CN110286563A - A kind of circulating scanning exposure machine - Google Patents
A kind of circulating scanning exposure machine Download PDFInfo
- Publication number
- CN110286563A CN110286563A CN201910530688.7A CN201910530688A CN110286563A CN 110286563 A CN110286563 A CN 110286563A CN 201910530688 A CN201910530688 A CN 201910530688A CN 110286563 A CN110286563 A CN 110286563A
- Authority
- CN
- China
- Prior art keywords
- exposure
- workpiece
- exposure device
- driving
- feeding machanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 9
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
- G03F7/70366—Rotary scanning
Abstract
A kind of circulating scanning exposure machine.The present invention relates to field of optical equipment, solve the problems, such as that existing workpiece exposure sources exposure efficiency is low.It include pedestal, the exposure desk being set on the base, and exposure device, it is respectively equipped with two groups of left feeding machanisms and right feeding machanism for workpiece feed on exposure desk, exposure device bracket is equipped with the mobile exposure device driving mechanism of exposure device of one row of driving or more；Pedestal is equipped with the mobile exposure device carriage drive mechanism of driving exposure device support vertical exposure device bracket.Left feeding machanism and right feeding machanism, which can simultaneously hold up workpiece, prepares exposure, when the workpiece exposure on the left side finishes, the workpiece that exposure device moves to right directly is exposed, the workpiece of exposure is transmitted discharging by the feeding machanism on the left side simultaneously, workpiece transmission unexposed on left side support column assembly is held up again and prepares exposure, is circuited sequentially；Sensor is for detecting whether workpiece is bent, to reject underproof workpiece；To which exposure efficiency is high, the feeding waiting time has not been needed.
Description
Technical field
The present invention relates to field of optical equipment more particularly to a kind of circulating scanning exposure machines.
Background technique
Existing exposure scan mode is usually after workpiece is put on exposure desk, to make exposure actions, exchanges workpiece mode
Must etc. after previous workpiece removes, another workpiece could move into.
Summary of the invention
It is an object of the invention to solve the problems, such as that the workpiece exposure sources exposure efficiency of the prior art is low.
To solve the technical solution that technical problem proposed by the invention uses are as follows: circulating scanning exposure machine of the invention
It include pedestal, the exposure desk being set on the base, and for the exposure device of workpiece exposure, on the exposure desk respectively
Left feeding machanism and right feeding machanism equipped with two groups for workpiece feed, left feeding machanism and right feeding machanism are exposure desk point
At left exposure region and right exposure region, the left feeding machanism and right feeding machanism include be used to support place workpiece by
The support column assembly of multiple inverted U-shaped support column compositions arranged in parallel, and for the workpiece support on support column assembly
The transfer plate of transmission is played, transfer plate is equipped with the top pillar component with support column assembly cooperation, and pedestal is equipped with driving top pillar component
It moves up and down and along the transmission driving mechanism that input and output material direction is moved, the pedestal is equipped with the exposure dress across exposure desk
Bracket is set, the above-described exposure device sliding of a row is set on exposure device bracket, and exposure device bracket is equipped with driving one
The exposure device driving mechanism that exposure device more than row is moved along exposure device bracket；The pedestal is equipped with driving exposure
The mobile exposure device carriage drive mechanism of appliance stand vertical exposure appliance stand.
Include: to the technical solution of the invention being further qualified
The sensor for detecting workpiece bows is equipped on the left feeding machanism and right feeding machanism.
The sensor is arranged on top pillar component, is equipped with a sensor below the quadrangle of corresponding workpiece.
On support column assembly, the quadrangle side of corresponding workpiece is equipped with a sensor for the sensor setting.
The top pillar component is equipped with for the air inlet absorption of workpieces on top pillar component.
The transmission driving mechanism includes the first driving cylinder for driving top pillar component to move up and down and driving first
The piston rod of the second driving cylinder that driving cylinder is moved along input and output material direction, the top pillar component and the first driving cylinder is solid
Fixed connection.
