JP2000309864A - Multilayer film coated member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coated tool in which, e.g. problems such as the adhesion and toughness of an oxide coating in a physical vapor deposition process are solved and the adhesion of an oxygen-containing film is remarkably improved. SOLUTION: This multilayer-coated member consists of a super hard alloy, such as high speed steel, cemented carbide, and cermet, and a multilayer coating formed by an ion plating method on the super hard alloy. At least one layer among the multilayer coating of the multilayer coated member is provided by applying pulse bias to a base material. The multilayer coating is provided by alternately laminating a first layer two or more in number and a second layer two or more in number. The first layer is constituted of at least one selected from the group consisting of the carbides, nitrides and carbonitrides of at least one element among the group IVa, Va, VIa elements of the periodic table and Al; and the second layer is constituted of at least one selected from the group consisting of the oxides, carboxides, oxynitrides, and carboxynitrides of the group IVa, Va, VIa elements of the periodic table and Al.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-layer coating comprising a super-hard alloy substrate such as a high-speed steel, a super-hard alloy or a cermet, coated with a multi-layer coating having excellent oxidation resistance and / or wear resistance. The present invention relates to a member coated with a multilayer film which is most suitable for a cutting tool represented by a drill, an end mill, a throw-away insert for milling, a turning tool, and the like.

[0002]

2. Description of the Related Art A superhard alloy substrate such as high-speed steel, cemented carbide, or cermet is coated with a ceramic coating having excellent oxidation resistance and wear resistance, and the characteristics of the base and the coating are effectively derived. Many coating members aiming at achieving a long life have been proposed. Conventionally, as a coating of a coated tool, a coating of TiN, TiCN, or the like having excellent wear resistance has been widely and generally used. However, a metal nitride represented by TiN is liable to be oxidized at a high temperature, and there is a problem that wear resistance is significantly deteriorated. In recent years, in order to improve the oxidation problem of these TiN films and the like,
It has been proposed to improve the abrasion resistance, oxidation resistance, etc. by incorporating l.
2-56565, Japanese Patent Publication No. 4-53642,
There is Japanese Patent Publication No. 5-67705. On the other hand, as a method of coating a film, when roughly classified, a chemical vapor deposition method (CVD)
Method) and physical vapor deposition method (PVD method). Among them, it is known that a film coated by a PVD method such as an ion plating method or a sputtering method can improve abrasion resistance without deteriorating the strength of a substrate. For this reason, at present, coatings of coated cutting tools and the like typified by drills, end mills, and throw-away inserts for milling, which emphasize strength and fracture resistance, are coated by PVD.

[0003]

Problems to be Solved by the Invention
No. 56565 discloses a coating containing Al, for example, a member coated with a Ti, Al carbide, nitride, or carbonitride coating is a member coated with a coating containing no Al. It has been pointed out that the coated member is more excellent in oxidation resistance and abrasion resistance, but has a problem of deteriorating its mechanical properties. That is, by containing Al in the coating, while improving the chemical properties of the coating surface, the fracture toughness value is reduced,
In particular, when used as a cutting tool for high-speed cutting, the cutting edge temperature of the tool becomes extremely high, and the tool life is shortened due to oxidation of the coating, rapid wear, deterioration due to thermal shock resistance, and welding with the work material. There's a problem. Particularly in recent years, the cutting speed has tended to be further increased, and in many cases, processing under severe conditions, such as cutting high-speed steel after heat treatment, has been required. Solutions are desired.

Japanese Patent Laid-Open Publication No. 7-328811 proposes that the outermost layer is coated with TiAlON or the like to improve the oxidation resistance of the coated member. Just forming an oxide of
Sufficient oxidation resistance as required by processing under severe conditions has not yet been obtained. Furthermore, it has been proposed to form an alumina film generally used in a CVD method as an outermost layer by an ion plating method (Japanese Patent Application Laid-Open No. 9-192906). The adhesion is weak, and in actual cutting, the coating peels off due to the impact force, which is not yet satisfactory.

The present invention considers that the cutting edge temperature is extremely high in recent high-speed cutting and often becomes higher than the oxidation start temperature of the coating film. It is another object of the present invention to realize a covering member capable of performing stable cutting.

