CN110252673A - A kind of semiconductor devices and its automatic testing method and equipment - Google Patents
A kind of semiconductor devices and its automatic testing method and equipment Download PDFInfo
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- CN110252673A CN110252673A CN201910529540.1A CN201910529540A CN110252673A CN 110252673 A CN110252673 A CN 110252673A CN 201910529540 A CN201910529540 A CN 201910529540A CN 110252673 A CN110252673 A CN 110252673A
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- casket
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- cylinder
- material casket
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/361—Processing or control devices therefor, e.g. escort memory
- B07C5/362—Separating or distributor mechanisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/38—Collecting or arranging articles in groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention relates to a kind of semiconductor devices automatic checkout equipment and detection method, which includes rack and rack-mounted material casket feeding device, handling device, tooling folder shipping unit, vision inspection apparatus, Mark point detection device, qualified workpiece dress case device, defective products dress case device and flash collection box；Handling device and tooling folder shipping unit are adjacently positioned, and the height of handling device is higher than tooling and presss from both sides shipping unit；Material casket feeding device is mutually connected with handling device feed end, and vision inspection apparatus corresponds to tooling folder shipping unit, and Mark point detection device corresponds to handling device；Qualified workpiece dress case device is provided with multiple groups, is respectively in the side of handling device, and defective products dress case device also is located at the side of handling device；Flash collection box is mutually connected with the qualified workpiece of least significant end dress case device, positioned at the lower section of handling device.High degree of automation of the present invention, process velocity is fast, and accurate positioning is reliable, and sorting is convenient.
Description
Technical field
The present invention relates to semiconductor production manufacturing technology fields, and in particular to a kind of semiconductor devices and its automatic detection side
Method and equipment.
Background technique
The detection of semiconductor devices appearance is an important link in semiconductor technology production, because in chip fabrication processes
More graphic defects are had, dirty, damaged, defect etc. bad order, in order to promote yield and the production of subsequent technique link
Product reliability needs to carry out appearance parts 100% microscopy.
State Intellectual Property Office discloses Publication No. CN109100366A in 2018.12.28, and patent name is semiconductor
The detection system and method for chip of laser end face appearance, the patent include chip carrier, lower view camera, chip pickup apparatus,
It is upper depending on camera light source, Optical devices and upper depending on group machine: semiconductor laser chip is drawn to optics and filled by chip pickup apparatus
The assigned work region set, the upper assigned work region that Optical devices are arranged in depending on camera light source, provides light source depending on camera to be upper,
Optical devices project the lower surface of semiconductor laser chip and four side magnified images in upper view camera, upper to obtain depending on camera
The amplification image of coring piece lower surface and four sides.The patent is that one by one, detection efficiency is slow to the carrying of chip.
State Intellectual Property Office discloses Publication No. CN203225236U in 2013.10.02, and patent name is semiconductor
Product testing machine, the patent include work platform, computer unit, identification camera and at least detect camera.The identification camera
It is recognized for the identification code on semiconductor product item, and recalls corresponding image map electronic document: is described at least to detect phase
Detection operation is compared with image comparison shelves in the image that machine intercepts the semiconductor product, and will test result be recorded in it is described
The corresponding image map electronic document of computer unit.The patent does not position the workpiece on assembly line, to vision camera
More demanding, the cost of equipment is also higher.
State Intellectual Property Office discloses Publication No. CN204346940U in 2015.05.20, and patent name is a kind of half
Conductor encapsulates appearance delection device, which includes first resistor adjuster, first resistor light source control box, first camera, the
Two resistance controllers, second resistance light source control box, second light source control box and second camera: the first resistor adjuster,
First resistor light source control box, first light source control box and first camera are sequentially connected in series, the second resistance adjuster, the second electricity
Resistance light source control box, second light source control box and second camera are sequentially connected in series.Detection the degree of automation of the patent is low, by artificial
The pick-and-place of part is carried out, the large batch of Detection task of high speed is not suitable for.
Summary of the invention
The purpose of the present invention is: in view of the deficienciess of the prior art, providing high degree of automation, process velocity is fast, fixed
Position is precisely reliable, sorts convenient semiconductor devices automatic checkout equipment and detection method.
For the purpose of the present invention, it is achieved using following technical scheme:
A kind of semiconductor devices automatic checkout equipment, the equipment include rack and rack-mounted material casket feeding device,
Handling device, tooling folder shipping unit, vision inspection apparatus, Mark point detection device, qualified workpiece dress case device, defective products fill casket
Device and flash collection box；Handling device and tooling folder shipping unit are adjacently positioned, and the height of handling device is higher than tooling folder fortune dress
It sets；Material casket feeding device is mutually connected with handling device feed end, and vision inspection apparatus corresponds to tooling folder shipping unit, the detection of Mark point
Device corresponds to handling device；Qualified workpiece dress case device is provided with multiple groups, is respectively in the side of handling device, and defective products fills casket dress
Set the side for also being located at handling device；Flash collection box is mutually connected with the qualified workpiece of least significant end dress case device, is located at and carries dress
The lower section set.
Expect casket feeding device for realizing individual devices feeding, handling device and tooling folder shipping unit realize it is to be detected
The carrying of device, handling device is by suction type, and tooling presss from both sides shipping unit by way of clamping；Vision inspection apparatus for pair
Element carries out the vision-based detection of appearance, and Mark point detection device is used to carry out vision-based detection to the Mark point of element surface；It is qualified
Workpiece dress case device and defective products dress case device are sorted and are collected to workpiece according to the mechanism of detection；Flash collection box is used for
It rejects in handling device not by isolated workpiece.
Preferably, the material casket feeding device includes mounting rack, material casket limit frid, material casket scraping wings, pusher gas
Cylinder, material casket collection box, arc blanking track, splicing block and receiving cylinder；The mounting rack is skewed, material casket limit frid
It is positioned opposite, it is fixed on mounting rack；Pusher cylinder is fixed at the side of mounting rack, material casket scraping wings and pusher gas
The telescopic end of cylinder is connected, and material casket scraping wings is located at the bottom end of material casket limit frid；Material casket collection box is fixed at mounting rack
Side, with material casket scraping wings it is corresponding；The inner cavity for semiconductor devices circulation is provided in arc blanking track, arc is fallen
Material track is mutually connected with the material casket for expecting casket limiting slot board bottom end；Receiving cylinder is horizontally set on mounting rack, and splicing block is mounted on
On receiving cylinder telescopic end, it is provided with specific receiving channel on the splicing block, for placing semiconductor devices.
Preferably, the handling device includes divider, pick-up component, correction for direction component, lifting assembly and prevents
Protecting assembly；The divider is mounted on the middle part of rack, is provided with mounting flange on the upper end output shaft of divider, described
Mounting flange one week on be evenly arranged with pick-up component, the pick-up component is provided with multiple；Pick-up component just under
Side is provided with correction for direction component, and the correction for direction component is provided with three groups altogether；Lifting assembly is being located at pick-up component just
Top, lifting assembly and pick-up component correspond；Guard assembly is mounted on lifting assembly, for protecting internal mechanism；
The lifting assembly includes folding shape bracket, disk, lifting cylinder, spoke slat and lower compression leg；Disk passes through connecting column and folding shape
Bracket is mutually fixedly connected, and spoke slat is provided with immediately below disk；The fixing end connection of lifting cylinder is mounted on disk, is gone up and down
The telescopic end of cylinder is connected with lower compression leg, the lower compression leg and spoke slat mutually certain cooperation, lower compression leg lower end and absorption group
Part is corresponding；The guard assembly includes shield, connecting plate, protection cylinder and guide post；The protection cylinder is pacified vertically
Mounted in the end of folding shape bracket, connecting plate is mounted on the vertical telescopic end of protection cylinder, and guide post is fixed at the bottom of connecting plate
Portion, the mobile cooperation of the guide post is on folding shape bracket, and connecting plate is mutually fixedly connected with the top of shield, the shield
At tubular, side is provided with vertical slot.
