CN210005856U - circulating scanning exposure machine - Google Patents

circulating scanning exposure machine Download PDF

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Publication number
CN210005856U
CN210005856U CN201920922491.3U CN201920922491U CN210005856U CN 210005856 U CN210005856 U CN 210005856U CN 201920922491 U CN201920922491 U CN 201920922491U CN 210005856 U CN210005856 U CN 210005856U
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China
Prior art keywords
exposure
exposure device
work piece
column assembly
workpiece
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Active
Application number
CN201920922491.3U
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Chinese (zh)
Inventor
蔡志国
张米好
江俊龙
农远峰
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Caiz Optronics Corp
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Caiz Optronics Corp
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Priority to CN201920922491.3U priority Critical patent/CN210005856U/en
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Abstract

The utility model relates to an optical equipment field, solve the problem that current work piece exposure equipment exposure efficiency is low, the application discloses kinds of circulating scanning exposure machine, which comprises a base, the exposure platform of setting on the base, and exposure device, be equipped with two sets of left feed mechanism and the right feed mechanism that are used for the work piece feed on the exposure platform respectively, be equipped with the exposure device actuating mechanism that the exposure device that drive row above was arranged on the exposure device support removed, be equipped with the exposure device support actuating mechanism that drive exposure device support vertical exposure device support removed on the base, left feed mechanism and right feed mechanism can hold up the work piece simultaneously and prepare the exposure, work piece exposure on the left side finishes, exposure device removes the work piece on the right and directly exposes, the work piece conveying ejection of compact of exposing of feed mechanism on the left side simultaneously, again the work piece conveying that the left side was not exposed on the support post subassembly holds up and prepares the exposure, circulate in proper order, the sensor is used for detecting whether the work piece crooked, thereby reject unqualified work piece, thereby.

