CN109625961A - Rotating disc type IC chip handling device vacuum distribution module and handling device - Google Patents
Rotating disc type IC chip handling device vacuum distribution module and handling device Download PDFInfo
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- CN109625961A CN109625961A CN201910072024.0A CN201910072024A CN109625961A CN 109625961 A CN109625961 A CN 109625961A CN 201910072024 A CN201910072024 A CN 201910072024A CN 109625961 A CN109625961 A CN 109625961A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
Abstract
The invention discloses a kind of rotating disc type IC chip handling device vacuum distribution module, including vacuum chuck, the vacuum chuck is equipped with several push-type vacuum sucking pens, and the vacuum WAND is circumferentially uniformly distributed along vacuum chuck, and suction inlet is downward；The upside of vacuum chuck is equipped with vacuum distribution bin, and the vacuum distribution bin is connected to by tracheae with each vacuum WAND.Evenly distributing for each vacuum WAND vacuum degree can be realized by the vacuum distribution module of the application, and keeps the vacuum degree reached in each vacuum WAND higher.A kind of rotating disc type IC chip handling device, including table servo motor, vacuum warehouse mounting plate, independent press mechanism and above-mentioned vacuum distribution module is also disclosed, which can guarantee the high accuracy positioning of turntable chip in high-speed cruising.
Description
Technical field
The present invention relates to IC chip test equipment, and in particular to a kind of rotating disc type IC chip handling device
With vacuum distribution module and handling device.
Background technique
Rotating disc type integrated circuit testing and sorting device is the critical equipment in hyundai electronics manufacturing industry later process, is had
Speed is fast, and the efficiency of separation is high, and function integrates the advantages that powerful.Wherein vacuum distribution module be complete chip pick and place, test and most
The critical component of finished product output.Chip needs that corresponding function could be completed after being accurately positioned when reaching each station, with
The development of advanced, high-end encapsulation technology, the new packing forms of IC chip are smaller and smaller, to integrated circuit testing and sorting
The requirement of the accuracy and speed of equipment is also higher and higher.Existing integrated circuit testing and sorting equipment is in vacuum chuck high-speed cruising
When, since vacuum unreasonable distribution causes vacuum degree in operational process too small, cause chip the phenomenon that shifting on suction nozzle
There is generation, the chip to shift cannot be accurately positioned after reaching each station, carry out operation in next step and constantly often result in core more
The damage of piece and the abrasion of equipment.
Summary of the invention
In order to solve in the prior art since vacuum unreasonable distribution leads to chip positioning inaccuracy to cause chip to damage
The technical issues of bad and equipment attrition, the present inventor devises a kind of vacuum distribution module, can make to reach each vacuum
Vacuum degree in sucking pen is higher, when being used for rotating disc type IC chip handling device, it is ensured that turntable is in high-speed cruising
The high accuracy positioning of chip.
The first technical solution that the present invention uses is: a kind of rotating disc type IC chip handling device vacuum distribution mould
Block, including vacuum chuck, the vacuum chuck are equipped with several movable vacuum WANDs, and the vacuum WAND is along vacuum chuck week
To being uniformly distributed, suction inlet is downward；The upside of vacuum chuck is equipped with vacuum distribution bin, and the vacuum distribution bin passes through tracheae and each true
The connection of suction pen；The vacuum distribution bin includes vacuum warehouse upper cover plate and vacuum warehouse lower cover plate, and vacuum warehouse upper cover plate is equipped with several
Through the first vacuum through holes of plate thickness, first vacuum through holes are uniformly distributed along vacuum Hatch Board circumferencial direction；Under vacuum warehouse
Cover board is equipped with the second vacuum through holes, and the duct l-shaped of the second vacuum through holes is made of, vertical holes vertical duct and horizontal hole
The upper end in road extends to the upper surface of vacuum warehouse lower cover plate and the first vacuum through holes correspond；Horizontal hole is along vacuum warehouse lower cover
The radially uniform distribution of plate, end extend to the outer peripheral surface of vacuum warehouse lower cover plate；Vacuum warehouse upper cover plate and vacuum warehouse lower cover plate turn
Dynamic sealing connection, vacuum warehouse lower cover plate are fixedly connected with vacuum chuck；Vacuum warehouse upper cover plate, vacuum warehouse lower cover plate and vacuum chuck
Central part be axially arranged with one-to-one central through hole.