Preferably, the described tooling folder shipping unit include indexing swivel base, turntable, fixture base, platform for placing material, internal clamping block,
Outer fixture block and release clamp component；Indexing swivel base is fixed on the rack, and the center of turntable is mounted on the defeated of indexing swivel base
On shaft, the turntable upper periphery is provided with mounting groove, and the mounting groove number is 16；Fixture base fixed setting
At one week of turntable, the fixture base shape be it is "T"-shaped, " T " shaped horizontal segment both ends are provided with pillar, " T " shaped perpendicular
Blind round hole is provided on straight section；Platform for placing material is mounted on the top of fixture base, and the platform for placing material includes placement section and positioning
Portion, placement section are horizontal planar, and the positioning region is two vertical flanges on placement section top；Internal clamping block and outer fixture block are opposite
Arrangement, is rotatably connected on the pillar of fixture base, and internal clamping block and outer fixture block are located at the two sides of platform for placing material；The inner clip
Block includes tiltedly pressing from both sides section, vertical section and horizontal segment；Tiltedly folder section is obliquely installed, and is highly located at the top of platform for placing material, tiltedly presss from both sides section and vertical
Hinge hole is provided on the turning point of section, and the pillar on the hinge hole and fixture base rotates connection；Horizontal segment it is upper
Face is provided with short axle, and the short axle cooperates in the blind round hole of fixture base, is connected by cylindrical spring, the circle
Column spring upper end offsets with fixture base, and lower end offsets with short axle；Circular arc fin is provided with below horizontal segment；The shape of outer fixture block
Shape is similar to internal clamping block, is provided with idler wheel on the lower end of outer fixture block, which is in contact with the circular arc fin of internal clamping block；Described
The height that the upper end of internal clamping block and outer fixture block clamps position is flush；The release clamp component includes right angle supporting plate, control gas
Cylinder and release clamp head；Control cylinder is fixed on the rack vertically by right angle supporting plate, and release clamp head is fixed at control cylinder
Telescopic end, be provided with small ball on the release clamp head, the ball is corresponding with idler wheel, and the small ball position is located at
The underface of idler wheel；The release clamp component is provided with two groups altogether, be located at pick up at station when blanking.
It is examined after workpiece is clamped by vision preferably, the vision inspection apparatus corresponds to tooling folder shipping unit
The lower section for surveying device, is illuminated by light source, is then taken pictures by CCD camera, carry out the detection of appearance.
Preferably, the Mark point detection device corresponds to handling device, examined after workpiece is sucked by Mark point
Device is surveyed, semiconductor device surface Mark point is carried out to the following table of workpiece and carries out detection of taking pictures.
Preferably, the qualified workpiece dress case device includes mounting base, material ejection cylinder mounting plate, material ejection cylinder, top
Expect block, punishment in advance pedestal, punishment in advance cover board, material casket seat, contact switch, material casket and switching cylinder；Punishment in advance pedestal is fixed at installation
On seat, punishment in advance cover board is mounted on punishment in advance pedestal, forms a cavity flowed through for workpiece between the two, and material ejection cylinder passes through top
Material cylinder mounting plate connection is mounted in mounting base, and ejection block is fixed on the telescopic end of material ejection cylinder, the liftout
Cavity between block and punishment in advance pedestal and punishment in advance cover board is corresponding；The punishment in advance pedestal two sides are provided with infrared sensor, use
In counting；Casket setting is expected in material casket seat, and material casket is provided with two up and down, is provided with the folding to concave in the middle part of the material casket
Trace is placed it and is blocked in material casket for the workpiece of specification specific shape；Setting is opened there are two contact on the material casket seat
It closes, for detecting whether material casket forces home；The material casket seat is connected with the telescopic end of switching cylinder, and switching cylinder is vertical
It is arranged in mounting base.
Preferably, the defective products dress case device includes transition blanking component, inclination mounting plate, material casket card slot, changes
Expect casket cylinder, material casket push plate, substandard products material casket collection box, only material component, lower snap component and upper snap component, transition blanking component
The feed end of inclination mounting plate is set, and the transition blanking component includes firm banking, linking track, splicing frid and blows
Stomata；It is connected track installation on the fixed base, the linking track is in circular arc transition obliquely, is connected the feed end of track
It is provided with splicing frid, the side of splicing frid is provided with gas hole, and the gas hole is blown workpiece by way of air blowing
Enter to be connected track；Material casket card slot is mounted on the both ends of inclination mounting plate, and two material casket card slots are positioned opposite；The material casket card slot
There are gap between side both side plate and inclination mounting plate, the width in gap is the height for expecting casket；The casket cylinder that reloads is mounted on inclination
The side of mounting plate, material casket push plate are mounted on the telescopic end for the casket cylinder that reloads, the material casket push plate height and material casket card slot
In the material casket of bottommost match, positioned at the side of material casket；Substandard products material casket collection box is mounted on the side of inclination mounting plate；Only
Material component is mounted on the bottom end of inclination mounting plate, the direction fed towards workpiece.
Preferably, the only material component includes only material cylinder and only material block, only expects that block is mounted on and only expect stretching for cylinder
The cross sectional shape at contracting end, the only material block is corresponding with the material shape of casket；The lower snap component includes fork swivel base, turns
Moving fork item and lower driving cylinder；Fork swivel base is fixed on the side wall of material casket card slot, and the middle part of rotation fork item and fork item turn
Seat is hinged, and described rotation fork one end is provided with the rib of protrusion, this rib is located in material casket, the other end of rotation fork item
It is hinged with the telescopic end of lower driving cylinder, the fixing end of lower driving cylinder is hinged on material casket card slot；The upper buckle group
Part includes upper driving cylinder and direct acting fork item, and direct acting fork item is mounted on the telescopic end of driving cylinder, the upper driving gas
Cylinder is mounted on linking track by connector.
A kind of semiconductor devices automatic testing method, passes sequentially through following steps and is detected:
(1) workpiece feeding: it is stacked with the material casket equipped with workpiece between two billot caskets limit frid, due to being obliquely installed, is expected in casket
The workpiece in portion is slipped in splicing block along arc blanking track, is removed by receiving cylinder；When the workpiece that one is expected in casket is whole
After skidding off, pusher cylinder drives material casket scraping wings mobile, and the empty material casket of bottom is shifted onto material casket collection box；
(2) workpiece movement: lifting assembly independently drives each suction plate on pick-up component to realize lifting；Work is sucked in suction plate
It is rotated after part by divider stepping, in switching, needs correction for direction, suction plate is pressed down column pushing at this time, puts the workpiece in
In stacker, then suction plate is unclamped, and suction plate is sucked again after workpiece is turned to certain angle by stepper motor, and movement is arrived
Tooling presss from both sides shipping unit；
(3) workpiece movement and appearance detection: indexing swivel base drives turntable stepping to rotate, 16 rotations of a complete cycle point,
When placing workpiece, the release clamp component operation at this drives release clamp head to jack up internal clamping block and outer upwards by control cylinder
Fixture block, internal clamping block and outer fixture block are expanded outside by lever principle, the clamping position phase of upper end, are at this time put workpiece to be detected
Under；After indexing swivel base rotation, fixture leaves release clamp component, and internal clamping block and outer fixture block are under the action of the spring by workpiece retaining clip
Tightly, until when need to carry blanking, release clamp component again unclamps frock clamp, workpiece clamp carry when,
Appearance detection is carried out by vision inspection apparatus；
(4) workpiece movement and the detection of Mark point: release clamp component again unclamps frock clamp, and work is sucked by suction plate again
Part is transported through, and the detection of workpiece surface Mark point is carried out by Mark point detection device；
(5) good, secondary product classification: qualified workpiece is placed on punishment in advance pedestal, and then material ejection cylinder drives ejection block by workpiece
It heads into the material casket in material casket seat, after a billot casket is filled, switching cylinder drives material casket seat lifting, to switch material rail；No
Qualified product is placed in splicing frid, is blown by gas hole workpiece sliding into linking track, by the linking track, and counted
It counts to up in the material casket of lowermost end in material casket card slot；After expecting to accumulate a certain amount of workpiece in casket, the casket cylinder that reloads is shunk, and is driven
Expect that casket push plate releases the material casket of the material casket of lowermost end from side, falls into substandard products material casket collection box；It is then upper to drive cylinder band
Dynamic direct acting fork item exits, and drives rotation fork item to swing with driving cylinder at present, a rib raised on rotation fork item is made to leave material casket,
Material casket falls at this time, and as supplement, finally only only material block exits the drive of material cylinder, withstands material casket；
(6) flash detects: workpiece is after the sorting of non-defective unit and substandard products, or exists remaining, is not removed, prevents from influencing to set
It is standby to work normally, flash collection box is set after separation process, last rejecting is carried out to certain workpiece not being removed.
Semiconductor devices detects to obtain by above-mentioned automatic testing method.
Compared with prior art, the beneficial effects of the present invention are: the lifting that 1. handling devices are fixed by setting position
Component, and pick-up component rotates thereunder, realizing workpiece only needs to be gone up and down in specific station, keeps mechanism simple；If
Correction for direction component has been set, the variation that workpiece needs multi-pose is better adapted to, has improved following process speed and detection accuracy；If
Guard assembly has been set, the interference effect of dust is avoided, has improved subsequent detection precision.It is protected 2. tooling presss from both sides shipping unit by setting
Normally closed clamping component is held, can guarantee that the location of workpiece does not loosen during transhipment, and clamping force is generated by spring, is avoided
Setting motor or cylinder, make the compact-sized of mechanism；Release clamp component is set in specific position, facilitates beating for frock clamp
It opens；It is contacted between fixture and release clamp component by idler wheel, so that contact is more smooth, process more flows during operation
Freely, working efficiency is improved.3. qualified workpiece dress case device is collected by the way that the material casket of specific shape is arranged, product can be improved
Neat degree, for subsequent deep processing provide conveniently；Qualified workpiece dress case device can be gone up and down with the casket that more reloads, can be manual
More reload casket when do not have to equipment is shut down, improve the process velocity of equipment.4. defective products fills case device on the one hand can
To keep the workpiece after collecting in good order, the problem of blocking when equipment running on the other hand can avoid；And expect
Casket can reload automatically, improve the degree of automation, improve working efficiency；Upper and lower buckle group is provided with when more reloading casket
Part makes the material casket of lowermost end keep independent, is not influenced by the material casket on upper layer, and the precision and reliability of workpiece filling can be improved.
5. setting flash collection box prevents from affecting the normal operation of the equipment, flash collection box is set after separation process, is not picked to certain
The workpiece removed carries out last rejecting.
Detailed description of the invention
Fig. 1 is the configuration schematic diagram of the embodiment of the present invention.
Fig. 2 is the configuration schematic diagram for expecting casket feeding device.
Fig. 3 is the configuration schematic diagram of handling device.
Fig. 4 is the configuration schematic diagram of pick-up component and correction for direction component.
Fig. 5 is the configuration schematic diagram of tooling folder shipping unit.
Fig. 6 is the structural schematic diagram of vision inspection apparatus and Mark point detection device.
Fig. 7 is the configuration schematic diagram of qualified workpiece dress case device.
Fig. 8 is the configuration schematic diagram of defective products dress case device.
In figure: rack 1, material casket feeding device 2, handling device 3, tooling press from both sides shipping unit 4, vision inspection apparatus 5, Mark point
Detection device 6, qualified workpiece dress case device 7, defective products dress case device 8, flash collection box 9, mounting rack 21, material casket limit frid
22, expect casket scraping wings 23, pusher cylinder 24, material casket collection box 25, arc blanking track 26, splicing block 27, receiving cylinder 28, divide
Cutter 31, correction for direction component 33, lifting assembly 34, guard assembly 35, folding shape bracket 341, disk 342, rises pick-up component 32
Sending down abnormally ascending cylinder 343, spoke slat 344, lower compression leg 245, shield 351, connecting plate 352, protection cylinder 353, guide post 354, connection strap
321, sleeve 322, activity rod set 323, rivet holder 324, suction plate 325, spring 326, stacker 331, stepper motor 332, folding shape
Supporting plate 333, bottom adjusting block 334, height adjusting blocks 335, indexing swivel base 41, turntable 42, fixture base 43, platform for placing material 44, inner clip
Block 45, outer fixture block 46, release clamp component 47, right angle supporting plate 471, control cylinder 472, release clamp head 473, mounting base 71, liftout
Cylinder mounting plate 72, material ejection cylinder 73, ejection block 74, punishment in advance pedestal 75, punishment in advance cover board 76, material casket seat 77, contact switch 78, material
Casket 79, switching cylinder 710, transition blanking component 81, inclination mounting plate 82, material casket card slot 83, the casket cylinder 85 that reloads, material casket push plate
86, substandard products material casket collection box 87, only material component 88, lower snap component 89, upper snap component 810, firm banking 811, linking rail
Road 812, splicing frid 813, gas hole 814, only material cylinder 881, only material block 882, fork transposon 18 91, rotation fork item 892, under
Cylinder 893, upper driving cylinder 8101, direct acting is driven to pitch item 8102.
Specific embodiment
As shown in Figure 1, a kind of semiconductor devices automatic checkout equipment includes rack 1 and the material casket being mounted in rack 1
Feeding device 2, handling device 3, tooling folder shipping unit 4, vision inspection apparatus 5, Mark point detection device 6, qualified workpiece fill casket
Device 7, defective products dress case device 8 and flash collection box 9；Handling device 3 and tooling folder shipping unit 4 are adjacently positioned, handling device 3
Height be higher than tooling press from both sides shipping unit 4；Material casket feeding device 2 is mutually connected with 3 feed end of handling device, and vision inspection apparatus 5 is right
Tooling is answered to press from both sides shipping unit 4, the corresponding handling device 3 of Mark point detection device 6；Qualified workpiece dress case device 7 is provided with multiple groups, point column
In the side of handling device 3, defective products dress case device 8 also is located at the side of handling device 3；Flash collection box 9 and least significant end
Qualified workpiece dress 7 phase of case device linking, positioned at the lower section of handling device 3.
Expect casket feeding device 2 for realizing individual devices feeding, handling device 3 and tooling folder shipping unit 4 realize to
The carrying of device is detected, handling device 3 is by suction type, and tooling presss from both sides shipping unit 4 by way of clamping；Vision inspection apparatus
5 for carrying out the vision-based detection of appearance to element, and Mark point detection device 6 is used to carry out vision inspection to the Mark point of element surface
It surveys；Qualified workpiece dress case device 7 and defective products dress case device 8 are sorted and are collected to workpiece according to the mechanism of detection；Flash
Collection box 9 is for rejecting in handling device 3 not by isolated workpiece.
As shown in Fig. 2, the material casket feeding device 2 includes mounting rack 21, material casket limit frid 22, material casket scraping wings
23, pusher cylinder 24, material casket collection box 25, arc blanking track 26, splicing block 27 and receiving cylinder 28；The mounting rack 21
Be it is skewed, material casket limit frid 22 it is positioned opposite, be fixed on mounting rack 21；Pusher cylinder 24 is fixed at installation
The side of frame 21, material casket scraping wings 23 are connected with the telescopic end of pusher cylinder 24, and material casket scraping wings 23 is located at material casket limiting slot
The bottom end of plate 22；Material casket collection box 25 is fixed at the side of mounting rack 21, corresponding with material casket scraping wings 23；Arc blanking
The inner cavity for semiconductor devices circulation, the material of arc blanking track 26 and material casket limit 22 bottom end of frid are provided in track 26
Casket is mutually connected；Receiving cylinder 28 is horizontally set on mounting rack 21, and splicing block 27 is mounted on 28 telescopic end of receiving cylinder, described
Splicing block 27 on be provided with specific receiving channel, for placing semiconductor devices.
The material casket feeding device 2 at work, is stacked with the material equipped with workpiece between two billot caskets limit frid 22
Casket expects that the workpiece inside casket is slipped in splicing block 27 along arc blanking track 26, by receiving cylinder 28 due to being obliquely installed
It removes；After the workpiece that one is expected in casket all skids off, pusher cylinder 24 drives material casket scraping wings 23 mobile, and the sky of bottom is expected
Casket is shifted onto material casket collection box 25.
As shown in figure 3, the handling device 3 includes divider 31, pick-up component 32, correction for direction component 33, lifting
Component 34 and guard assembly 35；The divider 31 is mounted on the middle part of rack, is arranged on the upper end output shaft of divider 31
There is mounting flange, pick-up component 32 is evenly arranged on described mounting flange one week, the pick-up component 32 is arranged
Have multiple；The underface of pick-up component 32 is provided with correction for direction component 33, and the correction for direction component 33 is provided with three altogether
Group；Lifting assembly 34 is located at the surface of pick-up component 32, and lifting assembly 34 and pick-up component 32 correspond；Guard assembly 35
It is mounted on lifting assembly 34, for protecting internal mechanism.The lifting assembly 34 includes folding shape bracket 341, disk
342, lifting cylinder 343, spoke slat 344 and lower compression leg 245；Disk 342 passes through connecting column and the fixed company of folding 341 phase of shape bracket
It connects, the underface of disk 342 is provided with spoke slat 344；The fixing end connection of lifting cylinder 343 is mounted on disk 342, is gone up and down
The telescopic end of cylinder 343 is connected with lower compression leg 245, and the lower compression leg 245 centainly cooperates with 344 phase of spoke slat, lower compression leg
245 lower ends are corresponding with pick-up component 32.The guard assembly 35 includes shield 351, connecting plate 352, protection cylinder 353
With guide post 354；The protection cylinder 353 is vertically installed at the end of folding shape bracket 341, and connecting plate 352 is mounted on protection gas
The vertical telescopic end of cylinder 353, guide post 354 are fixed at the bottom of connecting plate 352, and the mobile cooperation of the guide post 354 is being rolled over
On shape bracket 341, connecting plate 352 is mutually fixedly connected with the top of shield 351, and the shield 351 at tubular, open by side
There is vertical slot.
As shown in figure 4, the pick-up component 32 include connection strap 321, sleeve 322, activity rod set 323, rivet holder 324,
Suction plate 325 and spring 326；One end of connection strap 321 is connected with the flange on divider 31, the other end of connection strap 321
On be provided with sleeve 322, the mobile cooperation of activity rod set 323 in sleeve 322, the upper end of activity rod set 323 be fixedly installed to
Seat 324, the lower end of activity rod set 323 is provided with suction plate 325, is provided with suction hole on 325 lower end surface of suction plate；It is described
Sleeve 322 in be provided with spring 326,326 upper and lower ends of spring offset with rivet holder 324 and sleeve 322 respectively, by suction plate
325 mention upwards.
As shown in figure 4, the correction for direction component 33 include stacker 331, stepper motor 332, folding shape supporting plate 333,
Bottom adjusting block 334 and height adjusting blocks 335；Folding shape supporting plate 333 is fixed on the rack by bottom adjusting block 334, is adjusted
Depth distance；Height adjusting blocks 335 are connected in the vertical section of folding shape supporting plate 333 by holding screw, and height is adjusted；Stepping
Motor 332 is mounted on height adjusting blocks 335, and stacker 331, the undertaking are provided in the turning end of stepper motor 332
It is provided with " T " shaped deep gouge on seat 331, for placing semiconductor devices 001 in the deep gouge.
At work, lifting assembly 34 independently drives each suction plate 325 on pick-up component 32 to the handling device 3
It realizes lifting, is picking up, placing and lifting when correction for direction；Suction plate 325 is rotated after workpiece is sucked by 31 stepping of divider,
It needs suction plate 325 when correction for direction to be pressed down the pushing of column 245, puts the workpiece in stacker 331, then suction plate
325 unclamp, and suction plate 325 is sucked again after workpiece is turned to certain angle by stepper motor 332, carry out movement.
Handling device 3 is solved the problems, such as to need attitudes vibration in semiconductor devices handling process, be fixed by the way that position is arranged
Lifting assembly 34, and pick-up component 32 rotates thereunder, and realizing workpiece only needs to be gone up and down in specific station, makes machine
Structure is simple；Provided with correction for direction component 33, better adapt to the variation that workpiece needs multi-pose, improve following process speed and
Detection accuracy；Provided with guard assembly 35, the interference effect of dust is avoided, improves subsequent detection precision.
As shown in figure 5, the tooling folder shipping unit 4 includes indexing swivel base 41, turntable 42, fixture base 43, platform for placing material
44, internal clamping block 45, outer fixture block 46 and release clamp component 47；Indexing swivel base 41 is fixed on the rack, the centre bit of turntable 42
It sets and is mounted on the output shaft of indexing swivel base 41,42 upper periphery of turntable is provided with mounting groove, the mounting groove number
It is 16；Fixture base 43 is fixed at one week of turntable 42,43 shape of fixture base be it is "T"-shaped, it is " T " shaped
Horizontal segment both ends are provided with pillar, are provided with blind round hole in " T " shaped vertical section；Platform for placing material 44 is mounted on fixture base 43
Top, the platform for placing material 44 include placement section and positioning region, and placement section is horizontal planar, and the positioning region is placement section top
Two vertical flanges at end；Internal clamping block 45 and outer fixture block 46 are positioned opposite, are rotatably connected on the pillar of fixture base 43, inner clip
Block 45 and outer fixture block 46 are located at the two sides of platform for placing material 44；The internal clamping block 45 includes tiltedly pressing from both sides section, vertical section and horizontal segment；
Tiltedly folder section is obliquely installed, and is highly located at the top of platform for placing material 44, is tiltedly pressed from both sides and is provided with hinge hole on the turning point of section and vertical section, institute
The hinge hole stated rotates with the pillar in fixture base 43 and connect；The upper surface of horizontal segment is provided with short axle, and the short axle is matched
It closes in the blind round hole of fixture base 43, is connected by cylindrical spring, the cylindrical spring upper end and fixture base 43
It offsets, lower end offsets with short axle；Circular arc fin is provided with below horizontal segment；The shape of outer fixture block 46 is similar to internal clamping block 45,
It is provided with idler wheel 461 on the lower end of outer fixture block 46, which is in contact with the circular arc fin of internal clamping block 45；The internal clamping block 45
The height for clamping position with the upper end of outer fixture block 46 is flush；The release clamp component 47 includes right angle supporting plate 471, control gas
Cylinder 472 and release clamp head 473；Control cylinder 472 is fixed on the rack vertically by right angle supporting plate 471, and release clamp head 473 is fixed
The telescopic end of control cylinder 472 is set, is provided with small ball on the release clamp head 473, the ball and idler wheel 461 are opposite
It answers, the small ball position is located at the underface of idler wheel 461；The release clamp component 47 is provided with two groups altogether, respectively position
In pick up at station when blanking.
At work, indexing swivel base 41 drives 42 stepping of turntable to rotate to the tooling folder shipping unit 4, a complete cycle point
16 rotations, when placing workpiece, the release clamp component 47 at this works, and drives release clamp head by control cylinder 472
473 jack up internal clamping block 45 and outer fixture block 46 upwards, and internal clamping block 45 and outer fixture block 46 pass through lever principle, the clamping position phase of upper end
Outer expansion at this time puts down workpiece to be detected；After indexing the rotation of swivel base 41, fixture leaves release clamp component 47, internal clamping block 45
Under the action of the spring workpiece is kept clamping with outer fixture block 46, until release clamp component 47 is again when needing to carry blanking
It is secondary to unclamp frock clamp.
Tooling folder shipping unit 4 solves semiconductor devices low precision in the handling process, and the structure of positioning and clamping mechanism is multiple
Miscellaneous problem keeps normally closed clamping component by setting, can guarantee that the location of workpiece does not loosen during transhipment, and press from both sides
Clamp force is generated by spring, is avoided setting motor or cylinder, is made the compact-sized of mechanism；In specific position, release clamp group is set
Part 47 facilitates the opening of frock clamp；It is contacted between fixture and release clamp component 47 by idler wheel 461, so that contact is more suitable
Sliding, process is more smooth during operation, improves working efficiency.
As shown in fig. 6, the corresponding tooling of the vision inspection apparatus 5 presss from both sides shipping unit 4, after workpiece is clamped, by view
The lower section for feeling detection device 5, is illuminated by light source, is then taken pictures by CCD camera, carry out the detection of appearance；Described
Mark point detection device 6 corresponds to handling device 3, by Mark point detection device 6 after workpiece is sucked, to the following table of workpiece into
Row semiconductor device surface Mark point carries out detection of taking pictures；Detection knot according to vision inspection apparatus 5 and Mark point detection device 6
Classification of the fruit to qualified product and rejected product.
As shown in fig. 7, the qualified workpiece dress case device 7 includes mounting base 71, material ejection cylinder mounting plate 72, liftout gas
Cylinder 73, ejection block 74, punishment in advance pedestal 75, punishment in advance cover board 76, material casket seat 77, contact switch 78, material casket 79 and switching cylinder 710；
Punishment in advance pedestal 75 is fixed in mounting base 71, and punishment in advance cover board 76 is mounted on punishment in advance pedestal 75, forms one between the two
For the cavity that workpiece flows through, material ejection cylinder 73 is mounted in mounting base 71 by the connection of material ejection cylinder mounting plate 72, ejection block 74
It is fixed on the telescopic end of material ejection cylinder 73, the chamber between the ejection block 74 and punishment in advance pedestal 75 and punishment in advance cover board 76
Body is corresponding；75 two sides of punishment in advance pedestal are provided with infrared sensor 751, for counting；Expect the setting of casket 79 in material casket seat
In 77, material casket is provided with two up and down, is provided with the folding line to concave in the middle part of the material casket, the work for specification specific shape
Part is placed it and is blocked in material casket；There are two contact switch 78 for setting on the material casket seat 77, for whether detecting material casket 79
It forces home；The material casket seat 77 is connected with the telescopic end of switching cylinder 710, and switching cylinder 710 is vertically arranged in installation
On seat 71.
At work, qualified workpiece is placed on punishment in advance pedestal 75 the qualified workpiece dress case device 7, then liftout
Cylinder 73 drives ejection block 74 to head into workpiece in the material casket 79 in material casket seat 77, after a billot casket is filled, switches cylinder
710 drive material casket seat 77 to go up and down, to switch material rail.
It is slow that qualified workpiece dress case device 7 solves workpiece gathering speed, it is difficult to neat the problem of collecting, specific by being arranged
The material casket of shape is collected, and the neat degree of product can be improved, and is provided conveniently for subsequent deep processing；Qualified workpiece fills case device
7 can go up and down with the casket that more reloads, and can not have to shut down equipment when more reloading casket manually, improve the processing of equipment
Speed.
As shown in figure 8, the defective products dress case device 8 includes transition blanking component 81, inclination mounting plate 82, material casket card
Slot 83, the casket cylinder 85 that reloads, material casket push plate 86, substandard products material casket collection box 87, only material component 88, lower snap component 89 and upper buckle
The feed end of inclination mounting plate 82 is arranged in component 810, transition blanking component 81, and the transition blanking component 81 includes fixing
Pedestal 811, linking track 812, splicing frid 813 and gas hole 814；Linking track 812 is mounted on firm banking 811, institute
The linking track 812 stated is in circular arc transition obliquely, and the feed end of linking track 812 is provided with splicing frid 813, splicing frid
For placing workpiece on 813, the side of splicing frid 813 is provided with gas hole 814, and the gas hole 814 passes through air blowing
Workpiece is blown into linking track 812 by mode；Material casket card slot 83 is mounted on the both ends of inclination mounting plate 82, two 83 phases of material casket card slot
To arrangement, for placing material casket in the material casket card slot 83；The 83 side both side plate of material casket card slot and inclination mounting plate 82
Between there are gap, the width in gap be expect casket height；The casket cylinder 85 that reloads is mounted on the side of inclination mounting plate 82, expects casket
Push plate 86 is mounted on the telescopic end for the casket cylinder 85 that reloads, material 86 height of casket push plate and the bottommost in material casket card slot 83
Material casket match, positioned at material casket side；Substandard products material casket collection box 87 is mounted on the side of inclination mounting plate 82；Only expect component
88 are mounted on the bottom end of inclination mounting plate 82, the direction fed towards workpiece, and the only material component 88 includes only material cylinder 881
With only material block 882, only expect that block 882 is mounted on the telescopic end for only expecting cylinder 881, the cross sectional shape and material for only expecting block 882
The shape of casket is corresponding, resists material casket and glides；The lower snap component 89 include fork transposon 18 91, rotation fork item 892 and under
Drive cylinder 893；Fork transposon 18 91 is fixed on the side wall of material casket card slot 83, and the middle part of rotation fork item 892 and fork item turn
Seat 891 is hinged, and described rotation fork 892 one end of item is provided with the rib of protrusion, this rib is located in material casket, rotation fork item
The telescopic end of 892 other end and lower driving cylinder 893 is hinged, and the fixing end of lower driving cylinder 893 is hinged on material casket card slot
On 83；The upper snap component 810 includes upper driving cylinder 8101 and direct acting pitches item 8102, and direct acting fork item 8102 is mounted on
On the telescopic end for driving cylinder 8101, the upper driving cylinder 8101 is mounted on linking track 812 by connector；It is described
Direct acting fork item 8102 with rotation pitch item 892 height it is corresponding with bottom penultimate material casket.