Description

circulating scanning exposure machine
Technical Field
The utility model relates to an optical equipment field especially relates to kinds of circulating scanning exposure machines.
Background
In the conventional exposure scanning method, the workpiece is usually placed on the exposure stage and then exposed, and the exchange of the workpiece must wait for before the workpiece is removed and then another workpiece can be moved in.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem of prior art's work piece exposure equipment exposure inefficiency.
The technical scheme who adopts for solving the technical problem that the utility model provides a circulating scanning exposure machine does, the utility model discloses a circulating scanning exposure machine is including the base, sets up the exposure platform on the base to and be used for the exposure device of work piece exposure, the exposure platform on be equipped with two sets of left feed mechanism and the right feed mechanism that are used for the work piece feed respectively, left feed mechanism and right feed mechanism divide into left exposure area and right exposure area to the exposure platform, left feed mechanism and right feed mechanism all including be used for supporting the support column subassembly of placing the work piece and being constituteed by a plurality of U-shaped support columns of parallel arrangement each other to and be used for the conveying board of work piece support conveying on the support column subassembly, be equipped with on the conveying board with support column subassembly complex fore-set subassembly, be equipped with on the base and drive mechanism that drives the fore-set subassembly and reciprocate and move along the business turn over material direction, the base on be equipped with the exposure device support that spanes the exposure platform, arrange more the exposure device slide and locate on the exposure device support, be equipped with the exposure device drive mechanism that drive arranged more than the exposure device that the base that the exposure device removed along the exposure device support that the exposure support that the.
To the utility model discloses make step technical scheme who restricts include:
and the left feeding mechanism and the right feeding mechanism are both provided with sensors for detecting the bending of the workpiece.
The sensor setting on the fore-set subassembly, the four corners below that corresponds the work piece all is equipped with sensors.
The sensor setting on the support column subassembly, the four corners side that corresponds the work piece all is equipped with sensors.
The ejection column assembly is provided with an air suction opening used for adsorbing the workpiece on the ejection column assembly.
The conveying driving mechanism comprises an th driving cylinder for driving the ejection column assembly to move up and down and a second driving cylinder for driving the th driving cylinder to move along the feeding and discharging direction, and the ejection column assembly is fixedly connected with a piston rod of the th driving cylinder.
The exposure device driving mechanism is driven by a linear motor of the exposure device.
The exposure device support driving mechanism is driven by an exposure device support linear motor.
Through the technical scheme, the beneficial effects of the utility model are that: the left feeding mechanism and the right feeding mechanism of the circulating scanning exposure machine can simultaneously hold up the workpiece for exposure, when the exposure of the workpiece on the left is finished, the exposure device moves to the workpiece on the right for direct exposure, and simultaneously, the feeding mechanism on the left conveys and discharges the exposed workpiece, and then conveys and holds up the unexposed workpiece on the supporting column assembly on the left for exposure, and the operation is sequentially circulated; the sensor is used for detecting whether the workpiece is bent or not so as to remove unqualified workpieces; therefore, the exposure efficiency is high, and the waiting time for feeding is not needed.
Drawings
Fig. 1 is a schematic perspective view of kinds of circulating scanning exposure machines of the present invention.
Fig. 2 is a schematic perspective view of kinds of circulating scanning exposure machines of the present invention.
Fig. 3 is a schematic structural view of the circulating type scanner with sensors located below the four corners of the workpiece.
Fig. 4 is a schematic structural view of the kinds of circulating type scanning exposure machines according to the present invention, in which the sensor is located on the four-corner side of the workpiece.
Fig. 5 is a schematic structural view of the kinds of circulating type scanning exposure machines according to the present invention, in which the sensors are located on the four-corner side of the workpiece.
Detailed Description
The structure of the present invention will be further explained with reference to the drawings at step .
Referring to fig. 1 to 5, kind of circulating scanning exposure machine includes a base 1, an exposure table 2 disposed on the base, and an exposure device 3 for exposing a workpiece 8, two sets of left and right feeding mechanisms 4 and 5 for feeding the workpiece are disposed on the exposure table, the left and right feeding mechanisms divide the exposure table into a left exposure area and a right exposure area, the left and right feeding mechanisms include a supporting column assembly 41 for supporting and placing the workpiece and composed of a plurality of inverted U-shaped supporting columns disposed in parallel, and a conveying plate 42 for supporting and conveying the workpiece on the supporting column assembly, the conveying plate is provided with a supporting column assembly 421 matched with the supporting column assembly, the base is provided with a conveying driving mechanism for driving the supporting column assembly to move up and down and move along a feeding and discharging direction, in this embodiment, the supporting column assembly is provided with an air suction opening for sucking the workpiece on the supporting column assembly, the air suction opening can suck the workpiece on the supporting column assembly, prevent the workpiece from shaking and misplacing, the conveying driving mechanism includes a first driving cylinder for driving the workpiece driving cylinder and a second driving cylinder for driving the workpiece to move up and move along a second driving cylinder 6754 for driving the workpiece to move the workpiece and to move along a feeding and discharging cylinder for driving the workpiece to move the workpiece.
The base is provided with exposure device supports 6 crossing an exposure platform, more than rows of exposure devices are arranged on the exposure device supports in a sliding mode, the exposure device supports are provided with exposure device driving mechanisms for driving more than rows of exposure devices to move along the exposure device supports, in the embodiment, the exposure devices are provided with two rows, in the specific implementation, more than rows of exposure devices can be arranged as required.
In the embodiment, the left feeding mechanism and the right feeding mechanism are respectively provided with a sensor 7 for detecting the bending of the workpiece, in the embodiment, the sensors are arranged on the top column assembly, sensors are arranged below four corners of the corresponding workpiece, the sensors are used for detecting the distance from the top column assembly to the workpiece to judge whether the workpiece is bent or not, the sensors feed detected data back to the system, the system judges whether an actual value exceeds a design value or not, and an alarm is given if the actual value exceeds the design value, so that unqualified workpieces are removed, the exposure quality is improved, in the concrete implementation, the sensors are arranged on the supporting column assembly, sensors are arranged on the side faces of the four corners of the corresponding workpiece, and whether the workpiece is bent or not is detected.
The left feeding mechanism and the right feeding mechanism of the circulating scanning exposure machine can simultaneously hold up the workpiece for exposure, when the exposure of the workpiece on the left is finished, the exposure device moves to the workpiece on the right for direct exposure, and simultaneously, the feeding mechanism on the left conveys and discharges the exposed workpiece, and then conveys and holds up the unexposed workpiece on the supporting column assembly on the left for exposure, and the operation is sequentially circulated; the sensor is used for detecting whether the workpiece is bent or not so as to remove unqualified workpieces; therefore, the exposure efficiency is high, and the waiting time for feeding is not needed.
While the present invention has been described in detail and with reference to the accompanying drawings, it is not to be understood as limited by the scope of the invention. Various modifications and changes may be made by those skilled in the art without inventive work within the scope of the present invention as described in the claims.

