CN110228709A - A kind of the tooling folder shipping unit and substep flow system of semiconductor devices - Google Patents
A kind of the tooling folder shipping unit and substep flow system of semiconductor devices Download PDFInfo
- Publication number
- CN110228709A CN110228709A CN201910529538.4A CN201910529538A CN110228709A CN 110228709 A CN110228709 A CN 110228709A CN 201910529538 A CN201910529538 A CN 201910529538A CN 110228709 A CN110228709 A CN 110228709A
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- China
- Prior art keywords
- tooling
- shipping unit
- semiconductor devices
- clamping block
- component
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/915—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rotary movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Automatic Assembly (AREA)
Abstract
The present invention relates to a kind of tooling of semiconductor electric component folder shipping unit and substep flow system, the present invention includes indexing swivel base, turntable, fixture base, platform for placing material, internal clamping block, outer fixture block and release clamp component；Indexing swivel base is fixed on the rack, and the center of turntable is mounted on the output shaft of indexing swivel base；Fixture base is fixed at one week of turntable, and platform for placing material is mounted on the top of fixture base, and the platform for placing material includes placement section and positioning region；Internal clamping block and outer fixture block are positioned opposite, are rotatably connected on the pillar of fixture base, and internal clamping block and outer fixture block are located at the two sides of platform for placing material；Release clamp component is located at the lower section of outer fixture block；The present invention can guarantee that the location of workpiece does not loosen during transhipment, and clamping force is generated by spring, avoids setting motor or cylinder, makes the compact-sized of mechanism；Facilitate the opening of frock clamp；Idler wheel contact, so that contact is more smooth.
Description
Technical field
The present invention relates to electronic device manufacturing technology fields, and in particular to a kind of tooling folder fortune dress of semiconductor devices
It sets and substep flow system.
Background technique
The detection of semiconductor power device appearance is an important link in semiconductor technology production, because of chip manufacturing mistake
More graphic defects are had in journey, dirty, damaged, defect etc. bad order, in order to promote the yield of subsequent technique link
And product reliability needs to carry out appearance parts 100% microscopy.
State Intellectual Property Office discloses Publication No. CN109100366A in 2018.12.28, and patent name is semiconductor
The detection system and method for chip of laser end face appearance, the patent include chip carrier, lower view camera, chip pickup apparatus,
It is upper depending on camera light source, Optical devices and upper depending on group machine: semiconductor laser chip is drawn to optics and filled by chip pickup apparatus
The assigned work region set, the upper assigned work region that Optical devices are arranged in depending on camera light source, provides light source depending on camera to be upper,
Optical devices project the lower surface of semiconductor laser chip and four side magnified images in upper view camera, upper to obtain depending on camera
The amplification image of coring piece lower surface and four sides.The patent is direct pneumatic clamps hand-drive to the carrying of chip, without phase
The fixture answered, detection efficiency are slow.
State Intellectual Property Office discloses Publication No. CN204346940U in 2015.05.20, and patent name is a kind of half
Conductor encapsulates appearance delection device, which includes first resistor adjuster, first resistor light source control box, first camera, the
Two resistance controllers, second resistance light source control box, second light source control box and second camera: the first resistor adjuster,
First resistor light source control box, first light source control box and first camera are sequentially connected in series, the second resistance adjuster, the second electricity
Resistance light source control box, second light source control box and second camera are sequentially connected in series.Detection the degree of automation of the patent is low, by artificial
The pick-and-place of part is carried out, the large batch of Detection task of high speed is not suitable for.
Summary of the invention
The purpose of the present invention is: in view of the deficienciess of the prior art, providing a kind of accurate positioning, clamping is convenient, mechanism
Simply, the tooling folder shipping unit and substep flow system of efficient semiconductor devices are carried.