[0006]

In order to achieve the above object, the present applicant has made intensive studies on the oxidation mechanism using a TiAlN layer as an example.
a, 5a, 6a element or Al carbides, nitrides, carbonitrides, or composite carbides, composite nitrides, and first layers of composite carbonitrides, and 4a, 5a, 6a of the periodic table
Group 2 elements or Al oxides, carbonates, oxynitrides, carbonitrides, or their composite oxides, composite carbonates, composite oxynitrides, and second layers composed of composite carbonitrides alternately stacked Thus, the present inventors have found that a film having excellent oxidation resistance can be formed, and based on the knowledge, apply for an invention relating to a completed multilayer film-coated member.

The inventors of the present application have analyzed and studied the configuration of the multilayer film in more detail based on the above findings.
A multi-layer coating member comprising a multi-layer coating formed on a substrate made of a super-hard alloy such as a cemented carbide or a cermet, wherein the multi-layer coating comprises two or more first layers and two or more second layers. The first layer is composed of layers 4a, 5a, 6 of the periodic table.
The second layer is composed of at least one selected from the group consisting of carbides, nitrides, and carbonitrides of at least one element of group a and Al, and the second layer is composed of 4a, 5a, and 6a of the periodic table.
Group, and at least one element selected from the group consisting of oxides, carbonates, oxynitrides, and carbonitrides of at least one element of Al. It has been invented that a multi-layer coating member having the above characteristics can be realized. In another embodiment of the present invention, the first layer and the second layer are alternately laminated, and the first layer adjacent to the second layer and the second layer via the second layer is formed of a crystal. Means of having continuity and orienting the first layer in the (200) direction is employed. In still another embodiment of the present invention, the first layer and the second layer are alternately stacked, and the second layer and the first layer adjacent to the second layer via the second layer are faced. Means of having crystal continuity of a centered cubic structure and further orienting the first layer in the (200) direction is employed. Still another embodiment of the present invention employs a means in which the first layers and the second layers are alternately stacked, and the second layer has a pseudo superlattice structure.

Hereinafter, for the sake of easy understanding, a TiAlN layer, which is said to be excellent in oxidation resistance, will be referred to as the first layer,
The case where the second layer is a TiAlON layer will be described as an example, but the first layer and the second layer in the present invention are not limited to these layers. When an oxidation test of the TiAlN layer is performed in the air, Al near the surface of the coating diffuses to the outermost surface, where alumina is formed. According to the study of the present inventors, this is the reason that the formation of alumina suppresses diffusion of oxygen into the inside of the coating and improves oxidation resistance.
In this case, the coating immediately below alumina becomes a rutile-structured Ti oxide in which Al does not exist because Al has diffused to the outermost surface. This Ti oxide is very porous, and the alumina formed on the outermost surface acts as a barrier for oxygen diffusion to accelerate oxidation in a static oxidation test, but the alumina on the outermost surface is used for dynamic cutting. Is easily peeled off from the porous Ti oxide layer, and the barrier effect is not sufficiently exhibited for promoting the oxidation, and the oxidation proceeds continuously.

On the other hand, when a laminated structure is formed by interposing an oxygen-containing layer such as a TiAlON layer as the second layer between the TiAlN layers, the first layer of TiAlN is formed.
Even if one layer composed of the N layer is oxidized as described above to become a porous Ti oxide layer and oxidation proceeds inside the coating, the second layer composed of the underlying TiAlON layer
Since the layer functions as a barrier for oxidation diffusion, especially in the case of dynamic cutting of the coating, the oxidation diffusion into the inside of the coating is significantly suppressed, and a stable long life is achieved in the cutting. Note that the TiAlN layer as the first layer was peeled off by oxidation, and the TiA as the second layer which became the outermost layer was removed.
The 1ON layer also disappears during the cutting due to peeling or abrasion, but since the second underlying layer functions similarly, the oxidation resistance of the entire coating is greatly improved. Therefore, the second layer is as much as possible, preferably 1
By providing zero or more layers, a sufficiently satisfactory cutting life can be achieved. More preferably 100 to
There are about 500 layers.