Claims (8)

  1. The circulating scanning exposure machine is characterized in that the exposure table is respectively provided with two groups of left feeding mechanisms and right feeding mechanisms for feeding workpieces, the left feeding mechanisms and the right feeding mechanisms divide the exposure table into a left exposure area and a right exposure area, each of the left feeding mechanisms and the right feeding mechanisms comprises a supporting column assembly which is used for supporting and placing the workpieces and consists of a plurality of inverted U-shaped supporting columns which are arranged in parallel, a conveying plate which is used for supporting and conveying the workpieces on the supporting column assembly is arranged on the conveying plate, a top column assembly which is matched with the supporting column assembly is arranged on the conveying plate, a conveying driving mechanism which drives the top column assembly to move up and down and move along the feeding and discharging direction is arranged on the base, exposure device supports which cross over the exposure table are arranged on rows of the exposure devices in a sliding mode and arranged on the exposure device supports, exposure device driving mechanisms which drive exposure devices above rows of the exposure devices to move along the exposure device supports are arranged on the base, and the exposure device supports are perpendicular to the exposure device supports.
  2. 2. The circulation type scanner/exposure machine of claim 1, wherein the left and right feeding mechanisms are each provided with a sensor for detecting the bending of the workpiece.
  3. 3. The circulation type scanner/exposure machine of claim 2, wherein the sensors are disposed on the top pillar assembly, and sensors are disposed under each of the four corners of the corresponding workpiece.
  4. 4. The kinds of circulating type scanning exposure machine of claim 2, wherein the sensors are arranged on the supporting column assembly, and sensors are arranged on the four corners of the corresponding workpiece.
  5. 5. The kinds of circulating type scanning exposure machine of claim 1, wherein the top pillar assembly is provided with an air suction opening for sucking the workpiece onto the top pillar assembly.
  6. 6. The circulation type scanner/exposure machine of claim 1, wherein the transport driving mechanism comprises a th driving cylinder for driving the top column assembly to move up and down and a second driving cylinder for driving the th driving cylinder to move along the feeding and discharging direction, and the top column assembly is fixedly connected to the piston rod of the th driving cylinder.
  7. 7. The kinds of circulating type scanner as set forth in claim 1, wherein the exposure device driving mechanism is driven by an exposure device linear motor.
  8. 8. The kinds of circulating scan exposure machine of claim 1, wherein the exposure device holder driving mechanism is driven by an exposure device holder linear motor.
CN201920922491.3U 2019-06-19 2019-06-19 circulating scanning exposure machine Active CN210005856U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920922491.3U CN210005856U (en) 2019-06-19 2019-06-19 circulating scanning exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920922491.3U CN210005856U (en) 2019-06-19 2019-06-19 circulating scanning exposure machine

Publications (1)

Publication Number Publication Date
CN210005856U true CN210005856U (en) 2020-01-31

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ID=69309846

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920922491.3U Active CN210005856U (en) 2019-06-19 2019-06-19 circulating scanning exposure machine

Country Status (1)

Country Link
CN (1) CN210005856U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110286563A (en) * 2019-06-19 2019-09-27 深圳凯世光研股份有限公司 A kind of circulating scanning exposure machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110286563A (en) * 2019-06-19 2019-09-27 深圳凯世光研股份有限公司 A kind of circulating scanning exposure machine

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A circular scanning exposure machine

Effective date of registration: 20210517

Granted publication date: 20200131

Pledgee: Bank of Jiangsu Limited by Share Ltd. Shenzhen branch

Pledgor: CAIZ OPTRONICS Corp.

Registration number: Y2021980003668

PC01 Cancellation of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20220513

Granted publication date: 20200131

Pledgee: Bank of Jiangsu Limited by Share Ltd. Shenzhen branch

Pledgor: CAIZ OPTRONICS Corp.

Registration number: Y2021980003668

PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A circulating scanning exposure machine

Effective date of registration: 20220517

Granted publication date: 20200131

Pledgee: Bank of Jiangsu Limited by Share Ltd. Shenzhen branch

Pledgor: CAIZ OPTRONICS Corp.

Registration number: Y2022980005703

PP01 Preservation of patent right
PP01 Preservation of patent right

Effective date of registration: 20231205

Granted publication date: 20200131