The second technical solution that the present invention uses is the improvement in the first technical solution, the second technology that the present invention uses
Scheme is: first vacuum through holes are up-small and down-big ladder hole, and the vertical duct of second vacuum through holes is presented greatly
Under it is small ladder-like, the macropore of two stepped holes is opposite.Junction hole area is larger, when rotational positioning can be reduced because upper lower opening not
To just and caused by gas flow area is smaller, the vacuum degree deficiency at vacuum WAND.
The third technical solution that the present invention uses is the improvement in first or second technical solution, the present invention use
Three technical solutions are: the air inlet of the first vacuum through holes of vacuum warehouse upper cover plate and the gas outlet of the second vacuum through holes are equipped with tracheae
Connector.Installation and maintenance are facilitated to safeguard.
The 4th technical solution that the present invention uses is the improvement in the first technical solution, the 4th technology that the present invention uses
Scheme is: the vacuum warehouse further includes vacuum warehouse connecting plate, and vacuum warehouse connecting plate is logical equipped with several third vacuum through plate thickness
The vertical ducts of hole and connecting plate mounting hole, third vacuum through holes and the second vacuum through holes corresponds, connecting plate mounting hole with
The central through hole of vacuum warehouse lower cover plate is corresponding；Vacuum warehouse connecting plate is connected by screw to vacuum warehouse lower cover plate and is integrated, vacuum
Storehouse connecting plate is connect with vacuum warehouse upper cover plate rotary seal, and vacuum warehouse connecting plate is made of high molecular abrasion-proof self-lubricating material,
Vacuum warehouse upper cover plate is made using Cr12MoV and is carried out being heat-treated to HRC60.Vacuum warehouse upper cover plate uses high hardness wear-resisting material
Material, bonding in vacuum plate use macromolecule self-lubricating wear-resistant material, and the two cooperation rotation, sealing performance is high, prevents gas leakage from reducing true
Vacuum degree at suction pen.
The 5th technical solution that the present invention uses is the improvement in the 4th technical solution, the 5th technology that the present invention uses
Scheme is made of: the vacuum warehouse lower cover plate inlays facing using aluminum alloy materials, the threaded hole of connecting plate.Using aluminium alloy material
Material can reduce component weight, and hole machined is easy.Threaded hole, which inlays facing, can guarantee the intensity being threadedly coupled.
The 6th technical solution that the present invention uses is the improvement in the 4th technical solution, the 6th technology that the present invention uses
Scheme is: first vacuum through holes are up-small and down-big ladder hole, and the third vacuum through holes are up big and down small ladder
The macropore of through-hole, two stepped holes is opposite.Junction hole area is larger, and when rotational positioning can be reduced because upper lower opening is not to just making
At gas flow area is smaller, the vacuum degree deficiency at vacuum WAND.
The 7th technical solution that the present invention uses is the improvement in the first technical solution, the 7th technology that the present invention uses
Scheme is: the vacuum WAND includes sucking pen, sucking pen limited block, sucking pen grip block and reset spring；Sucking pen limited block is mounted on
The downside of vacuum chuck, sucking pen grip block are connect by guide post with sucking pen limited block, and it is logical that sucking pen grip block is equipped with first
Stomata, first venthole are connected to tracheae；Sucking pen is movable to be set in sucking pen grip block, and vacuum chamber and the are equipped in sucking pen
Two ventholes, the second venthole are communicated with vacuum chamber；The presence or absence of vacuum and pneumatics are divided by electromagnetism Vavle switching from vacuum in sucking pen
Distribution Warehouse obtains.The structure of the vacuum WAND is simple, reliable performance.