For the purpose of the present invention, it is achieved using following technical scheme: a kind of tooling folder shipping unit of semiconductor devices,
Including indexing swivel base, turntable, fixture base, platform for placing material, internal clamping block, outer fixture block and release clamp component；Index swivel base fixed setting
On the rack, the center of turntable is mounted on the output shaft of indexing swivel base；Fixture base is fixed at one week of turntable,
The fixture base shape be it is "T"-shaped, " T " shaped horizontal segment both ends are provided with pillar, are provided with circle in " T " shaped vertical section
Shape blind hole；Platform for placing material is mounted on the top of fixture base, and the platform for placing material includes placement section and positioning region, and placement section is level
Planar, the positioning region are two vertical flanges on placement section top；Internal clamping block and outer fixture block are positioned opposite, are rotatably connected on
On the pillar of fixture base, internal clamping block and outer fixture block are located at the two sides of platform for placing material；The internal clamping block includes tiltedly pressing from both sides section, erecting
Straight section and horizontal segment；Tiltedly folder section is obliquely installed, and is highly located at the top of platform for placing material, is tiltedly pressed from both sides and is arranged on the turning point of section and vertical section
There is a hinge hole, the pillar on the hinge hole and fixture base rotates connection；The upper surface of horizontal segment is provided with short axle, described
Short axle cooperate in the blind round hole of fixture base, be connected by cylindrical spring；It is convex that circular arc is provided with below horizontal segment
Rib；The shape of outer fixture block is similar to internal clamping block, is provided with idler wheel on the lower end of outer fixture block, the circular arc fin of the idler wheel and internal clamping block
It is in contact；The release clamp component includes right angle supporting plate, control cylinder and release clamp head；It is perpendicular by right angle supporting plate to control cylinder
It is directly fixed on the rack, release clamp head is fixed at the telescopic end of control cylinder, is provided with small rolling on the release clamp head
Pearl, the ball is corresponding with idler wheel, and the small ball position is located at the underface of idler wheel.
Preferably, the turntable upper periphery is provided with mounting groove, the mounting groove number is 16.
Preferably, the cylindrical spring upper end offsets with fixture base, lower end offsets with short axle.
Preferably, the release clamp component is provided with two groups altogether, be located at pick up at station when blanking.
Preferably, the height that the upper end of the internal clamping block and outer fixture block clamps position is flush.
Preferably, Worm Wheel System is arranged inside the indexing swivel base, output end rotates step-by-step movement, a complete cycle point
It is cut into 16 work steps.
Preferably, the release clamp component is provided with two groups, correspond at feeding and the station of blanking.
Preferably, the side top that the internal clamping block and outer fixture block are contacted with workpiece is provided with inclination inwardly oblique
Face.
Preferably, the blind round hole diameter of the fixture base is greater than the diameter of the short axle of internal clamping block.
A kind of substep flow system of semiconductor devices, including rotation handling device and tooling press from both sides shipping unit, two devices
Carrying track have a blending portion, above-mentioned tooling presss from both sides a kind of shipping unit work of semiconductor devices as described in the above technical scheme
Described in clamping shipping unit, above-mentioned rotation handling device include divider, pick-up component, correction for direction component, lifting assembly and
Guard assembly；The divider is mounted on the middle part of rack, and pick-up component is mounted on the telescopic end of divider, lifting assembly position
In the surface of pick-up component, lifting assembly and pick-up component are corresponded, and guard assembly is mounted on lifting assembly；Rotation is removed
There is blending portion in the carrying track of shipping unit and tooling folder shipping unit, and when arriving transfer station, lifting assembly drives pick-up component will
Workpiece decline, is put into platform for placing material, is clamped on platform for placing material by internal clamping block and outer fixture block.
Compared with prior art, the beneficial effects of the present invention are: tooling folder shipping unit keeps normally closed folder by setting
Tight component can guarantee that the location of workpiece does not loosen during transhipment, and clamping force is generated by spring, avoids setting motor
Or cylinder, make the compact-sized of mechanism；Release clamp component is set in specific position, facilitates the opening of frock clamp；Fixture and
It is contacted between release clamp component by idler wheel, so that contact is more smooth, process is more smooth during operation, improves work
Efficiency；Be arranged substep flow system benefit be by different clamping modes, can the upper and lower surface to workpiece examine
It surveys.
