位を有し、その結果、柱状の結晶構造を持つ皮膜が形成される。1つの柱状の結晶粒子を取り出してみれば、一定方向に強い結晶成長が認められる単結晶であり、内部欠陥は極めて少ない。このような結晶が連続して成膜することが、皮膜の厚さの増加に伴い残留圧縮応力が増加する原因である。
【0007】
本発明者等は、優先成長方位のそれぞれ異なる2種の皮膜を多層被覆することにより、皮膜と皮膜の界面に多くの格子欠陥を導入する技術を開発するに至った。つまり、(111)面に配向するTiの窒化物、炭窒化物と(200)面に配向するTi、Alの窒化物、炭窒化物を多層被覆することにおいて界面は不連続となり、エピタキシャル成長が抑制され、多くの格子欠陥が導入される。この多くの格子欠陥は、皮膜の残留圧縮応力を緩和するように成長中に再配列し、結果、皮膜の残留応力を抑制し、厚膜化を可能にするものである。
【0008】
例えば、(200)に配向するTiAlNを0.5μm形成すると残留応力は、1.2GPaであり、この皮膜を連続して10μm形成すると残留圧縮応力は、8GPaを越え著しく密着性が劣化する。一方(200)に配向するTiAlNを0.5μm、(111)に配向するTiNを0.5μm形成し、この多層被覆において10μmの皮膜を形成した場合は、驚くべき事にその残留圧縮応力は、せいぜい2GPaである。
【0009】
従って、本発明によれば容易に厚膜化が可能であり、その結果被覆工具に非常に高い耐摩耗性を付与することが可能である。
【0010】
更に、切削中に皮膜表面に発生したクラックは、結晶成長方向の異なる皮膜の界面において、その伝播が抑制される傾向にある。つまり、クラック先端に発生する応力集中を界面の多数の格子欠陥が緩和し、クラックの伝播に対し高い抵抗を示す。同時にクラックは、更に進展する場合、界面に沿って伝播し基体への伝播、強いては刃先の欠損を大巾に抑制するものである。
【0011】
しかしながら、この界面に沿ってクラックが伝播する傾向が著しいと皮膜が順次剥離し、結果、耐摩耗性を劣化させる場合も存在する。本発明者らは、このような現象を抑制し、多層被覆された皮膜と皮膜との界面に沿うクラック伝播をある程度抑制するために、界面にTiの窒化物、もしくは炭窒化物、Ti、Alの窒化物、もしくは炭窒化物を同時にコーティングし、中間的組成を有する中間層を介在させることより、皮膜と皮膜の界面に沿うクラック伝播を抑制する事実を見出した。従って、本発明による多層被覆硬質工具は、厚膜化により高い耐摩耗性を有すると共に、クラックが伝播し難いため、同時に高い靭性を有するものである。従って、皮膜が厚い時のみならず、比較的薄い場合においても工具寿命を向上させることは言うまでもない。
【0012】
以下に数値を限定した理由について述べる。
【0013】
Ti、Alの窒化物、炭窒化物のI(200)/I(111)の値を1以上とした理由は、この皮膜が(111)面に強く配向すればするほど高い圧縮応力を有するようになるため、好ましくなく、(200)面に配向した方が、この皮膜自体の残留圧縮応力が低いため、(200)面に配向すべく1以上とした。
【0014】
Tiの窒化物、炭窒化物は前述のように、(200)面に配向したTi、Alの窒化物、炭窒化物層との多層被覆において、界面に格子欠陥を導入するため、前記Ti、Alの窒化物、炭窒化物と反対に(111)面に配向させなければならず、I(200)/I(111)の値は1以下とした。
【0015】
また、中間層の厚さは、5nm以下であると上記界面に沿うクラック伝播に対し効果が認められず、500nmを越えるとTiの窒化物、もしくは炭窒化物とTi、Alの窒化物、もしくは炭窒化物がエピタキシャルに成長し易くなり、それぞれのI(200)/I(111)の値を制御することが困難になるため、5nm以上500nm以下とした。
【0016】
【実施例】
以下、実施例に基づき本発明を説明する。
【0017】
実施例1
JIS P40相当の超硬合金インサート、及びφ12、4枚刃の市販高速度鋼ラフィングエンドミルにアークイオンプレーティング法により、Tiターゲット、TiAlターゲット(Ti/Al=50/50)を用い、表1に示す皮膜を形成した。比較工具として同じアークイオンプレーティング法により、TiN、TiAlN皮膜を形成した。
【0018】
【表1】