The 8th technical solution that the present invention uses: a kind of rotating disc type IC chip handling device, including table servo
Motor, vacuum warehouse mounting plate, independent press mechanism, and the vacuum distribution module as described in claim 1~7 any one；Turn
The center of platform servo motor is equipped with fixing axle, and fixing axle passes through vacuum chuck, the central through hole of vacuum distribution bin and vacuum warehouse and pacifies
Loading board is fixedly connected, and vacuum warehouse mounting plate is equipped with solenoid valve block, and solenoid valve block is for vacuum warehouse and external vacuum system and sky
The switching of pressure system connects, and the rotor of servo motor is fixedly connected with driving vacuum chuck with vacuum chuck and does 360 ° of rotations, independent
Press mechanism is mounted on vacuum warehouse mounting plate, down-pressed pole face vacuum WAND, under independent press mechanism driving vacuum WAND
Pressure.
Servo motor driving vacuum spin chuck does 360 ° of rotations, and the rotational angle for controlling servo motor can position each vacuum
The position of sucking pen；External vacuum system and air compression system are connected to solenoid valve block respectively, solenoid valve block by the vacuum degree of input or
Compressed air is evenly distributed into vacuum distribution bin, then each vacuum WAND to vacuum chuck is evenly distributed by tracheae.
When work, external vacuum system is connect by solenoid valve block with the air inlet of vacuum distribution bin first, starts vacuum system, servo
Motor driven vacuum turntable rotation, when turn to independent press mechanism it is just opposite with vacuum WAND when, vacuum warehouse upper cover plate
Second through-hole all-pass of first through hole and vacuum warehouse lower cover plate, stops servo motor, and vacuum is input to very by vacuum distribution bin
Suction pen, independent press mechanism driving vacuum WAND push, and vacuum WAND adsorbs a piece of chip；Servo motor restarting drives
Vacuum spin chuck continues to rotate, and the vacuum degree in vacuum WAND remains unchanged, and vacuum spin chuck drives vacuum WAND absorption chip to reach
Next station is switched to air compression system by solenoid valve block after completion relevant work and connect with the air inlet of vacuum distribution bin,
Compressed air enters vacuum WAND by vacuum distribution bin, and the vacuum degree in vacuum WAND is broken, and chip falls into designated position.
The 9th technical solution that the present invention uses is the improvement in the 8th technical solution, the 9th technology that the present invention uses
Scheme is: the vacuum warehouse upper cover plate of the vacuum distribution module is fixedly connected by two positioning pins with vacuum warehouse mounting plate, very
Spiral compression spring is equipped between hole capital after selling all securities upper cover plate and vacuum warehouse mounting plate, one end of spiral compression spring is installed against vacuum warehouse
The downside of plate, the other end is against vacuum warehouse upper cover plate.Positioning pin can further limit the rotation of vacuum warehouse upper cover plate, guarantee true
The effect that cut-in without ball is changed.Make vacuum warehouse upper and lower lids or vacuum warehouse upper cover plate and vacuum warehouse connecting plate tight under the support of spring force
Closely connected conjunction guarantees rotatory sealing effect.
The tenth technical solution that the present invention uses is the improvement in the 8th technical solution, the tenth technology that the present invention uses
Scheme is: the independent press mechanism includes bracket, cam, down-pressed pole and pushes servo motor, pushes servo motor and passes through branch
Frame is fixed on vacuum warehouse mounting plate, and the output shaft for pushing servo motor is fixedly connected with cam, and down-pressed pole is movable to be mounted on
On bracket, the top surface of down-pressed pole and the surface of revolution of cam are fitted and connected, and servo motor drives cam rotation, cam driven down-pressed pole
Do linear motion up and down.Independent press mechanism structure is simple, reliable performance.
Beneficial effects of the present invention:
1, evenly distributing for each vacuum WAND vacuum degree can be realized by the vacuum distribution module of the application, and makes to reach every
Vacuum degree in one vacuum WAND is higher.
2, when the vacuum distribution module of the application is used for rotating disc type IC chip handling device, it is ensured that turntable is in height
The high accuracy positioning of chip when speed operation.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment 1 of vacuum distribution module of the present invention.
Fig. 2 is the schematic perspective view of the vacuum warehouse of the embodiment 1 of vacuum distribution module of the present invention.
