CN210005856U - circulating scanning exposure machine - Google Patents
circulating scanning exposure machine Download PDFInfo
- Publication number
- CN210005856U CN210005856U CN201920922491.3U CN201920922491U CN210005856U CN 210005856 U CN210005856 U CN 210005856U CN 201920922491 U CN201920922491 U CN 201920922491U CN 210005856 U CN210005856 U CN 210005856U
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- exposure
- exposure device
- work piece
- column assembly
- workpiece
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- 230000007246 mechanism Effects 0.000 claims abstract description 46
- 238000007599 discharging Methods 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 2
- 240000004282 Grewia occidentalis Species 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (8)
- The circulating scanning exposure machine is characterized in that the exposure table is respectively provided with two groups of left feeding mechanisms and right feeding mechanisms for feeding workpieces, the left feeding mechanisms and the right feeding mechanisms divide the exposure table into a left exposure area and a right exposure area, each of the left feeding mechanisms and the right feeding mechanisms comprises a supporting column assembly which is used for supporting and placing the workpieces and consists of a plurality of inverted U-shaped supporting columns which are arranged in parallel, a conveying plate which is used for supporting and conveying the workpieces on the supporting column assembly is arranged on the conveying plate, a top column assembly which is matched with the supporting column assembly is arranged on the conveying plate, a conveying driving mechanism which drives the top column assembly to move up and down and move along the feeding and discharging direction is arranged on the base, exposure device supports which cross over the exposure table are arranged on rows of the exposure devices in a sliding mode and arranged on the exposure device supports, exposure device driving mechanisms which drive exposure devices above rows of the exposure devices to move along the exposure device supports are arranged on the base, and the exposure device supports are perpendicular to the exposure device supports.
- 2. The circulation type scanner/exposure machine of claim 1, wherein the left and right feeding mechanisms are each provided with a sensor for detecting the bending of the workpiece.
- 3. The circulation type scanner/exposure machine of claim 2, wherein the sensors are disposed on the top pillar assembly, and sensors are disposed under each of the four corners of the corresponding workpiece.
- 4. The kinds of circulating type scanning exposure machine of claim 2, wherein the sensors are arranged on the supporting column assembly, and sensors are arranged on the four corners of the corresponding workpiece.
- 5. The kinds of circulating type scanning exposure machine of claim 1, wherein the top pillar assembly is provided with an air suction opening for sucking the workpiece onto the top pillar assembly.
- 6. The circulation type scanner/exposure machine of claim 1, wherein the transport driving mechanism comprises a th driving cylinder for driving the top column assembly to move up and down and a second driving cylinder for driving the th driving cylinder to move along the feeding and discharging direction, and the top column assembly is fixedly connected to the piston rod of the th driving cylinder.
- 7. The kinds of circulating type scanner as set forth in claim 1, wherein the exposure device driving mechanism is driven by an exposure device linear motor.
- 8. The kinds of circulating scan exposure machine of claim 1, wherein the exposure device holder driving mechanism is driven by an exposure device holder linear motor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920922491.3U CN210005856U (en) | 2019-06-19 | 2019-06-19 | circulating scanning exposure machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201920922491.3U CN210005856U (en) | 2019-06-19 | 2019-06-19 | circulating scanning exposure machine |
Publications (1)
Publication Number | Publication Date |
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CN210005856U true CN210005856U (en) | 2020-01-31 |
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ID=69309846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201920922491.3U Active CN210005856U (en) | 2019-06-19 | 2019-06-19 | circulating scanning exposure machine |
Country Status (1)
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CN (1) | CN210005856U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110286563A (en) * | 2019-06-19 | 2019-09-27 | 深圳凯世光研股份有限公司 | A kind of circulating scanning exposure machine |
-
2019
- 2019-06-19 CN CN201920922491.3U patent/CN210005856U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110286563A (en) * | 2019-06-19 | 2019-09-27 | 深圳凯世光研股份有限公司 | A kind of circulating scanning exposure machine |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A circular scanning exposure machine Effective date of registration: 20210517 Granted publication date: 20200131 Pledgee: Bank of Jiangsu Limited by Share Ltd. Shenzhen branch Pledgor: CAIZ OPTRONICS Corp. Registration number: Y2021980003668 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220513 Granted publication date: 20200131 Pledgee: Bank of Jiangsu Limited by Share Ltd. Shenzhen branch Pledgor: CAIZ OPTRONICS Corp. Registration number: Y2021980003668 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A circulating scanning exposure machine Effective date of registration: 20220517 Granted publication date: 20200131 Pledgee: Bank of Jiangsu Limited by Share Ltd. Shenzhen branch Pledgor: CAIZ OPTRONICS Corp. Registration number: Y2022980005703 |
|
PP01 | Preservation of patent right | ||
PP01 | Preservation of patent right |
Effective date of registration: 20231205 Granted publication date: 20200131 |