Figure 0003705381
超硬合金インサートにおいては、切削条件1に基づきフライス切削を行い、逃げ面摩耗値が0.3mmに達するまでの切削長さを求め、それを寿命とした。TiNのコーティングにおいては、Tiターゲットに電流を流し、TiAlNコーティングにおいては、TiAlターゲットに電流を流しコーティングを行った。また、中間層の形成においては、Tiターゲット、TiAlターゲット双方に電流を流し、コーティングを行った。
【0019】
また、高速度鋼エンドミルにおいては、切削条件2に基づき切削を行い、逃げ面摩耗値が0.2mmに達するまでの切削長を求め、それを寿命とした。その結果も表1に併記する。
【0020】
切削条件1は、インサート(SEE42−TN)を用い、被削材DAC(HRC40)、切削速度100(m/min)、送り0.1(mm/刃)、切り込み(2mm)である。
【0021】
切削条件−2は、高速度鋼エンドミルを用い、被削材DAC(HRC10)、切削速度50(m/min)、送り0.07(mm/刃)、軸方向切り込み量18mm、径方向切り込み量6mm、切削油なし、ダウンカット(Down Cut)である。
【0022】
表1から明らかなように、本発明による多層被覆工具は、10μm以上の厚膜化においても残留応力が制御されるため、皮膜の剥離や刃先のチッピングは認められず、安定した長時間の切削が可能である。
【0023】
実施例2
実施例1と同一の方法により、表2に示す種々中間層を有する工具を作成し、同様の切削評価を行った。その結果を表2に併記する。
【0024】
【表2】
Figure 0003705381
表2より明らかなように、10nmから400nmの厚みの範囲の中間層を介在させることにより、ほぼ同程度の長寿命化が認められる。
【0025】
【発明の効果】
本発明により、イオンプレーティング法での厚膜化が容易に可能となり、また膜厚化にさいし、結晶成長方向を特定することによりクラックが伝播し難く、高い靭性を有する多層皮膜を得ることが出来、また比較的薄い場合においても工具寿命を向上させることが出来る。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a multilayer coated hard tool having excellent wear resistance.
[0002]
[Prior art]
In recent years, studies have been made to improve wear resistance and oxidation resistance by adding Al to TiN and TiCN coatings that have been common in the past, and are represented by Japanese Patent Publication Nos. 4-53642 and 5-67705. Thus, there are various examples in which the effect of adding Al is recognized. In addition, there are cases in which artificial lattices (superlattices) are formed to improve the properties of the film (for example, JP-A-7-97679). By these inventions, TiN and TiCN films, which have been common in the past, are being improved to films containing Al.
[0003]
[Problems to be solved by the invention]
However, in recent cutting work, cutting speed tends to be further increased in order to obtain high efficiency. Also, in die machining, conventionally, soft steel before heat treatment is often cut. The current situation is that the number of cases where the later high hardness materials are directly processed is increasing.
[0004]
In such high-speed cutting and high-hardness material cutting, the addition of Al improves the oxidation resistance of the film and improves the wear resistance over TiN and TiCN films, but is still satisfactory. is not. The reason is that a film generally formed by ion plating has a compressive residual stress, and this compressive residual stress increases as the film thickness increases. As the compressive residual stress increases, the adhesion of the film deteriorates. Therefore, at present, the thickness of the film that can withstand use is limited to 5 μm at most. For this reason, it is undeniable that the tool coated by ion plating is inferior in wear resistance as compared with a coated tool having a film thickness of 10 to 15 μm deposited by chemical vapor deposition (CVD). In addition, it is true that the hardness of the film is improved by the formation of the artificial lattice, and although the improvement in wear resistance is recognized, such a hard film has a high Young's modulus and the film has a very high compressive residual stress. It is the limit to form 3 to 5 μm at most. Moreover, since such an artificial lattice film has a high compressive residual stress, it has a big problem in adhesiveness.
[0005]
[Means for Solving the Problems]
The inventors of the present invention conducted research to reduce residual compressive stress and increase the thickness of the ion plating film, thereby improving the wear resistance. As a result, two kinds of films having different orientations were multilayered. As a result, it has been found that thickening can be realized without increasing the residual compressive stress.
[0006]
Generally, in ion plating, a film has a preferential growth orientation in crystal growth, and as a result, a film having a columnar crystal structure is formed. If one columnar crystal particle is taken out, it is a single crystal in which strong crystal growth is recognized in a certain direction, and there are very few internal defects. The continuous film formation of such crystals is a cause of an increase in residual compressive stress as the film thickness increases.
[0007]
The inventors of the present invention have developed a technique for introducing many lattice defects at the interface between a film and a film by coating two kinds of films having different preferential growth directions. That is, when the Ti nitride or carbonitride oriented in the (111) plane and the Ti, Al nitride or carbonitride oriented in the (200) plane are coated in multiple layers, the interface becomes discontinuous and the epitaxial growth is suppressed. Many lattice defects are introduced. Many of these lattice defects are rearranged during growth so as to relieve the residual compressive stress of the film, and as a result, the residual stress of the film is suppressed and a thick film can be formed.
[0008]
For example, when TiAlN oriented to (200) is formed to a thickness of 0.5 μm, the residual stress is 1.2 GPa. When this film is continuously formed to 10 μm, the residual compressive stress exceeds 8 GPa and the adhesion is significantly deteriorated. On the other hand, when 0.5 μm of TiAlN oriented to (200) and 0.5 μm of TiN oriented to (111) are formed, and a 10 μm film is formed in this multilayer coating, the residual compressive stress is surprisingly At best it is 2 GPa.
[0009]
Therefore, according to the present invention, it is possible to easily increase the film thickness, and as a result, it is possible to impart very high wear resistance to the coated tool.
[0010]
Further, the propagation of cracks generated on the surface of the film during cutting tends to be suppressed at the interface of the film with different crystal growth directions. That is, many lattice defects at the interface relax stress concentration generated at the crack tip, and show high resistance to propagation of cracks. At the same time, when the crack further develops, it propagates along the interface and propagates to the substrate, and thus greatly suppresses the cutting edge.
[0011]
However, if the tendency of the cracks to propagate along this interface is significant, the film peels off sequentially, and as a result, wear resistance may be deteriorated. In order to suppress such a phenomenon and to suppress crack propagation along the interface between the multi-layer coated film and the film to some extent, the present inventors have made Ti nitride, carbonitride, Ti, Al at the interface. The present inventors have found the fact that the propagation of cracks along the interface between the coating and the coating is suppressed by simultaneously coating the nitride or carbonitride and interposing an intermediate layer having an intermediate composition. Therefore, the multilayer coated hard tool according to the present invention has high wear resistance due to thickening and also has high toughness at the same time because cracks hardly propagate. Therefore, it goes without saying that the tool life is improved not only when the film is thick but also when the film is relatively thin.
[0012]
The reason why the numerical values are limited will be described below.
[0013]
The reason why the value of I (200) / I (111) of Ti, Al nitride and carbonitride is 1 or more is that the higher the orientation of this film in the (111) plane, the higher the compressive stress. Therefore, since the residual compressive stress of the film itself is lower when it is oriented in the (200) plane, it is set to 1 or more to be oriented in the (200) plane.
[0014]
In order to introduce lattice defects at the interface in the multilayer coating with Ti, Al nitride, and carbonitride layer oriented in the (200) plane, Ti nitride and carbonitride, as described above, Ti, Opposite to Al nitride and carbonitride, it must be oriented in the (111) plane, and the value of I (200) / I (111) was 1 or less.
[0015]
Further, if the thickness of the intermediate layer is 5 nm or less, no effect is observed on crack propagation along the interface, and if it exceeds 500 nm, Ti nitride, or carbonitride and Ti, Al nitride, or Since carbonitrides easily grow epitaxially and it becomes difficult to control the respective values of I (200) / I (111), the thickness is set to 5 nm or more and 500 nm or less.
[0016]
【Example】
Hereinafter, the present invention will be described based on examples.
[0017]
Example 1
Table 1 shows the Ti target and TiAl target (Ti / Al = 50/50) by arc ion plating method to JIS P40 cemented carbide insert, φ12, 4-flute commercial high speed steel roughing end mill. The film shown was formed. TiN and TiAlN films were formed by the same arc ion plating method as a comparative tool.
[0018]
[Table 1]
Figure 0003705381
In the cemented carbide insert, milling was performed based on the cutting condition 1, the cutting length until the flank wear value reached 0.3 mm was determined, and this was defined as the life. In the TiN coating, a current was passed through the Ti target, and in the TiAlN coating, a current was passed through the TiAl target for coating. Further, in the formation of the intermediate layer, current was passed through both the Ti target and the TiAl target for coating.
[0019]
Further, in the high-speed steel end mill, cutting was performed based on the cutting condition 2, and the cutting length until the flank wear value reached 0.2 mm was determined and used as the life. The results are also shown in Table 1.
[0020]
Cutting condition 1 uses an insert (SEE42-TN), work material DAC (HRC40), cutting speed 100 (m / min), feed 0.1 (mm / blade), and cutting (2 mm).
[0021]
Cutting condition-2 uses a high speed steel end mill, work material DAC (HRC10), cutting speed 50 (m / min), feed 0.07 (mm / blade), axial cut 18 mm, radial cut 6 mm, no cutting oil, down cut.
[0022]
As is clear from Table 1, the multi-layer coated tool according to the present invention controls the residual stress even when the film thickness is 10 μm or more. Is possible.
[0023]
Example 2
By the same method as in Example 1, tools having various intermediate layers shown in Table 2 were prepared, and the same cutting evaluation was performed. The results are also shown in Table 2.
[0024]
[Table 2]
Figure 0003705381
As can be seen from Table 2, the lifespan of about the same extent is recognized by interposing an intermediate layer having a thickness of 10 nm to 400 nm.
[0025]
【The invention's effect】
According to the present invention, it is possible to easily increase the film thickness by the ion plating method, and it is possible to obtain a multilayer film having high toughness by preventing the propagation of cracks by specifying the crystal growth direction as the film thickness increases. The tool life can be improved even when it is relatively thin.

Claims (3)

Ti窒化物もしくは炭窒化物からなる層とTiAlの窒化物もしくは、炭窒化物からなる層を少なくとも2層以上被覆した多層被覆硬質工具において、X線回折における(111)面の強度をI(111)、(200)面の強度をI(200)としたとき、Tiの窒化物もしくは炭窒化物層のI(200)/I(111)の値が1以下であり、Ti、Alの窒化物もしくは炭窒化物層のI(200)/I(111)の値が1以上であり、多層被覆する各層の中間にTiの窒化物、炭窒化物層とTi、Alの窒化物、炭窒化物層双方よりなる5nmから500nmの厚さの中間層を介在させたことを特徴とする多層被覆硬質工具。In a multilayer coated hard tool in which at least two layers of Ti nitride or carbonitride and TiAl nitride or carbonitride are coated, the intensity of the (111) plane in X-ray diffraction is I (111 ), When the strength of the (200) plane is I (200), the value of I (200) / I (111) of the Ti nitride or carbonitride layer is 1 or less, and Ti and Al nitrides Alternatively, the value of I (200) / I (111) of the carbonitride layer is 1 or more, and Ti nitride, carbonitride layer and Ti, Al nitride, carbonitride in the middle of each layer to be multilayer coated A multilayer coated hard tool characterized by interposing an intermediate layer having a thickness of 5 nm to 500 nm comprising both layers. 請求項1記載の多層被覆硬質工具において、基体が超硬合金インサートであることを特徴とする多層被覆硬質工具。2. A multilayer coated hard tool according to claim 1, wherein the substrate is a cemented carbide insert. 請求項1記載の多層被覆硬質工具において、基体が高速度鋼エンドミルであることを特徴とする多層被覆硬質工具。2. The multilayer coated hard tool according to claim 1, wherein the substrate is a high speed steel end mill.
JP25238496A 1996-09-03 1996-09-03 Multi-layer hard tool Expired - Fee Related JP3705381B2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP25238496A JP3705381B2 (en) 1996-09-03 1996-09-03 Multi-layer hard tool
US09/242,707 US6395379B1 (en) 1996-09-03 1997-09-03 Workpiece with wear-protective coating
KR10-1999-7001800A KR100512269B1 (en) 1996-09-03 1997-09-03 Workpiece coated for wearing protection
EP97936553A EP0925386B1 (en) 1996-09-03 1997-09-03 Workpiece with wear-protective coating
AT97936553T ATE233832T1 (en) 1996-09-03 1997-09-03 WEAR PROTECTION COATED WORKPIECE
DE59709451T DE59709451D1 (en) 1996-09-03 1997-09-03 WEAR PROTECTION-COATED WORKPIECE
BR9711680A BR9711680A (en) 1996-09-03 1997-09-03 Coated pe-a for anti-wear
ES97936553T ES2192690T3 (en) 1996-09-03 1997-09-03 PART WITH PROTECTIVE COATING AGAINST WEAR.
PCT/CH1997/000321 WO1998010120A1 (en) 1996-09-03 1997-09-03 Workpiece with wear-protective coating
US10/101,579 US6558749B2 (en) 1996-09-03 2002-03-20 Method for manufacturing a workpiece with wear-protective coating

Applications Claiming Priority (1)

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JP25238496A JP3705381B2 (en) 1996-09-03 1996-09-03 Multi-layer hard tool

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JPH1076407A JPH1076407A (en) 1998-03-24
JP3705381B2 true JP3705381B2 (en) 2005-10-12

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US11014167B2 (en) 2016-08-01 2021-05-25 Mitsubishi Materials Corporation Multilayer hard film-coated cutting tool

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DE102008013966A1 (en) * 2008-03-12 2009-09-17 Kennametal Inc. Hard material coated body
WO2012103967A1 (en) * 2011-02-01 2012-08-09 Asml Netherlands B.V. Substrate table, lithographic apparatus and device manufacturing method
US9416440B2 (en) * 2011-09-30 2016-08-16 Cemecon Ag Coating of substrates using HIPIMS
JP6488075B2 (en) 2014-03-26 2019-03-20 三菱重工業株式会社 Water jet peening equipment
JP6384341B2 (en) * 2014-06-27 2018-09-05 三菱マテリアル株式会社 Surface coated cutting tool with excellent abnormal damage resistance and wear resistance

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US11014167B2 (en) 2016-08-01 2021-05-25 Mitsubishi Materials Corporation Multilayer hard film-coated cutting tool

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