FIG. 1 is a transmission electron microscope (hereinafter referred to as TE) showing a structure inside a coating in a multilayer coating member according to the present invention.
Called M. ) It is a photograph. For easy understanding, a supplementary line is provided on the left side of the figure, but a first layer of TiAlN having a thickness of about 0.03 to 0.05 μm is formed on the substrate.
It is formed in multiple layers with a very thin second layer indicated by supplemental lines. FIG. 2 is an enlarged photograph by TEM of the first layer and the second layer in the multilayer coating member of the present invention shown in FIG. FIGS. 3 and 4 show the results of analysis of the second layer by an energy dispersive X-ray spectrometer (hereinafter, referred to as EDX) and electron energy loss spectroscopy (hereinafter, referred to as EELS). This EDX and EELS
According to the analysis result, the second layer is a compound of Ti and Al, and a compound containing N and O, that is, TiAlON
It can be seen that the layer is composed of Also, in FIG.
Since the second layer is an extremely thin layer having a thickness of about 1 to 2 nm, the structure of the two first layers adjacent to each other via the second layer and the second layer is observed. It can be seen that the continuity of the crystal is maintained despite the existence of.

That is, as exemplified by FIGS. 1 to 4, the multilayer coating member of the present invention is composed of 4a, 5a and 5a of the periodic table.
a, group 6a element or Al carbide, nitride, carbonitride,
Or a first layer composed of a composite carbide, a composite nitride, or a composite carbonitride thereof, and a carbonate, an oxynitride, a carbonitride, or a carbonate of a Group 4a, 5a, or 6a element of the periodic table or Al. Thin second layers composed of composite carbonates, composite oxynitrides, and composite carbonitrides are alternately laminated, and the continuity of the crystal is provided between adjacent first layers via the second layers. Is maintained as a basic configuration.

In the multi-layer coated member of the present invention having the above-mentioned basic structure, the crystal structure is more preferably a face-centered cubic structure (FCC structure). In general, it is said that a film coated by the PVD method can improve abrasion resistance without deteriorating the strength of the substrate.
It is preferable to form a film by a PVD method. In this case, if the crystal structure of the film is an FCC structure, a stable film formation can be performed without impairing the continuity of the crystal.
Further, the film having the crystal having the FCC structure has more excellent characteristics in abrasion resistance than the film having the other structure.

In the multilayer coating member of the present invention having the above-described basic structure, if there is a large difference in the residual stress between the first layer and the second layer at the time of forming the coating, the first layer and the second layer are formed. A high shear stress due to the difference in residual stress acts on the interface between the layers, and this shear stress causes the coating to lose its adhesion.
The residual compressive stress of the coating itself depends strongly on the coating conditions. In general, a coating having a low ion energy has a low residual stress in the coating, whereas a coating having a high ion energy has a high residual stress in the coating. According to the study of the present inventors, when the residual stress is low, the coating tends to be oriented to (200). Therefore, in the present invention, not only the continuity of the crystal is obtained but also the abrasion resistance can be improved by increasing the degree of adhesion of the film by orienting the film in the (200) direction. The energy of ions during film formation is mainly determined by the bias voltage and the degree of vacuum applied to the substrate. Therefore, (2
The orientation of (00) can be realized by appropriately selecting and setting these requirements. Further, the orientation direction can be easily determined by X-ray diffraction.

Further, as the polycrystalline superlattice structure film, for example, a TiN / VN superlattice thin film formed by an ion plating method using vacuum arc discharge is known. As a result, a coating having high hardness is realized. The present inventors have found that when the second layer in the multilayer coating member of the present invention is extremely thin (for example, about several nm), a film having a structure very similar to such a superlattice structure is obtained. In the present invention, the first layer in the multilayer covering member of the present invention is relatively thick to constitute a superlattice, and is referred to as a pseudo superlattice structure in the present invention. In the case of a multilayer coating member having this pseudo super lattice structure, the hardness of the coating itself is predicted to be high, and the bond between the coatings is also strong, so that a material having more excellent wear resistance is required. Become.

In the multilayer coating member of the present invention, the present inventors have tried to add various third components in order to improve the oxidation resistance of the first layer itself. It was found that the addition of Y, Nd, Sm, and Sc improved the oxidation resistance of the coating. These components are considered to have the effect of segregating at the crystal grain boundaries of the first coating, suppressing the diffusion of oxygen at the grain boundaries, and improving the oxidation resistance of the coating. When the substitution amount of the third component is less than 1 atomic%, there is no effect in improving the oxidation resistance. On the other hand, when the amount exceeds 30 atomic%, the wear resistance of the coating is deteriorated.
It is desirable to substitute in the range of 30 atomic%. More preferably, it is in the range of 1 to 10 atomic%.