Fig. 3 is the cross-sectional view of Fig. 2.
Fig. 4 is the structural schematic diagram of the vacuum WAND of the embodiment 1 of vacuum distribution module of the present invention.
Fig. 5 is the structural schematic diagram of the sucking pen of the vacuum WAND of the embodiment 1 of vacuum distribution module of the present invention.
Fig. 6 is provided with the structure of the rotating disc type IC chip handling device of vacuum distribution module described in embodiment 1
Schematic diagram.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing and a kind of preferred reality
Mode is applied technical solution of the present invention is clearly and completely described.
Embodiment 1
Refering to fig. 1, a kind of rotating disc type IC chip handling device vacuum distribution module, including vacuum chuck 2.1,
Several movable vacuum WANDs 2.2, with vacuum WAND several tracheaes 2.3 and vacuum distribution bin 3 correspondingly.Vacuum WAND
2.2 are circumferentially uniformly distributed along vacuum chuck, and suction inlet is downward；The upside of vacuum chuck is equipped with vacuum distribution bin 3, the vacuum distribution
Storehouse is connected to by tracheae 2.3 with each vacuum WAND 2.2.In the present embodiment, it is equipped with 10 vacuum WANDs altogether.
Refering to Fig. 4 and Fig. 5, vacuum WAND 2.2 include sucking pen 2.21, sucking pen limited block 2.22, sucking pen grip block 2.25, on
Spring retainer block 2.241, lower spring retainer block 2.242 and reset spring 2.24.One end of sucking pen limited block 2.22 passes through screw
It is mounted on the outer edge of the downside of vacuum chuck 2.1, sucking pen grip block 2.25 passes through guide post 2.23 and sucking pen limited block
2.22 other end connection, sucking pen grip block 2.25 are equipped with the first venthole 2.251, and the first venthole 2.251 is equipped with gas
Pipe fitting, the first venthole 2.251 are connected to by gas-tpe fitting with tracheae 2.3.Lower spring retainer block 2.242 is mounted on sucking pen limit
The upper side of position block 2.22, the center portion thereof is axially through equipped with sucking pen sliding eye.Sucking pen 2.21 includes pressing lever 2.211 and nib
2.212, pressing lever 2.211 is in oval column, and the central part of lower end is axially arranged with accommodating cavity, and the side wall of accommodating cavity radially penetrates through
Equipped with the second venthole 2.2111, the outer circumference surface of the lower end of pressing lever projects radially outwardly to form widened limiting section.Nib
2.212 upper end is contained in accommodating cavity and is equipped with cavity, the cavity and the second venthole between written upper end and accommodating cavity
2.2111 communicate, and nib 2.212 is connect with pressing lever 2.211 by pin.Nib 2.212 central part be equipped with axially through
Vacuum chamber 2.2121, vacuum chamber is communicated with accommodating cavity.The upper end of sucking pen 2.21 slides through lower spring retainer block 2.242, sucking pen
The upper side of the limiting section of pressing lever 2.211 is successively set with against the downside of sucking pen grip block 2.25 in 2.21 upper end of sucking pen
Reset spring 2.24 and upper spring limited block 2.241, upper spring limited block 2.241 are fixed by screws in the top of sucking pen, multiple
The upper end of position spring 2.24 is against upper spring limited block 2.241, and lower end is against lower spring retainer block 2.242.Sucking pen 2.21 is pressed,
Reset spring 2.24 compresses, and the first venthole 2.251 is connected to the second venthole 2.2111；Loosen sucking pen 2.21, reset spring
2.24 elongations, the second venthole 2.2111 are blocked by sucking pen grip block 2.25.
Refering to Fig. 2 and Fig. 3, vacuum distribution bin 3 includes under vacuum warehouse upper cover plate 3.3, vacuum warehouse connecting plate 3.2 and vacuum warehouse
Cover board 3.1.Vacuum warehouse upper cover plate 3.3 is in flattened cylindrical shape, is made of Cr12MoV and carries out being heat-treated to HRC60.Vacuum warehouse
The central part of upper cover plate 3.3 is axially arranged with the first central through hole 3.31, and it is true to be axially arranged with several first around the first central through hole
Empty through-hole 3.33, the first vacuum through holes 3.33 are uniformly distributed along vacuum Hatch Board circumferencial direction.In the present embodiment, the first vacuum
Through-hole 3.33 is up-small and down-big ladder hole, is equipped with 10 altogether.Vacuum warehouse lower cover plate 3.1 is in flattened cylindrical shape, is closed using aluminium
Golden material is made.The central part of vacuum warehouse lower cover plate 3.1 is axially arranged with the second central through hole 3.11, the second central through hole 3.11 with
First central through hole 3.31 is corresponding and diameter is equal；Several second vacuum through holes, the second vacuum are equipped with around the second central through hole
The aperture of through-hole is equal with the small aperture of the first vacuum through holes.The duct l-shaped of second vacuum through holes, by vertical duct 3.13
And horizontal hole 3.12 forms, the upper end in vertical duct 3.13 extends to upper surface and the first vacuum through holes of vacuum warehouse lower cover plate
3.33 corresponding；Horizontal hole 3.12 extends to vacuum warehouse lower cover plate along the radially uniform distribution of vacuum warehouse lower cover plate, end
Outer peripheral surface.Vacuum warehouse connecting plate 3.2 is in up-small and down-big ladder circle column, is made of high molecular abrasion-proof self-lubricating material.
The central part of vacuum warehouse connecting plate 3.2 is axially arranged with third central through hole 3.21, and third central through hole 3.21 and the second center are logical
Hole 3.11 is corresponding and diameter is equal；Several third vacuum through holes 3.22 are axially arranged with around third central through hole, and third vacuum is logical
Hole 3.22 is uniformly distributed along vacuum warehouse connecting plate circumferencial direction and corresponds with the first vacuum through holes 3.33.In the present embodiment
In, third vacuum through holes 3.22 are up big and down small ladder hole, the macropore diameter of ladder hole and the first vacuum through holes 3.33
Ladder hole macropore diameter it is equal, the aperture of the ladder hole of the small aperture of ladder hole and the first vacuum through holes 3.33
Aperture is equal.Vacuum warehouse connecting plate 3.2 is connected by screw to vacuum warehouse lower cover plate 3.1 and is integrated, third vacuum through holes 3.22
With vertical duct 3.13 penetrate through, third central through hole 3.21 and the second central through hole 3.11 perforation.Vacuum warehouse connecting plate 3.2
Screw thread hole portion uses steel facing.The upper end of vacuum warehouse connecting plate 3.2 can reduce high molecular abrasion-proof material using the rotary table portion reduced
The dosage of material reduces manufacturing cost, and reduces rubbing surface, makes to rotate more flexible.
In the present embodiment, the hole inner wall of the upper end of the first central through hole 3.31 of vacuum warehouse upper cover plate 3.3 is radially-inwardly
Recess forms widened counterbore, installs spiral compression spring 3.5 in the counterbore.The import and second of first vacuum through holes 3.33
The outlet of the horizontal hole 3.12 of vacuum through holes connects hose coupling 3.4,3.7.Symmetrical spiral shell sets two on vacuum warehouse upper cover plate 3.3
Screw rod 3.6.Screw rod is used for the connection of vacuum warehouse upper cover plate and mounting plate, and spiral compression spring is for limiting vacuum warehouse upper cover plate
Upper and lower play makes it form rotary seal between vacuum warehouse connecting plate and connect, to guarantee the vacuum degree of vacuum WAND.
Embodiment 2
Refering to Fig. 6, a kind of rotating disc type IC chip handling device, including table servo electricity, 1, vacuum warehouse mounting plate
4, vacuum distribution module described in solenoid valve block 5, independent press mechanism 6 and embodiment 1.
Table servo motor 1 is vertically arranged by its pedestal 1.1.The center of table servo motor 1 is equipped with fixing axle, fixed
It is logical that axis passes through vacuum chuck 2.1, the second central through hole of vacuum warehouse lower cover plate 3.11, vacuum warehouse connecting plate third center upwards in turn
Hole 3.21, the first central through hole of vacuum warehouse upper cover plate 3.31 and spiral compression spring 3.5 are fixedly connected with vacuum warehouse mounting plate 4,
The rotor of servo motor 1 is fixedly connected with vacuum chuck 2.1, and vacuum warehouse mounting plate 4 and vacuum warehouse upper cover plate 3.3 pass through screw rod
3.6 are fixedly connected, and the upper end of spiral compression spring 3.5 is against the downside of vacuum warehouse mounting plate 4, and lower end is against vacuum warehouse upper cover
The upper side of plate 3.3.Table servo motor 1 drives vacuum chuck 2.1 to rotate, vacuum warehouse upper cover plate 3.3 and vacuum warehouse connecting plate
3.2 rotary seals connection.
The upper side of vacuum warehouse mounting plate 4 be equipped with solenoid valve block 5, solenoid valve block 5 be equipped with 10 outlet, respectively with 10 gas
Pipe fitting 3.4 connects one to one, and solenoid valve block 5 is equipped with two groups of imports, and one group connect with vacuum system, and another group empty with compression
The connection of gas system, switching of the solenoid valve block 5 for vacuum warehouse 3 and external vacuum system and external air compression system.
Independent press mechanism 6 is mounted on vacuum warehouse mounting plate 4, down-pressed pole face vacuum WAND 2.2, independent lower press
Structure 6 drives vacuum WAND 2.2 to push absorption chip.Independent press mechanism 6 includes bracket, cam, down-pressed pole and pushes servo electricity
Machine pushes servo motor and is fixed by the bracket on vacuum warehouse mounting plate, pushes output shaft and the fixed company of cam of servo motor
It connects, down-pressed pole is movable rack-mount, and the top surface of down-pressed pole and the surface of revolution of cam are fitted and connected, and servo motor driving is convex
Wheel rotation, cam driven down-pressed pole do linear motion up and down.
The working principle of embodiment 2 are as follows:
Servo motor 1 drive vacuum spin chuck 2.1 do 360 ° of rotations, control servo motor rotational angle can position it is each
The position of vacuum WAND 2.2；External vacuum system and air compression system pass through tracheae respectively and two groups of imports of solenoid valve block 5 connect
Logical, 10 outlets of solenoid valve block 5 are connected to by tracheae with 10 air inlets of vacuum distribution bin 3, and solenoid valve block 5 is by input
Vacuum degree or compressed air are evenly distributed into vacuum distribution bin 3, then by tracheae 2.3 evenly distribute it is each to vacuum chuck
In a vacuum WAND 2.2.
When work, external vacuum system is connect by solenoid valve block 5 with the air inlet of vacuum distribution bin 3 first, and starting is true
Empty set system, servo motor 1 drive vacuum spin chuck 2.1 rotate, when turn to independent press mechanism 6 just with a vacuum WAND
2.1 it is opposite when, servo motor 1 stops operating；Vacuum transtracheal connector 3.4, the first vacuum through holes 3.33, third vacuum through holes
3.22, the second vacuum through holes 3.11, gas-tpe fitting 3.7, tracheae 2.3 are transmitted in the first venthole 2.251 of sucking pen grip block,
Independent press mechanism 5 drives vacuum WAND 2.2 to push, and the second venthole 2.2111 of sucking pen is connected to the first venthole 2.251,
Vacuum chamber 2.2121 adsorbs a piece of chip.
Servo motor 1 restarts, and vacuum spin chuck 2.1 is driven to continue to rotate, and the vacuum degree in vacuum WAND 2.2 is kept not
Become, vacuum spin chuck 2.1 drives vacuum WAND absorption chip to reach next station, passes through solenoid valve block 5 after completing relevant work
It is switched to air compression system to connect with the air inlet of vacuum distribution bin, compressed air enters vacuum WAND by vacuum distribution bin 3
2.2, the vacuum degree in vacuum WAND is broken, and chip falls into designated position.
Not doing the part illustrated in above instructions is the prior art, or has both been able to achieve by the prior art.
Claims (10)
1. a kind of rotating disc type IC chip handling device vacuum distribution module, including vacuum chuck, which is characterized in that institute
Vacuum chuck is stated equipped with several push-type vacuum sucking pens, the vacuum WAND is circumferentially uniformly distributed along vacuum chuck, suction inlet court
Under；The upside of vacuum chuck is equipped with vacuum distribution bin, and the vacuum distribution bin is connected to by tracheae with each vacuum WAND；It is described true
Space division Distribution Warehouse includes vacuum warehouse upper cover plate and vacuum warehouse lower cover plate, and vacuum warehouse upper cover plate is equipped with several the first vacuum through plate thickness
Through-hole, first vacuum through holes are uniformly distributed along vacuum Hatch Board circumferencial direction；Vacuum warehouse lower cover plate is logical equipped with the second vacuum
Hole, the duct l-shaped of the second vacuum through holes, is made of vertical duct and horizontal hole, and the upper end in vertical duct extends to vacuum
The upper surface of storehouse lower cover plate and the first vacuum through holes correspond；Horizontal hole along the radially uniform distribution of vacuum warehouse lower cover plate,
End extends to the outer peripheral surface of vacuum warehouse lower cover plate；Vacuum warehouse upper cover plate is connect with vacuum warehouse lower cover plate rotary seal, vacuum warehouse
Lower cover plate is fixedly connected with vacuum chuck；The central part of vacuum warehouse upper cover plate, vacuum warehouse lower cover plate and vacuum chuck is axially arranged with
One-to-one central through hole.
2. vacuum distribution module as described in claim 1, which is characterized in that first vacuum through holes are up-small and down-big rank
Terraced through-hole, the vertical duct of second vacuum through holes present it is big under it is small ladder-like, the macropore of two stepped holes is opposite.
3. vacuum distribution module as claimed in claim 1 or 2, which is characterized in that the first vacuum through holes of vacuum warehouse upper cover plate
Air inlet and the second vacuum through holes gas outlet be equipped with gas-tpe fitting.
4. vacuum distribution module as described in claim 1, which is characterized in that the vacuum warehouse further includes vacuum warehouse connecting plate,
Vacuum warehouse connecting plate is equipped with several third vacuum through holes and connecting plate mounting hole through plate thickness, and third vacuum through holes and second are very
The vertical duct of empty through-hole corresponds, and connecting plate mounting hole is corresponding with the central through hole of vacuum warehouse lower cover plate；Vacuum warehouse connection
Plate is connected by screw to vacuum warehouse lower cover plate and is integrated, and vacuum warehouse connecting plate is connect with vacuum warehouse upper cover plate rotary seal, very
Hole capital after selling all securities connecting plate is made of high molecular abrasion-proof self-lubricating material, and vacuum warehouse upper cover plate is made using Cr12MoV and is carried out hot place
It manages to HRC60.
5. vacuum distribution module as claimed in claim 4, which is characterized in that the vacuum warehouse lower cover plate uses aluminum alloy materials
It is made, the threaded hole of connecting plate inlays steel facing.
6. vacuum distribution module as claimed in claim 4, which is characterized in that first vacuum through holes are up-small and down-big rank
Terraced through-hole, the third vacuum through holes are up big and down small ladder hole, and the macropore of two stepped holes is opposite.
7. vacuum distribution module as described in claim 1, which is characterized in that the vacuum WAND includes sucking pen, sucking pen limit
Block, sucking pen grip block and reset spring；Sucking pen limited block is mounted on the downside of vacuum chuck, and sucking pen grip block passes through guide post
It is connect with sucking pen limited block, sucking pen grip block is equipped with the first venthole, and first venthole is connected to tracheae；Sucking pen can live
It is dynamic to be set in sucking pen grip block, vacuum chamber and the second venthole are equipped in sucking pen, the second venthole is communicated with vacuum chamber；In sucking pen
The presence or absence of vacuum and pneumatics are obtained by electromagnetism Vavle switching from vacuum distribution bin.