The exposure device driving mechanism is the driving of exposure device linear motor.
Exposure device carriage drive mechanism is the driving of exposure device bracket linear motor.
Through the above technical solutions, the invention has the benefit that the left feed of circulating scanning exposure machine of the invention
Mechanism and right feeding machanism, which can simultaneously hold up workpiece, prepares exposure, and when the workpiece exposure on the left side finishes, exposure device is mobile
Workpiece to the right is directly exposed, while the workpiece of exposure is transmitted discharging by the feeding machanism on the left side, then the left side is supported
Unexposed workpiece transmission, which is held up, on column assembly prepares exposure, circuits sequentially；Sensor is used to detect whether workpiece is bent, thus
Reject underproof workpiece；To which exposure efficiency is high, the feeding waiting time has not been needed.
Detailed description of the invention
Fig. 1 is a kind of schematic perspective view of circulating scanning exposure machine of the present invention.
Fig. 2 is a kind of schematic perspective view of circulating scanning exposure machine of the present invention.
Fig. 3 is structural representation when a kind of sensor of circulating scanning exposure machine of the present invention is located at below workpiece quadrangle
Figure.
Fig. 4 is structural representation when a kind of sensor of circulating scanning exposure machine of the present invention is located at workpiece quadrangle side
Figure.
Fig. 5 is structural representation when a kind of sensor of circulating scanning exposure machine of the present invention is located at workpiece quadrangle side
Figure.
Specific embodiment
Structure of the invention is described further below in conjunction with attached drawing.
Referring to figs. 1 to Fig. 5, a kind of circulating scanning exposure machine includes pedestal 1, the exposure desk 2 being set on the base, with
And the exposure device 3 exposed for workpiece 8, two groups of left feeding machanisms 4 and the right side for workpiece feed are respectively equipped on exposure desk
Exposure desk is divided into left exposure region and right exposure region, left feeding machanism and the right side by feeding machanism 5, left feeding machanism and right feeding machanism
Feeding machanism includes to be used to support the support column being made of multiple inverted U-shaped support columns arranged in parallel for placing workpiece
Component 41, and the transfer plate 42 for the workpiece on support column assembly being held up transmission, transfer plate are equipped with and support column group
The top pillar component 421 of part cooperation, pedestal are equipped with the transmission that driving top pillar component is moved up and down and moved along input and output material direction
Driving mechanism.In the present embodiment, top pillar component is equipped with for the air inlet absorption of workpieces on top pillar component.Air inlet energy
Enough absorption of workpieces on top pillar component, prevent workpiece from shaking dislocation.Transmission driving mechanism includes driving top pillar component or more
The second driving cylinder that mobile the first driving cylinder and the first driving cylinder of driving is moved along input and output material direction.Top pillar component with
The piston rod of first driving cylinder is fixedly connected.When exposure, the first driving cylinder driving top pillar component moves up stretching support
Column assembly jacks up workpiece and prepares exposure.When workpiece charging discharging, second driving cylinder driving the first driving cylinder is along input and output material
Direction movement is transmitted workpiece.
Pedestal is equipped with the exposure device bracket 6 across exposure desk, and exposure device sliding more than a row is set to exposure dress
It sets on bracket, exposure device bracket is equipped with the exposure device that the exposure device of one row of driving or more is moved along exposure device bracket
Driving mechanism；In the present embodiment, exposure device is equipped with two rows.When it is implemented, a row can be set in exposure device as needed
More than.In the present embodiment, exposure device driving mechanism is the driving of exposure device linear motor.Exposure device driving mechanism driving two
Row's exposure device is moved along exposure device bracket, from one side exposure region be moved to while other and exposure region and be exposed.Bottom
Seat is equipped with the mobile exposure device carriage drive mechanism of driving exposure device support vertical exposure device bracket.The present embodiment
In, exposure device carriage drive mechanism is the driving of exposure device bracket linear motor.The driving of exposure device carriage drive mechanism exposes
Electro-optical device support vertical exposure device bracket, so as to which successively the workpiece of one side exposure region is exposed, to improve exposure effect
Rate.