Detailed description of the invention
Fig. 1 is the configuration schematic diagram of the embodiment of the present invention.
Fig. 2 is the configuration schematic diagram for rotating handling device.
Fig. 3 is the configuration schematic diagram of pick-up component and correction for direction component.
In figure: indexing swivel base 41, turntable 42, fixture base 43, platform for placing material 44, internal clamping block 45, outer fixture block 46, release clamp group
Part 47, right angle supporting plate 471, control cylinder 472, release clamp head 473, rotation handling device 3, divider 31, pick-up component 32, side
To correction component 33, lifting assembly 34, guard assembly 35, folding shape bracket 341, disk 342, lifting cylinder 343, spoke slat 344,
Lower compression leg 245, shield 351, connecting plate 352, protection cylinder 353, guide post 354, connection strap 321, sleeve 322, activity rod set
323, rivet holder 324, suction plate 325, spring 326, stacker 331, stepper motor 332, folding shape supporting plate 333, bottom adjusting block 334,
Height adjusting blocks 335.
Specific embodiment
A kind of substep flow system of semiconductor devices, including rotation handling device and tooling press from both sides shipping unit.
As shown in Figure 1, a kind of tooling folder shipping unit of semiconductor devices includes indexing swivel base 41, turntable 42, folder
Have pedestal 43, platform for placing material 44, internal clamping block 45, outer fixture block 46 and release clamp component 47；Indexing swivel base 41 is fixed on the rack,
The center of turntable 42 is mounted on the output shaft of indexing swivel base 41, and 42 upper periphery of turntable is provided with mounting groove, institute
The mounting groove number stated is 16；Fixture base 43 is fixed at one week of turntable 42,43 shape of fixture base
To be "T"-shaped, " T " shaped horizontal segment both ends are provided with pillar, are provided with blind round hole in " T " shaped vertical section；Platform for placing material 44 is pacified
Mounted in the top of fixture base 43, the platform for placing material 44 includes placement section and positioning region, and placement section is horizontal planar, described
Positioning region is two vertical flanges on placement section top；Internal clamping block 45 and outer fixture block 46 are positioned opposite, are rotatably connected on fixture bottom
On the pillar of seat 43, internal clamping block 45 and outer fixture block 46 are located at the two sides of platform for placing material 44；The internal clamping block 45 includes tiltedly pressing from both sides
Section, vertical section and horizontal segment；Tiltedly folder section is obliquely installed, and is highly located at the top of platform for placing material 44, is tiltedly pressed from both sides the turnover of section and vertical section
Hinge hole is provided in place, the hinge hole rotates with the pillar in fixture base 43 and connect；The setting of the upper surface of horizontal segment
There is short axle, the short axle cooperates in the blind round hole of fixture base 43, is connected by cylindrical spring, the cylinder bullet
Spring upper end offsets with fixture base 43, and lower end offsets with short axle；Circular arc fin is provided with below horizontal segment；The shape of outer fixture block 46
Shape is similar to internal clamping block 45, is provided with idler wheel 461 on the lower end of outer fixture block 46, which connects with the circular arc fin of internal clamping block 45
Touching；The height that the upper end of the internal clamping block 45 and outer fixture block 46 clamps position is flush；The release clamp component 47 includes
Right angle supporting plate 471, control cylinder 472 and release clamp head 473；Control cylinder 472 is fixed on rack by right angle supporting plate 471 vertically
On, release clamp head 473 is fixed at the telescopic end of control cylinder 472, it is provided with small ball on the release clamp head 473,
The ball is corresponding with idler wheel 461, and the small ball position is located at the underface of idler wheel 461；The release clamp component 47
Be provided with two groups altogether, be located at pick up at station when blanking.
At work, indexing swivel base 41 drives 42 stepping of turntable to rotate to the tooling folder shipping unit 4, a complete cycle point
16 rotations, when placing workpiece, the release clamp component 47 at this works, and drives release clamp head by control cylinder 472
473 jack up internal clamping block 45 and outer fixture block 46 upwards, and internal clamping block 45 and outer fixture block 46 pass through lever principle, the clamping position phase of upper end
Outer expansion at this time puts down workpiece to be detected；After indexing the rotation of swivel base 41, fixture leaves release clamp component 47, internal clamping block 45
Under the action of the spring workpiece is kept clamping with outer fixture block 46, until release clamp component 47 is again when needing to carry blanking
It is secondary to unclamp frock clamp.
A kind of tooling folder shipping unit of semiconductor devices solves semiconductor power device low precision in the handling process, fixed
Position clamp system the problem of structure is complicated, normally closed clamping component is kept by setting, can guarantee work during transhipment
Part position does not loosen, and clamping force is generated by spring, avoids setting motor or cylinder, makes the compact-sized of mechanism；?
Release clamp component 47 is arranged in specific position, facilitates the opening of frock clamp；Pass through idler wheel 461 between fixture and release clamp component 47
Contact, so that contact is more smooth, process is more smooth during operation, improves working efficiency.
As shown in Fig. 2, the rotation handling device 3 include divider 31, pick-up component 32, correction for direction component 33,
Lifting assembly 34 and guard assembly 35；The divider 31 is mounted on the middle part of rack, on the upper end output shaft of divider 31
It is provided with mounting flange, pick-up component 32, the pick-up component 32 are evenly arranged on described mounting flange one week
It is provided with multiple；The underface of pick-up component 32 is provided with correction for direction component 33, and the correction for direction component 33 is arranged altogether
There are three groups；Lifting assembly 34 is located at the surface of pick-up component 32, and lifting assembly 34 and pick-up component 32 correspond；Protection group
Part 35 is mounted on lifting assembly 34, for protecting internal mechanism.The lifting assembly 34 includes folding shape bracket 341, circle
Disk 342, lifting cylinder 343, spoke slat 344 and lower compression leg 245；Disk 342 passes through connecting column and the fixed company of folding 341 phase of shape bracket
It connects, the underface of disk 342 is provided with spoke slat 344；The fixing end connection of lifting cylinder 343 is mounted on disk 342, is gone up and down
The telescopic end of cylinder 343 is connected with lower compression leg 245, and the lower compression leg 245 centainly cooperates with 344 phase of spoke slat, lower compression leg
245 lower ends are corresponding with pick-up component 32.The guard assembly 35 includes shield 351, connecting plate 352, protection cylinder 353
With guide post 354；The protection cylinder 353 is vertically installed at the end of folding shape bracket 341, and connecting plate 352 is mounted on protection gas
The vertical telescopic end of cylinder 353, guide post 354 are fixed at the bottom of connecting plate 352, and the mobile cooperation of the guide post 354 is being rolled over
On shape bracket 341, connecting plate 352 is mutually fixedly connected with the top of shield 351, and the shield 351 at tubular, open by side
There is vertical slot.
As shown in figure 3, the pick-up component 32 include connection strap 321, sleeve 322, activity rod set 323, rivet holder 324,
Suction plate 325 and spring 326；One end of connection strap 321 is connected with the flange on divider 31, the other end of connection strap 321
On be provided with sleeve 322, the mobile cooperation of activity rod set 323 in sleeve 322, the upper end of activity rod set 323 be fixedly installed to
Seat 324, the lower end of activity rod set 323 is provided with suction plate 325, is provided with suction hole on 325 lower end surface of suction plate；It is described
Sleeve 322 in be provided with spring 326,326 upper and lower ends of spring offset with rivet holder 324 and sleeve 322 respectively, by suction plate
325 mention upwards.
As shown in figure 3, the correction for direction component 33 include stacker 331, stepper motor 332, folding shape supporting plate 333,
Bottom adjusting block 334 and height adjusting blocks 335；Folding shape supporting plate 333 is fixed on the rack by bottom adjusting block 334, is adjusted
Depth distance；Height adjusting blocks 335 are connected in the vertical section of folding shape supporting plate 333 by holding screw, and height is adjusted；Stepping
Motor 332 is mounted on height adjusting blocks 335, and stacker 331, the undertaking are provided in the turning end of stepper motor 332
It is provided with " T " shaped deep gouge on seat 331, for placing semiconductor power device 001 in the deep gouge.
At work, lifting assembly 34 independently drives each air-breathing on pick-up component 32 to the rotation handling device 3
Plate 325 realizes lifting, is picking up, is placing and lifting when correction for direction；Suction plate 325 is turned after workpiece is sucked by 31 stepping of divider
Dynamic, suction plate 325 is pressed down the pushing of column 245 when needing correction for direction, puts the workpiece in stacker 331, then inhales
Gas plate 325 unclamps, and suction plate 325 is sucked again after workpiece is turned to certain angle by stepper motor 332, carries out movement.
It rotates handling device 3 to solve the problems, such as to need attitudes vibration in semiconductor power device handling process, passes through setting
The fixed lifting assembly 34 in position, and pick-up component 32 rotates thereunder, realizes workpiece and only needs to carry out in specific station
Lifting, keeps mechanism simple；Provided with correction for direction component 33, the variation that workpiece needs multi-pose is better adapted to, is improved subsequent
Process velocity and detection accuracy；Provided with guard assembly 35, the interference effect of dust is avoided, improves subsequent detection precision.
At work, workpiece carries out absorption carrying by rotation handling device 3 first to the substep flow system of semiconductor devices,
When blowing, lifting assembly 34 drives pick-up component 32 to decline workpiece, platform for placing material 44 is put into, by internal clamping block 45 on platform for placing material 44
It clamps with outer fixture block 46, is carried by tooling folder shipping unit；In splicing, release clamp component 47 is by internal clamping block 45 and outer fixture block
46 unclamp, and 32 undercarriage of pick-up component draw being transferred again on rotation handling device 3 and be carried close to workpiece；Setting
Substep circulation benefit be by different clamping modes, can the upper and lower surface to workpiece detect.
Claims (10)
1. a kind of tooling of semiconductor devices presss from both sides shipping unit, which is characterized in that including indexing swivel base (41), turntable (42), fixture
Pedestal (43), platform for placing material (44), internal clamping block (45), outer fixture block (46) and release clamp component (47)；Indexing swivel base (41) fixation is set
It sets on the rack, the center of turntable (42) is mounted on the output shaft of indexing swivel base (41)；Fixture base (43) fixation is set
Set one week in turntable (42), the fixture base (43) shape be it is "T"-shaped, " T " shaped horizontal segment both ends are provided with pillar,
Blind round hole is provided in " T " shaped vertical section；Platform for placing material (44) is mounted on the top of fixture base (43), the platform for placing material
It (44) include placement section and positioning region, placement section is horizontal planar, and the positioning region is that two of placement section top are vertical convex
Edge；Internal clamping block (45) and outer fixture block (46) are positioned opposite, are rotatably connected on the pillar of fixture base (43), internal clamping block (45) and
Outer fixture block (46) is located at the two sides of platform for placing material (44)；The internal clamping block (45) includes tiltedly pressing from both sides section, vertical section and horizontal segment；
Tiltedly folder section is obliquely installed, and is highly located at the top of platform for placing material (44), is tiltedly pressed from both sides and is provided with hinge hole on the turning point of section and vertical section,
The hinge hole rotates with the pillar on fixture base (43) and connect；The upper surface of horizontal segment is provided with short axle, and described is short
Axis cooperates in the blind round hole of fixture base (43), is connected by cylindrical spring；It is convex that circular arc is provided with below horizontal segment
Rib；The shape of outer fixture block (46) is similar to internal clamping block (45), is provided with idler wheel (461), the idler wheel on the lower end of outer fixture block (46)
It is in contact with the circular arc fin of internal clamping block (45)；The release clamp component (47) includes right angle supporting plate (471), control cylinder
(472) and release clamp head (473)；Control cylinder (472) is fixed on the rack vertically by right angle supporting plate (471), release clamp head
(473) it is fixed at the telescopic end of control cylinder (472), is provided with small ball on the release clamp head (473), the ball
Corresponding with idler wheel (461), the small ball position is located at the underface of idler wheel (461).