Further, in the multilayer coating member of the present invention,
Is a layer containing oxygen, which prevents oxidative diffusion into the inside of the coating and significantly improves the adhesion between the layers by forming continuity of the crystal structure with the first layer. Has the function of preventing the occurrence of peeling. If the thickness of the second layer is less than 1 nm, there is no effect in improving the oxidation resistance, and if it exceeds 200 nm, destruction occurs in the oxide, and as a result, the coating may be peeled off. ~ 200n
m is desirable. In addition, in a case where the pseudo-superlattice structure is to enjoy the operation and effect, the thickness is preferably in the range of 1 to 10 nm.

In the multi-layer film-coated member of the present invention, the outermost layer of the multi-layer film is formed of a composite oxide, a composite carbonate, a composite oxynitride, a composite oxynitride of a group 4a, 5a, or 6a element of the periodic table and Al. By using a layer made of carbonitride, the oxidation resistance in the initial stage of cutting is improved, and the welding resistance to the workpiece is also improved, so that the cutting life can be further extended. In this case, when the outermost layer film has an amorphous crystal structure, the oxidation resistance is further improved. That is, since oxygen diffuses preferentially at the grain boundaries, it is considered that an amorphous layer having no grain boundaries is more effective in suppressing oxygen diffusion and improving oxidation resistance.

The outermost oxide layer is composed of γ, κ, θ, α
In the case of using such a crystalline material, the oxidation resistance is slightly deteriorated, but the outermost layer itself is hardened, and in order to improve wear resistance, depending on the cutting application, an amorphous layer or a crystal layer is selected. Is preferred. In any case, if the thickness is less than 5 nm, the effect of improving the oxidation resistance is small, and if it exceeds 500 nm, the adhesion is deteriorated, so that the thickness is preferably in the range of 5 to 500 nm.

In the multi-layer film-coated member of the present invention, the innermost layer of the multi-layer film is preferably a layer having excellent adhesion to the substrate. One of such adhesion strengthening layers is, for example, a TiN layer. Further, a metal layer such as Ti or TiAl has a function of reducing the residual compressive stress of the film and improving the adhesion of the film. In any case, if the thickness is less than 2 nm, there is no effect in improving the adhesion, and if the thickness exceeds 5000 nm, the adhesion of the whole film is deteriorated.
The range of nm is preferred.

Now, as described above, the layer structure and the composition of each layer,
Although the crystal morphology and the like have been described, the relationship between the film forming method and defects will be further considered. Oxidation proceeds by oxidation of the crystal grains of the film itself and diffusion of oxygen at the grain boundaries of the crystal grains. The crystal grain boundary has a large number of lattice defects. The diffusion rate of oxygen here is several tens times the oxygen diffusion rate inside the crystal, and the oxidation of the film increases in proportion to the defect density of the crystal grain boundary. Therefore, if the lattice defects at the crystal grain boundaries of the film are eliminated, the oxidation rate is theoretically reduced to one-tenth. Such lattice defects are present not only at the crystal grain boundaries but also within the crystal grains, and make the film density lower than the theoretical value. Therefore, it is considered that if the density of the film is improved, the oxidation resistance of the film is surely improved.

On the other hand, the coating by the current physical vapor deposition method has a negative bias on the coating in any of an electron beam method (holo cathode method), a sputtering method, a magnetron sputtering method, and a cathode arc method as called ion plating. Is applied to electrically accelerate ionized metal ions and nitrogen ions to deposit a substance. In both cases, a DC voltage is used as a bias applied to the coating in common. When a high DC voltage is continuously applied, the temperature of the coating increases, so that the DC voltage is 20 V to 200 V at present.
In general, In such an applied voltage range, the ions deposited on the surface of the coating do not have sufficient energy for surface movement, the movable distance on the surface is limited, and there is a limit in filling the lattice defect. The density of lattice defects at the grain boundaries seems to dominate the density of the coating. When a normal negative bias is applied, the density of the coating film is actually 60% of the theoretical value calculated from the composition.
About 70%.

As a result of various investigations, if the bias applied to the coating is pulsed to enable coating with a higher bias, it is possible to greatly reduce defects in the crystal grains of the coating and defects at the crystal grain boundaries. That led to the finding. In other words, by applying the bias voltage intermittently, while suppressing the temperature rise of the coating, the energy of the ions deposited on the surface is significantly increased, and the ions can cause lattice defects by increasing the movable distance on the surface. Succeeded in enabling movement to the filling position. That is, the present inventor can reduce the lattice defects inside the crystal and at the crystal grain boundaries and improve the film density by intermittently pulsing the bias applied to the coating material. Is not only excellent in oxidation resistance when the cutting edge temperature is high, but also excellent in peeling resistance and chipping resistance even when the cutting edge temperature is relatively low, and even more excellent cutting performance,
The present inventors have found that they show a wider range of application, and have led to the present invention.

The applied voltage is set to 400 V,
%, No application (0 V) 50% at a rate of 20 kHz per second
When a voltage is applied at the frequency, the ion energy can be improved without increasing the temperature of the coating. By improving the ion energy, the movement distance of ions and atoms becomes longer, atoms can move to intragranular defects and grain boundary defects, and the defects in the film can be greatly reduced and the density of the film can be greatly improved. Become. As described above, by reducing the defects in the coating and increasing the coating density, the diffusion rate of oxygen is greatly reduced, and the oxidation resistance of the coating is greatly increased, resulting in a high cutting temperature and high hardness steel, which increases the cutting temperature. Extremely long cutting life can be achieved in cutting. Lattice defects existing inside the film crystal generate lattice strain and increase the compressive stress remaining in the film. When the compressive stress is increased, the adhesion of the film is deteriorated, and peeling is apt to occur, so that stable cutting cannot be performed and chipping or the like due to minute peeling of the film easily occurs. The pulsing of the bias greatly contributes to the reduction of the residual compressive stress.

Further, Mn, Si,
By adding a third component such as Y, it is possible to improve the oxidation resistance of the film and further improve the cutting characteristics. These third components segregate at the crystal grain boundaries of the TiAl-based coating, further enhance lattice defects at the grain boundaries, and further improve the oxidation resistance of the coating by further suppressing the diffusion of oxygen at the grain boundaries. Mn, S as components that provide such an effect
i, Cr, Zr, Hf, Y, Nb, and Nd were confirmed.

Here, the density of the film was measured by using a supersonic spectromicroscopy. Measurement method is frequency range 40M
Using an ultrasonic sensor of Hz to 140 MHz, the incident angle was variously changed, and the ultrasonic reflectance was measured. The steepest position in the phase curve of the reflectance at each frequency is regarded as the Rayleigh critical angle, the critical angle at each frequency is determined, and the Rayleigh wave velocity is determined according to Snell's law. Using inverse analysis from the dispersion curve of each frequency and Rayleigh wave velocity,
Calculate the elastic properties of the coating. Specifically, it was obtained by an optimization method that minimizes the sum of squares of the residuals between the calculated dispersion curve and the dispersion curve obtained from experiments.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments. Example 1 Using a small arc ion plating apparatus, coating of the present invention example and the comparative example was performed under the conditions shown in Table 1,
A coated carbide end mill was prepared. The coating conditions are
Pulse bias voltage -300 to -800 V, application rate 30
８０80%, and the reaction gas pressure was 3 Pa. The total film thickness is
It was 2.5 μm. Therefore, the total number of layers in the entire coating is different in each example. The second layer and the outermost layer TiAlON were formed by using a TiAl alloy target and intermittently introducing oxygen gas. Further, a TiN layer is formed as the innermost layer for the purpose of improving the adhesion to the substrate. As a comparative example, a sample in which a film having no multilayer structure was formed at a DC bias of -800 V was also prepared. In Table 1, TiAlON, whose crystal structure is not particularly described, has an amorphous structure. In the samples of Examples 1, 2, 6 and 9 of the present invention, the second layer and the second layer near the second layer were TE
When observed at M, the same crystal structure was observed, and almost no misfit transition was observed at the boundary, confirming that the sample had a pseudo superlattice structure.

[0027]

[Table 1]

A cutting test was performed on the obtained end mill under the following cutting conditions, and cutting was performed until the end mill was broken. Table 1 also shows the cutting length at the time when breakage occurred. Cutting conditions End mill φ8mm 6 blades Work material SKD11 HRC60 Cutting speed 40m / min Feed 0.06mm / tooth Cutting 12mm × 0.8mm Cutting oil dry

Next, an oxidation test was performed in the air at 1000 ° C. for 30 minutes to measure the thickness of the oxide layer. The results are also shown in Table 1. According to Table 1, in the present invention in which the TiAlON layer having the FCC structure is provided as the second layer so as to have crystal continuity, the oxidation resistance of the coating is significantly improved.
It is evident that the hardened material shows excellent properties in cutting hardened materials. According to our measurements, H
When cutting RC60 steel under the above conditions, the cutting edge temperature is 9
It was confirmed that the temperature reached 50 ° C. In the case of HRC50 steel, it reaches 950 ° C. at a cutting speed of 120 m / mim (other conditions are the same as above). This indicates that the multilayer coated member according to the present invention shows excellent cutting characteristics even under severe cutting conditions in which the cutting edge temperature exceeds 950 ° C., regardless of the hardness of the material to be cut. Particularly, in dry cutting, an effective effect is provided.

Example 2 The same coatings of the present invention and the comparative example as shown in Example 1 were coated on a cemented carbide drill and a cemented carbide insert, and a cutting test was performed under the following conditions. In the case of drill, 3
Wear amount after cutting 000 holes, 10m for insert
The flank wear after cutting was measured. Table 2 shows the results.

[0031]

[Table 2]

Drill cutting conditions (wet cutting) Drill diameter φ6 mm (P40 grade) Work material SCM440 (annealed material) Cutting speed 100 m / min Feed 0.1 mm / rev Hole depth 15 mm

Insert cutting conditions Insert SEE42TN (P40 grade) Work material SKD61 HRC42 (width 100 mm ×
(Chamfer of length 250mm) Cutting speed 150m / min Feeding 0.15m / tooth Cutting depth 1.5mm

As is clear from Table 2, it was confirmed that the drill according to the present invention exhibited excellent tool life in drills and inserts as well. The tendency is the same for end mills, drills and inserts.

Example 3 Using a small-sized arc ion plating apparatus, the coating shown in Table 3 was performed, and a cemented carbide end mill and a cemented carbide insert coated with the coatings according to the present invention and comparative examples were produced. The coating conditions were a pulse bias voltage of -300 to -800 V, an application rate of 30 to 80%, and a reaction gas pressure of 3 Pa. The crystallization of the outermost layer is 79 for α.
In the case of 0 ° C. and γ, the film was formed under the coating conditions of 680 ° C. The film forming conditions of the comparative example were substantially the same as those of the first embodiment.

[0036]

[Table 3]

For the inventive examples and the comparative examples, cutting evaluation was performed under the cutting conditions shown in Examples 1 and 2, and the results are shown in Table 3. Further, an oxidation test was performed under the conditions of holding at 1000 ° C. in the atmosphere for 2 hours, and the thickness of the formed oxide layer is also shown in Table 3. In this example, the total layer thickness was 2.5 μm.

As shown in Table 3, it is clear that the multilayer film of the present invention shows better oxidation resistance and cutting life.
That is, it is understood that the oxidation resistance and the tool life are further improved by interposing an oxide film inside as in the present invention.

Example 4 Using a TiAlX alloy target containing a predetermined amount of the third component X, the coating conditions were a pulse bias voltage of -30.
0 to -800 V, application rate 30 to 80%, reaction gas pressure 3
The cemented carbide end mill coated with the coatings of the present invention examples and comparative examples shown in Table 4 was produced, and the same cutting evaluation as in Example 1 and the same oxidation test as in Example 3 were performed.
The results are shown in Table 4. In this case, the second layer is unified to a TiAlON layer (5 nm) having an FCC structure,
The outermost layer was unified to an amorphous TiAlON layer.

[0040]

[Table 4]

From Table 4, it is clear that the third component further improves the oxidation resistance and the cutting life.

[0042]

As described above, according to the present invention, the first layer made of a carbide or a nitride and the second layer containing oxygen are alternately laminated while maintaining crystal continuity. By making its crystal structure an FCC structure and / or orienting it to (200), or by interposing a film having a pseudo superlattice structure, it can sufficiently withstand use even under severe conditions such as high-speed cutting. Thus, a multilayer coating member having excellent oxidation resistance and adhesion can be realized. That is, according to the present invention, it is possible to provide a coated tool having excellent characteristics that enables milling, end mill cutting, drill cutting, and the like under more severe conditions.

[Brief description of the drawings]

FIG. 1 is a TEM photograph showing the internal structure of a multilayer coating member of the present invention.
And an extremely thin second layer are alternately stacked.

FIG. 2 is an enlarged photograph by TEM of the internal structure of the coating in the multilayer coating member of the present invention. FIG. 2 shows a structure in which a first layer of TiAlN and a second layer of TiAlN are interposed via a second layer of TiAlON. , Indicating that the crystal has continuity.

FIG. 3 is an EDX analysis diagram of a second layer in the multilayer coating member of the present invention, and shows that the second layer is a compound of Ti and Al.

FIG. 4 is an EELS analysis diagram of the second layer in the multilayer coated member of the present invention, and shows that the second layer is a compound containing N and O.

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) C23C 14/16 C23C 14/16 B // B23B 27/14 B23B 27/14 A

Claims (15)

[Claims] 1. A multi-layer coating member comprising a super-hard alloy such as high-speed steel, super-hard alloy, cermet and a multi-layer coating formed thereon by an ion plating method. The multilayer coating is provided by applying a bias, and the multilayer coating is formed by alternately laminating two or more first layers and two or more second layers, and the first layer is composed of 4a, 5a, and 6a of the periodic table. Group, and at least one selected from the group consisting of carbides, nitrides, and carbonitrides of at least one element of Al, and the second layer is composed of 4a of the periodic table,
A multilayer covering member comprising at least one selected from the group consisting of oxides, carbonates, oxynitrides, and carbonitrides of at least one element of Group 5a, 6a, and Al. 2. The multilayer coated member according to claim 1, wherein
A multi-layer coated member, wherein the first layer adjacent to the second layer has substantially the same crystallographic orientation (as the second layer). 3. The multi-layer coated member according to claim 1, wherein said first layer has an fcc crystal structure. 4. The multilayer covering member according to claim 1, wherein said first layer is made of Mn, Si, Y, Nd, Sm, Sc.
1 to 30 atomic% of at least one additional element selected from
A multilayer covering member comprising: 5. The multilayer coating member according to claim 1, wherein said multilayer coating is an oxide, carbonate, or oxynitride of at least one element selected from Groups 4a, 5a, 6a and Al of the periodic table. A multilayer covering member having an outermost layer made of at least one selected from carbonitrides. 6. The multilayer coated member according to claim 5, wherein
The outermost layers are Ti and Al oxides, carbonates, oxynitrides,
A multilayer covering member comprising at least one selected from carbonitrides. 7. The multilayer coated member according to claim 5, wherein
The multilayer covering member, wherein the outermost layer is made of at least one selected from oxides, carbonates, oxynitrides, and carbonitrides of Ti, Si, and Al. 8. The multilayer coated member according to claim 5, wherein
The multilayer covering member, wherein the outermost layer is made of at least one selected from oxides, carbonates, oxynitrides, and carbonitrides of Ti. 9. The multi-layer coated member according to claim 3, wherein said outermost layer is amorphous. 10. The multilayer covering member according to claim 3, wherein said outermost layer is crystalline. 11. The multilayer coating member according to claim 1, wherein said multilayer coating has an innermost layer having excellent adhesion to a substrate, and said innermost layer is composed of TiN, TiCN, Ti, and TiA.
a multilayer covering member comprising at least 1 and having a thickness of 2 to 5000 nm. 12. The multilayer covering member according to claim 1, wherein the crystal orientation of the first layer is defined by a maximum X-ray diffraction intensity corresponding to the (200) plane. Covering member. 13. The multi-layer coated member according to claim 1, wherein said first layer has a thickness of 5 to 1000 nm. 14. The multi-layer coated member according to claim 1, wherein said second layer has a thickness of 5 to 200 nm. 15. The multi-layer coated member according to claim 5, wherein said outermost layer has a thickness of 5 to 500 nm.