In the present embodiment, the sensor 7 for detecting workpiece bows is equipped on left feeding machanism and right feeding machanism.This
In embodiment, sensor is arranged on top pillar component, is equipped with a sensor below the quadrangle of corresponding workpiece.It is pushed up for detecting
Column assembly judges whether workpiece is bent to the distance of workpiece, and for sensor the data feedback of detection to system, system judgement is real
Whether actual value is more than design value, beyond then sounding an alarm, to reject underproof workpiece, improves exposure quality.Specific implementation
When, on support column assembly, the quadrangle side of corresponding workpiece is equipped with a sensor for sensor setting.According to workpiece plate thickness come
Whether detection workpiece is bent.
The left feeding machanism and right feeding machanism of circulating scanning exposure machine of the invention can simultaneously hold up workpiece quasi-
Standby exposure, when the workpiece exposure on the left side finishes, the workpiece that exposure device moves to right directly is exposed, while the confession on the left side
Expect that the workpiece of exposure is transmitted discharging by mechanism, then workpiece transmission unexposed on left side support column assembly held up and prepares exposure,
It circuits sequentially；Sensor is for detecting whether workpiece is bent, to reject underproof workpiece；To which exposure efficiency is high, it is not required to
There is the feeding waiting time.
Although being described in detail in conjunction with attached drawing to a specific embodiment of the invention, should not be construed as to this hair
The restriction of bright protection scope.In range described by claims, those skilled in the art are without creative work
The various modifications and deformation that can be made still fall within protection scope of the present invention.
Claims (8)
1. a kind of circulating scanning exposure machine, includes pedestal, the exposure desk being set on the base, and for workpiece exposure
Exposure device, it is characterised in that: two groups of left feeding machanisms for workpiece feed and right confession are respectively equipped on the exposure desk
Exposure desk is divided into left exposure region and right exposure region, the left feeding machanism by material mechanism, left feeding machanism and right feeding machanism
It include to be used to support the branch being made of multiple inverted U-shaped support columns arranged in parallel for placing workpiece with right feeding machanism
Dagger component, and the transfer plate for the workpiece on support column assembly being held up transmission, transfer plate are equipped with and support column group
The top pillar component of part cooperation, pedestal are equipped with the transmission driving that driving top pillar component is moved up and down and moved along input and output material direction
Mechanism, the pedestal are equipped with the exposure device bracket across exposure desk, and the above-described exposure device sliding of a row is set to
On exposure device bracket, exposure device bracket is equipped with the exposure that the exposure device of one row of driving or more is moved along exposure device bracket
Electro-optical device driving mechanism；The pedestal is equipped with the mobile exposure device of driving exposure device support vertical exposure device bracket
Carriage drive mechanism.
2. a kind of circulating scanning exposure machine as described in claim 1, it is characterised in that: the left feeding machanism and right confession
The sensor for detecting workpiece bows is equipped in material mechanism.
3. a kind of circulating scanning exposure machine as claimed in claim 2, it is characterised in that: the sensor is arranged in top pillar
On component, a sensor is equipped with below the quadrangle of corresponding workpiece.
4. a kind of circulating scanning exposure machine as claimed in claim 2, it is characterised in that: the sensor setting is supporting
On column assembly, the quadrangle side of corresponding workpiece is equipped with a sensor.
5. a kind of circulating scanning exposure machine as described in claim 1, it is characterised in that: the top pillar component, which is equipped with, to be used
In the air inlet absorption of workpieces on top pillar component.
