CN110342242A - A kind of handling device of semiconductor devices - Google Patents
A kind of handling device of semiconductor devices Download PDFInfo
- Publication number
- CN110342242A CN110342242A CN201910529557.7A CN201910529557A CN110342242A CN 110342242 A CN110342242 A CN 110342242A CN 201910529557 A CN201910529557 A CN 201910529557A CN 110342242 A CN110342242 A CN 110342242A
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- component
- handling device
- pick
- workpiece
- semiconductor devices
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 37
- 238000001514 detection method Methods 0.000 claims abstract description 41
- 230000000694 effects Effects 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 113
- 230000006835 compression Effects 0.000 claims description 12
- 238000007906 compression Methods 0.000 claims description 12
- 230000002950 deficient Effects 0.000 claims description 12
- 238000007689 inspection Methods 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000428 dust Substances 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 26
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000007790 scraping Methods 0.000 description 7
- 230000007704 transition Effects 0.000 description 5
- 239000011295 pitch Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
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- 238000000386 microscopy Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Specific Conveyance Elements (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention relates to electronic device manufacturing technology fields.A kind of handling device of semiconductor devices, including divider, pick-up component, correction for direction component, lifting assembly and guard assembly；The divider is mounted on the middle part of rack, and mounting flange is provided on the upper end output shaft of divider, is evenly arranged with pick-up component on described mounting flange one week；Correction for direction component is provided with immediately below pick-up component, the correction for direction component is provided with three groups altogether；Lifting assembly is located at the surface of pick-up component, and lifting assembly and pick-up component correspond；Guard assembly is mounted on lifting assembly, for protecting internal mechanism.The present invention realizes workpiece and only needs to go up and down in specific station, keeps mechanism simple；The variation that workpiece needs multi-pose is better adapted to, following process speed and detection accuracy are improved；Provided with guard assembly, the interference effect of dust is avoided, improves subsequent detection precision.
Description
Technical field
The present invention relates to electronic device manufacturing technology fields, and in particular to a kind of handling device of semiconductor devices and
Automatic checkout equipment.
Background technique
The detection of semiconductor power device appearance is an important link in semiconductor technology production, because of chip manufacturing mistake
More graphic defects are had in journey, dirty, damaged, defect etc. bad order, in order to promote the yield of subsequent technique link
And product reliability needs to carry out appearance parts 100% microscopy.
State Intellectual Property Office discloses Publication No. CN109100366A in 2018.12.28, and patent name is semiconductor
The detection system and method for chip of laser end face appearance, the patent include chip carrier, lower view camera, chip pickup apparatus,
It is upper depending on camera light source, Optical devices and upper depending on group machine: semiconductor laser chip is drawn to optics and filled by chip pickup apparatus
The assigned work region set, the upper assigned work region that Optical devices are arranged in depending on camera light source, provides light source depending on camera to be upper,
Optical devices project the lower surface of semiconductor laser chip and four side magnified images in upper view camera, upper to obtain depending on camera
The amplification image of coring piece lower surface and four sides.The patent is that one by one, detection efficiency is slow to the carrying of chip,
The position of chip is not easy to adjust in real time.
State Intellectual Property Office discloses Publication No. CN203225236U in 2013.10.02, and patent name is semiconductor
Product testing machine, the patent include work platform, computer unit, identification camera and at least detect camera.The identification camera
It is recognized for the identification code on semiconductor product item, and recalls corresponding image map electronic document: is described at least to detect phase
Detection operation is compared with image comparison shelves in the image that machine intercepts the semiconductor product, and will test result be recorded in it is described
The corresponding image map electronic document of computer unit.The patent does not position the workpiece on assembly line, to vision camera
More demanding, the cost of equipment is also higher.
Summary of the invention
The purpose of the present invention is: in view of the deficienciess of the prior art, providing, a kind of transhipment is convenient, and Speed Efficient is convenient for
Position adjustment, the handling device and automatic checkout equipment of reliable efficient semiconductor devices.
For the purpose of the present invention, it is achieved using following technical scheme: a kind of handling device of semiconductor devices, including
Divider, pick-up component, correction for direction component, lifting assembly and guard assembly；The divider is mounted on the middle part of rack,
It is provided with mounting flange on the upper end output shaft of divider, is evenly arranged with absorption group on described mounting flange one week
Part；Correction for direction component is provided with immediately below pick-up component, the correction for direction component is provided with three groups altogether；Lifting assembly
Positioned at the surface of pick-up component, lifting assembly and pick-up component are corresponded；Guard assembly is mounted on lifting assembly, is used for
Mechanism inside protection.
The pick-up component includes connection strap, sleeve, activity rod set, rivet holder, suction plate and spring；One end of connection strap
It is connected with the flange on divider, sleeve is provided on the other end of connection strap, the mobile cooperation of activity rod set is living in sleeve
The upper end of lever set is fixedly installed rivet holder, and the lower end of activity rod set is provided with suction plate；It is provided with spring in the sleeve,
Spring upper and lower ends offset with rivet holder and sleeve respectively, and suction plate is mentioned upwards.
The correction for direction component includes stacker, stepper motor, folding shape supporting plate, bottom adjusting block and height adjusting blocks；
Folding shape supporting plate is fixed on the rack by bottom adjusting block, and depth distance is adjusted；Height adjusting blocks are connected by holding screw
It connects in the vertical section of folding shape supporting plate, height is adjusted；Stepper motor is mounted on height adjusting blocks, the turning end of stepper motor
On be provided with stacker.
Preferably, being provided with suction hole on the suction plate lower end surface.
Preferably, " T " shaped deep gouge is provided on the stacker, for placing semiconductor power device in the deep gouge
Part.
Preferably, the pick-up component is provided with 16.
Preferably, the lifting assembly includes folding shape bracket, disk, lifting cylinder, spoke slat and lower compression leg；Disk
It is mutually fixedly connected by connecting column with folding shape bracket, spoke slat is provided with immediately below disk；The fixing end of lifting cylinder connects
It being mounted on disk, the telescopic end of lifting cylinder is connected with lower compression leg, the lower compression leg and spoke slat mutually certain cooperation, under
Compression leg lower end is corresponding with pick-up component.
Preferably, the guard assembly includes shield, connecting plate, protection cylinder and guide post；The protection gas
Cylinder is vertically installed at the end of folding shape bracket, and connecting plate is mounted on the vertical telescopic end of protection cylinder, and guide post is fixed at company
The bottom of fishplate bar, on folding shape bracket, connecting plate is mutually fixedly connected the mobile cooperation of the guide post with the top of shield.
Preferably, the shield, at tubular, side is provided with vertical slot.
A kind of automatic checkout equipment of semiconductor devices, the equipment include rack and rack-mounted material casket feeding
It is device, handling device, tooling folder shipping unit, vision inspection apparatus, Mark point detection device, qualified workpiece dress case device, bad
Product fill case device and flash collection box；Expect casket feeding device for realizing the feeding of single power device, handling device and tooling
Folder shipping unit realizes the carrying of power device to be detected, and handling device is by suction type, and tooling folder shipping unit passes through folder
Take mode；Vision inspection apparatus is used to carry out element the vision-based detection of appearance, and Mark point detection device is used for element surface
Mark point carry out vision-based detection；Qualified workpiece dress case device and defective products dress case device carry out workpiece according to the mechanism of detection
Sorting and collection；Flash collection box is for rejecting in handling device not by isolated workpiece；The handling device is using above-mentioned
A kind of handling device of semiconductor devices of technical solution
Compared with prior art, the beneficial effects of the present invention are: handling device is by being arranged the fixed lifting assembly in position, and
Pick-up component rotates thereunder, realizes workpiece and only needs to be gone up and down in specific station, keeps mechanism simple；Provided with direction
Component is corrected, the variation that workpiece needs multi-pose is better adapted to, improves following process speed and detection accuracy；Provided with protection
Component avoids the interference effect of dust, improves subsequent detection precision.
Detailed description of the invention
Fig. 1 is the configuration schematic diagram of the embodiment of the present invention.
Fig. 2 is the configuration schematic diagram for expecting casket feeding device.
Fig. 3 is the configuration schematic diagram of handling device.
Fig. 4 is the configuration schematic diagram of pick-up component and correction for direction component.
Fig. 5 is the configuration schematic diagram of tooling folder shipping unit.
Fig. 6 is the structural schematic diagram of vision inspection apparatus and Mark point detection device.
Fig. 7 is the configuration schematic diagram of qualified workpiece dress case device.
Fig. 8 is the configuration schematic diagram of defective products dress case device.
In figure: rack 1, material casket feeding device 2, handling device 3, tooling press from both sides shipping unit 4, vision inspection apparatus 5, Mark point
Detection device 6, qualified workpiece dress case device 7, defective products dress case device 8, flash collection box 9, mounting rack 21, material casket limit frid
22, expect casket scraping wings 23, pusher cylinder 24, material casket collection box 25, arc blanking track 26, splicing block 27, receiving cylinder 28, divide
Cutter 31, correction for direction component 33, lifting assembly 34, guard assembly 35, folding shape bracket 341, disk 342, rises pick-up component 32
Sending down abnormally ascending cylinder 343, spoke slat 344, lower compression leg 245, shield 351, connecting plate 352, protection cylinder 353, guide post 354, connection strap
321, sleeve 322, activity rod set 323, rivet holder 324, suction plate 325, spring 326, stacker 331, stepper motor 332, folding shape
Supporting plate 333, bottom adjusting block 334, height adjusting blocks 335, indexing swivel base 41, turntable 42, fixture base 43, platform for placing material 44, inner clip
Block 45, outer fixture block 46, release clamp component 47, right angle supporting plate 471, control cylinder 472, release clamp head 473, mounting base 71, liftout
Cylinder mounting plate 72, material ejection cylinder 73, ejection block 74, punishment in advance pedestal 75, punishment in advance cover board 76, material casket seat 77, contact switch 78, material
Casket 79, switching cylinder 710, transition blanking component 81, inclination mounting plate 82, material casket card slot 83, the casket cylinder 85 that reloads, material casket push plate
86, substandard products material casket collection box 87, only material component 88, lower snap component 89, upper snap component 810, firm banking 811, linking rail
Road 812, splicing frid 813, gas hole 814, only material cylinder 881, only material block 882, fork transposon 18 91, rotation fork item 892, under
Cylinder 893, upper driving cylinder 8101, direct acting is driven to pitch item 8102.
Specific embodiment
As shown in Figure 1, a kind of semiconductor power device automatic checkout equipment includes rack 1 and is mounted in rack 1
Expect casket feeding device 2, handling device 3, tooling folder shipping unit 4, vision inspection apparatus 5, Mark point detection device 6, qualified workpiece
Fill case device 7, defective products dress case device 8 and flash collection box 9；Handling device 3 and tooling folder shipping unit 4 are adjacently positioned, and are carried
The height of device 3 is higher than tooling and presss from both sides shipping unit 4；Material casket feeding device 2 is mutually connected with 3 feed end of handling device, vision-based detection dress
Set 5 corresponding tooling folder shipping units 4, the corresponding handling device 3 of Mark point detection device 6；Qualified workpiece dress case device 7 is provided with more
Group, is respectively in the side of handling device 3, and defective products dress case device 8 also is located at the side of handling device 3；Flash collection box 9 with most
Qualified workpiece dress 7 phase of the case device linking of end, positioned at the lower section of handling device 3.
Casket feeding device 2 is expected for realizing the feeding of single power device, and handling device 3 and tooling folder shipping unit 4 are real
The carrying of existing power device to be detected, handling device 3 is by suction type, and tooling presss from both sides shipping unit 4 by way of clamping；Vision
Detection device 5 is used to carry out element the vision-based detection of appearance, Mark point detection device 6 be used for the Mark point of element surface into
Row vision-based detection；Qualified workpiece dress case device 7 and defective products dress case device 8 are sorted and are received to workpiece according to the mechanism of detection
Collection；Flash collection box 9 is for rejecting in handling device 3 not by isolated workpiece.
As shown in Fig. 2, the material casket feeding device 2 includes mounting rack 21, material casket limit frid 22, material casket scraping wings
23, pusher cylinder 24, material casket collection box 25, arc blanking track 26, splicing block 27 and receiving cylinder 28；The mounting rack 21
Be it is skewed, material casket limit frid 22 it is positioned opposite, be fixed on mounting rack 21；Pusher cylinder 24 is fixed at installation
The side of frame 21, material casket scraping wings 23 are connected with the telescopic end of pusher cylinder 24, and material casket scraping wings 23 is located at material casket limiting slot
The bottom end of plate 22；Material casket collection box 25 is fixed at the side of mounting rack 21, corresponding with material casket scraping wings 23；Arc blanking
The inner cavity for semiconductor power device circulation is provided in track 26, arc blanking track 26 and material casket limit 22 bottom end of frid
Material casket be mutually connected；Receiving cylinder 28 is horizontally set on mounting rack 21, and splicing block 27 is mounted on 28 telescopic end of receiving cylinder,
It is provided with specific receiving channel on the splicing block 27, for placing semiconductor power device.
The material casket feeding device 2 at work, is stacked with the material equipped with workpiece between two billot caskets limit frid 22
Casket expects that the workpiece inside casket is slipped in splicing block 27 along arc blanking track 26, by receiving cylinder 28 due to being obliquely installed
It removes；After the workpiece that one is expected in casket all skids off, pusher cylinder 24 drives material casket scraping wings 23 mobile, and the sky of bottom is expected
Casket is shifted onto material casket collection box 25.
As shown in figure 3, the handling device 3 includes divider 31, pick-up component 32, correction for direction component 33, lifting
Component 34 and guard assembly 35；The divider 31 is mounted on the middle part of rack, is arranged on the upper end output shaft of divider 31
There is mounting flange, pick-up component 32 is evenly arranged on described mounting flange one week, the pick-up component 32 is arranged
Have multiple；The underface of pick-up component 32 is provided with correction for direction component 33, and the correction for direction component 33 is provided with three altogether
Group；Lifting assembly 34 is located at the surface of pick-up component 32, and lifting assembly 34 and pick-up component 32 correspond；Guard assembly 35
It is mounted on lifting assembly 34, for protecting internal mechanism.The lifting assembly 34 includes folding shape bracket 341, disk
342, lifting cylinder 343, spoke slat 344 and lower compression leg 245；Disk 342 passes through connecting column and the fixed company of folding 341 phase of shape bracket
It connects, the underface of disk 342 is provided with spoke slat 344；The fixing end connection of lifting cylinder 343 is mounted on disk 342, is gone up and down
The telescopic end of cylinder 343 is connected with lower compression leg 245, and the lower compression leg 245 centainly cooperates with 344 phase of spoke slat, lower compression leg
245 lower ends are corresponding with pick-up component 32.The guard assembly 35 includes shield 351, connecting plate 352, protection cylinder 353
With guide post 354；The protection cylinder 353 is vertically installed at the end of folding shape bracket 341, and connecting plate 352 is mounted on protection gas
The vertical telescopic end of cylinder 353, guide post 354 are fixed at the bottom of connecting plate 352, and the mobile cooperation of the guide post 354 is being rolled over
On shape bracket 341, connecting plate 352 is mutually fixedly connected with the top of shield 351, and the shield 351 at tubular, open by side
There is vertical slot.
As shown in figure 4, the pick-up component 32 include connection strap 321, sleeve 322, activity rod set 323, rivet holder 324,
Suction plate 325 and spring 326；One end of connection strap 321 is connected with the flange on divider 31, the other end of connection strap 321
On be provided with sleeve 322, the mobile cooperation of activity rod set 323 in sleeve 322, the upper end of activity rod set 323 be fixedly installed to
Seat 324, the lower end of activity rod set 323 is provided with suction plate 325, is provided with suction hole on 325 lower end surface of suction plate；It is described
Sleeve 322 in be provided with spring 326,326 upper and lower ends of spring offset with rivet holder 324 and sleeve 322 respectively, by suction plate
325 mention upwards.
As shown in figure 4, the correction for direction component 33 include stacker 331, stepper motor 332, folding shape supporting plate 333,
Bottom adjusting block 334 and height adjusting blocks 335；Folding shape supporting plate 333 is fixed on the rack by bottom adjusting block 334, is adjusted
Depth distance；Height adjusting blocks 335 are connected in the vertical section of folding shape supporting plate 333 by holding screw, and height is adjusted；Stepping
Motor 332 is mounted on height adjusting blocks 335, and stacker 331, the undertaking are provided in the turning end of stepper motor 332
It is provided with " T " shaped deep gouge on seat 331, for placing semiconductor power device 001 in the deep gouge.
At work, lifting assembly 34 independently drives each suction plate 325 on pick-up component 32 to the handling device 3
It realizes lifting, is picking up, placing and lifting when correction for direction；Suction plate 325 is rotated after workpiece is sucked by 31 stepping of divider,
It needs suction plate 325 when correction for direction to be pressed down the pushing of column 245, puts the workpiece in stacker 331, then suction plate
325 unclamp, and suction plate 325 is sucked again after workpiece is turned to certain angle by stepper motor 332, carry out movement.
Handling device 3 solves the problems, such as to need attitudes vibration in semiconductor power device handling process, by the way that position is arranged
Fixed lifting assembly 34, and pick-up component 32 rotates thereunder, realizing workpiece only needs to be gone up and down in specific station,
Keep mechanism simple；Provided with correction for direction component 33, the variation that workpiece needs multi-pose is better adapted to, improves following process speed
Degree and detection accuracy；Provided with guard assembly 35, the interference effect of dust is avoided, improves subsequent detection precision.
As shown in figure 5, the tooling folder shipping unit 4 includes indexing swivel base 41, turntable 42, fixture base 43, platform for placing material
44, internal clamping block 45, outer fixture block 46 and release clamp component 47；Indexing swivel base 41 is fixed on the rack, the centre bit of turntable 42
It sets and is mounted on the output shaft of indexing swivel base 41,42 upper periphery of turntable is provided with mounting groove, the mounting groove number
It is 16；Fixture base 43 is fixed at one week of turntable 42,43 shape of fixture base be it is "T"-shaped, it is " T " shaped
Horizontal segment both ends are provided with pillar, are provided with blind round hole in " T " shaped vertical section；Platform for placing material 44 is mounted on fixture base 43
Top, the platform for placing material 44 include placement section and positioning region, and placement section is horizontal planar, and the positioning region is placement section top
Two vertical flanges at end；Internal clamping block 45 and outer fixture block 46 are positioned opposite, are rotatably connected on the pillar of fixture base 43, inner clip
Block 45 and outer fixture block 46 are located at the two sides of platform for placing material 44；The internal clamping block 45 includes tiltedly pressing from both sides section, vertical section and horizontal segment；
Tiltedly folder section is obliquely installed, and is highly located at the top of platform for placing material 44, is tiltedly pressed from both sides and is provided with hinge hole on the turning point of section and vertical section, institute
The hinge hole stated rotates with the pillar in fixture base 43 and connect；The upper surface of horizontal segment is provided with short axle, and the short axle is matched
It closes in the blind round hole of fixture base 43, is connected by cylindrical spring, the cylindrical spring upper end and fixture base 43
It offsets, lower end offsets with short axle；Circular arc fin is provided with below horizontal segment；The shape of outer fixture block 46 is similar to internal clamping block 45,
It is provided with idler wheel 461 on the lower end of outer fixture block 46, which is in contact with the circular arc fin of internal clamping block 45；The internal clamping block 45
The height for clamping position with the upper end of outer fixture block 46 is flush；The release clamp component 47 includes right angle supporting plate 471, control gas
Cylinder 472 and release clamp head 473；Control cylinder 472 is fixed on the rack vertically by right angle supporting plate 471, and release clamp head 473 is fixed
The telescopic end of control cylinder 472 is set, is provided with small ball on the release clamp head 473, the ball and idler wheel 461 are opposite
It answers, the small ball position is located at the underface of idler wheel 461；The release clamp component 47 is provided with two groups altogether, respectively position
In pick up at station when blanking.
At work, indexing swivel base 41 drives 42 stepping of turntable to rotate to the tooling folder shipping unit 4, a complete cycle point
16 rotations, when placing workpiece, the release clamp component 47 at this works, and drives release clamp head by control cylinder 472
473 jack up internal clamping block 45 and outer fixture block 46 upwards, and internal clamping block 45 and outer fixture block 46 pass through lever principle, the clamping position phase of upper end
Outer expansion at this time puts down workpiece to be detected；After indexing the rotation of swivel base 41, fixture leaves release clamp component 47, internal clamping block 45
Under the action of the spring workpiece is kept clamping with outer fixture block 46, until release clamp component 47 is again when needing to carry blanking
It is secondary to unclamp frock clamp.
Tooling folder shipping unit 4 solves semiconductor power device low precision in the handling process, the knot of positioning and clamping mechanism
The problem of structure complexity keeps normally closed clamping component by setting, can guarantee that the location of workpiece does not loosen during transhipment, and
And clamping force is generated by spring, is avoided setting motor or cylinder, is made the compact-sized of mechanism；In specific position, pine folder is set
Have component 47, facilitates the opening of frock clamp；It is contacted between fixture and release clamp component 47 by idler wheel 461, so that contact is more
Add smooth, process is more smooth during operation, improves working efficiency.
As shown in fig. 6, the corresponding tooling of the vision inspection apparatus 5 presss from both sides shipping unit 4, after workpiece is clamped, by view
The lower section for feeling detection device 5, is illuminated by light source, is then taken pictures by CCD camera, carry out the detection of appearance；Described
Mark point detection device 6 corresponds to handling device 3, by Mark point detection device 6 after workpiece is sucked, to the following table of workpiece into
Row semiconductor power device surface Mark point carries out detection of taking pictures；Inspection according to vision inspection apparatus 5 and Mark point detection device 6
Survey classification of the result to qualified product and rejected product.
As shown in fig. 7, the qualified workpiece dress case device 7 includes mounting base 71, material ejection cylinder mounting plate 72, liftout gas
Cylinder 73, ejection block 74, punishment in advance pedestal 75, punishment in advance cover board 76, material casket seat 77, contact switch 78, material casket 79 and switching cylinder 710；
Punishment in advance pedestal 75 is fixed in mounting base 71, and punishment in advance cover board 76 is mounted on punishment in advance pedestal 75, forms one between the two
For the cavity that workpiece flows through, material ejection cylinder 73 is mounted in mounting base 71 by the connection of material ejection cylinder mounting plate 72, ejection block 74
It is fixed on the telescopic end of material ejection cylinder 73, the chamber between the ejection block 74 and punishment in advance pedestal 75 and punishment in advance cover board 76
Body is corresponding；75 two sides of punishment in advance pedestal are provided with infrared sensor 751, for counting；Expect the setting of casket 79 in material casket seat
In 77, material casket is provided with two up and down, is provided with the folding line to concave in the middle part of the material casket, the work for specification specific shape
Part is placed it and is blocked in material casket；There are two contact switch 78 for setting on the material casket seat 77, for whether detecting material casket 79
It forces home；The material casket seat 77 is connected with the telescopic end of switching cylinder 710, and switching cylinder 710 is vertically arranged in installation
On seat 71.
At work, qualified workpiece is placed on punishment in advance pedestal 75 the qualified workpiece dress case device 7, then liftout
Cylinder 73 drives ejection block 74 to head into workpiece in the material casket 79 in material casket seat 77, after a billot casket is filled, switches cylinder
710 drive material casket seat 77 to go up and down, to switch material rail.
It is slow that qualified workpiece dress case device 7 solves workpiece gathering speed, it is difficult to neat the problem of collecting, specific by being arranged
The material casket of shape is collected, and the neat degree of product can be improved, and is provided conveniently for subsequent deep processing；Qualified workpiece fills case device
7 can go up and down with the casket that more reloads, and can not have to shut down equipment when more reloading casket manually, improve the processing of equipment
Speed.
As shown in figure 8, the defective products dress case device 8 includes transition blanking component 81, inclination mounting plate 82, material casket card
Slot 83, the casket cylinder 85 that reloads, material casket push plate 86, substandard products material casket collection box 87, only material component 88, lower snap component 89 and upper buckle
The feed end of inclination mounting plate 82 is arranged in component 810, transition blanking component 81, and the transition blanking component 81 includes fixing
Pedestal 811, linking track 812, splicing frid 813 and gas hole 814；Linking track 812 is mounted on firm banking 811, institute
The linking track 812 stated is in circular arc transition obliquely, and the feed end of linking track 812 is provided with splicing frid 813, splicing frid
For placing workpiece on 813, the side of splicing frid 813 is provided with gas hole 814, and the gas hole 814 passes through air blowing
Workpiece is blown into linking track 812 by mode；Material casket card slot 83 is mounted on the both ends of inclination mounting plate 82, two 83 phases of material casket card slot
To arrangement, for placing material casket in the material casket card slot 83；The 83 side both side plate of material casket card slot and inclination mounting plate 82
Between there are gap, the width in gap be expect casket height；The casket cylinder 85 that reloads is mounted on the side of inclination mounting plate 82, expects casket
Push plate 86 is mounted on the telescopic end for the casket cylinder 85 that reloads, material 86 height of casket push plate and the bottommost in material casket card slot 83
Material casket match, positioned at material casket side；Substandard products material casket collection box 87 is mounted on the side of inclination mounting plate 82；Only expect component
88 are mounted on the bottom end of inclination mounting plate 82, the direction fed towards workpiece, and the only material component 88 includes only material cylinder 881
With only material block 882, only expect that block 882 is mounted on the telescopic end for only expecting cylinder 881, the cross sectional shape and material for only expecting block 882
The shape of casket is corresponding, resists material casket and glides；The lower snap component 89 include fork transposon 18 91, rotation fork item 892 and under
Drive cylinder 893；Fork transposon 18 91 is fixed on the side wall of material casket card slot 83, and the middle part of rotation fork item 892 and fork item turn
Seat 891 is hinged, and described rotation fork 892 one end of item is provided with the rib of protrusion, this rib is located in material casket, rotation fork item
The telescopic end of 892 other end and lower driving cylinder 893 is hinged, and the fixing end of lower driving cylinder 893 is hinged on material casket card slot
On 83；The upper snap component 810 includes upper driving cylinder 8101 and direct acting pitches item 8102, and direct acting fork item 8102 is mounted on
On the telescopic end for driving cylinder 8101, the upper driving cylinder 8101 is mounted on linking track 812 by connector；It is described
Direct acting fork item 8102 with rotation pitch item 892 height it is corresponding with bottom penultimate material casket.
At work, rejected product is placed in splicing frid 813 the defective products dress case device 8, by gas hole 814
It blows and workpiece is slid into linking track 812, by the linking track 812, and count lowermost end in arrival material casket card slot 83
Material casket in；After expecting to accumulate a certain amount of workpiece in casket, the casket cylinder 85 that reloads is shunk, and drives material casket push plate 86 will most from side
The material casket of the material casket of bottom end is released, and is fallen into substandard products material casket collection box 87；Then upper driving cylinder 8101 drives direct acting to pitch item
8102 exit, and drive rotation fork item 892 to swing with driving cylinder 893 at present, a rib raised on rotation fork item 892 is made to leave material
Casket expects that casket falls at this time, and as supplement, finally only only material block 882 exits the drive of material cylinder 881, withstands material casket.
To solve semiconductor power device tiny for defective products dress case device 8, it is difficult to the problem of collecting, by setting material casket come
It collects, the workpiece after collecting on the one hand can be kept in good order, on the other hand can avoid blocking when equipment running
The problem of；And expects that casket can reload automatically, improve the degree of automation, improve working efficiency；Setting when more reloading casket
Upper and lower snap component makes the material casket of lowermost end keep independent, is not influenced by the material casket on upper layer, the essence of workpiece filling can be improved
Accuracy and reliability.
A kind of semiconductor power device automatic checkout equipment at work, passes sequentially through following steps and is examined
It surveys:
(1) workpiece feeding: it is stacked with the material casket equipped with workpiece between two billot caskets limit frid 22, due to being obliquely installed, expects casket
Internal workpiece is slipped in splicing block 27 along arc blanking track 26, is removed by receiving cylinder 28；When in a material casket
After workpiece all skids off, pusher cylinder 24 drives material casket scraping wings 23 mobile, shifts the empty material casket of bottom onto material casket collection box 25
In.
(2) workpiece movement: the independent each suction plate 325 driven on pick-up component 32 of lifting assembly 34 realizes lifting；It inhales
Gas plate 325 is rotated after workpiece is sucked by 31 stepping of divider, in switching, needs correction for direction, suction plate 325 is pressed down at this time
Column 245 pushes, and puts the workpiece in stacker 331, and then suction plate 325 is unclamped, and stepper motor 332 turns to workpiece centainly
Angle after suction plate 325 be sucked again, movement to tooling press from both sides shipping unit 4.
(3) workpiece movement and appearance detection: indexing swivel base 41 drives 42 stepping of turntable to rotate, a complete cycle point 16
Secondary rotation, when placing workpiece, release clamp component 47 at this works, from control cylinder 472 drive release clamp head 473 to
By lever principle, the clamping position of upper end is mutually extended out for upper jack-up internal clamping block 45 and outer fixture block 46, internal clamping block 45 and outer fixture block 46
, workpiece to be detected is put down at this time；It indexes after swivel base 41 rotates, fixture leaves release clamp component 47, internal clamping block 45 and outer
Workpiece is kept clamping by fixture block 46 under the action of the spring, until release clamp component 47 again will when needing to carry blanking
Frock clamp unclamps, and workpiece carries out appearance detection when clamping carrying, by vision inspection apparatus 5.
(4) workpiece movement and the detection of Mark point: release clamp component 47 again unclamps frock clamp, again by suction plate
325 are sucked workpiece, are transported through, and the detection of workpiece surface Mark point is carried out by Mark point detection device 6.
(5) good, secondary product classification: qualified workpiece is placed on punishment in advance pedestal 75, and then material ejection cylinder 73 drives liftout
Block 74 heads into workpiece in the material casket 79 in material casket seat 77, and after a billot casket is filled, switching cylinder 710 drives material casket seat 77
Lifting, to switch material rail；Rejected product is placed in splicing frid 813, is blown by gas hole 814 workpiece sliding into linking track
812, by the linking track 812, and counts and reach in material casket card slot 83 in the material casket of lowermost end；When material casket in accumulate one
After quantitative workpiece, the casket cylinder 85 that reloads is shunk, and is driven material casket push plate 86 to release the material casket of the material casket of lowermost end from side, is fallen
Enter in substandard products material casket collection box 87；Then upper driving cylinder 8101 drives direct acting fork item 8102 to exit, same to drive cylinder 893 at present
It drives rotation fork item 892 to swing, so that a raised rib on rotation fork item 892 is left material casket, expect that casket falls at this time, as supplement,
Finally only only material block 882 exits the drive of material cylinder 881, withstands material casket.
(6) flash detects: workpiece is after the sorting of non-defective unit and substandard products, or exists remaining, is not removed, prevents shadow
It rings equipment to work normally, flash collection box 9 is set after separation process, last pick is carried out to certain workpiece not being removed
It removes.
Claims (9)
1. a kind of handling device of semiconductor devices, which is characterized in that the device include divider (31), pick-up component (32),
Correction for direction component (33), lifting assembly (34) and guard assembly (35)；The divider (31) is mounted on the middle part of rack,
It is provided with mounting flange on the upper end output shaft of divider (31), is evenly arranged with absorption on described mounting flange one week
Component (32)；It is provided with immediately below pick-up component (32) correction for direction component (33), the correction for direction component (33) is altogether
It is provided with three groups；Lifting assembly (34) is located at the surface of pick-up component (32), and lifting assembly (34) and pick-up component (32) are right
It answers；Guard assembly (35) is mounted on lifting assembly (34), for protecting internal mechanism；
The pick-up component (32) includes connection strap (321), sleeve (322), activity rod set (323), rivet holder (324), air-breathing
Plate (325) and spring (326)；One end of connection strap (321) is connected with the flange on divider (31), connection strap (321)
Be provided on the other end sleeve (322), the mobile cooperation of activity rod set (323) in sleeve (322), activity rod set (323) it is upper
End is fixedly installed rivet holder (324), and the lower end of activity rod set (323) is provided with suction plate (325)；In the sleeve (322)
It is provided with spring (326), spring (326) upper and lower ends offset with rivet holder (324) and sleeve (322) respectively, by suction plate (325)
It mentions upwards；
The correction for direction component (33) includes stacker (331), stepper motor (332), folding shape supporting plate (333), bottom adjusting
Block (334) and height adjusting blocks (335)；Folding shape supporting plate (333) is fixed on the rack by bottom adjusting block (334), adjustable
Save depth distance；Height adjusting blocks (335) are connected in the vertical section of folding shape supporting plate (333) by holding screw, and height is adjusted
Degree；Stepper motor (332) is mounted on height adjusting blocks (335), is provided with stacker in the turning end of stepper motor (332)
(331).
2. a kind of handling device of semiconductor devices according to claim 1, which is characterized in that the suction plate
(325) suction hole is provided on lower end surface.
3. a kind of handling device of semiconductor devices according to claim 1 or 2, which is characterized in that the stacker
(331) " T " shaped deep gouge is provided on, for placing semiconductor power device (001) in the deep gouge.
4. a kind of handling device of semiconductor devices according to claim 1 or 2 or 3, which is characterized in that the absorption
Component (32) is provided with 16.
5. a kind of handling device of semiconductor devices according to claim 1 or 2 or 3, which is characterized in that the lifting
Component (34) includes folding shape bracket (341), disk (342), lifting cylinder (343), spoke slat (344) and lower compression leg (245)；Circle
Disk (342) is mutually fixedly connected by connecting column with folding shape bracket (341), and disk is provided with spoke slat immediately below (342)
(344)；The fixing end connection of lifting cylinder (343) is mounted on disk (342), the telescopic end of lifting cylinder (343) and pushing
Column (245) is connected, the lower compression leg (245) and spoke slat (344) mutually certain cooperation, lower compression leg (245) lower end and absorption
Component (32) is corresponding.
6. a kind of handling device of semiconductor devices according to claim 1 or 2 or 3, which is characterized in that the protection
Component (35) includes shield (351), connecting plate (352), protection cylinder (353) and guide post (354)；The protection cylinder
(353) it is vertically installed at the end of folding shape bracket (341), connecting plate (352), which is mounted on, protects cylinder (353) are vertical to stretch
End, guide post (354) are fixed at the bottom of connecting plate (352), and the mobile cooperation of the guide post (354) is in folding shape bracket
(341) on, connecting plate (352) is mutually fixedly connected with the top of shield (351).
7. a kind of handling device of semiconductor devices according to claim 1 or 2 or 3, which is characterized in that the protection
(351) are covered into tubular, and side is provided with vertical slot.
8. a kind of automatic checkout equipment of semiconductor devices, which is characterized in that the equipment includes rack (1) and is mounted on rack
(1) material casket feeding device (2), handling device (3), tooling folder shipping unit (4), vision inspection apparatus (5) on, the detection of Mark point
Device (6), qualified workpiece dress case device (7), defective products dress case device (8) and flash collection box (9).
9. a kind of automatic checkout equipment of semiconductor devices according to claim 8, which is characterized in that material casket feeding device
(2) power device to be detected is realized for realizing the feeding of single power device, handling device (3) and tooling folder shipping unit (4)
The carrying of part, handling device (3) is by suction type, and tooling folder shipping unit (4) is by way of clamping；Vision inspection apparatus
(5) for carrying out the vision-based detection of appearance to element, Mark point detection device (6) is for regarding the Mark point of element surface
Feel detection；Qualified workpiece dress case device (7) and defective products dress case device (8) are sorted and are received to workpiece according to the mechanism of detection
Collection；Flash collection box (9) is for rejecting in handling device (3) not by isolated workpiece；Described handling device (3) such as the right is wanted
Seek a kind of handling device of semiconductor devices described in 1-7 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910529557.7A CN110342242B (en) | 2019-06-19 | 2019-06-19 | Carrying device for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910529557.7A CN110342242B (en) | 2019-06-19 | 2019-06-19 | Carrying device for semiconductor device |
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| Publication Number | Publication Date |
|---|---|
| CN110342242A true CN110342242A (en) | 2019-10-18 |
| CN110342242B CN110342242B (en) | 2021-03-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910529557.7A Active CN110342242B (en) | 2019-06-19 | 2019-06-19 | Carrying device for semiconductor device |
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| Country | Link |
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| CN (1) | CN110342242B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112565743A (en) * | 2020-12-09 | 2021-03-26 | 河南工学院 | Automatic positioning and focusing detection device based on machine vision detection |
| CN116251752A (en) * | 2023-03-16 | 2023-06-13 | 昆山精品致精密电子有限公司 | Tiny workpiece clamping structure and screening method for same-specification special-shaped workpieces |
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| CN116251752A (en) * | 2023-03-16 | 2023-06-13 | 昆山精品致精密电子有限公司 | Tiny workpiece clamping structure and screening method for same-specification special-shaped workpieces |
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| Publication number | Publication date |
|---|---|
| CN110342242B (en) | 2021-03-19 |
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