At work, rejected product is placed in splicing frid 813 the defective products dress case device 8, by gas hole 814
It blows and workpiece is slid into linking track 812, by the linking track 812, and count lowermost end in arrival material casket card slot 83
Material casket in；After expecting to accumulate a certain amount of workpiece in casket, the casket cylinder 85 that reloads is shunk, and drives material casket push plate 86 will most from side
The material casket of the material casket of bottom end is released, and is fallen into substandard products material casket collection box 87；Then upper driving cylinder 8101 drives direct acting to pitch item
8102 exit, and drive rotation fork item 892 to swing with driving cylinder 893 at present, a rib raised on rotation fork item 892 is made to leave material
Casket expects that casket falls at this time, and as supplement, finally only only material block 882 exits the drive of material cylinder 881, withstands material casket.
It is tiny that defective products dress case device 8 solves semiconductor devices, it is difficult to which the problem of collecting is received by setting material casket
On the one hand collection can keep the workpiece after collecting in good order, on the other hand block when avoidable equipment running
Problem；And expects that casket can reload automatically, improve the degree of automation, improve working efficiency；It is provided with when more reloading casket
Upper and lower snap component makes the material casket of lowermost end keep independent, is not influenced by the material casket on upper layer, and the accurate of workpiece filling can be improved
Degree and reliability.
A kind of semiconductor devices detects to obtain by following automatic testing methods.A kind of semiconductor devices is examined automatically
Survey method passes sequentially through following steps and is detected:
(1) workpiece feeding: it is stacked with the material casket equipped with workpiece between two billot caskets limit frid 22, due to being obliquely installed, expects casket
Internal workpiece is slipped in splicing block 27 along arc blanking track 26, is removed by receiving cylinder 28；When in a material casket
After workpiece all skids off, pusher cylinder 24 drives material casket scraping wings 23 mobile, shifts the empty material casket of bottom onto material casket collection box 25
In.
(2) workpiece movement: the independent each suction plate 325 driven on pick-up component 32 of lifting assembly 34 realizes lifting；It inhales
Gas plate 325 is rotated after workpiece is sucked by 31 stepping of divider, in switching, needs correction for direction, suction plate 325 is pressed down at this time
Column 245 pushes, and puts the workpiece in stacker 331, and then suction plate 325 is unclamped, and stepper motor 332 turns to workpiece centainly
Angle after suction plate 325 be sucked again, movement to tooling press from both sides shipping unit 4.
(3) workpiece movement and appearance detection: indexing swivel base 41 drives 42 stepping of turntable to rotate, a complete cycle point 16
Secondary rotation, when placing workpiece, release clamp component 47 at this works, from control cylinder 472 drive release clamp head 473 to
By lever principle, the clamping position of upper end is mutually extended out for upper jack-up internal clamping block 45 and outer fixture block 46, internal clamping block 45 and outer fixture block 46
, workpiece to be detected is put down at this time；It indexes after swivel base 41 rotates, fixture leaves release clamp component 47, internal clamping block 45 and outer
Workpiece is kept clamping by fixture block 46 under the action of the spring, until release clamp component 47 again will when needing to carry blanking
Frock clamp unclamps, and workpiece carries out appearance detection when clamping carrying, by vision inspection apparatus 5.
(4) workpiece movement and the detection of Mark point: release clamp component 47 again unclamps frock clamp, again by suction plate
325 are sucked workpiece, are transported through, and the detection of workpiece surface Mark point is carried out by Mark point detection device 6.
(5) good, secondary product classification: qualified workpiece is placed on punishment in advance pedestal 75, and then material ejection cylinder 73 drives liftout
Block 74 heads into workpiece in the material casket 79 in material casket seat 77, and after a billot casket is filled, switching cylinder 710 drives material casket seat 77
Lifting, to switch material rail；Rejected product is placed in splicing frid 813, is blown by gas hole 814 workpiece sliding into linking track
812, by the linking track 812, and counts and reach in material casket card slot 83 in the material casket of lowermost end；When material casket in accumulate one
After quantitative workpiece, the casket cylinder 85 that reloads is shunk, and is driven material casket push plate 86 to release the material casket of the material casket of lowermost end from side, is fallen
Enter in substandard products material casket collection box 87；Then upper driving cylinder 8101 drives direct acting fork item 8102 to exit, same to drive cylinder 893 at present
It drives rotation fork item 892 to swing, so that a raised rib on rotation fork item 892 is left material casket, expect that casket falls at this time, as supplement,
Finally only only material block 882 exits the drive of material cylinder 881, withstands material casket.
(6) flash detects: workpiece is after the sorting of non-defective unit and substandard products, or exists remaining, is not removed, prevents shadow
It rings equipment to work normally, flash collection box 9 is set after separation process, last pick is carried out to certain workpiece not being removed
It removes.
Claims (10)
1. a kind of semiconductor devices automatic checkout equipment, which is characterized in that the equipment includes rack (1) and is mounted on rack
(1) material casket feeding device (2), handling device (3), tooling folder shipping unit (4), vision inspection apparatus (5) on, the detection of Mark point
Device (6), qualified workpiece dress case device (7), defective products dress case device (8) and flash collection box (9)；Handling device (3) and work
Clamping shipping unit (4) is adjacently positioned, and the height of handling device (3) is higher than tooling folder shipping unit (4)；Expect casket feeding device (2) with
Handling device (3) feed end is mutually connected, corresponding tooling folder shipping unit (4) of vision inspection apparatus (5), Mark point detection device (6)
Corresponding handling device (3)；Qualified workpiece dress case device (7) is provided with multiple groups, is respectively in the side of handling device (3), defective products
Dress case device (8) also is located at the side of handling device (3)；The qualified workpiece of flash collection box (9) and least significant end fills case device (7)
Mutually it is connected, is located at the lower section of handling device (3)；
Expect that casket feeding device (2) are realized for realizing the feeding of individual devices, handling device (3) and tooling folder shipping unit (4)
The carrying of device to be detected, handling device (3) is by suction type, and tooling folder shipping unit (4) is by way of clamping；Vision inspection
The vision-based detection that device (5) are used to carry out element appearance is surveyed, Mark point detection device (6) is used for the Mark point to element surface
Carry out vision-based detection；Qualified workpiece dress case device (7) and defective products dress case device (8) divide workpiece according to the mechanism of detection
Choosing and collection；Flash collection box (9) is for rejecting in handling device (3) not by isolated workpiece.
2. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the material casket feeding
Device (2) includes mounting rack (21), material casket limit frid (22), material casket scraping wings (23), pusher cylinder (24), material casket collection box
(25), arc blanking track (26), splicing block (27) and receiving cylinder (28)；The mounting rack (21) is skewed, material casket
Limit frid (22) is positioned opposite, is fixed on mounting rack (21)；Pusher cylinder (24) is fixed at mounting rack (21)
Side, material casket scraping wings (23) be connected with the telescopic end of pusher cylinder (24), material casket scraping wings (23) be located at material casket limit
The bottom end of frid (22)；Material casket collection box (25) is fixed at the side of mounting rack (21), opposite with material casket scraping wings (23)
It answers；The inner cavity for semiconductor devices circulation, arc blanking track (26) and material casket limit are provided in arc blanking track (26)
The material casket of position frid (22) bottom end is mutually connected；Receiving cylinder (28) is horizontally set on mounting rack (21), splicing block (27) installation
On receiving cylinder (28) telescopic end, it is provided with specific receiving channel on the splicing block (27), for placing semiconductor device
Part.
3. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the handling device
It (3) include divider (31), pick-up component (32), correction for direction component (33), lifting assembly (34) and guard assembly (35)；Institute
The divider (31) stated is mounted on the middle part of rack, is provided with mounting flange on the upper end output shaft of divider (31), described
Mounting flange one week on be evenly arranged with pick-up component (32), the pick-up component (32) is provided with multiple；Absorption group
It is provided with immediately below part (32) correction for direction component (33), the correction for direction component (33) is provided with three groups altogether；Lifting
Component (34) is located at the surface of pick-up component (32), and lifting assembly (34) and pick-up component (32) correspond；Guard assembly
(35) it is mounted on lifting assembly (34), for protecting internal mechanism；The lifting assembly (34) includes folding shape bracket
(341), disk (342), lifting cylinder (343), spoke slat (344) and lower compression leg (245)；Disk (342) by connecting column with
Folding shape bracket (341) is mutually fixedly connected, and spoke slat (344) are provided with immediately below disk (342)；Lifting cylinder (343) are consolidated
Fixed end connection is mounted on disk (342), and the telescopic end of lifting cylinder (343) is connected with lower compression leg (245), the pushing
Mutually certain cooperation, lower compression leg (245) lower end are corresponding with pick-up component (32) with spoke slat (344) for column (245)；The protection
Component (35) includes shield (351), connecting plate (352), protection cylinder (353) and guide post (354)；The protection cylinder
(353) it is vertically installed at the end of folding shape bracket (341), connecting plate (352), which is mounted on, protects cylinder (353) are vertical to stretch
End, guide post (354) are fixed at the bottom of connecting plate (352), and the mobile cooperation of the guide post (354) is in folding shape bracket
(341) on, connecting plate (352) is mutually fixedly connected with the top of shield (351), and the shield (351) is at tubular, side
It is provided with vertical slot.
4. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the tooling presss from both sides fortune
Device (4) includes indexing swivel base (41), turntable (42), fixture base (43), platform for placing material (44), internal clamping block (45), outer fixture block
(46) and release clamp component (47)；Indexing swivel base (41) is fixed on the rack, and the center of turntable (42) is mounted on point
It spends on the output shaft of swivel base (41), the turntable (42) upper periphery is provided with mounting groove, and the mounting groove number is 16
It is a；Fixture base (43) is fixed at one week of turntable (42), the fixture base (43) shape be it is "T"-shaped, it is " T " shaped
Horizontal segment both ends are provided with pillar, are provided with blind round hole in " T " shaped vertical section；Platform for placing material (44) is mounted on fixture base
(43) top, the platform for placing material (44) include placement section and positioning region, and placement section is horizontal planar, and the positioning region is
Two vertical flanges on placement section top；Internal clamping block (45) and outer fixture block (46) are positioned opposite, are rotatably connected on fixture base
(43) on pillar, internal clamping block (45) and outer fixture block (46) are located at the two sides of platform for placing material (44)；The internal clamping block (45)
Including tiltedly pressing from both sides section, vertical section and horizontal segment；It tiltedly presss from both sides section to be obliquely installed, is highly located at the top of platform for placing material (44), tiltedly press from both sides section and erect
Hinge hole is provided on the turning point of straight section, the hinge hole rotates with the pillar on fixture base (43) and connect；It is horizontal
The upper surface of section is provided with short axle, and the short axle cooperates in the blind round hole of fixture base (43), is connected by cylindrical spring
It connects, the cylindrical spring upper end offsets with fixture base (43), and lower end offsets with short axle；Circular arc is provided with below horizontal segment
Fin；The shape of outer fixture block (46) is similar to internal clamping block (45), is provided with idler wheel (461), the rolling on the lower end of outer fixture block (46)
Wheel is in contact with the circular arc fin of internal clamping block (45)；The upper end of the internal clamping block (45) and outer fixture block (46) clamps the height at position
Degree is flush；The release clamp component (47) includes right angle supporting plate (471), control cylinder (472) and release clamp head (473)；
Control cylinder (472) is fixed on the rack vertically by right angle supporting plate (471), and release clamp head (473) is fixed at control gas
The telescopic end of cylinder (472) is provided with small ball on the release clamp head (473), and the ball is corresponding with idler wheel (461), institute
The small ball position stated is located at the underface of idler wheel (461)；The release clamp component (47) is provided with two groups altogether, is located at
Pick up at station when blanking.
5. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the vision-based detection
Corresponding tooling folder shipping unit (4) of device (5), by the lower section of vision inspection apparatus (5), is shone after workpiece is clamped by light source
It is bright, it is then taken pictures by CCD camera, carries out the detection of appearance；The corresponding handling device of the Mark point detection device (6)
(3), by Mark point detection device (6) after workpiece is sucked, semiconductor device surface Mark point is carried out to the following table of workpiece
Carry out detection of taking pictures.
6. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the qualified workpiece
Filling case device (7) includes mounting base (71), material ejection cylinder mounting plate (72), material ejection cylinder (73), ejection block (74), punishment in advance pedestal
(75), punishment in advance cover board (76), material casket seat (77), contact switch (78), material casket (79) and switching cylinder (710)；Punishment in advance pedestal
(75) it is fixed on mounting base (71), punishment in advance cover board (76) is mounted on punishment in advance pedestal (75), forms one between the two
For the cavity that workpiece flows through, material ejection cylinder (73) is mounted on mounting base (71) by material ejection cylinder mounting plate (72) connection, is pushed up
Material block (74) is fixed on the telescopic end of material ejection cylinder (73), the ejection block (74) and punishment in advance pedestal (75) and punishment in advance
Cavity between cover board (76) is corresponding；Described punishment in advance pedestal (75) two sides are provided with infrared sensor (751), based on
Number；Expect casket (79) setting in material casket seat (77), material casket is provided with two up and down, and the described material casket middle part, which is provided with, to concave
Folding line is placed it and is blocked in material casket for the workpiece of specification specific shape；There are two touchings for setting on the material casket seat (77)
Point switch (78), for detecting whether material casket (79) forces home；The material casket seat (77) and switching cylinder (710) stretches
End is connected, and switching cylinder (710) is vertically arranged on mounting base (71).
7. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the defective products dress
Case device (8) includes transition blanking component (81), inclination mounting plate (82), material casket card slot (83), the casket cylinder (85) that reloads, material casket
Push plate (86), substandard products material casket collection box (87), only material component (88), lower snap component (89) and upper snap component (810), transition
In the feed end of inclination mounting plate (82), the transition blanking component (81) includes firm banking for blanking component (81) setting
(811), it is connected track (812), splicing frid (813) and gas hole (814)；Linking track (812) is mounted on firm banking
(811) on, the linking track (812) is in circular arc transition obliquely, and the feed end of linking track (812) is provided with splicing groove
Plate (813), the side of splicing frid (813) are provided with gas hole (814), and the gas hole (814) is by way of air blowing
Workpiece is blown into linking track (812)；Material casket card slot (83) is mounted on the both ends of inclination mounting plate (82), two material casket card slots
(83) positioned opposite；There are gap, the width in gap between material casket card slot (83) the side both side plate and inclination mounting plate (82)
Degree is the height of material casket；The casket cylinder (85) that reloads is mounted on the side of inclination mounting plate (82), and material casket push plate (86), which is mounted on, to be changed
On the telescopic end for expecting casket cylinder (85), material casket phase of the material casket push plate (86) highly with the bottommost in material casket card slot (83)
Matching, positioned at the side of material casket；Substandard products material casket collection box (87) is mounted on the side of inclination mounting plate (82)；Only expect component (88)
It is mounted on the bottom end of inclination mounting plate (82), the direction fed towards workpiece.
8. a kind of semiconductor devices automatic checkout equipment according to claim 1, which is characterized in that the only material component
(88) include only material cylinder (881) and only material block (882), only expect that block (882) are mounted on the telescopic end for only expecting cylinder (881), institute
The only cross sectional shape of material block (882) stated is corresponding with the material shape of casket；The lower snap component (89) includes fork swivel base
(891), rotation fork item (892) and lower driving cylinder (893)；Fork swivel base (891) is fixed at the side of material casket card slot (83)
On wall, middle part and fork swivel base (891) of rotation fork item (892) are hinged, and described rotation fork item (892) one end is provided with convex
The rib risen, this rib are located in material casket, and the other end of rotation fork item (892) and the telescopic end of lower driving cylinder (893) are mutually cut with scissors
It connects, the fixing end of lower driving cylinder (893) is hinged on material casket card slot (83)；The upper snap component (810) includes upper drive
Take offence cylinder (8101) and direct acting fork item (8102), direct acting fork item (8102) be mounted on driving cylinder (8101) telescopic end on,
The upper driving cylinder (8101) is mounted in linking track (812) by connector.
9. a kind of semiconductor devices automatic testing method, which is characterized in that pass sequentially through following steps and detected:
Workpiece feeding: being stacked with the material casket equipped with workpiece between two billot caskets limit frid (22), due to being obliquely installed, expects in casket
The workpiece in portion is slipped in splicing block (27) along arc blanking track (26), is removed by receiving cylinder (28)；When a material casket
In workpiece all skid off after, pusher cylinder (24) drives material casket scraping wings (23) mobile, shifts the empty material casket of bottom onto material casket
In collection box (25)；
Workpiece movement: lifting assembly (34) independently drives each suction plate (325) on pick-up component (32) to realize lifting；Air-breathing
Plate (325) is rotated after workpiece is sucked by divider (31) stepping, in switching, needs correction for direction, at this time suction plate (325) quilt
Lower compression leg (245) pushes, and puts the workpiece in stacker (331), and then suction plate (325) is unclamped, and stepper motor (332) is by work
Suction plate (325) is sucked again after part rotation, and shipping unit (4) are pressed from both sides in movement to tooling；
Workpiece movement and appearance detection: indexing swivel base (41) drives turntable (42) stepping to rotate, and a complete cycle, which divides 16 times, to be turned
Dynamic, when placing workpiece, the release clamp component (47) at this works, and drives release clamp head (473) by control cylinder (472)
Internal clamping block (45) and outer fixture block (46) are jacked up upwards, and internal clamping block (45) and outer fixture block (46) pass through lever principle, the clamping of upper end
It expands outside the phase of position, at this time puts down workpiece to be detected；After indexing swivel base (41) rotation, fixture leaves release clamp component
(47), workpiece is kept clamping by internal clamping block (45) and outer fixture block (46) under the action of the spring, until need to carry blanking when
It waits, release clamp component (47) again unclamps frock clamp, and workpiece is when clamping carrying, by vision inspection apparatus (5)
Carry out appearance detection；
Workpiece movement and the detection of Mark point: release clamp component (47) again unclamps frock clamp, is inhaled again by suction plate (325)
Firmly workpiece is transported through, and the detection of workpiece surface Mark point is carried out by Mark point detection device (6)；
Good, secondary product classification: qualified workpiece is placed on punishment in advance pedestal (75), and then material ejection cylinder (73) drives ejection block
(74) workpiece is headed into the material casket (79) in material casket seat (77), after a billot casket is filled, switching cylinder (710) drives material
Casket seat (77) lifting, to switch material rail；Rejected product is placed in splicing frid (813), is blown by gas hole (814) by workpiece
Linking track (812) is slid into, by the linking track (812), and counts the material for reaching lowermost end in material casket card slot (83)
In casket；After expecting to accumulate a certain amount of workpiece in casket, casket cylinder (85) contraction of reloading drives material casket push plate (86) will most from side
The material casket of the material casket of bottom end is released, and is fallen into substandard products material casket collection box (87)；Then upper driving cylinder (8101) drives direct acting fork
Item (8102) exits, and drives rotation fork item (892) to swing with driving cylinder (893) at present, makes raised on rotation fork item (892)
Rib leaves material casket, expects that casket falls at this time, as supplement, finally only material cylinder (881) drive only material block (882) exit, withstand
Expect casket；
Flash detection: workpiece is after the sorting of non-defective unit and substandard products, or exists remaining, is not removed, sets after separation process
Flash collection box (9) are set, last rejecting is carried out to the workpiece not being removed.
10. a kind of semiconductor devices, it is characterised in that detect to obtain by automatic testing method as claimed in claim 9.
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| CN201910529540.1A CN110252673A (en) | 2019-06-19 | 2019-06-19 | A kind of semiconductor devices and its automatic testing method and equipment |
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| CN111348238A (en) * | 2020-03-24 | 2020-06-30 | 周俊英 | Inductor carrying device and method for inductor detection packaging equipment |
| CN111348236A (en) * | 2020-03-24 | 2020-06-30 | 周俊英 | Inductor and detection packaging equipment and method thereof |
| CN111348245A (en) * | 2020-03-24 | 2020-06-30 | 周俊英 | Inductor feeding device and method for inductor detection packaging equipment |
| CN113884559A (en) * | 2021-10-27 | 2022-01-04 | 山东钢铁集团日照有限公司 | Continuous annealing and for galvanized steel sheet application pretreatment and electrophoresis test device |
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| CN115980401A (en) * | 2022-12-22 | 2023-04-18 | 杭州朗迅科技股份有限公司 | Automatic testing device based on down-pressure SOP test seat |
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| CN111348237A (en) * | 2020-03-24 | 2020-06-30 | 周俊英 | Annular machining device of inductance detection packaging equipment |
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| CN111348245A (en) * | 2020-03-24 | 2020-06-30 | 周俊英 | Inductor feeding device and method for inductor detection packaging equipment |
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| CN114235843A (en) * | 2022-02-25 | 2022-03-25 | 深圳市赛元微电子有限公司 | Defect detection device and method for semiconductor chip |
| CN115980401A (en) * | 2022-12-22 | 2023-04-18 | 杭州朗迅科技股份有限公司 | Automatic testing device based on down-pressure SOP test seat |
| CN115980401B (en) * | 2022-12-22 | 2023-08-29 | 杭州朗迅科技股份有限公司 | Automatic testing device based on down-pressure SOP test seat |
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Application publication date: 20190920 |