2. a kind of tooling of semiconductor devices according to claim 1 presss from both sides shipping unit, which is characterized in that the turntable
(42) upper periphery is provided with mounting groove, and the mounting groove number is 16.
3. a kind of tooling of semiconductor devices according to claim 1 or 2 presss from both sides shipping unit, which is characterized in that the circle
Column spring upper end offsets with fixture base (43), and lower end offsets with short axle.
4. a kind of tooling of semiconductor devices according to claim 1 or 2 or 3 presss from both sides shipping unit, which is characterized in that described
Release clamp component (47) is provided with two groups altogether, be located at pick up at station when blanking.
5. a kind of tooling of semiconductor devices according to claim 1 or 2 or 3 presss from both sides shipping unit, which is characterized in that described
The height that the upper end of internal clamping block (45) and outer fixture block (46) clamps position is flush.
6. a kind of tooling of semiconductor devices according to claim 1 or 2 or 3 presss from both sides shipping unit, which is characterized in that described
It indexes and Worm Wheel System is set inside swivel base (41), output end rotates step-by-step movement, and a complete cycle is divided into 16 work steps.
7. a kind of tooling of semiconductor devices according to claim 1 or 2 or 3 presss from both sides shipping unit, which is characterized in that described
Release clamp component (47) is provided with two groups, corresponds at feeding and the station of blanking.
8. a kind of tooling of semiconductor devices according to claim 1 or 2 or 3 presss from both sides shipping unit, which is characterized in that described
The side top that internal clamping block (45) and outer fixture block (46) are contacted with workpiece is provided with the inclined-plane of inclination inwardly.
9. a kind of tooling of semiconductor devices according to claim 1 presss from both sides shipping unit, which is characterized in that the fixture bottom
The blind round hole diameter of seat (43) is greater than the diameter of the short axle of internal clamping block (45).
10. a kind of substep flow system of semiconductor devices, which is characterized in that including rotation handling device (3) and tooling folder fortune
Device；A kind of work of semiconductor devices of the above-mentioned tooling folder shipping unit as described in claim 1-9 any one claim
Described in clamping shipping unit, above-mentioned rotation handling device (3) includes divider (31), pick-up component (32), correction for direction component
(33), lifting assembly (34) and guard assembly (35)；The divider (31) is mounted on the middle part of rack, pick-up component (32)
Be mounted on the telescopic end of divider (31), lifting assembly (34) is located at the surface of pick-up component (32), lifting assembly (34) with
Pick-up component (32) corresponds；Guard assembly (35) is mounted on lifting assembly (34)；Rotate handling device (3) and tooling folder
There is blending portion in the carrying track of shipping unit, and when arriving transfer station, lifting assembly (34) drives pick-up component (32) will be under workpiece
Drop, is put into platform for placing material (44), is clamped on platform for placing material (44) by internal clamping block (45) and outer fixture block (46).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910529538.4A CN110228709B (en) | 2019-06-19 | 2019-06-19 | Step-by-step circulation system of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910529538.4A CN110228709B (en) | 2019-06-19 | 2019-06-19 | Step-by-step circulation system of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110228709A true CN110228709A (en) | 2019-09-13 |
| CN110228709B CN110228709B (en) | 2021-06-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910529538.4A Expired - Fee Related CN110228709B (en) | 2019-06-19 | 2019-06-19 | Step-by-step circulation system of semiconductor device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113371408A (en) * | 2021-08-11 | 2021-09-10 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor product size detector and detection method thereof |
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| CN109625961A (en) * | 2019-01-25 | 2019-04-16 | 江苏信息职业技术学院 | Rotating disc type IC chip handling device vacuum distribution module and handling device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113371408A (en) * | 2021-08-11 | 2021-09-10 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor product size detector and detection method thereof |
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