8. a kind of rotating disc type IC chip handling device, which is characterized in that installed including table servo motor, vacuum warehouse
Plate, independent press mechanism, and the vacuum distribution module as described in claim 1~7 any one；The center of table servo motor
Equipped with fixing axle, fixing axle passes through vacuum chuck, the central through hole of vacuum distribution bin is fixedly connected with vacuum warehouse mounting plate, vacuum
Storehouse mounting plate is equipped with solenoid valve block, and solenoid valve block is connect for vacuum warehouse with the switching of external vacuum system and air compression system,
The rotor of servo motor is fixedly connected with driving vacuum chuck with vacuum chuck and does 360 ° of rotations, and independent press mechanism is mounted on vacuum
On the mounting plate of storehouse, down-pressed pole face vacuum WAND, independent press mechanism driving vacuum WAND is pushed.
9. handling device as claimed in claim 8, which is characterized in that the vacuum warehouse upper cover plate of the vacuum distribution module passes through
Two positioning pins are fixedly connected with vacuum warehouse mounting plate, and helical compression bullet is equipped between vacuum warehouse upper cover plate and vacuum warehouse mounting plate
Spring, one end of spiral compression spring is against the downside of vacuum warehouse mounting plate, and the other end is against vacuum warehouse upper cover plate.
10. handling device as claimed in claim 8, which is characterized in that the independent press mechanism include bracket, cam, under
Compression bar and pushing servo motor, push servo motor and are fixed by the bracket on vacuum warehouse mounting plate, push the defeated of servo motor
Shaft is fixedly connected with cam, and down-pressed pole is movable rack-mount, and the top surface of down-pressed pole is bonded company with the surface of revolution of cam
It connects, servo motor drives cam rotation, and cam driven down-pressed pole does linear motion up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910072024.0A CN109625961A (en) | 2019-01-25 | 2019-01-25 | Rotating disc type IC chip handling device vacuum distribution module and handling device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910072024.0A CN109625961A (en) | 2019-01-25 | 2019-01-25 | Rotating disc type IC chip handling device vacuum distribution module and handling device |
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| CN109625961A true CN109625961A (en) | 2019-04-16 |
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| CN201910072024.0A Pending CN109625961A (en) | 2019-01-25 | 2019-01-25 | Rotating disc type IC chip handling device vacuum distribution module and handling device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110228709A (en) * | 2019-06-19 | 2019-09-13 | 杭州众道光电科技有限公司 | A kind of the tooling folder shipping unit and substep flow system of semiconductor devices |
| CN110316562A (en) * | 2019-06-20 | 2019-10-11 | 无锡卡罗特精密机械制造有限公司 | A kind of carrying positioning device of rotating disc type power chip |
| CN113387180A (en) * | 2021-07-30 | 2021-09-14 | 博众精工科技股份有限公司 | Snatch handling device |
| CN114044354A (en) * | 2021-09-30 | 2022-02-15 | 东南大学 | Double-end absorption formula electronic circuit board feeding mechanism |
| CN115626507A (en) * | 2022-12-01 | 2023-01-20 | 常州市武进天龙发展有限公司 | Optical diaphragm adsorbs formula conveyor |
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| CN110228709A (en) * | 2019-06-19 | 2019-09-13 | 杭州众道光电科技有限公司 | A kind of the tooling folder shipping unit and substep flow system of semiconductor devices |
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| CN110316562A (en) * | 2019-06-20 | 2019-10-11 | 无锡卡罗特精密机械制造有限公司 | A kind of carrying positioning device of rotating disc type power chip |
| CN113387180A (en) * | 2021-07-30 | 2021-09-14 | 博众精工科技股份有限公司 | Snatch handling device |
| CN114044354A (en) * | 2021-09-30 | 2022-02-15 | 东南大学 | Double-end absorption formula electronic circuit board feeding mechanism |
| CN115626507A (en) * | 2022-12-01 | 2023-01-20 | 常州市武进天龙发展有限公司 | Optical diaphragm adsorbs formula conveyor |
| CN116900416A (en) * | 2023-09-14 | 2023-10-20 | 溧阳市腾新机电设备有限公司 | Bevel gear grinding machine tool |
| CN116900416B (en) * | 2023-09-14 | 2023-12-05 | 溧阳市腾新机电设备有限公司 | Bevel gear grinding machine tool |
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