JP3705382B2 - Multi-layer hard tool - Google Patents
Multi-layer hard tool Download PDFInfo
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- JP3705382B2 JP3705382B2 JP25238596A JP25238596A JP3705382B2 JP 3705382 B2 JP3705382 B2 JP 3705382B2 JP 25238596 A JP25238596 A JP 25238596A JP 25238596 A JP25238596 A JP 25238596A JP 3705382 B2 JP3705382 B2 JP 3705382B2
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- JP
- Japan
- Prior art keywords
- film
- nitride
- hard tool
- carbonitride
- cutting
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Physical Vapour Deposition (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は、優れた耐摩耗性を有する多層被覆硬質工具に関する。
【0002】
【従来の技術】
従来一般的であったTiNやTiCNコーティングに対し、近年A1を含有させ、耐摩耗性、耐酸化性を向上させる研究がなされ、特公平4−53642号、特公平5−67705号に代表されるように、A1の添加効果を認める事例も種々存在する。また、人工格子(超格子)を形成して、皮膜の特性を改善した事例も認められる(例として、特開平7−97679号)。これらの発明により、従来一般的であったTiNやTiCN皮膜がA1を含有する皮膜へと改良がなされつつある。
【0003】
【発明が解決しようとする課題】
しかしながら、最近の切削加工においては、高能率を得るため切削速度が更に速くなる傾向にあり、また、金型加工においても、従来は熱処理前の軟らかい鋼を切削していた場合が多いが、熱処理後の高硬度材を直接加工する事例が増えつつあるのが現状である。
【0004】
このような高速切削、並びに高硬度材料の切削においては、A1の添加は皮膜の耐酸化性を向上させ、TiNやTiCN皮膜よりは耐摩耗性を向上させしめるものの、今だ十分に満足のいくものではない。その理由は、一般的にイオンプレーティングにより形成された皮膜は、圧縮残留応力を有し、この圧縮残留応力は、皮膜の膜厚が厚くなるに伴い増加する。皮膜は圧縮残留応力の増加に伴い、その密着性は劣化し、従って現状では、使用に耐え得る皮膜の厚さは、せいぜい5μmが限界である。その為イオンプレーティングにより被覆された工具は、化学蒸着法(CVD)により蒸着された10〜15μmの膜厚を有する被覆工具に比べ、耐摩耗性が劣ることは否定できない事実であった。また、人工格子の形成により、皮膜の硬さが向上することは事実であり、耐摩耗性の向上は認められるものの、このような硬い皮膜はヤング率とも高く、皮膜が非常に高い圧縮残留応力を有し、せいぜい3〜5μmを形成するのが限界である。また、このような人工格子皮膜は、高い圧縮残留応力を有するために密着性に大きな課題を有するものである。
【0005】
【課題を解決するための手段】
本発明者らは、イオンプレーティング皮膜において、残留圧縮応力を低減し、厚膜化を実現し、その結果耐摩耗性を向上せしめる研究を行った結果、配向性の異なる2種の皮膜を積層することにより、残留圧縮応力は増加することなく、厚膜化が実現できるという知見を得るに至った。
【0006】
一般に、イオンプレーティングにおいては皮膜は結晶成長において優先成長方位を有し、その結果、柱状の結晶構造を持つ皮膜が形成される。1つの柱状の結晶粒子を取り出して見れば、一定方位に強い結晶成長が認められる単結晶であり、内部欠陥は極めて少ない。このような結晶が連続して成膜することが、皮膜の厚さの増加に伴い残留圧縮応力が増加する原因である。本発明者等は、優先成長方位のそれぞれ異なる2種の皮膜を積層することにより、皮膜と皮膜の界面に多くの格子欠陥を導入する技術を開発するに至った。つまり、(111)面に配向するTiの窒化物、炭窒化物と(200)面に配向するTiとA1の窒化物、炭窒化物を積層することにおいて界面は不連続となり、エピタキシャル成長が抑制され、多くの格子欠陥が導入される。この多くの格子欠陥は、皮膜の残留圧縮応力を緩和するように成長中に再配列し、結果、皮膜の残留応力を抑制し、厚膜化を可能にするものである。例えば、(200)に配向するTiA1Nを0.5μm形成すると残留応力は、1.2GPaであり、この皮膜を10μm形成すると残留圧縮応力は、8GPaを越え著しく密着性が劣化する。一方(200)に配向するTiA1Nを0.5μm、(111)に配向するTiNを0.5μm形成し、この積層において層膜10μmの皮膜を形成した場合は、驚くべき事にその残留圧縮応力は、せいぜい2GPaである。
【0007】
