CN110346419B - 具有可配置加热元件的气体传感器和利用该配置的方法 - Google Patents
具有可配置加热元件的气体传感器和利用该配置的方法 Download PDFInfo
- Publication number
- CN110346419B CN110346419B CN201910276098.6A CN201910276098A CN110346419B CN 110346419 B CN110346419 B CN 110346419B CN 201910276098 A CN201910276098 A CN 201910276098A CN 110346419 B CN110346419 B CN 110346419B
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- terminals
- heater track
- electrical
- temperature
- gas
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims description 32
- 238000005259 measurement Methods 0.000 claims description 82
- 238000009826 distribution Methods 0.000 claims description 9
- 238000012360 testing method Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 174
- 239000004020 conductor Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 10
- 229910044991 metal oxide Inorganic materials 0.000 description 9
- 150000004706 metal oxides Chemical class 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 239000011540 sensing material Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
- H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/037—Heaters with zones of different power density
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18305404.8A EP3550295B1 (fr) | 2018-04-05 | 2018-04-05 | Détecteur de gaz comprenant un élément de chauffage configurable et procédés exploitant la configurabilité |
| EP18305404.8 | 2018-04-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110346419A CN110346419A (zh) | 2019-10-18 |
| CN110346419B true CN110346419B (zh) | 2024-02-23 |
Family
ID=61972461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910276098.6A Active CN110346419B (zh) | 2018-04-05 | 2019-04-08 | 具有可配置加热元件的气体传感器和利用该配置的方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11402347B2 (fr) |
| EP (1) | EP3550295B1 (fr) |
| JP (1) | JP7280738B2 (fr) |
| CN (1) | CN110346419B (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3089010B1 (fr) * | 2018-11-28 | 2022-07-29 | Rubix S&I | Procédé de détection d’au moins une quantité de gaz d’au moins un gaz prédéterminé à partir d’un capteur de mesure d’une pluralité de gaz |
| CN112114007A (zh) * | 2020-09-22 | 2020-12-22 | 苏州大学 | 三电极式气体传感器及其制备方法和检测方法 |
| US11960268B2 (en) | 2021-05-04 | 2024-04-16 | Hewlett Packard Enterprise Development Lp | Power allocation to heat a processing chip of a network device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4953387A (en) * | 1989-07-31 | 1990-09-04 | The Regents Of The University Of Michigan | Ultrathin-film gas detector |
| WO2006005332A2 (fr) * | 2004-07-06 | 2006-01-19 | Aceos Gmbh | Dispositif pour determiner les proprietes d'un gaz |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6705152B2 (en) * | 2000-10-24 | 2004-03-16 | Nanoproducts Corporation | Nanostructured ceramic platform for micromachined devices and device arrays |
| KR100357219B1 (ko) * | 1999-04-14 | 2002-10-18 | 오토전자 주식회사 | 배기가스 센서 및 배기가스 센서를 이용한 환기 제어 장치 |
| US20020142478A1 (en) * | 2001-03-28 | 2002-10-03 | Hiroyuki Wado | Gas sensor and method of fabricating a gas sensor |
| US7887685B2 (en) * | 2005-07-14 | 2011-02-15 | Caterpillar Inc. | Multilayer gas sensor having dual heating zones |
| DE102005053120A1 (de) * | 2005-11-08 | 2007-05-10 | Robert Bosch Gmbh | Sensorelement für Gassensoren und Verfahren zum Betrieb desselben |
| JP5055349B2 (ja) * | 2009-12-28 | 2012-10-24 | 日立オートモティブシステムズ株式会社 | 熱式ガスセンサ |
| EP2533037B1 (fr) * | 2011-06-08 | 2019-05-29 | Alpha M.O.S. | Capteur de gaz de type chimiorésistance doté d'une architecture à plusieurs étages |
| JP6244562B2 (ja) * | 2013-01-07 | 2017-12-13 | Ｎｉｓｓｈａ株式会社 | ガス検出装置 |
| EP2778667A1 (fr) * | 2013-03-13 | 2014-09-17 | Sensirion AG | Capteur de gaz CMOS multi-température |
| FR3011331B1 (fr) * | 2013-10-01 | 2017-02-17 | Univ Aix Marseille | Capteur a gaz a couche sensible chauffee |
-
2018
- 2018-04-05 EP EP18305404.8A patent/EP3550295B1/fr active Active
-
2019
- 2019-04-04 US US16/375,173 patent/US11402347B2/en active Active
- 2019-04-04 JP JP2019071996A patent/JP7280738B2/ja active Active
- 2019-04-08 CN CN201910276098.6A patent/CN110346419B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4953387A (en) * | 1989-07-31 | 1990-09-04 | The Regents Of The University Of Michigan | Ultrathin-film gas detector |
| WO2006005332A2 (fr) * | 2004-07-06 | 2006-01-19 | Aceos Gmbh | Dispositif pour determiner les proprietes d'un gaz |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110346419A (zh) | 2019-10-18 |
| JP2019184605A (ja) | 2019-10-24 |
| EP3550295B1 (fr) | 2022-07-13 |
| US11402347B2 (en) | 2022-08-02 |
| JP7280738B2 (ja) | 2023-05-24 |
| US20190310216A1 (en) | 2019-10-10 |
| EP3550295A1 (fr) | 2019-10-09 |
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