6. a kind of circulating scanning exposure machine as described in claim 1, it is characterised in that: the transmission driving mechanism includes
There is the first driving cylinder that driving top pillar component moves up and down and driving the first driving cylinder is moved along input and output material direction second
Cylinder is driven, the top pillar component is fixedly connected with the piston rod of the first driving cylinder.
7. a kind of circulating scanning exposure machine as described in claim 1, it is characterised in that: the exposure device driving mechanism is
The driving of exposure device linear motor.
8. a kind of circulating scanning exposure machine as described in claim 1, it is characterised in that: the exposure device carriage drive machine
Structure is the driving of exposure device bracket linear motor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910530688.7A CN110286563A (en) | 2019-06-19 | 2019-06-19 | A kind of circulating scanning exposure machine |
| TW109115257A TWI726714B (en) | 2019-06-19 | 2020-05-07 | Cyclical scanning of exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910530688.7A CN110286563A (en) | 2019-06-19 | 2019-06-19 | A kind of circulating scanning exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110286563A true CN110286563A (en) | 2019-09-27 |
Family
ID=68005239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910530688.7A Pending CN110286563A (en) | 2019-06-19 | 2019-06-19 | A kind of circulating scanning exposure machine |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110286563A (en) |
| TW (1) | TWI726714B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990006022U (en) * | 1997-07-23 | 1999-02-18 | 문정환 | Wafer Chuck of Semiconductor Exposure Equipment |
| JP2009231846A (en) * | 2004-12-30 | 2009-10-08 | Asml Netherlands Bv | Substrate handler |
| CN101681869A (en) * | 2007-06-21 | 2010-03-24 | Asml荷兰有限公司 | Method of loading a substrate on a substrate table, device manufacturing method, computer program, data carrier and apparatus |
| US20110244396A1 (en) * | 2010-04-01 | 2011-10-06 | Nikon Corporation | Exposure apparatus, exchange method of object, exposure method, and device manufacturing method |
| JP2012173337A (en) * | 2011-02-17 | 2012-09-10 | Nsk Technology Co Ltd | Mask, proximity scan exposure device, and proximity scan exposure method |
| JP5724014B1 (en) * | 2014-04-22 | 2015-05-27 | 株式会社幸和 | Substrate support apparatus and substrate processing apparatus |
| CN204790309U (en) * | 2015-05-27 | 2015-11-18 | 中山新诺科技股份有限公司 | A digital laser directly writes equipment that is used for printing half tone by a large scale to be makeed |
| CN205003441U (en) * | 2015-09-30 | 2016-01-27 | 合肥芯碁微电子装备有限公司 | Exposure machine is directly write to two mesa laser |
| WO2016017414A1 (en) * | 2014-08-01 | 2016-02-04 | 株式会社村田製作所 | Direct exposure apparatus |
| CN106647185A (en) * | 2016-12-31 | 2017-05-10 | 江苏九迪激光装备科技有限公司 | Silk-screen printing direct platemaking system and platemaking method |
| JP2019045875A (en) * | 2018-12-07 | 2019-03-22 | 株式会社ニコン | Exposure device, manufacturing method of flat panel display, device manufacturing method and exposure method |
| CN210005856U (en) * | 2019-06-19 | 2020-01-31 | 深圳凯世光研股份有限公司 | circulating scanning exposure machine |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6082884B2 (en) * | 2012-06-12 | 2017-02-22 | サンエー技研株式会社 | Exposure apparatus and exposure method |
| CN104375388B (en) * | 2014-10-13 | 2016-09-14 | 江苏影速光电技术有限公司 | A kind of multi-work piece platform direct-write photoetching system |
-
2019
- 2019-06-19 CN CN201910530688.7A patent/CN110286563A/en active Pending
-
2020
- 2020-05-07 TW TW109115257A patent/TWI726714B/en active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990006022U (en) * | 1997-07-23 | 1999-02-18 | 문정환 | Wafer Chuck of Semiconductor Exposure Equipment |