従って、本発明によれば容易に厚膜化が可能であり、その結果被覆工具に非常に高い耐摩耗性を付与することが可能である。
【0008】
更に本発明者らの研究結果によれば、切削中に皮膜表面に発生したクラックは、結晶成長方向の異なる皮膜の界面において、その伝播が抑制される傾向にある。つまり、クラック先端に発生する応力集中を界面の多数の格子欠陥が緩和し、クラックの伝播に対し高い抵抗を示す。同時にクラックは、更に進展する場合、界面に沿って伝播し基体への伝播、強いては刃先の欠損を大巾に抑制するものである。従って、本発明による多層被覆硬質工具は、厚膜化により高い耐摩耗性を有すると共に、クラックが伝播し難いため、同時に高い靭性を有するものである。従って、皮膜が厚いときのみならず、比較的薄い場合においても工具寿命を向上させることは言うまでもない。
【0009】
以下に数値を限定した理由について述べる。TiとA1の窒化物、炭窒化物のI(200)/I(111)の値を1以上とした理由は、この皮膜が(111)面に強く配向すればするほど高い圧縮応力を有するようになるため、好ましくなく、(200)面に配向した方が、この皮膜自体の残留圧縮応力が低いため、(200)に面に配向すべく1以上とした。
【0010】
Tiの窒化物、炭窒化物は前述のように、(200)面に配向したTiとA1の窒化物、炭窒化物層との積層において、界面に格子欠陥を導入するため、前記TiとA1の窒化物、炭窒化物と反対に(111)面に配向させなければならず、I(200)/I(111)の値は1以下とした。また、皮膜はその膜厚が1μm以下であると耐摩耗性向上に対して効果が無く、15μmを越えると密着性の劣化をきたすため、1μmから15μmとした。
【0011】
【実施例】
以下、実施の形態に基づき本発明を説明する。
【0012】
実施例1
JIS P40相当の超硬合金インサート、及びφ12、4枚刃の市販高速度鋼ラフィングエンドミルにアークイオンプレーティング法により、Tiターゲット、TiA1ターゲット(Ti/A1=50/50)を用い、表1に示す皮膜を形成した。比較工具として同じアークイオンプレーティング法により、TiN、TiA1N皮膜を形成した。超硬合金インサートにおいては、切削条件1に基づきフライス切削を行い、逃げ面摩耗値が0.3mmに達するまでの切削長さを求め、それを寿命とした。
【0013】
また、高速度鋼エンドミルにおいては、切削条件2に基づき切削を行い、逃げ面摩耗値が0.2mmに達するまでの切削長さを求め、それを寿命とした。その結果を表1に併記する。
【0014】
切削条件−1は、インサート(SEE42−TN)を用い、被削材DAC(HRC40)、切削速度100(m/min)、送り0.1(mm/刃)、切り込み(2mm)である。
【0015】
切削条件−2は、高速度鋼エンドミルを用い、被削材DAC(HRC10)、切削速度50(m/min)、送り0.07(mm/刃)、軸方向切り込み量18mm、径方向切り込み量6mm、切削油なし、ダウンカット(Down Cut)である。
【0016】
【表1】
表1から明らかなように、本発明による多層被覆工具は、10μm以上の厚膜化においても残留応力が抑制されるため、皮膜の剥離や刃先のチッピングは認められず、安定した長時間の切削が可能である。
【0017】
【発明の効果】
本発明により、イオンプレーティング法での厚膜化が容易に可能となり、また厚膜化にさいし、結晶成長方向を特定することによりクラックが伝播し難く、高い靭性を有する多層皮膜を得ることが出来、また比較的薄い場合においても工具寿命を向上させることが出来る。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a multilayer coated hard tool having excellent wear resistance.
[0002]
[Prior art]
In recent years, studies have been made to improve wear resistance and oxidation resistance by adding A1 to TiN and TiCN coatings which have been conventionally used, and are represented by Japanese Patent Publication Nos. 4-53642 and 5-67705. Thus, there are various cases in which the effect of adding A1 is recognized. In addition, there are cases in which artificial lattices (superlattices) are formed to improve the properties of the film (for example, JP-A-7-97679). By these inventions, TiN and TiCN films, which have been common in the past, are being improved to films containing A1.
[0003]
[Problems to be solved by the invention]
However, in recent cutting work, cutting speed tends to be further increased in order to obtain high efficiency. Also, in die machining, conventionally, soft steel before heat treatment is often cut. The current situation is that the number of cases where the later high hardness materials are directly processed is increasing.
[0004]
In such high-speed cutting and high-hardness material cutting, the addition of A1 improves the oxidation resistance of the film and improves the wear resistance over TiN and TiCN films, but is still fully satisfactory. It is not a thing. The reason is that a film generally formed by ion plating has a compressive residual stress, and this compressive residual stress increases as the film thickness increases. As the compressive residual stress increases, the adhesion of the film deteriorates. Therefore, at present, the thickness of the film that can withstand use is limited to 5 μm at most. For this reason, it is undeniable that the tool coated by ion plating is inferior in wear resistance as compared with a coated tool having a film thickness of 10 to 15 μm deposited by chemical vapor deposition (CVD). In addition, it is true that the hardness of the film is improved by the formation of the artificial lattice, and although the improvement in wear resistance is recognized, such a hard film has a high Young's modulus and the film has a very high compressive residual stress. It is the limit to form 3 to 5 μm at most. Moreover, since such an artificial lattice film has a high compressive residual stress, it has a big problem in adhesiveness.
[0005]
[Means for Solving the Problems]
The present inventors conducted research to reduce residual compressive stress and increase the thickness of the ion plating film, and as a result improve the wear resistance. As a result, two kinds of films with different orientations were laminated. As a result, the inventors have found that a thick film can be realized without increasing the residual compressive stress.
[0006]
Generally, in ion plating, a film has a preferential growth orientation in crystal growth, and as a result, a film having a columnar crystal structure is formed. If one columnar crystal particle is taken out and seen, it is a single crystal in which strong crystal growth is recognized in a certain orientation, and there are very few internal defects. The continuous film formation of such crystals is a cause of an increase in residual compressive stress as the film thickness increases. The inventors of the present invention have developed a technique for introducing many lattice defects at the interface between the films by laminating two kinds of films having different preferred growth directions. In other words, when the Ti nitride oriented in the (111) plane, the carbonitride, and the Ti and A1 nitride oriented in the (200) plane and the carbonitride are laminated, the interface becomes discontinuous and the epitaxial growth is suppressed. Many lattice defects are introduced. Many of these lattice defects are rearranged during growth so as to relieve the residual compressive stress of the film, and as a result, the residual stress of the film is suppressed and a thick film can be formed. For example, when 0.5 μm of TiA1N oriented to (200) is formed, the residual stress is 1.2 GPa. When 10 μm of this film is formed, the residual compressive stress exceeds 8 GPa, and the adhesion is remarkably deteriorated. On the other hand, when TiA1N oriented to (200) is formed to 0.5 μm and TiN oriented to (111) is formed to 0.5 μm, and a film having a thickness of 10 μm is formed in this lamination, surprisingly, the residual compressive stress is It is 2 GPa at most.
[0007]
Therefore, according to the present invention, it is possible to easily increase the film thickness, and as a result, it is possible to impart very high wear resistance to the coated tool.
[0008]
Furthermore, according to the research results of the present inventors, the propagation of cracks generated on the surface of the coating during cutting tends to be suppressed at the interface of the coating with different crystal growth directions. That is, many lattice defects at the interface relax stress concentration generated at the crack tip, and show high resistance to propagation of cracks. At the same time, when the crack further develops, it propagates along the interface and propagates to the substrate, and thus greatly suppresses the cutting edge. Therefore, the multilayer coated hard tool according to the present invention has high wear resistance due to thickening and also has high toughness at the same time because cracks hardly propagate. Therefore, it goes without saying that the tool life is improved not only when the coating is thick but also when the coating is relatively thin.
[0009]
The reason why the numerical values are limited will be described below. The reason why the value of I (200) / I (111) of Ti and A1 nitrides and carbonitrides is 1 or more is that the stronger the film is oriented in the (111) plane, the higher the compressive stress. Therefore, since the residual compressive stress of the film itself is lower when oriented in the (200) plane, it is set to 1 or more to orient the plane in (200).
[0010]
As described above, Ti nitride and carbonitride introduce lattice defects at the interface in the lamination of Ti oriented to the (200) plane and the nitride and carbonitride layer of A1, so that Ti and A1 Opposite to the nitride and carbonitride, the (111) plane must be oriented, and the value of I (200) / I (111) was 1 or less. Further, if the film thickness is 1 μm or less, there is no effect for improving the wear resistance, and if it exceeds 15 μm, the adhesiveness is deteriorated, so that the film thickness is set to 1 μm to 15 μm.
[0011]
【Example】
Hereinafter, the present invention will be described based on embodiments.
[0012]
Example 1
Table 1. Using a Ti carbide target and TiA1 target (Ti / A1 = 50/50) by arc ion plating to a cemented carbide insert equivalent to JIS P40 and a φ12, 4-blade commercial high-speed steel roughing end mill. The film shown was formed. TiN and TiA1N films were formed by the same arc ion plating method as a comparative tool. In the cemented carbide insert, milling was performed based on the cutting condition 1, the cutting length until the flank wear value reached 0.3 mm was determined, and this was defined as the life.
[0013]
Further, in the high speed steel end mill, cutting was performed based on the cutting condition 2, and the cutting length until the flank wear value reached 0.2 mm was determined as the life. The results are also shown in Table 1.
[0014]
Cutting condition-1 uses an insert (SEE42-TN), a work material DAC (HRC40), a cutting speed of 100 (m / min), a feed of 0.1 (mm / blade), and a cut (2 mm).
[0015]
Cutting condition-2 uses a high speed steel end mill, work material DAC (HRC10), cutting speed 50 (m / min), feed 0.07 (mm / blade), axial cut 18 mm, radial cut 6 mm, no cutting oil, down cut.
[0016]
[Table 1]
As is clear from Table 1, the multi-layer coated tool according to the present invention suppresses residual stress even when the film thickness is 10 μm or more. Is possible.
[0017]
【The invention's effect】
According to the present invention, a thick film can be easily formed by the ion plating method. Further, when the film thickness is increased, it is difficult to propagate a crack by specifying the crystal growth direction, and a multilayer film having high toughness can be obtained. The tool life can be improved even when it is relatively thin.
Claims (3)
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25238596A JP3705382B2 (en) | 1996-09-03 | 1996-09-03 | Multi-layer hard tool |
DE59709451T DE59709451D1 (en) | 1996-09-03 | 1997-09-03 | WEAR PROTECTION-COATED WORKPIECE |
BR9711680A BR9711680A (en) | 1996-09-03 | 1997-09-03 | Coated pe-a for anti-wear |
PCT/CH1997/000321 WO1998010120A1 (en) | 1996-09-03 | 1997-09-03 | Workpiece with wear-protective coating |
AT97936553T ATE233832T1 (en) | 1996-09-03 | 1997-09-03 | WEAR PROTECTION COATED WORKPIECE |
KR10-1999-7001800A KR100512269B1 (en) | 1996-09-03 | 1997-09-03 | Workpiece coated for wearing protection |
US09/242,707 US6395379B1 (en) | 1996-09-03 | 1997-09-03 | Workpiece with wear-protective coating |
EP97936553A EP0925386B1 (en) | 1996-09-03 | 1997-09-03 | Workpiece with wear-protective coating |
ES97936553T ES2192690T3 (en) | 1996-09-03 | 1997-09-03 | PART WITH PROTECTIVE COATING AGAINST WEAR. |
US10/101,579 US6558749B2 (en) | 1996-09-03 | 2002-03-20 | Method for manufacturing a workpiece with wear-protective coating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25238596A JP3705382B2 (en) | 1996-09-03 | 1996-09-03 | Multi-layer hard tool |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH1076408A JPH1076408A (en) | 1998-03-24 |
JP3705382B2 true JP3705382B2 (en) | 2005-10-12 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP25238596A Expired - Fee Related JP3705382B2 (en) | 1996-09-03 | 1996-09-03 | Multi-layer hard tool |
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JP (1) | JP3705382B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE0700800L (en) * | 2006-12-15 | 2008-06-16 | Sandvik Intellectual Property | Coated cutting tool |
DE102008013966A1 (en) * | 2008-03-12 | 2009-09-17 | Kennametal Inc. | Hard material coated body |
JP5989673B2 (en) * | 2011-02-01 | 2016-09-07 | エーエスエムエル ネザーランズ ビー.ブイ. | Substrate table, lithographic apparatus, and device manufacturing method |
RU2700344C1 (en) * | 2019-02-05 | 2019-09-16 | федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" | Method of hardening of cutting tool by deposition of multilayer coatings of system ti-al |
-
1996
- 1996-09-03 JP JP25238596A patent/JP3705382B2/en not_active Expired - Fee Related
Also Published As
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JPH1076408A (en) | 1998-03-24 |
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