| JP2009231846A (en) * | 2004-12-30 | 2009-10-08 | Asml Netherlands Bv | Substrate handler |
| CN101681869A (en) * | 2007-06-21 | 2010-03-24 | Asml荷兰有限公司 | Method of loading a substrate on a substrate table, device manufacturing method, computer program, data carrier and apparatus |
| US20110244396A1 (en) * | 2010-04-01 | 2011-10-06 | Nikon Corporation | Exposure apparatus, exchange method of object, exposure method, and device manufacturing method |
| JP2012173337A (en) * | 2011-02-17 | 2012-09-10 | Nsk Technology Co Ltd | Mask, proximity scan exposure device, and proximity scan exposure method |
| JP5724014B1 (en) * | 2014-04-22 | 2015-05-27 | 株式会社幸和 | Substrate support apparatus and substrate processing apparatus |
| WO2016017414A1 (en) * | 2014-08-01 | 2016-02-04 | 株式会社村田製作所 | Direct exposure apparatus |
| CN204790309U (en) * | 2015-05-27 | 2015-11-18 | 中山新诺科技股份有限公司 | A digital laser directly writes equipment that is used for printing half tone by a large scale to be makeed |
| CN205003441U (en) * | 2015-09-30 | 2016-01-27 | 合肥芯碁微电子装备有限公司 | Exposure machine is directly write to two mesa laser |
| CN106647185A (en) * | 2016-12-31 | 2017-05-10 | 江苏九迪激光装备科技有限公司 | Silk-screen printing direct platemaking system and platemaking method |
| JP2019045875A (en) * | 2018-12-07 | 2019-03-22 | 株式会社ニコン | Exposure device, manufacturing method of flat panel display, device manufacturing method and exposure method |
| CN210005856U (en) * | 2019-06-19 | 2020-01-31 | 深圳凯世光研股份有限公司 | circulating scanning exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI726714B (en) | 2021-05-01 |
| TW202101133A (en) | 2021-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100520375C (en) | Stage apparatus and vision measuring apparatus | |
| CN105530510A (en) | Camera horizontal test machine | |
| CN106809647A (en) | A kind of materials and parts of vision positioning arrange board device automatically | |
| CN110342233A (en) | Charging tray automatic loading/unloading equipment is not shut down | |
| CN106041315A (en) | Equipment for precisely carving light guide plate by using laser | |
| CN105872533A (en) | Camera module detection device of burning equipment | |
| CN105127108A (en) | Mobile phone screen flexible circuit board testing equipment | |
| CN106442520B (en) | PCB hole position detection equipment | |
| CN208399619U (en) | A kind of data line automatic checkout equipment | |
| CN203224213U (en) | Photoelectric detection device of support rod of automobile headrest | |
| CN102944561B (en) | A kind of appearance detecting method of matrix form gadget and device | |
| CN110286563A (en) | A kind of circulating scanning exposure machine | |
| CN103175471A (en) | Photoelectric detection device for automobile headrest support rods | |
| CN208156676U (en) | A kind of AOI panel detection system | |
| CN210005856U (en) | circulating scanning exposure machine | |
| CN208606708U (en) | Universal product automatic detecting structure based on CCD | |
| CN208269900U (en) | High Precision Automatic alignment system | |
| CN209531749U (en) | A kind of flatness detection apparatus for shaping | |
| CN107219452A (en) | A kind of novel clamp of flying probe tester | |
| CN207264397U (en) | A kind of two-dimentional decoding apparatus of automatic reading | |
| CN209349098U (en) | A kind of feeding distribution mechanism of mobile lens quality automatic detecting machine | |
| CN111044093A (en) | Image identification testing arrangement | |
| CN208592515U (en) | A kind of device of synchronous dual output laser half way processing light guide plate | |
| CN113115030A (en) | Multi-station testing equipment for camera module | |
| CN208000324U (en) | Measurement jig with fine positioning function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |